id	sid	eid	entity	type
ajst-6993	1	1	academic journal of science and technology issn	ORG
ajst-6993	1	2	2771-3032	CARDINAL
ajst-6993	2	1	5	CARDINAL
ajst-6993	2	2	2	CARDINAL
ajst-6993	2	3	2023 235	CARDINAL
ajst-6993	2	4	chen1	PERSON
ajst-6993	2	5	3	DATE
ajst-6993	2	6	4	DATE
ajst-6993	2	7	wang1	PRODUCT
ajst-6993	2	8	3	DATE
ajst-6993	2	9	4	DATE
ajst-6993	2	10	xu2	WORK_OF_ART
ajst-6993	2	11	yue zhao1	PERSON
ajst-6993	2	12	3	DATE
ajst-6993	2	13	4	DATE
ajst-6993	2	14	tang1	NORP
ajst-6993	2	15	3	DATE
ajst-6993	2	16	3	DATE
ajst-6993	2	17	4	DATE
ajst-6993	2	18	1shanghai	CARDINAL
ajst-6993	2	19	chinese academy of sciences	ORG
ajst-6993	2	20	shanghai	GPE
ajst-6993	2	21	200050	DATE
ajst-6993	2	22	china 2shanghai institute of optics	ORG
ajst-6993	2	23	chinese academy of sciences	ORG
ajst-6993	2	24	shanghai 201800	ORG
ajst-6993	2	25	china 3cas	ORG
ajst-6993	2	26	shanghai	GPE
ajst-6993	2	27	200050	DATE
ajst-6993	2	28	china 4university of chinese academy of sciences	ORG
ajst-6993	2	29	beijing	GPE
ajst-6993	2	30	china	GPE
ajst-6993	3	1	two	CARDINAL
ajst-6993	4	1	first	ORDINAL
ajst-6993	4	2	first	ORDINAL
ajst-6993	4	3	about 176.2𝑝𝐻	CARDINAL
ajst-6993	5	1	second	ORDINAL
ajst-6993	5	2	32	CARDINAL
ajst-6993	6	1	two	CARDINAL
ajst-6993	7	1	two	CARDINAL
ajst-6993	8	1	1	CARDINAL
ajst-6993	8	2	two	CARDINAL
ajst-6993	8	3	two	CARDINAL
ajst-6993	8	4	first	ORDINAL
ajst-6993	9	1	two	CARDINAL
ajst-6993	9	2	fll mode[2	ORG
ajst-6993	12	1	two	CARDINAL
ajst-6993	14	1	fll	NORP
ajst-6993	15	1	ssa	ORG
ajst-6993	17	1	first	ORDINAL
ajst-6993	18	1	4.2k	CARDINAL
ajst-6993	19	1	first	ORDINAL
ajst-6993	19	2	150	CARDINAL
ajst-6993	20	1	first	ORDINAL
ajst-6993	20	2	second	ORDINAL
ajst-6993	20	3	first	ORDINAL
ajst-6993	21	1	second	ORDINAL
ajst-6993	22	1	2.	CARDINAL
ajst-6993	22	2	first	ORDINAL
ajst-6993	22	3	first	ORDINAL
ajst-6993	22	4	1(a	CARDINAL
ajst-6993	24	1	two	CARDINAL
ajst-6993	24	2	about 5	CARDINAL
ajst-6993	24	3	176.2𝑝𝐻.	CARDINAL
ajst-6993	24	4	one	CARDINAL
ajst-6993	24	5	about 45.8𝑝𝐻	CARDINAL
ajst-6993	26	1	22𝑢𝑚	DATE
ajst-6993	26	2	28𝑢𝑚	ORDINAL
ajst-6993	27	1	josephson junction	ORG
ajst-6993	27	2	8ω	CARDINAL
ajst-6993	27	3	236	CARDINAL
ajst-6993	29	1	approximately 2.8𝑢𝑚 2.8𝑢𝑚	CARDINAL
ajst-6993	29	2	𝐼	ORG
ajst-6993	29	3	about 7.9	CARDINAL
ajst-6993	30	1	2𝐿	CARDINAL
ajst-6993	30	2	1.04	CARDINAL
ajst-6993	30	3	2𝜋𝑅	CARDINAL
ajst-6993	30	4	0.5	CARDINAL
ajst-6993	30	5	1	CARDINAL
ajst-6993	33	1	first	ORDINAL
ajst-6993	34	1	about 0.5 ω	CARDINAL
ajst-6993	37	1	about 6.3ua	CARDINAL
ajst-6993	37	2	20𝑢𝐴/ф	CARDINAL
ajst-6993	38	1	1981	DATE
ajst-6993	38	2	rowell et al	PERSON
ajst-6993	38	3	2	CARDINAL
ajst-6993	38	4	nb	ORG
ajst-6993	38	5	josephson	PERSON
ajst-6993	38	6	nb	ORG
ajst-6993	38	7	nb/al alo /nb	ORG
ajst-6993	38	8	three	CARDINAL
ajst-6993	38	9	fabrication[12]	WORK_OF_ART
ajst-6993	39	1	nb06	PRODUCT
ajst-6993	39	2	the chinese academy of sciences shanghai institute of microsystems	ORG
ajst-6993	40	1	first	ORDINAL
ajst-6993	40	2	4inch	PRODUCT
ajst-6993	41	1	nb/al alo	ORG
ajst-6993	41	2	three	CARDINAL
ajst-6993	43	1	3	CARDINAL
ajst-6993	43	2	32	CARDINAL
ajst-6993	43	3	32	CARDINAL
ajst-6993	43	4	ssa	ORG
ajst-6993	44	1	ssa	ORG
ajst-6993	45	1	2	CARDINAL
ajst-6993	46	1	ssa	ORG
ajst-6993	46	2	three	CARDINAL
ajst-6993	46	3	2(a	CARDINAL
ajst-6993	47	1	ssa	ORG
ajst-6993	47	2	about 17𝑢𝐴.	CARDINAL
ajst-6993	47	3	ф /4	PERSON
ajst-6993	48	1	2(b	CARDINAL
ajst-6993	48	2	18𝑢𝐴	CARDINAL
ajst-6993	48	3	3.5𝑚𝑉/ф	CARDINAL
ajst-6993	49	1	237	CARDINAL
ajst-6993	49	2	3(a	CARDINAL
ajst-6993	49	3	ssa	ORG
ajst-6993	49	4	fll	NORP
ajst-6993	50	1	3.5𝑚𝑉/	CARDINAL
ajst-6993	50	2	200𝐻𝑧	CARDINAL
ajst-6993	50	3	approximately 0.51𝑢ф /√𝐻𝑧	CARDINAL
ajst-6993	52	1	176.2𝑝𝐻	CARDINAL
ajst-6993	52	2	6.2𝑝𝐴/√𝐻𝑧	CARDINAL
ajst-6993	53	1	3	CARDINAL
ajst-6993	54	1	fll	NORP
ajst-6993	54	2	fll	NORP
ajst-6993	54	3	ssa	ORG
ajst-6993	55	1	ssa	ORG
ajst-6993	55	2	fll	NORP
ajst-6993	56	1	fll	NORP
ajst-6993	57	1	fll	NORP
ajst-6993	57	2	200𝐻𝑧	CARDINAL
ajst-6993	57	3	approximately 0.42	CARDINAL
ajst-6993	57	4	5.4𝑝𝐴/√𝐻𝑧. 4	DATE
ajst-6993	57	5	two	CARDINAL
ajst-6993	57	6	two	CARDINAL
ajst-6993	57	7	two	CARDINAL
ajst-6993	57	8	two	CARDINAL
ajst-6993	58	1	4	CARDINAL
ajst-6993	58	2	two	CARDINAL
ajst-6993	58	3	two	CARDINAL
ajst-6993	59	1	4	CARDINAL
ajst-6993	60	1	two	CARDINAL
ajst-6993	60	2	238	CARDINAL
ajst-6993	60	3	two	CARDINAL
ajst-6993	61	1	5(a	CARDINAL
ajst-6993	61	2	200𝐻𝑧	CARDINAL
ajst-6993	61	3	1.15𝑢ф	CARDINAL
ajst-6993	61	4	12.4𝑝𝐴/√𝐻𝑧.	CARDINAL
ajst-6993	61	5	two	CARDINAL
ajst-6993	61	6	fll	NORP
ajst-6993	61	7	5(b	CARDINAL
ajst-6993	62	1	200𝐻𝑧	CARDINAL
ajst-6993	62	2	11.3𝑝𝐴/√𝐻𝑧.	CARDINAL
ajst-6993	62	3	5	CARDINAL
ajst-6993	63	1	two	CARDINAL
ajst-6993	63	2	fll	NORP
ajst-6993	63	3	two	CARDINAL
ajst-6993	63	4	5	CARDINAL
ajst-6993	63	5	two	CARDINAL
ajst-6993	64	1	first	ORDINAL
ajst-6993	64	2	second	ORDINAL
ajst-6993	65	1	first	ORDINAL
ajst-6993	65	2	176.2𝑝𝐻	CARDINAL
ajst-6993	66	1	second	ORDINAL
ajst-6993	66	2	32	CARDINAL
ajst-6993	66	3	ssa	ORG
ajst-6993	66	4	3.5𝑚𝑉/ф	CARDINAL
ajst-6993	67	1	0.42𝑢ф /√𝐻𝑧	FAC
ajst-6993	68	1	two	CARDINAL
ajst-6993	68	2	two	CARDINAL
ajst-6993	69	1	fll	NORP
ajst-6993	70	1	fll	NORP
ajst-6993	70	2	two	CARDINAL
ajst-6993	71	1	1	CARDINAL
ajst-6993	73	1	1991	DATE
ajst-6993	73	2	2989-92	CARDINAL
ajst-6993	74	1	2	CARDINAL
ajst-6993	74	2	welty	ORG
ajst-6993	74	3	j m. two	PERSON
ajst-6993	76	1	1993	DATE
ajst-6993	76	2	3(1	CARDINAL
ajst-6993	76	3	2605-8	DATE
ajst-6993	77	1	3	CARDINAL
ajst-6993	77	2	kent	PERSON
ajst-6993	77	3	erich g	PERSON
ajst-6993	78	1	1999	DATE
ajst-6993	79	1	4	CARDINAL
ajst-6993	79	2	lee l	PERSON
ajst-6993	79	3	matlashov	ORG
ajst-6993	80	1	two	CARDINAL
ajst-6993	81	1	, 1997	DATE
ajst-6993	81	2	7	CARDINAL
ajst-6993	81	3	3033-6	CARDINAL
ajst-6993	82	1	5	CARDINAL
ajst-6993	82	2	peters m	PERSON
ajst-6993	85	1	1990	DATE
ajst-6993	85	2	57	CARDINAL
ajst-6993	85	3	406	CARDINAL
ajst-6993	86	1	6	CARDINAL
ajst-6993	86	2	clarke j. dc squid	PERSON
ajst-6993	87	1	1977	DATE
ajst-6993	87	2	29(3	DATE
ajst-6993	87	3	301-31	DATE
ajst-6993	88	1	7	CARDINAL
ajst-6993	88	2	nb	ORG
ajst-6993	88	3	2016	DATE
ajst-6993	90	1	8	CARDINAL
ajst-6993	90	2	adams j s	PERSON
ajst-6993	90	3	mo	GPE
ajst-6993	92	1	2020	DATE
ajst-6993	92	2	200(5	CARDINAL
ajst-6993	92	3	192	CARDINAL
ajst-6993	93	1	9	CARDINAL
ajst-6993	95	1	1982	DATE
ajst-6993	95	2	47(5	DATE
ajst-6993	95	3	385	CARDINAL
ajst-6993	96	1	10	CARDINAL
ajst-6993	96	2	gallagher w j	PERSON
ajst-6993	96	3	1989	DATE
ajst-6993	96	4	55	CARDINAL
ajst-6993	96	5	1451-3	CARDINAL
ajst-6993	97	1	11	CARDINAL
ajst-6993	100	1	2000	DATE
ajst-6993	100	2	118(1	CARDINAL
ajst-6993	100	3	105	CARDINAL
ajst-6993	101	1	12	CARDINAL
ajst-6993	101	2	kroger h	ORG
ajst-6993	101	3	smith l n	ORG
ajst-6993	101	4	josephson tunnel	ORG
ajst-6993	101	5	1981	DATE
ajst-6993	101	6	39	CARDINAL
ajst-6993	101	7	280	CARDINAL
ajst-6993	102	1	13	CARDINAL
ajst-6993	102	2	zhang x	PERSON
ajst-6993	102	3	zhang g	PERSON
ajst-6993	102	4	nb	ORG
ajst-6993	104	1	2018	DATE
ajst-6993	104	2	548	CARDINAL
ajst-6993	104	3	1-4	CARDINAL
ajst-6993	105	1	14	CARDINAL
ajst-6993	107	1	2015	CARDINAL
ajst-6993	107	2	28	DATE