id	sid	eid	entity	type
ajst-26745	1	1	academic journal of science and technology issn	ORG
ajst-26745	1	2	2771-3032	CARDINAL
ajst-26745	1	3	13	CARDINAL
ajst-26745	1	4	1	CARDINAL
ajst-26745	1	5	2024 50	DATE
ajst-26745	1	6	kang shuai1	PERSON
ajst-26745	1	7	diandian sang2	PERSON
ajst-26745	1	8	xiaohu tang3	PERSON
ajst-26745	2	1	1gachon	DATE
ajst-26745	2	2	korea 2silla university	ORG
ajst-26745	2	3	south korea	GPE
ajst-26745	2	4	3dongmyung	CARDINAL
ajst-26745	2	5	south korea	GPE
ajst-26745	2	6	ethel tennyson	PERSON
ajst-26745	2	7	3d	CARDINAL
ajst-26745	3	1	3d	CARDINAL
ajst-26745	3	2	three	CARDINAL
ajst-26745	7	1	1	CARDINAL
ajst-26745	8	1	the 1980s	DATE
ajst-26745	9	1	the 1990s	DATE
ajst-26745	10	1	2018	DATE
ajst-26745	13	1	drie technology	ORG
ajst-26745	13	2	2022	CARDINAL
ajst-26745	15	1	2023	CARDINAL
ajst-26745	17	1	2	CARDINAL
ajst-26745	19	1	1	CARDINAL
ajst-26745	20	1	the european csem institute	ORG
ajst-26745	21	1	2	CARDINAL
ajst-26745	22	1	the university of arizona	ORG
ajst-26745	23	1	3	CARDINAL
ajst-26745	23	2	bio-mems	PERSON
ajst-26745	25	1	4	CARDINAL
ajst-26745	27	1	china	GPE
ajst-26745	27	2	1	CARDINAL
ajst-26745	27	3	china	GPE
ajst-26745	28	1	2	CARDINAL
ajst-26745	29	1	3	CARDINAL
ajst-26745	29	2	china	GPE
ajst-26745	31	1	4	CARDINAL
ajst-26745	31	2	chinese	NORP
ajst-26745	31	3	51	CARDINAL
ajst-26745	31	4	863	CARDINAL
ajst-26745	32	1	china	GPE
ajst-26745	33	1	3	CARDINAL
ajst-26745	33	2	3d	CARDINAL
ajst-26745	34	1	3d	CARDINAL
ajst-26745	34	2	three	CARDINAL
ajst-26745	35	1	six-inch	QUANTITY
ajst-26745	36	1	six-inch	QUANTITY
ajst-26745	36	2	95%	PERCENT
ajst-26745	36	3	576	CARDINAL
ajst-26745	38	1	three	CARDINAL
ajst-26745	38	2	1	CARDINAL
ajst-26745	39	1	2.	CARDINAL
ajst-26745	39	2	thousands	CARDINAL
ajst-26745	40	1	3	CARDINAL
ajst-26745	40	2	first	ORDINAL
ajst-26745	40	3	two	CARDINAL
ajst-26745	42	1	several hundred microns	QUANTITY
ajst-26745	42	2	5-10 microns	QUANTITY
ajst-26745	42	3	3d	CARDINAL
ajst-26745	42	4	three	CARDINAL
ajst-26745	43	1	4.	CARDINAL
ajst-26745	46	1	china	GPE
ajst-26745	52	1	1	CARDINAL
ajst-26745	52	2	kayal lakshmanan	PERSON
ajst-26745	52	3	fabrizio tessicini	ORG
ajst-26745	52	4	antonio j. gil	PERSON
ajst-26745	52	5	ferdinando auricchio	ORG
ajst-26745	53	1	123	CARDINAL
ajst-26745	54	1	348-372	CARDINAL
ajst-26745	54	2	2023	CARDINAL
ajst-26745	56	1	2	CARDINAL
ajst-26745	56	2	shishkin y	PERSON
ajst-26745	56	3	kordina o	PERSON
ajst-26745	57	1	30 μm	MONEY
ajst-26745	57	2	4h	CARDINAL
ajst-26745	57	3	hotwall cvd reactor[j	PERSON
ajst-26745	58	1	2005	DATE
ajst-26745	58	2	285(4	DATE
ajst-26745	58	3	486	CARDINAL
ajst-26745	59	1	3	CARDINAL
ajst-26745	59	2	storasta l	ORG
ajst-26745	59	3	4h	CARDINAL
ajst-26745	60	1	2008	DATE
ajst-26745	60	2	1(1	CARDINAL
ajst-26745	60	3	5001	CARDINAL
ajst-26745	61	1	4	CARDINAL
ajst-26745	61	2	burk	PERSON
ajst-26745	61	3	o'loughlin m j	PERSON
ajst-26745	61	4	j w	PERSON
ajst-26745	61	5	6x150 mm	QUANTITY
ajst-26745	62	1	2012，717	CARDINAL
ajst-26745	63	1	75-80	CARDINAL
ajst-26745	64	1	5	CARDINAL
ajst-26745	64	2	popovic z	PERSON
ajst-26745	64	3	vanhille k	PERSON
ajst-26745	64	4	ieee,2006:1393	ORG