id	sid	eid	entity	type
ispiv-44	1	1	14th	ORDINAL
ispiv-44	1	2	2021	CARDINAL
ispiv-44	1	3	2021	CARDINAL
ispiv-44	1	4	v. valori1∗	PERSON
ispiv-44	1	5	a. thieme1	PERSON
ispiv-44	1	6	c. cierpka1	GPE
ispiv-44	1	7	j. schumacher1,2 1	PERSON
ispiv-44	1	8	technische	ORG
ispiv-44	1	9	universität ilmenau	PERSON
ispiv-44	1	10	d-98684 ilmenau	GPE
ispiv-44	1	11	germany	GPE
ispiv-44	1	12	2	CARDINAL
ispiv-44	1	13	new york university	ORG
ispiv-44	1	14	tandon school of engineering	ORG
ispiv-44	1	15	new york city	GPE
ispiv-44	1	16	ny 11201	GPE
ispiv-44	1	17	rbc	ORG
ispiv-44	3	1	104,1×	CARDINAL
ispiv-44	5	1	105	CARDINAL
ispiv-44	5	2	0.7	CARDINAL
ispiv-44	6	1	three	CARDINAL
ispiv-44	6	2	up to 4.5	CARDINAL
ispiv-44	7	1	dns	ORG
ispiv-44	8	1	rbc	ORG
ispiv-44	8	2	10	CARDINAL
ispiv-44	8	3	w	ORG
ispiv-44	8	4	3 cm	QUANTITY
ispiv-44	9	1	kästner et al	PERSON
ispiv-44	10	1	2018	DATE
ispiv-44	10	2	3c2d	CARDINAL
ispiv-44	11	1	rbc	ORG
ispiv-44	11	2	10	CARDINAL
ispiv-44	14	1	10	CARDINAL
ispiv-44	14	2	10	CARDINAL
ispiv-44	14	3	10	CARDINAL
ispiv-44	14	4	piv -10	PRODUCT
ispiv-44	16	1	10	CARDINAL
ispiv-44	16	2	10	CARDINAL
ispiv-44	16	3	10	CARDINAL
ispiv-44	16	4	1	CARDINAL
ispiv-44	16	5	dns	ORG
ispiv-44	17	1	1.5×104,2×104,1×105,2×105,5×105	CARDINAL
ispiv-44	17	2	firstly	ORDINAL
ispiv-44	19	1	2018	DATE
ispiv-44	19	2	cierpka et al	PERSON
ispiv-44	20	1	2019	DATE
ispiv-44	21	1	about 25	CARDINAL
ispiv-44	22	1	2018	DATE
ispiv-44	22	2	valori et al	PERSON
ispiv-44	23	1	2019	DATE
ispiv-44	24	1	2100 -10	FAC
ispiv-44	25	1	0 5	CARDINAL
ispiv-44	25	2	xe	ORG
ispiv-44	25	3	2	CARDINAL
ispiv-44	25	4	xe	ORG
ispiv-44	28	1	dns	ORG
ispiv-44	28	2	1(a	CARDINAL
ispiv-44	28	3	1(b	CARDINAL
ispiv-44	29	1	pdf	ORG
ispiv-44	30	1	schumacher	PERSON
ispiv-44	30	2	2021	CARDINAL
ispiv-44	31	1	2.5× 105	CARDINAL
ispiv-44	32	1	dns	ORG
ispiv-44	32	2	1881	DATE
ispiv-44	32	3	the deutsche forschungsgemeinschaft	ORG
ispiv-44	32	4	marie skłodowska-curie	PERSON
ispiv-44	32	5	101024531	DATE
ispiv-44	32	6	the european union	ORG
ispiv-44	33	1	schumacher j	PERSON
ispiv-44	33	2	2019	DATE
ispiv-44	34	1	109:109841	CARDINAL
ispiv-44	34	2	resagk	GPE
ispiv-44	34	3	junghähnel m	PERSON
ispiv-44	34	4	schumacher j	PERSON
ispiv-44	34	5	2018	DATE
ispiv-44	35	1	2018	DATE
ispiv-44	37	1	delft university of technology	ORG
ispiv-44	37	2	elsinga ge	PERSON
ispiv-44	37	3	rohde m	PERSON
ispiv-44	37	4	van der hagen	PERSON
ispiv-44	37	5	2019	CARDINAL
ispiv-44	38	1	60:143	CARDINAL
ispiv-44	38	2	schumacher j	PERSON
ispiv-44	38	3	2021	CARDINAL