id sid eid entity type ispiv-80 1 1 14th ORDINAL ispiv-80 1 2 2021 CARDINAL ispiv-80 1 3 2021 CARDINAL ispiv-80 1 4 3d CARDINAL ispiv-80 1 5 c. cierpka1∗, r. barnkob2 PERSON ispiv-80 1 6 s. sachs1 PERSON ispiv-80 1 7 m. chen3 PERSON ispiv-80 1 8 p. mäder3 PERSON ispiv-80 1 9 technische universität ilmenau ORG ispiv-80 1 10 p.o. ORG ispiv-80 1 11 100565 DATE ispiv-80 1 12 d-98684 ilmenau GPE ispiv-80 1 13 germany GPE ispiv-80 1 14 2 CARDINAL ispiv-80 1 15 heinz-nixdorf-chair ORG ispiv-80 1 16 biomedical electronics ORG ispiv-80 1 17 university of munich ORG ispiv-80 1 18 81675 DATE ispiv-80 1 19 munich GPE ispiv-80 1 20 germany GPE ispiv-80 1 21 3 CARDINAL ispiv-80 1 22 technische universität ilmenau ORG ispiv-80 1 23 p.o. ORG ispiv-80 1 24 100565 DATE ispiv-80 1 25 d-98684 ilmenau GPE ispiv-80 1 26 germany GPE ispiv-80 1 27 4 CARDINAL ispiv-80 1 28 department of physics, technical university of denmark ORG ispiv-80 1 29 dtu physics building FAC ispiv-80 1 30 309 CARDINAL ispiv-80 1 31 kongens lyngby PERSON ispiv-80 1 32 denmark ∗ ORG ispiv-80 1 33 3d CARDINAL ispiv-80 1 34 kähler PERSON ispiv-80 1 35 2011 DATE ispiv-80 1 36 kähler PERSON ispiv-80 1 37 2014 DATE ispiv-80 7 1 krevor GPE ispiv-80 7 2 2020 DATE ispiv-80 7 3 2020 DATE ispiv-80 9 1 2020 DATE ispiv-80 10 1 20 CARDINAL ispiv-80 10 2 250 mm QUANTITY ispiv-80 11 1 barnkob GPE ispiv-80 12 1 2021 CARDINAL ispiv-80 13 1 soon1 ORG ispiv-80 14 1 three CARDINAL ispiv-80 15 1 2010 DATE ispiv-80 17 1 2015 DATE ispiv-80 17 2 barnkob GPE ispiv-80 17 3 2020 DATE ispiv-80 19 1 krevor GPE ispiv-80 19 2 2020 DATE ispiv-80 19 3 2020 DATE ispiv-80 22 1 three CARDINAL ispiv-80 22 2 3d CARDINAL ispiv-80 25 1 1https://defocustracking.com/datasets/ CARDINAL ispiv-80 27 1 3% PERCENT ispiv-80 30 1 könig et al. PERSON ispiv-80 30 2 2020 DATE ispiv-80 34 1 dfg ORG ispiv-80 35 1 185/8-1 CARDINAL ispiv-80 35 2 2045 CARDINAL ispiv-80 36 1 00022951 DATE ispiv-80 37 1 the carl zeiss foundation’s ORG ispiv-80 37 2 deepturb PERSON ispiv-80 38 1 thomas fuchs PERSON ispiv-80 38 2 munich GPE ispiv-80 39 1 barnkob GPE ispiv-80 39 2 chen m PERSON ispiv-80 39 3 mäder p ORG ispiv-80 39 4 2021 CARDINAL ispiv-80 40 1 barnkob GPE ispiv-80 40 2 kähler PERSON ispiv-80 40 3 2015 CARDINAL ispiv-80 41 1 3560 CARDINAL ispiv-80 42 1 2011 DATE ispiv-80 42 2 three CARDINAL ispiv-80 43 1 15:1–31 CARDINAL ispiv-80 43 2 segura GPE ispiv-80 43 3 kähler PERSON ispiv-80 43 4 2010 DATE ispiv-80 44 1 22:015401 CARDINAL ispiv-80 44 2 krevor GPE ispiv-80 44 3 2020 DATE ispiv-80 44 4 3d CARDINAL ispiv-80 45 1 könig j ORG ispiv-80 45 2 chen m PERSON ispiv-80 45 3 2020 DATE ispiv-80 45 4 three CARDINAL ispiv-80 46 1 2020 DATE ispiv-80 47 1 31:017003 CARDINAL ispiv-80 47 2 barnkob GPE ispiv-80 47 3 2020 DATE ispiv-80 48 1 2014 DATE ispiv-80 49 1 55 CARDINAL