id	sid	eid	entity	type
ispiv-86	1	1	14th	ORDINAL
ispiv-86	1	2	2021	CARDINAL
ispiv-86	1	3	2021	CARDINAL
ispiv-86	1	4	3 l	DATE
ispiv-86	1	5	4d	CARDINAL
ispiv-86	1	6	j. fitschen1∗	PERSON
ispiv-86	1	7	kameke2	ORG
ispiv-86	1	8	s. hofmann1	PERSON
ispiv-86	1	9	m. hoffmann1	PERSON
ispiv-86	1	10	m. schlüter1 1	PERSON
ispiv-86	1	11	hamburg university of technology	ORG
ispiv-86	1	12	hamburg	GPE
ispiv-86	1	13	germany	GPE
ispiv-86	1	14	2	CARDINAL
ispiv-86	1	15	university of applied science	ORG
ispiv-86	1	16	hamburg	GPE
ispiv-86	1	17	germany	GPE
ispiv-86	1	18	∗	CARDINAL
ispiv-86	4	1	three	CARDINAL
ispiv-86	4	2	two	CARDINAL
ispiv-86	5	1	2018	DATE
ispiv-86	5	2	moghaddas, 2020	DATE
ispiv-86	5	3	kuschel et al.	PERSON
ispiv-86	5	4	2021	DATE
ispiv-86	6	1	two	CARDINAL
ispiv-86	6	2	three	CARDINAL
ispiv-86	7	1	first	ORDINAL
ispiv-86	7	2	3l	CARDINAL
ispiv-86	7	3	4d	CARDINAL
ispiv-86	9	1	1	CARDINAL
ispiv-86	9	2	first	ORDINAL
ispiv-86	9	3	3l	CARDINAL
ispiv-86	9	4	1	CARDINAL
ispiv-86	9	5	4d	CARDINAL
ispiv-86	10	1	three	CARDINAL
ispiv-86	11	1	1	CARDINAL
ispiv-86	11	2	1:5	CARDINAL
ispiv-86	11	3	1:10	TIME
ispiv-86	11	4	rushton turbine buoyancy-neutral	ORG
ispiv-86	11	5	150-180	CARDINAL
ispiv-86	11	6	four	CARDINAL
ispiv-86	12	1	four	CARDINAL
ispiv-86	12	2	germany	GPE
ispiv-86	13	1	two	CARDINAL
ispiv-86	13	2	30	CARDINAL
ispiv-86	13	3	two	CARDINAL
ispiv-86	13	4	45	CARDINAL
ispiv-86	13	5	1	CARDINAL
ispiv-86	15	1	2016	DATE
ispiv-86	16	1	4d	CARDINAL
ispiv-86	16	2	germany	GPE
ispiv-86	17	1	148 µm	MONEY
ispiv-86	17	2	up to 800	CARDINAL
ispiv-86	18	1	2	CARDINAL
ispiv-86	18	2	first	ORDINAL
ispiv-86	19	1	3l	CARDINAL
ispiv-86	20	1	first	ORDINAL
ispiv-86	20	2	2 ii	QUANTITY
ispiv-86	21	1	2	CARDINAL
ispiv-86	23	1	1%	PERCENT
ispiv-86	24	1	kuschel m	PERSON
ispiv-86	24	2	hoffmann m	PERSON
ispiv-86	24	3	von kameke	PERSON
ispiv-86	24	4	2021	CARDINAL
ispiv-86	24	5	eddy	PERSON
ispiv-86	25	1	9	CARDINAL
ispiv-86	25	2	2018	DATE
ispiv-86	26	1	188:208	DATE
ispiv-86	26	2	220	CARDINAL
ispiv-86	26	3	2016	DATE
ispiv-86	27	1	70	CARDINAL
ispiv-86	27	2	moghaddas j	PERSON
ispiv-86	27	3	2020	DATE
ispiv-86	27	4	rushton	GPE
ispiv-86	28	1	18	CARDINAL
ispiv-86	28	2	first	ORDINAL