id	sid	eid	entity	type
ispiv-171	1	1	14th	ORDINAL
ispiv-171	1	2	2021	CARDINAL
ispiv-171	1	3	2021	CARDINAL
ispiv-171	1	4	two	CARDINAL
ispiv-171	1	5	juan sebastian rubio1	PERSON
ispiv-171	1	6	rui ni1 1johns hopkins university	ORG
ispiv-171	1	7	baltimore	GPE
ispiv-171	1	8	md 21218	GPE
ispiv-171	3	1	two	CARDINAL
ispiv-171	4	1	sub-micron	CARDINAL
ispiv-171	4	2	piv data	ORG
ispiv-171	7	1	1	CARDINAL
ispiv-171	8	1	2017	CARDINAL
ispiv-171	8	2	dunn	PERSON
ispiv-171	8	3	2012	DATE
ispiv-171	9	1	2015	CARDINAL
ispiv-171	10	1	two	CARDINAL
ispiv-171	11	1	one	CARDINAL
ispiv-171	11	2	o(10−1000	ORG
ispiv-171	12	1	2014	DATE
ispiv-171	13	1	1991	DATE
ispiv-171	14	1	two	CARDINAL
ispiv-171	14	2	1994	DATE
ispiv-171	16	1	ptv	ORG
ispiv-171	18	1	2016	DATE
ispiv-171	18	2	2000	DATE
ispiv-171	20	1	2	CARDINAL
ispiv-171	20	2	johns hopkins university	ORG
ispiv-171	22	1	kim et al	PERSON
ispiv-171	22	2	2020	DATE
ispiv-171	23	1	0.25	CARDINAL
ispiv-171	26	1	one	CARDINAL
ispiv-171	27	1	13.5	CARDINAL
ispiv-171	27	2	8 mm	QUANTITY
ispiv-171	27	3	340	CARDINAL
ispiv-171	28	1	200	CARDINAL
ispiv-171	30	1	first	ORDINAL
ispiv-171	30	2	second	ORDINAL
ispiv-171	32	1	one	CARDINAL
ispiv-171	32	2	second	ORDINAL
ispiv-171	34	1	two	CARDINAL
ispiv-171	35	1	3	CARDINAL
ispiv-171	36	1	second	ORDINAL
ispiv-171	39	1	1	CARDINAL
ispiv-171	40	1	1	CARDINAL
ispiv-171	43	1	4	CARDINAL
ispiv-171	44	1	first	ORDINAL
ispiv-171	47	1	80nssc19k0488	DATE
ispiv-171	48	1	kyle d. gilroy	PERSON
ispiv-171	48	2	ph.d	ORG
ispiv-171	49	1	andy kubit	PERSON
ispiv-171	49	2	ametek	ORG
ispiv-171	50	1	soria j (	ORG
ispiv-171	50	2	2014	DATE
ispiv-171	50	3	3d	CARDINAL
ispiv-171	51	1	55:1842	CARDINAL
ispiv-171	51	2	peña fernández jj	PERSON
ispiv-171	51	3	taddeucci	PERSON
ispiv-171	51	4	2017	CARDINAL
ispiv-171	52	1	journal of geophysical	ORG
ispiv-171	52	2	122:6031–6045 dunn mg	QUANTITY
ispiv-171	52	3	2012	DATE
ispiv-171	53	1	134	CARDINAL
ispiv-171	53	2	051001	CARDINAL
ispiv-171	54	1	2016	DATE
ispiv-171	55	1	20	CARDINAL
ispiv-171	55	2	kt	PERSON
ispiv-171	55	3	2000	DATE
ispiv-171	55	4	two	CARDINAL
ispiv-171	56	1	kim t	PERSON
ispiv-171	56	2	capecelatro j	PERSON
ispiv-171	56	3	shallcross gs	PERSON
ispiv-171	56	4	mehta m	PERSON
ispiv-171	56	5	2020	DATE
ispiv-171	57	1	scitech 2020	ORG
ispiv-171	58	1	1326	CARDINAL
ispiv-171	58	2	varghese p	PERSON
ispiv-171	59	1	52:1–13	CARDINAL
ispiv-171	59	2	1991	DATE
ispiv-171	60	1	3:1915–1923	CARDINAL
ispiv-171	60	2	1994	DATE
ispiv-171	61	1	3:299–311	CARDINAL