id	sid	eid	entity	type
ispiv-106	1	1	14th	ORDINAL
ispiv-106	1	2	2021	CARDINAL
ispiv-106	1	3	2021	CARDINAL
ispiv-106	1	4	dustin kelly1	PERSON
ispiv-106	1	5	ralf fischer2	PERSON
ispiv-106	1	6	ari goldman1	PERSON
ispiv-106	1	7	sarah morris1	PERSON
ispiv-106	1	8	bart prorok2	PERSON
ispiv-106	1	9	brian thurow1	PERSON
ispiv-106	1	10	1	CARDINAL
ispiv-106	1	11	al usa 2 auburn university	ORG
ispiv-106	1	12	al usa	ORG
ispiv-106	1	13	three	CARDINAL
ispiv-106	1	14	3d	CARDINAL
ispiv-106	2	1	2018	DATE
ispiv-106	4	1	one	CARDINAL
ispiv-106	4	2	deng et al.	PERSON
ispiv-106	4	3	2020	DATE
ispiv-106	5	1	one	CARDINAL
ispiv-106	6	1	1	CARDINAL
ispiv-106	6	2	three	CARDINAL
ispiv-106	6	3	800	CARDINAL
ispiv-106	6	4	600	CARDINAL
ispiv-106	6	5	532	CARDINAL
ispiv-106	7	1	one	CARDINAL
ispiv-106	8	1	adelson	PERSON
ispiv-106	8	2	wang	PERSON
ispiv-106	8	3	1992	DATE
ispiv-106	9	1	1	CARDINAL
ispiv-106	10	1	two	CARDINAL
ispiv-106	10	2	2006	DATE
ispiv-106	12	1	danehy et al	PERSON
ispiv-106	12	2	2017	CARDINAL
ispiv-106	13	1	1	CARDINAL
ispiv-106	16	1	seven	CARDINAL
ispiv-106	16	2	1	CARDINAL
ispiv-106	16	3	three	CARDINAL
ispiv-106	16	4	10	CARDINAL
ispiv-106	17	1	1000	CARDINAL
ispiv-106	17	2	2048x2048	CARDINAL
ispiv-106	18	1	two	CARDINAL
ispiv-106	19	1	2018	DATE
ispiv-106	19	2	0.6	CARDINAL
ispiv-106	20	1	first	ORDINAL
ispiv-106	20	2	first	ORDINAL
ispiv-106	20	3	clifford et al	PERSON
ispiv-106	21	1	2019	DATE
ispiv-106	22	1	ray	PERSON
ispiv-106	22	2	two	CARDINAL
ispiv-106	22	3	first	ORDINAL
ispiv-106	24	1	two	CARDINAL
ispiv-106	25	1	3d	CARDINAL
ispiv-106	26	1	3d	CARDINAL
ispiv-106	27	1	600	CARDINAL
ispiv-106	27	2	800	CARDINAL
ispiv-106	28	1	between 600	CARDINAL
ispiv-106	28	2	800	CARDINAL
ispiv-106	29	1	one	CARDINAL
ispiv-106	29	2	one	CARDINAL
ispiv-106	32	1	625	CARDINAL
ispiv-106	32	2	between 950	CARDINAL
ispiv-106	32	3	1250	CARDINAL
ispiv-106	32	4	50	CARDINAL
ispiv-106	32	5	auburn university’s	ORG
ispiv-106	33	1	1070	CARDINAL
ispiv-106	33	2	400	CARDINAL
ispiv-106	33	3	250 mm	QUANTITY
ispiv-106	33	4	625	CARDINAL
ispiv-106	34	1	625	CARDINAL
ispiv-106	34	2	about 30	CARDINAL
ispiv-106	35	1	800 mm	QUANTITY
ispiv-106	35	2	250	CARDINAL
ispiv-106	35	3	2	CARDINAL
ispiv-106	36	1	8.5 mm	QUANTITY
ispiv-106	38	1	2	CARDINAL
ispiv-106	39	1	2(a	CARDINAL
ispiv-106	41	1	2(b	CARDINAL
ispiv-106	43	1	0.3 m	QUANTITY
ispiv-106	43	2	first	ORDINAL
ispiv-106	43	3	5	CARDINAL
ispiv-106	43	4	guo et al	PERSON
ispiv-106	44	1	2018	DATE
ispiv-106	45	1	6 to 10	CARDINAL
ispiv-106	47	1	between 1000	CARDINAL
ispiv-106	47	2	1600	CARDINAL
ispiv-106	47	3	approximately 1300	CARDINAL
ispiv-106	47	4	625	CARDINAL
ispiv-106	48	1	approximately 150	CARDINAL
ispiv-106	50	1	the united states	GPE
ispiv-106	50	2	national institute of standards	ORG
ispiv-106	51	1	steven moore	PERSON
ispiv-106	51	2	emre kayali	PERSON
ispiv-106	51	3	auburn university’s	ORG
ispiv-106	52	1	adelson e	PERSON
ispiv-106	52	2	wang j (	PERSON
ispiv-106	52	3	1992	DATE
ispiv-106	53	1	14:99–106	CARDINAL
ispiv-106	53	2	2019	CARDINAL
ispiv-106	54	1	13th	ORDINAL
ispiv-106	54	2	hutchins wd	PERSON
ispiv-106	54	3	fahringer tw	PERSON
ispiv-106	54	4	thurow bs	GPE
ispiv-106	54	5	2017	CARDINAL
ispiv-106	55	1	55th aiaa aerospace sciences meeting	ORG
ispiv-106	55	2	wei h	GPE
ispiv-106	55	3	zuback j	PERSON
ispiv-106	55	4	mukherjee t	PERSON
ispiv-106	55	5	elmer j	ORG
ispiv-106	55	6	milewski j	PERSON
ispiv-106	55	7	wilson-heid	PERSON
ispiv-106	55	8	zhang w	PERSON
ispiv-106	55	9	2018	DATE
ispiv-106	56	1	92:112–224	CARDINAL
ispiv-106	56	2	gupta vk	PERSON
ispiv-106	56	3	bc	ORG
ispiv-106	56	4	lou x	PERSON
ispiv-106	56	5	2020	DATE
ispiv-106	57	1	35:101334	CARDINAL
ispiv-106	57	2	fahringer tw	PERSON
ispiv-106	57	3	danehy pm	PERSON
ispiv-106	57	4	hutchins wd	PERSON
ispiv-106	57	5	2018	DATE
ispiv-106	58	1	2018	DATE
ispiv-106	58	2	zhao	PERSON
ispiv-106	58	3	escano li	PERSON
ispiv-106	58	4	xiong l	GPE
ispiv-106	58	5	k, everhart w	ORG
ispiv-106	58	6	chen l	PERSON
ispiv-106	58	7	2018	DATE
ispiv-106	59	1	2006	DATE
ispiv-106	60	1	39:46–55	CARDINAL