id	sid	eid	entity	type
ispiv-102	1	1	14th	ORDINAL
ispiv-102	1	2	2021	CARDINAL
ispiv-102	1	3	2021	CARDINAL
ispiv-102	1	4	i. litvinov1,2∗	PERSON
ispiv-102	1	5	d. sharaborin1,2	PERSON
ispiv-102	1	6	s. shtork1,2	PERSON
ispiv-102	1	7	s. alekseenko1,2	PERSON
ispiv-102	1	8	kilian oberleithner	PERSON
ispiv-102	1	9	3 1	CARDINAL
ispiv-102	1	10	kutateladze institute of thermophysics	ORG
ispiv-102	1	11	novosibirsk	GPE
ispiv-102	1	12	russia	GPE
ispiv-102	1	13	2	CARDINAL
ispiv-102	1	14	novosibirsk state university	ORG
ispiv-102	1	15	novosibirsk	GPE
ispiv-102	1	16	russia	GPE
ispiv-102	1	17	3 technische universität berlin	PERCENT
ispiv-102	1	18	berlin	GPE
ispiv-102	1	19	germany	GPE
ispiv-102	1	20	∗	CARDINAL
ispiv-102	3	1	2012	DATE
ispiv-102	6	1	second	ORDINAL
ispiv-102	7	1	litvinov	GPE
ispiv-102	8	1	2018	DATE
ispiv-102	9	1	francis-99	DATE
ispiv-102	9	2	cervantes et al	PERSON
ispiv-102	10	1	2015	DATE
ispiv-102	11	1	100 mm	QUANTITY
ispiv-102	13	1	litvinov	NORP
ispiv-102	14	1	2018	DATE
ispiv-102	16	1	48.5 l/s	MONEY
ispiv-102	16	2	nc	GPE
ispiv-102	17	1	40.5	CARDINAL
ispiv-102	18	1	1.5%	PERCENT
ispiv-102	18	2	0.5%	PERCENT
ispiv-102	19	1	qc	GPE
ispiv-102	20	1	1	CARDINAL
ispiv-102	23	1	less than 1 mm	QUANTITY
ispiv-102	24	1	70	CARDINAL
ispiv-102	25	1	ccd	PRODUCT
ispiv-102	26	1	4904x3280	CARDINAL
ispiv-102	27	1	two	CARDINAL
ispiv-102	27	2	30µs	DATE
ispiv-102	29	1	four	CARDINAL
ispiv-102	29	2	64×64 to 16×16	CARDINAL
ispiv-102	30	1	50%	PERCENT
ispiv-102	30	2	0.5 mm	QUANTITY
ispiv-102	30	3	four	CARDINAL
ispiv-102	30	4	1	CARDINAL
ispiv-102	32	1	20 khz	QUANTITY
ispiv-102	34	1	2	CARDINAL
ispiv-102	34	2	i(t	PERSON
ispiv-102	35	1	qc	GPE
ispiv-102	37	1	#4 #3 #1 #2	MONEY
ispiv-102	37	2	10 100 1000 0.0 5.0x10 -4 1.0x10	QUANTITY
ispiv-102	37	3	1.5x10	CARDINAL
ispiv-102	37	4	2.0x10	CARDINAL
ispiv-102	37	5	3	CARDINAL
ispiv-102	37	6	2	CARDINAL
ispiv-102	40	1	1	CARDINAL
ispiv-102	40	2	2d	CARDINAL
ispiv-102	40	3	2	CARDINAL
ispiv-102	40	4	four	CARDINAL
ispiv-102	40	5	qc	GPE
ispiv-102	41	1	3	CARDINAL
ispiv-102	41	2	qc	GPE
ispiv-102	42	1	0.2d	CARDINAL
ispiv-102	43	1	qc	ORG
ispiv-102	43	2	0.1d	CARDINAL
ispiv-102	46	1	3	CARDINAL
ispiv-102	46	2	qc	GPE
ispiv-102	46	3	russian	NORP
ispiv-102	46	4	20	CARDINAL
ispiv-102	47	1	i. litvinov	PERSON
ispiv-102	47	2	the russian federation	ORG
ispiv-102	49	1	the german research foundation	ORG
ispiv-102	49	2	429772199	DATE
ispiv-102	50	1	cervantes m	PERSON
ispiv-102	50	2	trivedi c	PERSON
ispiv-102	50	3	nielsen	GPE
ispiv-102	50	4	2015	CARDINAL
ispiv-102	50	5	francis-99	DATE
ispiv-102	50	6	1	CARDINAL
ispiv-102	51	1	j. phys	ORG
ispiv-102	52	1	579	CARDINAL
ispiv-102	53	1	011001	DATE
ispiv-102	53	2	coutu	ORG
ispiv-102	53	3	2012	DATE
ispiv-102	55	1	springer science & business	ORG
ispiv-102	55	2	litvinov	GPE
ispiv-102	55	3	2018	DATE
ispiv-102	56	1	91:410–422	CARDINAL