id	sid	eid	entity	type
ispiv-168	1	1	14th	ORDINAL
ispiv-168	1	2	2021	CARDINAL
ispiv-168	1	3	2021	CARDINAL
ispiv-168	1	4	t. käufer1∗	PERSON
ispiv-168	1	5	s. moller1	PERSON
ispiv-168	1	6	c. cierpka1	PERSON
ispiv-168	2	1	1	CARDINAL
ispiv-168	2	2	universität ilmenau	PERSON
ispiv-168	2	3	98693	CARDINAL
ispiv-168	2	4	germany	GPE
ispiv-168	2	5	2	CARDINAL
ispiv-168	2	6	universität ilmenau	PERSON
ispiv-168	2	7	98693	CARDINAL
ispiv-168	2	8	germany	GPE
ispiv-168	2	9	∗	CARDINAL
ispiv-168	6	1	eleven	CARDINAL
ispiv-168	6	2	18	CARDINAL
ispiv-168	6	3	21.6	CARDINAL
ispiv-168	7	1	90 percent	PERCENT
ispiv-168	8	1	the remaining 10 percent	PERCENT
ispiv-168	9	1	0.1 k	QUANTITY
ispiv-168	9	2	≈ 0.15	CARDINAL
ispiv-168	11	1	1	CARDINAL
ispiv-168	14	1	one	CARDINAL
ispiv-168	15	1	perform lif	PERSON
ispiv-168	15	2	one	CARDINAL
ispiv-168	15	3	two	CARDINAL
ispiv-168	19	1	2004	DATE
ispiv-168	23	1	2016	DATE
ispiv-168	23	2	2018	DATE
ispiv-168	23	3	gharib	ORG
ispiv-168	23	4	1991	DATE
ispiv-168	27	1	moller et al	PERSON
ispiv-168	28	1	2021	CARDINAL
ispiv-168	29	1	0.1 k	QUANTITY
ispiv-168	29	2	moller et al	PERSON
ispiv-168	30	1	2019	DATE
ispiv-168	31	1	rgb	ORG
ispiv-168	32	1	rgb	ORG
ispiv-168	34	1	2020	DATE
ispiv-168	35	1	rgb	ORG
ispiv-168	37	1	rosenberger	PERSON
ispiv-168	37	2	2016	CARDINAL
ispiv-168	38	1	three	CARDINAL
ispiv-168	38	2	rgb	ORG
ispiv-168	40	1	könig et al	PERSON
ispiv-168	41	1	2019	DATE
ispiv-168	42	1	2	CARDINAL
ispiv-168	43	1	1(a	CARDINAL
ispiv-168	44	1	55 mm	QUANTITY
ispiv-168	44	2	110 mm	PERSON
ispiv-168	44	3	two	CARDINAL
ispiv-168	44	4	1(b	CARDINAL
ispiv-168	45	1	1	CARDINAL
ispiv-168	53	1	twelve	CARDINAL
ispiv-168	53	2	1024	CARDINAL
ispiv-168	53	3	1160	CARDINAL
ispiv-168	54	1	6 mm	QUANTITY
ispiv-168	55	1	rosenberger	PERSON
ispiv-168	55	2	2016	CARDINAL
ispiv-168	61	1	≈ 2.5 mm	QUANTITY
ispiv-168	62	1	2	CARDINAL
ispiv-168	63	1	400 500	CARDINAL
ispiv-168	63	2	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	64	1	2	CARDINAL
ispiv-168	67	1	400	CARDINAL
ispiv-168	67	2	800	CARDINAL
ispiv-168	67	3	two	CARDINAL
ispiv-168	67	4	460	CARDINAL
ispiv-168	67	5	560	CARDINAL
ispiv-168	69	1	1	CARDINAL
ispiv-168	70	1	half	CARDINAL
ispiv-168	70	2	half	CARDINAL
ispiv-168	71	1	∆λ	GPE
ispiv-168	73	1	1	CARDINAL
ispiv-168	75	1	1 2	CARDINAL
ispiv-168	76	1	425	CARDINAL
ispiv-168	76	2	725	CARDINAL
ispiv-168	76	3	825	CARDINAL
ispiv-168	76	4	50	CARDINAL
ispiv-168	76	5	20	CARDINAL
ispiv-168	76	6	40	CARDINAL
ispiv-168	77	1	90	CARDINAL
ispiv-168	77	2	moller et al	PERSON
ispiv-168	78	1	2019	CARDINAL
ispiv-168	79	1	3	CARDINAL
ispiv-168	81	1	eleven	CARDINAL
ispiv-168	81	2	18	CARDINAL
ispiv-168	81	3	21.6	CARDINAL
ispiv-168	82	1	ten	CARDINAL
ispiv-168	83	1	twelve	CARDINAL
ispiv-168	84	1	ten	CARDINAL
ispiv-168	84	2	425	CARDINAL
ispiv-168	84	3	775	CARDINAL
ispiv-168	85	1	825	CARDINAL
ispiv-168	86	1	800	CARDINAL
ispiv-168	87	1	3	CARDINAL
ispiv-168	87	2	max	PERSON
ispiv-168	87	3	ten	CARDINAL
ispiv-168	87	4	425	CARDINAL
ispiv-168	88	1	18.0	CARDINAL
ispiv-168	88	2	19.5	CARDINAL
ispiv-168	88	3	20.5	CARDINAL
ispiv-168	89	1	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	91	1	425	CARDINAL
ispiv-168	91	2	450	CARDINAL
ispiv-168	91	3	475	CARDINAL
ispiv-168	91	4	500	CARDINAL
ispiv-168	91	5	550	CARDINAL
ispiv-168	91	6	575	CARDINAL
ispiv-168	91	7	600	CARDINAL
ispiv-168	91	8	625	CARDINAL
ispiv-168	91	9	675	CARDINAL
ispiv-168	91	10	725	CARDINAL
ispiv-168	91	11	3	CARDINAL
ispiv-168	91	12	70	CARDINAL
ispiv-168	94	1	moller et al	ORG
ispiv-168	95	1	2019	DATE
ispiv-168	98	1	21.5	CARDINAL
ispiv-168	98	2	20	CARDINAL
ispiv-168	98	3	20	CARDINAL
ispiv-168	101	1	32	CARDINAL
ispiv-168	101	2	32	CARDINAL
ispiv-168	101	3	16	CARDINAL
ispiv-168	105	1	nn	ORG
ispiv-168	106	1	nn	ORG
ispiv-168	106	2	perceptron	GPE
ispiv-168	107	1	2011	DATE
ispiv-168	108	1	first	ORDINAL
ispiv-168	108	2	ten	CARDINAL
ispiv-168	108	3	4	CARDINAL
ispiv-168	109	1	0 1 1 x	QUANTITY
ispiv-168	109	2	4	CARDINAL
ispiv-168	109	3	550	CARDINAL
ispiv-168	114	1	0	CARDINAL
ispiv-168	114	2	1	CARDINAL
ispiv-168	114	3	nine	CARDINAL
ispiv-168	115	1	twelve	CARDINAL
ispiv-168	115	2	ten	CARDINAL
ispiv-168	115	3	two	CARDINAL
ispiv-168	115	4	six	CARDINAL
ispiv-168	115	5	100	CARDINAL
ispiv-168	118	1	ten percent	PERCENT
ispiv-168	118	2	44	CARDINAL
ispiv-168	120	1	0.2 0.5 0.8 1.0 x	QUANTITY
ispiv-168	120	2	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	120	3	18 19	CARDINAL
ispiv-168	120	4	0.0 0.2 0.5 0.8 1.0 x	QUANTITY
ispiv-168	120	5	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	120	6	18 19	CARDINAL
ispiv-168	120	7	22	CARDINAL
ispiv-168	121	1	5	CARDINAL
ispiv-168	123	1	4	CARDINAL
ispiv-168	125	1	eleven	CARDINAL
ispiv-168	126	1	5(a	CARDINAL
ispiv-168	128	1	5(b	CARDINAL
ispiv-168	130	1	6(a	CARDINAL
ispiv-168	130	2	6(b	CARDINAL
ispiv-168	131	1	0.0 0.2 0.5 0.8 1.0	MONEY
ispiv-168	131	2	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	132	1	0.00 0.05 0.10	CARDINAL
ispiv-168	134	1	− tg	PERSON
ispiv-168	135	1	25 50	CARDINAL
ispiv-168	136	1	6	CARDINAL
ispiv-168	136	2	tp tg	PERSON
ispiv-168	136	3	3	CARDINAL
ispiv-168	137	1	tp tg	PERSON
ispiv-168	140	1	-0.1 k	QUANTITY
ispiv-168	140	2	0.1 k	QUANTITY
ispiv-168	140	3	moller et al	PERSON
ispiv-168	141	1	2019	DATE
ispiv-168	142	1	6(b	CARDINAL
ispiv-168	144	1	≈ 20.9	CARDINAL
ispiv-168	144	2	≈ 18.3	CARDINAL
ispiv-168	146	1	≈ 4 seconds	TIME
ispiv-168	151	1	0.5	CARDINAL
ispiv-168	151	2	7(b	CARDINAL
ispiv-168	152	1	tlin	PERSON
ispiv-168	152	2	tlin	PERSON
ispiv-168	153	1	tlin	PERSON
ispiv-168	154	1	tlin	PERSON
ispiv-168	155	1	tlin	PERSON
ispiv-168	155	2	≈ 0.15 k	QUANTITY
ispiv-168	158	1	0.0 0.2 0.5 0.8 1.0 x	QUANTITY
ispiv-168	158	2	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	159	1	18.5 19.0	CARDINAL
ispiv-168	159	2	19.5	CARDINAL
ispiv-168	159	3	20.0 20.5	CARDINAL
ispiv-168	160	1	0.0 0.2 0.4 0.6 0.8 1.0	QUANTITY
ispiv-168	160	2	18.5 19.0	CARDINAL
ispiv-168	160	3	19.5	CARDINAL
ispiv-168	160	4	20.5	CARDINAL
ispiv-168	160	5	21.0	CARDINAL
ispiv-168	161	1	− tlin	PERSON
ispiv-168	161	2	0.00 0.05 0.10 0.15 0.20	MONEY
ispiv-168	163	1	7	CARDINAL
ispiv-168	164	1	0.5	CARDINAL
ispiv-168	164	2	4	CARDINAL
ispiv-168	166	1	twelve	CARDINAL
ispiv-168	168	1	0.1	CARDINAL
ispiv-168	169	1	≈ 0.15	CARDINAL
ispiv-168	171	1	first	ORDINAL
ispiv-168	172	1	secondly	ORDINAL
ispiv-168	173	1	könig et al	PERSON
ispiv-168	174	1	2019	DATE
ispiv-168	176	1	andrei golomoz	PERSON
ispiv-168	176	2	sichard	PERSON
ispiv-168	176	3	richard fütterer	PERSON
ispiv-168	177	1	abram	PERSON
ispiv-168	177	2	2018	DATE
ispiv-168	178	1	64:93–156	CARDINAL
ispiv-168	178	2	eckert s	PERSON
ispiv-168	178	3	2020	DATE
ispiv-168	179	1	61:1–19	CARDINAL
ispiv-168	179	2	gharib	NORP
ispiv-168	179	3	1991	DATE
ispiv-168	180	1	11:77–86	CARDINAL
ispiv-168	180	2	funatani s	ORG
ispiv-168	180	3	fujisawa	ORG
ispiv-168	180	4	2004	DATE
ispiv-168	180	5	two	CARDINAL
ispiv-168	180	6	ccd	PRODUCT
ispiv-168	181	1	könig j	ORG
ispiv-168	181	2	moller s	PERSON
ispiv-168	181	3	2019	DATE
ispiv-168	182	1	109:109914	CARDINAL
ispiv-168	182	2	2016	CARDINAL
ispiv-168	182	3	two	CARDINAL
ispiv-168	183	1	27:115301 moller	QUANTITY
ispiv-168	183	2	könig j	ORG
ispiv-168	183	3	resagk	GPE
ispiv-168	183	4	2019	CARDINAL
ispiv-168	184	1	resagk	GPE
ispiv-168	184	2	2021	CARDINAL
ispiv-168	185	1	62:1–18	CARDINAL
ispiv-168	185	2	varoquaux g	PERSON
ispiv-168	185	3	michel	PERSON
ispiv-168	185	4	weiss	ORG
ispiv-168	185	5	perrot m	PERSON
ispiv-168	185	6	2011	DATE
ispiv-168	186	1	12:2825–2830	CARDINAL
ispiv-168	186	2	2016	CARDINAL
ispiv-168	187	1	2016	CARDINAL
ispiv-168	188	1	7–12	CARDINAL