id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
ajst-10992	Zhu, Yongqian; Zhu, Meng	Thickness Measurement Technology for Large-size Ultra-thin Substrate Glass	2023	4	.pdf	application/pdf	1939	70	36	Keywords: Ultra-thin glass, Online thickness measurement, Optical confocal thickness measurement. Principle diagram of optical confocal thickness measurement method A comparison of the advantages and disadvantages of the above five thickness measurement methods is shown in Table 2 .	cache/ajst-10992.pdf	txt/ajst-10992.txt