id	sid	eid	entity	type
ispiv-24	1	1	14th	ORDINAL
ispiv-24	1	2	2021	CARDINAL
ispiv-24	1	3	2021	CARDINAL
ispiv-24	1	4	s. sachs1∗	PERSON
ispiv-24	1	5	c. cierpka1	GPE
ispiv-24	1	6	j. könig1	PERSON
ispiv-24	2	1	universität ilmenau	PERSON
ispiv-24	2	2	ilmenau	GPE
ispiv-24	2	3	germany	GPE
ispiv-24	2	4	∗	CARDINAL
ispiv-24	2	5	1	CARDINAL
ispiv-24	2	6	ssaw	GPE
ispiv-24	4	1	kirby	PERSON
ispiv-24	4	2	2017	CARDINAL
ispiv-24	8	1	cierpka et al	PERSON
ispiv-24	8	2	2010	DATE
ispiv-24	9	1	ssaw	GPE
ispiv-24	10	1	three	CARDINAL
ispiv-24	11	1	2	CARDINAL
ispiv-24	12	1	1	CARDINAL
ispiv-24	12	2	500	CARDINAL
ispiv-24	12	3	between 85 µm and 480	CARDINAL
ispiv-24	12	4	two	CARDINAL
ispiv-24	12	5	linbo3	ORG
ispiv-24	13	1	two	CARDINAL
ispiv-24	14	1	25.72	CARDINAL
ispiv-24	14	2	194.8	CARDINAL
ispiv-24	15	1	nemesys	ORG
ispiv-24	15	2	cetoni gmbh	PERSON
ispiv-24	15	3	80 %	PERCENT
ispiv-24	15	4	20 %	PERCENT
ispiv-24	16	1	1.14	CARDINAL
ispiv-24	18	1	three	CARDINAL
ispiv-24	18	2	linbo3	ORG
ispiv-24	19	1	kiebert et al	PERSON
ispiv-24	20	1	2017	CARDINAL
ispiv-24	21	1	1	CARDINAL
ispiv-24	21	2	ssaw	GPE
ispiv-24	23	1	2	CARDINAL
ispiv-24	23	2	194.8	CARDINAL
ispiv-24	23	3	25.72	CARDINAL
ispiv-24	24	1	x′	CARDINAL
ispiv-24	25	1	250	CARDINAL
ispiv-24	26	1	90.7 µm	MONEY
ispiv-24	26	2	ssaw	GPE
ispiv-24	27	1	3	CARDINAL
ispiv-24	27	2	194.8	CARDINAL
ispiv-24	27	3	25.72	CARDINAL
ispiv-24	28	1	2a	CARDINAL
ispiv-24	28	2	2b	CARDINAL
ispiv-24	29	1	10×800×10	CARDINAL
ispiv-24	31	1	two	CARDINAL
ispiv-24	32	1	2a	CARDINAL
ispiv-24	33	1	2c	CARDINAL
ispiv-24	33	2	3d	CARDINAL
ispiv-24	35	1	2d	DATE
ispiv-24	35	2	two	CARDINAL
ispiv-24	36	1	4	CARDINAL
ispiv-24	36	2	ssaw	GPE
ispiv-24	36	3	3d3c	CARDINAL
ispiv-24	37	1	3d	CARDINAL
ispiv-24	38	1	dfg	ORG
ispiv-24	38	2	185/8-1	CARDINAL
ispiv-24	40	1	segura	GPE
ispiv-24	40	2	hain	PERSON
ispiv-24	40	3	kähler	PERSON
ispiv-24	40	4	2010	DATE
ispiv-24	41	1	meas sci technol	ORG
ispiv-24	41	2	kiebert f	PERSON
ispiv-24	41	3	wege s	PERSON
ispiv-24	41	4	könig j	PERSON
ispiv-24	41	5	schmidt h (	ORG
ispiv-24	41	6	2017	CARDINAL
ispiv-24	41	7	3d	CARDINAL
ispiv-24	41	8	wace	ORG
ispiv-24	42	1	17:2104–2114	CARDINAL
ispiv-24	42	2	kirby	PERSON
ispiv-24	42	3	2017	CARDINAL
ispiv-24	42	4	300	CARDINAL
ispiv-24	42	5	100	CARDINAL
ispiv-24	43	1	89:12192–12200	CARDINAL