id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
ajst-26745	Shuai, Kang; Sang, Diandian; Tang, Xiaohu	MEMS Precision Sensors Based on Process Innovation Technology	2024	2	.pdf	application/pdf	1408	76	33	Silicon-based MEMS Process Technology: This is the primary approach abroad, focusing on improving the precision of silicon micromachining and ensuring reproducibility in MEMS processes. 4. Optical MEMS Process Technology: Another branch of MEMS technology that is primarily used in micro-optical devices and optical sensors.	cache/ajst-26745.pdf	txt/ajst-26745.txt