id	sid	tid	token	lemma	pos
ajst-1434	1	1	academic	academic	ADJ
ajst-1434	1	2	journal	journal	NOUN
ajst-1434	1	3	of	of	ADP
ajst-1434	1	4	science	science	NOUN
ajst-1434	1	5	and	and	CCONJ
ajst-1434	1	6	technology	technology	NOUN
ajst-1434	1	7	issn	issn	NOUN
ajst-1434	1	8	:	:	PUNCT
ajst-1434	1	9	2771	2771	NUM
ajst-1434	1	10	-	-	SYM
ajst-1434	1	11	3032	3032	NUM
ajst-1434	1	12	|	|	NOUN
ajst-1434	1	13	vol	vol	NOUN
ajst-1434	1	14	.	.	PROPN
ajst-1434	2	1	2	2	NUM
ajst-1434	2	2	,	,	PUNCT
ajst-1434	2	3	no	no	INTJ
ajst-1434	2	4	.	.	NOUN
ajst-1434	2	5	3	3	NUM
ajst-1434	2	6	,	,	PUNCT
ajst-1434	2	7	2022	2022	NUM
ajst-1434	2	8	4	4	NUM
ajst-1434	2	9	research	research	NOUN
ajst-1434	2	10	progress	progress	NOUN
ajst-1434	2	11	on	on	ADP
ajst-1434	2	12	key	key	ADJ
ajst-1434	2	13	technologies	technology	NOUN
ajst-1434	2	14	of	of	ADP
ajst-1434	2	15	microelectronics	microelectronic	NOUN
ajst-1434	2	16	for	for	ADP
ajst-1434	2	17	industry	industry	NOUN
ajst-1434	2	18	4.0	4.0	NUM
ajst-1434	2	19	yinghao	yinghao	PROPN
ajst-1434	2	20	wang	wang	PROPN
ajst-1434	2	21	united	united	PROPN
ajst-1434	2	22	microelectronics	microelectronics	PROPN
ajst-1434	2	23	center	center	PROPN
ajst-1434	2	24	(	(	PUNCT
ajst-1434	2	25	cumec	cumec	PROPN
ajst-1434	2	26	)	)	PUNCT
ajst-1434	2	27	,	,	PUNCT
ajst-1434	2	28	chongqing	chongqing	PROPN
ajst-1434	2	29	,	,	PUNCT
ajst-1434	2	30	400000	400000	NUM
ajst-1434	2	31	,	,	PUNCT
ajst-1434	2	32	china	china	PROPN
ajst-1434	2	33	abstract	abstract	PROPN
ajst-1434	2	34	:	:	PUNCT
ajst-1434	2	35	with	with	ADP
ajst-1434	2	36	the	the	DET
ajst-1434	2	37	continuous	continuous	ADJ
ajst-1434	2	38	improvement	improvement	NOUN
ajst-1434	2	39	of	of	ADP
ajst-1434	2	40	china	china	PROPN
ajst-1434	2	41	's	's	PART
ajst-1434	2	42	science	science	NOUN
ajst-1434	2	43	and	and	CCONJ
ajst-1434	2	44	technology	technology	NOUN
ajst-1434	2	45	and	and	CCONJ
ajst-1434	2	46	economic	economic	ADJ
ajst-1434	2	47	development	development	NOUN
ajst-1434	2	48	level	level	NOUN
ajst-1434	2	49	,	,	PUNCT
ajst-1434	2	50	automatic	automatic	ADJ
ajst-1434	2	51	control	control	NOUN
ajst-1434	2	52	runs	run	VERB
ajst-1434	2	53	through	through	ADP
ajst-1434	2	54	all	all	DET
ajst-1434	2	55	walks	walk	NOUN
ajst-1434	2	56	of	of	ADP
ajst-1434	2	57	life	life	NOUN
ajst-1434	2	58	in	in	ADP
ajst-1434	2	59	china	china	PROPN
ajst-1434	2	60	,	,	PUNCT
ajst-1434	2	61	and	and	CCONJ
ajst-1434	2	62	the	the	DET
ajst-1434	2	63	industry	industry	NOUN
ajst-1434	2	64	4.0	4.0	NUM
ajst-1434	2	65	era	era	NOUN
ajst-1434	2	66	dominated	dominate	VERB
ajst-1434	2	67	by	by	ADP
ajst-1434	2	68	internet	internet	NOUN
ajst-1434	2	69	of	of	ADP
ajst-1434	2	70	things	thing	NOUN
ajst-1434	2	71	and	and	CCONJ
ajst-1434	2	72	intelligent	intelligent	ADJ
ajst-1434	2	73	manufacturing	manufacturing	NOUN
ajst-1434	2	74	has	have	AUX
ajst-1434	2	75	gradually	gradually	ADV
ajst-1434	2	76	matured	mature	VERB
ajst-1434	2	77	.	.	PUNCT
ajst-1434	3	1	therefore	therefore	ADV
ajst-1434	3	2	,	,	PUNCT
ajst-1434	3	3	according	accord	VERB
ajst-1434	3	4	to	to	ADP
ajst-1434	3	5	the	the	DET
ajst-1434	3	6	changing	change	VERB
ajst-1434	3	7	market	market	NOUN
ajst-1434	3	8	requirements	requirement	NOUN
ajst-1434	3	9	,	,	PUNCT
ajst-1434	3	10	automatic	automatic	ADJ
ajst-1434	3	11	control	control	NOUN
ajst-1434	3	12	requirements	requirement	NOUN
ajst-1434	3	13	have	have	AUX
ajst-1434	3	14	become	become	VERB
ajst-1434	3	15	higher	high	ADJ
ajst-1434	3	16	and	and	CCONJ
ajst-1434	3	17	higher	high	ADJ
ajst-1434	3	18	,	,	PUNCT
ajst-1434	3	19	and	and	CCONJ
ajst-1434	3	20	it	it	PRON
ajst-1434	3	21	is	be	AUX
ajst-1434	3	22	more	more	ADV
ajst-1434	3	23	and	and	CCONJ
ajst-1434	3	24	more	more	ADV
ajst-1434	3	25	common	common	ADJ
ajst-1434	3	26	to	to	PART
ajst-1434	3	27	integrate	integrate	VERB
ajst-1434	3	28	automatic	automatic	ADJ
ajst-1434	3	29	control	control	NOUN
ajst-1434	3	30	technology	technology	NOUN
ajst-1434	3	31	in	in	ADP
ajst-1434	3	32	the	the	DET
ajst-1434	3	33	field	field	NOUN
ajst-1434	3	34	of	of	ADP
ajst-1434	3	35	microelectronics	microelectronic	NOUN
ajst-1434	3	36	.	.	PUNCT
ajst-1434	4	1	with	with	ADP
ajst-1434	4	2	the	the	DET
ajst-1434	4	3	use	use	NOUN
ajst-1434	4	4	of	of	ADP
ajst-1434	4	5	microelectronic	microelectronic	ADJ
ajst-1434	4	6	technology	technology	NOUN
ajst-1434	4	7	,	,	PUNCT
ajst-1434	4	8	electrical	electrical	ADJ
ajst-1434	4	9	control	control	NOUN
ajst-1434	4	10	can	can	AUX
ajst-1434	4	11	be	be	AUX
ajst-1434	4	12	carried	carry	VERB
ajst-1434	4	13	out	out	ADP
ajst-1434	4	14	more	more	ADV
ajst-1434	4	15	accurately	accurately	ADV
ajst-1434	4	16	,	,	PUNCT
ajst-1434	4	17	and	and	CCONJ
ajst-1434	4	18	the	the	DET
ajst-1434	4	19	volume	volume	NOUN
ajst-1434	4	20	of	of	ADP
ajst-1434	4	21	equipment	equipment	NOUN
ajst-1434	4	22	can	can	AUX
ajst-1434	4	23	be	be	AUX
ajst-1434	4	24	reduced	reduce	VERB
ajst-1434	4	25	,	,	PUNCT
ajst-1434	4	26	thus	thus	ADV
ajst-1434	4	27	serving	serve	VERB
ajst-1434	4	28	the	the	DET
ajst-1434	4	29	future	future	ADJ
ajst-1434	4	30	development	development	NOUN
ajst-1434	4	31	of	of	ADP
ajst-1434	4	32	automatic	automatic	ADJ
ajst-1434	4	33	control	control	NOUN
ajst-1434	4	34	field	field	NOUN
ajst-1434	4	35	.	.	PUNCT
ajst-1434	5	1	this	this	DET
ajst-1434	5	2	paper	paper	NOUN
ajst-1434	5	3	analyzes	analyze	VERB
ajst-1434	5	4	the	the	DET
ajst-1434	5	5	key	key	ADJ
ajst-1434	5	6	technology	technology	NOUN
ajst-1434	5	7	of	of	ADP
ajst-1434	5	8	microelectronics	microelectronic	NOUN
ajst-1434	5	9	.	.	PUNCT
ajst-1434	6	1	keywords	keyword	NOUN
ajst-1434	6	2	:	:	PUNCT
ajst-1434	6	3	industry	industry	NOUN
ajst-1434	6	4	4.0	4.0	NUM
ajst-1434	6	5	,	,	PUNCT
ajst-1434	6	6	microelectronics	microelectronic	NOUN
ajst-1434	6	7	,	,	PUNCT
ajst-1434	6	8	the	the	DET
ajst-1434	6	9	key	key	ADJ
ajst-1434	6	10	technology	technology	NOUN
ajst-1434	6	11	.	.	PUNCT
ajst-1434	7	1	1	1	X
ajst-1434	7	2	.	.	X
ajst-1434	7	3	introduction	introduction	NOUN
ajst-1434	7	4	as	as	ADP
ajst-1434	7	5	the	the	DET
ajst-1434	7	6	latest	late	ADJ
ajst-1434	7	7	product	product	NOUN
ajst-1434	7	8	of	of	ADP
ajst-1434	7	9	the	the	DET
ajst-1434	7	10	development	development	NOUN
ajst-1434	7	11	of	of	ADP
ajst-1434	7	12	science	science	NOUN
ajst-1434	7	13	and	and	CCONJ
ajst-1434	7	14	technology	technology	NOUN
ajst-1434	7	15	,	,	PUNCT
ajst-1434	7	16	microelectronic	microelectronic	ADJ
ajst-1434	7	17	technology	technology	NOUN
ajst-1434	7	18	has	have	VERB
ajst-1434	7	19	a	a	DET
ajst-1434	7	20	direct	direct	ADJ
ajst-1434	7	21	and	and	CCONJ
ajst-1434	7	22	important	important	ADJ
ajst-1434	7	23	impact	impact	NOUN
ajst-1434	7	24	on	on	ADP
ajst-1434	7	25	the	the	DET
ajst-1434	7	26	field	field	NOUN
ajst-1434	7	27	of	of	ADP
ajst-1434	7	28	production	production	NOUN
ajst-1434	7	29	and	and	CCONJ
ajst-1434	7	30	life	life	NOUN
ajst-1434	7	31	of	of	ADP
ajst-1434	7	32	human	human	ADJ
ajst-1434	7	33	beings	being	NOUN
ajst-1434	7	34	.	.	PUNCT
ajst-1434	8	1	in	in	ADP
ajst-1434	8	2	the	the	DET
ajst-1434	8	3	late	late	ADJ
ajst-1434	8	4	1940s	1940	NOUN
ajst-1434	8	5	,	,	PUNCT
ajst-1434	8	6	the	the	DET
ajst-1434	8	7	invention	invention	NOUN
ajst-1434	8	8	of	of	ADP
ajst-1434	8	9	the	the	DET
ajst-1434	8	10	transistor	transistor	NOUN
ajst-1434	8	11	made	make	VERB
ajst-1434	8	12	the	the	DET
ajst-1434	8	13	development	development	NOUN
ajst-1434	8	14	of	of	ADP
ajst-1434	8	15	microelectronics	microelectronic	NOUN
ajst-1434	8	16	technology	technology	NOUN
ajst-1434	8	17	into	into	ADP
ajst-1434	8	18	the	the	DET
ajst-1434	8	19	era	era	NOUN
ajst-1434	8	20	.	.	PUNCT
ajst-1434	9	1	after	after	ADP
ajst-1434	9	2	half	half	DET
ajst-1434	9	3	a	a	DET
ajst-1434	9	4	century	century	NOUN
ajst-1434	9	5	of	of	ADP
ajst-1434	9	6	unremitting	unremitting	ADJ
ajst-1434	9	7	efforts	effort	NOUN
ajst-1434	9	8	and	and	CCONJ
ajst-1434	9	9	scientific	scientific	ADJ
ajst-1434	9	10	and	and	CCONJ
ajst-1434	9	11	technological	technological	ADJ
ajst-1434	9	12	innovation	innovation	NOUN
ajst-1434	9	13	,	,	PUNCT
ajst-1434	9	14	modern	modern	ADJ
ajst-1434	9	15	microelectronics	microelectronic	NOUN
ajst-1434	9	16	technology	technology	NOUN
ajst-1434	9	17	has	have	AUX
ajst-1434	9	18	been	be	AUX
ajst-1434	9	19	widely	widely	ADV
ajst-1434	9	20	used	use	VERB
ajst-1434	9	21	in	in	ADP
ajst-1434	9	22	various	various	ADJ
ajst-1434	9	23	fields	field	NOUN
ajst-1434	9	24	.	.	PUNCT
ajst-1434	10	1	microelectronics	microelectronic	NOUN
ajst-1434	10	2	technology	technology	NOUN
ajst-1434	10	3	is	be	AUX
ajst-1434	10	4	not	not	PART
ajst-1434	10	5	only	only	ADV
ajst-1434	10	6	the	the	DET
ajst-1434	10	7	basis	basis	NOUN
ajst-1434	10	8	of	of	ADP
ajst-1434	10	9	scientific	scientific	ADJ
ajst-1434	10	10	development	development	NOUN
ajst-1434	10	11	,	,	PUNCT
ajst-1434	10	12	but	but	CCONJ
ajst-1434	10	13	also	also	ADV
ajst-1434	10	14	the	the	DET
ajst-1434	10	15	high	high	ADJ
ajst-1434	10	16	and	and	CCONJ
ajst-1434	10	17	new	new	ADJ
ajst-1434	10	18	technology	technology	NOUN
ajst-1434	10	19	of	of	ADP
ajst-1434	10	20	the	the	DET
ajst-1434	10	21	times	time	NOUN
ajst-1434	10	22	.	.	PUNCT
ajst-1434	11	1	in	in	ADP
ajst-1434	11	2	the	the	DET
ajst-1434	11	3	era	era	NOUN
ajst-1434	11	4	of	of	ADP
ajst-1434	11	5	industry	industry	NOUN
ajst-1434	11	6	4.0	4.0	NUM
ajst-1434	11	7	,	,	PUNCT
ajst-1434	11	8	the	the	DET
ajst-1434	11	9	development	development	NOUN
ajst-1434	11	10	of	of	ADP
ajst-1434	11	11	microelectronics	microelectronic	NOUN
ajst-1434	11	12	technology	technology	NOUN
ajst-1434	11	13	will	will	AUX
ajst-1434	11	14	establish	establish	VERB
ajst-1434	11	15	a	a	DET
ajst-1434	11	16	new	new	ADJ
ajst-1434	11	17	mode	mode	NOUN
ajst-1434	11	18	of	of	ADP
ajst-1434	11	19	deep	deep	ADJ
ajst-1434	11	20	interaction	interaction	NOUN
ajst-1434	11	21	between	between	ADP
ajst-1434	11	22	human	human	NOUN
ajst-1434	11	23	and	and	CCONJ
ajst-1434	11	24	technology	technology	NOUN
ajst-1434	11	25	,	,	PUNCT
ajst-1434	11	26	to	to	PART
ajst-1434	11	27	ensure	ensure	VERB
ajst-1434	11	28	that	that	SCONJ
ajst-1434	11	29	mechanical	mechanical	ADJ
ajst-1434	11	30	production	production	NOUN
ajst-1434	11	31	meets	meet	VERB
ajst-1434	11	32	the	the	DET
ajst-1434	11	33	actual	actual	ADJ
ajst-1434	11	34	needs	need	NOUN
ajst-1434	11	35	of	of	ADP
ajst-1434	11	36	human	human	ADJ
ajst-1434	11	37	beings	being	NOUN
ajst-1434	11	38	,	,	PUNCT
ajst-1434	11	39	meet	meet	VERB
ajst-1434	11	40	the	the	DET
ajst-1434	11	41	development	development	NOUN
ajst-1434	11	42	and	and	CCONJ
ajst-1434	11	43	change	change	NOUN
ajst-1434	11	44	of	of	ADP
ajst-1434	11	45	the	the	DET
ajst-1434	11	46	market	market	NOUN
ajst-1434	11	47	,	,	PUNCT
ajst-1434	11	48	and	and	CCONJ
ajst-1434	11	49	achieve	achieve	VERB
ajst-1434	11	50	personalized	personalized	ADJ
ajst-1434	11	51	production	production	NOUN
ajst-1434	11	52	and	and	CCONJ
ajst-1434	11	53	manufacturing	manufacturing	NOUN
ajst-1434	11	54	.	.	PUNCT
ajst-1434	12	1	industry	industry	NOUN
ajst-1434	12	2	4.0	4.0	NUM
ajst-1434	12	3	can	can	AUX
ajst-1434	12	4	fully	fully	ADV
ajst-1434	12	5	integrate	integrate	VERB
ajst-1434	12	6	people	people	NOUN
ajst-1434	12	7	,	,	PUNCT
ajst-1434	12	8	it	it	PRON
ajst-1434	12	9	systems	system	NOUN
ajst-1434	12	10	,	,	PUNCT
ajst-1434	12	11	automation	automation	NOUN
ajst-1434	12	12	components	component	NOUN
ajst-1434	12	13	and	and	CCONJ
ajst-1434	12	14	mechanical	mechanical	ADJ
ajst-1434	12	15	information	information	NOUN
ajst-1434	12	16	to	to	PART
ajst-1434	12	17	ensure	ensure	VERB
ajst-1434	12	18	that	that	SCONJ
ajst-1434	12	19	the	the	DET
ajst-1434	12	20	production	production	NOUN
ajst-1434	12	21	of	of	ADP
ajst-1434	12	22	enterprises	enterprise	NOUN
ajst-1434	12	23	is	be	AUX
ajst-1434	12	24	more	more	ADV
ajst-1434	12	25	coordinated	coordinated	ADJ
ajst-1434	12	26	,	,	PUNCT
ajst-1434	12	27	reduce	reduce	VERB
ajst-1434	12	28	the	the	DET
ajst-1434	12	29	consumption	consumption	NOUN
ajst-1434	12	30	of	of	ADP
ajst-1434	12	31	human	human	ADJ
ajst-1434	12	32	and	and	CCONJ
ajst-1434	12	33	material	material	ADJ
ajst-1434	12	34	resources	resource	NOUN
ajst-1434	12	35	and	and	CCONJ
ajst-1434	12	36	financial	financial	ADJ
ajst-1434	12	37	resources	resource	NOUN
ajst-1434	12	38	,	,	PUNCT
ajst-1434	12	39	improve	improve	VERB
ajst-1434	12	40	work	work	NOUN
ajst-1434	12	41	efficiency	efficiency	NOUN
ajst-1434	12	42	and	and	CCONJ
ajst-1434	12	43	enhance	enhance	VERB
ajst-1434	12	44	the	the	DET
ajst-1434	12	45	competitive	competitive	ADJ
ajst-1434	12	46	strength	strength	NOUN
ajst-1434	12	47	of	of	ADP
ajst-1434	12	48	enterprises	enterprise	NOUN
ajst-1434	12	49	.	.	PUNCT
ajst-1434	13	1	the	the	DET
ajst-1434	13	2	emergence	emergence	NOUN
ajst-1434	13	3	of	of	ADP
ajst-1434	13	4	microelectronics	microelectronic	NOUN
ajst-1434	13	5	technology	technology	NOUN
ajst-1434	13	6	has	have	AUX
ajst-1434	13	7	greatly	greatly	ADV
ajst-1434	13	8	promoted	promote	VERB
ajst-1434	13	9	the	the	DET
ajst-1434	13	10	rapid	rapid	ADJ
ajst-1434	13	11	development	development	NOUN
ajst-1434	13	12	of	of	ADP
ajst-1434	13	13	communication	communication	NOUN
ajst-1434	13	14	technology	technology	NOUN
ajst-1434	13	15	,	,	PUNCT
ajst-1434	13	16	telemetry	telemetry	NOUN
ajst-1434	13	17	and	and	CCONJ
ajst-1434	13	18	sensing	sense	VERB
ajst-1434	13	19	technology	technology	NOUN
ajst-1434	13	20	,	,	PUNCT
ajst-1434	13	21	computer	computer	NOUN
ajst-1434	13	22	technology	technology	NOUN
ajst-1434	13	23	,	,	PUNCT
ajst-1434	13	24	aerospace	aerospace	NOUN
ajst-1434	13	25	technology	technology	NOUN
ajst-1434	13	26	,	,	PUNCT
ajst-1434	13	27	network	network	NOUN
ajst-1434	13	28	technology	technology	NOUN
ajst-1434	13	29	and	and	CCONJ
ajst-1434	13	30	household	household	NOUN
ajst-1434	13	31	electrical	electrical	ADJ
ajst-1434	13	32	appliances	appliance	NOUN
ajst-1434	13	33	industry.[1	industry.[1	ADV
ajst-1434	13	34	]	]	X
ajst-1434	13	35	2	2	NUM
ajst-1434	13	36	.	.	NOUN
ajst-1434	13	37	overview	overview	NOUN
ajst-1434	13	38	and	and	CCONJ
ajst-1434	13	39	development	development	NOUN
ajst-1434	13	40	status	status	NOUN
ajst-1434	13	41	of	of	ADP
ajst-1434	13	42	microelectronics	microelectronic	NOUN
ajst-1434	13	43	technology	technology	NOUN
ajst-1434	13	44	the	the	DET
ajst-1434	13	45	development	development	NOUN
ajst-1434	13	46	of	of	ADP
ajst-1434	13	47	microelectronics	microelectronic	NOUN
ajst-1434	13	48	technology	technology	NOUN
ajst-1434	13	49	has	have	AUX
ajst-1434	13	50	greatly	greatly	ADV
ajst-1434	13	51	changed	change	VERB
ajst-1434	13	52	people	people	NOUN
ajst-1434	13	53	's	's	PART
ajst-1434	13	54	life	life	NOUN
ajst-1434	13	55	style	style	NOUN
ajst-1434	13	56	.	.	PUNCT
ajst-1434	14	1	the	the	DET
ajst-1434	14	2	core	core	NOUN
ajst-1434	14	3	content	content	NOUN
ajst-1434	14	4	of	of	ADP
ajst-1434	14	5	microelectronics	microelectronic	NOUN
ajst-1434	14	6	technology	technology	NOUN
ajst-1434	14	7	lies	lie	VERB
ajst-1434	14	8	in	in	ADP
ajst-1434	14	9	the	the	DET
ajst-1434	14	10	design	design	NOUN
ajst-1434	14	11	and	and	CCONJ
ajst-1434	14	12	manufacture	manufacture	NOUN
ajst-1434	14	13	of	of	ADP
ajst-1434	14	14	integrated	integrated	ADJ
ajst-1434	14	15	circuits	circuit	NOUN
ajst-1434	14	16	.	.	PUNCT
ajst-1434	15	1	the	the	DET
ajst-1434	15	2	development	development	NOUN
ajst-1434	15	3	of	of	ADP
ajst-1434	15	4	integrated	integrated	ADJ
ajst-1434	15	5	circuits	circuit	NOUN
ajst-1434	15	6	is	be	AUX
ajst-1434	15	7	the	the	DET
ajst-1434	15	8	continuous	continuous	ADJ
ajst-1434	15	9	evolution	evolution	NOUN
ajst-1434	15	10	of	of	ADP
ajst-1434	15	11	semiconductor	semiconductor	NOUN
ajst-1434	15	12	devices	device	NOUN
ajst-1434	15	13	.	.	PUNCT
ajst-1434	16	1	microelectronic	microelectronic	ADJ
ajst-1434	16	2	technology	technology	NOUN
ajst-1434	16	3	has	have	VERB
ajst-1434	16	4	advantages	advantage	NOUN
ajst-1434	16	5	and	and	CCONJ
ajst-1434	16	6	characteristics	characteristic	NOUN
ajst-1434	16	7	that	that	SCONJ
ajst-1434	16	8	traditional	traditional	ADJ
ajst-1434	16	9	electronic	electronic	ADJ
ajst-1434	16	10	technology	technology	NOUN
ajst-1434	16	11	does	do	AUX
ajst-1434	16	12	not	not	PART
ajst-1434	16	13	have	have	VERB
ajst-1434	16	14	:	:	PUNCT
ajst-1434	16	15	microelectronic	microelectronic	ADJ
ajst-1434	16	16	technology	technology	NOUN
ajst-1434	16	17	mainly	mainly	ADV
ajst-1434	16	18	realizes	realize	VERB
ajst-1434	16	19	information	information	NOUN
ajst-1434	16	20	processing	processing	NOUN
ajst-1434	16	21	or	or	CCONJ
ajst-1434	16	22	information	information	NOUN
ajst-1434	16	23	processing	processing	NOUN
ajst-1434	16	24	through	through	ADP
ajst-1434	16	25	the	the	DET
ajst-1434	16	26	microscopic	microscopic	ADJ
ajst-1434	16	27	electron	electron	NOUN
ajst-1434	16	28	movement	movement	NOUN
ajst-1434	16	29	in	in	ADP
ajst-1434	16	30	the	the	DET
ajst-1434	16	31	solid	solid	ADJ
ajst-1434	16	32	;	;	PUNCT
ajst-1434	16	33	microelectronic	microelectronic	ADJ
ajst-1434	16	34	signal	signal	NOUN
ajst-1434	16	35	transmission	transmission	NOUN
ajst-1434	16	36	can	can	AUX
ajst-1434	16	37	be	be	AUX
ajst-1434	16	38	carried	carry	VERB
ajst-1434	16	39	out	out	ADP
ajst-1434	16	40	on	on	ADP
ajst-1434	16	41	a	a	DET
ajst-1434	16	42	very	very	ADV
ajst-1434	16	43	small	small	ADJ
ajst-1434	16	44	scale	scale	NOUN
ajst-1434	16	45	;	;	PUNCT
ajst-1434	16	46	microelectronic	microelectronic	ADJ
ajst-1434	16	47	technology	technology	NOUN
ajst-1434	16	48	can	can	AUX
ajst-1434	16	49	integrate	integrate	VERB
ajst-1434	16	50	a	a	DET
ajst-1434	16	51	subsystem	subsystem	NOUN
ajst-1434	16	52	or	or	CCONJ
ajst-1434	16	53	electronic	electronic	ADJ
ajst-1434	16	54	functional	functional	ADJ
ajst-1434	16	55	component	component	NOUN
ajst-1434	16	56	into	into	ADP
ajst-1434	16	57	the	the	DET
ajst-1434	16	58	chip	chip	NOUN
ajst-1434	16	59	,	,	PUNCT
ajst-1434	16	60	which	which	PRON
ajst-1434	16	61	has	have	VERB
ajst-1434	16	62	higher	high	ADJ
ajst-1434	16	63	integration	integration	NOUN
ajst-1434	16	64	and	and	CCONJ
ajst-1434	16	65	more	more	ADV
ajst-1434	16	66	comprehensive	comprehensive	ADJ
ajst-1434	16	67	functionality.[2	functionality.[2	NOUN
ajst-1434	16	68	]	]	X
ajst-1434	16	69	microelectronics	microelectronic	NOUN
ajst-1434	16	70	can	can	AUX
ajst-1434	16	71	work	work	VERB
ajst-1434	16	72	in	in	ADP
ajst-1434	16	73	lattice	lattice	NOUN
ajst-1434	16	74	-	-	PUNCT
ajst-1434	16	75	level	level	NOUN
ajst-1434	16	76	microregions	microregion	NOUN
ajst-1434	16	77	.	.	PUNCT
ajst-1434	17	1	the	the	DET
ajst-1434	17	2	importance	importance	NOUN
ajst-1434	17	3	of	of	ADP
ajst-1434	17	4	microelectronics	microelectronic	NOUN
ajst-1434	17	5	technology	technology	NOUN
ajst-1434	17	6	is	be	AUX
ajst-1434	17	7	increasing	increase	VERB
ajst-1434	17	8	.	.	PUNCT
ajst-1434	18	1	at	at	ADP
ajst-1434	18	2	present	present	ADJ
ajst-1434	18	3	,	,	PUNCT
ajst-1434	18	4	all	all	DET
ajst-1434	18	5	countries	country	NOUN
ajst-1434	18	6	in	in	ADP
ajst-1434	18	7	the	the	DET
ajst-1434	18	8	world	world	NOUN
ajst-1434	18	9	are	be	AUX
ajst-1434	18	10	actively	actively	ADV
ajst-1434	18	11	laying	lay	VERB
ajst-1434	18	12	out	out	ADP
ajst-1434	18	13	efforts	effort	NOUN
ajst-1434	18	14	,	,	PUNCT
ajst-1434	18	15	including	include	VERB
ajst-1434	18	16	eda	eda	PROPN
ajst-1434	18	17	design	design	NOUN
ajst-1434	18	18	tools	tool	NOUN
ajst-1434	18	19	,	,	PUNCT
ajst-1434	18	20	core	core	NOUN
ajst-1434	18	21	ip	ip	NOUN
ajst-1434	18	22	,	,	PUNCT
ajst-1434	18	23	cutting	cut	VERB
ajst-1434	18	24	-	-	PUNCT
ajst-1434	18	25	edge	edge	NOUN
ajst-1434	18	26	materials	material	NOUN
ajst-1434	18	27	,	,	PUNCT
ajst-1434	18	28	high	high	ADJ
ajst-1434	18	29	-	-	PUNCT
ajst-1434	18	30	end	end	NOUN
ajst-1434	18	31	semiconductor	semiconductor	NOUN
ajst-1434	18	32	manufacturing	manufacturing	NOUN
ajst-1434	18	33	equipment	equipment	NOUN
ajst-1434	18	34	and	and	CCONJ
ajst-1434	18	35	so	so	ADV
ajst-1434	18	36	on.[3	on.[3	PROPN
ajst-1434	18	37	]	]	PUNCT
ajst-1434	18	38	in	in	ADP
ajst-1434	18	39	march	march	PROPN
ajst-1434	18	40	2021	2021	NUM
ajst-1434	18	41	,	,	PUNCT
ajst-1434	18	42	the	the	DET
ajst-1434	18	43	european	european	PROPN
ajst-1434	18	44	union	union	PROPN
ajst-1434	18	45	released	release	VERB
ajst-1434	18	46	"	"	PUNCT
ajst-1434	18	47	digital	digital	ADJ
ajst-1434	18	48	compass	compass	NOUN
ajst-1434	18	49	2030	2030	NUM
ajst-1434	18	50	:	:	PUNCT
ajst-1434	18	51	a	a	DET
ajst-1434	18	52	decade	decade	NOUN
ajst-1434	18	53	of	of	ADP
ajst-1434	18	54	digitalization	digitalization	NOUN
ajst-1434	18	55	in	in	ADP
ajst-1434	18	56	europe	europe	PROPN
ajst-1434	18	57	"	"	PUNCT
ajst-1434	18	58	,	,	PUNCT
ajst-1434	18	59	proposing	propose	VERB
ajst-1434	18	60	the	the	DET
ajst-1434	18	61	latest	late	ADJ
ajst-1434	18	62	goal	goal	NOUN
ajst-1434	18	63	for	for	ADP
ajst-1434	18	64	the	the	DET
ajst-1434	18	65	development	development	NOUN
ajst-1434	18	66	of	of	ADP
ajst-1434	18	67	the	the	DET
ajst-1434	18	68	next	next	ADJ
ajst-1434	18	69	10	10	NUM
ajst-1434	18	70	years	year	NOUN
ajst-1434	18	71	:	:	PUNCT
ajst-1434	18	72	"	"	PUNCT
ajst-1434	18	73	by	by	ADP
ajst-1434	18	74	2030	2030	NUM
ajst-1434	18	75	,	,	PUNCT
ajst-1434	18	76	the	the	DET
ajst-1434	18	77	gross	gross	ADJ
ajst-1434	18	78	value	value	NOUN
ajst-1434	18	79	of	of	ADP
ajst-1434	18	80	advanced	advanced	ADJ
ajst-1434	18	81	and	and	CCONJ
ajst-1434	18	82	sustainable	sustainable	ADJ
ajst-1434	18	83	semiconductors	semiconductor	NOUN
ajst-1434	18	84	in	in	ADP
ajst-1434	18	85	europe	europe	PROPN
ajst-1434	18	86	will	will	AUX
ajst-1434	18	87	account	account	VERB
ajst-1434	18	88	for	for	ADP
ajst-1434	18	89	at	at	ADV
ajst-1434	18	90	least	least	ADV
ajst-1434	18	91	20	20	NUM
ajst-1434	18	92	%	%	NOUN
ajst-1434	18	93	of	of	ADP
ajst-1434	18	94	the	the	DET
ajst-1434	18	95	global	global	ADJ
ajst-1434	18	96	gross	gross	ADJ
ajst-1434	18	97	product	product	NOUN
ajst-1434	18	98	;	;	PUNCT
ajst-1434	18	99	conquer	conquer	VERB
ajst-1434	18	100	2	2	NUM
ajst-1434	18	101	nm	nm	NOUN
ajst-1434	18	102	process	process	NOUN
ajst-1434	18	103	,	,	PUNCT
ajst-1434	18	104	energy	energy	NOUN
ajst-1434	18	105	efficiency	efficiency	NOUN
ajst-1434	18	106	at	at	ADP
ajst-1434	18	107	least	least	ADV
ajst-1434	18	108	10	10	NUM
ajst-1434	18	109	times	time	NOUN
ajst-1434	18	110	"	"	PUNCT
ajst-1434	18	111	;	;	PUNCT
ajst-1434	18	112	in	in	ADP
ajst-1434	18	113	may	may	PROPN
ajst-1434	18	114	,	,	PUNCT
ajst-1434	18	115	the	the	DET
ajst-1434	18	116	south	south	ADJ
ajst-1434	18	117	korean	korean	ADJ
ajst-1434	18	118	government	government	NOUN
ajst-1434	18	119	and	and	CCONJ
ajst-1434	18	120	chip	chip	NOUN
ajst-1434	18	121	companies	company	NOUN
ajst-1434	18	122	announced	announce	VERB
ajst-1434	18	123	plans	plan	NOUN
ajst-1434	18	124	to	to	PART
ajst-1434	18	125	spend	spend	VERB
ajst-1434	18	126	about	about	ADP
ajst-1434	18	127	510	510	NUM
ajst-1434	18	128	trillion	trillion	NUM
ajst-1434	18	129	won	won	NOUN
ajst-1434	18	130	(	(	PUNCT
ajst-1434	18	131	2.9	2.9	NUM
ajst-1434	18	132	trillion	trillion	NUM
ajst-1434	18	133	yuan	yuan	NOUN
ajst-1434	18	134	)	)	PUNCT
ajst-1434	18	135	over	over	ADP
ajst-1434	18	136	the	the	DET
ajst-1434	18	137	next	next	ADJ
ajst-1434	18	138	decade	decade	NOUN
ajst-1434	18	139	to	to	PART
ajst-1434	18	140	build	build	VERB
ajst-1434	18	141	the	the	DET
ajst-1434	18	142	world	world	NOUN
ajst-1434	18	143	's	's	PART
ajst-1434	18	144	largest	large	ADJ
ajst-1434	18	145	chip	chip	NOUN
ajst-1434	18	146	manufacturing	manufacturing	NOUN
ajst-1434	18	147	base	base	NOUN
ajst-1434	18	148	in	in	ADP
ajst-1434	18	149	a	a	DET
ajst-1434	18	150	bid	bid	NOUN
ajst-1434	18	151	to	to	PART
ajst-1434	18	152	become	become	VERB
ajst-1434	18	153	the	the	DET
ajst-1434	18	154	world	world	NOUN
ajst-1434	18	155	's	's	PART
ajst-1434	18	156	leading	lead	VERB
ajst-1434	18	157	chipmaker	chipmaker	NOUN
ajst-1434	18	158	.	.	PUNCT
ajst-1434	19	1	in	in	ADP
ajst-1434	19	2	june	june	PROPN
ajst-1434	19	3	,	,	PUNCT
ajst-1434	19	4	the	the	DET
ajst-1434	19	5	us	us	PROPN
ajst-1434	19	6	senate	senate	PROPN
ajst-1434	19	7	voted	vote	VERB
ajst-1434	19	8	to	to	PART
ajst-1434	19	9	pass	pass	VERB
ajst-1434	19	10	the	the	DET
ajst-1434	19	11	american	american	ADJ
ajst-1434	19	12	innovation	innovation	NOUN
ajst-1434	19	13	and	and	CCONJ
ajst-1434	19	14	competition	competition	NOUN
ajst-1434	19	15	act	act	NOUN
ajst-1434	19	16	of	of	ADP
ajst-1434	19	17	2021	2021	NUM
ajst-1434	19	18	,	,	PUNCT
ajst-1434	19	19	allocating	allocate	VERB
ajst-1434	19	20	52.7	52.7	NUM
ajst-1434	19	21	billion	billion	NUM
ajst-1434	19	22	us	us	PROPN
ajst-1434	19	23	dollars	dollar	NOUN
ajst-1434	19	24	to	to	PART
ajst-1434	19	25	set	set	VERB
ajst-1434	19	26	up	up	ADP
ajst-1434	19	27	the	the	DET
ajst-1434	19	28	"	"	PUNCT
ajst-1434	19	29	us	us	PROPN
ajst-1434	19	30	chip	chip	NOUN
ajst-1434	19	31	fund	fund	NOUN
ajst-1434	19	32	"	"	PUNCT
ajst-1434	19	33	,	,	PUNCT
ajst-1434	19	34	"	"	PUNCT
ajst-1434	19	35	us	us	PROPN
ajst-1434	19	36	chip	chip	NOUN
ajst-1434	19	37	defense	defense	PROPN
ajst-1434	19	38	fund	fund	PROPN
ajst-1434	19	39	"	"	PUNCT
ajst-1434	19	40	and	and	CCONJ
ajst-1434	19	41	"	"	PUNCT
ajst-1434	19	42	us	us	PROPN
ajst-1434	19	43	chip	chip	NOUN
ajst-1434	19	44	international	international	ADJ
ajst-1434	19	45	technology	technology	NOUN
ajst-1434	19	46	security	security	NOUN
ajst-1434	19	47	and	and	CCONJ
ajst-1434	19	48	innovation	innovation	NOUN
ajst-1434	19	49	fund",[4	fund",[4	PROPN
ajst-1434	19	50	]	]	PUNCT
ajst-1434	19	51	to	to	PART
ajst-1434	19	52	stimulate	stimulate	VERB
ajst-1434	19	53	the	the	DET
ajst-1434	19	54	research	research	NOUN
ajst-1434	19	55	and	and	CCONJ
ajst-1434	19	56	development	development	NOUN
ajst-1434	19	57	and	and	CCONJ
ajst-1434	19	58	production	production	NOUN
ajst-1434	19	59	of	of	ADP
ajst-1434	19	60	chips	chip	NOUN
ajst-1434	19	61	in	in	ADP
ajst-1434	19	62	the	the	DET
ajst-1434	19	63	us	us	PROPN
ajst-1434	19	64	.	.	PUNCT
ajst-1434	20	1	in	in	ADP
ajst-1434	20	2	september	september	PROPN
ajst-1434	20	3	the	the	DET
ajst-1434	20	4	european	european	PROPN
ajst-1434	20	5	union	union	PROPN
ajst-1434	20	6	announced	announce	VERB
ajst-1434	20	7	a	a	DET
ajst-1434	20	8	new	new	ADJ
ajst-1434	20	9	european	european	PROPN
ajst-1434	20	10	chip	chip	PROPN
ajst-1434	20	11	act	act	PROPN
ajst-1434	20	12	;	;	PUNCT
ajst-1434	20	13	in	in	ADP
ajst-1434	20	14	november	november	PROPN
ajst-1434	20	15	,	,	PUNCT
ajst-1434	20	16	japan	japan	PROPN
ajst-1434	20	17	's	's	PART
ajst-1434	20	18	ministry	ministry	PROPN
ajst-1434	20	19	of	of	ADP
ajst-1434	20	20	economy	economy	NOUN
ajst-1434	20	21	,	,	PUNCT
ajst-1434	20	22	trade	trade	NOUN
ajst-1434	20	23	and	and	CCONJ
ajst-1434	20	24	industry	industry	NOUN
ajst-1434	20	25	held	hold	VERB
ajst-1434	20	26	the	the	DET
ajst-1434	20	27	fourth	fourth	ADJ
ajst-1434	20	28	"	"	PUNCT
ajst-1434	20	29	semiconductor	semiconductor	NOUN
ajst-1434	20	30	and	and	CCONJ
ajst-1434	20	31	digital	digital	ADJ
ajst-1434	20	32	industry	industry	NOUN
ajst-1434	20	33	strategy	strategy	NOUN
ajst-1434	20	34	seminar	seminar	NOUN
ajst-1434	20	35	"	"	PUNCT
ajst-1434	20	36	and	and	CCONJ
ajst-1434	20	37	put	put	VERB
ajst-1434	20	38	forward	forward	ADV
ajst-1434	20	39	the	the	DET
ajst-1434	20	40	"	"	PUNCT
ajst-1434	20	41	three	three	NUM
ajst-1434	20	42	-	-	PUNCT
ajst-1434	20	43	step	step	NOUN
ajst-1434	20	44	"	"	PUNCT
ajst-1434	20	45	implementation	implementation	NOUN
ajst-1434	20	46	plan	plan	NOUN
ajst-1434	20	47	to	to	PART
ajst-1434	20	48	strengthen	strengthen	VERB
ajst-1434	20	49	the	the	DET
ajst-1434	20	50	foundation	foundation	NOUN
ajst-1434	20	51	of	of	ADP
ajst-1434	20	52	japan	japan	PROPN
ajst-1434	20	53	's	's	PART
ajst-1434	20	54	semiconductor	semiconductor	NOUN
ajst-1434	20	55	industry	industry	NOUN
ajst-1434	20	56	.	.	PUNCT
ajst-1434	21	1	thanks	thank	NOUN
ajst-1434	21	2	to	to	ADP
ajst-1434	21	3	the	the	DET
ajst-1434	21	4	active	active	ADJ
ajst-1434	21	5	efforts	effort	NOUN
ajst-1434	21	6	of	of	ADP
ajst-1434	21	7	all	all	DET
ajst-1434	21	8	countries	country	NOUN
ajst-1434	21	9	,	,	PUNCT
ajst-1434	21	10	important	important	ADJ
ajst-1434	21	11	breakthroughs	breakthrough	NOUN
ajst-1434	21	12	have	have	AUX
ajst-1434	21	13	been	be	AUX
ajst-1434	21	14	made	make	VERB
ajst-1434	21	15	in	in	ADP
ajst-1434	21	16	some	some	DET
ajst-1434	21	17	key	key	ADJ
ajst-1434	21	18	technologies	technology	NOUN
ajst-1434	21	19	.	.	PUNCT
ajst-1434	22	1	at	at	ADP
ajst-1434	22	2	the	the	DET
ajst-1434	22	3	massachusetts	massachusetts	PROPN
ajst-1434	22	4	institute	institute	PROPN
ajst-1434	22	5	of	of	ADP
ajst-1434	22	6	technology	technology	NOUN
ajst-1434	22	7	with	with	ADP
ajst-1434	22	8	the	the	DET
ajst-1434	22	9	core	core	ADJ
ajst-1434	22	10	firm	firm	ADJ
ajst-1434	22	11	cooperation	cooperation	NOUN
ajst-1434	22	12	,	,	PUNCT
ajst-1434	22	13	realize	realize	VERB
ajst-1434	22	14	the	the	DET
ajst-1434	22	15	whole	whole	ADJ
ajst-1434	22	16	breakthrough	breakthrough	NOUN
ajst-1434	22	17	siliconbased	siliconbase	VERB
ajst-1434	22	18	optoelectronic	optoelectronic	ADJ
ajst-1434	22	19	integration	integration	NOUN
ajst-1434	22	20	,	,	PUNCT
ajst-1434	22	21	design	design	VERB
ajst-1434	22	22	a	a	DET
ajst-1434	22	23	micron	micron	NOUN
ajst-1434	22	24	grade	grade	NOUN
ajst-1434	22	25	size	size	NOUN
ajst-1434	22	26	forward	forward	ADV
ajst-1434	22	27	biased	bias	VERB
ajst-1434	22	28	all	all	DET
ajst-1434	22	29	silicon	silicon	NOUN
ajst-1434	22	30	-	-	PUNCT
ajst-1434	22	31	based	base	VERB
ajst-1434	22	32	light	light	ADJ
ajst-1434	22	33	emitting	emit	VERB
ajst-1434	22	34	diode	diode	NOUN
ajst-1434	22	35	(	(	PUNCT
ajst-1434	22	36	led	lead	VERB
ajst-1434	22	37	)	)	PUNCT
ajst-1434	22	38	,	,	PUNCT
ajst-1434	22	39	on	on	ADP
ajst-1434	22	40	the	the	DET
ajst-1434	22	41	basis	basis	NOUN
ajst-1434	22	42	of	of	ADP
ajst-1434	22	43	fully	fully	ADV
ajst-1434	22	44	integrated	integrate	VERB
ajst-1434	22	45	in	in	ADP
ajst-1434	22	46	the	the	DET
ajst-1434	22	47	55	55	NUM
ajst-1434	22	48	nm	nm	ADJ
ajst-1434	22	49	commercial	commercial	ADJ
ajst-1434	22	50	chip	chip	NOUN
ajst-1434	22	51	to	to	PART
ajst-1434	22	52	realize	realize	VERB
ajst-1434	22	53	the	the	DET
ajst-1434	22	54	low	low	ADJ
ajst-1434	22	55	voltage	voltage	NOUN
ajst-1434	22	56	,	,	PUNCT
ajst-1434	22	57	high	high	ADJ
ajst-1434	22	58	speed	speed	NOUN
ajst-1434	22	59	highlighting	highlight	VERB
ajst-1434	22	60	the	the	DET
ajst-1434	22	61	near	near	ADJ
ajst-1434	22	62	5	5	NUM
ajst-1434	22	63	infrared	infrared	ADJ
ajst-1434	22	64	light	light	NOUN
ajst-1434	22	65	,	,	PUNCT
ajst-1434	22	66	its	its	PRON
ajst-1434	22	67	luminous	luminous	ADJ
ajst-1434	22	68	intensity	intensity	NOUN
ajst-1434	22	69	modulation	modulation	NOUN
ajst-1434	22	70	and	and	CCONJ
ajst-1434	22	71	demodulation	demodulation	NOUN
ajst-1434	22	72	speed	speed	NOUN
ajst-1434	22	73	can	can	AUX
ajst-1434	22	74	reach	reach	VERB
ajst-1434	22	75	more	more	ADJ
ajst-1434	22	76	than	than	ADP
ajst-1434	22	77	ten	ten	NUM
ajst-1434	22	78	times	time	NOUN
ajst-1434	22	79	the	the	DET
ajst-1434	22	80	previous	previous	ADJ
ajst-1434	22	81	record	record	NOUN
ajst-1434	22	82	at	at	ADP
ajst-1434	22	83	the	the	DET
ajst-1434	22	84	same	same	ADJ
ajst-1434	22	85	time	time	NOUN
ajst-1434	22	86	.	.	PUNCT
ajst-1434	23	1	the	the	DET
ajst-1434	23	2	national	national	PROPN
ajst-1434	23	3	institute	institute	PROPN
ajst-1434	23	4	of	of	ADP
ajst-1434	23	5	standards	standard	NOUN
ajst-1434	23	6	and	and	CCONJ
ajst-1434	23	7	technology	technology	NOUN
ajst-1434	23	8	(	(	PUNCT
ajst-1434	23	9	nist	nist	NOUN
ajst-1434	23	10	)	)	PUNCT
ajst-1434	23	11	,	,	PUNCT
ajst-1434	23	12	in	in	ADP
ajst-1434	23	13	collaboration	collaboration	NOUN
ajst-1434	23	14	with	with	ADP
ajst-1434	23	15	a	a	DET
ajst-1434	23	16	canadian	canadian	ADJ
ajst-1434	23	17	company	company	NOUN
ajst-1434	23	18	,	,	PUNCT
ajst-1434	23	19	has	have	AUX
ajst-1434	23	20	developed	develop	VERB
ajst-1434	23	21	a	a	DET
ajst-1434	23	22	programmable	programmable	ADJ
ajst-1434	23	23	optical	optical	ADJ
ajst-1434	23	24	quantum	quantum	NOUN
ajst-1434	23	25	chip	chip	NOUN
ajst-1434	23	26	that	that	PRON
ajst-1434	23	27	works	work	VERB
ajst-1434	23	28	with	with	ADP
ajst-1434	23	29	a	a	DET
ajst-1434	23	30	microscopic	microscopic	ADJ
ajst-1434	23	31	resonator	resonator	NOUN
ajst-1434	23	32	at	at	ADP
ajst-1434	23	33	room	room	NOUN
ajst-1434	23	34	temperature	temperature	NOUN
ajst-1434	23	35	and	and	CCONJ
ajst-1434	23	36	performs	perform	VERB
ajst-1434	23	37	continuously	continuously	ADV
ajst-1434	23	38	variable	variable	ADJ
ajst-1434	23	39	quantum	quantum	ADJ
ajst-1434	23	40	calculations	calculation	NOUN
ajst-1434	23	41	;	;	PUNCT
ajst-1434	23	42	cerabras	cerabra	NOUN
ajst-1434	23	43	has	have	AUX
ajst-1434	23	44	launched	launch	VERB
ajst-1434	23	45	a	a	DET
ajst-1434	23	46	7	7	NUM
ajst-1434	23	47	nm	nm	NOUN
ajst-1434	23	48	ai	ai	VERB
ajst-1434	23	49	chip	chip	NOUN
ajst-1434	23	50	called	call	VERB
ajst-1434	23	51	waferscaleengine2	waferscaleengine2	NOUN
ajst-1434	23	52	with	with	ADP
ajst-1434	23	53	2.6	2.6	NUM
ajst-1434	23	54	trillion	trillion	NUM
ajst-1434	23	55	transistors	transistor	NOUN
ajst-1434	23	56	to	to	PART
ajst-1434	23	57	process	process	VERB
ajst-1434	23	58	information	information	NOUN
ajst-1434	23	59	faster	fast	ADV
ajst-1434	23	60	and	and	CCONJ
ajst-1434	23	61	speed	speed	VERB
ajst-1434	23	62	up	up	ADP
ajst-1434	23	63	ai	ai	PRON
ajst-1434	23	64	computing	compute	VERB
ajst-1434	23	65	.	.	PUNCT
ajst-1434	24	1	ibm	ibm	PROPN
ajst-1434	24	2	released	release	VERB
ajst-1434	24	3	the	the	DET
ajst-1434	24	4	world	world	NOUN
ajst-1434	24	5	's	's	PART
ajst-1434	24	6	first	first	ADJ
ajst-1434	24	7	2	2	NUM
ajst-1434	24	8	nm	nm	NOUN
ajst-1434	24	9	chip	chip	NOUN
ajst-1434	24	10	manufacturing	manufacturing	NOUN
ajst-1434	24	11	process	process	NOUN
ajst-1434	24	12	,	,	PUNCT
ajst-1434	24	13	which	which	PRON
ajst-1434	24	14	integrates	integrate	VERB
ajst-1434	24	15	333	333	NUM
ajst-1434	24	16	million	million	NUM
ajst-1434	24	17	transistors	transistor	NOUN
ajst-1434	24	18	per	per	ADP
ajst-1434	24	19	square	square	ADJ
ajst-1434	24	20	millimeter	millimeter	NOUN
ajst-1434	24	21	.	.	PUNCT
ajst-1434	25	1	compared	compare	VERB
ajst-1434	25	2	with	with	ADP
ajst-1434	25	3	7	7	NUM
ajst-1434	25	4	nm	nm	NOUN
ajst-1434	25	5	chip	chip	NOUN
ajst-1434	25	6	,	,	PUNCT
ajst-1434	25	7	the	the	DET
ajst-1434	25	8	performance	performance	NOUN
ajst-1434	25	9	of	of	ADP
ajst-1434	25	10	the	the	DET
ajst-1434	25	11	same	same	ADJ
ajst-1434	25	12	power	power	NOUN
ajst-1434	25	13	is	be	AUX
ajst-1434	25	14	improved	improve	VERB
ajst-1434	25	15	by	by	ADP
ajst-1434	25	16	45	45	NUM
ajst-1434	25	17	%	%	NOUN
ajst-1434	25	18	,	,	PUNCT
ajst-1434	25	19	and	and	CCONJ
ajst-1434	25	20	the	the	DET
ajst-1434	25	21	power	power	NOUN
ajst-1434	25	22	consumption	consumption	NOUN
ajst-1434	25	23	is	be	AUX
ajst-1434	25	24	reduced	reduce	VERB
ajst-1434	25	25	by	by	ADP
ajst-1434	25	26	75	75	NUM
ajst-1434	25	27	%	%	NOUN
ajst-1434	25	28	.	.	PUNCT
ajst-1434	26	1	it	it	PRON
ajst-1434	26	2	is	be	AUX
ajst-1434	26	3	the	the	DET
ajst-1434	26	4	most	most	ADV
ajst-1434	26	5	integrated	integrated	ADJ
ajst-1434	26	6	and	and	CCONJ
ajst-1434	26	7	powerful	powerful	ADJ
ajst-1434	26	8	chip	chip	NOUN
ajst-1434	26	9	to	to	ADP
ajst-1434	26	10	date.[5	date.[5	ADV
ajst-1434	26	11	]	]	X
ajst-1434	26	12	3	3	X
ajst-1434	26	13	.	.	PUNCT
ajst-1434	26	14	research	research	NOUN
ajst-1434	26	15	trends	trend	NOUN
ajst-1434	26	16	of	of	ADP
ajst-1434	26	17	key	key	ADJ
ajst-1434	26	18	microelectronics	microelectronic	NOUN
ajst-1434	26	19	technologies	technology	NOUN
ajst-1434	26	20	for	for	ADP
ajst-1434	26	21	industry	industry	NOUN
ajst-1434	26	22	4.0	4.0	NUM
ajst-1434	26	23	3.1	3.1	NUM
ajst-1434	26	24	.	.	PUNCT
ajst-1434	27	1	new	new	ADJ
ajst-1434	27	2	materials	material	NOUN
ajst-1434	27	3	and	and	CCONJ
ajst-1434	27	4	new	new	ADJ
ajst-1434	27	5	architectures	architecture	NOUN
ajst-1434	27	6	become	become	VERB
ajst-1434	27	7	the	the	DET
ajst-1434	27	8	focus	focus	NOUN
ajst-1434	27	9	of	of	ADP
ajst-1434	27	10	prospective	prospective	ADJ
ajst-1434	27	11	research	research	NOUN
ajst-1434	27	12	with	with	ADP
ajst-1434	27	13	the	the	DET
ajst-1434	27	14	development	development	NOUN
ajst-1434	27	15	of	of	ADP
ajst-1434	27	16	process	process	NOUN
ajst-1434	27	17	technology	technology	NOUN
ajst-1434	27	18	,	,	PUNCT
ajst-1434	27	19	transistor	transistor	NOUN
ajst-1434	27	20	size	size	NOUN
ajst-1434	27	21	has	have	AUX
ajst-1434	27	22	approached	approach	VERB
ajst-1434	27	23	the	the	DET
ajst-1434	27	24	technological	technological	ADJ
ajst-1434	27	25	limit	limit	NOUN
ajst-1434	27	26	and	and	CCONJ
ajst-1434	27	27	physical	physical	ADJ
ajst-1434	27	28	limit	limit	NOUN
ajst-1434	27	29	,	,	PUNCT
ajst-1434	27	30	further	further	ADJ
ajst-1434	27	31	miniaturization	miniaturization	NOUN
ajst-1434	27	32	has	have	AUX
ajst-1434	27	33	been	be	AUX
ajst-1434	27	34	difficult	difficult	ADJ
ajst-1434	27	35	to	to	PART
ajst-1434	27	36	sustain	sustain	VERB
ajst-1434	27	37	,	,	PUNCT
ajst-1434	27	38	we	we	PRON
ajst-1434	27	39	must	must	AUX
ajst-1434	27	40	seek	seek	VERB
ajst-1434	27	41	new	new	ADJ
ajst-1434	27	42	technology	technology	NOUN
ajst-1434	27	43	to	to	PART
ajst-1434	27	44	make	make	VERB
ajst-1434	27	45	a	a	DET
ajst-1434	27	46	breakthrough	breakthrough	NOUN
ajst-1434	27	47	,	,	PUNCT
ajst-1434	27	48	new	new	ADJ
ajst-1434	27	49	materials	material	NOUN
ajst-1434	27	50	,	,	PUNCT
ajst-1434	27	51	new	new	ADJ
ajst-1434	27	52	structure	structure	NOUN
ajst-1434	27	53	has	have	AUX
ajst-1434	27	54	become	become	VERB
ajst-1434	27	55	the	the	DET
ajst-1434	27	56	development	development	NOUN
ajst-1434	27	57	focus	focus	NOUN
ajst-1434	27	58	.	.	PUNCT
ajst-1434	28	1	first	first	ADV
ajst-1434	28	2	,	,	PUNCT
ajst-1434	28	3	the	the	DET
ajst-1434	28	4	development	development	NOUN
ajst-1434	28	5	of	of	ADP
ajst-1434	28	6	new	new	ADJ
ajst-1434	28	7	material	material	NOUN
ajst-1434	28	8	technology	technology	NOUN
ajst-1434	28	9	is	be	AUX
ajst-1434	28	10	accelerating	accelerate	VERB
ajst-1434	28	11	,	,	PUNCT
ajst-1434	28	12	and	and	CCONJ
ajst-1434	28	13	the	the	DET
ajst-1434	28	14	industrialization	industrialization	NOUN
ajst-1434	28	15	is	be	AUX
ajst-1434	28	16	advancing	advance	VERB
ajst-1434	28	17	.	.	PUNCT
ajst-1434	29	1	in	in	ADP
ajst-1434	29	2	february	february	PROPN
ajst-1434	29	3	2021	2021	NUM
ajst-1434	29	4	,	,	PUNCT
ajst-1434	29	5	the	the	DET
ajst-1434	29	6	european	european	PROPN
ajst-1434	29	7	union	union	PROPN
ajst-1434	29	8	's	's	PART
ajst-1434	29	9	"	"	PUNCT
ajst-1434	29	10	two	two	NUM
ajst-1434	29	11	-	-	PUNCT
ajst-1434	29	12	dimensional	dimensional	ADJ
ajst-1434	29	13	experimental	experimental	ADJ
ajst-1434	29	14	pilot	pilot	NOUN
ajst-1434	29	15	line	line	NOUN
ajst-1434	29	16	"	"	PUNCT
ajst-1434	29	17	project	project	NOUN
ajst-1434	29	18	developed	develop	VERB
ajst-1434	29	19	electronic	electronic	ADJ
ajst-1434	29	20	/	/	SYM
ajst-1434	29	21	photonic	photonic	NOUN
ajst-1434	29	22	prototype	prototype	NOUN
ajst-1434	29	23	devices	device	NOUN
ajst-1434	29	24	based	base	VERB
ajst-1434	29	25	on	on	ADP
ajst-1434	29	26	two	two	NUM
ajst-1434	29	27	-	-	PUNCT
ajst-1434	29	28	dimensional	dimensional	ADJ
ajst-1434	29	29	materials	material	NOUN
ajst-1434	29	30	and	and	CCONJ
ajst-1434	29	31	realized	realize	VERB
ajst-1434	29	32	small	small	ADJ
ajst-1434	29	33	batch	batch	NOUN
ajst-1434	29	34	production	production	NOUN
ajst-1434	29	35	;	;	PUNCT
ajst-1434	29	36	in	in	ADP
ajst-1434	29	37	may	may	PROPN
ajst-1434	29	38	,	,	PUNCT
ajst-1434	29	39	tsmc	tsmc	PROPN
ajst-1434	29	40	and	and	CCONJ
ajst-1434	29	41	mit	mit	PROPN
ajst-1434	29	42	demonstrated	demonstrate	VERB
ajst-1434	29	43	the	the	DET
ajst-1434	29	44	first	first	ADJ
ajst-1434	29	45	mos2	mos2	PROPN
ajst-1434	29	46	transistor	transistor	NOUN
ajst-1434	29	47	using	use	VERB
ajst-1434	29	48	semi	semi	ADJ
ajst-1434	29	49	-	-	ADJ
ajst-1434	29	50	metallic	metallic	ADJ
ajst-1434	29	51	bismuth	bismuth	NOUN
ajst-1434	29	52	as	as	ADP
ajst-1434	29	53	a	a	DET
ajst-1434	29	54	contact	contact	NOUN
ajst-1434	29	55	electrode	electrode	NOUN
ajst-1434	29	56	,	,	PUNCT
ajst-1434	29	57	reducing	reduce	VERB
ajst-1434	29	58	the	the	DET
ajst-1434	29	59	contact	contact	NOUN
ajst-1434	29	60	resistance	resistance	NOUN
ajst-1434	29	61	to	to	ADP
ajst-1434	29	62	the	the	DET
ajst-1434	29	63	quantum	quantum	ADJ
ajst-1434	29	64	limit	limit	NOUN
ajst-1434	29	65	and	and	CCONJ
ajst-1434	29	66	significantly	significantly	ADV
ajst-1434	29	67	increasing	increase	VERB
ajst-1434	29	68	the	the	DET
ajst-1434	29	69	openstate	openstate	ADJ
ajst-1434	29	70	current	current	NOUN
ajst-1434	29	71	.	.	PUNCT
ajst-1434	30	1	in	in	ADP
ajst-1434	30	2	june	june	PROPN
ajst-1434	30	3	,	,	PUNCT
ajst-1434	30	4	nct	nct	PROPN
ajst-1434	30	5	announced	announce	VERB
ajst-1434	30	6	the	the	DET
ajst-1434	30	7	mass	mass	ADJ
ajst-1434	30	8	production	production	NOUN
ajst-1434	30	9	of	of	ADP
ajst-1434	30	10	4	4	NUM
ajst-1434	30	11	-	-	PUNCT
ajst-1434	30	12	inch	inch	NOUN
ajst-1434	30	13	gallium	gallium	NOUN
ajst-1434	30	14	oxide	oxide	NOUN
ajst-1434	30	15	epitaxial	epitaxial	ADJ
ajst-1434	30	16	wafers	wafer	NOUN
ajst-1434	30	17	,	,	PUNCT
ajst-1434	30	18	and	and	CCONJ
ajst-1434	30	19	the	the	DET
ajst-1434	30	20	device	device	NOUN
ajst-1434	30	21	yield	yield	NOUN
ajst-1434	30	22	exceeded	exceed	VERB
ajst-1434	30	23	70	70	NUM
ajst-1434	30	24	%	%	NOUN
ajst-1434	30	25	.	.	PUNCT
ajst-1434	31	1	in	in	ADP
ajst-1434	31	2	december	december	PROPN
ajst-1434	31	3	intel	intel	PROPN
ajst-1434	31	4	demonstrated	demonstrate	VERB
ajst-1434	31	5	the	the	DET
ajst-1434	31	6	world	world	NOUN
ajst-1434	31	7	's	's	PART
ajst-1434	31	8	first	first	ADJ
ajst-1434	31	9	magnetoelectric	magnetoelectric	ADJ
ajst-1434	31	10	spin	spin	NOUN
ajst-1434	31	11	orbit	orbit	NOUN
ajst-1434	31	12	(	(	PUNCT
ajst-1434	31	13	meso	meso	NOUN
ajst-1434	31	14	)	)	PUNCT
ajst-1434	31	15	logic	logic	NOUN
ajst-1434	31	16	device	device	NOUN
ajst-1434	31	17	at	at	ADP
ajst-1434	31	18	room	room	NOUN
ajst-1434	31	19	temperature	temperature	NOUN
ajst-1434	31	20	,	,	PUNCT
ajst-1434	31	21	demonstrating	demonstrate	VERB
ajst-1434	31	22	the	the	DET
ajst-1434	31	23	feasibility	feasibility	NOUN
ajst-1434	31	24	of	of	ADP
ajst-1434	31	25	building	build	VERB
ajst-1434	31	26	new	new	ADJ
ajst-1434	31	27	transistors	transistor	NOUN
ajst-1434	31	28	based	base	VERB
ajst-1434	31	29	on	on	ADP
ajst-1434	31	30	switching	switch	VERB
ajst-1434	31	31	nanomagnetics	nanomagnetic	NOUN
ajst-1434	31	32	.	.	PUNCT
ajst-1434	32	1	second	second	ADJ
ajst-1434	32	2	,	,	PUNCT
ajst-1434	32	3	innovation	innovation	NOUN
ajst-1434	32	4	and	and	CCONJ
ajst-1434	32	5	development	development	NOUN
ajst-1434	32	6	of	of	ADP
ajst-1434	32	7	new	new	ADJ
ajst-1434	32	8	computing	computing	NOUN
ajst-1434	32	9	architectures	architecture	NOUN
ajst-1434	32	10	.	.	PUNCT
ajst-1434	33	1	released	release	VERB
ajst-1434	33	2	recently	recently	ADV
ajst-1434	33	3	,	,	PUNCT
ajst-1434	33	4	the	the	DET
ajst-1434	33	5	company	company	NOUN
ajst-1434	33	6	called	call	VERB
ajst-1434	33	7	"	"	PUNCT
ajst-1434	33	8	hbm	hbm	PROPN
ajst-1434	33	9	-	-	PUNCT
ajst-1434	33	10	pim	pim	PROPN
ajst-1434	33	11	"	"	PUNCT
ajst-1434	33	12	(	(	PUNCT
ajst-1434	33	13	highbandwidthmemory	highbandwidthmemory	ADJ
ajst-1434	33	14	,	,	PUNCT
ajst-1434	33	15	processing	processing	NOUN
ajst-1434	33	16	-	-	PUNCT
ajst-1434	33	17	in	in	ADP
ajst-1434	33	18	-	-	PUNCT
ajst-1434	33	19	memory	memory	NOUN
ajst-1434	33	20	,	,	PUNCT
ajst-1434	33	21	hbm	hbm	PROPN
ajst-1434	33	22	-	-	PUNCT
ajst-1434	33	23	pim	pim	PROPN
ajst-1434	33	24	)	)	PUNCT
ajst-1434	33	25	memory	memory	NOUN
ajst-1434	33	26	architecture	architecture	NOUN
ajst-1434	33	27	,	,	PUNCT
ajst-1434	33	28	this	this	DET
ajst-1434	33	29	architecture	architecture	NOUN
ajst-1434	33	30	can	can	AUX
ajst-1434	33	31	be	be	AUX
ajst-1434	33	32	connected	connect	VERB
ajst-1434	33	33	to	to	ADP
ajst-1434	33	34	the	the	DET
ajst-1434	33	35	system	system	NOUN
ajst-1434	33	36	of	of	ADP
ajst-1434	33	37	some	some	DET
ajst-1434	33	38	computing	compute	VERB
ajst-1434	33	39	work	work	NOUN
ajst-1434	33	40	to	to	ADP
ajst-1434	33	41	a	a	DET
ajst-1434	33	42	remote	remote	ADJ
ajst-1434	33	43	database	database	NOUN
ajst-1434	33	44	,	,	PUNCT
ajst-1434	33	45	lighten	lighten	VERB
ajst-1434	33	46	the	the	DET
ajst-1434	33	47	burden	burden	NOUN
ajst-1434	33	48	of	of	ADP
ajst-1434	33	49	cpu	cpu	NOUN
ajst-1434	33	50	processing	processing	NOUN
ajst-1434	33	51	,	,	PUNCT
ajst-1434	33	52	improve	improve	VERB
ajst-1434	33	53	the	the	DET
ajst-1434	33	54	processing	processing	NOUN
ajst-1434	33	55	speed.[6	speed.[6	NOUN
ajst-1434	33	56	]	]	X
ajst-1434	33	57	3.2	3.2	NUM
ajst-1434	33	58	.	.	PUNCT
ajst-1434	34	1	improve	improve	VERB
ajst-1434	34	2	the	the	DET
ajst-1434	34	3	traditional	traditional	ADJ
ajst-1434	34	4	manufacturing	manufacturing	NOUN
ajst-1434	34	5	process	process	NOUN
ajst-1434	34	6	with	with	ADP
ajst-1434	34	7	the	the	DET
ajst-1434	34	8	innovation	innovation	NOUN
ajst-1434	34	9	of	of	ADP
ajst-1434	34	10	new	new	ADJ
ajst-1434	34	11	technology	technology	NOUN
ajst-1434	34	12	,	,	PUNCT
ajst-1434	34	13	the	the	DET
ajst-1434	34	14	manufacturing	manufacturing	NOUN
ajst-1434	34	15	process	process	NOUN
ajst-1434	34	16	of	of	ADP
ajst-1434	34	17	microelectronics	microelectronic	NOUN
ajst-1434	34	18	technology	technology	NOUN
ajst-1434	34	19	has	have	AUX
ajst-1434	34	20	made	make	VERB
ajst-1434	34	21	a	a	DET
ajst-1434	34	22	leap	leap	NOUN
ajst-1434	34	23	forward	forward	ADV
ajst-1434	34	24	.	.	PUNCT
ajst-1434	35	1	from	from	ADP
ajst-1434	35	2	the	the	DET
ajst-1434	35	3	original	original	ADJ
ajst-1434	35	4	traditional	traditional	ADJ
ajst-1434	35	5	single	single	ADJ
ajst-1434	35	6	-	-	PUNCT
ajst-1434	35	7	layer	layer	NOUN
ajst-1434	35	8	plane	plane	NOUN
ajst-1434	35	9	distribution	distribution	NOUN
ajst-1434	35	10	to	to	ADP
ajst-1434	35	11	the	the	DET
ajst-1434	35	12	current	current	ADJ
ajst-1434	35	13	multi	multi	ADJ
ajst-1434	35	14	-	-	ADJ
ajst-1434	35	15	layer	layer	ADJ
ajst-1434	35	16	process	process	NOUN
ajst-1434	35	17	containing	contain	VERB
ajst-1434	35	18	multi	multi	ADJ
ajst-1434	35	19	-	-	ADJ
ajst-1434	35	20	layer	layer	ADJ
ajst-1434	35	21	high	high	ADJ
ajst-1434	35	22	-	-	PUNCT
ajst-1434	35	23	density	density	NOUN
ajst-1434	35	24	and	and	CCONJ
ajst-1434	35	25	multi	multi	ADJ
ajst-1434	35	26	-	-	ADJ
ajst-1434	35	27	layer	layer	ADJ
ajst-1434	35	28	multi	multi	NOUN
ajst-1434	35	29	-	-	NOUN
ajst-1434	35	30	function	function	NOUN
ajst-1434	35	31	,	,	PUNCT
ajst-1434	35	32	the	the	DET
ajst-1434	35	33	micro	micro	ADJ
ajst-1434	35	34	-	-	ADJ
ajst-1434	35	35	electronic	electronic	ADJ
ajst-1434	35	36	manufacturing	manufacturing	NOUN
ajst-1434	35	37	technology	technology	NOUN
ajst-1434	35	38	has	have	AUX
ajst-1434	35	39	developed	develop	VERB
ajst-1434	35	40	to	to	ADP
ajst-1434	35	41	the	the	DET
ajst-1434	35	42	direction	direction	NOUN
ajst-1434	35	43	of	of	ADP
ajst-1434	35	44	low	low	ADJ
ajst-1434	35	45	cost	cost	NOUN
ajst-1434	35	46	and	and	CCONJ
ajst-1434	35	47	multi	multi	NOUN
ajst-1434	35	48	-	-	NOUN
ajst-1434	35	49	function	function	NOUN
ajst-1434	35	50	.	.	PUNCT
ajst-1434	36	1	devices	device	NOUN
ajst-1434	36	2	produced	produce	VERB
ajst-1434	36	3	by	by	ADP
ajst-1434	36	4	artificial	artificial	ADJ
ajst-1434	36	5	superlattice	superlattice	NOUN
ajst-1434	36	6	technology	technology	NOUN
ajst-1434	36	7	are	be	AUX
ajst-1434	36	8	called	call	VERB
ajst-1434	36	9	superlattice	superlattice	NOUN
ajst-1434	36	10	semiconductor	semiconductor	NOUN
ajst-1434	36	11	devices	device	NOUN
ajst-1434	36	12	,	,	PUNCT
ajst-1434	36	13	superlattice	superlattice	NOUN
ajst-1434	36	14	semiconductor	semiconductor	NOUN
ajst-1434	36	15	devices	device	NOUN
ajst-1434	36	16	its	its	PRON
ajst-1434	36	17	biggest	big	ADJ
ajst-1434	36	18	advantage	advantage	NOUN
ajst-1434	36	19	is	be	AUX
ajst-1434	36	20	that	that	SCONJ
ajst-1434	36	21	its	its	PRON
ajst-1434	36	22	speed	speed	NOUN
ajst-1434	36	23	is	be	AUX
ajst-1434	36	24	10	10	NUM
ajst-1434	36	25	to	to	PART
ajst-1434	36	26	100	100	NUM
ajst-1434	36	27	times	time	NOUN
ajst-1434	36	28	faster	fast	ADJ
ajst-1434	36	29	than	than	ADP
ajst-1434	36	30	that	that	PRON
ajst-1434	36	31	of	of	ADP
ajst-1434	36	32	ordinary	ordinary	ADJ
ajst-1434	36	33	silicon	silicon	NOUN
ajst-1434	36	34	semiconductors	semiconductor	NOUN
ajst-1434	36	35	.	.	PUNCT
ajst-1434	37	1	reducing	reduce	VERB
ajst-1434	37	2	the	the	DET
ajst-1434	37	3	volume	volume	NOUN
ajst-1434	37	4	of	of	ADP
ajst-1434	37	5	microelectronic	microelectronic	ADJ
ajst-1434	37	6	devices	device	NOUN
ajst-1434	37	7	by	by	ADP
ajst-1434	37	8	using	use	VERB
ajst-1434	37	9	sensitive	sensitive	ADJ
ajst-1434	37	10	integrated	integrate	VERB
ajst-1434	37	11	circuits	circuit	NOUN
ajst-1434	37	12	can	can	AUX
ajst-1434	37	13	not	not	PART
ajst-1434	37	14	only	only	ADV
ajst-1434	37	15	save	save	VERB
ajst-1434	37	16	the	the	DET
ajst-1434	37	17	production	production	NOUN
ajst-1434	37	18	cost	cost	NOUN
ajst-1434	37	19	,	,	PUNCT
ajst-1434	37	20	but	but	CCONJ
ajst-1434	37	21	also	also	ADV
ajst-1434	37	22	improve	improve	VERB
ajst-1434	37	23	the	the	DET
ajst-1434	37	24	overall	overall	ADJ
ajst-1434	37	25	stability	stability	NOUN
ajst-1434	37	26	of	of	ADP
ajst-1434	37	27	the	the	DET
ajst-1434	37	28	device	device	NOUN
ajst-1434	37	29	performance	performance	NOUN
ajst-1434	37	30	.	.	PUNCT
ajst-1434	38	1	the	the	DET
ajst-1434	38	2	development	development	NOUN
ajst-1434	38	3	of	of	ADP
ajst-1434	38	4	modern	modern	ADJ
ajst-1434	38	5	integrated	integrate	VERB
ajst-1434	38	6	circuit	circuit	NOUN
ajst-1434	38	7	tends	tend	VERB
ajst-1434	38	8	to	to	ADP
ajst-1434	38	9	the	the	DET
ajst-1434	38	10	planning	planning	NOUN
ajst-1434	38	11	structure	structure	NOUN
ajst-1434	38	12	of	of	ADP
ajst-1434	38	13	moore	moore	PROPN
ajst-1434	38	14	's	's	PART
ajst-1434	38	15	law	law	NOUN
ajst-1434	38	16	,	,	PUNCT
ajst-1434	38	17	from	from	ADP
ajst-1434	38	18	the	the	DET
ajst-1434	38	19	two	two	NUM
ajst-1434	38	20	-	-	PUNCT
ajst-1434	38	21	dimensional	dimensional	ADJ
ajst-1434	38	22	integration	integration	NOUN
ajst-1434	38	23	of	of	ADP
ajst-1434	38	24	system	system	NOUN
ajst-1434	38	25	structure	structure	NOUN
ajst-1434	38	26	to	to	ADP
ajst-1434	38	27	the	the	DET
ajst-1434	38	28	three	three	NUM
ajst-1434	38	29	-	-	PUNCT
ajst-1434	38	30	dimensional	dimensional	ADJ
ajst-1434	38	31	integration	integration	NOUN
ajst-1434	38	32	,	,	PUNCT
ajst-1434	38	33	to	to	PART
ajst-1434	38	34	achieve	achieve	VERB
ajst-1434	38	35	a	a	DET
ajst-1434	38	36	new	new	ADJ
ajst-1434	38	37	breakthrough	breakthrough	NOUN
ajst-1434	38	38	in	in	ADP
ajst-1434	38	39	circuit	circuit	NOUN
ajst-1434	38	40	integration	integration	NOUN
ajst-1434	38	41	,	,	PUNCT
ajst-1434	38	42	vigorously	vigorously	ADV
ajst-1434	38	43	promote	promote	VERB
ajst-1434	38	44	the	the	DET
ajst-1434	38	45	development	development	NOUN
ajst-1434	38	46	of	of	ADP
ajst-1434	38	47	integrated	integrated	ADJ
ajst-1434	38	48	circuit	circuit	NOUN
ajst-1434	38	49	in	in	ADP
ajst-1434	38	50	microelectronics	microelectronic	NOUN
ajst-1434	38	51	technology	technology	NOUN
ajst-1434	38	52	.	.	PUNCT
ajst-1434	39	1	3.3	3.3	NUM
ajst-1434	39	2	.	.	PUNCT
ajst-1434	40	1	the	the	DET
ajst-1434	40	2	core	core	NOUN
ajst-1434	40	3	driver	driver	NOUN
ajst-1434	40	4	of	of	ADP
ajst-1434	40	5	semiconductor	semiconductor	NOUN
ajst-1434	40	6	technology	technology	NOUN
ajst-1434	40	7	development	development	NOUN
ajst-1434	40	8	has	have	AUX
ajst-1434	40	9	changed	change	VERB
ajst-1434	40	10	over	over	ADP
ajst-1434	40	11	the	the	DET
ajst-1434	40	12	past	past	ADJ
ajst-1434	40	13	decade	decade	NOUN
ajst-1434	40	14	,	,	PUNCT
ajst-1434	40	15	global	global	ADJ
ajst-1434	40	16	innovation	innovation	NOUN
ajst-1434	40	17	in	in	ADP
ajst-1434	40	18	semiconductor	semiconductor	NOUN
ajst-1434	40	19	technology	technology	NOUN
ajst-1434	40	20	has	have	AUX
ajst-1434	40	21	spawned	spawn	VERB
ajst-1434	40	22	a	a	DET
ajst-1434	40	23	series	series	NOUN
ajst-1434	40	24	of	of	ADP
ajst-1434	40	25	transformative	transformative	ADJ
ajst-1434	40	26	technological	technological	ADJ
ajst-1434	40	27	developments	development	NOUN
ajst-1434	40	28	,	,	PUNCT
ajst-1434	40	29	including	include	VERB
ajst-1434	40	30	5	5	NUM
ajst-1434	40	31	g	g	NOUN
ajst-1434	40	32	,	,	PUNCT
ajst-1434	40	33	artificial	artificial	ADJ
ajst-1434	40	34	intelligence	intelligence	NOUN
ajst-1434	40	35	(	(	PUNCT
ajst-1434	40	36	ai	ai	NOUN
ajst-1434	40	37	)	)	PUNCT
ajst-1434	40	38	,	,	PUNCT
ajst-1434	40	39	autonomous	autonomous	ADJ
ajst-1434	40	40	driving	driving	NOUN
ajst-1434	40	41	,	,	PUNCT
ajst-1434	40	42	and	and	CCONJ
ajst-1434	40	43	the	the	DET
ajst-1434	40	44	internet	internet	NOUN
ajst-1434	40	45	of	of	ADP
ajst-1434	40	46	things	thing	NOUN
ajst-1434	40	47	.	.	PUNCT
ajst-1434	41	1	in	in	ADP
ajst-1434	41	2	the	the	DET
ajst-1434	41	3	next	next	ADJ
ajst-1434	41	4	10	10	NUM
ajst-1434	41	5	years	year	NOUN
ajst-1434	41	6	,	,	PUNCT
ajst-1434	41	7	the	the	DET
ajst-1434	41	8	growth	growth	NOUN
ajst-1434	41	9	of	of	ADP
ajst-1434	41	10	computing	compute	VERB
ajst-1434	41	11	power	power	NOUN
ajst-1434	41	12	due	due	ADP
ajst-1434	41	13	to	to	ADP
ajst-1434	41	14	transistor	transistor	NOUN
ajst-1434	41	15	scaling	scaling	NOUN
ajst-1434	41	16	will	will	AUX
ajst-1434	41	17	flatten	flatten	VERB
ajst-1434	41	18	out	out	ADP
ajst-1434	41	19	,	,	PUNCT
ajst-1434	41	20	and	and	CCONJ
ajst-1434	41	21	the	the	DET
ajst-1434	41	22	development	development	NOUN
ajst-1434	41	23	of	of	ADP
ajst-1434	41	24	semiconductors	semiconductor	NOUN
ajst-1434	41	25	will	will	AUX
ajst-1434	41	26	be	be	AUX
ajst-1434	41	27	driven	drive	VERB
ajst-1434	41	28	by	by	ADP
ajst-1434	41	29	three	three	NUM
ajst-1434	41	30	factors	factor	NOUN
ajst-1434	41	31	:	:	PUNCT
ajst-1434	41	32	application	application	NOUN
ajst-1434	41	33	drivers	driver	NOUN
ajst-1434	41	34	,	,	PUNCT
ajst-1434	41	35	such	such	ADJ
ajst-1434	41	36	as	as	ADP
ajst-1434	41	37	passive	passive	ADJ
ajst-1434	41	38	sensing	sensing	NOUN
ajst-1434	41	39	and	and	CCONJ
ajst-1434	41	40	adaptive	adaptive	ADJ
ajst-1434	41	41	electrosubwarfare	electrosubwarfare	NOUN
ajst-1434	41	42	;	;	PUNCT
ajst-1434	41	43	the	the	DET
ajst-1434	41	44	second	second	NOUN
ajst-1434	41	45	is	be	AUX
ajst-1434	41	46	technology	technology	NOUN
ajst-1434	41	47	driven	drive	VERB
ajst-1434	41	48	,	,	PUNCT
ajst-1434	41	49	such	such	ADJ
ajst-1434	41	50	as	as	ADP
ajst-1434	41	51	new	new	ADJ
ajst-1434	41	52	computing	computing	NOUN
ajst-1434	41	53	,	,	PUNCT
ajst-1434	41	54	advanced	advanced	ADJ
ajst-1434	41	55	manufacturing	manufacturing	NOUN
ajst-1434	41	56	and	and	CCONJ
ajst-1434	41	57	original	original	ADJ
ajst-1434	41	58	design	design	NOUN
ajst-1434	41	59	;	;	PUNCT
ajst-1434	41	60	the	the	DET
ajst-1434	41	61	third	third	NOUN
ajst-1434	41	62	is	be	AUX
ajst-1434	41	63	industrial	industrial	ADJ
ajst-1434	41	64	driven	drive	VERB
ajst-1434	41	65	,	,	PUNCT
ajst-1434	41	66	such	such	ADJ
ajst-1434	41	67	as	as	ADP
ajst-1434	41	68	the	the	DET
ajst-1434	41	69	reshoring	reshoring	NOUN
ajst-1434	41	70	of	of	ADP
ajst-1434	41	71	manufacturing	manufacturing	NOUN
ajst-1434	41	72	and	and	CCONJ
ajst-1434	41	73	the	the	DET
ajst-1434	41	74	surge	surge	NOUN
ajst-1434	41	75	in	in	ADP
ajst-1434	41	76	demand	demand	NOUN
ajst-1434	41	77	for	for	ADP
ajst-1434	41	78	emerging	emerge	VERB
ajst-1434	41	79	applications	application	NOUN
ajst-1434	41	80	.	.	PUNCT
ajst-1434	42	1	among	among	ADP
ajst-1434	42	2	them	they	PRON
ajst-1434	42	3	,	,	PUNCT
ajst-1434	42	4	emerging	emerge	VERB
ajst-1434	42	5	applications	application	NOUN
ajst-1434	42	6	will	will	AUX
ajst-1434	42	7	become	become	VERB
ajst-1434	42	8	one	one	NUM
ajst-1434	42	9	of	of	ADP
ajst-1434	42	10	the	the	DET
ajst-1434	42	11	most	most	ADV
ajst-1434	42	12	important	important	ADJ
ajst-1434	42	13	thrust	thrust	NOUN
ajst-1434	42	14	for	for	ADP
ajst-1434	42	15	the	the	DET
ajst-1434	42	16	development	development	NOUN
ajst-1434	42	17	of	of	ADP
ajst-1434	42	18	the	the	DET
ajst-1434	42	19	semiconductor	semiconductor	NOUN
ajst-1434	42	20	industry	industry	NOUN
ajst-1434	42	21	.	.	PUNCT
ajst-1434	43	1	for	for	ADP
ajst-1434	43	2	example	example	NOUN
ajst-1434	43	3	,	,	PUNCT
ajst-1434	43	4	with	with	ADP
ajst-1434	43	5	the	the	DET
ajst-1434	43	6	accelerated	accelerate	VERB
ajst-1434	43	7	application	application	NOUN
ajst-1434	43	8	of	of	ADP
ajst-1434	43	9	artificial	artificial	ADJ
ajst-1434	43	10	intelligence	intelligence	NOUN
ajst-1434	43	11	in	in	ADP
ajst-1434	43	12	various	various	ADJ
ajst-1434	43	13	fields	field	NOUN
ajst-1434	43	14	,	,	PUNCT
ajst-1434	43	15	augmented	augment	VERB
ajst-1434	43	16	reality	reality	NOUN
ajst-1434	43	17	,	,	PUNCT
ajst-1434	43	18	virtual	virtual	ADJ
ajst-1434	43	19	reality	reality	NOUN
ajst-1434	43	20	,	,	PUNCT
ajst-1434	43	21	voice	voice	NOUN
ajst-1434	43	22	and	and	CCONJ
ajst-1434	43	23	facial	facial	ADJ
ajst-1434	43	24	recognition	recognition	NOUN
ajst-1434	43	25	technology	technology	NOUN
ajst-1434	43	26	,	,	PUNCT
ajst-1434	43	27	computer	computer	NOUN
ajst-1434	43	28	vision	vision	NOUN
ajst-1434	43	29	and	and	CCONJ
ajst-1434	43	30	natural	natural	ADJ
ajst-1434	43	31	language	language	NOUN
ajst-1434	43	32	processing	processing	NOUN
ajst-1434	43	33	require	require	VERB
ajst-1434	43	34	high	high	ADJ
ajst-1434	43	35	processing	processing	NOUN
ajst-1434	43	36	speed	speed	NOUN
ajst-1434	43	37	and	and	CCONJ
ajst-1434	43	38	dedicated	dedicated	ADJ
ajst-1434	43	39	components	component	NOUN
ajst-1434	43	40	to	to	PART
ajst-1434	43	41	perform	perform	VERB
ajst-1434	43	42	complex	complex	ADJ
ajst-1434	43	43	mathematical	mathematical	ADJ
ajst-1434	43	44	calculations	calculation	NOUN
ajst-1434	43	45	,	,	PUNCT
ajst-1434	43	46	accelerating	accelerate	VERB
ajst-1434	43	47	the	the	DET
ajst-1434	43	48	development	development	NOUN
ajst-1434	43	49	of	of	ADP
ajst-1434	43	50	intelligent	intelligent	ADJ
ajst-1434	43	51	processing	processing	NOUN
ajst-1434	43	52	technology	technology	NOUN
ajst-1434	43	53	on	on	ADP
ajst-1434	43	54	chips	chip	NOUN
ajst-1434	43	55	.	.	PUNCT
ajst-1434	44	1	a	a	DET
ajst-1434	44	2	mckinsey	mckinsey	NOUN
ajst-1434	44	3	study	study	NOUN
ajst-1434	44	4	predicts	predict	NOUN
ajst-1434	44	5	that	that	PRON
ajst-1434	44	6	airelated	airelate	VERB
ajst-1434	44	7	semiconductors	semiconductor	NOUN
ajst-1434	44	8	could	could	AUX
ajst-1434	44	9	grow	grow	VERB
ajst-1434	44	10	18	18	NUM
ajst-1434	44	11	%	%	NOUN
ajst-1434	44	12	in	in	ADP
ajst-1434	44	13	the	the	DET
ajst-1434	44	14	next	next	ADJ
ajst-1434	44	15	few	few	ADJ
ajst-1434	44	16	years	year	NOUN
ajst-1434	44	17	;	;	PUNCT
ajst-1434	44	18	ai	ai	VERB
ajst-1434	44	19	semi	semi	NOUN
ajst-1434	44	20	-	-	NOUN
ajst-1434	44	21	conductors	conductor	NOUN
ajst-1434	44	22	will	will	AUX
ajst-1434	44	23	account	account	VERB
ajst-1434	44	24	for	for	ADP
ajst-1434	44	25	20	20	NUM
ajst-1434	44	26	%	%	NOUN
ajst-1434	44	27	of	of	ADP
ajst-1434	44	28	overall	overall	ADJ
ajst-1434	44	29	semiconductor	semiconductor	NOUN
ajst-1434	44	30	demand	demand	NOUN
ajst-1434	44	31	.	.	PUNCT
ajst-1434	45	1	for	for	ADP
ajst-1434	45	2	example	example	NOUN
ajst-1434	45	3	,	,	PUNCT
ajst-1434	45	4	the	the	DET
ajst-1434	45	5	internet	internet	NOUN
ajst-1434	45	6	of	of	ADP
ajst-1434	45	7	things	thing	NOUN
ajst-1434	45	8	(	(	PUNCT
ajst-1434	45	9	iot	iot	NOUN
ajst-1434	45	10	)	)	PUNCT
ajst-1434	45	11	is	be	AUX
ajst-1434	45	12	also	also	ADV
ajst-1434	45	13	being	be	AUX
ajst-1434	45	14	used	use	VERB
ajst-1434	45	15	in	in	ADP
ajst-1434	45	16	smart	smart	ADJ
ajst-1434	45	17	cities	city	NOUN
ajst-1434	45	18	,	,	PUNCT
ajst-1434	45	19	supply	supply	NOUN
ajst-1434	45	20	chain	chain	NOUN
ajst-1434	45	21	management	management	NOUN
ajst-1434	45	22	,	,	PUNCT
ajst-1434	45	23	healthcare	healthcare	PROPN
ajst-1434	45	24	,	,	PUNCT
ajst-1434	45	25	agriculture	agriculture	NOUN
ajst-1434	45	26	,	,	PUNCT
ajst-1434	45	27	manufacturing	manufacturing	NOUN
ajst-1434	45	28	and	and	CCONJ
ajst-1434	45	29	consumer	consumer	NOUN
ajst-1434	45	30	electronics	electronic	NOUN
ajst-1434	45	31	.	.	PUNCT
ajst-1434	46	1	there	there	PRON
ajst-1434	46	2	are	be	VERB
ajst-1434	46	3	more	more	ADJ
ajst-1434	46	4	than	than	ADP
ajst-1434	46	5	11.7	11.7	NUM
ajst-1434	46	6	billion	billion	NUM
ajst-1434	46	7	iot	iot	NOUN
ajst-1434	46	8	devices	device	NOUN
ajst-1434	46	9	worldwide	worldwide	ADV
ajst-1434	46	10	and	and	CCONJ
ajst-1434	46	11	this	this	DET
ajst-1434	46	12	number	number	NOUN
ajst-1434	46	13	is	be	AUX
ajst-1434	46	14	expected	expect	VERB
ajst-1434	46	15	to	to	PART
ajst-1434	46	16	increase	increase	VERB
ajst-1434	46	17	to	to	ADP
ajst-1434	46	18	30	30	NUM
ajst-1434	46	19	billion	billion	NUM
ajst-1434	46	20	by	by	ADP
ajst-1434	46	21	2025	2025	NUM
ajst-1434	46	22	,	,	PUNCT
ajst-1434	46	23	which	which	PRON
ajst-1434	46	24	will	will	AUX
ajst-1434	46	25	give	give	VERB
ajst-1434	46	26	a	a	DET
ajst-1434	46	27	big	big	ADJ
ajst-1434	46	28	boost	boost	NOUN
ajst-1434	46	29	to	to	ADP
ajst-1434	46	30	the	the	DET
ajst-1434	46	31	semiconductor	semiconductor	NOUN
ajst-1434	46	32	industry	industry	NOUN
ajst-1434	46	33	.	.	PUNCT
ajst-1434	47	1	3.4	3.4	NUM
ajst-1434	47	2	.	.	PUNCT
ajst-1434	47	3	industrial	industrial	ADJ
ajst-1434	47	4	internet	internet	NOUN
ajst-1434	47	5	of	of	ADP
ajst-1434	47	6	things	thing	NOUN
ajst-1434	47	7	digitization	digitization	NOUN
ajst-1434	47	8	and	and	CCONJ
ajst-1434	47	9	the	the	DET
ajst-1434	47	10	industrial	industrial	ADJ
ajst-1434	47	11	internet	internet	NOUN
ajst-1434	47	12	of	of	ADP
ajst-1434	47	13	things	thing	NOUN
ajst-1434	47	14	are	be	AUX
ajst-1434	47	15	the	the	DET
ajst-1434	47	16	cornerstones	cornerstone	NOUN
ajst-1434	47	17	supporting	support	VERB
ajst-1434	47	18	informationized	informationized	ADJ
ajst-1434	47	19	manufacturing	manufacturing	NOUN
ajst-1434	47	20	,	,	PUNCT
ajst-1434	47	21	while	while	SCONJ
ajst-1434	47	22	the	the	DET
ajst-1434	47	23	technology	technology	NOUN
ajst-1434	47	24	of	of	ADP
ajst-1434	47	25	big	big	ADJ
ajst-1434	47	26	data	datum	NOUN
ajst-1434	47	27	and	and	CCONJ
ajst-1434	47	28	artificial	artificial	ADJ
ajst-1434	47	29	intelligence	intelligence	NOUN
ajst-1434	47	30	is	be	AUX
ajst-1434	47	31	industry	industry	NOUN
ajst-1434	47	32	4.0	4.0	NUM
ajst-1434	47	33	the	the	DET
ajst-1434	47	34	most	most	ADV
ajst-1434	47	35	promising	promising	ADJ
ajst-1434	47	36	development	development	NOUN
ajst-1434	47	37	direction	direction	NOUN
ajst-1434	47	38	of	of	ADP
ajst-1434	47	39	intelligent	intelligent	ADJ
ajst-1434	47	40	manufacturing	manufacturing	NOUN
ajst-1434	47	41	.	.	PUNCT
ajst-1434	48	1	mes	me	NOUN
ajst-1434	48	2	data	data	PROPN
ajst-1434	48	3	is	be	AUX
ajst-1434	48	4	transmitted	transmit	VERB
ajst-1434	48	5	through	through	ADP
ajst-1434	48	6	the	the	DET
ajst-1434	48	7	industrial	industrial	ADJ
ajst-1434	48	8	internet	internet	NOUN
ajst-1434	48	9	of	of	ADP
ajst-1434	48	10	things	thing	NOUN
ajst-1434	48	11	.	.	PUNCT
ajst-1434	49	1	the	the	DET
ajst-1434	49	2	goal	goal	NOUN
ajst-1434	49	3	of	of	ADP
ajst-1434	49	4	the	the	DET
ajst-1434	49	5	industrial	industrial	ADJ
ajst-1434	49	6	internet	internet	NOUN
ajst-1434	49	7	of	of	ADP
ajst-1434	49	8	things	thing	NOUN
ajst-1434	49	9	is	be	AUX
ajst-1434	49	10	to	to	PART
ajst-1434	49	11	connect	connect	VERB
ajst-1434	49	12	things	thing	NOUN
ajst-1434	49	13	with	with	ADP
ajst-1434	49	14	things	thing	NOUN
ajst-1434	49	15	and	and	CCONJ
ajst-1434	49	16	things	thing	NOUN
ajst-1434	49	17	with	with	ADP
ajst-1434	49	18	people	people	NOUN
ajst-1434	49	19	.	.	PUNCT
ajst-1434	50	1	on	on	ADP
ajst-1434	50	2	the	the	DET
ajst-1434	50	3	basis	basis	NOUN
ajst-1434	50	4	of	of	ADP
ajst-1434	50	5	the	the	DET
ajst-1434	50	6	traditional	traditional	ADJ
ajst-1434	50	7	automation	automation	NOUN
ajst-1434	50	8	network	network	NOUN
ajst-1434	50	9	,	,	PUNCT
ajst-1434	50	10	the	the	DET
ajst-1434	50	11	electronic	electronic	ADJ
ajst-1434	50	12	industrial	industrial	ADJ
ajst-1434	50	13	iot	iot	NOUN
ajst-1434	50	14	mainly	mainly	ADV
ajst-1434	50	15	solves	solve	VERB
ajst-1434	50	16	the	the	DET
ajst-1434	50	17	problems	problem	NOUN
ajst-1434	50	18	of	of	ADP
ajst-1434	50	19	interconnection	interconnection	NOUN
ajst-1434	50	20	,	,	PUNCT
ajst-1434	50	21	wireless	wireless	ADJ
ajst-1434	50	22	transmission	transmission	NOUN
ajst-1434	50	23	and	and	CCONJ
ajst-1434	50	24	perception	perception	NOUN
ajst-1434	50	25	,	,	PUNCT
ajst-1434	50	26	which	which	PRON
ajst-1434	50	27	mainly	mainly	ADV
ajst-1434	50	28	includes	include	VERB
ajst-1434	50	29	:	:	PUNCT
ajst-1434	50	30	1	1	NUM
ajst-1434	50	31	)	)	PUNCT
ajst-1434	50	32	fieldbus	fieldbus	NOUN
ajst-1434	50	33	fcs	fcs	NOUN
ajst-1434	50	34	:	:	PUNCT
ajst-1434	50	35	control	control	NOUN
ajst-1434	50	36	system	system	NOUN
ajst-1434	50	37	connecting	connect	VERB
ajst-1434	50	38	various	various	ADJ
ajst-1434	50	39	equipment	equipment	NOUN
ajst-1434	50	40	of	of	ADP
ajst-1434	50	41	various	various	ADJ
ajst-1434	50	42	production	production	NOUN
ajst-1434	50	43	lines	line	NOUN
ajst-1434	50	44	and	and	CCONJ
ajst-1434	50	45	warehouse	warehouse	NOUN
ajst-1434	50	46	logistics	logistic	NOUN
ajst-1434	50	47	systems	system	NOUN
ajst-1434	50	48	,	,	PUNCT
ajst-1434	50	49	such	such	ADJ
ajst-1434	50	50	as	as	ADP
ajst-1434	50	51	smt	smt	PROPN
ajst-1434	50	52	production	production	NOUN
ajst-1434	50	53	line	line	NOUN
ajst-1434	50	54	ethercat	ethercat	NOUN
ajst-1434	50	55	bus	bus	NOUN
ajst-1434	50	56	,	,	PUNCT
ajst-1434	50	57	robot	robot	NOUN
ajst-1434	50	58	final	final	ADJ
ajst-1434	50	59	assembly	assembly	NOUN
ajst-1434	50	60	line	line	NOUN
ajst-1434	50	61	cc	cc	NOUN
ajst-1434	50	62	-	-	ADJ
ajst-1434	50	63	link	link	ADJ
ajst-1434	50	64	bus	bus	NOUN
ajst-1434	50	65	,	,	PUNCT
ajst-1434	50	66	warehouse	warehouse	NOUN
ajst-1434	50	67	lonwork	lonwork	NOUN
ajst-1434	50	68	bus	bus	NOUN
ajst-1434	50	69	connection	connection	NOUN
ajst-1434	50	70	,	,	PUNCT
ajst-1434	50	71	etc	etc	X
ajst-1434	50	72	.	.	X
ajst-1434	50	73	2	2	X
ajst-1434	50	74	)	)	PUNCT
ajst-1434	50	75	wireless	wireless	ADJ
ajst-1434	50	76	internet	internet	NOUN
ajst-1434	50	77	of	of	ADP
ajst-1434	50	78	things	thing	NOUN
ajst-1434	50	79	(	(	PUNCT
ajst-1434	50	80	iot	iot	NOUN
ajst-1434	50	81	)	)	PUNCT
ajst-1434	50	82	:	:	PUNCT
ajst-1434	50	83	it	it	PRON
ajst-1434	50	84	mainly	mainly	ADV
ajst-1434	50	85	completes	complete	VERB
ajst-1434	50	86	6	6	NUM
ajst-1434	50	87	the	the	DET
ajst-1434	50	88	information	information	NOUN
ajst-1434	50	89	management	management	NOUN
ajst-1434	50	90	of	of	ADP
ajst-1434	50	91	rfid	rfid	ADJ
ajst-1434	50	92	wireless	wireless	NOUN
ajst-1434	50	93	monitoring	monitoring	NOUN
ajst-1434	50	94	(	(	PUNCT
ajst-1434	50	95	patrol	patrol	NOUN
ajst-1434	50	96	control	control	NOUN
ajst-1434	50	97	)	)	PUNCT
ajst-1434	50	98	in	in	ADP
ajst-1434	50	99	warehouse	warehouse	NOUN
ajst-1434	50	100	and	and	CCONJ
ajst-1434	50	101	5	5	NUM
ajst-1434	50	102	g	g	NOUN
ajst-1434	50	103	wireless	wireless	ADJ
ajst-1434	50	104	monitoring	monitoring	NOUN
ajst-1434	50	105	of	of	ADP
ajst-1434	50	106	avg	avg	NOUN
ajst-1434	50	107	vehicles	vehicle	NOUN
ajst-1434	50	108	in	in	ADP
ajst-1434	50	109	logistics	logistic	NOUN
ajst-1434	50	110	,	,	PUNCT
ajst-1434	50	111	so	so	SCONJ
ajst-1434	50	112	as	as	SCONJ
ajst-1434	50	113	to	to	PART
ajst-1434	50	114	realize	realize	VERB
ajst-1434	50	115	the	the	DET
ajst-1434	50	116	connection	connection	NOUN
ajst-1434	50	117	between	between	ADP
ajst-1434	50	118	things	thing	NOUN
ajst-1434	50	119	and	and	CCONJ
ajst-1434	50	120	things	thing	NOUN
ajst-1434	50	121	and	and	CCONJ
ajst-1434	50	122	things	thing	NOUN
ajst-1434	50	123	and	and	CCONJ
ajst-1434	50	124	people	people	NOUN
ajst-1434	50	125	.	.	PUNCT
ajst-1434	51	1	3	3	X
ajst-1434	51	2	)	)	PUNCT
ajst-1434	51	3	industrial	industrial	ADJ
ajst-1434	51	4	ether	ether	NOUN
ajst-1434	51	5	-	-	PUNCT
ajst-1434	51	6	cat	cat	NOUN
ajst-1434	51	7	:	:	PUNCT
ajst-1434	51	8	to	to	PART
ajst-1434	51	9	realize	realize	VERB
ajst-1434	51	10	the	the	DET
ajst-1434	51	11	connection	connection	NOUN
ajst-1434	51	12	between	between	ADP
ajst-1434	51	13	the	the	DET
ajst-1434	51	14	workshop	workshop	NOUN
ajst-1434	51	15	management	management	NOUN
ajst-1434	51	16	end	end	NOUN
ajst-1434	51	17	and	and	CCONJ
ajst-1434	51	18	the	the	DET
ajst-1434	51	19	manufacturing	manufacturing	NOUN
ajst-1434	51	20	end	end	NOUN
ajst-1434	51	21	.	.	PUNCT
ajst-1434	52	1	mes	me	NOUN
ajst-1434	52	2	workstation	workstation	NOUN
ajst-1434	52	3	can	can	AUX
ajst-1434	52	4	be	be	AUX
ajst-1434	52	5	connected	connect	VERB
ajst-1434	52	6	to	to	ADP
ajst-1434	52	7	various	various	ADJ
ajst-1434	52	8	production	production	NOUN
ajst-1434	52	9	line	line	NOUN
ajst-1434	52	10	main	main	ADJ
ajst-1434	52	11	(	(	PUNCT
ajst-1434	52	12	line	line	NOUN
ajst-1434	52	13	)	)	PUNCT
ajst-1434	52	14	controllers	controller	NOUN
ajst-1434	52	15	,	,	PUNCT
ajst-1434	52	16	warehouse	warehouse	NOUN
ajst-1434	52	17	logistics	logistic	NOUN
ajst-1434	52	18	system	system	NOUN
ajst-1434	52	19	master	master	NOUN
ajst-1434	52	20	controllers	controller	NOUN
ajst-1434	52	21	,	,	PUNCT
ajst-1434	52	22	wireless	wireless	ADJ
ajst-1434	52	23	industrial	industrial	ADJ
ajst-1434	52	24	internet	internet	NOUN
ajst-1434	52	25	of	of	ADP
ajst-1434	52	26	things	thing	NOUN
ajst-1434	52	27	master	master	NOUN
ajst-1434	52	28	controllers	controller	NOUN
ajst-1434	52	29	,	,	PUNCT
ajst-1434	52	30	workshop	workshop	NOUN
ajst-1434	52	31	workstations	workstation	NOUN
ajst-1434	52	32	,	,	PUNCT
ajst-1434	52	33	process	process	NOUN
ajst-1434	52	34	workstations	workstation	NOUN
ajst-1434	52	35	,	,	PUNCT
ajst-1434	52	36	etc	etc	X
ajst-1434	52	37	.	.	X
ajst-1434	53	1	4	4	X
ajst-1434	53	2	)	)	PUNCT
ajst-1434	53	3	the	the	DET
ajst-1434	53	4	factory	factory	NOUN
ajst-1434	53	5	internet	internet	NOUN
ajst-1434	53	6	network	network	NOUN
ajst-1434	53	7	ether	ether	NOUN
ajst-1434	53	8	-	-	PUNCT
ajst-1434	53	9	net	net	NOUN
ajst-1434	53	10	:	:	PUNCT
ajst-1434	53	11	connects	connect	VERB
ajst-1434	53	12	the	the	DET
ajst-1434	53	13	factory	factory	NOUN
ajst-1434	53	14	management	management	NOUN
ajst-1434	53	15	end	end	NOUN
ajst-1434	53	16	and	and	CCONJ
ajst-1434	53	17	the	the	DET
ajst-1434	53	18	workshop	workshop	NOUN
ajst-1434	53	19	management	management	NOUN
ajst-1434	53	20	end	end	NOUN
ajst-1434	53	21	.	.	PUNCT
ajst-1434	54	1	the	the	DET
ajst-1434	54	2	erp	erp	PROPN
ajst-1434	54	3	workstation	workstation	PROPN
ajst-1434	54	4	can	can	AUX
ajst-1434	54	5	be	be	AUX
ajst-1434	54	6	connected	connect	VERB
ajst-1434	54	7	to	to	ADP
ajst-1434	54	8	mes	mes	PROPN
ajst-1434	54	9	workstation	workstation	NOUN
ajst-1434	54	10	,	,	PUNCT
ajst-1434	54	11	sales	sale	NOUN
ajst-1434	54	12	workstation	workstation	NOUN
ajst-1434	54	13	,	,	PUNCT
ajst-1434	54	14	financial	financial	ADJ
ajst-1434	54	15	workstation	workstation	NOUN
ajst-1434	54	16	,	,	PUNCT
ajst-1434	54	17	etc	etc	X
ajst-1434	54	18	.	.	X
ajst-1434	54	19	,	,	PUNCT
ajst-1434	54	20	and	and	CCONJ
ajst-1434	54	21	can	can	AUX
ajst-1434	54	22	be	be	AUX
ajst-1434	54	23	connected	connect	VERB
ajst-1434	54	24	to	to	ADP
ajst-1434	54	25	the	the	DET
ajst-1434	54	26	cloud	cloud	NOUN
ajst-1434	54	27	computing	compute	VERB
ajst-1434	54	28	network	network	NOUN
ajst-1434	54	29	platform	platform	NOUN
ajst-1434	54	30	and	and	CCONJ
ajst-1434	54	31	big	big	ADJ
ajst-1434	54	32	data	datum	NOUN
ajst-1434	54	33	platform	platform	NOUN
ajst-1434	54	34	.	.	PUNCT
ajst-1434	55	1	4	4	X
ajst-1434	55	2	.	.	X
ajst-1434	55	3	conclusion	conclusion	VERB
ajst-1434	55	4	the	the	DET
ajst-1434	55	5	global	global	ADJ
ajst-1434	55	6	shortage	shortage	NOUN
ajst-1434	55	7	of	of	ADP
ajst-1434	55	8	basic	basic	ADJ
ajst-1434	55	9	electronic	electronic	ADJ
ajst-1434	55	10	devices	device	NOUN
ajst-1434	55	11	in	in	ADP
ajst-1434	55	12	2021	2021	NUM
ajst-1434	55	13	highlights	highlight	NOUN
ajst-1434	55	14	the	the	DET
ajst-1434	55	15	indispensability	indispensability	NOUN
ajst-1434	55	16	of	of	ADP
ajst-1434	55	17	basic	basic	ADJ
ajst-1434	55	18	electronic	electronic	ADJ
ajst-1434	55	19	technology	technology	NOUN
ajst-1434	55	20	in	in	ADP
ajst-1434	55	21	today	today	NOUN
ajst-1434	55	22	's	's	PART
ajst-1434	55	23	society	society	NOUN
ajst-1434	55	24	and	and	CCONJ
ajst-1434	55	25	accelerates	accelerate	VERB
ajst-1434	55	26	the	the	DET
ajst-1434	55	27	reshaping	reshaping	NOUN
ajst-1434	55	28	of	of	ADP
ajst-1434	55	29	the	the	DET
ajst-1434	55	30	global	global	ADJ
ajst-1434	55	31	semiconductor	semiconductor	NOUN
ajst-1434	55	32	supply	supply	NOUN
ajst-1434	55	33	chain	chain	NOUN
ajst-1434	55	34	.	.	PUNCT
ajst-1434	56	1	due	due	ADP
ajst-1434	56	2	to	to	ADP
ajst-1434	56	3	the	the	DET
ajst-1434	56	4	advantages	advantage	NOUN
ajst-1434	56	5	of	of	ADP
ajst-1434	56	6	high	high	ADJ
ajst-1434	56	7	flexibility	flexibility	NOUN
ajst-1434	56	8	,	,	PUNCT
ajst-1434	56	9	low	low	ADJ
ajst-1434	56	10	cost	cost	NOUN
ajst-1434	56	11	and	and	CCONJ
ajst-1434	56	12	high	high	ADJ
ajst-1434	56	13	integration	integration	NOUN
ajst-1434	56	14	,	,	PUNCT
ajst-1434	56	15	microelectronics	microelectronic	NOUN
ajst-1434	56	16	technology	technology	NOUN
ajst-1434	56	17	has	have	AUX
ajst-1434	56	18	become	become	VERB
ajst-1434	56	19	an	an	DET
ajst-1434	56	20	important	important	ADJ
ajst-1434	56	21	technology	technology	NOUN
ajst-1434	56	22	in	in	ADP
ajst-1434	56	23	related	related	ADJ
ajst-1434	56	24	fields	field	NOUN
ajst-1434	56	25	.	.	PUNCT
ajst-1434	57	1	through	through	ADP
ajst-1434	57	2	the	the	DET
ajst-1434	57	3	development	development	NOUN
ajst-1434	57	4	of	of	ADP
ajst-1434	57	5	microelectronics	microelectronic	NOUN
ajst-1434	57	6	technology	technology	NOUN
ajst-1434	57	7	,	,	PUNCT
ajst-1434	57	8	a	a	DET
ajst-1434	57	9	better	well	ADJ
ajst-1434	57	10	platform	platform	NOUN
ajst-1434	57	11	can	can	AUX
ajst-1434	57	12	be	be	AUX
ajst-1434	57	13	expanded	expand	VERB
ajst-1434	57	14	to	to	PART
ajst-1434	57	15	serve	serve	VERB
ajst-1434	57	16	the	the	DET
ajst-1434	57	17	automatic	automatic	ADJ
ajst-1434	57	18	control	control	NOUN
ajst-1434	57	19	system	system	NOUN
ajst-1434	57	20	,	,	PUNCT
ajst-1434	57	21	so	so	SCONJ
ajst-1434	57	22	as	as	SCONJ
ajst-1434	57	23	to	to	PART
ajst-1434	57	24	promote	promote	VERB
ajst-1434	57	25	the	the	DET
ajst-1434	57	26	technological	technological	ADJ
ajst-1434	57	27	progress	progress	NOUN
ajst-1434	57	28	in	in	ADP
ajst-1434	57	29	the	the	DET
ajst-1434	57	30	era	era	NOUN
ajst-1434	57	31	of	of	ADP
ajst-1434	57	32	industry	industry	NOUN
ajst-1434	57	33	4.0	4.0	NUM
ajst-1434	57	34	.	.	PUNCT
ajst-1434	58	1	references	reference	NOUN
ajst-1434	58	2	[	[	X
ajst-1434	58	3	1	1	NUM
ajst-1434	58	4	]	]	PUNCT
ajst-1434	58	5	zou	zou	PROPN
ajst-1434	58	6	anqi	anqi	PROPN
ajst-1434	58	7	,	,	PUNCT
ajst-1434	58	8	chuan	chuan	PROPN
ajst-1434	58	9	rui	rui	PROPN
ajst-1434	58	10	,	,	PUNCT
ajst-1434	58	11	qian	qian	PROPN
ajst-1434	58	12	fang	fang	PROPN
ajst-1434	58	13	,	,	PUNCT
ajst-1434	58	14	zhang	zhang	PROPN
ajst-1434	58	15	wenyao	wenyao	PROPN
ajst-1434	58	16	,	,	PUNCT
ajst-1434	58	17	wang	wang	PROPN
ajst-1434	58	18	qiuwang	qiuwang	PROPN
ajst-1434	58	19	,	,	PUNCT
ajst-1434	58	20	zhao	zhao	PROPN
ajst-1434	58	21	cunlu	cunlu	PROPN
ajst-1434	58	22	.	.	PUNCT
ajst-1434	59	1	topology	topology	NOUN
ajst-1434	59	2	optimization	optimization	NOUN
ajst-1434	59	3	for	for	ADP
ajst-1434	59	4	a	a	DET
ajst-1434	59	5	watercooled	watercooled	ADJ
ajst-1434	59	6	heat	heat	NOUN
ajst-1434	59	7	sink	sink	NOUN
ajst-1434	59	8	in	in	ADP
ajst-1434	59	9	micro	micro	NOUN
ajst-1434	59	10	-	-	NOUN
ajst-1434	59	11	electronics	electronic	NOUN
ajst-1434	59	12	based	base	VERB
ajst-1434	59	13	on	on	ADP
ajst-1434	59	14	pareto	pareto	ADJ
ajst-1434	59	15	frontier[j	frontier[j	NOUN
ajst-1434	59	16	]	]	PUNCT
ajst-1434	59	17	.	.	PUNCT
ajst-1434	60	1	applied	apply	VERB
ajst-1434	60	2	thermal	thermal	ADJ
ajst-1434	60	3	engineering,2022,207	engineering,2022,207	NOUN
ajst-1434	60	4	.	.	PUNCT
ajst-1434	61	1	[	[	X
ajst-1434	61	2	2	2	X
ajst-1434	61	3	]	]	PUNCT
ajst-1434	61	4	toru	toru	PROPN
ajst-1434	61	5	ikeda	ikeda	PROPN
ajst-1434	61	6	,	,	PUNCT
ajst-1434	61	7	toshifumi	toshifumi	PROPN
ajst-1434	61	8	kanno	kanno	PROPN
ajst-1434	61	9	,	,	PUNCT
ajst-1434	61	10	nobuyuki	nobuyuki	NOUN
ajst-1434	61	11	shishido	shishido	NOUN
ajst-1434	61	12	,	,	PUNCT
ajst-1434	61	13	noriyuki	noriyuki	PROPN
ajst-1434	61	14	miyazaki	miyazaki	PROPN
ajst-1434	61	15	,	,	PUNCT
ajst-1434	61	16	hiroyuki	hiroyuki	PROPN
ajst-1434	61	17	tanaka	tanaka	PROPN
ajst-1434	61	18	,	,	PUNCT
ajst-1434	61	19	takuya	takuya	PROPN
ajst-1434	61	20	hatao	hatao	PROPN
ajst-1434	61	21	.	.	PUNCT
ajst-1434	62	1	strain	strain	PROPN
ajst-1434	62	2	measurement	measurement	NOUN
ajst-1434	62	3	in	in	ADP
ajst-1434	62	4	micro	micro	ADJ
ajst-1434	62	5	-	-	ADJ
ajst-1434	62	6	electronic	electronic	ADJ
ajst-1434	62	7	packages	package	NOUN
ajst-1434	62	8	using	use	VERB
ajst-1434	62	9	the	the	DET
ajst-1434	62	10	digital	digital	ADJ
ajst-1434	62	11	image	image	NOUN
ajst-1434	62	12	correlation	correlation	NOUN
ajst-1434	62	13	method[j	method[j	NOUN
ajst-1434	62	14	]	]	PUNCT
ajst-1434	62	15	.	.	PUNCT
ajst-1434	63	1	welding	weld	VERB
ajst-1434	63	2	international,2011,25(11	international,2011,25(11	PROPN
ajst-1434	63	3	)	)	PUNCT
ajst-1434	63	4	.	.	PUNCT
ajst-1434	64	1	[	[	X
ajst-1434	64	2	3	3	NUM
ajst-1434	64	3	]	]	X
ajst-1434	64	4	xiangyang	xiangyang	PROPN
ajst-1434	64	5	zhang	zhang	PROPN
ajst-1434	64	6	,	,	PUNCT
ajst-1434	64	7	wei	wei	PROPN
ajst-1434	64	8	liu	liu	PROPN
ajst-1434	64	9	.	.	PUNCT
ajst-1434	65	1	the	the	DET
ajst-1434	65	2	study	study	NOUN
ajst-1434	65	3	of	of	ADP
ajst-1434	65	4	the	the	DET
ajst-1434	65	5	use	use	NOUN
ajst-1434	65	6	of	of	ADP
ajst-1434	65	7	fdi	fdi	NOUN
ajst-1434	65	8	to	to	PART
ajst-1434	65	9	enhance	enhance	VERB
ajst-1434	65	10	the	the	DET
ajst-1434	65	11	product	product	NOUN
ajst-1434	65	12	competitiveness	competitiveness	NOUN
ajst-1434	65	13	of	of	ADP
ajst-1434	65	14	integrated	integrated	ADJ
ajst-1434	65	15	circuits	circuit	NOUN
ajst-1434	65	16	and	and	CCONJ
ajst-1434	65	17	micro	micro	ADJ
ajst-1434	65	18	-	-	ADJ
ajst-1434	65	19	electronic	electronic	ADJ
ajst-1434	65	20	components[j	components[j	PROPN
ajst-1434	65	21	]	]	PUNCT
ajst-1434	65	22	.	.	PUNCT
ajst-1434	66	1	international	international	ADJ
ajst-1434	66	2	business	business	NOUN
ajst-1434	66	3	research,2009,1(3	research,2009,1(3	PROPN
ajst-1434	66	4	)	)	PUNCT
ajst-1434	66	5	.	.	PUNCT
ajst-1434	67	1	[	[	X
ajst-1434	67	2	4	4	X
ajst-1434	67	3	]	]	X
ajst-1434	67	4	rao	rao	PROPN
ajst-1434	67	5	muzaffar	muzaffar	PROPN
ajst-1434	67	6	,	,	PUNCT
ajst-1434	67	7	lynch	lynch	PROPN
ajst-1434	67	8	liam	liam	PROPN
ajst-1434	67	9	,	,	PUNCT
ajst-1434	67	10	coady	coady	PROPN
ajst-1434	67	11	james	james	PROPN
ajst-1434	67	12	,	,	PUNCT
ajst-1434	67	13	toal	toal	PROPN
ajst-1434	67	14	daniel	daniel	PROPN
ajst-1434	67	15	,	,	PUNCT
ajst-1434	67	16	newe	newe	PROPN
ajst-1434	67	17	thomas	thomas	PROPN
ajst-1434	67	18	.	.	PUNCT
ajst-1434	68	1	integration	integration	NOUN
ajst-1434	68	2	of	of	ADP
ajst-1434	68	3	an	an	DET
ajst-1434	68	4	mes	me	NOUN
ajst-1434	68	5	and	and	CCONJ
ajst-1434	68	6	aiv	aiv	NOUN
ajst-1434	68	7	using	use	VERB
ajst-1434	68	8	a	a	DET
ajst-1434	68	9	labview	labview	NOUN
ajst-1434	68	10	middleware	middleware	NOUN
ajst-1434	68	11	scheduler	scheduler	NOUN
ajst-1434	68	12	suitable	suitable	ADJ
ajst-1434	68	13	for	for	ADP
ajst-1434	68	14	use	use	NOUN
ajst-1434	68	15	in	in	ADP
ajst-1434	68	16	industry	industry	NOUN
ajst-1434	68	17	4.0	4.0	NUM
ajst-1434	68	18	applications[j	applications[j	NOUN
ajst-1434	68	19	]	]	PUNCT
ajst-1434	68	20	.	.	PUNCT
ajst-1434	69	1	applied	apply	VERB
ajst-1434	69	2	sciences,2020,10(20	sciences,2020,10(20	PROPN
ajst-1434	69	3	)	)	PUNCT
ajst-1434	69	4	.	.	PUNCT
ajst-1434	70	1	[	[	X
ajst-1434	70	2	5	5	NUM
ajst-1434	70	3	]	]	X
ajst-1434	70	4	sven	sven	PROPN
ajst-1434	70	5	-	-	PUNCT
ajst-1434	70	6	vegard	vegard	NOUN
ajst-1434	70	7	buer	buer	PROPN
ajst-1434	70	8	,	,	PUNCT
ajst-1434	70	9	jan	jan	PROPN
ajst-1434	70	10	ola	ola	PROPN
ajst-1434	70	11	strandhagen	strandhagen	PROPN
ajst-1434	70	12	,	,	PUNCT
ajst-1434	70	13	felix	felix	PROPN
ajst-1434	70	14	t.	t.	PROPN
ajst-1434	70	15	s.	s.	PROPN
ajst-1434	70	16	chan	chan	PROPN
ajst-1434	70	17	.	.	PUNCT
ajst-1434	71	1	the	the	DET
ajst-1434	71	2	link	link	NOUN
ajst-1434	71	3	between	between	ADP
ajst-1434	71	4	industry	industry	NOUN
ajst-1434	71	5	4.0	4.0	NUM
ajst-1434	71	6	and	and	CCONJ
ajst-1434	71	7	lean	lean	ADJ
ajst-1434	71	8	manufacturing	manufacturing	NOUN
ajst-1434	71	9	:	:	PUNCT
ajst-1434	71	10	mapping	map	VERB
ajst-1434	71	11	current	current	ADJ
ajst-1434	71	12	research	research	NOUN
ajst-1434	71	13	and	and	CCONJ
ajst-1434	71	14	establishing	establish	VERB
ajst-1434	71	15	a	a	DET
ajst-1434	71	16	research	research	NOUN
ajst-1434	71	17	agenda[j	agenda[j	NOUN
ajst-1434	71	18	]	]	PUNCT
ajst-1434	71	19	.	.	PUNCT
ajst-1434	72	1	international	international	ADJ
ajst-1434	72	2	journal	journal	PROPN
ajst-1434	72	3	of	of	ADP
ajst-1434	72	4	production	production	NOUN
ajst-1434	72	5	research,2018,56(8	research,2018,56(8	NOUN
ajst-1434	72	6	)	)	PUNCT
ajst-1434	72	7	.	.	PUNCT
ajst-1434	73	1	[	[	X
ajst-1434	73	2	6	6	NUM
ajst-1434	73	3	]	]	X
ajst-1434	73	4	gao	gao	PROPN
ajst-1434	73	5	c	c	PROPN
ajst-1434	73	6	,	,	PUNCT
ajst-1434	73	7	huang	huang	PROPN
ajst-1434	73	8	j	j	PROPN
ajst-1434	73	9	,	,	PUNCT
ajst-1434	73	10	xiao	xiao	PROPN
ajst-1434	73	11	y	y	PROPN
ajst-1434	73	12	,	,	PUNCT
ajst-1434	73	13	et	et	PROPN
ajst-1434	73	14	al	al	PROPN
ajst-1434	73	15	.	.	PUNCT
ajst-1434	74	1	a	a	DET
ajst-1434	74	2	seamlessly	seamlessly	ADV
ajst-1434	74	3	integrated	integrate	VERB
ajst-1434	74	4	device	device	NOUN
ajst-1434	74	5	of	of	ADP
ajst-1434	74	6	micro	micro	NOUN
ajst-1434	74	7	-	-	NOUN
ajst-1434	74	8	supercapacitor	supercapacitor	ADJ
ajst-1434	74	9	and	and	CCONJ
ajst-1434	74	10	wireless	wireless	NOUN
ajst-1434	74	11	charging	charging	NOUN
ajst-1434	74	12	with	with	ADP
ajst-1434	74	13	ultrahigh	ultrahigh	ADJ
ajst-1434	74	14	energy	energy	NOUN
ajst-1434	74	15	density	density	NOUN
ajst-1434	74	16	and	and	CCONJ
ajst-1434	74	17	capacitance[j	capacitance[j	NOUN
ajst-1434	74	18	]	]	PUNCT
ajst-1434	74	19	.	.	PUNCT
ajst-1434	75	1	nature	nature	NOUN
ajst-1434	75	2	communications	communication	NOUN
ajst-1434	75	3	,	,	PUNCT
ajst-1434	75	4	2021	2021	NUM
ajst-1434	75	5	,	,	PUNCT
ajst-1434	75	6	12(1	12(1	NUM
ajst-1434	75	7	):	):	PUNCT
ajst-1434	75	8	1	1	NUM
ajst-1434	75	9	-	-	SYM
ajst-1434	75	10	10	10	NUM
ajst-1434	75	11	.	.	PUNCT