id	sid	tid	token	lemma	pos
ajst-10992	1	1	academic	academic	ADJ
ajst-10992	1	2	journal	journal	NOUN
ajst-10992	1	3	of	of	ADP
ajst-10992	1	4	science	science	NOUN
ajst-10992	1	5	and	and	CCONJ
ajst-10992	1	6	technology	technology	NOUN
ajst-10992	1	7	issn	issn	NOUN
ajst-10992	1	8	:	:	PUNCT
ajst-10992	1	9	2771	2771	NUM
ajst-10992	1	10	-	-	SYM
ajst-10992	1	11	3032	3032	NUM
ajst-10992	1	12	|	|	NOUN
ajst-10992	1	13	vol	vol	NOUN
ajst-10992	1	14	.	.	PROPN
ajst-10992	2	1	7	7	NUM
ajst-10992	2	2	,	,	PUNCT
ajst-10992	2	3	no	no	INTJ
ajst-10992	2	4	.	.	NOUN
ajst-10992	2	5	1	1	NUM
ajst-10992	2	6	,	,	PUNCT
ajst-10992	2	7	2023	2023	NUM
ajst-10992	2	8	70	70	NUM
ajst-10992	2	9	thickness	thickness	NOUN
ajst-10992	2	10	measurement	measurement	NOUN
ajst-10992	2	11	technology	technology	NOUN
ajst-10992	2	12	for	for	ADP
ajst-10992	2	13	large‐size	large‐size	NOUN
ajst-10992	2	14	ultra‐thin	ultra‐thin	ADJ
ajst-10992	2	15	substrate	substrate	NOUN
ajst-10992	2	16	glass	glass	NOUN
ajst-10992	2	17	yongqian	yongqian	PROPN
ajst-10992	2	18	zhu	zhu	PROPN
ajst-10992	2	19	,	,	PUNCT
ajst-10992	2	20	meng	meng	PROPN
ajst-10992	2	21	zhu	zhu	PROPN
ajst-10992	2	22	bengbu	bengbu	PROPN
ajst-10992	2	23	coe	coe	PROPN
ajst-10992	2	24	technology	technology	PROPN
ajst-10992	2	25	co.	co.	PROPN
ajst-10992	2	26	,	,	PUNCT
ajst-10992	2	27	ltd	ltd	PROPN
ajst-10992	2	28	.	.	PROPN
ajst-10992	2	29	bengbu	bengbu	PROPN
ajst-10992	2	30	,	,	PUNCT
ajst-10992	2	31	233000	233000	NUM
ajst-10992	2	32	,	,	PUNCT
ajst-10992	2	33	china	china	PROPN
ajst-10992	2	34	abstract	abstract	NOUN
ajst-10992	2	35	:	:	PUNCT
ajst-10992	2	36	the	the	DET
ajst-10992	2	37	development	development	NOUN
ajst-10992	2	38	trend	trend	NOUN
ajst-10992	2	39	of	of	ADP
ajst-10992	2	40	electronic	electronic	ADJ
ajst-10992	2	41	substrate	substrate	NOUN
ajst-10992	2	42	glass	glass	NOUN
ajst-10992	2	43	is	be	AUX
ajst-10992	2	44	larger	large	ADJ
ajst-10992	2	45	,	,	PUNCT
ajst-10992	2	46	thinner	thin	ADJ
ajst-10992	2	47	and	and	CCONJ
ajst-10992	2	48	more	more	ADJ
ajst-10992	2	49	uniform	uniform	ADJ
ajst-10992	2	50	,	,	PUNCT
ajst-10992	2	51	the	the	DET
ajst-10992	2	52	traditional	traditional	ADJ
ajst-10992	2	53	thickness	thickness	NOUN
ajst-10992	2	54	measurement	measurement	NOUN
ajst-10992	2	55	method	method	NOUN
ajst-10992	2	56	can	can	AUX
ajst-10992	2	57	not	not	PART
ajst-10992	2	58	meet	meet	VERB
ajst-10992	2	59	the	the	DET
ajst-10992	2	60	process	process	NOUN
ajst-10992	2	61	control	control	NOUN
ajst-10992	2	62	needs	need	NOUN
ajst-10992	2	63	,	,	PUNCT
ajst-10992	2	64	this	this	DET
ajst-10992	2	65	paper	paper	NOUN
ajst-10992	2	66	develops	develop	VERB
ajst-10992	2	67	an	an	DET
ajst-10992	2	68	online	online	ADJ
ajst-10992	2	69	non	non	ADJ
ajst-10992	2	70	-	-	ADJ
ajst-10992	2	71	destructive	destructive	ADJ
ajst-10992	2	72	optical	optical	ADJ
ajst-10992	2	73	confocal	confocal	ADJ
ajst-10992	2	74	measurement	measurement	NOUN
ajst-10992	2	75	device	device	NOUN
ajst-10992	2	76	from	from	ADP
ajst-10992	2	77	the	the	DET
ajst-10992	2	78	perspective	perspective	NOUN
ajst-10992	2	79	of	of	ADP
ajst-10992	2	80	detection	detection	NOUN
ajst-10992	2	81	method	method	NOUN
ajst-10992	2	82	,	,	PUNCT
ajst-10992	2	83	probe	probe	NOUN
ajst-10992	2	84	selection	selection	NOUN
ajst-10992	2	85	,	,	PUNCT
ajst-10992	2	86	thickness	thickness	NOUN
ajst-10992	2	87	detection	detection	NOUN
ajst-10992	2	88	model	model	NOUN
ajst-10992	2	89	.	.	PUNCT
ajst-10992	3	1	it	it	PRON
ajst-10992	3	2	can	can	AUX
ajst-10992	3	3	realize	realize	VERB
ajst-10992	3	4	highprecision	highprecision	NOUN
ajst-10992	3	5	,	,	PUNCT
ajst-10992	3	6	non	non	ADJ
ajst-10992	3	7	-	-	ADJ
ajst-10992	3	8	destructive	destructive	ADJ
ajst-10992	3	9	and	and	CCONJ
ajst-10992	3	10	fast	fast	ADJ
ajst-10992	3	11	online	online	ADJ
ajst-10992	3	12	thickness	thickness	NOUN
ajst-10992	3	13	detection	detection	NOUN
ajst-10992	3	14	.	.	PUNCT
ajst-10992	4	1	it	it	PRON
ajst-10992	4	2	can	can	AUX
ajst-10992	4	3	be	be	AUX
ajst-10992	4	4	widely	widely	ADV
ajst-10992	4	5	used	use	VERB
ajst-10992	4	6	in	in	ADP
ajst-10992	4	7	plate	plate	NOUN
ajst-10992	4	8	glass	glass	NOUN
ajst-10992	4	9	thickness	thickness	NOUN
ajst-10992	4	10	detection	detection	NOUN
ajst-10992	4	11	.	.	PUNCT
ajst-10992	5	1	keywords	keyword	NOUN
ajst-10992	5	2	:	:	PUNCT
ajst-10992	5	3	ultra	ultra	ADJ
ajst-10992	5	4	-	-	ADJ
ajst-10992	5	5	thin	thin	ADJ
ajst-10992	5	6	glass	glass	NOUN
ajst-10992	5	7	,	,	PUNCT
ajst-10992	5	8	online	online	ADJ
ajst-10992	5	9	thickness	thickness	NOUN
ajst-10992	5	10	measurement	measurement	NOUN
ajst-10992	5	11	,	,	PUNCT
ajst-10992	5	12	optical	optical	ADJ
ajst-10992	5	13	confocal	confocal	ADJ
ajst-10992	5	14	thickness	thickness	NOUN
ajst-10992	5	15	measurement	measurement	NOUN
ajst-10992	5	16	.	.	PUNCT
ajst-10992	6	1	1	1	X
ajst-10992	6	2	.	.	X
ajst-10992	6	3	introduction	introduction	NOUN
ajst-10992	6	4	the	the	DET
ajst-10992	6	5	development	development	NOUN
ajst-10992	6	6	trend	trend	NOUN
ajst-10992	6	7	of	of	ADP
ajst-10992	6	8	electronic	electronic	ADJ
ajst-10992	6	9	substrate	substrate	NOUN
ajst-10992	6	10	glass	glass	NOUN
ajst-10992	6	11	is	be	AUX
ajst-10992	6	12	larger	large	ADJ
ajst-10992	6	13	and	and	CCONJ
ajst-10992	6	14	thinner	thin	ADJ
ajst-10992	6	15	,	,	PUNCT
ajst-10992	6	16	float	float	ADJ
ajst-10992	6	17	molding	molding	NOUN
ajst-10992	6	18	substrate	substrate	NOUN
ajst-10992	6	19	glass	glass	NOUN
ajst-10992	6	20	needs	need	VERB
ajst-10992	6	21	to	to	PART
ajst-10992	6	22	be	be	AUX
ajst-10992	6	23	surface	surface	NOUN
ajst-10992	6	24	grinding	grind	VERB
ajst-10992	6	25	process	process	NOUN
ajst-10992	6	26	to	to	PART
ajst-10992	6	27	remove	remove	VERB
ajst-10992	6	28	surface	surface	NOUN
ajst-10992	6	29	defects	defect	NOUN
ajst-10992	6	30	on	on	ADP
ajst-10992	6	31	glass	glass	NOUN
ajst-10992	6	32	,	,	PUNCT
ajst-10992	6	33	surface	surface	NOUN
ajst-10992	6	34	grinding	grind	VERB
ajst-10992	6	35	process	process	NOUN
ajst-10992	6	36	control	control	NOUN
ajst-10992	6	37	requires	require	VERB
ajst-10992	6	38	full	full	ADJ
ajst-10992	6	39	inspection	inspection	NOUN
ajst-10992	6	40	of	of	ADP
ajst-10992	6	41	the	the	DET
ajst-10992	6	42	thickness	thickness	NOUN
ajst-10992	6	43	and	and	CCONJ
ajst-10992	6	44	measurement	measurement	NOUN
ajst-10992	6	45	points	point	NOUN
ajst-10992	6	46	as	as	ADV
ajst-10992	6	47	much	much	ADV
ajst-10992	6	48	as	as	ADP
ajst-10992	6	49	possible	possible	ADJ
ajst-10992	6	50	,	,	PUNCT
ajst-10992	6	51	to	to	PART
ajst-10992	6	52	provide	provide	VERB
ajst-10992	6	53	data	datum	NOUN
ajst-10992	6	54	support	support	NOUN
ajst-10992	6	55	for	for	ADP
ajst-10992	6	56	process	process	NOUN
ajst-10992	6	57	adjustment	adjustment	NOUN
ajst-10992	6	58	.	.	PUNCT
ajst-10992	7	1	traditional	traditional	ADJ
ajst-10992	7	2	micrometer	micrometer	NOUN
ajst-10992	7	3	measurement	measurement	NOUN
ajst-10992	7	4	due	due	ADP
ajst-10992	7	5	to	to	ADP
ajst-10992	7	6	the	the	DET
ajst-10992	7	7	sampling	sample	VERB
ajst-10992	7	8	process	process	NOUN
ajst-10992	7	9	is	be	AUX
ajst-10992	7	10	timeconsuming	timeconsuming	ADJ
ajst-10992	7	11	and	and	CCONJ
ajst-10992	7	12	laborious	laborious	ADJ
ajst-10992	7	13	,	,	PUNCT
ajst-10992	7	14	the	the	DET
ajst-10992	7	15	detection	detection	NOUN
ajst-10992	7	16	time	time	NOUN
ajst-10992	7	17	is	be	AUX
ajst-10992	7	18	too	too	ADV
ajst-10992	7	19	long	long	ADJ
ajst-10992	7	20	,	,	PUNCT
ajst-10992	7	21	there	there	PRON
ajst-10992	7	22	is	be	VERB
ajst-10992	7	23	damage	damage	NOUN
ajst-10992	7	24	to	to	ADP
ajst-10992	7	25	the	the	DET
ajst-10992	7	26	glass	glass	NOUN
ajst-10992	7	27	,	,	PUNCT
ajst-10992	7	28	can	can	AUX
ajst-10992	7	29	not	not	PART
ajst-10992	7	30	meet	meet	VERB
ajst-10992	7	31	the	the	DET
ajst-10992	7	32	process	process	NOUN
ajst-10992	7	33	control	control	NOUN
ajst-10992	7	34	requirements	requirement	NOUN
ajst-10992	7	35	.	.	PUNCT
ajst-10992	8	1	there	there	PRON
ajst-10992	8	2	is	be	VERB
ajst-10992	8	3	an	an	DET
ajst-10992	8	4	urgent	urgent	ADJ
ajst-10992	8	5	need	need	NOUN
ajst-10992	8	6	to	to	PART
ajst-10992	8	7	develop	develop	VERB
ajst-10992	8	8	a	a	DET
ajst-10992	8	9	fast	fast	ADJ
ajst-10992	8	10	,	,	PUNCT
ajst-10992	8	11	nondestructive	nondestructive	ADJ
ajst-10992	8	12	,	,	PUNCT
ajst-10992	8	13	high	high	ADJ
ajst-10992	8	14	-	-	PUNCT
ajst-10992	8	15	precision	precision	NOUN
ajst-10992	8	16	thickness	thickness	NOUN
ajst-10992	8	17	measurement	measurement	NOUN
ajst-10992	8	18	method	method	NOUN
ajst-10992	8	19	.	.	PUNCT
ajst-10992	9	1	2	2	X
ajst-10992	9	2	.	.	X
ajst-10992	9	3	selection	selection	NOUN
ajst-10992	9	4	of	of	ADP
ajst-10992	9	5	inspection	inspection	NOUN
ajst-10992	9	6	methods	method	NOUN
ajst-10992	9	7	currently	currently	ADV
ajst-10992	9	8	there	there	PRON
ajst-10992	9	9	are	be	VERB
ajst-10992	9	10	two	two	NUM
ajst-10992	9	11	common	common	ADJ
ajst-10992	9	12	inspection	inspection	NOUN
ajst-10992	9	13	methods	method	NOUN
ajst-10992	9	14	,	,	PUNCT
ajst-10992	9	15	offline	offline	ADJ
ajst-10992	9	16	sampling	sample	VERB
ajst-10992	9	17	measurement	measurement	NOUN
ajst-10992	9	18	and	and	CCONJ
ajst-10992	9	19	online	online	ADJ
ajst-10992	9	20	full	full	ADJ
ajst-10992	9	21	inspection	inspection	NOUN
ajst-10992	9	22	measurement	measurement	NOUN
ajst-10992	9	23	.	.	PUNCT
ajst-10992	10	1	offline	offline	ADJ
ajst-10992	10	2	sampling	sample	VERB
ajst-10992	10	3	measurement	measurement	NOUN
ajst-10992	10	4	uses	use	VERB
ajst-10992	10	5	a	a	DET
ajst-10992	10	6	sampling	sample	VERB
ajst-10992	10	7	tool	tool	NOUN
ajst-10992	10	8	to	to	PART
ajst-10992	10	9	remove	remove	VERB
ajst-10992	10	10	the	the	DET
ajst-10992	10	11	glass	glass	NOUN
ajst-10992	10	12	sample	sample	NOUN
ajst-10992	10	13	from	from	ADP
ajst-10992	10	14	the	the	DET
ajst-10992	10	15	production	production	NOUN
ajst-10992	10	16	line	line	NOUN
ajst-10992	10	17	,	,	PUNCT
ajst-10992	10	18	and	and	CCONJ
ajst-10992	10	19	then	then	ADV
ajst-10992	10	20	cuts	cut	VERB
ajst-10992	10	21	it	it	PRON
ajst-10992	10	22	into	into	ADP
ajst-10992	10	23	glass	glass	NOUN
ajst-10992	10	24	strips	strip	NOUN
ajst-10992	10	25	to	to	PART
ajst-10992	10	26	measure	measure	VERB
ajst-10992	10	27	the	the	DET
ajst-10992	10	28	thickness	thickness	NOUN
ajst-10992	10	29	,	,	PUNCT
ajst-10992	10	30	or	or	CCONJ
ajst-10992	10	31	uses	use	VERB
ajst-10992	10	32	cmm	cmm	NOUN
ajst-10992	10	33	to	to	PART
ajst-10992	10	34	measure	measure	VERB
ajst-10992	10	35	the	the	DET
ajst-10992	10	36	thickness	thickness	NOUN
ajst-10992	10	37	of	of	ADP
ajst-10992	10	38	the	the	DET
ajst-10992	10	39	glass	glass	NOUN
ajst-10992	10	40	substrate	substrate	NOUN
ajst-10992	10	41	.	.	PUNCT
ajst-10992	11	1	online	online	ADJ
ajst-10992	11	2	full	full	ADJ
ajst-10992	11	3	inspection	inspection	NOUN
ajst-10992	11	4	measures	measure	NOUN
ajst-10992	11	5	the	the	DET
ajst-10992	11	6	thickness	thickness	NOUN
ajst-10992	11	7	of	of	ADP
ajst-10992	11	8	the	the	DET
ajst-10992	11	9	glass	glass	NOUN
ajst-10992	11	10	substrate	substrate	NOUN
ajst-10992	11	11	in	in	ADP
ajst-10992	11	12	the	the	DET
ajst-10992	11	13	glass	glass	NOUN
ajst-10992	11	14	manufacturing	manufacturing	NOUN
ajst-10992	11	15	line	line	NOUN
ajst-10992	11	16	or	or	CCONJ
ajst-10992	11	17	processing	processing	NOUN
ajst-10992	11	18	line	line	NOUN
ajst-10992	11	19	needs	need	VERB
ajst-10992	11	20	to	to	PART
ajst-10992	11	21	control	control	VERB
ajst-10992	11	22	the	the	DET
ajst-10992	11	23	glass	glass	NOUN
ajst-10992	11	24	thickness	thickness	NOUN
ajst-10992	11	25	of	of	ADP
ajst-10992	11	26	the	the	DET
ajst-10992	11	27	station	station	NOUN
ajst-10992	11	28	installed	instal	VERB
ajst-10992	11	29	online	online	ADJ
ajst-10992	11	30	thickness	thickness	NOUN
ajst-10992	11	31	inspection	inspection	NOUN
ajst-10992	11	32	machine	machine	NOUN
ajst-10992	11	33	,	,	PUNCT
ajst-10992	11	34	inspection	inspection	NOUN
ajst-10992	11	35	machine	machine	NOUN
ajst-10992	11	36	probe	probe	NOUN
ajst-10992	11	37	number	number	NOUN
ajst-10992	11	38	according	accord	VERB
ajst-10992	11	39	to	to	ADP
ajst-10992	11	40	the	the	DET
ajst-10992	11	41	process	process	NOUN
ajst-10992	11	42	demand	demand	NOUN
ajst-10992	11	43	configuration	configuration	NOUN
ajst-10992	11	44	,	,	PUNCT
ajst-10992	11	45	online	online	ADJ
ajst-10992	11	46	real	real	ADJ
ajst-10992	11	47	-	-	PUNCT
ajst-10992	11	48	time	time	NOUN
ajst-10992	11	49	inspection	inspection	NOUN
ajst-10992	11	50	of	of	ADP
ajst-10992	11	51	the	the	DET
ajst-10992	11	52	thickness	thickness	NOUN
ajst-10992	11	53	of	of	ADP
ajst-10992	11	54	the	the	DET
ajst-10992	11	55	glass	glass	NOUN
ajst-10992	11	56	substrate	substrate	NOUN
ajst-10992	11	57	of	of	ADP
ajst-10992	11	58	multiple	multiple	ADJ
ajst-10992	11	59	lines	line	NOUN
ajst-10992	11	60	.	.	PUNCT
ajst-10992	12	1	the	the	DET
ajst-10992	12	2	advantages	advantage	NOUN
ajst-10992	12	3	and	and	CCONJ
ajst-10992	12	4	disadvantages	disadvantage	NOUN
ajst-10992	12	5	of	of	ADP
ajst-10992	12	6	the	the	DET
ajst-10992	12	7	above	above	ADJ
ajst-10992	12	8	two	two	NUM
ajst-10992	12	9	inspection	inspection	NOUN
ajst-10992	12	10	methods	method	NOUN
ajst-10992	12	11	are	be	AUX
ajst-10992	12	12	compared	compare	VERB
ajst-10992	12	13	in	in	ADP
ajst-10992	12	14	table	table	NOUN
ajst-10992	12	15	1	1	NUM
ajst-10992	12	16	.	.	PUNCT
ajst-10992	12	17	table	table	NOUN
ajst-10992	12	18	1	1	NUM
ajst-10992	12	19	.	.	PUNCT
ajst-10992	12	20	comparison	comparison	NOUN
ajst-10992	12	21	of	of	ADP
ajst-10992	12	22	the	the	DET
ajst-10992	12	23	advantages	advantage	NOUN
ajst-10992	12	24	and	and	CCONJ
ajst-10992	12	25	disadvantages	disadvantage	NOUN
ajst-10992	12	26	of	of	ADP
ajst-10992	12	27	the	the	DET
ajst-10992	12	28	two	two	NUM
ajst-10992	12	29	inspection	inspection	NOUN
ajst-10992	12	30	methods	method	NOUN
ajst-10992	12	31	comparison	comparison	NOUN
ajst-10992	12	32	program	program	NOUN
ajst-10992	12	33	offline	offline	ADJ
ajst-10992	12	34	sample	sample	PROPN
ajst-10992	12	35	measurement	measurement	NOUN
ajst-10992	12	36	online	online	PROPN
ajst-10992	12	37	full	full	ADJ
ajst-10992	12	38	detection	detection	NOUN
ajst-10992	12	39	volume	volume	NOUN
ajst-10992	12	40	detection	detection	NOUN
ajst-10992	12	41	efficiency	efficiency	NOUN
ajst-10992	12	42	time	time	NOUN
ajst-10992	12	43	-	-	PUNCT
ajst-10992	12	44	consuming	consume	VERB
ajst-10992	12	45	and	and	CCONJ
ajst-10992	12	46	inefficient	inefficient	ADJ
ajst-10992	12	47	real	real	ADJ
ajst-10992	12	48	-	-	PUNCT
ajst-10992	12	49	time	time	NOUN
ajst-10992	12	50	measurement	measurement	NOUN
ajst-10992	12	51	,	,	PUNCT
ajst-10992	12	52	fast	fast	ADJ
ajst-10992	12	53	and	and	CCONJ
ajst-10992	12	54	efficient	efficient	ADJ
ajst-10992	12	55	sample	sample	NOUN
ajst-10992	12	56	integrity	integrity	NOUN
ajst-10992	12	57	destructive	destructive	ADJ
ajst-10992	12	58	measurements	measurement	NOUN
ajst-10992	12	59	non	non	ADJ
ajst-10992	12	60	-	-	ADJ
ajst-10992	12	61	destructive	destructive	ADJ
ajst-10992	12	62	measurement	measurement	NOUN
ajst-10992	12	63	measurement	measurement	NOUN
ajst-10992	12	64	point	point	VERB
ajst-10992	12	65	fewer	few	ADJ
ajst-10992	12	66	measurement	measurement	NOUN
ajst-10992	12	67	points	point	NOUN
ajst-10992	12	68	setting	set	VERB
ajst-10992	12	69	points	point	NOUN
ajst-10992	12	70	according	accord	VERB
ajst-10992	12	71	to	to	ADP
ajst-10992	12	72	process	process	NOUN
ajst-10992	12	73	requirements	requirement	NOUN
ajst-10992	12	74	from	from	ADP
ajst-10992	12	75	the	the	DET
ajst-10992	12	76	above	above	ADJ
ajst-10992	12	77	comparison	comparison	NOUN
ajst-10992	12	78	,	,	PUNCT
ajst-10992	12	79	it	it	PRON
ajst-10992	12	80	can	can	AUX
ajst-10992	12	81	be	be	AUX
ajst-10992	12	82	seen	see	VERB
ajst-10992	12	83	that	that	SCONJ
ajst-10992	12	84	the	the	DET
ajst-10992	12	85	online	online	ADJ
ajst-10992	12	86	full	full	ADJ
ajst-10992	12	87	detection	detection	NOUN
ajst-10992	12	88	volume	volume	NOUN
ajst-10992	12	89	compared	compare	VERB
ajst-10992	12	90	to	to	ADP
ajst-10992	12	91	offline	offline	ADJ
ajst-10992	12	92	sampling	sample	VERB
ajst-10992	12	93	measurement	measurement	NOUN
ajst-10992	12	94	has	have	VERB
ajst-10992	12	95	the	the	DET
ajst-10992	12	96	advantages	advantage	NOUN
ajst-10992	12	97	of	of	ADP
ajst-10992	12	98	high	high	ADJ
ajst-10992	12	99	detection	detection	NOUN
ajst-10992	12	100	efficiency	efficiency	NOUN
ajst-10992	12	101	,	,	PUNCT
ajst-10992	12	102	online	online	ADJ
ajst-10992	12	103	non	non	ADJ
ajst-10992	12	104	-	-	ADJ
ajst-10992	12	105	destructive	destructive	ADJ
ajst-10992	12	106	measurement	measurement	NOUN
ajst-10992	12	107	,	,	PUNCT
ajst-10992	12	108	measurement	measurement	NOUN
ajst-10992	12	109	of	of	ADP
ajst-10992	12	110	more	more	ADJ
ajst-10992	12	111	points	point	NOUN
ajst-10992	12	112	,	,	PUNCT
ajst-10992	12	113	the	the	DET
ajst-10992	12	114	quality	quality	NOUN
ajst-10992	12	115	control	control	NOUN
ajst-10992	12	116	principle	principle	NOUN
ajst-10992	12	117	of	of	ADP
ajst-10992	12	118	online	online	NOUN
ajst-10992	12	119	is	be	AUX
ajst-10992	12	120	better	well	ADJ
ajst-10992	12	121	than	than	ADP
ajst-10992	12	122	offline	offline	ADJ
ajst-10992	12	123	,	,	PUNCT
ajst-10992	12	124	in	in	ADP
ajst-10992	12	125	the	the	DET
ajst-10992	12	126	conditions	condition	NOUN
ajst-10992	12	127	allow	allow	VERB
ajst-10992	12	128	the	the	DET
ajst-10992	12	129	priority	priority	NOUN
ajst-10992	12	130	to	to	PART
ajst-10992	12	131	use	use	VERB
ajst-10992	12	132	the	the	DET
ajst-10992	12	133	online	online	ADJ
ajst-10992	12	134	full	full	ADJ
ajst-10992	12	135	detection	detection	NOUN
ajst-10992	12	136	volume	volume	NOUN
ajst-10992	12	137	.	.	PUNCT
ajst-10992	13	1	3	3	X
ajst-10992	13	2	.	.	X
ajst-10992	13	3	thickness	thickness	NOUN
ajst-10992	13	4	measurement	measurement	NOUN
ajst-10992	13	5	method	method	NOUN
ajst-10992	13	6	and	and	CCONJ
ajst-10992	13	7	parameter	parameter	NOUN
ajst-10992	13	8	design	design	NOUN
ajst-10992	13	9	at	at	ADP
ajst-10992	13	10	present	present	ADJ
ajst-10992	13	11	,	,	PUNCT
ajst-10992	13	12	there	there	PRON
ajst-10992	13	13	are	be	VERB
ajst-10992	13	14	five	five	NUM
ajst-10992	13	15	types	type	NOUN
ajst-10992	13	16	of	of	ADP
ajst-10992	13	17	optional	optional	ADJ
ajst-10992	13	18	thickness	thickness	NOUN
ajst-10992	13	19	measurement	measurement	NOUN
ajst-10992	13	20	,	,	PUNCT
ajst-10992	13	21	of	of	ADP
ajst-10992	13	22	which	which	PRON
ajst-10992	13	23	three	three	NUM
ajst-10992	13	24	types	type	NOUN
ajst-10992	13	25	of	of	ADP
ajst-10992	13	26	contact	contact	NOUN
ajst-10992	13	27	measurement	measurement	NOUN
ajst-10992	13	28	are	be	AUX
ajst-10992	13	29	micrometer	micrometer	NOUN
ajst-10992	13	30	thickness	thickness	NOUN
ajst-10992	13	31	measurement	measurement	NOUN
ajst-10992	13	32	,	,	PUNCT
ajst-10992	13	33	ultrasonic	ultrasonic	ADJ
ajst-10992	13	34	echo	echo	NOUN
ajst-10992	13	35	thickness	thickness	NOUN
ajst-10992	13	36	measurement	measurement	NOUN
ajst-10992	13	37	and	and	CCONJ
ajst-10992	13	38	infrared	infrared	ADJ
ajst-10992	13	39	absorption	absorption	NOUN
ajst-10992	13	40	thickness	thickness	NOUN
ajst-10992	13	41	measurement	measurement	NOUN
ajst-10992	13	42	.	.	PUNCT
ajst-10992	14	1	non	non	ADJ
ajst-10992	14	2	-	-	ADJ
ajst-10992	14	3	contact	contact	ADJ
ajst-10992	14	4	measurement	measurement	NOUN
ajst-10992	14	5	of	of	ADP
ajst-10992	14	6	two	two	NUM
ajst-10992	14	7	kinds	kind	NOUN
ajst-10992	14	8	of	of	ADP
ajst-10992	14	9	optical	optical	ADJ
ajst-10992	14	10	triangulation	triangulation	NOUN
ajst-10992	14	11	method	method	NOUN
ajst-10992	14	12	,	,	PUNCT
ajst-10992	14	13	optical	optical	ADJ
ajst-10992	14	14	confocal	confocal	ADJ
ajst-10992	14	15	thickness	thickness	NOUN
ajst-10992	14	16	measurement	measurement	NOUN
ajst-10992	14	17	method	method	NOUN
ajst-10992	14	18	,	,	PUNCT
ajst-10992	14	19	the	the	DET
ajst-10992	14	20	following	follow	VERB
ajst-10992	14	21	classification	classification	NOUN
ajst-10992	14	22	is	be	AUX
ajst-10992	14	23	described	describe	VERB
ajst-10992	14	24	;	;	PUNCT
ajst-10992	14	25	the	the	DET
ajst-10992	14	26	first	first	ADJ
ajst-10992	14	27	type	type	NOUN
ajst-10992	14	28	of	of	ADP
ajst-10992	14	29	contact	contact	NOUN
ajst-10992	14	30	measurement	measurement	NOUN
ajst-10992	14	31	is	be	AUX
ajst-10992	14	32	micrometer	micrometer	NOUN
ajst-10992	14	33	thickness	thickness	NOUN
ajst-10992	14	34	measurement	measurement	NOUN
ajst-10992	14	35	method	method	NOUN
ajst-10992	14	36	.	.	PUNCT
ajst-10992	15	1	the	the	DET
ajst-10992	15	2	traditional	traditional	ADJ
ajst-10992	15	3	measurement	measurement	NOUN
ajst-10992	15	4	method	method	NOUN
ajst-10992	15	5	,	,	PUNCT
ajst-10992	15	6	but	but	CCONJ
ajst-10992	15	7	also	also	ADV
ajst-10992	15	8	the	the	DET
ajst-10992	15	9	most	most	ADV
ajst-10992	15	10	mature	mature	ADJ
ajst-10992	15	11	measurement	measurement	NOUN
ajst-10992	15	12	method	method	NOUN
ajst-10992	15	13	,	,	PUNCT
ajst-10992	15	14	the	the	DET
ajst-10992	15	15	use	use	NOUN
ajst-10992	15	16	of	of	ADP
ajst-10992	15	17	micrometer	micrometer	NOUN
ajst-10992	15	18	clamping	clamp	VERB
ajst-10992	15	19	to	to	PART
ajst-10992	15	20	be	be	AUX
ajst-10992	15	21	measured	measure	VERB
ajst-10992	15	22	between	between	ADP
ajst-10992	15	23	the	the	DET
ajst-10992	15	24	two	two	NUM
ajst-10992	15	25	end	end	NOUN
ajst-10992	15	26	faces	face	NOUN
ajst-10992	15	27	of	of	ADP
ajst-10992	15	28	the	the	DET
ajst-10992	15	29	glass	glass	NOUN
ajst-10992	15	30	substrate	substrate	NOUN
ajst-10992	15	31	to	to	PART
ajst-10992	15	32	be	be	AUX
ajst-10992	15	33	measured	measure	VERB
ajst-10992	15	34	,	,	PUNCT
ajst-10992	15	35	the	the	DET
ajst-10992	15	36	use	use	NOUN
ajst-10992	15	37	of	of	ADP
ajst-10992	15	38	sensors	sensor	NOUN
ajst-10992	15	39	,	,	PUNCT
ajst-10992	15	40	electronic	electronic	ADJ
ajst-10992	15	41	and	and	CCONJ
ajst-10992	15	42	digital	digital	ADJ
ajst-10992	15	43	display	display	NOUN
ajst-10992	15	44	technology	technology	NOUN
ajst-10992	15	45	,	,	PUNCT
ajst-10992	15	46	calculating	calculate	VERB
ajst-10992	15	47	and	and	CCONJ
ajst-10992	15	48	displaying	display	VERB
ajst-10992	15	49	electronic	electronic	ADJ
ajst-10992	15	50	digital	digital	ADJ
ajst-10992	15	51	micrometer	micrometer	NOUN
ajst-10992	15	52	micrometer	micrometer	NOUN
ajst-10992	15	53	micrometer	micrometer	NOUN
ajst-10992	15	54	screw	screw	VERB
ajst-10992	15	55	displacement	displacement	NOUN
ajst-10992	15	56	,	,	PUNCT
ajst-10992	15	57	so	so	SCONJ
ajst-10992	15	58	as	as	SCONJ
ajst-10992	15	59	to	to	PART
ajst-10992	15	60	derive	derive	VERB
ajst-10992	15	61	the	the	DET
ajst-10992	15	62	thickness	thickness	NOUN
ajst-10992	15	63	of	of	ADP
ajst-10992	15	64	the	the	DET
ajst-10992	15	65	glass	glass	NOUN
ajst-10992	15	66	substrate	substrate	NOUN
ajst-10992	15	67	clamped	clamp	VERB
ajst-10992	15	68	by	by	ADP
ajst-10992	15	69	the	the	DET
ajst-10992	15	70	micrometer	micrometer	NOUN
ajst-10992	15	71	.	.	PUNCT
ajst-10992	16	1	micrometers	micrometer	NOUN
ajst-10992	16	2	can	can	AUX
ajst-10992	16	3	measure	measure	VERB
ajst-10992	16	4	with	with	ADP
ajst-10992	16	5	an	an	DET
ajst-10992	16	6	accuracy	accuracy	NOUN
ajst-10992	16	7	of	of	ADP
ajst-10992	16	8	0.001	0.001	NUM
ajst-10992	16	9	mm	mm	NOUN
ajst-10992	16	10	,	,	PUNCT
ajst-10992	16	11	and	and	CCONJ
ajst-10992	16	12	ten	ten	NUM
ajst-10992	16	13	thousandths	thousandth	NOUN
ajst-10992	16	14	of	of	ADP
ajst-10992	16	15	a	a	DET
ajst-10992	16	16	millimeter	millimeter	NOUN
ajst-10992	16	17	can	can	AUX
ajst-10992	16	18	measure	measure	VERB
ajst-10992	16	19	with	with	ADP
ajst-10992	16	20	an	an	DET
ajst-10992	16	21	accuracy	accuracy	NOUN
ajst-10992	16	22	of	of	ADP
ajst-10992	16	23	0.0001mm[1	0.0001mm[1	PROPN
ajst-10992	16	24	]	]	X
ajst-10992	16	25	the	the	DET
ajst-10992	16	26	second	second	ADJ
ajst-10992	16	27	type	type	NOUN
ajst-10992	16	28	of	of	ADP
ajst-10992	16	29	ultrasonic	ultrasonic	ADJ
ajst-10992	16	30	echo	echo	NOUN
ajst-10992	16	31	thickness	thickness	NOUN
ajst-10992	16	32	measurement	measurement	NOUN
ajst-10992	16	33	for	for	ADP
ajst-10992	16	34	contact	contact	NOUN
ajst-10992	16	35	measurements	measurement	NOUN
ajst-10992	16	36	.	.	PUNCT
ajst-10992	17	1	new	new	ADJ
ajst-10992	17	2	ultrasonic	ultrasonic	ADJ
ajst-10992	17	3	thickness	thickness	NOUN
ajst-10992	17	4	measurement	measurement	NOUN
ajst-10992	17	5	method	method	NOUN
ajst-10992	17	6	,	,	PUNCT
ajst-10992	17	7	thickness	thickness	NOUN
ajst-10992	17	8	measurement	measurement	NOUN
ajst-10992	17	9	principle	principle	NOUN
ajst-10992	17	10	shown	show	VERB
ajst-10992	17	11	in	in	ADP
ajst-10992	17	12	figure	figure	NOUN
ajst-10992	17	13	1	1	NUM
ajst-10992	17	14	.	.	PUNCT
ajst-10992	18	1	currently	currently	ADV
ajst-10992	18	2	higher	high	ADJ
ajst-10992	18	3	precision	precision	NOUN
ajst-10992	18	4	thickness	thickness	NOUN
ajst-10992	18	5	measurement	measurement	NOUN
ajst-10992	18	6	method	method	NOUN
ajst-10992	18	7	,	,	PUNCT
ajst-10992	18	8	the	the	DET
ajst-10992	18	9	use	use	NOUN
ajst-10992	18	10	of	of	ADP
ajst-10992	18	11	specific	specific	ADJ
ajst-10992	18	12	wavelength	wavelength	NOUN
ajst-10992	18	13	ultrasound	ultrasound	NOUN
ajst-10992	18	14	in	in	ADP
ajst-10992	18	15	the	the	DET
ajst-10992	18	16	glass	glass	NOUN
ajst-10992	18	17	substrate	substrate	NOUN
ajst-10992	18	18	transmission	transmission	NOUN
ajst-10992	18	19	speed	speed	NOUN
ajst-10992	18	20	constant	constant	ADJ
ajst-10992	18	21	principle	principle	NOUN
ajst-10992	18	22	of	of	ADP
ajst-10992	18	23	measuring	measure	VERB
ajst-10992	18	24	the	the	DET
ajst-10992	18	25	thickness	thickness	NOUN
ajst-10992	18	26	of	of	ADP
ajst-10992	18	27	the	the	DET
ajst-10992	18	28	glass	glass	NOUN
ajst-10992	18	29	substrate	substrate	NOUN
ajst-10992	18	30	.	.	PUNCT
ajst-10992	19	1	ultrasonic	ultrasonic	ADJ
ajst-10992	19	2	probe	probe	NOUN
ajst-10992	19	3	contact	contact	NOUN
ajst-10992	19	4	with	with	ADP
ajst-10992	19	5	the	the	DET
ajst-10992	19	6	upper	upper	ADJ
ajst-10992	19	7	surface	surface	NOUN
ajst-10992	19	8	of	of	ADP
ajst-10992	19	9	the	the	DET
ajst-10992	19	10	glass	glass	NOUN
ajst-10992	19	11	to	to	ADP
ajst-10992	19	12	the	the	DET
ajst-10992	19	13	glass	glass	NOUN
ajst-10992	19	14	body	body	NOUN
ajst-10992	19	15	transmits	transmit	VERB
ajst-10992	19	16	ultrasonic	ultrasonic	ADJ
ajst-10992	19	17	signals	signal	NOUN
ajst-10992	19	18	,	,	PUNCT
ajst-10992	19	19	receive	receive	VERB
ajst-10992	19	20	the	the	DET
ajst-10992	19	21	echo	echo	NOUN
ajst-10992	19	22	signals	signal	NOUN
ajst-10992	19	23	from	from	ADP
ajst-10992	19	24	the	the	DET
ajst-10992	19	25	upper	upper	ADJ
ajst-10992	19	26	and	and	CCONJ
ajst-10992	19	27	lower	low	ADJ
ajst-10992	19	28	glass	glass	NOUN
ajst-10992	19	29	ends	end	VERB
ajst-10992	19	30	,	,	PUNCT
ajst-10992	19	31	measure	measure	VERB
ajst-10992	19	32	the	the	DET
ajst-10992	19	33	time	time	NOUN
ajst-10992	19	34	difference	difference	NOUN
ajst-10992	19	35	between	between	ADP
ajst-10992	19	36	the	the	DET
ajst-10992	19	37	echo	echo	NOUN
ajst-10992	19	38	signals	signal	NOUN
ajst-10992	19	39	of	of	ADP
ajst-10992	19	40	the	the	DET
ajst-10992	19	41	two	two	NUM
ajst-10992	19	42	ends	end	NOUN
ajst-10992	19	43	,	,	PUNCT
ajst-10992	19	44	the	the	DET
ajst-10992	19	45	time	time	NOUN
ajst-10992	19	46	71	71	NUM
ajst-10992	19	47	difference	difference	NOUN
ajst-10992	19	48	is	be	AUX
ajst-10992	19	49	multiplied	multiply	VERB
ajst-10992	19	50	by	by	ADP
ajst-10992	19	51	the	the	DET
ajst-10992	19	52	ultrasonic	ultrasonic	ADJ
ajst-10992	19	53	transmission	transmission	NOUN
ajst-10992	19	54	speed	speed	NOUN
ajst-10992	19	55	in	in	ADP
ajst-10992	19	56	the	the	DET
ajst-10992	19	57	glass	glass	NOUN
ajst-10992	19	58	to	to	PART
ajst-10992	19	59	calculate	calculate	VERB
ajst-10992	19	60	the	the	DET
ajst-10992	19	61	thickness	thickness	NOUN
ajst-10992	19	62	of	of	ADP
ajst-10992	19	63	the	the	DET
ajst-10992	19	64	glass	glass	NOUN
ajst-10992	19	65	substrate	substrate	NOUN
ajst-10992	19	66	,	,	PUNCT
ajst-10992	19	67	high	high	ADJ
ajst-10992	19	68	-	-	PUNCT
ajst-10992	19	69	precision	precision	NOUN
ajst-10992	19	70	ultrasonic	ultrasonic	ADJ
ajst-10992	19	71	measurement	measurement	NOUN
ajst-10992	19	72	mode	mode	NOUN
ajst-10992	19	73	can	can	AUX
ajst-10992	19	74	be	be	AUX
ajst-10992	19	75	up	up	ADP
ajst-10992	19	76	to	to	ADP
ajst-10992	19	77	0.001mm.[2	0.001mm.[2	NOUN
ajst-10992	19	78	]	]	PUNCT
ajst-10992	19	79	figure	figure	NOUN
ajst-10992	19	80	1	1	NUM
ajst-10992	19	81	.	.	PUNCT
ajst-10992	19	82	principle	principle	ADJ
ajst-10992	19	83	diagram	diagram	NOUN
ajst-10992	19	84	of	of	ADP
ajst-10992	19	85	ultrasonic	ultrasonic	ADJ
ajst-10992	19	86	echo	echo	NOUN
ajst-10992	19	87	thickness	thickness	NOUN
ajst-10992	19	88	measurement	measurement	NOUN
ajst-10992	19	89	method	method	VERB
ajst-10992	19	90	the	the	DET
ajst-10992	19	91	third	third	ADJ
ajst-10992	19	92	category	category	NOUN
ajst-10992	19	93	of	of	ADP
ajst-10992	19	94	contact	contact	NOUN
ajst-10992	19	95	measurement	measurement	NOUN
ajst-10992	19	96	is	be	AUX
ajst-10992	19	97	infrared	infrare	VERB
ajst-10992	19	98	absorption	absorption	NOUN
ajst-10992	19	99	thickness	thickness	NOUN
ajst-10992	19	100	measurement	measurement	NOUN
ajst-10992	19	101	,	,	PUNCT
ajst-10992	19	102	the	the	DET
ajst-10992	19	103	principle	principle	NOUN
ajst-10992	19	104	of	of	ADP
ajst-10992	19	105	thickness	thickness	NOUN
ajst-10992	19	106	measurement	measurement	NOUN
ajst-10992	19	107	is	be	AUX
ajst-10992	19	108	shown	show	VERB
ajst-10992	19	109	in	in	ADP
ajst-10992	19	110	figure	figure	NOUN
ajst-10992	19	111	2	2	NUM
ajst-10992	19	112	.	.	PUNCT
ajst-10992	20	1	currently	currently	ADV
ajst-10992	20	2	higher	high	ADJ
ajst-10992	20	3	precision	precision	NOUN
ajst-10992	20	4	thickness	thickness	NOUN
ajst-10992	20	5	measurement	measurement	NOUN
ajst-10992	20	6	method	method	NOUN
ajst-10992	20	7	,	,	PUNCT
ajst-10992	20	8	the	the	DET
ajst-10992	20	9	use	use	NOUN
ajst-10992	20	10	of	of	ADP
ajst-10992	20	11	specific	specific	ADJ
ajst-10992	20	12	infrared	infrared	ADJ
ajst-10992	20	13	wavelengths	wavelength	NOUN
ajst-10992	20	14	in	in	ADP
ajst-10992	20	15	the	the	DET
ajst-10992	20	16	glass	glass	NOUN
ajst-10992	20	17	substrate	substrate	NOUN
ajst-10992	20	18	absorption	absorption	NOUN
ajst-10992	20	19	rate	rate	NOUN
ajst-10992	20	20	constant	constant	ADJ
ajst-10992	20	21	principle	principle	NOUN
ajst-10992	20	22	of	of	ADP
ajst-10992	20	23	measuring	measure	VERB
ajst-10992	20	24	the	the	DET
ajst-10992	20	25	thickness	thickness	NOUN
ajst-10992	20	26	of	of	ADP
ajst-10992	20	27	the	the	DET
ajst-10992	20	28	glass	glass	NOUN
ajst-10992	20	29	substrate	substrate	NOUN
ajst-10992	20	30	.	.	PUNCT
ajst-10992	21	1	infrared	infrared	ADJ
ajst-10992	21	2	probe	probe	NOUN
ajst-10992	21	3	contact	contact	NOUN
ajst-10992	21	4	with	with	ADP
ajst-10992	21	5	the	the	DET
ajst-10992	21	6	upper	upper	ADJ
ajst-10992	21	7	surface	surface	NOUN
ajst-10992	21	8	of	of	ADP
ajst-10992	21	9	the	the	DET
ajst-10992	21	10	glass	glass	NOUN
ajst-10992	21	11	to	to	ADP
ajst-10992	21	12	the	the	DET
ajst-10992	21	13	glass	glass	NOUN
ajst-10992	21	14	to	to	PART
ajst-10992	21	15	send	send	VERB
ajst-10992	21	16	a	a	DET
ajst-10992	21	17	specific	specific	ADJ
ajst-10992	21	18	frequency	frequency	NOUN
ajst-10992	21	19	constant	constant	ADJ
ajst-10992	21	20	power	power	NOUN
ajst-10992	21	21	infrared	infrared	PROPN
ajst-10992	21	22	signal	signal	NOUN
ajst-10992	21	23	,	,	PUNCT
ajst-10992	21	24	in	in	ADP
ajst-10992	21	25	the	the	DET
ajst-10992	21	26	glass	glass	NOUN
ajst-10992	21	27	on	on	ADP
ajst-10992	21	28	the	the	DET
ajst-10992	21	29	lower	low	ADJ
ajst-10992	21	30	surface	surface	NOUN
ajst-10992	21	31	to	to	PART
ajst-10992	21	32	receive	receive	VERB
ajst-10992	21	33	infrared	infrared	ADJ
ajst-10992	21	34	signals	signal	NOUN
ajst-10992	21	35	,	,	PUNCT
ajst-10992	21	36	measurement	measurement	NOUN
ajst-10992	21	37	of	of	ADP
ajst-10992	21	38	the	the	DET
ajst-10992	21	39	difference	difference	NOUN
ajst-10992	21	40	between	between	ADP
ajst-10992	21	41	the	the	DET
ajst-10992	21	42	signal	signal	NOUN
ajst-10992	21	43	and	and	CCONJ
ajst-10992	21	44	the	the	DET
ajst-10992	21	45	power	power	NOUN
ajst-10992	21	46	of	of	ADP
ajst-10992	21	47	the	the	DET
ajst-10992	21	48	received	receive	VERB
ajst-10992	21	49	signal	signal	NOUN
ajst-10992	21	50	,	,	PUNCT
ajst-10992	21	51	divided	divide	VERB
ajst-10992	21	52	by	by	ADP
ajst-10992	21	53	the	the	DET
ajst-10992	21	54	absorption	absorption	NOUN
ajst-10992	21	55	rate	rate	NOUN
ajst-10992	21	56	of	of	ADP
ajst-10992	21	57	the	the	DET
ajst-10992	21	58	glass	glass	NOUN
ajst-10992	21	59	substrate	substrate	NOUN
ajst-10992	21	60	to	to	PART
ajst-10992	21	61	calculate	calculate	VERB
ajst-10992	21	62	the	the	DET
ajst-10992	21	63	thickness	thickness	NOUN
ajst-10992	21	64	of	of	ADP
ajst-10992	21	65	the	the	DET
ajst-10992	21	66	glass	glass	NOUN
ajst-10992	21	67	substrate	substrate	NOUN
ajst-10992	21	68	.	.	PUNCT
ajst-10992	22	1	the	the	DET
ajst-10992	22	2	accuracy	accuracy	NOUN
ajst-10992	22	3	is	be	AUX
ajst-10992	22	4	up	up	ADP
ajst-10992	22	5	to	to	PART
ajst-10992	22	6	0.01	0.01	NUM
ajst-10992	22	7	mm.[3	mm.[3	PROPN
ajst-10992	22	8	]	]	PUNCT
ajst-10992	22	9	figure	figure	NOUN
ajst-10992	22	10	2	2	NUM
ajst-10992	22	11	.	.	PUNCT
ajst-10992	22	12	principle	principle	ADJ
ajst-10992	22	13	diagram	diagram	NOUN
ajst-10992	22	14	of	of	ADP
ajst-10992	22	15	infrared	infrared	ADJ
ajst-10992	22	16	absorption	absorption	NOUN
ajst-10992	22	17	thickness	thickness	NOUN
ajst-10992	22	18	measurement	measurement	NOUN
ajst-10992	22	19	method	method	PROPN
ajst-10992	22	20	non	non	ADJ
ajst-10992	22	21	-	-	ADJ
ajst-10992	22	22	contact	contact	ADJ
ajst-10992	22	23	measurement	measurement	NOUN
ajst-10992	22	24	of	of	ADP
ajst-10992	22	25	the	the	DET
ajst-10992	22	26	first	first	ADJ
ajst-10992	22	27	category	category	NOUN
ajst-10992	22	28	for	for	ADP
ajst-10992	22	29	the	the	DET
ajst-10992	22	30	laser	laser	NOUN
ajst-10992	22	31	triangulation	triangulation	NOUN
ajst-10992	22	32	method	method	NOUN
ajst-10992	22	33	,	,	PUNCT
ajst-10992	22	34	the	the	DET
ajst-10992	22	35	principle	principle	NOUN
ajst-10992	22	36	of	of	ADP
ajst-10992	22	37	measurement	measurement	NOUN
ajst-10992	22	38	with	with	ADP
ajst-10992	22	39	a	a	DET
ajst-10992	22	40	laser	laser	NOUN
ajst-10992	22	41	beam	beam	NOUN
ajst-10992	22	42	to	to	ADP
ajst-10992	22	43	a	a	DET
ajst-10992	22	44	certain	certain	ADJ
ajst-10992	22	45	degree	degree	NOUN
ajst-10992	22	46	of	of	ADP
ajst-10992	22	47	incidence	incidence	NOUN
ajst-10992	22	48	of	of	ADP
ajst-10992	22	49	irradiation	irradiation	NOUN
ajst-10992	22	50	of	of	ADP
ajst-10992	22	51	the	the	DET
ajst-10992	22	52	object	object	NOUN
ajst-10992	22	53	under	under	ADP
ajst-10992	22	54	test	test	NOUN
ajst-10992	22	55	,	,	PUNCT
ajst-10992	22	56	the	the	DET
ajst-10992	22	57	laser	laser	NOUN
ajst-10992	22	58	on	on	ADP
ajst-10992	22	59	the	the	DET
ajst-10992	22	60	surface	surface	NOUN
ajst-10992	22	61	of	of	ADP
ajst-10992	22	62	the	the	DET
ajst-10992	22	63	object	object	NOUN
ajst-10992	22	64	reflection	reflection	NOUN
ajst-10992	22	65	and	and	CCONJ
ajst-10992	22	66	scattering	scattering	NOUN
ajst-10992	22	67	,	,	PUNCT
ajst-10992	22	68	the	the	DET
ajst-10992	22	69	use	use	NOUN
ajst-10992	22	70	of	of	ADP
ajst-10992	22	71	lenses	lense	NOUN
ajst-10992	22	72	in	in	ADP
ajst-10992	22	73	another	another	DET
ajst-10992	22	74	angle	angle	NOUN
ajst-10992	22	75	of	of	ADP
ajst-10992	22	76	the	the	DET
ajst-10992	22	77	reflected	reflect	VERB
ajst-10992	22	78	laser	laser	NOUN
ajst-10992	22	79	convergence	convergence	NOUN
ajst-10992	22	80	imaging	imaging	NOUN
ajst-10992	22	81	,	,	PUNCT
ajst-10992	22	82	spot	spot	NOUN
ajst-10992	22	83	imaging	imaging	NOUN
ajst-10992	22	84	in	in	ADP
ajst-10992	22	85	the	the	DET
ajst-10992	22	86	ccd	ccd	PROPN
ajst-10992	22	87	position	position	NOUN
ajst-10992	22	88	sensor	sensor	NOUN
ajst-10992	22	89	,	,	PUNCT
ajst-10992	22	90	when	when	SCONJ
ajst-10992	22	91	the	the	DET
ajst-10992	22	92	object	object	NOUN
ajst-10992	22	93	under	under	ADP
ajst-10992	22	94	test	test	NOUN
ajst-10992	22	95	along	along	ADP
ajst-10992	22	96	the	the	DET
ajst-10992	22	97	laser	laser	NOUN
ajst-10992	22	98	direction	direction	NOUN
ajst-10992	22	99	of	of	ADP
ajst-10992	22	100	the	the	DET
ajst-10992	22	101	movement	movement	NOUN
ajst-10992	22	102	occurs	occur	VERB
ajst-10992	22	103	,	,	PUNCT
ajst-10992	22	104	the	the	DET
ajst-10992	22	105	spot	spot	NOUN
ajst-10992	22	106	on	on	ADP
ajst-10992	22	107	the	the	DET
ajst-10992	22	108	location	location	NOUN
ajst-10992	22	109	of	of	ADP
ajst-10992	22	110	the	the	DET
ajst-10992	22	111	sensor	sensor	NOUN
ajst-10992	22	112	will	will	AUX
ajst-10992	22	113	produce	produce	VERB
ajst-10992	22	114	a	a	DET
ajst-10992	22	115	movement	movement	NOUN
ajst-10992	22	116	,	,	PUNCT
ajst-10992	22	117	the	the	DET
ajst-10992	22	118	displacement	displacement	ADJ
ajst-10992	22	119	size	size	NOUN
ajst-10992	22	120	corresponds	correspond	VERB
ajst-10992	22	121	to	to	ADP
ajst-10992	22	122	the	the	DET
ajst-10992	22	123	distance	distance	NOUN
ajst-10992	22	124	of	of	ADP
ajst-10992	22	125	the	the	DET
ajst-10992	22	126	object	object	NOUN
ajst-10992	22	127	under	under	ADP
ajst-10992	22	128	test	test	NOUN
ajst-10992	22	129	.	.	PUNCT
ajst-10992	23	1	when	when	SCONJ
ajst-10992	23	2	the	the	DET
ajst-10992	23	3	object	object	NOUN
ajst-10992	23	4	under	under	ADP
ajst-10992	23	5	test	test	NOUN
ajst-10992	23	6	moves	move	NOUN
ajst-10992	23	7	along	along	ADP
ajst-10992	23	8	the	the	DET
ajst-10992	23	9	laser	laser	NOUN
ajst-10992	23	10	direction	direction	NOUN
ajst-10992	23	11	,	,	PUNCT
ajst-10992	23	12	the	the	DET
ajst-10992	23	13	spot	spot	NOUN
ajst-10992	23	14	on	on	ADP
ajst-10992	23	15	the	the	DET
ajst-10992	23	16	position	position	NOUN
ajst-10992	23	17	sensor	sensor	NOUN
ajst-10992	23	18	will	will	AUX
ajst-10992	23	19	move	move	VERB
ajst-10992	23	20	,	,	PUNCT
ajst-10992	23	21	and	and	CCONJ
ajst-10992	23	22	the	the	DET
ajst-10992	23	23	size	size	NOUN
ajst-10992	23	24	of	of	ADP
ajst-10992	23	25	its	its	PRON
ajst-10992	23	26	displacement	displacement	NOUN
ajst-10992	23	27	corresponds	correspond	VERB
ajst-10992	23	28	to	to	ADP
ajst-10992	23	29	the	the	DET
ajst-10992	23	30	moving	move	VERB
ajst-10992	23	31	distance	distance	NOUN
ajst-10992	23	32	of	of	ADP
ajst-10992	23	33	the	the	DET
ajst-10992	23	34	object	object	NOUN
ajst-10992	23	35	under	under	ADP
ajst-10992	23	36	test	test	NOUN
ajst-10992	23	37	,	,	PUNCT
ajst-10992	23	38	so	so	CCONJ
ajst-10992	23	39	the	the	DET
ajst-10992	23	40	distance	distance	NOUN
ajst-10992	23	41	between	between	ADP
ajst-10992	23	42	the	the	DET
ajst-10992	23	43	object	object	NOUN
ajst-10992	23	44	under	under	ADP
ajst-10992	23	45	test	test	NOUN
ajst-10992	23	46	and	and	CCONJ
ajst-10992	23	47	the	the	DET
ajst-10992	23	48	baseline	baseline	NOUN
ajst-10992	23	49	can	can	AUX
ajst-10992	23	50	be	be	AUX
ajst-10992	23	51	calculated	calculate	VERB
ajst-10992	23	52	from	from	ADP
ajst-10992	23	53	the	the	DET
ajst-10992	23	54	spot	spot	NOUN
ajst-10992	23	55	position	position	NOUN
ajst-10992	23	56	distance	distance	NOUN
ajst-10992	23	57	by	by	ADP
ajst-10992	23	58	the	the	DET
ajst-10992	23	59	algorithm	algorithm	NOUN
ajst-10992	23	60	design	design	NOUN
ajst-10992	23	61	.	.	PUNCT
ajst-10992	24	1	since	since	SCONJ
ajst-10992	24	2	the	the	DET
ajst-10992	24	3	incident	incident	NOUN
ajst-10992	24	4	light	light	NOUN
ajst-10992	24	5	and	and	CCONJ
ajst-10992	24	6	reflected	reflect	VERB
ajst-10992	24	7	light	light	ADJ
ajst-10992	24	8	form	form	NOUN
ajst-10992	24	9	a	a	DET
ajst-10992	24	10	triangle	triangle	NOUN
ajst-10992	24	11	,	,	PUNCT
ajst-10992	24	12	the	the	DET
ajst-10992	24	13	calculation	calculation	NOUN
ajst-10992	24	14	of	of	ADP
ajst-10992	24	15	the	the	DET
ajst-10992	24	16	spot	spot	NOUN
ajst-10992	24	17	position	position	NOUN
ajst-10992	24	18	utilizes	utilize	VERB
ajst-10992	24	19	the	the	DET
ajst-10992	24	20	geometric	geometric	ADJ
ajst-10992	24	21	triangle	triangle	NOUN
ajst-10992	24	22	theorem	theorem	VERB
ajst-10992	24	23	,	,	PUNCT
ajst-10992	24	24	so	so	SCONJ
ajst-10992	24	25	the	the	DET
ajst-10992	24	26	measurement	measurement	NOUN
ajst-10992	24	27	method	method	NOUN
ajst-10992	24	28	is	be	AUX
ajst-10992	24	29	called	call	VERB
ajst-10992	24	30	laser	laser	NOUN
ajst-10992	24	31	triangulation	triangulation	NOUN
ajst-10992	24	32	.	.	PUNCT
ajst-10992	25	1	there	there	PRON
ajst-10992	25	2	are	be	VERB
ajst-10992	25	3	two	two	NUM
ajst-10992	25	4	types	type	NOUN
ajst-10992	25	5	of	of	ADP
ajst-10992	25	6	laser	laser	NOUN
ajst-10992	25	7	triangulation	triangulation	NOUN
ajst-10992	25	8	,	,	PUNCT
ajst-10992	25	9	laser	laser	NOUN
ajst-10992	25	10	triangulation	triangulation	NOUN
ajst-10992	25	11	direct	direct	ADJ
ajst-10992	25	12	(	(	PUNCT
ajst-10992	25	13	thickness	thickness	NOUN
ajst-10992	25	14	measurement	measurement	NOUN
ajst-10992	25	15	principle	principle	NOUN
ajst-10992	25	16	shown	show	VERB
ajst-10992	25	17	in	in	ADP
ajst-10992	25	18	figure	figure	NOUN
ajst-10992	25	19	3a	3a	NUM
ajst-10992	25	20	)	)	PUNCT
ajst-10992	25	21	and	and	CCONJ
ajst-10992	25	22	laser	laser	NOUN
ajst-10992	25	23	triangulation	triangulation	NOUN
ajst-10992	25	24	oblique	oblique	NOUN
ajst-10992	25	25	(	(	PUNCT
ajst-10992	25	26	thickness	thickness	NOUN
ajst-10992	25	27	measurement	measurement	NOUN
ajst-10992	25	28	principle	principle	NOUN
ajst-10992	25	29	shown	show	VERB
ajst-10992	25	30	in	in	ADP
ajst-10992	25	31	figure	figure	NOUN
ajst-10992	25	32	3b	3b	NUM
ajst-10992	25	33	)	)	PUNCT
ajst-10992	25	34	.	.	PUNCT
ajst-10992	26	1	[	[	X
ajst-10992	26	2	4	4	NUM
ajst-10992	26	3	]	]	PUNCT
ajst-10992	26	4	figure	figure	NOUN
ajst-10992	26	5	3a	3a	NUM
ajst-10992	26	6	.	.	PUNCT
ajst-10992	27	1	laser	laser	NOUN
ajst-10992	27	2	triangulation	triangulation	NOUN
ajst-10992	27	3	direct	direct	ADJ
ajst-10992	27	4	measurement	measurement	NOUN
ajst-10992	27	5	principle	principle	NOUN
ajst-10992	27	6	72	72	NUM
ajst-10992	27	7	figure	figure	NOUN
ajst-10992	27	8	3b	3b	NOUN
ajst-10992	27	9	.	.	PUNCT
ajst-10992	28	1	laser	laser	NOUN
ajst-10992	28	2	triangulation	triangulation	NOUN
ajst-10992	28	3	oblique	oblique	ADJ
ajst-10992	28	4	measurement	measurement	NOUN
ajst-10992	28	5	principle	principle	NOUN
ajst-10992	28	6	the	the	DET
ajst-10992	28	7	second	second	ADJ
ajst-10992	28	8	category	category	NOUN
ajst-10992	28	9	of	of	ADP
ajst-10992	28	10	non	non	ADJ
ajst-10992	28	11	-	-	ADJ
ajst-10992	28	12	contact	contact	ADJ
ajst-10992	28	13	measurement	measurement	NOUN
ajst-10992	28	14	is	be	AUX
ajst-10992	28	15	the	the	DET
ajst-10992	28	16	optical	optical	ADJ
ajst-10992	28	17	confocal	confocal	ADJ
ajst-10992	28	18	thickness	thickness	NOUN
ajst-10992	28	19	measurement	measurement	NOUN
ajst-10992	28	20	method	method	NOUN
ajst-10992	28	21	,	,	PUNCT
ajst-10992	28	22	and	and	CCONJ
ajst-10992	28	23	the	the	DET
ajst-10992	28	24	measurement	measurement	NOUN
ajst-10992	28	25	principle	principle	NOUN
ajst-10992	28	26	is	be	AUX
ajst-10992	28	27	shown	show	VERB
ajst-10992	28	28	in	in	ADP
ajst-10992	28	29	fig	fig	NOUN
ajst-10992	28	30	.	.	PUNCT
ajst-10992	29	1	4	4	NUM
ajst-10992	29	2	the	the	DET
ajst-10992	29	3	light	light	NOUN
ajst-10992	29	4	emitted	emit	VERB
ajst-10992	29	5	from	from	ADP
ajst-10992	29	6	the	the	DET
ajst-10992	29	7	light	light	ADJ
ajst-10992	29	8	source	source	NOUN
ajst-10992	29	9	in	in	ADP
ajst-10992	29	10	a	a	DET
ajst-10992	29	11	wide	wide	ADJ
ajst-10992	29	12	range	range	NOUN
ajst-10992	29	13	of	of	ADP
ajst-10992	29	14	wavelengths	wavelength	NOUN
ajst-10992	29	15	is	be	AUX
ajst-10992	29	16	irradiated	irradiate	VERB
ajst-10992	29	17	at	at	ADP
ajst-10992	29	18	different	different	ADJ
ajst-10992	29	19	focal	focal	ADJ
ajst-10992	29	20	distances	distance	NOUN
ajst-10992	29	21	according	accord	VERB
ajst-10992	29	22	to	to	ADP
ajst-10992	29	23	the	the	DET
ajst-10992	29	24	wavelength	wavelength	NOUN
ajst-10992	29	25	after	after	ADP
ajst-10992	29	26	passing	pass	VERB
ajst-10992	29	27	through	through	ADP
ajst-10992	29	28	the	the	DET
ajst-10992	29	29	refracting	refracting	NOUN
ajst-10992	29	30	lens	len	NOUN
ajst-10992	29	31	.	.	PUNCT
ajst-10992	30	1	when	when	SCONJ
ajst-10992	30	2	a	a	DET
ajst-10992	30	3	target	target	NOUN
ajst-10992	30	4	is	be	AUX
ajst-10992	30	5	placed	place	VERB
ajst-10992	30	6	within	within	ADP
ajst-10992	30	7	the	the	DET
ajst-10992	30	8	measurement	measurement	NOUN
ajst-10992	30	9	range	range	NOUN
ajst-10992	30	10	,	,	PUNCT
ajst-10992	30	11	the	the	DET
ajst-10992	30	12	design	design	NOUN
ajst-10992	30	13	that	that	PRON
ajst-10992	30	14	only	only	ADV
ajst-10992	30	15	the	the	DET
ajst-10992	30	16	wavelength	wavelength	NOUN
ajst-10992	30	17	of	of	ADP
ajst-10992	30	18	light	light	NOUN
ajst-10992	30	19	that	that	PRON
ajst-10992	30	20	is	be	AUX
ajst-10992	30	21	in	in	ADP
ajst-10992	30	22	focus	focus	NOUN
ajst-10992	30	23	with	with	ADP
ajst-10992	30	24	the	the	DET
ajst-10992	30	25	target	target	NOUN
ajst-10992	30	26	is	be	AUX
ajst-10992	30	27	adopted	adopt	VERB
ajst-10992	30	28	,	,	PUNCT
ajst-10992	30	29	and	and	CCONJ
ajst-10992	30	30	the	the	DET
ajst-10992	30	31	amount	amount	NOUN
ajst-10992	30	32	of	of	ADP
ajst-10992	30	33	light	light	NOUN
ajst-10992	30	34	received	receive	VERB
ajst-10992	30	35	is	be	AUX
ajst-10992	30	36	turned	turn	VERB
ajst-10992	30	37	to	to	ADP
ajst-10992	30	38	the	the	DET
ajst-10992	30	39	maximum	maximum	NOUN
ajst-10992	30	40	even	even	ADV
ajst-10992	30	41	if	if	SCONJ
ajst-10992	30	42	the	the	DET
ajst-10992	30	43	focus	focus	NOUN
ajst-10992	30	44	can	can	AUX
ajst-10992	30	45	be	be	AUX
ajst-10992	30	46	connected	connect	VERB
ajst-10992	30	47	to	to	ADP
ajst-10992	30	48	the	the	DET
ajst-10992	30	49	tip	tip	NOUN
ajst-10992	30	50	of	of	ADP
ajst-10992	30	51	the	the	DET
ajst-10992	30	52	optical	optical	ADJ
ajst-10992	30	53	fiber	fiber	NOUN
ajst-10992	30	54	.	.	PUNCT
ajst-10992	31	1	the	the	DET
ajst-10992	31	2	light	light	NOUN
ajst-10992	31	3	that	that	PRON
ajst-10992	31	4	returns	return	VERB
ajst-10992	31	5	after	after	ADP
ajst-10992	31	6	passing	pass	VERB
ajst-10992	31	7	through	through	ADP
ajst-10992	31	8	the	the	DET
ajst-10992	31	9	optical	optical	ADJ
ajst-10992	31	10	fiber	fiber	NOUN
ajst-10992	31	11	is	be	AUX
ajst-10992	31	12	separated	separate	VERB
ajst-10992	31	13	by	by	ADP
ajst-10992	31	14	the	the	DET
ajst-10992	31	15	beam	beam	NOUN
ajst-10992	31	16	splitter	splitter	NOUN
ajst-10992	31	17	according	accord	VERB
ajst-10992	31	18	to	to	ADP
ajst-10992	31	19	the	the	DET
ajst-10992	31	20	wavelength	wavelength	NOUN
ajst-10992	31	21	,	,	PUNCT
ajst-10992	31	22	and	and	CCONJ
ajst-10992	31	23	is	be	AUX
ajst-10992	31	24	fed	feed	VERB
ajst-10992	31	25	to	to	ADP
ajst-10992	31	26	each	each	DET
ajst-10992	31	27	pixel	pixel	NOUN
ajst-10992	31	28	of	of	ADP
ajst-10992	31	29	the	the	DET
ajst-10992	31	30	light	light	ADJ
ajst-10992	31	31	receiving	receiving	NOUN
ajst-10992	31	32	element	element	NOUN
ajst-10992	31	33	.	.	PUNCT
ajst-10992	32	1	the	the	DET
ajst-10992	32	2	wavelength	wavelength	NOUN
ajst-10992	32	3	(	(	PUNCT
ajst-10992	32	4	color	color	NOUN
ajst-10992	32	5	)	)	PUNCT
ajst-10992	32	6	at	at	ADP
ajst-10992	32	7	which	which	PRON
ajst-10992	32	8	the	the	DET
ajst-10992	32	9	amount	amount	NOUN
ajst-10992	32	10	of	of	ADP
ajst-10992	32	11	light	light	NOUN
ajst-10992	32	12	received	receive	VERB
ajst-10992	32	13	is	be	AUX
ajst-10992	32	14	turned	turn	VERB
ajst-10992	32	15	to	to	ADP
ajst-10992	32	16	the	the	DET
ajst-10992	32	17	maximum	maximum	NOUN
ajst-10992	32	18	is	be	AUX
ajst-10992	32	19	calculated	calculate	VERB
ajst-10992	32	20	at	at	ADP
ajst-10992	32	21	the	the	DET
ajst-10992	32	22	peak	peak	NOUN
ajst-10992	32	23	position	position	NOUN
ajst-10992	32	24	of	of	ADP
ajst-10992	32	25	the	the	DET
ajst-10992	32	26	detected	detect	VERB
ajst-10992	32	27	light	light	NOUN
ajst-10992	32	28	-	-	PUNCT
ajst-10992	32	29	receiving	receive	VERB
ajst-10992	32	30	waveform	waveform	NOUN
ajst-10992	32	31	,	,	PUNCT
ajst-10992	32	32	and	and	CCONJ
ajst-10992	32	33	then	then	ADV
ajst-10992	32	34	the	the	DET
ajst-10992	32	35	height	height	NOUN
ajst-10992	32	36	of	of	ADP
ajst-10992	32	37	the	the	DET
ajst-10992	32	38	target	target	NOUN
ajst-10992	32	39	is	be	AUX
ajst-10992	32	40	calculated	calculate	VERB
ajst-10992	32	41	.	.	PUNCT
ajst-10992	33	1	[	[	X
ajst-10992	33	2	5	5	NUM
ajst-10992	33	3	]	]	PUNCT
ajst-10992	33	4	figure	figure	NOUN
ajst-10992	33	5	4	4	NUM
ajst-10992	33	6	.	.	PUNCT
ajst-10992	33	7	principle	principle	ADJ
ajst-10992	33	8	diagram	diagram	NOUN
ajst-10992	33	9	of	of	ADP
ajst-10992	33	10	optical	optical	ADJ
ajst-10992	33	11	confocal	confocal	ADJ
ajst-10992	33	12	thickness	thickness	NOUN
ajst-10992	33	13	measurement	measurement	NOUN
ajst-10992	33	14	method	method	VERB
ajst-10992	33	15	a	a	DET
ajst-10992	33	16	comparison	comparison	NOUN
ajst-10992	33	17	of	of	ADP
ajst-10992	33	18	the	the	DET
ajst-10992	33	19	advantages	advantage	NOUN
ajst-10992	33	20	and	and	CCONJ
ajst-10992	33	21	disadvantages	disadvantage	NOUN
ajst-10992	33	22	of	of	ADP
ajst-10992	33	23	the	the	DET
ajst-10992	33	24	above	above	ADJ
ajst-10992	33	25	five	five	NUM
ajst-10992	33	26	thickness	thickness	NOUN
ajst-10992	33	27	measurement	measurement	NOUN
ajst-10992	33	28	methods	method	NOUN
ajst-10992	33	29	is	be	AUX
ajst-10992	33	30	shown	show	VERB
ajst-10992	33	31	in	in	ADP
ajst-10992	33	32	table	table	NOUN
ajst-10992	33	33	2	2	NUM
ajst-10992	33	34	.	.	PUNCT
ajst-10992	33	35	table	table	NOUN
ajst-10992	33	36	2	2	NUM
ajst-10992	33	37	.	.	PUNCT
ajst-10992	33	38	comparison	comparison	NOUN
ajst-10992	33	39	of	of	ADP
ajst-10992	33	40	advantages	advantage	NOUN
ajst-10992	33	41	and	and	CCONJ
ajst-10992	33	42	disadvantages	disadvantage	NOUN
ajst-10992	33	43	of	of	ADP
ajst-10992	33	44	five	five	NUM
ajst-10992	33	45	thickness	thickness	NOUN
ajst-10992	33	46	measurement	measurement	NOUN
ajst-10992	33	47	methods	method	NOUN
ajst-10992	33	48	sports	sport	NOUN
ajst-10992	33	49	event	event	NOUN
ajst-10992	33	50	micrometer	micrometer	NOUN
ajst-10992	33	51	measurements	measurement	VERB
ajst-10992	33	52	ultrasonic	ultrasonic	ADJ
ajst-10992	33	53	echo	echo	NOUN
ajst-10992	33	54	measurement	measurement	NOUN
ajst-10992	33	55	infrared	infrare	VERB
ajst-10992	33	56	absorption	absorption	NOUN
ajst-10992	33	57	measurement	measurement	NOUN
ajst-10992	33	58	optical	optical	ADJ
ajst-10992	33	59	triangulation	triangulation	NOUN
ajst-10992	33	60	optical	optical	ADJ
ajst-10992	33	61	confocal	confocal	ADJ
ajst-10992	33	62	measurement	measurement	NOUN
ajst-10992	33	63	detection	detection	NOUN
ajst-10992	33	64	efficiency	efficiency	NOUN
ajst-10992	33	65	less	less	ADV
ajst-10992	33	66	efficient	efficient	ADJ
ajst-10992	33	67	less	less	ADV
ajst-10992	33	68	efficient	efficient	ADJ
ajst-10992	33	69	less	less	ADV
ajst-10992	33	70	efficient	efficient	ADJ
ajst-10992	33	71	real	real	ADJ
ajst-10992	33	72	-	-	PUNCT
ajst-10992	33	73	time	time	NOUN
ajst-10992	33	74	detection	detection	NOUN
ajst-10992	33	75	real	real	ADJ
ajst-10992	33	76	-	-	PUNCT
ajst-10992	33	77	time	time	NOUN
ajst-10992	33	78	detection	detection	NOUN
ajst-10992	33	79	measurement	measurement	NOUN
ajst-10992	33	80	points	point	NOUN
ajst-10992	33	81	points	point	NOUN
ajst-10992	33	82	are	be	AUX
ajst-10992	33	83	limited	limited	ADJ
ajst-10992	33	84	points	point	NOUN
ajst-10992	33	85	are	be	AUX
ajst-10992	33	86	limited	limited	ADJ
ajst-10992	33	87	points	point	NOUN
ajst-10992	33	88	are	be	AUX
ajst-10992	33	89	limited	limited	ADJ
ajst-10992	33	90	setup	setup	NOUN
ajst-10992	33	91	on	on	ADP
ajst-10992	33	92	demand	demand	NOUN
ajst-10992	33	93	setup	setup	NOUN
ajst-10992	33	94	on	on	ADP
ajst-10992	33	95	demand	demand	NOUN
ajst-10992	33	96	sample	sample	NOUN
ajst-10992	33	97	integrity	integrity	NOUN
ajst-10992	33	98	destructive	destructive	ADJ
ajst-10992	33	99	measurements	measurement	NOUN
ajst-10992	33	100	contact	contact	NOUN
ajst-10992	33	101	measurement	measurement	NOUN
ajst-10992	33	102	,	,	PUNCT
ajst-10992	33	103	prone	prone	ADJ
ajst-10992	33	104	to	to	ADP
ajst-10992	33	105	abrasion	abrasion	NOUN
ajst-10992	33	106	contact	contact	NOUN
ajst-10992	33	107	measurement	measurement	NOUN
ajst-10992	33	108	,	,	PUNCT
ajst-10992	33	109	prone	prone	ADJ
ajst-10992	33	110	to	to	ADP
ajst-10992	33	111	abrasion	abrasion	NOUN
ajst-10992	33	112	non	non	ADJ
ajst-10992	33	113	-	-	ADJ
ajst-10992	33	114	contact	contact	ADJ
ajst-10992	33	115	measurement	measurement	NOUN
ajst-10992	33	116	,	,	PUNCT
ajst-10992	33	117	nondestructive	nondestructive	ADJ
ajst-10992	33	118	non	non	ADJ
ajst-10992	33	119	-	-	ADJ
ajst-10992	33	120	contact	contact	ADJ
ajst-10992	33	121	measurement	measurement	NOUN
ajst-10992	33	122	,	,	PUNCT
ajst-10992	33	123	nondestructive	nondestructive	ADJ
ajst-10992	33	124	measurement	measurement	NOUN
ajst-10992	33	125	accuracy	accuracy	NOUN
ajst-10992	33	126	0.001	0.001	NUM
ajst-10992	33	127	mm	mm	NOUN
ajst-10992	33	128	0.001	0.001	NUM
ajst-10992	33	129	mm	mm	NOUN
ajst-10992	33	130	0.01	0.01	NUM
ajst-10992	33	131	mm	mm	NOUN
ajst-10992	33	132	micron	micron	NOUN
ajst-10992	33	133	-	-	PUNCT
ajst-10992	33	134	scale	scale	NOUN
ajst-10992	33	135	measurements	measurement	NOUN
ajst-10992	33	136	micron	micron	NOUN
ajst-10992	33	137	-	-	PUNCT
ajst-10992	33	138	scale	scale	NOUN
ajst-10992	33	139	measurements	measurement	NOUN
ajst-10992	33	140	data	datum	NOUN
ajst-10992	33	141	reproducibility	reproducibility	NOUN
ajst-10992	33	142	manual	manual	ADJ
ajst-10992	33	143	operation	operation	NOUN
ajst-10992	33	144	with	with	ADP
ajst-10992	33	145	poor	poor	ADJ
ajst-10992	33	146	data	datum	NOUN
ajst-10992	33	147	reproducibility	reproducibility	NOUN
ajst-10992	33	148	manual	manual	ADJ
ajst-10992	33	149	operation	operation	NOUN
ajst-10992	33	150	with	with	ADP
ajst-10992	33	151	good	good	ADJ
ajst-10992	33	152	data	data	PROPN
ajst-10992	33	153	reproducibility	reproducibility	NOUN
ajst-10992	33	154	manual	manual	ADJ
ajst-10992	33	155	operation	operation	NOUN
ajst-10992	33	156	,	,	PUNCT
ajst-10992	33	157	poor	poor	ADJ
ajst-10992	33	158	data	datum	NOUN
ajst-10992	33	159	reproducibility	reproducibility	NOUN
ajst-10992	33	160	jittery	jittery	ADJ
ajst-10992	33	161	glass	glass	NOUN
ajst-10992	33	162	drive	drive	NOUN
ajst-10992	33	163	process	process	NOUN
ajst-10992	33	164	leads	lead	VERB
ajst-10992	33	165	to	to	ADP
ajst-10992	33	166	fair	fair	ADJ
ajst-10992	33	167	reproducibility	reproducibility	NOUN
ajst-10992	33	168	glass	glass	NOUN
ajst-10992	33	169	drive	drive	NOUN
ajst-10992	33	170	jitter	jitter	NOUN
ajst-10992	33	171	does	do	AUX
ajst-10992	33	172	not	not	PART
ajst-10992	33	173	affect	affect	VERB
ajst-10992	33	174	test	test	NOUN
ajst-10992	33	175	results	result	NOUN
ajst-10992	33	176	,	,	PUNCT
ajst-10992	33	177	good	good	ADJ
ajst-10992	33	178	data	datum	NOUN
ajst-10992	33	179	reproducibility	reproducibility	NOUN
ajst-10992	33	180	from	from	ADP
ajst-10992	33	181	the	the	DET
ajst-10992	33	182	above	above	ADJ
ajst-10992	33	183	comparison	comparison	NOUN
ajst-10992	33	184	,	,	PUNCT
ajst-10992	33	185	it	it	PRON
ajst-10992	33	186	can	can	AUX
ajst-10992	33	187	be	be	AUX
ajst-10992	33	188	seen	see	VERB
ajst-10992	33	189	that	that	SCONJ
ajst-10992	33	190	ultrasonic	ultrasonic	ADJ
ajst-10992	33	191	echo	echo	NOUN
ajst-10992	33	192	measurement	measurement	NOUN
ajst-10992	33	193	is	be	AUX
ajst-10992	33	194	preferred	prefer	VERB
ajst-10992	33	195	for	for	ADP
ajst-10992	33	196	contact	contact	NOUN
ajst-10992	33	197	measurement	measurement	NOUN
ajst-10992	33	198	and	and	CCONJ
ajst-10992	33	199	optical	optical	ADJ
ajst-10992	33	200	confocal	confocal	ADJ
ajst-10992	33	201	measurement	measurement	NOUN
ajst-10992	33	202	is	be	AUX
ajst-10992	33	203	preferred	prefer	VERB
ajst-10992	33	204	for	for	ADP
ajst-10992	33	205	non	non	ADJ
ajst-10992	33	206	-	-	ADJ
ajst-10992	33	207	contact	contact	ADJ
ajst-10992	33	208	measurement	measurement	NOUN
ajst-10992	33	209	.	.	PUNCT
ajst-10992	34	1	4	4	X
ajst-10992	34	2	.	.	NUM
ajst-10992	34	3	measured	measure	VERB
ajst-10992	34	4	thickness	thickness	NOUN
ajst-10992	34	5	model	model	NOUN
ajst-10992	34	6	the	the	DET
ajst-10992	34	7	development	development	NOUN
ajst-10992	34	8	trend	trend	NOUN
ajst-10992	34	9	of	of	ADP
ajst-10992	34	10	ultra	ultra	ADJ
ajst-10992	34	11	-	-	ADJ
ajst-10992	34	12	thin	thin	ADJ
ajst-10992	34	13	glass	glass	NOUN
ajst-10992	34	14	substrates	substrate	NOUN
ajst-10992	34	15	is	be	AUX
ajst-10992	34	16	toward	toward	ADP
ajst-10992	34	17	larger	large	ADJ
ajst-10992	34	18	and	and	CCONJ
ajst-10992	34	19	thinner	thin	ADJ
ajst-10992	34	20	.	.	PUNCT
ajst-10992	35	1	in	in	ADP
ajst-10992	35	2	particular	particular	ADJ
ajst-10992	35	3	,	,	PUNCT
ajst-10992	35	4	float	float	ADJ
ajst-10992	35	5	molded	mold	VERB
ajst-10992	35	6	glass	glass	NOUN
ajst-10992	35	7	substrates	substrate	NOUN
ajst-10992	35	8	must	must	AUX
ajst-10992	35	9	be	be	AUX
ajst-10992	35	10	surface	surface	NOUN
ajst-10992	35	11	ground	ground	NOUN
ajst-10992	35	12	to	to	PART
ajst-10992	35	13	remove	remove	VERB
ajst-10992	35	14	defects	defect	NOUN
ajst-10992	35	15	on	on	ADP
ajst-10992	35	16	the	the	DET
ajst-10992	35	17	glass	glass	NOUN
ajst-10992	35	18	surface	surface	NOUN
ajst-10992	35	19	in	in	ADP
ajst-10992	35	20	order	order	NOUN
ajst-10992	35	21	to	to	PART
ajst-10992	35	22	meet	meet	VERB
ajst-10992	35	23	the	the	DET
ajst-10992	35	24	processing	processing	NOUN
ajst-10992	35	25	requirements	requirement	NOUN
ajst-10992	35	26	of	of	ADP
ajst-10992	35	27	downstream	downstream	ADJ
ajst-10992	35	28	manufacturers	manufacturer	NOUN
ajst-10992	35	29	.	.	PUNCT
ajst-10992	36	1	surface	surface	NOUN
ajst-10992	36	2	grinding	grind	VERB
ajst-10992	36	3	process	process	NOUN
ajst-10992	36	4	control	control	NOUN
ajst-10992	36	5	requires	require	VERB
ajst-10992	36	6	multi	multi	ADJ
ajst-10992	36	7	-	-	ADJ
ajst-10992	36	8	point	point	ADJ
ajst-10992	36	9	real	real	ADJ
ajst-10992	36	10	-	-	PUNCT
ajst-10992	36	11	time	time	NOUN
ajst-10992	36	12	detection	detection	NOUN
ajst-10992	36	13	of	of	ADP
ajst-10992	36	14	the	the	DET
ajst-10992	36	15	thickness	thickness	NOUN
ajst-10992	36	16	of	of	ADP
ajst-10992	36	17	the	the	DET
ajst-10992	36	18	processed	process	VERB
ajst-10992	36	19	glass	glass	NOUN
ajst-10992	36	20	substrate	substrate	NOUN
ajst-10992	36	21	.	.	PUNCT
ajst-10992	37	1	comprehensive	comprehensive	ADJ
ajst-10992	37	2	above	above	ADP
ajst-10992	37	3	process	process	NOUN
ajst-10992	37	4	requirements	requirement	NOUN
ajst-10992	37	5	decided	decide	VERB
ajst-10992	37	6	to	to	PART
ajst-10992	37	7	use	use	VERB
ajst-10992	37	8	online	online	ADJ
ajst-10992	37	9	full	full	ADJ
ajst-10992	37	10	detection	detection	NOUN
ajst-10992	37	11	mode	mode	NOUN
ajst-10992	37	12	,	,	PUNCT
ajst-10992	37	13	the	the	DET
ajst-10992	37	14	detection	detection	NOUN
ajst-10992	37	15	probe	probe	VERB
ajst-10992	37	16	selection	selection	NOUN
ajst-10992	37	17	of	of	ADP
ajst-10992	37	18	optical	optical	ADJ
ajst-10992	37	19	confocal	confocal	ADJ
ajst-10992	37	20	thickness	thickness	NOUN
ajst-10992	37	21	measurement	measurement	NOUN
ajst-10992	37	22	probe	probe	NOUN
ajst-10992	37	23	.	.	PUNCT
ajst-10992	38	1	73	73	NUM
ajst-10992	38	2	measurement	measurement	NOUN
ajst-10992	38	3	thickness	thickness	NOUN
ajst-10992	38	4	model	model	NOUN
ajst-10992	38	5	for	for	ADP
ajst-10992	38	6	multi	multi	ADJ
ajst-10992	38	7	-	-	ADJ
ajst-10992	38	8	line	line	ADJ
ajst-10992	38	9	isometric	isometric	ADJ
ajst-10992	38	10	measurement	measurement	NOUN
ajst-10992	38	11	mode	mode	NOUN
ajst-10992	38	12	.	.	PUNCT
ajst-10992	39	1	measurement	measurement	NOUN
ajst-10992	39	2	points	point	NOUN
ajst-10992	39	3	are	be	AUX
ajst-10992	39	4	shown	show	VERB
ajst-10992	39	5	in	in	ADP
ajst-10992	39	6	figure	figure	NOUN
ajst-10992	39	7	5	5	NUM
ajst-10992	39	8	.	.	PUNCT
ajst-10992	39	9	figure	figure	NOUN
ajst-10992	39	10	5	5	NUM
ajst-10992	39	11	.	.	PUNCT
ajst-10992	39	12	schematic	schematic	ADJ
ajst-10992	39	13	diagram	diagram	NOUN
ajst-10992	39	14	of	of	ADP
ajst-10992	39	15	optical	optical	ADJ
ajst-10992	39	16	confocal	confocal	ADJ
ajst-10992	39	17	measurement	measurement	NOUN
ajst-10992	39	18	point	point	NOUN
ajst-10992	39	19	location	location	NOUN
ajst-10992	39	20	5	5	NUM
ajst-10992	39	21	.	.	SYM
ajst-10992	39	22	5	5	NUM
ajst-10992	39	23	simulation	simulation	NOUN
ajst-10992	39	24	test	test	NOUN
ajst-10992	39	25	verification	verification	NOUN
ajst-10992	39	26	r	r	NOUN
ajst-10992	39	27	&	&	CCONJ
ajst-10992	39	28	d	d	PROPN
ajst-10992	39	29	group	group	NOUN
ajst-10992	39	30	analyzed	analyze	VERB
ajst-10992	39	31	the	the	DET
ajst-10992	39	32	process	process	NOUN
ajst-10992	39	33	requirements	requirement	NOUN
ajst-10992	39	34	for	for	ADP
ajst-10992	39	35	not	not	PART
ajst-10992	39	36	less	less	ADJ
ajst-10992	39	37	than	than	ADP
ajst-10992	39	38	7	7	NUM
ajst-10992	39	39	lines	line	NOUN
ajst-10992	39	40	,	,	PUNCT
ajst-10992	39	41	each	each	DET
ajst-10992	39	42	line	line	NOUN
ajst-10992	39	43	of	of	ADP
ajst-10992	39	44	not	not	PART
ajst-10992	39	45	less	less	ADJ
ajst-10992	39	46	than	than	ADP
ajst-10992	39	47	21	21	NUM
ajst-10992	39	48	points	point	NOUN
ajst-10992	39	49	,	,	PUNCT
ajst-10992	39	50	accuracy	accuracy	NOUN
ajst-10992	39	51	of	of	ADP
ajst-10992	39	52	not	not	PART
ajst-10992	39	53	less	less	ADJ
ajst-10992	39	54	than	than	ADP
ajst-10992	39	55	1	1	NUM
ajst-10992	39	56	micron	micron	NOUN
ajst-10992	39	57	,	,	PUNCT
ajst-10992	39	58	measuring	measure	VERB
ajst-10992	39	59	distance	distance	NOUN
ajst-10992	39	60	0	0	NUM
ajst-10992	39	61	-	-	SYM
ajst-10992	39	62	50	50	NUM
ajst-10992	39	63	mm	mm	NOUN
ajst-10992	39	64	adjustable	adjustable	ADJ
ajst-10992	39	65	,	,	PUNCT
ajst-10992	39	66	comprehensive	comprehensive	ADJ
ajst-10992	39	67	consideration	consideration	NOUN
ajst-10992	39	68	of	of	ADP
ajst-10992	39	69	the	the	DET
ajst-10992	39	70	needs	need	NOUN
ajst-10992	39	71	of	of	ADP
ajst-10992	39	72	the	the	DET
ajst-10992	39	73	selected	select	VERB
ajst-10992	39	74	keyence	keyence	NOUN
ajst-10992	39	75	cl	cl	NOUN
ajst-10992	39	76	-	-	PUNCT
ajst-10992	39	77	p300	p300	PROPN
ajst-10992	39	78	series	series	NOUN
ajst-10992	39	79	probe	probe	NOUN
ajst-10992	39	80	matching	match	VERB
ajst-10992	39	81	keyence	keyence	NOUN
ajst-10992	39	82	cl	cl	NOUN
ajst-10992	39	83	-	-	PUNCT
ajst-10992	39	84	p030n	p030n	NOUN
ajst-10992	39	85	optical	optical	ADJ
ajst-10992	39	86	unit	unit	NOUN
ajst-10992	39	87	can	can	AUX
ajst-10992	39	88	meet	meet	VERB
ajst-10992	39	89	the	the	DET
ajst-10992	39	90	above	above	ADJ
ajst-10992	39	91	technical	technical	ADJ
ajst-10992	39	92	requirements	requirement	NOUN
ajst-10992	39	93	.	.	PUNCT
ajst-10992	40	1	the	the	DET
ajst-10992	40	2	r&d	r&d	NOUN
ajst-10992	40	3	team	team	NOUN
ajst-10992	40	4	customized	customize	VERB
ajst-10992	40	5	a	a	DET
ajst-10992	40	6	7	7	NUM
ajst-10992	40	7	-	-	PUNCT
ajst-10992	40	8	line	line	NOUN
ajst-10992	40	9	online	online	ADJ
ajst-10992	40	10	optical	optical	ADJ
ajst-10992	40	11	confocal	confocal	ADJ
ajst-10992	40	12	thickness	thickness	NOUN
ajst-10992	40	13	gauge	gauge	NOUN
ajst-10992	40	14	to	to	PART
ajst-10992	40	15	be	be	AUX
ajst-10992	40	16	installed	instal	VERB
ajst-10992	40	17	in	in	ADP
ajst-10992	40	18	the	the	DET
ajst-10992	40	19	inspection	inspection	NOUN
ajst-10992	40	20	room	room	NOUN
ajst-10992	40	21	after	after	ADP
ajst-10992	40	22	face	face	NOUN
ajst-10992	40	23	grinding	grind	VERB
ajst-10992	40	24	.	.	PUNCT
ajst-10992	41	1	in	in	ADP
ajst-10992	41	2	order	order	NOUN
ajst-10992	41	3	to	to	PART
ajst-10992	41	4	assess	assess	VERB
ajst-10992	41	5	the	the	DET
ajst-10992	41	6	reliability	reliability	NOUN
ajst-10992	41	7	of	of	ADP
ajst-10992	41	8	the	the	DET
ajst-10992	41	9	inspection	inspection	NOUN
ajst-10992	41	10	data	datum	NOUN
ajst-10992	41	11	,	,	PUNCT
ajst-10992	41	12	cmm	cmm	PROPN
ajst-10992	41	13	inspection	inspection	PROPN
ajst-10992	41	14	data	datum	NOUN
ajst-10992	41	15	was	be	AUX
ajst-10992	41	16	used	use	VERB
ajst-10992	41	17	as	as	ADP
ajst-10992	41	18	a	a	DET
ajst-10992	41	19	control	control	NOUN
ajst-10992	41	20	.	.	PUNCT
ajst-10992	42	1	the	the	DET
ajst-10992	42	2	comparison	comparison	NOUN
ajst-10992	42	3	of	of	ADP
ajst-10992	42	4	the	the	DET
ajst-10992	42	5	two	two	NUM
ajst-10992	42	6	measurement	measurement	NOUN
ajst-10992	42	7	methods	method	NOUN
ajst-10992	42	8	is	be	AUX
ajst-10992	42	9	shown	show	VERB
ajst-10992	42	10	in	in	ADP
ajst-10992	42	11	table	table	NOUN
ajst-10992	42	12	3	3	NUM
ajst-10992	42	13	.	.	PUNCT
ajst-10992	42	14	table	table	NOUN
ajst-10992	42	15	3	3	NUM
ajst-10992	42	16	.	.	PUNCT
ajst-10992	42	17	comparison	comparison	NOUN
ajst-10992	42	18	of	of	ADP
ajst-10992	42	19	the	the	DET
ajst-10992	42	20	two	two	NUM
ajst-10992	42	21	detection	detection	NOUN
ajst-10992	42	22	methods	method	NOUN
ajst-10992	42	23	comparison	comparison	NOUN
ajst-10992	42	24	program	program	NOUN
ajst-10992	42	25	offline	offline	ADJ
ajst-10992	42	26	coordinate	coordinate	NOUN
ajst-10992	42	27	measurement	measurement	NOUN
ajst-10992	42	28	online	online	ADJ
ajst-10992	42	29	confocal	confocal	ADJ
ajst-10992	42	30	measurement	measurement	NOUN
ajst-10992	42	31	sampling	sample	VERB
ajst-10992	42	32	time	time	NOUN
ajst-10992	42	33	1.5	1.5	NUM
ajst-10992	42	34	hours	hour	NOUN
ajst-10992	42	35	per	per	ADP
ajst-10992	42	36	pieces	piece	NOUN
ajst-10992	42	37	none	none	NOUN
ajst-10992	42	38	testing	testing	NOUN
ajst-10992	42	39	time	time	NOUN
ajst-10992	42	40	120	120	NUM
ajst-10992	42	41	minutes	minute	NOUN
ajst-10992	42	42	(	(	PUNCT
ajst-10992	42	43	27	27	NUM
ajst-10992	42	44	rows	row	NOUN
ajst-10992	42	45	*	*	PUNCT
ajst-10992	42	46	23	23	NUM
ajst-10992	42	47	points	point	NOUN
ajst-10992	42	48	)	)	PUNCT
ajst-10992	42	49	40	40	NUM
ajst-10992	42	50	seconds	second	NOUN
ajst-10992	42	51	(	(	PUNCT
ajst-10992	42	52	7	7	NUM
ajst-10992	42	53	rows	row	NOUN
ajst-10992	42	54	*	*	PUNCT
ajst-10992	42	55	21	21	NUM
ajst-10992	42	56	points	point	NOUN
ajst-10992	42	57	)	)	PUNCT
ajst-10992	42	58	11.6	11.6	NUM
ajst-10992	42	59	seconds	second	NOUN
ajst-10992	42	60	/	/	SYM
ajst-10992	42	61	point	point	NOUN
ajst-10992	42	62	0.27	0.27	NUM
ajst-10992	42	63	sec	sec	PROPN
ajst-10992	42	64	/	/	SYM
ajst-10992	42	65	point	point	NOUN
ajst-10992	42	66	sample	sample	NOUN
ajst-10992	42	67	integrity	integrity	NOUN
ajst-10992	42	68	glass	glass	NOUN
ajst-10992	42	69	abrasion	abrasion	NOUN
ajst-10992	42	70	due	due	ADP
ajst-10992	42	71	to	to	ADP
ajst-10992	42	72	sampling	sample	VERB
ajst-10992	42	73	process	process	NOUN
ajst-10992	42	74	non	non	ADJ
ajst-10992	42	75	-	-	ADJ
ajst-10992	42	76	destructive	destructive	ADJ
ajst-10992	42	77	measurement	measurement	NOUN
ajst-10992	42	78	measurement	measurement	NOUN
ajst-10992	42	79	points	point	VERB
ajst-10992	42	80	27	27	NUM
ajst-10992	42	81	rows	row	NOUN
ajst-10992	42	82	*	*	PUNCT
ajst-10992	42	83	23	23	NUM
ajst-10992	42	84	columns	column	NOUN
ajst-10992	42	85	7	7	NUM
ajst-10992	42	86	rows	row	NOUN
ajst-10992	42	87	*	*	PUNCT
ajst-10992	42	88	21	21	NUM
ajst-10992	42	89	points	point	NOUN
ajst-10992	42	90	accuracy	accuracy	NOUN
ajst-10992	42	91	0.001	0.001	NUM
ajst-10992	42	92	mm	mm	PROPN
ajst-10992	42	93	0.00025	0.00025	NUM
ajst-10992	42	94	mm	mm	PROPN
ajst-10992	42	95	data	datum	NOUN
ajst-10992	42	96	reproducibility	reproducibility	NOUN
ajst-10992	42	97	0.005	0.005	NUM
ajst-10992	42	98	mm	mm	NOUN
ajst-10992	42	99	0.001	0.001	NUM
ajst-10992	42	100	mm	mm	NOUN
ajst-10992	42	101	from	from	ADP
ajst-10992	42	102	the	the	DET
ajst-10992	42	103	above	above	ADJ
ajst-10992	42	104	comparison	comparison	NOUN
ajst-10992	42	105	,	,	PUNCT
ajst-10992	42	106	it	it	PRON
ajst-10992	42	107	can	can	AUX
ajst-10992	42	108	be	be	AUX
ajst-10992	42	109	seen	see	VERB
ajst-10992	42	110	that	that	SCONJ
ajst-10992	42	111	on	on	ADP
ajst-10992	42	112	-	-	PUNCT
ajst-10992	42	113	line	line	NOUN
ajst-10992	42	114	confocal	confocal	ADJ
ajst-10992	42	115	measurement	measurement	NOUN
ajst-10992	42	116	has	have	VERB
ajst-10992	42	117	significant	significant	ADJ
ajst-10992	42	118	advantages	advantage	NOUN
ajst-10992	42	119	over	over	ADP
ajst-10992	42	120	offline	offline	ADJ
ajst-10992	42	121	cmm	cmm	NOUN
ajst-10992	42	122	,	,	PUNCT
ajst-10992	42	123	and	and	CCONJ
ajst-10992	42	124	can	can	AUX
ajst-10992	42	125	meet	meet	VERB
ajst-10992	42	126	the	the	DET
ajst-10992	42	127	requirements	requirement	NOUN
ajst-10992	42	128	of	of	ADP
ajst-10992	42	129	process	process	NOUN
ajst-10992	42	130	control	control	NOUN
ajst-10992	42	131	.	.	PUNCT
ajst-10992	43	1	6	6	X
ajst-10992	43	2	.	.	X
ajst-10992	43	3	results	result	NOUN
ajst-10992	43	4	and	and	CCONJ
ajst-10992	43	5	implementation	implementation	VERB
ajst-10992	43	6	the	the	DET
ajst-10992	43	7	online	online	ADJ
ajst-10992	43	8	optical	optical	ADJ
ajst-10992	43	9	confocal	confocal	ADJ
ajst-10992	43	10	thickness	thickness	NOUN
ajst-10992	43	11	gauge	gauge	NOUN
ajst-10992	43	12	developed	develop	VERB
ajst-10992	43	13	by	by	ADP
ajst-10992	43	14	the	the	DET
ajst-10992	43	15	r&d	r&d	NOUN
ajst-10992	43	16	group	group	NOUN
ajst-10992	43	17	has	have	AUX
ajst-10992	43	18	been	be	AUX
ajst-10992	43	19	put	put	VERB
ajst-10992	43	20	into	into	ADP
ajst-10992	43	21	operation	operation	NOUN
ajst-10992	43	22	for	for	ADP
ajst-10992	43	23	one	one	NUM
ajst-10992	43	24	year	year	NOUN
ajst-10992	43	25	,	,	PUNCT
ajst-10992	43	26	and	and	CCONJ
ajst-10992	43	27	the	the	DET
ajst-10992	43	28	operation	operation	NOUN
ajst-10992	43	29	is	be	AUX
ajst-10992	43	30	reliable	reliable	ADJ
ajst-10992	43	31	.	.	PUNCT
ajst-10992	44	1	during	during	ADP
ajst-10992	44	2	the	the	DET
ajst-10992	44	3	operation	operation	NOUN
ajst-10992	44	4	period	period	NOUN
ajst-10992	44	5	,	,	PUNCT
ajst-10992	44	6	the	the	DET
ajst-10992	44	7	thickness	thickness	NOUN
ajst-10992	44	8	of	of	ADP
ajst-10992	44	9	glass	glass	NOUN
ajst-10992	44	10	substrate	substrate	NOUN
ajst-10992	44	11	has	have	AUX
ajst-10992	44	12	been	be	AUX
ajst-10992	44	13	tested	test	VERB
ajst-10992	44	14	by	by	ADP
ajst-10992	44	15	offline	offline	ADJ
ajst-10992	44	16	sampling	sample	VERB
ajst-10992	44	17	for	for	ADP
ajst-10992	44	18	many	many	ADJ
ajst-10992	44	19	times	time	NOUN
ajst-10992	44	20	,	,	PUNCT
ajst-10992	44	21	and	and	CCONJ
ajst-10992	44	22	the	the	DET
ajst-10992	44	23	relative	relative	ADJ
ajst-10992	44	24	standard	standard	ADJ
ajst-10992	44	25	deviation	deviation	NOUN
ajst-10992	44	26	between	between	ADP
ajst-10992	44	27	the	the	DET
ajst-10992	44	28	thickness	thickness	NOUN
ajst-10992	44	29	of	of	ADP
ajst-10992	44	30	glass	glass	NOUN
ajst-10992	44	31	substrate	substrate	NOUN
ajst-10992	44	32	measured	measure	VERB
ajst-10992	44	33	by	by	ADP
ajst-10992	44	34	on	on	ADP
ajst-10992	44	35	-	-	PUNCT
ajst-10992	44	36	line	line	NOUN
ajst-10992	44	37	confocal	confocal	ADJ
ajst-10992	44	38	method	method	NOUN
ajst-10992	44	39	and	and	CCONJ
ajst-10992	44	40	that	that	SCONJ
ajst-10992	44	41	measured	measure	VERB
ajst-10992	44	42	by	by	ADP
ajst-10992	44	43	micrometer	micrometer	NOUN
ajst-10992	44	44	is	be	AUX
ajst-10992	44	45	less	less	ADJ
ajst-10992	44	46	than	than	ADP
ajst-10992	44	47	0.5	0.5	NUM
ajst-10992	44	48	%	%	NOUN
ajst-10992	44	49	.	.	PUNCT
ajst-10992	45	1	this	this	DET
ajst-10992	45	2	technical	technical	ADJ
ajst-10992	45	3	program	program	NOUN
ajst-10992	45	4	can	can	AUX
ajst-10992	45	5	be	be	AUX
ajst-10992	45	6	widely	widely	ADV
ajst-10992	45	7	used	use	VERB
ajst-10992	45	8	in	in	ADP
ajst-10992	45	9	plate	plate	NOUN
ajst-10992	45	10	substrate	substrate	NOUN
ajst-10992	45	11	glass	glass	NOUN
ajst-10992	45	12	thickness	thickness	NOUN
ajst-10992	45	13	measurement	measurement	NOUN
ajst-10992	45	14	.	.	PUNCT
ajst-10992	46	1	references	reference	NOUN
ajst-10992	46	2	[	[	X
ajst-10992	46	3	1	1	X
ajst-10992	46	4	]	]	X
ajst-10992	46	5	huang	huang	PROPN
ajst-10992	46	6	xiaobin	xiaobin	PROPN
ajst-10992	46	7	,	,	PUNCT
ajst-10992	46	8	wang	wang	PROPN
ajst-10992	46	9	ronghua	ronghua	PROPN
ajst-10992	46	10	,	,	PUNCT
ajst-10992	46	11	et	et	PROPN
ajst-10992	46	12	al	al	PROPN
ajst-10992	46	13	.	.	PROPN
ajst-10992	46	14	electronic	electronic	ADJ
ajst-10992	46	15	digital	digital	ADJ
ajst-10992	46	16	display	display	NOUN
ajst-10992	46	17	outer	outer	ADJ
ajst-10992	46	18	diameter	diameter	NOUN
ajst-10992	46	19	micrometer	micrometer	NOUN
ajst-10992	46	20	gb	gb	ADP
ajst-10992	46	21	/	/	SYM
ajst-10992	46	22	t20919	t20919	NOUN
ajst-10992	46	23	-	-	PUNCT
ajst-10992	46	24	2018.2018	2018.2018	NOUN
ajst-10992	46	25	-	-	PUNCT
ajst-10992	46	26	0514	0514	NUM
ajst-10992	46	27	.	.	PUNCT
ajst-10992	47	1	[	[	X
ajst-10992	47	2	2	2	NUM
ajst-10992	47	3	]	]	PUNCT
ajst-10992	47	4	ultrasonic	ultrasonic	ADJ
ajst-10992	47	5	thickness	thickness	NOUN
ajst-10992	47	6	gauge	gauge	NOUN
ajst-10992	47	7	,	,	PUNCT
ajst-10992	47	8	japan	japan	PROPN
ajst-10992	47	9	electromagnetic	electromagnetic	PROPN
ajst-10992	47	10	detector	detector	PROPN
ajst-10992	47	11	co.	co.	PROPN
ajst-10992	47	12	2019	2019	NUM
ajst-10992	47	13	edition	edition	NOUN
ajst-10992	47	14	.	.	PUNCT
ajst-10992	48	1	[	[	X
ajst-10992	48	2	3	3	X
ajst-10992	48	3	]	]	X
ajst-10992	48	4	infrared	infrared	ADJ
ajst-10992	48	5	thickness	thickness	NOUN
ajst-10992	48	6	gauge	gauge	NOUN
ajst-10992	48	7	measurement	measurement	NOUN
ajst-10992	48	8	principles	principle	NOUN
ajst-10992	48	9	https://m.hi1718.com/data/principle/48696.html	https://m.hi1718.com/data/principle/48696.html	PROPN
ajst-10992	48	10	,	,	PUNCT
ajst-10992	48	11	2018	2018	NUM
ajst-10992	48	12	-	-	SYM
ajst-10992	48	13	3	3	NUM
ajst-10992	48	14	-	-	SYM
ajst-10992	48	15	12	12	NUM
ajst-10992	48	16	.	.	PUNCT
ajst-10992	49	1	[	[	X
ajst-10992	49	2	4	4	X
ajst-10992	49	3	]	]	PUNCT
ajst-10992	49	4	laser	laser	NOUN
ajst-10992	49	5	displacement	displacement	ADJ
ajst-10992	49	6	sensor	sensor	NOUN
ajst-10992	49	7	lg	lg	NOUN
ajst-10992	49	8	-	-	ADJ
ajst-10992	49	9	g5000	g5000	ADJ
ajst-10992	49	10	series	series	NOUN
ajst-10992	49	11	.	.	PUNCT
ajst-10992	50	1	keyence(china	keyence(china	PROPN
ajst-10992	50	2	)	)	PUNCT
ajst-10992	51	1	limited.2019	limited.2019	PROPN
ajst-10992	51	2	edition	edition	NOUN
ajst-10992	51	3	.	.	PUNCT
ajst-10992	52	1	[	[	X
ajst-10992	52	2	5	5	NUM
ajst-10992	52	3	]	]	PUNCT
ajst-10992	52	4	color	color	NOUN
ajst-10992	52	5	laser	laser	NOUN
ajst-10992	52	6	coaxial	coaxial	ADJ
ajst-10992	52	7	displacement	displacement	ADJ
ajst-10992	52	8	gauge	gauge	NOUN
ajst-10992	52	9	cl-3000	cl-3000	PROPN
ajst-10992	52	10	series	series	NOUN
ajst-10992	52	11	.	.	PUNCT
ajst-10992	53	1	keyence(china	keyence(china	PROPN
ajst-10992	53	2	)	)	PUNCT
ajst-10992	53	3	ltd.2019	ltd.2019	NUM
ajst-10992	53	4	edition	edition	NOUN
ajst-10992	53	5	.	.	PUNCT