id	sid	eid	entity	type
ispiv-65	1	1	microsoft word schanz_etal_ispiv21_paper2.docx 14th international	ORG
ispiv-65	1	2	•	CARDINAL
ispiv-65	1	3	2021 •	DATE
ispiv-65	1	4	chicago	GPE
ispiv-65	1	5	il usa shake-the	ORG
ispiv-65	1	6	d. schanz1	PERSON
ispiv-65	1	7	m. novara1	PERSON
ispiv-65	1	8	a. schröder1 1	PERSON
ispiv-65	1	9	german	NORP
ispiv-65	1	10	germany	GPE
ispiv-65	5	1	pusan national university	ORG
ispiv-65	7	1	1	CARDINAL
ispiv-65	7	2	lpt	ORG
ispiv-65	7	3	more than three decades	DATE
ispiv-65	7	4	3d	CARDINAL
ispiv-65	7	5	nishino et al	PERSON
ispiv-65	7	6	1989	DATE
ispiv-65	7	7	maas et al	PERSON
ispiv-65	7	8	1993	DATE
ispiv-65	7	9	malik et al	PERSON
ispiv-65	7	10	1993	DATE
ispiv-65	8	1	maas et al	PERSON
ispiv-65	8	2	1993	DATE
ispiv-65	8	3	ouellette et al	PERSON
ispiv-65	8	4	2006	DATE
ispiv-65	11	1	0.005	CARDINAL
ispiv-65	11	2	200	CARDINAL
ispiv-65	12	1	2013	DATE
ispiv-65	12	2	jahn et al	PERSON
ispiv-65	12	3	2021	CARDINAL
ispiv-65	12	4	first	ORDINAL
ispiv-65	14	1	lpt	ORG
ispiv-65	14	2	2016	DATE
ispiv-65	15	1	2013	DATE
ispiv-65	15	2	jahn et al	PERSON
ispiv-65	15	3	2021	CARDINAL
ispiv-65	16	1	3d	CARDINAL
ispiv-65	18	1	0.2	CARDINAL
ispiv-65	18	2	raffel et al	PERSON
ispiv-65	18	3	2018	DATE
ispiv-65	18	4	0.15	CARDINAL
ispiv-65	18	5	2017	DATE
ispiv-65	18	6	bosbach	GPE
ispiv-65	18	7	2019	DATE
ispiv-65	20	1	14th	ORDINAL
ispiv-65	20	2	•	CARDINAL
ispiv-65	20	3	2021 •	DATE
ispiv-65	20	4	chicago	GPE
ispiv-65	20	5	il usa	ORG
ispiv-65	20	6	four	CARDINAL
ispiv-65	21	1	at least four	CARDINAL
ispiv-65	25	1	10-20	CARDINAL
ispiv-65	29	1	two	CARDINAL
ispiv-65	30	1	two	CARDINAL
ispiv-65	36	1	3d	CARDINAL
ispiv-65	38	1	10	CARDINAL
ispiv-65	40	1	one	CARDINAL
ispiv-65	40	2	3d	CARDINAL
ispiv-65	41	1	one	CARDINAL
ispiv-65	43	1	2016	DATE
ispiv-65	45	1	2	CARDINAL
ispiv-65	51	1	14th	ORDINAL
ispiv-65	51	2	•	CARDINAL
ispiv-65	51	3	2021 •	DATE
ispiv-65	51	4	chicago	GPE
ispiv-65	51	5	il usa 1	ORG
ispiv-65	52	1	at least one	CARDINAL
ispiv-65	52	2	first	ORDINAL
ispiv-65	52	3	50	CARDINAL
ispiv-65	52	4	50th	ORDINAL
ispiv-65	52	5	2	CARDINAL
ispiv-65	53	1	3	CARDINAL
ispiv-65	54	1	2016	DATE
ispiv-65	55	1	4	CARDINAL
ispiv-65	56	1	5	CARDINAL
ispiv-65	57	1	3 to 6	CARDINAL
ispiv-65	57	2	1	CARDINAL
ispiv-65	60	1		CARDINAL
ispiv-65	61	1	the last one	DATE
ispiv-65	61	2	two	CARDINAL
ispiv-65	62	1		CARDINAL
ispiv-65	63	1	two	CARDINAL
ispiv-65	63	2	first	ORDINAL
ispiv-65	64	1	2016	DATE
ispiv-65	65	1		CARDINAL
ispiv-65	71	1	two	CARDINAL
ispiv-65	72	1	1	CARDINAL
ispiv-65	72	2		CARDINAL
ispiv-65	75	1		CARDINAL
ispiv-65	79	1		CARDINAL
ispiv-65	81	1	at least one	CARDINAL
ispiv-65	81	2	1	CARDINAL
ispiv-65	86	1	four	CARDINAL
ispiv-65	86	2	2nd	ORDINAL
ispiv-65	86	3	four	CARDINAL
ispiv-65	88	1	14th	ORDINAL
ispiv-65	88	2	•	CARDINAL
ispiv-65	88	3	2021 •	DATE
ispiv-65	88	4	chicago	GPE
ispiv-65	88	5	il usa	ORG
ispiv-65	88	6	0.2 to 1.5	CARDINAL
ispiv-65	89	1	2nd	ORDINAL
ispiv-65	90	1	⃗	ORG
ispiv-65	91	1	2.	CARDINAL
ispiv-65	91	2	 $01	MONEY
ispiv-65	93	1	2	CARDINAL
ispiv-65	96	1	3d	CARDINAL
ispiv-65	97	1	2	CARDINAL
ispiv-65	98	1	one	CARDINAL
ispiv-65	98	2	2	CARDINAL
ispiv-65	100	1	 34	CARDINAL
ispiv-65	101	1	2016	DATE
ispiv-65	101	2	⃗	ORG
ispiv-65	101	3	⃗	CARDINAL
ispiv-65	103	1	⃗	ORG
ispiv-65	104	1	⃗	ORG
ispiv-65	105	1	1	CARDINAL
ispiv-65	109	1	2013	DATE
ispiv-65	111	1	3	CARDINAL
ispiv-65	111	2	3.1	CARDINAL
ispiv-65	111	3	16	CARDINAL
ispiv-65	112	1	3 mm	QUANTITY
ispiv-65	113	1	52 mm	QUANTITY
ispiv-65	113	2	45°	QUANTITY
ispiv-65	114	1	6	CARDINAL
ispiv-65	114	2	reynolds	ORG
ispiv-65	114	3	17,875	CARDINAL
ispiv-65	114	4	bc	ORG
ispiv-65	114	5	8	CARDINAL
ispiv-65	115	1	4	CARDINAL
ispiv-65	115	2	kim et al	PERSON
ispiv-65	115	3	2018	DATE
ispiv-65	118	1	40μm	ORDINAL
ispiv-65	118	2	two	CARDINAL
ispiv-65	118	3	stasicki et al	PERSON
ispiv-65	119	1	two	CARDINAL
ispiv-65	119	2	1000 mm	QUANTITY
ispiv-65	120	1	1	CARDINAL
ispiv-65	121	1	14th	ORDINAL
ispiv-65	121	2	•	CARDINAL
ispiv-65	121	3	2021 •	DATE
ispiv-65	121	4	chicago	GPE
ispiv-65	121	5	il usa fig	ORG
ispiv-65	122	1	1	CARDINAL
ispiv-65	123	1	four	CARDINAL
ispiv-65	123	2	two	CARDINAL
ispiv-65	123	3	1000 mm	QUANTITY
ispiv-65	124	1	16	CARDINAL
ispiv-65	124	2	52 mm	QUANTITY
ispiv-65	124	3	3mm	QUANTITY
ispiv-65	124	4	45°	QUANTITY
ispiv-65	126	1	160 mm	QUANTITY
ispiv-65	126	2	50 mm	QUANTITY
ispiv-65	127	1	half	CARDINAL
ispiv-65	128	1	fig	ORG
ispiv-65	129	1	2	CARDINAL
ispiv-65	130	1	four	CARDINAL
ispiv-65	130	2	60 mm	QUANTITY
ispiv-65	130	3	carl zeiss	PERSON
ispiv-65	131	1	4	CARDINAL
ispiv-65	131	2	1152	CARDINAL
ispiv-65	132	1	approx	CARDINAL
ispiv-65	133	1	80	CARDINAL
ispiv-65	134	1	144	CARDINAL
ispiv-65	134	2	45,407	CARDINAL
ispiv-65	135	1	two	CARDINAL
ispiv-65	136	1	2008	DATE
ispiv-65	136	2	2013	DATE
ispiv-65	138	1	6 m	QUANTITY
ispiv-65	138	2	0.01	CARDINAL
ispiv-65	140	1	18	CARDINAL
ispiv-65	142	1	0.03	CARDINAL
ispiv-65	144	1	2	CARDINAL
ispiv-65	147	1	3.2	CARDINAL
ispiv-65	147	2	5	CARDINAL
ispiv-65	147	3	79	CARDINAL
ispiv-65	148	1	2.4	CARDINAL
ispiv-65	149	1	one	CARDINAL
ispiv-65	151	1	36	CARDINAL
ispiv-65	151	2	14	DATE
ispiv-65	151	3	6	CARDINAL
ispiv-65	151	4	1	CARDINAL
ispiv-65	152	1	10,000	CARDINAL
ispiv-65	153	1	14th	ORDINAL
ispiv-65	153	2	•	CARDINAL
ispiv-65	153	3	2021 •	DATE
ispiv-65	153	4	chicago	GPE
ispiv-65	153	5	il usa iteration jk	ORG
ispiv-65	154	1	01	MONEY
ispiv-65	154	2	34	CARDINAL
ispiv-65	154	3	s. c. co vt-stb	PERSON
ispiv-65	155	1	5678;⃗	CARDINAL
ispiv-65	155	2	1 79	CARDINAL
ispiv-65	155	3	0.3 3.5 6	CARDINAL
ispiv-65	156	1	0.75	CARDINAL
ispiv-65	156	2	0.3 3.5 6	CARDINAL
ispiv-65	156	3	0.6 3	CARDINAL
ispiv-65	156	4	12.6	CARDINAL
ispiv-65	156	5	0.3 3.5 7.5	CARDINAL
ispiv-65	156	6	0.5	CARDINAL
ispiv-65	156	7	12.6 1.0 0.3 3.5 9.5	QUANTITY
ispiv-65	156	8	18	CARDINAL
ispiv-65	156	9	20 0.15	CARDINAL
ispiv-65	156	10	1	CARDINAL
ispiv-65	159	1	second	ORDINAL
ispiv-65	159	2	01	MONEY
ispiv-65	159	3	34	CARDINAL
ispiv-65	159	4	s. c.	PERSON
ispiv-65	159	5	2016	DATE
ispiv-65	160	1	1	CARDINAL
ispiv-65	162	1	1	CARDINAL
ispiv-65	162	2	0.7 ⋅	MONEY
ispiv-65	162	3	12.6	CARDINAL
ispiv-65	162	4	18	CARDINAL
ispiv-65	164	1	0.3	CARDINAL
ispiv-65	165	1	2	CARDINAL
ispiv-65	165	2	3.5	CARDINAL
ispiv-65	165	3	1	CARDINAL
ispiv-65	165	4	5.5	CARDINAL
ispiv-65	166	1	zero	CARDINAL
ispiv-65	166	2	the last two	DATE
ispiv-65	169	1	6 to 9.5	CARDINAL
ispiv-65	169	2	1-4	CARDINAL
ispiv-65	169	3	40	CARDINAL
ispiv-65	170	1	20	CARDINAL
ispiv-65	171	1	two	CARDINAL
ispiv-65	173	1	3	CARDINAL
ispiv-65	173	2	flowfield	PERSON
ispiv-65	173	3	vt-stb	ORG
ispiv-65	173	4	50	CARDINAL
ispiv-65	174	1	5	CARDINAL
ispiv-65	174	2	fig	ORG
ispiv-65	174	3	7	CARDINAL
ispiv-65	175	1	8	CARDINAL
ispiv-65	175	2	14th	ORDINAL
ispiv-65	175	3	•	CARDINAL
ispiv-65	175	4	2021 •	DATE
ispiv-65	175	5	chicago	GPE
ispiv-65	175	6	il usa vt-stb	ORG
ispiv-65	175	7	1 	CARDINAL
ispiv-65	175	8	79	CARDINAL
ispiv-65	175	9		CARDINAL
ispiv-65	176	1	24,500	CARDINAL
ispiv-65	176	2	vt-stb	GPE
ispiv-65	176	3	2 	CARDINAL
ispiv-65	176	4	36	CARDINAL
ispiv-65	176	5		CARDINAL
ispiv-65	177	1	42,600	CARDINAL
ispiv-65	177	2	vt-stb	GPE
ispiv-65	177	3	3 	CARDINAL
ispiv-65	177	4	14	CARDINAL
ispiv-65	177	5		CARDINAL
ispiv-65	178	1	65,000	CARDINAL
ispiv-65	178	2	vt-stb	GPE
ispiv-65	178	3	4 	CARDINAL
ispiv-65	178	4	6	CARDINAL
ispiv-65	178	5		CARDINAL
ispiv-65	179	1	77,300	CARDINAL
ispiv-65	179	2	vt-stb	GPE
ispiv-65	179	3	1	CARDINAL
ispiv-65	179	4		CARDINAL
ispiv-65	179	5	80,500	CARDINAL
ispiv-65	180	1	4	CARDINAL
ispiv-65	180	2	5	CARDINAL
ispiv-65	181	1	10 mm	QUANTITY
ispiv-65	182	1	1.200	CARDINAL
ispiv-65	182	2	45407	CARDINAL
ispiv-65	182	3	3	CARDINAL
ispiv-65	184	1	6 m	QUANTITY
ispiv-65	185	1	14th	ORDINAL
ispiv-65	185	2	•	CARDINAL
ispiv-65	185	3	2021 •	DATE
ispiv-65	185	4	chicago	GPE
ispiv-65	185	5	il usa	ORG
ispiv-65	187	1	vt-stb	ORG
ispiv-65	188	1	4	CARDINAL
ispiv-65	188	2	10mm	QUANTITY
ispiv-65	189	1	500	CARDINAL
ispiv-65	190	1	79	CARDINAL
ispiv-65	192	1	24,500	CARDINAL
ispiv-65	194	1	0.12	CARDINAL
ispiv-65	195	1	30	CARDINAL
ispiv-65	195	2	0.37	CARDINAL
ispiv-65	195	3	1	CARDINAL
ispiv-65	196	1	12.6	CARDINAL
ispiv-65	198	1	first	ORDINAL
ispiv-65	198	2	the next one	DATE
ispiv-65	198	3	36	CARDINAL
ispiv-65	198	4	two	CARDINAL
ispiv-65	200	1	18,100	CARDINAL
ispiv-65	201	1	0.3 m	QUANTITY
ispiv-65	202	1	14	CARDINAL
ispiv-65	202	2	0.7	CARDINAL
ispiv-65	203	1	22,400	CARDINAL
ispiv-65	204	1	6	CARDINAL
ispiv-65	204	2	1.5	CARDINAL
ispiv-65	204	3	12,300	CARDINAL
ispiv-65	206	1	1	CARDINAL
ispiv-65	207	1	6	CARDINAL
ispiv-65	209	1	3,200	CARDINAL
ispiv-65	210	1	just over 80,000	CARDINAL
ispiv-65	211	1	fig	ORG
ispiv-65	212	1	5	CARDINAL
ispiv-65	212	2	vt-stb	PERSON
ispiv-65	212	3	200	CARDINAL
ispiv-65	213	1	3	CARDINAL
ispiv-65	215	1	6	CARDINAL
ispiv-65	215	2	14th	ORDINAL
ispiv-65	215	3	•	CARDINAL
ispiv-65	215	4	2021 •	DATE
ispiv-65	215	5	chicago	GPE
ispiv-65	215	6	il usa 3.3	ORG
ispiv-65	215	7	1	CARDINAL
ispiv-65	215	8	over 1,000	CARDINAL
ispiv-65	215	9	1	CARDINAL
ispiv-65	217	1	1,500	CARDINAL
ispiv-65	217	2	vt-stb	GPE
ispiv-65	217	3	79,000	CARDINAL
ispiv-65	219	1	5	CARDINAL
ispiv-65	219	2	10 mm-thick	QUANTITY
ispiv-65	220	1	200	CARDINAL
ispiv-65	222	1	vt-stb	GPE
ispiv-65	225	1	6	CARDINAL
ispiv-65	226	1	close to zero	CARDINAL
ispiv-65	228	1	fig	ORG
ispiv-65	229	1	6	CARDINAL
ispiv-65	229	2	vt-stb	PERSON
ispiv-65	230	1	fig	ORG
ispiv-65	230	2	5	CARDINAL
ispiv-65	231	1	7	CARDINAL
ispiv-65	231	2	vt-stb	PERSON
ispiv-65	231	3	200	CARDINAL
ispiv-65	232	1	3	CARDINAL
ispiv-65	233	1	14th	ORDINAL
ispiv-65	233	2	•	CARDINAL
ispiv-65	233	3	2021 •	DATE
ispiv-65	233	4	chicago	GPE
ispiv-65	233	5	il usa	ORG
ispiv-65	234	1	7	CARDINAL
ispiv-65	234	2	10 mm-thick	QUANTITY
ispiv-65	236	1	8	CARDINAL
ispiv-65	236	2	two	CARDINAL
ispiv-65	241	1	2	CARDINAL
ispiv-65	243	1	1,000	CARDINAL
ispiv-65	243	2	10,000	CARDINAL
ispiv-65	247	1	8	CARDINAL
ispiv-65	247	2	vt-stb	PERSON
ispiv-65	247	3	200	CARDINAL
ispiv-65	248	1	3	CARDINAL
ispiv-65	256	1	vt-stb	ORG
ispiv-65	257	1	first	ORDINAL
ispiv-65	258	1	fed	ORG
ispiv-65	260	1	6	CARDINAL
ispiv-65	260	2	the deutsche forschungsgemeinschaft	ORG
ispiv-65	260	3	dfg	ORG
ispiv-65	261	1	1165/5-1	CARDINAL
ispiv-65	261	2	dfg	ORG
ispiv-65	261	3	1881	DATE
ispiv-65	262	1	janos agocs	PERSON
ispiv-65	262	2	reinhard geisler	PERSON
ispiv-65	262	3	tobias kleindienst	PERSON
ispiv-65	262	4	carsten fuchs	PERSON
ispiv-65	263	1	kyung chun kim	PERSON
ispiv-65	263	2	mirae kim	PERSON
ispiv-65	264	1	14th	ORDINAL
ispiv-65	264	2	•	CARDINAL
ispiv-65	264	3	2021 •	DATE
ispiv-65	264	4	chicago	GPE
ispiv-65	264	5	il usa	ORG
ispiv-65	265	1	2019	DATE
ispiv-65	266	1	17th	CARDINAL
ispiv-65	266	2	european	NORP
ispiv-65	266	3	2019	DATE
ispiv-65	266	4	3.-6	DATE
ispiv-65	266	5	sept. 2019	DATE
ispiv-65	266	6	torino	GPE
ispiv-65	266	7	italy	GPE
ispiv-65	267	1	huhn f	GPE
ispiv-65	268	1	2016	DATE
ispiv-65	269	1	18th	ORDINAL
ispiv-65	270	1	symp	PERSON
ispiv-65	274	1	lisbon	GPE
ispiv-65	274	2	portugal	GPE
ispiv-65	274	3	july 4	DATE
ispiv-65	274	4	7 2016	DATE
ispiv-65	274	5	huhn	GPE
ispiv-65	274	6	f.	PERSON
ispiv-65	274	7	schanz	ORG
ispiv-65	274	8	d.	NORP
ispiv-65	274	9	s.	PERSON
ispiv-65	274	10	van de meerendonk	PERSON
ispiv-65	274	11	r., & schröder	ORG
ispiv-65	274	12	2017	CARDINAL
ispiv-65	276	1	58(9	CARDINAL
ispiv-65	276	2	116	CARDINAL
ispiv-65	276	3	jahn	PERSON
ispiv-65	276	4	t. schanz	PERSON
ispiv-65	276	5	d.	NORP
ispiv-65	276	6	2021	CARDINAL
ispiv-65	277	1	kim	PERSON
ispiv-65	277	2	m., kim	PERSON
ispiv-65	277	3	h. d.	PERSON
ispiv-65	277	4	yeom	GPE
ispiv-65	277	5	e., & kim	ORG
ispiv-65	277	6	k. c.	PERSON
ispiv-65	277	7	2018	DATE
ispiv-65	278	1	three	CARDINAL
ispiv-65	279	1	041201	DATE
ispiv-65	280	1	maas hg	PERSON
ispiv-65	280	2	1993	DATE
ispiv-65	280	3	three	CARDINAL
ispiv-65	281	1	15:133–146	CARDINAL
ispiv-65	281	2	dracos t	GPE
ispiv-65	281	3	1993	DATE
ispiv-65	281	4	three	CARDINAL
ispiv-65	282	1	15:279–294	CARDINAL
ispiv-65	282	2	nishino k	PERSON
ispiv-65	282	3	1989	DATE
ispiv-65	282	4	three	CARDINAL
ispiv-65	283	1	trans asme j	PERSON
ispiv-65	283	2	eng	GPE
ispiv-65	283	3	ouellette nt	PERSON
ispiv-65	283	4	xu h	PERSON
ispiv-65	283	5	2006	DATE
ispiv-65	283	6	three	CARDINAL
ispiv-65	284	1	40(2):301–313	CARDINAL
ispiv-65	284	2	m., willert	PERSON
ispiv-65	284	3	c. e.	PERSON
ispiv-65	284	4	scarano	PERSON
ispiv-65	284	5	f.	PERSON
ispiv-65	284	6	c. j.	PERSON
ispiv-65	284	7	wereley	GPE
ispiv-65	284	8	s. t.,	PERSON
ispiv-65	284	9	j. (2018	ORG
ispiv-65	288	1	novara m	ORG
ispiv-65	288	2	2013	DATE
ispiv-65	289	1	meas sci technol	ORG
ispiv-65	289	2	24:024009	CARDINAL
ispiv-65	290	1	2016	DATE
ispiv-65	291	1	70	DATE
ispiv-65	292	1	stasicki	PERSON
ispiv-65	292	2	ludwikowski k	PERSON
ispiv-65	292	3	2017	CARDINAL
ispiv-65	292	4	10329	DATE
ispiv-65	292	5	103292	DATE
ispiv-65	292	6	2007	DATE
ispiv-65	292	7	3d	CARDINAL
ispiv-65	293	1	45:549–556	CARDINAL
ispiv-65	293	2	2013	DATE
ispiv-65	294	1	meas sci technol 24:024008	ORG