id	sid	eid	entity	type
ispiv-116	1	1	14th	ORDINAL
ispiv-116	1	2	2021	CARDINAL
ispiv-116	1	3	2021	CARDINAL
ispiv-116	1	4	3d	CARDINAL
ispiv-116	1	5	j. wiswall2	PERSON
ispiv-116	1	6	a. mychkovsky2	PERSON
ispiv-116	1	7	r. prevost3	PERSON
ispiv-116	1	8	d. neal3	PERSON
ispiv-116	1	9	1	CARDINAL
ispiv-116	1	10	37081	DATE
ispiv-116	1	11	germany	GPE
ispiv-116	1	12	2	CARDINAL
ispiv-116	1	13	west mifflin	GPE
ispiv-116	1	14	pa 15122	DATE
ispiv-116	1	15	ypsilanti	GPE
ispiv-116	1	16	48197	DATE
ispiv-116	1	17	usa *dmichaelis@lavision.de	ORG
ispiv-116	1	18	3d	CARDINAL
ispiv-116	3	1	four	CARDINAL
ispiv-116	3	2	stb lpt	PERSON
ispiv-116	4	1	more than 20	CARDINAL
ispiv-116	4	2	1	CARDINAL
ispiv-116	5	1	0.02	CARDINAL
ispiv-116	5	2	0.5	CARDINAL
ispiv-116	5	3	1	CARDINAL
ispiv-116	5	4	5	CARDINAL
ispiv-116	7	1	1	CARDINAL
ispiv-116	7	2	lpt	ORG
ispiv-116	9	1	van doorne	PERSON
ispiv-116	9	2	2007	DATE
ispiv-116	10	1	bai	ORG
ispiv-116	10	2	katz	PERSON
ispiv-116	10	3	2014	DATE
ispiv-116	10	4	northrup et al	PERSON
ispiv-116	11	1	1991	DATE
ispiv-116	11	2	wright et al	PERSON
ispiv-116	12	1	2017	CARDINAL
ispiv-116	17	1	14th	CARDINAL
ispiv-116	17	2	2021	CARDINAL
ispiv-116	17	3	2021	CARDINAL
ispiv-116	19	1	tsai	PERSON
ispiv-116	19	2	1987	DATE
ispiv-116	19	3	1997	DATE
ispiv-116	19	4	cartesian	NORP
ispiv-116	24	1	2	CARDINAL
ispiv-116	24	2	3d	CARDINAL
ispiv-116	24	3	2d	DATE
ispiv-116	24	4	1	CARDINAL
ispiv-116	26	1	2c	CARDINAL
ispiv-116	26	2	3d	CARDINAL
ispiv-116	26	3	2	CARDINAL
ispiv-116	28	1	2c	CARDINAL
ispiv-116	28	2	3d	CARDINAL
ispiv-116	28	3	z. correction	PERSON
ispiv-116	28	4	2d	CARDINAL
ispiv-116	29	1	3d	CARDINAL
ispiv-116	29	2	3	CARDINAL
ispiv-116	31	1	3	CARDINAL
ispiv-116	32	1	m(xw	ORG
ispiv-116	32	2	2d	DATE
ispiv-116	32	3	2d	DATE
ispiv-116	32	4	14th	ORDINAL
ispiv-116	32	5	2021	CARDINAL
ispiv-116	32	6	2021	CARDINAL
ispiv-116	33	1	4	CARDINAL
ispiv-116	33	2	2c-3d	CARDINAL
ispiv-116	33	3	linear	ORG
ispiv-116	34	1	2008	DATE
ispiv-116	35	1	0.1	CARDINAL
ispiv-116	36	1	0.3	CARDINAL
ispiv-116	36	2	1.0	CARDINAL
ispiv-116	38	1	2008	DATE
ispiv-116	39	1	𝑰(𝑪(𝒙𝑤	ORDINAL
ispiv-116	40	1	𝑪𝑉𝑆𝐶(𝒙𝑤	ORG
ispiv-116	40	2	5	CARDINAL
ispiv-116	41	1	3	CARDINAL
ispiv-116	41	2	1	CARDINAL
ispiv-116	43	1	fig	PERSON
ispiv-116	44	1	1	CARDINAL
ispiv-116	45	1	1	CARDINAL
ispiv-116	46	1	101.5 mm +	QUANTITY
ispiv-116	46	2	two	CARDINAL
ispiv-116	47	1	1	CARDINAL
ispiv-116	48	1	14th	ORDINAL
ispiv-116	48	2	2021	CARDINAL
ispiv-116	48	3	2021	CARDINAL
ispiv-116	50	1	lorentz	PERSON
ispiv-116	50	2	2018	DATE
ispiv-116	51	1	23 gallons	QUANTITY
ispiv-116	51	2	0.5 gpm	MONEY
ispiv-116	52	1	74.5	CARDINAL
ispiv-116	52	2	± 3	CARDINAL
ispiv-116	53	1	20 %	PERCENT
ispiv-116	54	1	four	CARDINAL
ispiv-116	55	1	four	CARDINAL
ispiv-116	56	1	60 mm	QUANTITY
ispiv-116	56	2	nikon	ORG
ispiv-116	56	3	620	CARDINAL
ispiv-116	56	4	56	CARDINAL
ispiv-116	56	5	33-911	CARDINAL
ispiv-116	57	1	50	CARDINAL
ispiv-116	57	2	606	CARDINAL
ispiv-116	57	3	45-53	DATE
ispiv-116	58	1	0.02	CARDINAL
ispiv-116	60	1	z	ORG
ispiv-116	61	1	7 mm	QUANTITY
ispiv-116	63	1	1,909	CARDINAL
ispiv-116	63	2	1 mm	QUANTITY
ispiv-116	63	3	2 mm	QUANTITY
ispiv-116	64	1	2	CARDINAL
ispiv-116	65	1	0.02 mm	QUANTITY
ispiv-116	65	2	z	ORG
ispiv-116	67	1	1	CARDINAL
ispiv-116	67	2	90 degrees	QUANTITY
ispiv-116	69	1	1 mm	QUANTITY
ispiv-116	70	1	2	CARDINAL
ispiv-116	70	2	2d	CARDINAL
ispiv-116	70	3	2 mm	QUANTITY
ispiv-116	70	4	four	CARDINAL
ispiv-116	71	1	4	CARDINAL
ispiv-116	71	2	14th	ORDINAL
ispiv-116	71	3	2021	CARDINAL
ispiv-116	71	4	2021	CARDINAL
ispiv-116	71	5	12	CARDINAL
ispiv-116	71	6	1 mm	QUANTITY
ispiv-116	71	7	+9 mm	PERSON
ispiv-116	71	8	0 mm	PERSON
ispiv-116	72	1	davis 10.2	PERSON
ispiv-116	74	1	3	CARDINAL
ispiv-116	75	1	4	CARDINAL
ispiv-116	77	1	3	CARDINAL
ispiv-116	79	1	4	CARDINAL
ispiv-116	80	1	3	CARDINAL
ispiv-116	82	1	4	CARDINAL
ispiv-116	85	1	5	CARDINAL
ispiv-116	86	1	up to	CARDINAL
ispiv-116	86	2	22	CARDINAL
ispiv-116	87	1	tomographic piv	PERSON
ispiv-116	88	1	2008	DATE
ispiv-116	90	1	7 mm	QUANTITY
ispiv-116	91	1	20 x 20 x 2	QUANTITY
ispiv-116	92	1	vsc	ORG
ispiv-116	92	2	up to 13	CARDINAL
ispiv-116	94	1	6	CARDINAL
ispiv-116	94	2	1.8	CARDINAL
ispiv-116	94	3	6.4	CARDINAL
ispiv-116	94	4	3	CARDINAL
ispiv-116	95	1	cartesian	NORP
ispiv-116	95	2	up to 22	CARDINAL
ispiv-116	95	3	cartesian	NORP
ispiv-116	97	1	2	CARDINAL
ispiv-116	98	1	14th	ORDINAL
ispiv-116	98	2	2021	CARDINAL
ispiv-116	98	3	2021	CARDINAL
ispiv-116	98	4	1.0	CARDINAL
ispiv-116	98	5	4.8	CARDINAL
ispiv-116	98	6	8th	ORDINAL
ispiv-116	99	1	6	CARDINAL
ispiv-116	102	1	5	CARDINAL
ispiv-116	103	1	up to 1.7	CARDINAL
ispiv-116	104	1	7	CARDINAL
ispiv-116	105	1	only 0.02	CARDINAL
ispiv-116	105	2	13th	ORDINAL
ispiv-116	105	3	up to	CARDINAL
ispiv-116	105	4	0.5	CARDINAL
ispiv-116	107	1	4	CARDINAL
ispiv-116	107	2	one	CARDINAL
ispiv-116	107	3	12	CARDINAL
ispiv-116	107	4	3 mm	QUANTITY
ispiv-116	110	1	3	CARDINAL
ispiv-116	111	1	davis 10.2.1	ORG
ispiv-116	112	1	three passes over 1112	CARDINAL
ispiv-116	112	2	7488	DATE
ispiv-116	112	3	8463	DATE
ispiv-116	112	4	1	CARDINAL
ispiv-116	112	5	2	CARDINAL
ispiv-116	112	6	3	CARDINAL
ispiv-116	112	7	4	CARDINAL
ispiv-116	112	8	3 14th	CARDINAL
ispiv-116	112	9	2021	CARDINAL
ispiv-116	112	10	2021	CARDINAL
ispiv-116	113	1	1 x 1 x 1 mm³	QUANTITY
ispiv-116	113	2	75%	PERCENT
ispiv-116	113	3	0.25 mm	QUANTITY
ispiv-116	113	4	about 500	CARDINAL
ispiv-116	113	5	8	CARDINAL
ispiv-116	117	1	0.1	CARDINAL
ispiv-116	117	2	about 50%	PERCENT
ispiv-116	117	3	2 mm	QUANTITY
ispiv-116	117	4	8	CARDINAL
ispiv-116	118	1	0 m	QUANTITY
ispiv-116	118	2	0.25 mm	QUANTITY
ispiv-116	120	1	5	CARDINAL
ispiv-116	120	2	vy	ORG
ispiv-116	120	3	5	CARDINAL
ispiv-116	121	1	4	CARDINAL
ispiv-116	122	1	1	CARDINAL
ispiv-116	122	2	2	CARDINAL
ispiv-116	122	3	3	CARDINAL
ispiv-116	122	4	4 14th	CARDINAL
ispiv-116	122	5	2021	CARDINAL
ispiv-116	122	6	2021	CARDINAL
ispiv-116	122	7	6	CARDINAL
ispiv-116	122	8	two	CARDINAL
ispiv-116	122	9	vy	ORG
ispiv-116	122	10	the 1st	DATE
ispiv-116	122	11	the 8th	DATE
ispiv-116	122	12	vy	ORG
ispiv-116	122	13	7	CARDINAL
ispiv-116	122	14	two	CARDINAL
ispiv-116	122	15	vy	ORG
ispiv-116	122	16	the 1st	DATE
ispiv-116	122	17	the 13th	DATE
ispiv-116	123	1	vy	ORG
ispiv-116	125	1	6	CARDINAL
ispiv-116	125	2	bin	PERSON
ispiv-116	126	1	9	CARDINAL
ispiv-116	127	1	bin	PERSON
ispiv-116	127	2	about 500	CARDINAL
ispiv-116	128	1	9	CARDINAL
ispiv-116	134	1	about 2 mm	QUANTITY
ispiv-116	135	1	3	CARDINAL
ispiv-116	137	1	14th	ORDINAL
ispiv-116	137	2	2021	CARDINAL
ispiv-116	137	3	2021	CARDINAL
ispiv-116	138	1	8	CARDINAL
ispiv-116	138	2	31	CARDINAL
ispiv-116	139	1	8th	ORDINAL
ispiv-116	139	2	0.25 mm	QUANTITY
ispiv-116	140	1	9	CARDINAL
ispiv-116	140	2	31	CARDINAL
ispiv-116	140	3	8th	ORDINAL
ispiv-116	142	1	only one	CARDINAL
ispiv-116	143	1	bin	PERSON
ispiv-116	143	2	5	CARDINAL
ispiv-116	143	3	14th	ORDINAL
ispiv-116	143	4	2021	CARDINAL
ispiv-116	143	5	2021	CARDINAL
ispiv-116	144	1	up to 22	CARDINAL
ispiv-116	144	2	0.02	CARDINAL
ispiv-116	146	1	50%	PERCENT
ispiv-116	149	1	the united states	GPE
ispiv-116	150	1	the united states	GPE
ispiv-116	150	2	third	ORDINAL
ispiv-116	151	1	the united states	GPE
ispiv-116	152	1	the united states	GPE
ispiv-116	153	1	bai k	PERSON
ispiv-116	153	2	2014	DATE
ispiv-116	154	1	55	CARDINAL
ispiv-116	154	2	1704	CARDINAL
ispiv-116	154	3	r. e.	PERSON
ispiv-116	154	4	d. g.	PERSON
ispiv-116	154	5	2018	DATE
ispiv-116	154	6	united states	GPE
ispiv-116	154	7	9,956,532	CARDINAL
ispiv-116	154	8	northrup ma	PERSON
ispiv-116	154	9	kulp tj	PERSON
ispiv-116	154	10	angel sm	PERSON
ispiv-116	154	11	1991	DATE
ispiv-116	155	1	21):3034-40	CARDINAL
ispiv-116	155	2	d.	NORP
ispiv-116	155	3	s., & schröder	ORG
ispiv-116	155	4	a.	PERSON
ispiv-116	155	5	2016	CARDINAL
ispiv-116	157	1	1-27	CARDINAL
ispiv-116	158	1	soloff s	ORG
ispiv-116	158	2	adrian	PERSON
ispiv-116	158	3	1997	DATE
ispiv-116	159	1	meas sci technol 8:1441-1454	PERSON
ispiv-116	160	1	tsai ry	PERSON
ispiv-116	160	2	1987	DATE
ispiv-116	160	3	3d	CARDINAL
ispiv-116	161	1	ieee journal of robotics	ORG
ispiv-116	161	2	4	CARDINAL
ispiv-116	161	3	van doorne	PERSON
ispiv-116	161	4	c. w. h., & westerweel	PERSON
ispiv-116	161	5	j. (	PERSON
ispiv-116	161	6	2007	DATE
ispiv-116	163	1	259	CARDINAL
ispiv-116	164	1	2008	DATE
ispiv-116	164	2	3d	CARDINAL
ispiv-116	165	1	45:549-556	DATE
ispiv-116	165	2	s. f., zadrazil	PERSON
ispiv-116	165	3	i., & markides	ORG
ispiv-116	165	4	2017	CARDINAL
ispiv-116	166	1	two	CARDINAL
ispiv-116	167	1	58(9	CARDINAL
ispiv-116	167	2	1-39	CARDINAL