id	sid	eid	entity	type
ispiv-162	1	1	microsoft	ORG
ispiv-162	1	2	abstract_miraekim_rev.docx	PRODUCT
ispiv-162	1	3	kim1	PERSON
ispiv-162	1	4	daniel schanz2	PERSON
ispiv-162	1	5	matteo novara2	PERSON
ispiv-162	1	6	andreas schröder2	PERSON
ispiv-162	1	7	yeom1	ORG
ispiv-162	1	8	kyung chun kim1	PERSON
ispiv-162	2	1	1school	CARDINAL
ispiv-162	2	2	pusan national university	ORG
ispiv-162	2	3	46241	CARDINAL
ispiv-162	2	4	busan	GPE
ispiv-162	2	5	south korea	GPE
ispiv-162	2	6	2institute	CARDINAL
ispiv-162	2	7	german	NORP
ispiv-162	2	8	37073	CARDINAL
ispiv-162	2	9	germany	GPE
ispiv-162	7	1	three	CARDINAL
ispiv-162	7	2	lpt	ORG
ispiv-162	9	1	52 mm	QUANTITY
ispiv-162	9	2	3 mm	QUANTITY
ispiv-162	9	3	16	CARDINAL
ispiv-162	10	1	40 μm	CARDINAL
ispiv-162	11	1	four	CARDINAL
ispiv-162	11	2	4 khz	QUANTITY
ispiv-162	12	1	two	CARDINAL
ispiv-162	12	2	two	CARDINAL
ispiv-162	12	3	1,000 mm	QUANTITY
ispiv-162	13	1	about 80	CARDINAL
ispiv-162	13	2	50	CARDINAL
ispiv-162	14	1	0	CARDINAL
ispiv-162	14	2	45 degrees	QUANTITY
ispiv-162	14	3	12 mm	QUANTITY
ispiv-162	14	4	reynolds	ORG
ispiv-162	14	5	17,875	CARDINAL
ispiv-162	15	1	half	CARDINAL
ispiv-162	16	1	10 mm	QUANTITY
ispiv-162	16	2	0°	QUANTITY
ispiv-162	17	1	1	CARDINAL
ispiv-162	18	1	2d	CARDINAL
ispiv-162	18	2	3d	CARDINAL
ispiv-162	19	1	two	CARDINAL
ispiv-162	21	1	1	CARDINAL
ispiv-162	21	2	2	CARDINAL
ispiv-162	22	1	3	CARDINAL
ispiv-162	22	2	4	CARDINAL
ispiv-162	22	3	2021	DATE
ispiv-162	24	1	5	CARDINAL
ispiv-162	24	2	0.7 mm	QUANTITY
ispiv-162	25	1	3d	CARDINAL
ispiv-162	25	2	3d	CARDINAL
ispiv-162	25	3	0.42 mm	QUANTITY
ispiv-162	26	1	3d3c	CARDINAL
ispiv-162	27	1	2	CARDINAL
ispiv-162	28	1	three	CARDINAL
ispiv-162	29	1	about 180°	CARDINAL
ispiv-162	30	1	0°	CARDINAL
ispiv-162	31	1	3d	CARDINAL
ispiv-162	32	1	3	CARDINAL
ispiv-162	32	2	nearly zero	CARDINAL
ispiv-162	33	1	45°	CARDINAL
ispiv-162	33	2	0°	CARDINAL
ispiv-162	34	1	0°	CARDINAL
ispiv-162	34	2	45°	CARDINAL
ispiv-162	35	1	kim et al	PERSON
ispiv-162	36	1	6	CARDINAL
ispiv-162	37	1	four	CARDINAL
ispiv-162	37	2	°	CARDINAL
ispiv-162	38	1	1	CARDINAL
ispiv-162	38	2	lpt	ORG
ispiv-162	38	3	45°	TIME
ispiv-162	38	4	0°	CARDINAL
ispiv-162	38	5	45°	QUANTITY
ispiv-162	39	1	0°	CARDINAL
ispiv-162	40	1	2	CARDINAL
ispiv-162	40	2	10,000	CARDINAL
ispiv-162	40	3	0°	CARDINAL
ispiv-162	40	4	45°	TIME
ispiv-162	40	5	2	CARDINAL
ispiv-162	40	6	2	CARDINAL
ispiv-162	40	7	1.2 0.6	CARDINAL
ispiv-162	41	1	2	CARDINAL
ispiv-162	41	2	2	CARDINAL
ispiv-162	42	1	1.2 0.6	CARDINAL
ispiv-162	44	1	3	CARDINAL
ispiv-162	44	2	1	CARDINAL
ispiv-162	44	3	2008	DATE
ispiv-162	44	4	3d	CARDINAL
ispiv-162	45	1	45(4	DATE
ispiv-162	45	2	549	CARDINAL
ispiv-162	46	1	2	CARDINAL
ispiv-162	46	2	d.	NORP
ispiv-162	46	3	s.	PERSON
ispiv-162	46	4	b., & novara	ORG
ispiv-162	46	5	2012	DATE
ispiv-162	48	1	sci	ORG
ispiv-162	48	2	technol	PERSON
ispiv-162	48	3	024009	DATE
ispiv-162	49	1	3	CARDINAL
ispiv-162	49	2	d.	NORP
ispiv-162	49	3	s., & schröder	ORG
ispiv-162	49	4	a.	PERSON
ispiv-162	49	5	2016	DATE
ispiv-162	50	1	70	DATE
ispiv-162	51	1	4	CARDINAL
ispiv-162	51	2	d.	NORP
ispiv-162	51	3	novara m. & schröder a.	ORG
ispiv-162	51	4	2020	DATE
ispiv-162	52	1	3rd	ORDINAL
ispiv-162	52	2	lpt	ORG
ispiv-162	53	1	5	CARDINAL
ispiv-162	53	2	s.	GPE
ispiv-162	53	3	huhn	GPE
ispiv-162	53	4	f.	PERSON
ispiv-162	53	5	schanz	ORG
ispiv-162	53	6	d., & schröder	ORG
ispiv-162	53	7	a.	PERSON
ispiv-162	53	8	2016, july	DATE
ispiv-162	54	1	18th	ORDINAL
ispiv-162	54	2	lisbon	GPE
ispiv-162	54	3	portugal	GPE
ispiv-162	55	1	4	CARDINAL
ispiv-162	56	1	6	CARDINAL
ispiv-162	56	2	m., kim	PERSON
ispiv-162	56	3	d.	NORP
ispiv-162	56	4	yeom	GPE
ispiv-162	56	5	2020	DATE
ispiv-162	56	6	three	CARDINAL
ispiv-162	58	1	j. heat mass	PERSON
ispiv-162	58	2	161	CARDINAL
ispiv-162	58	3	120279	DATE
ispiv-162	59	1	the national research foundation	ORG
ispiv-162	59	2	korea(nrf	ORG
ispiv-162	59	3	korea	GPE
ispiv-162	59	4	2021r1c1c2009287	CARDINAL
ispiv-162	60	1	the deutsche forschungsgemeinschaft	ORG
ispiv-162	60	2	dfg	ORG
ispiv-162	61	1	1165/5-1	CARDINAL
ispiv-162	61	2	dfg	ORG
ispiv-162	61	3	1881	DATE
ispiv-162	61	4	2nd	ORDINAL