id	sid	eid	entity	type
ajst-3262	1	1	academic journal of science and technology issn	ORG
ajst-3262	1	2	2771-3032	CARDINAL
ajst-3262	2	1	4	CARDINAL
ajst-3262	2	2	1	CARDINAL
ajst-3262	2	3	2022 89	DATE
ajst-3262	2	4	lei yang	PERSON
ajst-3262	2	5	xueming li	PERSON
ajst-3262	2	6	yinfang	PERSON
ajst-3262	2	7	chongqing university	ORG
ajst-3262	2	8	401331	DATE
ajst-3262	2	9	china	GPE
ajst-3262	5	1	35 min	DATE
ajst-3262	5	2	50 ma/cm2	QUANTITY
ajst-3262	6	1	kh550	ORG
ajst-3262	6	2	kh560	ORG
ajst-3262	9	1	1	CARDINAL
ajst-3262	10	1	1	CARDINAL
ajst-3262	10	2	2	CARDINAL
ajst-3262	12	1	3	CARDINAL
ajst-3262	13	1	the decades	DATE
ajst-3262	13	2	4	CARDINAL
ajst-3262	16	1	5	CARDINAL
ajst-3262	18	1	6	CARDINAL
ajst-3262	19	1	a few minutes	TIME
ajst-3262	21	1	8	CARDINAL
ajst-3262	22	1	9	CARDINAL
ajst-3262	23	1	kh550	ORG
ajst-3262	23	2	kh560	ORG
ajst-3262	23	3	10	CARDINAL
ajst-3262	24	1	2	CARDINAL
ajst-3262	24	2	emei semiconductor materials co., ltd.	ORG
ajst-3262	24	3	dongfang electric group	ORG
ajst-3262	24	4	2~4	CARDINAL
ajst-3262	24	5	500~550	CARDINAL
ajst-3262	24	6	1.0 cm	QUANTITY
ajst-3262	24	7	1.0 cm square	QUANTITY
ajst-3262	25	1	sio2	ORG
ajst-3262	28	1	five minutes	TIME
ajst-3262	28	2	10%	PERCENT
ajst-3262	28	3	10 minutes	TIME
ajst-3262	28	4	1:1:5	CARDINAL
ajst-3262	28	5	1:1:5	CARDINAL
ajst-3262	28	6	70 ℃	QUANTITY
ajst-3262	28	7	five minutes	TIME
ajst-3262	30	1	1:5	CARDINAL
ajst-3262	30	2	35min	CARDINAL
ajst-3262	31	1	60 ℃	QUANTITY
ajst-3262	32	1	3	CARDINAL
ajst-3262	32	2	35 min	TIME
ajst-3262	32	3	50	CARDINAL
ajst-3262	33	1	two	CARDINAL
ajst-3262	33	2	kh550	ORG
ajst-3262	33	3	kh560	ORG
ajst-3262	35	1	90	CARDINAL
ajst-3262	35	2	1.2mol	CARDINAL
ajst-3262	35	3	seven	CARDINAL
ajst-3262	43	1	si-h	ORG
ajst-3262	44	1	kh560	ORG
ajst-3262	44	2	only a few minutes	TIME
ajst-3262	46	1	1	CARDINAL
ajst-3262	46	2	a. kh560	PERSON
ajst-3262	46	3	b. kh550	PERSON
ajst-3262	46	4	d.	NORP
ajst-3262	51	1	kh560	ORG
ajst-3262	51	2	kh550	PERSON
ajst-3262	54	1	kh550	PERSON
ajst-3262	55	1	si-h	ORG
ajst-3262	55	2	kh560	ORG
ajst-3262	55	3	kh560	ORG
ajst-3262	56	1	si-h	ORG
ajst-3262	57	1	the si-h	ORG
ajst-3262	58	1	2	CARDINAL
ajst-3262	59	1	e. kh550	PERSON
ajst-3262	60	1	91 3.2	CARDINAL
ajst-3262	61	1	kh550	PERSON
ajst-3262	61	2	kh560	ORG
ajst-3262	64	1	kh560	ORG
ajst-3262	65	1	kh560	ORG
ajst-3262	65	2	25 days	DATE
ajst-3262	66	1	zhang hua	PERSON
ajst-3262	66	2	li jiao	PERSON
ajst-3262	66	3	cong rimin research	ORG
ajst-3262	67	1	shandong university of technology	ORG
ajst-3262	67	2	2015	CARDINAL
ajst-3262	67	3	3	CARDINAL
ajst-3262	68	1	2	CARDINAL
ajst-3262	68	2	yang jiale	PERSON
ajst-3262	68	3	shen honglie	PERSON
ajst-3262	68	4	xing zhengwei	PERSON
ajst-3262	69	1	2016	CARDINAL
ajst-3262	69	2	12	CARDINAL
ajst-3262	71	1	3	CARDINAL
ajst-3262	71	2	tian bin	PERSON
ajst-3262	71	3	hu ming	PERSON
ajst-3262	71	4	ma jiazhi	PERSON
ajst-3262	71	5	2003	DATE
ajst-3262	71	6	6	CARDINAL
ajst-3262	72	1	4	CARDINAL
ajst-3262	72	2	zhao	PERSON
ajst-3262	72	3	2013	DATE
ajst-3262	72	4	1	CARDINAL
ajst-3262	73	1	5	CARDINAL
ajst-3262	73	2	yu weifei	PERSON
ajst-3262	73	3	huang hui	PERSON
ajst-3262	74	1	2004	DATE
ajst-3262	75	1	6	CARDINAL
ajst-3262	75	2	yu xianwen	PERSON
ajst-3262	75	3	chen yanyan	PERSON
ajst-3262	75	4	ying taokai	PERSON
ajst-3262	76	1	2005	DATE
ajst-3262	76	2	2	CARDINAL
ajst-3262	77	1	7	CARDINAL
ajst-3262	77	2	leng xinli	PERSON
ajst-3262	79	1	nanchang university	ORG
ajst-3262	79	2	2010	DATE
ajst-3262	80	1	8	CARDINAL
ajst-3262	80	2	cui meng	PERSON
ajst-3262	80	3	hu ming	PERSON
ajst-3262	80	4	lei zhenkun	PERSON
ajst-3262	80	5	dou yanwei	PERSON
ajst-3262	80	6	tian bin	PERSON
ajst-3262	80	7	fifth	ORDINAL
ajst-3262	80	8	chinese	NORP
ajst-3262	80	9	ⅲ.	TIME
ajst-3262	80	10	2004	DATE
ajst-3262	80	11	862	CARDINAL
ajst-3262	81	1	9	CARDINAL
ajst-3262	81	2	li xueming	PERSON
ajst-3262	81	3	chen jianwen	PERSON
ajst-3262	81	4	yang wenjing	PERSON
ajst-3262	81	5	huang hui	PERSON
ajst-3262	81	6	yu weifei	PERSON
ajst-3262	83	1	chemical bulletin,	ORG
ajst-3262	83	2	2009	DATE
ajst-3262	83	3	72	DATE
ajst-3262	83	4	05	DATE
ajst-3262	83	5	470-473	CARDINAL
ajst-3262	84	1	10.14159	CARDINAL
ajst-3262	84	2	10	CARDINAL
ajst-3262	86	1	nanjing university of science and technology	ORG
ajst-3262	86	2	2007	DATE