id	sid	eid	entity	type
ajst-24974	1	1	academic journal of science and technology issn	ORG
ajst-24974	1	2	2771-3032	CARDINAL
ajst-24974	2	1	12	CARDINAL
ajst-24974	2	2	1	CARDINAL
ajst-24974	2	3	2024 168	DATE
ajst-24974	2	4	yang liu	PERSON
ajst-24974	3	1	tianjin	GPE
ajst-24974	3	2	sino-german	NORP
ajst-24974	3	3	tianjin	GPE
ajst-24974	3	4	300350	DATE
ajst-24974	3	5	china	GPE
ajst-24974	4	1	soi-mos	ORG
ajst-24974	9	1	soi-mos	ORG
ajst-24974	9	2	soi-mos	ORG
ajst-24974	10	1	soi-mos	ORG
ajst-24974	11	1	1	CARDINAL
ajst-24974	12	1	soi-mos	ORG
ajst-24974	15	1	soi-mos	ORG
ajst-24974	17	1	soi-mos	ORG
ajst-24974	20	1	soi-mos	ORG
ajst-24974	21	1	soi-mos	ORG
ajst-24974	22	1	2	CARDINAL
ajst-24974	22	2	soi-mos	ORG
ajst-24974	25	1	soi-mos	ORG
ajst-24974	29	1	china	GPE
ajst-24974	30	1	china	GPE
ajst-24974	32	1	soi-mos	ORG
ajst-24974	32	2	169	CARDINAL
ajst-24974	33	1	2	CARDINAL
ajst-24974	34	1	3	CARDINAL
ajst-24974	34	2	soi-mos	ORG
ajst-24974	34	3	3.1	CARDINAL
ajst-24974	35	1	soi-mos	ORG
ajst-24974	35	2	sio2	ORG
ajst-24974	35	3	soi-mos	ORG
ajst-24974	35	4	sio2	PERSON
ajst-24974	35	5	27 ℃	QUANTITY
ajst-24974	35	6	3	CARDINAL
ajst-24974	37	1	sio2	ORG
ajst-24974	37	2	ain	PERSON
ajst-24974	37	3	27°	QUANTITY
ajst-24974	37	4	soi	GPE
ajst-24974	39	1	3	CARDINAL
ajst-24974	40	1	2	CARDINAL
ajst-24974	41	1	3.2	CARDINAL
ajst-24974	42	1	soi-mos	ORG
ajst-24974	42	2	soi	PERSON
ajst-24974	43	1	soi-mos	ORG
ajst-24974	44	1	4	CARDINAL
ajst-24974	44	2	1	CARDINAL
ajst-24974	44	3	watts	LOC
ajst-24974	45	1	soi-mos	ORG
ajst-24974	48	1	soi-mos	ORG
ajst-24974	49	1	2	CARDINAL
ajst-24974	50	1	carrier mobility	PERSON
ajst-24974	52	1	3	CARDINAL
ajst-24974	55	1	4	CARDINAL
ajst-24974	56	1	soi-mos	ORG
ajst-24974	58	1	3.3	CARDINAL
ajst-24974	59	1	soi-mos	ORG
ajst-24974	60	1	soi-mos	ORG
ajst-24974	62	1	soi-mos	ORG
ajst-24974	62	2	170	CARDINAL
ajst-24974	64	1	soi-mos	ORG
ajst-24974	64	2	tim	PERSON
ajst-24974	65	1	tim	PERSON
ajst-24974	66	1	tim	PERSON
ajst-24974	66	2	5	CARDINAL
ajst-24974	68	1	6	CARDINAL
ajst-24974	71	1	4	CARDINAL
ajst-24974	71	2	soi-mos	ORG
ajst-24974	71	3	4.1	CARDINAL
ajst-24974	72	1	soi-mos	ORG
ajst-24974	72	2	tim	PERSON
ajst-24974	73	1	tim	PERSON
ajst-24974	73	2	three	CARDINAL
ajst-24974	76	1	mbc	NORP
ajst-24974	81	1	soi-mos	ORG
ajst-24974	82	1	8	CARDINAL
ajst-24974	82	2	4.2	CARDINAL
ajst-24974	83	1	soi-mos	ORG
ajst-24974	86	1	9	CARDINAL
ajst-24974	86	2	5	CARDINAL
ajst-24974	88	1	1	CARDINAL
ajst-24974	89	1	1	CARDINAL
ajst-24974	90	1	10	CARDINAL
ajst-24974	90	2	1	CARDINAL
ajst-24974	94	1	soi-mos	ORG
ajst-24974	97	1	5	CARDINAL
ajst-24974	97	2	soi-mos	ORG
ajst-24974	97	3	soi-mos	ORG
ajst-24974	98	1	171	CARDINAL
ajst-24974	98	2	soi-mos	ORG
ajst-24974	98	3	soi-mos	ORG
ajst-24974	98	4	three	CARDINAL
ajst-24974	99	1	10	CARDINAL
ajst-24974	101	1	soi-mos	ORG
ajst-24974	102	1	11	CARDINAL
ajst-24974	102	2	1	CARDINAL
ajst-24974	102	3	zhou	PERSON
ajst-24974	102	4	x.	GPE
ajst-24974	102	5	zeng	PERSON
ajst-24974	102	6	m.	PERSON
ajst-24974	103	1	2021	CARDINAL
ajst-24974	104	1	20	CARDINAL
ajst-24974	104	2	20-21	DATE
ajst-24974	105	1	2	CARDINAL
ajst-24974	105	2	liu	PERSON
ajst-24974	105	3	2023	CARDINAL
ajst-24974	106	1	48(11	CARDINAL
ajst-24974	106	2	949	CARDINAL
ajst-24974	107	1	3	CARDINAL
ajst-24974	107	2	x.	GPE
ajst-24974	107	3	liu	PERSON
ajst-24974	108	1	2006	DATE
ajst-24974	108	2	soi devices	ORG
ajst-24974	109	1	04	CARDINAL
ajst-24974	109	2	450	CARDINAL
ajst-24974	110	1	4	CARDINAL
ajst-24974	110	2	j.	PERSON
ajst-24974	110	3	2022	CARDINAL
ajst-24974	110	4	hightemperature soi technology	ORG
ajst-24974	111	1	electronics &	ORG
ajst-24974	111	2	89	CARDINAL
ajst-24974	112	1	5	CARDINAL
ajst-24974	112	2	j.	PERSON
ajst-24974	112	3	wu	PERSON
ajst-24974	112	4	b.	PERSON
ajst-24974	112	5	2019	DATE
ajst-24974	112	6	90	CARDINAL
ajst-24974	112	7	17-19	DATE
ajst-24974	113	1	6	CARDINAL
ajst-24974	113	2	2022	CARDINAL
ajst-24974	114	1	china	GPE
ajst-24974	114	2	31(06	DATE
ajst-24974	114	3	31	CARDINAL
ajst-24974	115	1	7	CARDINAL
ajst-24974	115	2	w.	PERSON
ajst-24974	115	3	yan	PERSON
ajst-24974	115	4	j., feng	PERSON
ajst-24974	115	5	r.	NORP
ajst-24974	115	6	2021	CARDINAL
ajst-24974	116	1	china	GPE
ajst-24974	116	2	89	CARDINAL
ajst-24974	117	1	8	CARDINAL
ajst-24974	117	2	f.	PERSON
ajst-24974	117	3	2021	CARDINAL
ajst-24974	118	1	electronics &	ORG
ajst-24974	118	2	21(03	CARDINAL
ajst-24974	118	3	12-21	DATE
ajst-24974	119	1	x.	GPE
ajst-24974	119	2	wang	PERSON
ajst-24974	119	3	m., wu	PERSON
ajst-24974	119	4	j.	PERSON
ajst-24974	119	5	2020	DATE
ajst-24974	120	1	149	CARDINAL
ajst-24974	121	1	10	CARDINAL
ajst-24974	121	2	j., zhu	PERSON
ajst-24974	121	3	x.	GPE
ajst-24974	121	4	x.	GPE
ajst-24974	122	1	2024	CARDINAL
ajst-24974	123	1	changzhou university (	ORG
ajst-24974	123	2	9	CARDINAL
ajst-24974	124	1	11	CARDINAL
ajst-24974	124	2	jiang	GPE
ajst-24974	124	3	yu	PERSON
ajst-24974	124	4	x.	GPE
ajst-24974	124	5	xue	ORG
ajst-24974	124	6	2021	CARDINAL
ajst-24974	125	1	nanchang hangkong university	ORG
ajst-24974	125	2	51-60	CARDINAL