id	sid	eid	entity	type
ajst-10992	1	1	academic journal of science and technology issn	ORG
ajst-10992	1	2	2771-3032	CARDINAL
ajst-10992	2	1	7	CARDINAL
ajst-10992	2	2	1	CARDINAL
ajst-10992	2	3	2023 70	CARDINAL
ajst-10992	2	4	yongqian zhu	PERSON
ajst-10992	2	5	meng zhu	PERSON
ajst-10992	2	6	coe technology co.	ORG
ajst-10992	2	7	bengbu	GPE
ajst-10992	2	8	233000	DATE
ajst-10992	2	9	china	GPE
ajst-10992	6	1	1	CARDINAL
ajst-10992	9	1	2	CARDINAL
ajst-10992	9	2	two	CARDINAL
ajst-10992	12	1	two	CARDINAL
ajst-10992	12	2	1	CARDINAL
ajst-10992	12	3	1	CARDINAL
ajst-10992	12	4	two	CARDINAL
ajst-10992	13	1	3	CARDINAL
ajst-10992	13	2	five	CARDINAL
ajst-10992	13	3	three	CARDINAL
ajst-10992	14	1	two	CARDINAL
ajst-10992	14	2	first	ORDINAL
ajst-10992	15	1	two	CARDINAL
ajst-10992	16	1	0.001mm	QUANTITY
ajst-10992	16	2	ten	CARDINAL
ajst-10992	16	3	second	ORDINAL
ajst-10992	17	1	1	CARDINAL
ajst-10992	19	1	two	CARDINAL
ajst-10992	19	2	71	CARDINAL
ajst-10992	19	3	1	CARDINAL
ajst-10992	19	4	third	ORDINAL
ajst-10992	19	5	2	CARDINAL
ajst-10992	22	1	up to 0.01	DATE
ajst-10992	22	2	2	CARDINAL
ajst-10992	22	3	first	ORDINAL
ajst-10992	22	4	ccd	PRODUCT
ajst-10992	25	1	two	CARDINAL
ajst-10992	25	2	3a	CARDINAL
ajst-10992	25	3	3b	CARDINAL
ajst-10992	26	1	4	CARDINAL
ajst-10992	26	2	3a	CARDINAL
ajst-10992	27	1	72	CARDINAL
ajst-10992	27	2	3b	CARDINAL
ajst-10992	28	1	second	ORDINAL
ajst-10992	29	1	4	CARDINAL
ajst-10992	33	1	5	CARDINAL
ajst-10992	33	2	4	CARDINAL
ajst-10992	33	3	five	CARDINAL
ajst-10992	33	4	2	CARDINAL
ajst-10992	33	5	2	CARDINAL
ajst-10992	33	6	five	CARDINAL
ajst-10992	33	7	0.001mm 0.001mm	QUANTITY
ajst-10992	33	8	0.01mm micron	QUANTITY
ajst-10992	34	1	4	CARDINAL
ajst-10992	38	1	73	CARDINAL
ajst-10992	39	1	5	CARDINAL
ajst-10992	39	2	5	CARDINAL
ajst-10992	39	3	5	CARDINAL
ajst-10992	39	4	5	CARDINAL
ajst-10992	39	5	less than 7	CARDINAL
ajst-10992	39	6	less than 21	CARDINAL
ajst-10992	39	7	less than 1 micron	QUANTITY
ajst-10992	39	8	0-50mm	QUANTITY
ajst-10992	40	1	7	CARDINAL
ajst-10992	41	1	cmm inspection	ORG
ajst-10992	42	1	two	CARDINAL
ajst-10992	42	2	3	CARDINAL
ajst-10992	42	3	3	CARDINAL
ajst-10992	42	4	two	CARDINAL
ajst-10992	42	5	1.5 hours	TIME
ajst-10992	42	6	120 minutes	TIME
ajst-10992	42	7	27	CARDINAL
ajst-10992	42	8	23	CARDINAL
ajst-10992	42	9	40 seconds	TIME
ajst-10992	42	10	7	CARDINAL
ajst-10992	42	11	21	CARDINAL
ajst-10992	42	12	11.6 seconds	TIME
ajst-10992	42	13	0.27	CARDINAL
ajst-10992	42	14	sec	ORG
ajst-10992	42	15	27	CARDINAL
ajst-10992	42	16	23	CARDINAL
ajst-10992	42	17	7	CARDINAL
ajst-10992	42	18	21	CARDINAL
ajst-10992	42	19	0.001mm	QUANTITY
ajst-10992	42	20	0.00025mm	PERSON
ajst-10992	42	21	0.005mm 0.001mm	QUANTITY
ajst-10992	42	22	cmm	ORG
ajst-10992	43	1	6	CARDINAL
ajst-10992	43	2	one year	DATE
ajst-10992	44	1	less than 0.5%	PERCENT
ajst-10992	46	1	1	CARDINAL
ajst-10992	46	2	huang xiaobin	PERSON
ajst-10992	46	3	wang ronghua	PERSON
ajst-10992	46	4	t20919-2018.2018-0514	DATE
ajst-10992	47	1	2	CARDINAL
ajst-10992	47	2	japan electromagnetic detector co.	ORG
ajst-10992	47	3	2019	DATE
ajst-10992	48	1	3	CARDINAL
ajst-10992	48	2	2018-3-12	DATE
ajst-10992	49	1	4	CARDINAL
ajst-10992	50	1	keyence(china	PERSON
ajst-10992	52	1	5	CARDINAL
ajst-10992	52	2	cl-3000	PRODUCT
ajst-10992	53	1	keyence(china	PERSON
ajst-10992	53	2	ltd.2019	GPE