id	sid	eid	entity	type
ispiv-138	1	1	14th	ORDINAL
ispiv-138	1	2	2021	CARDINAL
ispiv-138	1	3	2021	CARDINAL
ispiv-138	1	4	ptv	ORG
ispiv-138	1	5	h. abitan1,2∗	PERSON
ispiv-138	1	6	s. l. ribergård1	PERSON
ispiv-138	1	7	j. s. nielsen2	PERSON
ispiv-138	1	8	1	CARDINAL
ispiv-138	1	9	university of denmark	ORG
ispiv-138	1	10	kgs.	GPE
ispiv-138	2	1	lyngby	GPE
ispiv-138	2	2	denmark 2	ORG
ispiv-138	2	3	university of denmark	ORG
ispiv-138	2	4	kgs.	GPE
ispiv-138	3	1	lyngby	GPE
ispiv-138	3	2	denmark ∗	ORG
ispiv-138	3	3	3d	CARDINAL
ispiv-138	5	1	the past decade	DATE
ispiv-138	5	2	3d	CARDINAL
ispiv-138	5	3	104 cm3	QUANTITY
ispiv-138	5	4	300 µm	QUANTITY
ispiv-138	6	1	102 cm3	QUANTITY
ispiv-138	6	2	3d	CARDINAL
ispiv-138	6	3	15	CARDINAL
ispiv-138	8	1	two	CARDINAL
ispiv-138	9	1	about 103	CARDINAL
ispiv-138	9	2	15	CARDINAL
ispiv-138	10	1	first	ORDINAL
ispiv-138	10	2	two	CARDINAL
ispiv-138	11	1	second	ORDINAL
ispiv-138	13	1	1	CARDINAL
ispiv-138	13	2	the past decade	DATE
ispiv-138	13	3	1992	DATE
ispiv-138	13	4	three decades ago	DATE
ispiv-138	14	1	first	ORDINAL
ispiv-138	14	2	3d	CARDINAL
ispiv-138	15	1	three years later brücker (1995	DATE
ispiv-138	16	1	elsinga et al	PERSON
ispiv-138	16	2	2006	DATE
ispiv-138	17	1	3	CARDINAL
ispiv-138	18	1	2012	DATE
ispiv-138	20	1	2016	CARDINAL
ispiv-138	22	1	barros et al	PERSON
ispiv-138	22	2	2021	CARDINAL
ispiv-138	22	3	102	CARDINAL
ispiv-138	22	4	1	CARDINAL
ispiv-138	22	5	104 cm3	QUANTITY
ispiv-138	22	6	300	CARDINAL
ispiv-138	22	7	up to about 103	CARDINAL
ispiv-138	22	8	15	CARDINAL
ispiv-138	24	1	millimetre spatial resolution	ORG
ispiv-138	24	2	about 103	CARDINAL
ispiv-138	24	3	15	CARDINAL
ispiv-138	24	4	4	CARDINAL
ispiv-138	24	5	zhang et al	PERSON
ispiv-138	25	1	2021	CARDINAL
ispiv-138	26	1	ptv	ORG
ispiv-138	28	1	15	CARDINAL
ispiv-138	28	2	four	CARDINAL
ispiv-138	28	3	15	CARDINAL
ispiv-138	28	4	300 µm	QUANTITY
ispiv-138	29	1	two	CARDINAL
ispiv-138	29	2	3d	CARDINAL
ispiv-138	30	1	532	CARDINAL
ispiv-138	30	2	15	CARDINAL
ispiv-138	31	1	two	CARDINAL
ispiv-138	31	2	15	CARDINAL
ispiv-138	33	1	first	ORDINAL
ispiv-138	33	2	two	CARDINAL
ispiv-138	34	1	second	ORDINAL
ispiv-138	36	1	three	CARDINAL
ispiv-138	39	1	1.(a	CARDINAL
ispiv-138	39	2	two	CARDINAL
ispiv-138	42	1	two	CARDINAL
ispiv-138	47	1	1	CARDINAL
ispiv-138	49	1	2	CARDINAL
ispiv-138	49	2	scarano	PERSON
ispiv-138	49	3	2010	DATE
ispiv-138	50	1	between two	CARDINAL
ispiv-138	51	1	two	CARDINAL
ispiv-138	51	2	one	CARDINAL
ispiv-138	54	1	two	CARDINAL
ispiv-138	59	1	2	CARDINAL
ispiv-138	59	2	3d	CARDINAL
ispiv-138	59	3	2	CARDINAL
ispiv-138	59	4	two	CARDINAL
ispiv-138	60	1	two	CARDINAL
ispiv-138	60	2	3d	CARDINAL
ispiv-138	60	3	2.(a	CARDINAL
ispiv-138	66	1	15	CARDINAL
ispiv-138	67	1	15	CARDINAL
ispiv-138	67	2	3	CARDINAL
ispiv-138	67	3	220	CARDINAL
ispiv-138	68	1	2.8	CARDINAL
ispiv-138	68	2	4khz	CARDINAL
ispiv-138	68	3	532	CARDINAL
ispiv-138	69	1	900 mm	QUANTITY
ispiv-138	69	2	abcd gaussian beam analysis	ORG
ispiv-138	69	3	1 mm	QUANTITY
ispiv-138	69	4	40 mm	QUANTITY
ispiv-138	70	1	15	CARDINAL
ispiv-138	70	2	90	CARDINAL
ispiv-138	70	3	60mm	QUANTITY
ispiv-138	70	4	1000mm	QUANTITY
ispiv-138	71	1	16.6	CARDINAL
ispiv-138	72	1	3	CARDINAL
ispiv-138	72	2	close to 40 mm	QUANTITY
ispiv-138	73	1	3	CARDINAL
ispiv-138	73	2	15	CARDINAL
ispiv-138	74	1	abcd gaussian beam	ORG
ispiv-138	75	1	10	CARDINAL
ispiv-138	75	2	kj	ORG
ispiv-138	76	1	1	CARDINAL
ispiv-138	76	2	15	CARDINAL
ispiv-138	77	1	10	CARDINAL
ispiv-138	77	2	kj	ORG
ispiv-138	79	1	60 mm	QUANTITY
ispiv-138	79	2	1000 mm	QUANTITY
ispiv-138	80	1	35 mm	QUANTITY
ispiv-138	80	2	350 mm	QUANTITY
ispiv-138	80	3	about 20	CARDINAL
ispiv-138	82	1	10	CARDINAL
ispiv-138	82	2	kj	ORG
ispiv-138	82	3	two	CARDINAL
ispiv-138	83	1	35mm	QUANTITY
ispiv-138	83	2	two	CARDINAL
ispiv-138	84	1	two	CARDINAL
ispiv-138	86	1	10−16	CARDINAL
ispiv-138	90	1	snr of	PRODUCT
ispiv-138	90	2	10	CARDINAL
ispiv-138	93	1	4	CARDINAL
ispiv-138	93	2	532	CARDINAL
ispiv-138	93	3	three	CARDINAL
ispiv-138	94	1	532	CARDINAL
ispiv-138	94	2	0.95,0.975	CARDINAL
ispiv-138	94	3	0.998	CARDINAL
ispiv-138	94	4	optik gmbh	PERSON
ispiv-138	96	1	7	CARDINAL
ispiv-138	97	1	27	CARDINAL
ispiv-138	97	2	at least 200	CARDINAL
ispiv-138	98	1	2.8	CARDINAL
ispiv-138	98	2	350 mm	QUANTITY
ispiv-138	98	3	5 mm	QUANTITY
ispiv-138	98	4	50 mm	QUANTITY
ispiv-138	98	5	about 2	CARDINAL
ispiv-138	100	1	0.5	CARDINAL
ispiv-138	100	2	10	CARDINAL
ispiv-138	101	1	approximately	CARDINAL
ispiv-138	102	1	2.5×7	CARDINAL
ispiv-138	102	2	5.4×10	CARDINAL
ispiv-138	103	1	0 20	MONEY
ispiv-138	103	2	0.2 0.4 0.6 0.8 1	QUANTITY
ispiv-138	103	3	o	DATE
ispiv-138	105	1	al ag	ORG
ispiv-138	105	2	0.5	CARDINAL
ispiv-138	105	3	4	CARDINAL
ispiv-138	106	1	0.998	CARDINAL
ispiv-138	106	2	300	CARDINAL
ispiv-138	106	3	2.1× 102 cm2	QUANTITY
ispiv-138	106	4	1.1×103	CARDINAL
ispiv-138	107	1	at least 10 cm	QUANTITY
ispiv-138	108	1	104 cm3	QUANTITY
ispiv-138	110	1	two	CARDINAL
ispiv-138	111	1	hawkes	ORG
ispiv-138	111	2	1995	DATE
ispiv-138	111	3	2	CARDINAL
ispiv-138	112	1	0	CARDINAL
ispiv-138	113	1	3	CARDINAL
ispiv-138	116	1	2	CARDINAL
ispiv-138	116	2	2∫	CARDINAL
ispiv-138	116	3	2 e −2y2	QUANTITY
ispiv-138	116	4	4	CARDINAL
ispiv-138	116	5	w	ORG
ispiv-138	117	1	5	CARDINAL
ispiv-138	117	2	5	CARDINAL
ispiv-138	118	1	50 mm	QUANTITY
ispiv-138	118	2	200× 100 mm	QUANTITY
ispiv-138	119	1	0.963	CARDINAL
ispiv-138	121	1	0.9974	MONEY
ispiv-138	123	1	2	CARDINAL
ispiv-138	125	1	5.(a	CARDINAL
ispiv-138	126	1	5× 50 mm2	QUANTITY
ispiv-138	126	2	200 mm×100 mm	QUANTITY
ispiv-138	127	1	about 4%	PERCENT
ispiv-138	128	1	200 mm× 160 mm	QUANTITY
ispiv-138	128	2	0.26%	PERCENT
ispiv-138	129	1	at least 3	CARDINAL
ispiv-138	133	1	1.1ωa	CARDINAL
ispiv-138	133	2	about 0.86%	PERCENT
ispiv-138	135	1	two	CARDINAL
ispiv-138	137	1	two	CARDINAL
ispiv-138	138	1	only three	CARDINAL
ispiv-138	138	2	two	CARDINAL
ispiv-138	141	1	1.1ωa	CARDINAL
ispiv-138	141	2	1.1ωa	CARDINAL
ispiv-138	141	3	0.9926%	PERCENT
ispiv-138	142	1	about 3%	PERCENT
ispiv-138	142	2	2%	PERCENT
ispiv-138	143	1	1.1ωa	CARDINAL
ispiv-138	143	2	1.5	CARDINAL
ispiv-138	144	1	two	CARDINAL
ispiv-138	146	1	1.5	CARDINAL
ispiv-138	148	1	6.(a	CARDINAL
ispiv-138	148	2	one	CARDINAL
ispiv-138	149	1	100 mm	QUANTITY
ispiv-138	149	2	200 mm	QUANTITY
ispiv-138	150	1	two	CARDINAL
ispiv-138	152	1	two	CARDINAL
ispiv-138	153	1	6mm	QUANTITY
ispiv-138	154	1	2	CARDINAL
ispiv-138	155	1	two	CARDINAL
ispiv-138	156	1	7	CARDINAL
ispiv-138	157	1	y=80 mm	PERSON
ispiv-138	158	1	6	CARDINAL
ispiv-138	160	1	12 mm	QUANTITY
ispiv-138	161	1	two	CARDINAL
ispiv-138	162	1	the green rectangular marks	ORG
ispiv-138	162	2	100 mm	QUANTITY
ispiv-138	162	3	200 mm	QUANTITY
ispiv-138	163	1	6 mm	QUANTITY
ispiv-138	163	2	two	CARDINAL
ispiv-138	164	1	1.1ωa	CARDINAL
ispiv-138	167	1	cartesian	NORP
ispiv-138	167	2	xcos(θi)+ ysin(θi	PERSON
ispiv-138	168	1	snr = 10	PRODUCT
ispiv-138	171	1	8	CARDINAL
ispiv-138	171	2	two	CARDINAL
ispiv-138	171	3	100 mm	QUANTITY
ispiv-138	171	4	150 mm	QUANTITY
ispiv-138	172	1	two	CARDINAL
ispiv-138	176	1	7	CARDINAL
ispiv-138	176	2	y=80 mm	PERSON
ispiv-138	176	3	two	CARDINAL
ispiv-138	177	1	8	CARDINAL
ispiv-138	179	1	3	CARDINAL
ispiv-138	179	2	first	ORDINAL
ispiv-138	179	3	brücker and althaus	ORG
ispiv-138	179	4	1992	DATE
ispiv-138	179	5	1995	DATE
ispiv-138	180	1	about 0.75s	CARDINAL
ispiv-138	183	1	2016	DATE
ispiv-138	183	2	8	CARDINAL
ispiv-138	183	3	10	CARDINAL
ispiv-138	183	4	three	CARDINAL
ispiv-138	186	1	one	CARDINAL
ispiv-138	192	1	bragg angles	PERSON
ispiv-138	193	1	2λ	CARDINAL
ispiv-138	194	1	first	ORDINAL
ispiv-138	194	2	9	CARDINAL
ispiv-138	196	1	532	CARDINAL
ispiv-138	196	2	305	CARDINAL
ispiv-138	198	1	306 mm	QUANTITY
ispiv-138	198	2	101 mm	QUANTITY
ispiv-138	198	3	30	CARDINAL
ispiv-138	198	4	9.(b	CARDINAL
ispiv-138	203	1	first	ORDINAL
ispiv-138	203	2	zero	CARDINAL
ispiv-138	203	3	first	ORDINAL
ispiv-138	203	4	8 mm	QUANTITY
ispiv-138	203	5	1450 mm	QUANTITY
ispiv-138	204	1	5.4	CARDINAL
ispiv-138	205	1	306 mm	QUANTITY
ispiv-138	206	1	1.68 mm	QUANTITY
ispiv-138	208	1	32%	PERCENT
ispiv-138	209	1	only 32%	PERCENT
ispiv-138	211	1	2d	DATE
ispiv-138	212	1	4	CARDINAL
ispiv-138	212	2	two	CARDINAL
ispiv-138	212	3	two	CARDINAL
ispiv-138	214	1	two	CARDINAL
ispiv-138	215	1	up to	CARDINAL
ispiv-138	215	2	104 cm3	QUANTITY
ispiv-138	219	1	45	CARDINAL
ispiv-138	220	1	about 40	CARDINAL
ispiv-138	220	2	max	PERSON
ispiv-138	221	1	2d	DATE
ispiv-138	221	2	3d	CARDINAL
ispiv-138	222	1	poul	PERSON
ispiv-138	222	2	jensen	PERSON
ispiv-138	223	1	barros dc	GPE
ispiv-138	223	2	duan y	PERSON
ispiv-138	223	3	troolin dr	PERSON
ispiv-138	223	4	2021	CARDINAL
ispiv-138	224	1	36:933–947	CARDINAL
ispiv-138	224	2	1995	DATE
ispiv-138	224	3	3d	CARDINAL
ispiv-138	225	1	19:255–263 brücker	QUANTITY
ispiv-138	225	2	1992	DATE
ispiv-138	226	1	13:339–349	CARDINAL
ispiv-138	226	2	elsinga ge	PERSON
ispiv-138	226	3	scarano f	PERSON
ispiv-138	226	4	2006	DATE
ispiv-138	227	1	13:933–947	CARDINAL
ispiv-138	227	2	2010	DATE
ispiv-138	228	1	meas sci technol 21:339–349 hawkes j	ORG
ispiv-138	228	2	1995	DATE
ispiv-138	229	1	prentice hall schanz	ORG
ispiv-138	230	1	2016	DATE
ispiv-138	231	1	70:1–27	CARDINAL
ispiv-138	231	2	2016	CARDINAL
ispiv-138	232	1	58:1–12	CARDINAL
ispiv-138	232	2	abitan h	ORG
ispiv-138	232	3	ribergård	NORP
ispiv-138	232	4	2021	CARDINAL
ispiv-138	233	1	14th	ORDINAL
ispiv-138	233	2	chicago	GPE
ispiv-138	233	3	illinois, usa	GPE
ispiv-138	233	4	august 1-4	DATE