id	sid	eid	entity	type
ispiv-115	1	1	14th	ORDINAL
ispiv-115	1	2	2021	CARDINAL
ispiv-115	1	3	chicago	GPE
ispiv-115	1	4	il usa	ORG
ispiv-115	1	5	august 1-4	DATE
ispiv-115	1	6	2021	CARDINAL
ispiv-115	1	7	raffaele colombi1∗	ORG
ispiv-115	1	8	niclas rohde	PERSON
ispiv-115	1	9	michael schlüter1	PERSON
ispiv-115	1	10	alexandra von kameke2	PERSON
ispiv-115	2	1	1hamburg	CARDINAL
ispiv-115	2	2	university of technology	ORG
ispiv-115	2	3	hamburg	GPE
ispiv-115	2	4	germany	GPE
ispiv-115	2	5	2	CARDINAL
ispiv-115	2	6	university of applied sciences	ORG
ispiv-115	2	7	hamburg	GPE
ispiv-115	2	8	germany	GPE
ispiv-115	2	9	∗	CARDINAL
ispiv-115	2	10	faraday	DATE
ispiv-115	4	1	2005	DATE
ispiv-115	4	2	saylor	PERSON
ispiv-115	4	3	2005	DATE
ispiv-115	5	1	two	CARDINAL
ispiv-115	5	2	von kameke et al.	PERSON
ispiv-115	5	3	2011	DATE
ispiv-115	5	4	2013	DATE
ispiv-115	5	5	francois et al.	GPE
ispiv-115	5	6	2013	DATE
ispiv-115	6	1	three	CARDINAL
ispiv-115	6	2	kelley	PERSON
ispiv-115	6	3	ouellette	PERSON
ispiv-115	6	4	2011	DATE
ispiv-115	6	5	martell et al.	PERSON
ispiv-115	6	6	2019	DATE
ispiv-115	6	7	2014	DATE
ispiv-115	6	8	xia	PERSON
ispiv-115	6	9	francois	GPE
ispiv-115	6	10	2017	DATE
ispiv-115	7	1	2d	DATE
ispiv-115	7	2	3d	CARDINAL
ispiv-115	7	3	al.	GPE
ispiv-115	7	4	2012	DATE
ispiv-115	7	5	al.	PERSON
ispiv-115	7	6	2017	CARDINAL
ispiv-115	7	7	al.	PERSON
ispiv-115	7	8	2017	DATE
ispiv-115	8	1	2d	CARDINAL
ispiv-115	8	2	three	CARDINAL
ispiv-115	8	3	colombi et al.	PERSON
ispiv-115	8	4	2021	DATE
ispiv-115	9	1	2d	DATE
ispiv-115	9	2	three	CARDINAL
ispiv-115	10	1	2d	DATE
ispiv-115	10	2	four	CARDINAL
ispiv-115	10	3	faraday waves	GPE
ispiv-115	12	1	approximately 10 mm	QUANTITY
ispiv-115	12	2	one	CARDINAL
ispiv-115	12	3	faraday	DATE
ispiv-115	13	1	1	CARDINAL
ispiv-115	13	2	xz	ORG
ispiv-115	13	3	faraday waves	GPE
ispiv-115	13	4	50	CARDINAL
ispiv-115	13	5	9.5 mm	QUANTITY
ispiv-115	16	1	16	CARDINAL
ispiv-115	17	1	3 mm	QUANTITY
ispiv-115	18	1	3 mm	QUANTITY
ispiv-115	19	1	30 mm	QUANTITY
ispiv-115	20	1	k f	PERSON
ispiv-115	22	1	1	CARDINAL
ispiv-115	24	1	zero	CARDINAL
ispiv-115	25	1	first	ORDINAL
ispiv-115	25	2	4d	CARDINAL
ispiv-115	25	3	3d	CARDINAL
ispiv-115	27	1	2	CARDINAL
ispiv-115	28	1	2	CARDINAL
ispiv-115	28	2	3d	CARDINAL
ispiv-115	29	1	2	CARDINAL
ispiv-115	29	2	4d	CARDINAL
ispiv-115	30	1	four	CARDINAL
ispiv-115	31	1	300 mm	QUANTITY
ispiv-115	31	2	30 mm	QUANTITY
ispiv-115	31	3	150-180	CARDINAL
ispiv-115	32	1	4d	CARDINAL
ispiv-115	32	2	ptv	ORG
ispiv-115	33	1	3d	CARDINAL
ispiv-115	33	2	u2 + v2 +	PERSON
ispiv-115	33	3	40×160×30	CARDINAL
ispiv-115	35	1	the deutsche forschungsgemeinschaft	ORG
ispiv-115	35	2	dfg	ORG
ispiv-115	35	3	395843083	DATE
ispiv-115	36	1	linkmann m	ORG
ispiv-115	36	2	2017	CARDINAL
ispiv-115	36	3	two	CARDINAL
ispiv-115	36	4	three	CARDINAL
ispiv-115	36	5	two	CARDINAL
ispiv-115	36	6	three	CARDINAL
ispiv-115	37	1	29:111101	CARDINAL
ispiv-115	37	2	2012	DATE
ispiv-115	37	3	three	CARDINAL
ispiv-115	38	1	108:164501	CARDINAL
ispiv-115	38	2	colombi	PERSON
ispiv-115	38	3	von kameke	PERSON
ispiv-115	38	4	2021	CARDINAL
ispiv-115	38	5	three	CARDINAL
ispiv-115	38	6	2d	DATE
ispiv-115	38	7	faraday waves	GPE
ispiv-115	39	1	62:1–13	CARDINAL
ispiv-115	39	2	fort e	GPE
ispiv-115	39	3	boudaoud	GPE
ispiv-115	40	1	xia h	GPE
ispiv-115	40	2	ramsden s	PERSON
ispiv-115	40	3	shats	NORP
ispiv-115	40	4	2014	DATE
ispiv-115	40	5	three	CARDINAL
ispiv-115	40	6	faraday waves	GPE
ispiv-115	40	7	two	CARDINAL
ispiv-115	41	1	4:021021	CARDINAL
ispiv-115	41	2	xia h	GPE
ispiv-115	41	3	shats	NORP
ispiv-115	41	4	2013	DATE
ispiv-115	41	5	faraday waves	GPE
ispiv-115	42	1	110:194501	CARDINAL
ispiv-115	42	2	kelley	PERSON
ispiv-115	42	3	ouellette nt	PERSON
ispiv-115	42	4	2011	DATE
ispiv-115	42	5	three	CARDINAL
ispiv-115	43	1	23:045103	CARDINAL
ispiv-115	43	2	das s	PERSON
ispiv-115	43	3	winkler rg	PERSON
ispiv-115	43	4	gompper g	PERSON
ispiv-115	43	5	aranson	PERSON
ispiv-115	43	6	2017	CARDINAL
ispiv-115	44	1	the national academy of sciences	ORG
ispiv-115	44	2	114:12870–12875	CARDINAL
ispiv-115	44	3	martell bc	ORG
ispiv-115	44	4	tithof j	PERSON
ispiv-115	44	5	kelley	PERSON
ispiv-115	44	6	2019	DATE
ispiv-115	45	1	4:043904	CARDINAL
ispiv-115	45	2	saylor jr	PERSON
ispiv-115	45	3	kinard al	PERSON
ispiv-115	45	4	2005	DATE
ispiv-115	46	1	17:047106	CARDINAL
ispiv-115	46	2	von kameke	PERSON
ispiv-115	46	3	huhn f	GPE
ispiv-115	46	4	munuzuri	PERSON
ispiv-115	46	5	2011	DATE
ispiv-115	46	6	richardson	PERSON
ispiv-115	46	7	faraday waves	GPE
ispiv-115	47	1	107:074502 von kameke	QUANTITY
ispiv-115	47	2	huhn f	GPE
ispiv-115	47	3	munuzuri	PERSON
ispiv-115	47	4	2013	DATE
ispiv-115	48	1	110:088302	CARDINAL
ispiv-115	48	2	xia h	ORG
ispiv-115	48	3	francois n (	ORG
ispiv-115	48	4	two	CARDINAL
ispiv-115	48	5	three	CARDINAL
ispiv-115	49	1	29:111107	CARDINAL