id	sid	eid	entity	type
ajst-6855	1	1	academic journal of science and technology issn	ORG
ajst-6855	1	2	2771-3032	CARDINAL
ajst-6855	2	1	5	CARDINAL
ajst-6855	2	2	2	CARDINAL
ajst-6855	2	3	2023 158	CARDINAL
ajst-6855	2	4	ruocheng	PERSON
ajst-6855	2	5	gong1	GPE
ajst-6855	2	6	2	CARDINAL
ajst-6855	2	7	song2	PERSON
ajst-6855	2	8	yang2	GPE
ajst-6855	2	9	huan liu2	PERSON
ajst-6855	3	1	1school	CARDINAL
ajst-6855	3	2	guangzhou university of technology	ORG
ajst-6855	3	3	guangzhou	GPE
ajst-6855	3	4	510006	DATE
ajst-6855	3	5	china	GPE
ajst-6855	3	6	2songshan lake	LOC
ajst-6855	3	7	dongguan	GPE
ajst-6855	3	8	dongguan 523808	GPE
ajst-6855	3	9	china	GPE
ajst-6855	3	10	rca	ORG
ajst-6855	9	1	80.4%	PERCENT
ajst-6855	9	2	rca	ORG
ajst-6855	11	1	silicon carbide	ORG
ajst-6855	11	2	rca	ORG
ajst-6855	12	1	1	CARDINAL
ajst-6855	12	2	introduction silicon carbide	ORG
ajst-6855	19	1	guan	PERSON
ajst-6855	20	1	two	CARDINAL
ajst-6855	20	2	1:1	CARDINAL
ajst-6855	20	3	1000℃	QUANTITY
ajst-6855	21	1	huang	PERSON
ajst-6855	21	2	5 minutes	TIME
ajst-6855	21	3	200-700℃	QUANTITY
ajst-6855	22	1	200℃	QUANTITY
ajst-6855	25	1	rca	ORG
ajst-6855	26	1	di water	PERSON
ajst-6855	27	1	di water	PERSON
ajst-6855	28	1	rca	ORG
ajst-6855	30	1	first	ORDINAL
ajst-6855	33	1	rca	ORG
ajst-6855	35	1	159 2	CARDINAL
ajst-6855	35	2	2.1	CARDINAL
ajst-6855	35	3	4hsic	CARDINAL
ajst-6855	36	1	4 inches	QUANTITY
ajst-6855	36	2	12 μm	CARDINAL
ajst-6855	36	3	5×1016	CARDINAL
ajst-6855	37	1	microsphere	PERSON
ajst-6855	37	2	1 μm	CARDINAL
ajst-6855	37	3	2.5%	PERCENT
ajst-6855	38	1	10×10	CARDINAL
ajst-6855	39	1	36×15 mm2	QUANTITY
ajst-6855	40	1	2.2	CARDINAL
ajst-6855	40	2	tao et al[11	PERSON
ajst-6855	42	1	two	CARDINAL
ajst-6855	42	2	koh	PERSON
ajst-6855	42	3	2	CARDINAL
ajst-6855	43	1	0.1 ml	QUANTITY
ajst-6855	43	2	10×10mm2	CARDINAL
ajst-6855	43	3	30 seconds	TIME
ajst-6855	45	1	4-inch	QUANTITY
ajst-6855	45	2	1000	CARDINAL
ajst-6855	45	3	more than three days	DATE
ajst-6855	46	1	1	CARDINAL
ajst-6855	46	2	10	CARDINAL
ajst-6855	47	1	1	CARDINAL
ajst-6855	51	1	rca	ORG
ajst-6855	52	1	spm	GPE
ajst-6855	53	1	spm	GPE
ajst-6855	57	1	2.3	CARDINAL
ajst-6855	58	1	10×10mm2	CARDINAL
ajst-6855	59	1	otsuka electronics elsz-2000zs	ORG
ajst-6855	60	1	lasertech	NORP
ajst-6855	61	1	3	CARDINAL
ajst-6855	63	1	1	CARDINAL
ajst-6855	63	2	2	CARDINAL
ajst-6855	64	1	1(a	CARDINAL
ajst-6855	64	2	2	CARDINAL
ajst-6855	64	3	5152	CARDINAL
ajst-6855	65	1	1(b	CARDINAL
ajst-6855	65	2	12	DATE
ajst-6855	65	3	only 303	CARDINAL
ajst-6855	66	1	1	CARDINAL
ajst-6855	67	1	1	CARDINAL
ajst-6855	68	1	12	CARDINAL
ajst-6855	68	2	160	CARDINAL
ajst-6855	71	1	2	CARDINAL
ajst-6855	71	2	2	CARDINAL
ajst-6855	74	1	12	DATE
ajst-6855	78	1	sio2	ORG
ajst-6855	80	1	3	CARDINAL
ajst-6855	80	2	sio2	ORG
ajst-6855	81	1	3	CARDINAL
ajst-6855	81	2	3	CARDINAL
ajst-6855	81	3	2	CARDINAL
ajst-6855	81	4	three	CARDINAL
ajst-6855	81	5	12	CARDINAL
ajst-6855	83	1	less than 2	CARDINAL
ajst-6855	84	1	161	CARDINAL
ajst-6855	84	2	two	CARDINAL
ajst-6855	88	1	1	CARDINAL
ajst-6855	88	2	4	CARDINAL
ajst-6855	89	1	4	CARDINAL
ajst-6855	89	2	1964	DATE
ajst-6855	89	3	324	CARDINAL
ajst-6855	89	4	8231	DATE
ajst-6855	89	5	385	CARDINAL
ajst-6855	91	1	spm	GPE
ajst-6855	91	2	spm	GPE
ajst-6855	93	1	rca	ORG
ajst-6855	93	2	80.4%	PERCENT
ajst-6855	94	1	spm	GPE
ajst-6855	94	2	three	CARDINAL
ajst-6855	94	3	reinhardt	PERSON
ajst-6855	96	1	spm-sc2-sc1	GPE
ajst-6855	97	1	4	CARDINAL
ajst-6855	105	1	wang f. development	PERSON
ajst-6855	106	1	2014	DATE
ajst-6855	106	2	29(5	CARDINAL
ajst-6855	106	3	2289-95	DATE
ajst-6855	107	1	2	CARDINAL
ajst-6855	107	2	yamamura k. competition	PERSON
ajst-6855	107	3	4h	CARDINAL
ajst-6855	107	4	0001	DATE
ajst-6855	109	1	sci rep	ORG
ajst-6855	109	2	2015	DATE
ajst-6855	109	3	5	CARDINAL
ajst-6855	109	4	8947	DATE
ajst-6855	110	1	3	CARDINAL
ajst-6855	110	2	thomas b	PERSON
ajst-6855	111	1	2022	CARDINAL
ajst-6855	111	2	140	CARDINAL
ajst-6855	111	3	106414	CARDINAL
ajst-6855	112	1	4	CARDINAL
ajst-6855	112	2	kwietniewski n	PERSON
ajst-6855	112	3	sochacki m	ORG
ajst-6855	112	4	szmidt j	PERSON
ajst-6855	112	5	4h	CARDINAL
ajst-6855	114	1	2008	DATE
ajst-6855	114	2	254(24	DATE
ajst-6855	114	3	8106-10	DATE
ajst-6855	114	4	162	CARDINAL
ajst-6855	115	1	5	CARDINAL
ajst-6855	115	2	zhao l	PERSON
ajst-6855	115	3	shang h	GPE
ajst-6855	115	4	wang	PERSON
ajst-6855	117	1	2020	DATE
ajst-6855	117	2	126(8	CARDINAL
ajst-6855	118	1	6h	CARDINAL
ajst-6855	120	1	2001	DATE
ajst-6855	120	2	19(1	DATE
ajst-6855	120	3	280	CARDINAL
ajst-6855	121	1	7	CARDINAL
ajst-6855	121	2	gao m	PERSON
ajst-6855	123	1	2011	DATE
ajst-6855	123	2	257(23	CARDINAL
ajst-6855	123	3	10172-6	DATE
ajst-6855	124	1	8	CARDINAL
ajst-6855	124	2	bruno g	PERSON
ajst-6855	124	3	4h	CARDINAL
ajst-6855	124	4	6h	CARDINAL
ajst-6855	126	1	2004	DATE
ajst-6855	126	2	4011	CARDINAL
ajst-6855	127	1	9	CARDINAL
ajst-6855	127	2	madani m	PERSON
ajst-6855	127	3	liu y-l	PERSON
ajst-6855	127	4	takahashi m	PERSON
ajst-6855	127	5	hcn	ORG
ajst-6855	129	1	2008	DATE
ajst-6855	129	2	155(11	DATE
ajst-6855	130	1	10	CARDINAL
ajst-6855	130	2	reinhardt k	PERSON
ajst-6855	130	3	kern w.	PERSON
ajst-6855	133	1	william andrew	PERSON
ajst-6855	133	2	2018	DATE
ajst-6855	134	1	11	CARDINAL
ajst-6855	134	2	wu z	PERSON
ajst-6855	134	3	zhuo	PERSON
ajst-6855	137	1	2014	DATE
ajst-6855	137	2	66	CARDINAL
ajst-6855	137	3	58	CARDINAL
ajst-6855	138	1	12	CARDINAL
ajst-6855	138	2	zhong w w	PERSON
ajst-6855	138	3	huang y f	PERSON
ajst-6855	141	1	phys chem chem phys	ORG
ajst-6855	141	2	2016	DATE
ajst-6855	141	3	28033-9	DATE
ajst-6855	142	1	13	CARDINAL
ajst-6855	142	2	mitchel w	PERSON
ajst-6855	142	3	4h	CARDINAL
ajst-6855	144	1	2001	DATE
ajst-6855	144	2	30	CARDINAL
ajst-6855	144	3	1271-5	CARDINAL
ajst-6855	145	1	14	CARDINAL
ajst-6855	145	2	antonio alves júnior j	PERSON
ajst-6855	145	3	baptista baldo j.	PERSON
ajst-6855	147	1	2014	DATE
ajst-6855	147	2	29	CARDINAL
ajst-6855	148	1	15	CARDINAL
ajst-6855	148	2	khurana	PERSON
ajst-6855	148	3	kumar	PERSON
ajst-6855	150	1	2017	CARDINAL
ajst-6855	150	2	12(1	CARDINAL
ajst-6855	150	3	140	CARDINAL
ajst-6855	151	1	16	CARDINAL
ajst-6855	151	2	jiang n	PERSON
ajst-6855	151	3	li y, et al	PERSON
ajst-6855	151	4	sio2	ORG
ajst-6855	152	1	2008	DATE
ajst-6855	152	2	110(1	DATE
ajst-6855	152	3	128	CARDINAL