id	sid	eid	entity	type
ajst-1434	1	1	academic journal of science and technology issn	ORG
ajst-1434	1	2	2771-3032	CARDINAL
ajst-1434	2	1	2	CARDINAL
ajst-1434	2	2	3	CARDINAL
ajst-1434	2	3	2022 4	DATE
ajst-1434	2	4	4.0	CARDINAL
ajst-1434	2	5	yinghao	NORP
ajst-1434	2	6	united microelectronics center	ORG
ajst-1434	2	7	chongqing	GPE
ajst-1434	2	8	400000	CARDINAL
ajst-1434	2	9	china	GPE
ajst-1434	2	10	china	GPE
ajst-1434	2	11	china	GPE
ajst-1434	2	12	4.0	CARDINAL
ajst-1434	6	1	4.0	CARDINAL
ajst-1434	7	1	1	CARDINAL
ajst-1434	8	1	the late 1940s	DATE
ajst-1434	9	1	half a century	DATE
ajst-1434	11	1	4.0	CARDINAL
ajst-1434	13	1	2	CARDINAL
ajst-1434	18	1	eda	ORG
ajst-1434	18	2	march 2021	DATE
ajst-1434	18	3	the european union	ORG
ajst-1434	18	4	2030	CARDINAL
ajst-1434	18	5	a decade	DATE
ajst-1434	18	6	europe	LOC
ajst-1434	18	7	the next 10 years	DATE
ajst-1434	18	8	2030	DATE
ajst-1434	18	9	europe	LOC
ajst-1434	18	10	at least 20%	PERCENT
ajst-1434	18	11	2	CARDINAL
ajst-1434	18	12	at least 10	CARDINAL
ajst-1434	18	13	south korean	NORP
ajst-1434	18	14	about 510 trillion	MONEY
ajst-1434	18	15	2.9 trillion yuan	MONEY
ajst-1434	18	16	the next decade	DATE
ajst-1434	19	1	june	DATE
ajst-1434	19	2	the us	ORG
ajst-1434	19	3	senate	ORG
ajst-1434	19	4	american	NORP
ajst-1434	19	5	2021	CARDINAL
ajst-1434	19	6	52.7 billion us dollars	MONEY
ajst-1434	19	7	us	GPE
ajst-1434	20	1	september	DATE
ajst-1434	20	2	the european union	ORG
ajst-1434	20	3	european	NORP
ajst-1434	20	4	november	DATE
ajst-1434	20	5	japan	GPE
ajst-1434	20	6	ministry of economy, trade and industry	ORG
ajst-1434	20	7	fourth	ORDINAL
ajst-1434	20	8	three	CARDINAL
ajst-1434	20	9	japan	GPE
ajst-1434	22	1	the massachusetts institute of technology	ORG
ajst-1434	22	2	micron	CARDINAL
ajst-1434	22	3	55	CARDINAL
ajst-1434	22	4	5	CARDINAL
ajst-1434	22	5	more than ten	CARDINAL
ajst-1434	23	1	the national institute of standards	ORG
ajst-1434	23	2	canadian	NORP
ajst-1434	23	3	7	CARDINAL
ajst-1434	23	4	waferscaleengine2	WORK_OF_ART
ajst-1434	23	5	2.6 trillion	CARDINAL
ajst-1434	24	1	ibm	ORG
ajst-1434	24	2	first	ORDINAL
ajst-1434	24	3	2	CARDINAL
ajst-1434	24	4	333 million	CARDINAL
ajst-1434	25	1	7	CARDINAL
ajst-1434	25	2	45%	PERCENT
ajst-1434	25	3	75%	PERCENT
ajst-1434	26	1	3	CARDINAL
ajst-1434	26	2	4.0 3.1	CARDINAL
ajst-1434	28	1	first	ORDINAL
ajst-1434	29	1	february 2021	DATE
ajst-1434	29	2	the european union's	ORG
ajst-1434	29	3	two	CARDINAL
ajst-1434	29	4	two	CARDINAL
ajst-1434	29	5	tsmc	ORG
ajst-1434	29	6	mit	ORG
ajst-1434	29	7	first	ORDINAL
ajst-1434	30	1	june	DATE
ajst-1434	30	2	4-inch	QUANTITY
ajst-1434	30	3	70%	PERCENT
ajst-1434	31	1	december	DATE
ajst-1434	31	2	intel	ORG
ajst-1434	31	3	first	ORDINAL
ajst-1434	32	1	second	ORDINAL
ajst-1434	33	1	hbm-pim	WORK_OF_ART
ajst-1434	33	2	hbm	NORP
ajst-1434	33	3	3.2	CARDINAL
ajst-1434	36	1	10 to 100	CARDINAL
ajst-1434	38	1	moore	ORG
ajst-1434	38	2	two	CARDINAL
ajst-1434	38	3	three	CARDINAL
ajst-1434	39	1	3.3	CARDINAL
ajst-1434	40	1	the past decade	DATE
ajst-1434	40	2	5	CARDINAL
ajst-1434	41	1	the next 10 years	DATE
ajst-1434	41	2	three	CARDINAL
ajst-1434	41	3	second	ORDINAL
ajst-1434	41	4	third	ORDINAL
ajst-1434	44	1	mckinsey	GPE
ajst-1434	44	2	18%	PERCENT
ajst-1434	44	3	the next few years	DATE
ajst-1434	44	4	20%	PERCENT
ajst-1434	45	1	healthcare	ORG
ajst-1434	46	1	more than 11.7 billion	QUANTITY
ajst-1434	46	2	30 billion	MONEY
ajst-1434	46	3	2025	DATE
ajst-1434	47	1	3.4	CARDINAL
ajst-1434	47	2	4.0	CARDINAL
ajst-1434	50	1	1	CARDINAL
ajst-1434	50	2	fieldbus fcs:	ORG
ajst-1434	50	3	2	CARDINAL
ajst-1434	50	4	6	CARDINAL
ajst-1434	50	5	5	CARDINAL
ajst-1434	51	1	3	CARDINAL
ajst-1434	53	1	4	CARDINAL
ajst-1434	55	1	4	CARDINAL
ajst-1434	55	2	2021	CARDINAL
ajst-1434	55	3	today	DATE
ajst-1434	57	1	4.0	CARDINAL
ajst-1434	58	1	1	CARDINAL
ajst-1434	58	2	chuan rui	PERSON
ajst-1434	58	3	qian fang	PERSON
ajst-1434	58	4	zhang wenyao	PERSON
ajst-1434	58	5	wang qiuwang	PERSON
ajst-1434	58	6	zhao cunlu	PERSON
ajst-1434	61	1	2	CARDINAL
ajst-1434	61	2	toru ikeda	ORG
ajst-1434	61	3	toshifumi kanno	PERSON
ajst-1434	61	4	nobuyuki shishido	PERSON
ajst-1434	61	5	noriyuki miyazaki	PERSON
ajst-1434	61	6	hiroyuki tanaka	PERSON
ajst-1434	61	7	takuya hatao	PERSON
ajst-1434	63	1	international,2011,25(11	GPE
ajst-1434	64	1	3	CARDINAL
ajst-1434	64	2	xiangyang zhang	PERSON
ajst-1434	64	3	wei liu	PERSON
ajst-1434	67	1	4	CARDINAL
ajst-1434	67	2	rao muzaffar	PERSON
ajst-1434	67	3	lynch liam	PERSON
ajst-1434	67	4	coady james	PERSON
ajst-1434	67	5	toal daniel	PERSON
ajst-1434	67	6	newe thomas	PERSON
ajst-1434	68	1	aiv	ORG
ajst-1434	68	2	4.0	CARDINAL
ajst-1434	70	1	5	CARDINAL
ajst-1434	70	2	buer	GPE
ajst-1434	70	3	jan ola	PERSON
ajst-1434	70	4	felix t. s. chan	PERSON
ajst-1434	71	1	4.0	CARDINAL
ajst-1434	73	1	6	CARDINAL
ajst-1434	73	2	huang j	PERSON
ajst-1434	73	3	xiao y	PERSON
ajst-1434	75	1	2021	CARDINAL
ajst-1434	75	2	1	CARDINAL