id	sid	eid	entity	type
ispiv-43	1	1	14th	ORDINAL
ispiv-43	1	2	2021	CARDINAL
ispiv-43	1	3	2021	CARDINAL
ispiv-43	1	4	m. shimura1∗	PERSON
ispiv-43	1	5	e. yokoyama1	PERSON
ispiv-43	1	6	h. kosuda1	PERSON
ispiv-43	1	7	m. kamata2	PERSON
ispiv-43	1	8	nakabeppu2	DATE
ispiv-43	1	9	t. yokomori3	PERSON
ispiv-43	1	10	m. tanahashi1	PERSON
ispiv-43	1	11	1 tokyo institute of technology	ORG
ispiv-43	1	12	tokyo	GPE
ispiv-43	1	13	japan 2 meiji university	ORG
ispiv-43	1	14	kanagawa	GPE
ispiv-43	1	15	japan 3	ORG
ispiv-43	1	16	keio university	ORG
ispiv-43	1	17	kanagawa	GPE
ispiv-43	1	18	japan	GPE
ispiv-43	1	19	∗	CARDINAL
ispiv-43	4	1	2013	DATE
ispiv-43	4	2	up to 1100	CARDINAL
ispiv-43	6	1	shimura et al.	PERSON
ispiv-43	6	2	2018	DATE
ispiv-43	6	3	2000	CARDINAL
ispiv-43	7	1	30	CARDINAL
ispiv-43	7	2	tdc	GPE
ispiv-43	7	3	15	CARDINAL
ispiv-43	7	4	tdc	GPE
ispiv-43	8	1	two	CARDINAL
ispiv-43	10	1	shimura et al.	PERSON
ispiv-43	10	2	2018	DATE
ispiv-43	10	3	2019	DATE
ispiv-43	11	1	75 mm	QUANTITY
ispiv-43	11	2	112.5 mm	QUANTITY
ispiv-43	12	1	250 mm	QUANTITY
ispiv-43	13	1	two	CARDINAL
ispiv-43	13	2	29 mm	QUANTITY
ispiv-43	13	3	two	CARDINAL
ispiv-43	13	4	25 mm	QUANTITY
ispiv-43	14	1	13.0	CARDINAL
ispiv-43	17	1	2000	DATE
ispiv-43	18	1	shimura et al.	PERSON
ispiv-43	18	2	2018	DATE
ispiv-43	18	3	2019	DATE
ispiv-43	19	1	two	CARDINAL
ispiv-43	19	2	ls-2131	ORG
ispiv-43	19	3	150	CARDINAL
ispiv-43	19	4	532	CARDINAL
ispiv-43	20	1	180	CARDINAL
ispiv-43	21	1	ccd	PRODUCT
ispiv-43	21	2	princeton technology	ORG
ispiv-43	21	3	18 degrees	QUANTITY
ispiv-43	22	1	1000 mm	QUANTITY
ispiv-43	23	1	sio2	PERSON
ispiv-43	23	2	1	CARDINAL
ispiv-43	24	1	the micro piv	ORG
ispiv-43	24	2	about 6.6	CARDINAL
ispiv-43	25	1	1.5	CARDINAL
ispiv-43	26	1	the micro piv	ORG
ispiv-43	26	2	3.5 mm × 3.5 mm	QUANTITY
ispiv-43	29	1	piv	ORG
ispiv-43	29	2	108.8	CARDINAL
ispiv-43	30	1	54.4	CARDINAL
ispiv-43	31	1	first	ORDINAL
ispiv-43	31	2	about 27.2 µm	CARDINAL
ispiv-43	32	1	345	CARDINAL
ispiv-43	33	1	2000	DATE
ispiv-43	33	2	three	CARDINAL
ispiv-43	34	1	shimura et al.	PERSON
ispiv-43	34	2	2018	DATE
ispiv-43	36	1	1(a	CARDINAL
ispiv-43	36	2	w.	PERSON
ispiv-43	38	1	1(a	CARDINAL
ispiv-43	40	1	54.4%	PERCENT
ispiv-43	40	2	19.5%	PERCENT
ispiv-43	40	3	c3	PERSON
ispiv-43	40	4	19.5%	PERCENT
ispiv-43	40	5	6.6%	PERCENT
ispiv-43	41	1	1(b	CARDINAL
ispiv-43	42	1	1(a	CARDINAL
ispiv-43	45	1	c3	PERSON
ispiv-43	46	1	less than half	CARDINAL
ispiv-43	47	1	fiscal year 2020	DATE
ispiv-43	49	1	2013	DATE
ispiv-43	50	1	14:247–259 matsuda m	QUANTITY
ispiv-43	50	2	minamoto y	PERSON
ispiv-43	50	3	shimura m	PERSON
ispiv-43	50	4	n (2019	DATE
ispiv-43	52	1	january	DATE
ispiv-43	52	2	yoshida s	PERSON
ispiv-43	52	3	osawa k	PERSON
ispiv-43	52	4	minamoto y, yokomori	PERSON
ispiv-43	52	5	iwamoto k	PERSON
ispiv-43	52	6	kosaka h (	ORG
ispiv-43	52	7	2018	DATE
ispiv-43	53	1	1468087418774710	DATE
ispiv-43	53	2	1	CARDINAL