id sid eid entity type ispiv-67 1 1 14th ORDINAL ispiv-67 1 2 2021 CARDINAL ispiv-67 1 3 2021 CARDINAL ispiv-67 1 4 wall jets h. otto∗ ORG ispiv-67 1 5 c. cierpka PERSON ispiv-67 1 6 ilmenau GPE ispiv-67 1 7 germany GPE ispiv-67 1 8 ∗ CARDINAL ispiv-67 2 1 one CARDINAL ispiv-67 4 1 alva et al PERSON ispiv-67 5 1 2018 DATE ispiv-67 6 1 one CARDINAL ispiv-67 6 2 two CARDINAL ispiv-67 8 1 two CARDINAL ispiv-67 8 2 otto et al PERSON ispiv-67 9 1 2019, 2020 DATE ispiv-67 12 1 2d CARDINAL ispiv-67 12 2 750mm QUANTITY ispiv-67 12 3 375mm× 375mm QUANTITY ispiv-67 14 1 four CARDINAL ispiv-67 14 2 2160×2560 CARDINAL ispiv-67 14 3 100mm QUANTITY ispiv-67 15 1 532 CARDINAL ispiv-67 16 1 four CARDINAL ispiv-67 16 2 38mm QUANTITY ispiv-67 16 3 140mm QUANTITY ispiv-67 17 1 seven CARDINAL ispiv-67 18 1 pmma ORG ispiv-67 19 1 610 CARDINAL ispiv-67 20 1 four CARDINAL ispiv-67 20 2 two minutes TIME ispiv-67 20 3 19.981 CARDINAL ispiv-67 20 4 7 CARDINAL ispiv-67 20 5 1 CARDINAL ispiv-67 20 6 one CARDINAL ispiv-67 22 1 2–7mm QUANTITY ispiv-67 23 1 1 4 CARDINAL ispiv-67 23 2 one CARDINAL ispiv-67 24 1 2 CARDINAL ispiv-67 25 1 hain PERSON ispiv-67 25 2 kähler PERSON ispiv-67 25 3 2007 DATE ispiv-67 26 1 3 CARDINAL ispiv-67 26 2 first ORDINAL ispiv-67 26 3 seven CARDINAL ispiv-67 27 1 7 CARDINAL ispiv-67 27 2 7 CARDINAL ispiv-67 28 1 20 CARDINAL ispiv-67 28 2 7 CARDINAL ispiv-67 28 3 1 CARDINAL ispiv-67 29 1 2 CARDINAL ispiv-67 31 1 3 CARDINAL ispiv-67 31 2 7 CARDINAL ispiv-67 32 1 2b CARDINAL ispiv-67 34 1 the german research foundation ORG ispiv-67 34 2 deutsche forschungsgemeinschaft ORG ispiv-67 34 3 dfg ORG ispiv-67 34 4 1881 DATE ispiv-67 35 1 alva g PERSON ispiv-67 35 2 lin y PERSON ispiv-67 35 3 2018 DATE ispiv-67 36 1 hain PERSON ispiv-67 36 2 kähler PERSON ispiv-67 36 3 2007 DATE ispiv-67 37 1 42:575–587 CARDINAL ispiv-67 37 2 resagk GPE ispiv-67 37 3 2019 DATE ispiv-67 38 1 13th ORDINAL ispiv-67 38 2 ispiv2019 GPE ispiv-67 38 3 munich GPE ispiv-67 38 4 germany GPE ispiv-67 38 5 july 22 DATE ispiv-67 38 6 otto h ORG ispiv-67 38 7 resagk GPE ispiv-67 38 8 2020 DATE ispiv-67 39 1 1:155–172 CARDINAL