id	sid	eid	entity	type
ispiv-59	1	1	microsoft	ORG
ispiv-59	1	2	ispiv2021	GPE
ispiv-59	1	3	14th	ORDINAL
ispiv-59	1	4	2021	CARDINAL
ispiv-59	1	5	chicago	GPE
ispiv-59	1	6	three	CARDINAL
ispiv-59	1	7	sheng po hung	PERSON
ispiv-59	1	8	wei-hsin	PERSON
ispiv-59	1	9	tien1 1	ORG
ispiv-59	1	10	national taiwan university of science and technology	ORG
ispiv-59	1	11	taipei	GPE
ispiv-59	1	12	taiwan	GPE
ispiv-59	1	13	2	CARDINAL
ispiv-59	2	1	3-d	QUANTITY
ispiv-59	3	1	3-d	QUANTITY
ispiv-59	4	1	20°	QUANTITY
ispiv-59	4	2	30°	QUANTITY
ispiv-59	5	1	12	CARDINAL
ispiv-59	5	2	20v	CARDINAL
ispiv-59	6	1	450	CARDINAL
ispiv-59	6	2	1.79μm	CARDINAL
ispiv-59	6	3	10x	CARDINAL
ispiv-59	6	4	10	CARDINAL
ispiv-59	6	5	second	ORDINAL
ispiv-59	7	1	3-d	QUANTITY
ispiv-59	9	1	550×685×840 μm	QUANTITY
ispiv-59	10	1	3d	CARDINAL
ispiv-59	13	1	3-d	QUANTITY
ispiv-59	14	1	1	CARDINAL
ispiv-59	14	2	dihm	GPE
ispiv-59	15	1	ispiv2021	GPE
ispiv-59	15	2	2021	CARDINAL
ispiv-59	15	3	chicago	GPE
ispiv-59	15	4	2	CARDINAL
ispiv-59	16	1	20°	QUANTITY
ispiv-59	16	2	30°	QUANTITY
ispiv-59	17	1	1	CARDINAL
ispiv-59	17	2	a. ozcelik et al.	PERSON
ispiv-59	17	3	english	LANGUAGE
ispiv-59	17	4	86	DATE
ispiv-59	17	5	10	CARDINAL
ispiv-59	18	1	5083-5088	DATE
ispiv-59	18	2	05 / 20 / 2014	CARDINAL
ispiv-59	19	1	2	CARDINAL
ispiv-59	19	2	x. mao	PERSON
ispiv-59	19	3	b. k. juluri	PERSON
ispiv-59	19	4	m. i. lapsley	PERSON
ispiv-59	19	5	z. s. stratton	PERSON
ispiv-59	19	6	t. j. huang	PERSON
ispiv-59	19	7	english	LANGUAGE
ispiv-59	19	8	8	CARDINAL
ispiv-59	19	9	1	CARDINAL
ispiv-59	20	1	139-144	CARDINAL
ispiv-59	21	1	3	CARDINAL
ispiv-59	21	2	m. v. patel	PERSON
ispiv-59	21	3	i. a. nanayakkara	PERSON
ispiv-59	21	4	m. g. simon	PERSON
ispiv-59	21	5	a. p. lee	PERSON
ispiv-59	21	6	14	DATE
ispiv-59	21	7	19	CARDINAL
ispiv-59	22	1	3860-72	DATE
ispiv-59	22	2	oct 7 2014	DATE
ispiv-59	23	1	4	CARDINAL
ispiv-59	23	2	3d	CARDINAL
ispiv-59	24	1	7	CARDINAL
ispiv-59	24	2	4	CARDINAL
ispiv-59	25	1	713-755	CARDINAL
ispiv-59	25	2	dec 2015	DATE
ispiv-59	26	1	5	CARDINAL
ispiv-59	26	2	j. s. hong	PERSON
ispiv-59	26	3	c. g. liu	PERSON
ispiv-59	26	4	m. k. kim	PERSON
ispiv-59	26	5	three	CARDINAL
ispiv-59	27	1	53	DATE
ispiv-59	27	2	11	CARDINAL
ispiv-59	27	3	nov 2014	DATE
ispiv-59	28	1	112306	DATE
ispiv-59	29	1	6	CARDINAL
ispiv-59	29	2	j. garcia-sucerquia	PERSON
ispiv-59	29	3	w. b. xu	PERSON
ispiv-59	29	4	s. k. jericho	PERSON
ispiv-59	29	5	m. h. jericho	PERSON
ispiv-59	29	6	h. j. kreuzer	PERSON
ispiv-59	29	7	english	LANGUAGE
ispiv-59	30	1	45	DATE
ispiv-59	30	2	5	CARDINAL
ispiv-59	31	1	836-850	CARDINAL
ispiv-59	31	2	feb 2006	DATE
ispiv-59	32	1	7	CARDINAL
ispiv-59	32	2	f. c. cheong	PERSON
ispiv-59	32	3	b. j. krishnatreya	PERSON
ispiv-59	32	4	d. g. grier	PERSON
ispiv-59	32	5	three	CARDINAL
ispiv-59	32	6	18	CARDINAL
ispiv-59	32	7	13	CARDINAL
ispiv-59	33	1	13563-13573	DATE
ispiv-59	33	2	2010	DATE