id	sid	eid	entity	type
ispiv-81	1	1	14th	ORDINAL
ispiv-81	1	2	2021	CARDINAL
ispiv-81	1	3	2021	CARDINAL
ispiv-81	1	4	r. yao1	PERSON
ispiv-81	1	5	k. t.	PERSON
ispiv-81	2	1	1	CARDINAL
ispiv-81	2	2	notre dame	ORG
ispiv-81	2	3	46556	DATE
ispiv-81	2	4	2	CARDINAL
ispiv-81	2	5	illinois institute of technology	ORG
ispiv-81	2	6	chicago	GPE
ispiv-81	2	7	il	ORG
ispiv-81	2	8	60616	DATE
ispiv-81	4	1	1	CARDINAL
ispiv-81	4	2	ridge	PERSON
ispiv-81	4	3	ridge	PERSON
ispiv-81	4	4	w	GPE
ispiv-81	4	5	ridge width	PERSON
ispiv-81	7	1	barros	PRODUCT
ispiv-81	7	2	christensen	PERSON
ispiv-81	7	3	2014	DATE
ispiv-81	7	4	ganapathisubramani	PERSON
ispiv-81	7	5	2015	DATE
ispiv-81	7	6	zampiron et al.	PERSON
ispiv-81	7	7	2020	DATE
ispiv-81	7	8	anderson et al.	PERSON
ispiv-81	7	9	2015	DATE
ispiv-81	7	10	hwang	PERSON
ispiv-81	7	11	lee	PERSON
ispiv-81	7	12	2018	DATE
ispiv-81	7	13	castro et al.	PERSON
ispiv-81	7	14	2021	CARDINAL
ispiv-81	8	1	second	ORDINAL
ispiv-81	8	2	anderson et al	PERSON
ispiv-81	9	1	2015	CARDINAL
ispiv-81	11	1	reynolds	PERSON
ispiv-81	12	1	2	CARDINAL
ispiv-81	13	1	ganapathisubramani	PERSON
ispiv-81	13	2	2015	DATE
ispiv-81	13	3	medjnoun et al.	PERSON
ispiv-81	13	4	2018	DATE
ispiv-81	14	1	piv	PERSON
ispiv-81	15	1	1c	CARDINAL
ispiv-81	16	1	1(b	CARDINAL
ispiv-81	17	1	2	CARDINAL
ispiv-81	18	1	two	CARDINAL
ispiv-81	19	1	3	CARDINAL
ispiv-81	19	2	plane piv	PERSON
ispiv-81	20	1	2	CARDINAL
ispiv-81	20	2	2a	CARDINAL
ispiv-81	20	3	two	CARDINAL
ispiv-81	21	1	3.8 mm	QUANTITY
ispiv-81	22	1	2a	CARDINAL
ispiv-81	24	1	2b	CARDINAL
ispiv-81	24	2	ganapathisubramani	PERSON
ispiv-81	24	3	2015	DATE
ispiv-81	24	4	medjnoun et al.	PERSON
ispiv-81	24	5	2018	DATE
ispiv-81	24	6	castro et al.	PERSON
ispiv-81	24	7	2021	CARDINAL
ispiv-81	27	1	anderson w	PERSON
ispiv-81	27	2	barros jm	PERSON
ispiv-81	27	3	christensen kt	PERSON
ispiv-81	28	1	barros jm	PERSON
ispiv-81	28	2	christensen kt	PERSON
ispiv-81	28	3	2014	DATE
ispiv-81	29	1	748	CARDINAL
ispiv-81	29	2	kim j	PERSON
ispiv-81	29	3	lim hc	PERSON
ispiv-81	29	4	2021	CARDINAL
ispiv-81	30	1	915	CARDINAL
ispiv-81	30	2	hwang hg	PERSON
ispiv-81	30	3	lee jh	PERSON
ispiv-81	30	4	2018	DATE
ispiv-81	31	1	3:014608	CARDINAL
ispiv-81	31	2	medjnoun	GPE
ispiv-81	31	3	2018	DATE
ispiv-81	32	1	2015	CARDINAL
ispiv-81	33	1	774	CARDINAL
ispiv-81	33	2	cameron s	PERSON
ispiv-81	33	3	2020	DATE
ispiv-81	34	1	887	CARDINAL