id	sid	eid	entity	type
ajst-32384	1	1	117	CARDINAL
ajst-32384	1	2	zhonghao chen	PERSON
ajst-32384	2	1	qingdao university of science and technology	ORG
ajst-32384	2	2	qingdao	GPE
ajst-32384	2	3	china	GPE
ajst-32384	8	1	linear motors	ORG
ajst-32384	17	1	1	CARDINAL
ajst-32384	18	1	1	CARDINAL
ajst-32384	19	1	2	CARDINAL
ajst-32384	20	1	3,4	CARDINAL
ajst-32384	21	1	5	CARDINAL
ajst-32384	22	1	linear motor	ORG
ajst-32384	22	2	6	CARDINAL
ajst-32384	23	1	tens	CARDINAL
ajst-32384	23	2	20	CARDINAL
ajst-32384	24	1	8	CARDINAL
ajst-32384	25	1	118 2	CARDINAL
ajst-32384	25	2	2.1	CARDINAL
ajst-32384	26	1	1	CARDINAL
ajst-32384	28	1	9	CARDINAL
ajst-32384	32	1	u e l i fig	ORG
ajst-32384	33	1	1	CARDINAL
ajst-32384	33	2	kirchhoff	ORG
ajst-32384	33	3	dx	PERSON
ajst-32384	33	4	e ir l	PERSON
ajst-32384	35	1	2 2e	CARDINAL
ajst-32384	41	1	2.2	CARDINAL
ajst-32384	43	1	vcm	ORG
ajst-32384	44	1	fig	ORG
ajst-32384	45	1	2	CARDINAL
ajst-32384	46	1	119	CARDINAL
ajst-32384	47	1	2	CARDINAL
ajst-32384	48	1	10	CARDINAL
ajst-32384	55	1	11	CARDINAL
ajst-32384	56	1	two-degree-of-freedom	QUANTITY
ajst-32384	57	1	2.3	CARDINAL
ajst-32384	57	2	ilc	GPE
ajst-32384	59	1	12	CARDINAL
ajst-32384	61	1	three	CARDINAL
ajst-32384	65	1	3	CARDINAL
ajst-32384	65	2	120	CARDINAL
ajst-32384	65	3	vcm fig	PERSON
ajst-32384	66	1	3	CARDINAL
ajst-32384	68	1	2.4	CARDINAL
ajst-32384	70	1	one	CARDINAL
ajst-32384	70	2	one	CARDINAL
ajst-32384	70	3	one	CARDINAL
ajst-32384	72	1	3	CARDINAL
ajst-32384	77	1	two	CARDINAL
ajst-32384	78	1	13	CARDINAL
ajst-32384	92	1	4	CARDINAL
ajst-32384	92	2	vcm kp	PERSON
ajst-32384	92	3	ki kd fig	PERSON
ajst-32384	93	1	4	CARDINAL
ajst-32384	93	2	121 2.5	DATE
ajst-32384	95	1	14	CARDINAL
ajst-32384	98	1	fig.	DATE
ajst-32384	99	1	5	CARDINAL
ajst-32384	100	1	5	CARDINAL
ajst-32384	100	2	2.6	CARDINAL
ajst-32384	101	1	vcm	GPE
ajst-32384	103	1	15	CARDINAL
ajst-32384	104	1	two	CARDINAL
ajst-32384	105	1	zero	CARDINAL
ajst-32384	107	1	vcm applications	ORG
ajst-32384	108	1	16	CARDINAL
ajst-32384	112	1	17	CARDINAL
ajst-32384	116	1	18	CARDINAL
ajst-32384	119	1	122 3	CARDINAL
ajst-32384	126	1	recent years	DATE
ajst-32384	130	1	3.1	CARDINAL
ajst-32384	130	2	six-degree-of-freedom	QUANTITY
ajst-32384	130	3	6-dof	QUANTITY
ajst-32384	133	1	first	ORDINAL
ajst-32384	135	1	6	CARDINAL
ajst-32384	136	1	6	CARDINAL
ajst-32384	136	2	three	CARDINAL
ajst-32384	136	3	three	CARDINAL
ajst-32384	136	4	three	CARDINAL
ajst-32384	137	1	6	CARDINAL
ajst-32384	137	2	six	CARDINAL
ajst-32384	137	3	123	CARDINAL
ajst-32384	137	4	six degrees	QUANTITY
ajst-32384	138	1	19	CARDINAL
ajst-32384	140	1	six degrees	QUANTITY
ajst-32384	141	1	3.2	CARDINAL
ajst-32384	146	1	20	CARDINAL
ajst-32384	149	1	zax	ORG
ajst-32384	149	2	n vcm	ORG
ajst-32384	150	1	7	CARDINAL
ajst-32384	152	1	two-degree-of	QUANTITY
ajst-32384	157	1	124	CARDINAL
ajst-32384	161	1	4.	CARDINAL
ajst-32384	178	1	125	CARDINAL
ajst-32384	178	2	1	CARDINAL
ajst-32384	178	3	rana	PERSON
ajst-32384	178	4	kvatinsky s.	PERSON
ajst-32384	180	1	2020	DATE
ajst-32384	180	2	25;67	CARDINAL
ajst-32384	180	3	8):3115–22	CARDINAL
ajst-32384	181	1	2	CARDINAL
ajst-32384	181	2	hsieh c-l	PERSON
ajst-32384	181	3	liu c-s.	PERSON
ajst-32384	183	1	2020	DATE
ajst-32384	183	2	jan 1;8:20884–91	DATE
ajst-32384	184	1	3	CARDINAL
ajst-32384	184	2	kang j	PERSON
ajst-32384	184	3	wang b.	PERSON
ajst-32384	184	4	fec	ORG
ajst-32384	184	5	vcm leo satellite-ground	PERSON
ajst-32384	186	1	2020	DATE
ajst-32384	186	2	jan 1;8:125692–701	DATE
ajst-32384	187	1	4	CARDINAL
ajst-32384	187	2	qiao y	PERSON
ajst-32384	187	3	zhao t	PERSON
ajst-32384	189	1	2022	CARDINAL
ajst-32384	189	2	sep 1;6	DATE
ajst-32384	189	3	3):269–78	CARDINAL
ajst-32384	190	1	5	CARDINAL
ajst-32384	190	2	smith kj	PERSON
ajst-32384	190	3	graham dj	PERSON
ajst-32384	190	4	neasham ja	PERSON
ajst-32384	192	1	2015	CARDINAL
ajst-32384	193	1	6	CARDINAL
ajst-32384	193	2	xing f	PERSON
ajst-32384	193	3	kwon b-i.	PERSON
ajst-32384	193	4	unipolar spm	ORG
ajst-32384	195	1	2020	DATE
ajst-32384	195	2	jan 1;8:150291–300	DATE
ajst-32384	196	1	xing f	PERSON
ajst-32384	196	2	j-w	ORG
ajst-32384	196	3	li m	PERSON
ajst-32384	196	4	kwon b-i.	PERSON
ajst-32384	196	5	spm voice coil	ORG
ajst-32384	198	1	2021 jan 1;9:57054–63	DATE
ajst-32384	199	1	8	CARDINAL
ajst-32384	199	2	chang y-h	PERSON
ajst-32384	199	3	liu c-s	PERSON
ajst-32384	199	4	chen i-w	PERSON
ajst-32384	199	5	tsai m-s	PERSON
ajst-32384	199	6	tseng h-c.	PERSON
ajst-32384	201	1	2019	CARDINAL
ajst-32384	201	2	jan 1;7:146258–63	DATE
ajst-32384	202	1	9	CARDINAL
ajst-32384	202	2	hekimoglu b.	PERSON
ajst-32384	204	1	2019	CARDINAL
ajst-32384	204	2	jan 1;7:38100–14	DATE
ajst-32384	205	1	10	CARDINAL
ajst-32384	205	2	panda s. application	PERSON
ajst-32384	207	1	2021 feb 1;6	DATE
ajst-32384	207	2	1	CARDINAL
ajst-32384	208	1	11	CARDINAL
ajst-32384	208	2	gao p	PERSON
ajst-32384	208	3	zhang g	PERSON
ajst-32384	208	4	ouyang h	PERSON
ajst-32384	208	5	mei l.	PERSON
ajst-32384	209	1	jan 1;8:53498–510	DATE
ajst-32384	210	1	12	CARDINAL
ajst-32384	210	2	wei y-s	PERSON
ajst-32384	210	3	wan k	PERSON
ajst-32384	210	4	xu q-y. design	PERSON
ajst-32384	210	5	ilc	PERSON
ajst-32384	210	6	2-d	QUANTITY
ajst-32384	212	1	2019 jan 1;7:134920–5	DATE
ajst-32384	213	1	13	CARDINAL
ajst-32384	213	2	zheng y	PERSON
ajst-32384	213	3	xu	PERSON
ajst-32384	214	1	castelli vp	PERSON
ajst-32384	214	2	meng	PERSON
ajst-32384	214	3	yu h.	ORG
ajst-32384	215	1	2021	CARDINAL
ajst-32384	215	2	6th	ORDINAL
ajst-32384	216	1	2024 jul 18;220	DATE
ajst-32384	216	2	4	CARDINAL
ajst-32384	217	1	14	CARDINAL
ajst-32384	217	2	qian l	PERSON
ajst-32384	217	3	yang t	PERSON
ajst-32384	217	4	cui x	PERSON
ajst-32384	217	5	luo q. coupling	PERSON
ajst-32384	218	1	chinese	NORP
ajst-32384	219	1	2017 nov 1;26	DATE
ajst-32384	219	2	6):1206–12	CARDINAL
ajst-32384	220	1	15	CARDINAL
ajst-32384	220	2	yang j	PERSON
ajst-32384	220	3	sun x	PERSON
ajst-32384	222	1	2023 jan 1;11:109283–93	DATE
ajst-32384	223	1	16	CARDINAL
ajst-32384	223	2	wan j	PERSON
ajst-32384	223	3	wang d	PERSON
ajst-32384	223	4	yan t	PERSON
ajst-32384	223	5	quantum	ORG
ajst-32384	225	1	2019	CARDINAL
ajst-32384	225	2	jan 1;7:124828–43	DATE
ajst-32384	226	1	17	CARDINAL
ajst-32384	226	2	liu j	PERSON
ajst-32384	226	3	li t	PERSON
ajst-32384	226	4	chen j. narx	PERSON
ajst-32384	228	1	2020	DATE
ajst-32384	228	2	jan 1;8:130922–36	DATE
ajst-32384	229	1	18	CARDINAL
ajst-32384	229	2	liu f	PERSON
ajst-32384	229	3	wang h	PERSON
ajst-32384	229	4	wang h	PERSON
ajst-32384	229	5	zhang m	PERSON
ajst-32384	229	6	zhao h.	PERSON
ajst-32384	229	7	two	CARDINAL
ajst-32384	231	1	2017	CARDINAL
ajst-32384	232	1	19	CARDINAL
ajst-32384	232	2	ahmad h	PERSON
ajst-32384	232	3	ro j.	PERSON
ajst-32384	234	1	2020	DATE
ajst-32384	234	2	jan 1;8:160177–87	DATE
ajst-32384	235	1	20	CARDINAL
ajst-32384	235	2	zhang y	PERSON
ajst-32384	235	3	sun z.	PERSON
ajst-32384	236	1	tsinghua science & technology	ORG
ajst-32384	237	1	2007	DATE
ajst-32384	237	2	oct 1;12 (5):607–13	DATE