id	sid	eid	entity	type
ispiv-58	1	1	microsoft	ORG
ispiv-58	1	2	1	CARDINAL
ispiv-58	1	3	darma	ORG
ispiv-58	1	4	wei-hsin	PERSON
ispiv-58	1	5	tien1 1	ORG
ispiv-58	1	6	national taiwan university of science and technology	ORG
ispiv-58	1	7	taipei	GPE
ispiv-58	1	8	taiwan	GPE
ispiv-58	1	9	2	CARDINAL
ispiv-58	2	1	technologies[3-7	PRODUCT
ispiv-58	3	1	esp[8-10	DATE
ispiv-58	5	1	two	CARDINAL
ispiv-58	6	1	two	CARDINAL
ispiv-58	6	2	four	CARDINAL
ispiv-58	6	3	tio2	GPE
ispiv-58	7	1	2.36	CARDINAL
ispiv-58	7	2	4.18	CARDINAL
ispiv-58	7	3	8 kv	QUANTITY
ispiv-58	7	4	12 kv	QUANTITY
ispiv-58	7	5	16 kv	QUANTITY
ispiv-58	8	1	3-d	QUANTITY
ispiv-58	9	1	8 kv	QUANTITY
ispiv-58	9	2	12 kv	QUANTITY
ispiv-58	9	3	2.36	CARDINAL
ispiv-58	9	4	tio2	GPE
ispiv-58	9	5	50.6%	PERCENT
ispiv-58	9	6	76.0%	PERCENT
ispiv-58	9	7	33.5%	PERCENT
ispiv-58	9	8	51.9%	PERCENT
ispiv-58	10	1	4.18	CARDINAL
ispiv-58	10	2	tio2	ORG
ispiv-58	10	3	52.7%	PERCENT
ispiv-58	10	4	59.2%	PERCENT
ispiv-58	10	5	59.4%	PERCENT
ispiv-58	10	6	65.9%	PERCENT
ispiv-58	10	7	8 kv	QUANTITY
ispiv-58	10	8	12 kv	QUANTITY
ispiv-58	11	1	piv	PERSON
ispiv-58	11	2	3.12e-06	CARDINAL
ispiv-58	12	1	tio2	ORG
ispiv-58	12	2	1.15e-03	CARDINAL
ispiv-58	14	1	-1.0	ORG
ispiv-58	14	2	1.0	CARDINAL
ispiv-58	16	1	only half	CARDINAL
ispiv-58	17	1	tio2	ORG
ispiv-58	18	1	1	CARDINAL
ispiv-58	18	2	two	CARDINAL
ispiv-58	18	3	2	CARDINAL
ispiv-58	18	4	2 piv	PERCENT
ispiv-58	18	5	2.63	CARDINAL
ispiv-58	18	6	8	CARDINAL
ispiv-58	18	7	16	CARDINAL
ispiv-58	18	8	four	CARDINAL
ispiv-58	18	9	four	CARDINAL
ispiv-58	19	1	0.25	CARDINAL
ispiv-58	19	2	0.5	CARDINAL
ispiv-58	20	1	0.75	CARDINAL
ispiv-58	21	1	1	CARDINAL
ispiv-58	21	2	f. sánchez-soberón	PERSON
ispiv-58	21	3	pm10, pm2	ORG
ispiv-58	21	4	5	CARDINAL
ispiv-58	21	5	two	CARDINAL
ispiv-58	22	1	120	CARDINAL
ispiv-58	23	1	109-116	CARDINAL
ispiv-58	23	2	2015	DATE
ispiv-58	24	1	2	CARDINAL
ispiv-58	24	2	j. t. zelikoff et al.	PERSON
ispiv-58	24	3	15	CARDINAL
ispiv-58	24	4	2	CARDINAL
ispiv-58	25	1	131-150	CARDINAL
ispiv-58	25	2	2003	DATE
ispiv-58	26	1	3	CARDINAL
ispiv-58	26	2	h. j. white	PERSON
ispiv-58	27	1	addison-wesley pub.	ORG
ispiv-58	28	1	1963	DATE
ispiv-58	29	1	4	CARDINAL
ispiv-58	29	2	j. böhm	PERSON
ispiv-58	30	1	amsterdam	GPE
ispiv-58	30	2	1982	DATE
ispiv-58	31	1	5	CARDINAL
ispiv-58	31	2	s. masuda	PERSON
ispiv-58	31	3	s. hosokawa	PERSON
ispiv-58	31	4	marcel dekker	PERSON
ispiv-58	31	5	new york	GPE
ispiv-58	31	6	1995	DATE
ispiv-58	32	1	441-480	CARDINAL
ispiv-58	33	1	6	CARDINAL
ispiv-58	33	2	a. mizuno	PERSON
ispiv-58	33	3	7	CARDINAL
ispiv-58	33	4	5	CARDINAL
ispiv-58	34	1	615-624	CARDINAL
ispiv-58	34	2	2000	DATE
ispiv-58	35	1	7	CARDINAL
ispiv-58	35	2	e. m. dass	PERSON
ispiv-58	37	1	3d	CARDINAL
ispiv-58	38	1	57	DATE
ispiv-58	39	1	656-669	CARDINAL
ispiv-58	39	2	2018	DATE
ispiv-58	40	1	8	CARDINAL
ispiv-58	40	2	j. podliński	PERSON
ispiv-58	40	3	m. kocik	PERSON
ispiv-58	40	4	r. barbucha	PERSON
ispiv-58	40	5	a. niewulis	PERSON
ispiv-58	40	6	j. mizeraczyk	PERSON
ispiv-58	40	7	a. mizuno	PERSON
ispiv-58	40	8	3d	CARDINAL
ispiv-58	40	9	czechoslovak journal of physics	ORG
ispiv-58	40	10	56	DATE
ispiv-58	41	1	-b1016	PERSON
ispiv-58	41	2	10/01 2006	DATE
ispiv-58	42	1	9	CARDINAL
ispiv-58	42	2	a. niewulis	PERSON
ispiv-58	42	3	j. podliński	PERSON
ispiv-58	42	4	m. kocik	PERSON
ispiv-58	42	5	r. barbucha	PERSON
ispiv-58	42	6	j. mizeraczyk	PERSON
ispiv-58	42	7	a. mizuno	PERSON
ispiv-58	42	8	3d	CARDINAL
ispiv-58	43	1	65	DATE
ispiv-58	43	2	12	CARDINAL
ispiv-58	44	1	728-734	CARDINAL
ispiv-58	44	2	2007/11/01/ 2007	DATE
ispiv-58	45	1	10	CARDINAL
ispiv-58	45	2	c. wang	PERSON
ispiv-58	45	3	z. xie	PERSON
ispiv-58	45	4	b. xu	PERSON
ispiv-58	45	5	j. li	PERSON
ispiv-58	45	6	x. zhou	PERSON
ispiv-58	45	7	16	CARDINAL
ispiv-58	45	8	06/01 2016	DATE