id	sid	tid	token	lemma	pos
ajst-25629	1	1	academic	academic	ADJ
ajst-25629	1	2	journal	journal	NOUN
ajst-25629	1	3	of	of	ADP
ajst-25629	1	4	science	science	NOUN
ajst-25629	1	5	and	and	CCONJ
ajst-25629	1	6	technology	technology	NOUN
ajst-25629	1	7	issn	issn	NOUN
ajst-25629	1	8	:	:	PUNCT
ajst-25629	1	9	2771	2771	NUM
ajst-25629	1	10	-	-	SYM
ajst-25629	1	11	3032	3032	NUM
ajst-25629	1	12	|	|	NOUN
ajst-25629	1	13	vol	vol	NOUN
ajst-25629	1	14	.	.	PROPN
ajst-25629	2	1	12	12	NUM
ajst-25629	2	2	,	,	PUNCT
ajst-25629	2	3	no	no	INTJ
ajst-25629	2	4	.	.	NOUN
ajst-25629	2	5	2	2	NUM
ajst-25629	2	6	,	,	PUNCT
ajst-25629	2	7	2024	2024	NUM
ajst-25629	2	8	214	214	NUM
ajst-25629	2	9	study	study	NOUN
ajst-25629	2	10	on	on	ADP
ajst-25629	2	11	preparation	preparation	NOUN
ajst-25629	2	12	of	of	ADP
ajst-25629	2	13	crsi	crsi	ADJ
ajst-25629	2	14	thin	thin	ADJ
ajst-25629	2	15	film	film	NOUN
ajst-25629	2	16	resistance	resistance	NOUN
ajst-25629	2	17	by	by	ADP
ajst-25629	2	18	magnetron	magnetron	NOUN
ajst-25629	2	19	sputtering	sputter	VERB
ajst-25629	2	20	mei	mei	PROPN
ajst-25629	2	21	ji	ji	PROPN
ajst-25629	2	22	department	department	PROPN
ajst-25629	2	23	of	of	ADP
ajst-25629	2	24	electronics	electronic	NOUN
ajst-25629	2	25	and	and	CCONJ
ajst-25629	2	26	communication	communication	NOUN
ajst-25629	2	27	engineering	engineering	NOUN
ajst-25629	2	28	,	,	PUNCT
ajst-25629	2	29	suzhou	suzhou	PROPN
ajst-25629	2	30	institute	institute	PROPN
ajst-25629	2	31	of	of	ADP
ajst-25629	2	32	industrial	industrial	PROPN
ajst-25629	2	33	technology	technology	NOUN
ajst-25629	2	34	,	,	PUNCT
ajst-25629	2	35	suzhou	suzhou	PROPN
ajst-25629	2	36	215104	215104	PROPN
ajst-25629	2	37	,	,	PUNCT
ajst-25629	2	38	china	china	PROPN
ajst-25629	2	39	abstract	abstract	PROPN
ajst-25629	2	40	:	:	PUNCT
ajst-25629	3	1	thin	thin	ADJ
ajst-25629	3	2	films	film	NOUN
ajst-25629	3	3	prepared	prepare	VERB
ajst-25629	3	4	by	by	ADP
ajst-25629	3	5	magnetron	magnetron	NOUN
ajst-25629	3	6	sputtering	sputtering	NOUN
ajst-25629	3	7	can	can	AUX
ajst-25629	3	8	overcome	overcome	VERB
ajst-25629	3	9	the	the	DET
ajst-25629	3	10	shortcomings	shortcoming	NOUN
ajst-25629	3	11	of	of	ADP
ajst-25629	3	12	electron	electron	NOUN
ajst-25629	3	13	beam	beam	NOUN
ajst-25629	3	14	evaporation	evaporation	NOUN
ajst-25629	3	15	and	and	CCONJ
ajst-25629	3	16	have	have	VERB
ajst-25629	3	17	the	the	DET
ajst-25629	3	18	advantages	advantage	NOUN
ajst-25629	3	19	of	of	ADP
ajst-25629	3	20	film	film	NOUN
ajst-25629	3	21	thickness	thickness	NOUN
ajst-25629	3	22	control	control	NOUN
ajst-25629	3	23	,	,	PUNCT
ajst-25629	3	24	adhesion	adhesion	NOUN
ajst-25629	3	25	,	,	PUNCT
ajst-25629	3	26	density	density	NOUN
ajst-25629	3	27	,	,	PUNCT
ajst-25629	3	28	conductivity	conductivity	NOUN
ajst-25629	3	29	and	and	CCONJ
ajst-25629	3	30	refractive	refractive	ADJ
ajst-25629	3	31	index	index	NOUN
ajst-25629	3	32	,	,	PUNCT
ajst-25629	3	33	etc	etc	X
ajst-25629	3	34	.	.	X
ajst-25629	4	1	this	this	DET
ajst-25629	4	2	paper	paper	NOUN
ajst-25629	4	3	uses	use	VERB
ajst-25629	4	4	the	the	DET
ajst-25629	4	5	method	method	NOUN
ajst-25629	4	6	of	of	ADP
ajst-25629	4	7	literature	literature	NOUN
ajst-25629	4	8	research	research	NOUN
ajst-25629	4	9	and	and	CCONJ
ajst-25629	4	10	review	review	NOUN
ajst-25629	4	11	to	to	PART
ajst-25629	4	12	clarify	clarify	VERB
ajst-25629	4	13	the	the	DET
ajst-25629	4	14	specific	specific	ADJ
ajst-25629	4	15	process	process	NOUN
ajst-25629	4	16	influencing	influence	VERB
ajst-25629	4	17	factors	factor	NOUN
ajst-25629	4	18	in	in	ADP
ajst-25629	4	19	the	the	DET
ajst-25629	4	20	preparation	preparation	NOUN
ajst-25629	4	21	of	of	ADP
ajst-25629	4	22	crsi	crsi	NOUN
ajst-25629	4	23	films	film	NOUN
ajst-25629	4	24	by	by	ADP
ajst-25629	4	25	magnetron	magnetron	NOUN
ajst-25629	4	26	sputtering	sputtering	ADJ
ajst-25629	4	27	and	and	CCONJ
ajst-25629	4	28	subsequent	subsequent	ADJ
ajst-25629	4	29	annealing	annealing	NOUN
ajst-25629	4	30	.	.	PUNCT
ajst-25629	5	1	it	it	PRON
ajst-25629	5	2	provides	provide	VERB
ajst-25629	5	3	a	a	DET
ajst-25629	5	4	reference	reference	NOUN
ajst-25629	5	5	basis	basis	NOUN
ajst-25629	5	6	for	for	ADP
ajst-25629	5	7	the	the	DET
ajst-25629	5	8	integrated	integrate	VERB
ajst-25629	5	9	application	application	NOUN
ajst-25629	5	10	of	of	ADP
ajst-25629	5	11	crsi	crsi	ADJ
ajst-25629	5	12	thin	thin	ADJ
ajst-25629	5	13	film	film	NOUN
ajst-25629	5	14	resistors	resistor	NOUN
ajst-25629	5	15	.	.	PUNCT
ajst-25629	6	1	keywords	keyword	NOUN
ajst-25629	6	2	:	:	PUNCT
ajst-25629	6	3	magnetron	magnetron	NOUN
ajst-25629	6	4	sputtering	sputtering	NOUN
ajst-25629	6	5	;	;	PUNCT
ajst-25629	6	6	crsi	crsi	NOUN
ajst-25629	6	7	thin	thin	ADJ
ajst-25629	6	8	film	film	NOUN
ajst-25629	6	9	;	;	PUNCT
ajst-25629	6	10	annealing	anneal	VERB
ajst-25629	6	11	process	process	NOUN
ajst-25629	6	12	.	.	PUNCT
ajst-25629	7	1	1	1	X
ajst-25629	7	2	.	.	X
ajst-25629	7	3	introduction	introduction	NOUN
ajst-25629	7	4	metal	metal	NOUN
ajst-25629	7	5	film	film	NOUN
ajst-25629	7	6	resistors	resistor	NOUN
ajst-25629	7	7	have	have	VERB
ajst-25629	7	8	good	good	ADJ
ajst-25629	7	9	stability	stability	NOUN
ajst-25629	7	10	and	and	CCONJ
ajst-25629	7	11	high	high	ADJ
ajst-25629	7	12	precision	precision	NOUN
ajst-25629	7	13	,	,	PUNCT
ajst-25629	7	14	they	they	PRON
ajst-25629	7	15	are	be	AUX
ajst-25629	7	16	widely	widely	ADV
ajst-25629	7	17	used	use	VERB
ajst-25629	7	18	in	in	ADP
ajst-25629	7	19	analog	analog	NOUN
ajst-25629	7	20	integrated	integrate	VERB
ajst-25629	7	21	circuits	circuit	NOUN
ajst-25629	7	22	.	.	PUNCT
ajst-25629	8	1	in	in	ADP
ajst-25629	8	2	recent	recent	ADJ
ajst-25629	8	3	years	year	NOUN
ajst-25629	8	4	,	,	PUNCT
ajst-25629	8	5	researchers	researcher	NOUN
ajst-25629	8	6	have	have	AUX
ajst-25629	8	7	paid	pay	VERB
ajst-25629	8	8	particular	particular	ADJ
ajst-25629	8	9	attention	attention	NOUN
ajst-25629	8	10	to	to	ADP
ajst-25629	8	11	materials	material	NOUN
ajst-25629	8	12	such	such	ADJ
ajst-25629	8	13	as	as	ADP
ajst-25629	8	14	crsi	crsi	NOUN
ajst-25629	8	15	,	,	PUNCT
ajst-25629	8	16	tan	tan	PROPN
ajst-25629	8	17	and	and	CCONJ
ajst-25629	8	18	nicr	nicr	ADV
ajst-25629	8	19	,	,	PUNCT
ajst-25629	8	20	looking	look	VERB
ajst-25629	8	21	for	for	ADP
ajst-25629	8	22	ways	way	NOUN
ajst-25629	8	23	to	to	PART
ajst-25629	8	24	further	far	ADV
ajst-25629	8	25	improve	improve	VERB
ajst-25629	8	26	the	the	DET
ajst-25629	8	27	stability	stability	NOUN
ajst-25629	8	28	of	of	ADP
ajst-25629	8	29	electrical	electrical	ADJ
ajst-25629	8	30	metal	metal	NOUN
ajst-25629	8	31	films	film	NOUN
ajst-25629	8	32	.	.	PUNCT
ajst-25629	9	1	among	among	ADP
ajst-25629	9	2	them	they	PRON
ajst-25629	9	3	,	,	PUNCT
ajst-25629	9	4	crsi	crsi	VERB
ajst-25629	9	5	thin	thin	ADJ
ajst-25629	9	6	film	film	NOUN
ajst-25629	9	7	resistance	resistance	NOUN
ajst-25629	9	8	has	have	VERB
ajst-25629	9	9	the	the	DET
ajst-25629	9	10	advantages	advantage	NOUN
ajst-25629	9	11	of	of	ADP
ajst-25629	9	12	large	large	ADJ
ajst-25629	9	13	resistance	resistance	NOUN
ajst-25629	9	14	value	value	NOUN
ajst-25629	9	15	,	,	PUNCT
ajst-25629	9	16	good	good	ADJ
ajst-25629	9	17	stability	stability	NOUN
ajst-25629	9	18	and	and	CCONJ
ajst-25629	9	19	small	small	ADJ
ajst-25629	9	20	resistance	resistance	NOUN
ajst-25629	9	21	temperature	temperature	NOUN
ajst-25629	9	22	coefficient	coefficient	NOUN
ajst-25629	9	23	,	,	PUNCT
ajst-25629	9	24	so	so	CCONJ
ajst-25629	9	25	it	it	PRON
ajst-25629	9	26	is	be	AUX
ajst-25629	9	27	widely	widely	ADV
ajst-25629	9	28	used	use	VERB
ajst-25629	9	29	and	and	CCONJ
ajst-25629	9	30	selected	select	VERB
ajst-25629	9	31	as	as	ADP
ajst-25629	9	32	the	the	DET
ajst-25629	9	33	key	key	ADJ
ajst-25629	9	34	research	research	NOUN
ajst-25629	9	35	object	object	NOUN
ajst-25629	9	36	in	in	ADP
ajst-25629	9	37	the	the	DET
ajst-25629	9	38	field	field	NOUN
ajst-25629	9	39	of	of	ADP
ajst-25629	9	40	thin	thin	ADJ
ajst-25629	9	41	film	film	NOUN
ajst-25629	9	42	resistance	resistance	NOUN
ajst-25629	9	43	application	application	NOUN
ajst-25629	10	1	[	[	X
ajst-25629	10	2	1	1	NUM
ajst-25629	10	3	-	-	SYM
ajst-25629	10	4	3	3	NUM
ajst-25629	10	5	]	]	PUNCT
ajst-25629	10	6	.	.	PUNCT
ajst-25629	11	1	the	the	DET
ajst-25629	11	2	preparation	preparation	NOUN
ajst-25629	11	3	of	of	ADP
ajst-25629	11	4	crsi	crsi	ADJ
ajst-25629	11	5	thin	thin	ADJ
ajst-25629	11	6	film	film	NOUN
ajst-25629	11	7	resistors	resistor	NOUN
ajst-25629	11	8	by	by	ADP
ajst-25629	11	9	magnetron	magnetron	NOUN
ajst-25629	11	10	sputtering	sputtering	NOUN
ajst-25629	11	11	can	can	AUX
ajst-25629	11	12	not	not	PART
ajst-25629	11	13	only	only	ADV
ajst-25629	11	14	improve	improve	VERB
ajst-25629	11	15	the	the	DET
ajst-25629	11	16	film	film	NOUN
ajst-25629	11	17	characteristics	characteristic	NOUN
ajst-25629	11	18	,	,	PUNCT
ajst-25629	11	19	produce	produce	VERB
ajst-25629	11	20	high	high	ADJ
ajst-25629	11	21	-	-	PUNCT
ajst-25629	11	22	quality	quality	NOUN
ajst-25629	11	23	thin	thin	ADJ
ajst-25629	11	24	film	film	NOUN
ajst-25629	11	25	resistors	resistor	NOUN
ajst-25629	11	26	,	,	PUNCT
ajst-25629	11	27	improve	improve	VERB
ajst-25629	11	28	the	the	DET
ajst-25629	11	29	performance	performance	NOUN
ajst-25629	11	30	of	of	ADP
ajst-25629	11	31	integrated	integrated	ADJ
ajst-25629	11	32	circuits	circuit	NOUN
ajst-25629	11	33	,	,	PUNCT
ajst-25629	11	34	but	but	CCONJ
ajst-25629	11	35	also	also	ADV
ajst-25629	11	36	bring	bring	VERB
ajst-25629	11	37	higher	high	ADJ
ajst-25629	11	38	stability	stability	NOUN
ajst-25629	11	39	and	and	CCONJ
ajst-25629	11	40	reliability	reliability	NOUN
ajst-25629	11	41	to	to	ADP
ajst-25629	11	42	military	military	ADJ
ajst-25629	11	43	aerospace	aerospace	NOUN
ajst-25629	11	44	products	product	NOUN
ajst-25629	11	45	[	[	X
ajst-25629	11	46	4	4	NUM
ajst-25629	11	47	]	]	PUNCT
ajst-25629	11	48	.	.	PUNCT
ajst-25629	12	1	in	in	ADP
ajst-25629	12	2	this	this	DET
ajst-25629	12	3	paper	paper	NOUN
ajst-25629	12	4	,	,	PUNCT
ajst-25629	12	5	the	the	DET
ajst-25629	12	6	effects	effect	NOUN
ajst-25629	12	7	of	of	ADP
ajst-25629	12	8	sputtering	sputtering	ADJ
ajst-25629	12	9	conditions	condition	NOUN
ajst-25629	12	10	,	,	PUNCT
ajst-25629	12	11	such	such	ADJ
ajst-25629	12	12	as	as	ADP
ajst-25629	12	13	sputtering	sputtering	ADJ
ajst-25629	12	14	power	power	NOUN
ajst-25629	12	15	,	,	PUNCT
ajst-25629	12	16	sputtering	sputtering	ADJ
ajst-25629	12	17	pressure	pressure	NOUN
ajst-25629	12	18	,	,	PUNCT
ajst-25629	12	19	substrate	substrate	NOUN
ajst-25629	12	20	heating	heating	NOUN
ajst-25629	12	21	temperature	temperature	NOUN
ajst-25629	12	22	,	,	PUNCT
ajst-25629	12	23	process	process	NOUN
ajst-25629	12	24	gas	gas	NOUN
ajst-25629	12	25	volume	volume	NOUN
ajst-25629	12	26	flow	flow	NOUN
ajst-25629	12	27	rate	rate	NOUN
ajst-25629	12	28	and	and	CCONJ
ajst-25629	12	29	subsequent	subsequent	ADJ
ajst-25629	12	30	annealing	anneal	VERB
ajst-25629	12	31	parameters	parameter	NOUN
ajst-25629	12	32	on	on	ADP
ajst-25629	12	33	the	the	DET
ajst-25629	12	34	film	film	NOUN
ajst-25629	12	35	resistance	resistance	NOUN
ajst-25629	12	36	during	during	ADP
ajst-25629	12	37	the	the	DET
ajst-25629	12	38	preparation	preparation	NOUN
ajst-25629	12	39	of	of	ADP
ajst-25629	12	40	metal	metal	NOUN
ajst-25629	12	41	films	film	NOUN
ajst-25629	12	42	were	be	AUX
ajst-25629	12	43	studied	study	VERB
ajst-25629	12	44	,	,	PUNCT
ajst-25629	12	45	which	which	PRON
ajst-25629	12	46	provided	provide	VERB
ajst-25629	12	47	a	a	DET
ajst-25629	12	48	reference	reference	NOUN
ajst-25629	12	49	for	for	ADP
ajst-25629	12	50	the	the	DET
ajst-25629	12	51	industry	industry	NOUN
ajst-25629	12	52	to	to	PART
ajst-25629	12	53	obtain	obtain	VERB
ajst-25629	12	54	high	high	ADJ
ajst-25629	12	55	stability	stability	NOUN
ajst-25629	12	56	and	and	CCONJ
ajst-25629	12	57	reliability	reliability	NOUN
ajst-25629	12	58	of	of	ADP
ajst-25629	12	59	crsi	crsi	ADJ
ajst-25629	12	60	metal	metal	NOUN
ajst-25629	12	61	films	film	NOUN
ajst-25629	12	62	.	.	PUNCT
ajst-25629	13	1	2	2	X
ajst-25629	13	2	.	.	X
ajst-25629	13	3	properties	property	NOUN
ajst-25629	13	4	and	and	CCONJ
ajst-25629	13	5	characterization	characterization	NOUN
ajst-25629	13	6	of	of	ADP
ajst-25629	13	7	crsi	crsi	NOUN
ajst-25629	13	8	films	film	NOUN
ajst-25629	13	9	2.1	2.1	NUM
ajst-25629	13	10	.	.	PUNCT
ajst-25629	14	1	crsi	crsi	NOUN
ajst-25629	14	2	conductive	conductive	ADJ
ajst-25629	14	3	mechanism	mechanism	NOUN
ajst-25629	14	4	the	the	DET
ajst-25629	14	5	electrical	electrical	ADJ
ajst-25629	14	6	transmission	transmission	NOUN
ajst-25629	14	7	of	of	ADP
ajst-25629	14	8	thin	thin	ADJ
ajst-25629	14	9	film	film	NOUN
ajst-25629	14	10	resistance	resistance	NOUN
ajst-25629	14	11	can	can	AUX
ajst-25629	14	12	be	be	AUX
ajst-25629	14	13	divided	divide	VERB
ajst-25629	14	14	into	into	ADP
ajst-25629	14	15	two	two	NUM
ajst-25629	14	16	parts	part	NOUN
ajst-25629	14	17	:	:	PUNCT
ajst-25629	14	18	one	one	NUM
ajst-25629	14	19	is	be	AUX
ajst-25629	14	20	the	the	DET
ajst-25629	14	21	transmission	transmission	NOUN
ajst-25629	14	22	inside	inside	ADP
ajst-25629	14	23	the	the	DET
ajst-25629	14	24	grain	grain	NOUN
ajst-25629	14	25	;	;	PUNCT
ajst-25629	14	26	the	the	DET
ajst-25629	14	27	other	other	ADJ
ajst-25629	14	28	part	part	NOUN
ajst-25629	14	29	is	be	AUX
ajst-25629	14	30	the	the	DET
ajst-25629	14	31	transport	transport	NOUN
ajst-25629	14	32	between	between	ADP
ajst-25629	14	33	grains	grain	NOUN
ajst-25629	14	34	.	.	PUNCT
ajst-25629	15	1	it	it	PRON
ajst-25629	15	2	is	be	AUX
ajst-25629	15	3	assumed	assume	VERB
ajst-25629	15	4	that	that	SCONJ
ajst-25629	15	5	the	the	DET
ajst-25629	15	6	transport	transport	NOUN
ajst-25629	15	7	within	within	ADP
ajst-25629	15	8	the	the	DET
ajst-25629	15	9	grain	grain	NOUN
ajst-25629	15	10	is	be	AUX
ajst-25629	15	11	continuous	continuous	ADJ
ajst-25629	15	12	metal	metal	NOUN
ajst-25629	15	13	film	film	NOUN
ajst-25629	15	14	,	,	PUNCT
ajst-25629	15	15	and	and	CCONJ
ajst-25629	15	16	the	the	DET
ajst-25629	15	17	transport	transport	NOUN
ajst-25629	15	18	between	between	ADP
ajst-25629	15	19	the	the	DET
ajst-25629	15	20	grains	grain	NOUN
ajst-25629	15	21	is	be	AUX
ajst-25629	15	22	activated	activate	VERB
ajst-25629	15	23	tunnel	tunnel	NOUN
ajst-25629	15	24	effect	effect	NOUN
ajst-25629	15	25	.	.	PUNCT
ajst-25629	16	1	the	the	DET
ajst-25629	16	2	essence	essence	NOUN
ajst-25629	16	3	of	of	ADP
ajst-25629	16	4	activating	activate	VERB
ajst-25629	16	5	the	the	DET
ajst-25629	16	6	tunneling	tunneling	NOUN
ajst-25629	16	7	effect	effect	NOUN
ajst-25629	16	8	is	be	AUX
ajst-25629	16	9	to	to	PART
ajst-25629	16	10	combine	combine	VERB
ajst-25629	16	11	the	the	DET
ajst-25629	16	12	mechanism	mechanism	NOUN
ajst-25629	16	13	of	of	ADP
ajst-25629	16	14	thermal	thermal	ADJ
ajst-25629	16	15	activation	activation	NOUN
ajst-25629	16	16	of	of	ADP
ajst-25629	16	17	carriers	carrier	NOUN
ajst-25629	16	18	with	with	ADP
ajst-25629	16	19	the	the	DET
ajst-25629	16	20	tunneling	tunneling	NOUN
ajst-25629	16	21	effect	effect	NOUN
ajst-25629	16	22	,	,	PUNCT
ajst-25629	16	23	the	the	DET
ajst-25629	16	24	main	main	ADJ
ajst-25629	16	25	content	content	NOUN
ajst-25629	16	26	of	of	ADP
ajst-25629	16	27	which	which	PRON
ajst-25629	16	28	is	be	AUX
ajst-25629	16	29	that	that	SCONJ
ajst-25629	16	30	electrons	electron	NOUN
ajst-25629	16	31	move	move	VERB
ajst-25629	16	32	from	from	ADP
ajst-25629	16	33	one	one	NUM
ajst-25629	16	34	neutral	neutral	ADJ
ajst-25629	16	35	island	island	NOUN
ajst-25629	16	36	to	to	ADP
ajst-25629	16	37	another	another	DET
ajst-25629	16	38	neutral	neutral	ADJ
ajst-25629	16	39	island	island	NOUN
ajst-25629	16	40	so	so	SCONJ
ajst-25629	16	41	that	that	SCONJ
ajst-25629	16	42	some	some	PRON
ajst-25629	16	43	of	of	ADP
ajst-25629	16	44	the	the	DET
ajst-25629	16	45	original	original	ADJ
ajst-25629	16	46	neutral	neutral	ADJ
ajst-25629	16	47	islands	island	NOUN
ajst-25629	16	48	are	be	AUX
ajst-25629	16	49	charged	charge	VERB
ajst-25629	16	50	.	.	PUNCT
ajst-25629	17	1	the	the	DET
ajst-25629	17	2	electron	electron	NOUN
ajst-25629	17	3	transmission	transmission	NOUN
ajst-25629	17	4	between	between	ADP
ajst-25629	17	5	the	the	DET
ajst-25629	17	6	electric	electric	ADJ
ajst-25629	17	7	island	island	NOUN
ajst-25629	17	8	and	and	CCONJ
ajst-25629	17	9	the	the	DET
ajst-25629	17	10	neutral	neutral	ADJ
ajst-25629	17	11	island	island	NOUN
ajst-25629	17	12	is	be	AUX
ajst-25629	17	13	a	a	DET
ajst-25629	17	14	tunnel	tunnel	NOUN
ajst-25629	17	15	process	process	NOUN
ajst-25629	17	16	,	,	PUNCT
ajst-25629	17	17	and	and	CCONJ
ajst-25629	17	18	the	the	DET
ajst-25629	17	19	tunnel	tunnel	NOUN
ajst-25629	17	20	process	process	NOUN
ajst-25629	17	21	is	be	AUX
ajst-25629	17	22	more	more	ADV
ajst-25629	17	23	sensitive	sensitive	ADJ
ajst-25629	17	24	to	to	ADP
ajst-25629	17	25	the	the	DET
ajst-25629	17	26	distance	distance	NOUN
ajst-25629	17	27	between	between	ADP
ajst-25629	17	28	the	the	DET
ajst-25629	17	29	islands	island	NOUN
ajst-25629	17	30	.	.	PUNCT
ajst-25629	18	1	the	the	DET
ajst-25629	18	2	electron	electron	NOUN
ajst-25629	18	3	scattering	scatter	VERB
ajst-25629	18	4	resistivity	resistivity	NOUN
ajst-25629	18	5	inside	inside	ADP
ajst-25629	18	6	the	the	DET
ajst-25629	18	7	grain	grain	NOUN
ajst-25629	18	8	increases	increase	NOUN
ajst-25629	18	9	with	with	ADP
ajst-25629	18	10	the	the	DET
ajst-25629	18	11	increase	increase	NOUN
ajst-25629	18	12	of	of	ADP
ajst-25629	18	13	temperature	temperature	NOUN
ajst-25629	18	14	,	,	PUNCT
ajst-25629	18	15	resulting	result	VERB
ajst-25629	18	16	in	in	ADP
ajst-25629	18	17	a	a	DET
ajst-25629	18	18	positive	positive	ADJ
ajst-25629	18	19	temperature	temperature	NOUN
ajst-25629	18	20	coefficient	coefficient	NOUN
ajst-25629	18	21	of	of	ADP
ajst-25629	18	22	resistance	resistance	NOUN
ajst-25629	18	23	.	.	PUNCT
ajst-25629	19	1	the	the	PRON
ajst-25629	19	2	higher	high	ADJ
ajst-25629	19	3	the	the	DET
ajst-25629	19	4	insulating	insulate	VERB
ajst-25629	19	5	phase	phase	NOUN
ajst-25629	19	6	temperature	temperature	NOUN
ajst-25629	19	7	between	between	ADP
ajst-25629	19	8	grains	grain	NOUN
ajst-25629	19	9	,	,	PUNCT
ajst-25629	19	10	the	the	PRON
ajst-25629	19	11	higher	high	ADJ
ajst-25629	19	12	the	the	DET
ajst-25629	19	13	energy	energy	NOUN
ajst-25629	19	14	obtained	obtain	VERB
ajst-25629	19	15	by	by	ADP
ajst-25629	19	16	electrons	electron	NOUN
ajst-25629	19	17	,	,	PUNCT
ajst-25629	19	18	and	and	CCONJ
ajst-25629	19	19	the	the	DET
ajst-25629	19	20	more	more	ADJ
ajst-25629	19	21	electrons	electron	NOUN
ajst-25629	19	22	that	that	PRON
ajst-25629	19	23	tunnel	tunnel	VERB
ajst-25629	19	24	through	through	ADP
ajst-25629	19	25	the	the	DET
ajst-25629	19	26	barrier	barrier	NOUN
ajst-25629	19	27	resulting	result	VERB
ajst-25629	19	28	in	in	ADP
ajst-25629	19	29	a	a	DET
ajst-25629	19	30	negative	negative	ADJ
ajst-25629	19	31	temperature	temperature	NOUN
ajst-25629	19	32	coefficient	coefficient	NOUN
ajst-25629	19	33	of	of	ADP
ajst-25629	19	34	resistivity	resistivity	NOUN
ajst-25629	19	35	.	.	PUNCT
ajst-25629	20	1	the	the	DET
ajst-25629	20	2	final	final	ADJ
ajst-25629	20	3	temperature	temperature	NOUN
ajst-25629	20	4	coefficient	coefficient	NOUN
ajst-25629	20	5	of	of	ADP
ajst-25629	20	6	the	the	DET
ajst-25629	20	7	film	film	NOUN
ajst-25629	20	8	resistance	resistance	NOUN
ajst-25629	20	9	is	be	AUX
ajst-25629	20	10	the	the	DET
ajst-25629	20	11	result	result	NOUN
ajst-25629	20	12	of	of	ADP
ajst-25629	20	13	two	two	NUM
ajst-25629	20	14	competing	compete	VERB
ajst-25629	20	15	trends	trend	NOUN
ajst-25629	20	16	[	[	X
ajst-25629	20	17	5	5	NUM
ajst-25629	20	18	-	-	SYM
ajst-25629	20	19	6	6	NUM
ajst-25629	20	20	]	]	PUNCT
ajst-25629	20	21	.	.	PUNCT
ajst-25629	21	1	2.2	2.2	NUM
ajst-25629	21	2	.	.	PUNCT
ajst-25629	22	1	tcr	tcr	PROPN
ajst-25629	22	2	the	the	DET
ajst-25629	22	3	physical	physical	ADJ
ajst-25629	22	4	meaning	meaning	NOUN
ajst-25629	22	5	of	of	ADP
ajst-25629	22	6	tcr	tcr	PROPN
ajst-25629	22	7	is	be	AUX
ajst-25629	22	8	the	the	DET
ajst-25629	22	9	relative	relative	ADJ
ajst-25629	22	10	change	change	NOUN
ajst-25629	22	11	rate	rate	NOUN
ajst-25629	22	12	of	of	ADP
ajst-25629	22	13	resistance	resistance	NOUN
ajst-25629	22	14	value	value	NOUN
ajst-25629	22	15	of	of	ADP
ajst-25629	22	16	resistance	resistance	NOUN
ajst-25629	22	17	(	(	PUNCT
ajst-25629	22	18	r	r	NOUN
ajst-25629	22	19	)	)	PUNCT
ajst-25629	22	20	when	when	SCONJ
ajst-25629	22	21	the	the	DET
ajst-25629	22	22	temperature	temperature	NOUN
ajst-25629	22	23	changes	change	VERB
ajst-25629	22	24	by	by	ADP
ajst-25629	22	25	1	1	NUM
ajst-25629	22	26	℃	℃	PROPN
ajst-25629	23	1	.	.	PUNCT
ajst-25629	23	2	tcr	tcr	PROPN
ajst-25629	23	3	(	(	PUNCT
ajst-25629	23	4	resistance	resistance	NOUN
ajst-25629	23	5	temperature	temperature	NOUN
ajst-25629	23	6	coefficient	coefficient	NOUN
ajst-25629	23	7	)	)	PUNCT
ajst-25629	23	8	is	be	AUX
ajst-25629	23	9	an	an	DET
ajst-25629	23	10	important	important	ADJ
ajst-25629	23	11	parameter	parameter	NOUN
ajst-25629	23	12	of	of	ADP
ajst-25629	23	13	the	the	DET
ajst-25629	23	14	film	film	NOUN
ajst-25629	23	15	resistance	resistance	NOUN
ajst-25629	23	16	,	,	PUNCT
ajst-25629	23	17	and	and	CCONJ
ajst-25629	23	18	its	its	PRON
ajst-25629	23	19	value	value	NOUN
ajst-25629	23	20	reflects	reflect	VERB
ajst-25629	23	21	the	the	DET
ajst-25629	23	22	stability	stability	NOUN
ajst-25629	23	23	of	of	ADP
ajst-25629	23	24	the	the	DET
ajst-25629	23	25	film	film	NOUN
ajst-25629	23	26	resistance	resistance	NOUN
ajst-25629	23	27	under	under	ADP
ajst-25629	23	28	the	the	DET
ajst-25629	23	29	condition	condition	NOUN
ajst-25629	23	30	of	of	ADP
ajst-25629	23	31	temperature	temperature	NOUN
ajst-25629	23	32	change	change	NOUN
ajst-25629	23	33	.	.	PUNCT
ajst-25629	24	1	it	it	PRON
ajst-25629	24	2	is	be	AUX
ajst-25629	24	3	found	find	VERB
ajst-25629	24	4	that	that	SCONJ
ajst-25629	24	5	tcr	tcr	PROPN
ajst-25629	24	6	is	be	AUX
ajst-25629	24	7	closely	closely	ADV
ajst-25629	24	8	related	relate	VERB
ajst-25629	24	9	to	to	ADP
ajst-25629	24	10	the	the	DET
ajst-25629	24	11	film	film	NOUN
ajst-25629	24	12	forming	form	VERB
ajst-25629	24	13	process	process	NOUN
ajst-25629	24	14	and	and	CCONJ
ajst-25629	24	15	heat	heat	NOUN
ajst-25629	24	16	treatment	treatment	NOUN
ajst-25629	24	17	conditions	condition	NOUN
ajst-25629	24	18	.	.	PUNCT
ajst-25629	25	1	in	in	ADP
ajst-25629	25	2	the	the	DET
ajst-25629	25	3	determined	determined	ADJ
ajst-25629	25	4	film	film	NOUN
ajst-25629	25	5	forming	form	VERB
ajst-25629	25	6	process	process	NOUN
ajst-25629	25	7	,	,	PUNCT
ajst-25629	25	8	finding	find	VERB
ajst-25629	25	9	the	the	DET
ajst-25629	25	10	best	good	ADJ
ajst-25629	25	11	heat	heat	NOUN
ajst-25629	25	12	treatment	treatment	NOUN
ajst-25629	25	13	conditions	condition	NOUN
ajst-25629	25	14	to	to	PART
ajst-25629	25	15	obtain	obtain	VERB
ajst-25629	25	16	the	the	DET
ajst-25629	25	17	lowest	low	ADJ
ajst-25629	25	18	tcr	tcr	NOUN
ajst-25629	25	19	and	and	CCONJ
ajst-25629	25	20	stable	stable	ADJ
ajst-25629	25	21	resistance	resistance	NOUN
ajst-25629	25	22	change	change	NOUN
ajst-25629	25	23	△	△	NOUN
ajst-25629	25	24	r	r	NOUN
ajst-25629	25	25	(	(	PUNCT
ajst-25629	25	26	%	%	INTJ
ajst-25629	25	27	)	)	PUNCT
ajst-25629	25	28	is	be	AUX
ajst-25629	25	29	the	the	DET
ajst-25629	25	30	ultimate	ultimate	ADJ
ajst-25629	25	31	goal	goal	NOUN
ajst-25629	25	32	of	of	ADP
ajst-25629	25	33	the	the	DET
ajst-25629	25	34	film	film	NOUN
ajst-25629	25	35	resistance	resistance	NOUN
ajst-25629	25	36	process	process	NOUN
ajst-25629	25	37	[	[	X
ajst-25629	25	38	2,6	2,6	NUM
ajst-25629	25	39	]	]	NOUN
ajst-25629	25	40	.	.	PUNCT
ajst-25629	26	1	3	3	X
ajst-25629	26	2	.	.	X
ajst-25629	26	3	technological	technological	ADJ
ajst-25629	26	4	parameter	parameter	NOUN
ajst-25629	26	5	3.1	3.1	NUM
ajst-25629	26	6	.	.	PUNCT
ajst-25629	26	7	sputtering	sputter	VERB
ajst-25629	26	8	pressure	pressure	NOUN
ajst-25629	26	9	in	in	ADP
ajst-25629	26	10	order	order	NOUN
ajst-25629	26	11	to	to	PART
ajst-25629	26	12	obtain	obtain	VERB
ajst-25629	26	13	a	a	DET
ajst-25629	26	14	stable	stable	ADJ
ajst-25629	26	15	sputtering	sputtering	ADJ
ajst-25629	26	16	current	current	NOUN
ajst-25629	26	17	during	during	ADP
ajst-25629	26	18	the	the	DET
ajst-25629	26	19	sputtering	sputtering	ADJ
ajst-25629	26	20	process	process	NOUN
ajst-25629	26	21	,	,	PUNCT
ajst-25629	26	22	a	a	DET
ajst-25629	26	23	certain	certain	ADJ
ajst-25629	26	24	pressure	pressure	NOUN
ajst-25629	26	25	of	of	ADP
ajst-25629	26	26	working	work	VERB
ajst-25629	26	27	gas	gas	NOUN
ajst-25629	26	28	must	must	AUX
ajst-25629	26	29	be	be	AUX
ajst-25629	26	30	filled	fill	VERB
ajst-25629	26	31	into	into	ADP
ajst-25629	26	32	the	the	DET
ajst-25629	26	33	vacuum	vacuum	PROPN
ajst-25629	26	34	chamber	chamber	NOUN
ajst-25629	26	35	.	.	PUNCT
ajst-25629	27	1	it	it	PRON
ajst-25629	27	2	was	be	AUX
ajst-25629	27	3	found	find	VERB
ajst-25629	27	4	that	that	SCONJ
ajst-25629	27	5	0.24pa	0.24pa	NUM
ajst-25629	27	6	is	be	AUX
ajst-25629	27	7	the	the	DET
ajst-25629	27	8	critical	critical	ADJ
ajst-25629	27	9	pressure	pressure	NOUN
ajst-25629	27	10	that	that	PRON
ajst-25629	27	11	can	can	AUX
ajst-25629	27	12	be	be	AUX
ajst-25629	27	13	discharged	discharge	VERB
ajst-25629	27	14	,	,	PUNCT
ajst-25629	27	15	and	and	CCONJ
ajst-25629	27	16	generally	generally	ADV
ajst-25629	27	17	controlled	control	VERB
ajst-25629	27	18	at	at	ADP
ajst-25629	27	19	0.267	0.267	NUM
ajst-25629	27	20	~	~	SYM
ajst-25629	27	21	0.320pa	0.320pa	PROPN
ajst-25629	27	22	is	be	AUX
ajst-25629	27	23	the	the	DET
ajst-25629	27	24	ideal	ideal	ADJ
ajst-25629	27	25	working	work	VERB
ajst-25629	27	26	pressure	pressure	NOUN
ajst-25629	27	27	for	for	ADP
ajst-25629	27	28	sputtering	sputtering	NOUN
ajst-25629	27	29	.	.	PUNCT
ajst-25629	28	1	the	the	PRON
ajst-25629	28	2	higher	high	ADJ
ajst-25629	28	3	the	the	DET
ajst-25629	28	4	working	work	VERB
ajst-25629	28	5	pressure	pressure	NOUN
ajst-25629	28	6	is	be	AUX
ajst-25629	28	7	,	,	PUNCT
ajst-25629	28	8	the	the	DET
ajst-25629	28	9	more	more	ADV
ajst-25629	28	10	kinetic	kinetic	ADJ
ajst-25629	28	11	energy	energy	NOUN
ajst-25629	28	12	will	will	AUX
ajst-25629	28	13	be	be	AUX
ajst-25629	28	14	lost	lose	VERB
ajst-25629	28	15	in	in	ADP
ajst-25629	28	16	the	the	DET
ajst-25629	28	17	collision	collision	NOUN
ajst-25629	28	18	,	,	PUNCT
ajst-25629	28	19	which	which	PRON
ajst-25629	28	20	will	will	AUX
ajst-25629	28	21	affect	affect	VERB
ajst-25629	28	22	the	the	DET
ajst-25629	28	23	densification	densification	NOUN
ajst-25629	28	24	of	of	ADP
ajst-25629	28	25	the	the	DET
ajst-25629	28	26	deposition	deposition	NOUN
ajst-25629	28	27	film	film	NOUN
ajst-25629	28	28	and	and	CCONJ
ajst-25629	28	29	even	even	ADV
ajst-25629	28	30	result	result	VERB
ajst-25629	28	31	in	in	ADP
ajst-25629	28	32	the	the	DET
ajst-25629	28	33	larger	large	ADJ
ajst-25629	28	34	oxidation	oxidation	NOUN
ajst-25629	28	35	component	component	NOUN
ajst-25629	28	36	of	of	ADP
ajst-25629	28	37	the	the	DET
ajst-25629	28	38	alsi	alsi	NOUN
ajst-25629	28	39	film	film	NOUN
ajst-25629	28	40	.	.	PUNCT
ajst-25629	29	1	after	after	ADP
ajst-25629	29	2	heat	heat	NOUN
ajst-25629	29	3	treatment	treatment	NOUN
ajst-25629	29	4	,	,	PUNCT
ajst-25629	29	5	mo	mo	NOUN
ajst-25629	29	6	-	-	NOUN
ajst-25629	29	7	alsi	alsi	PROPN
ajst-25629	29	8	and	and	CCONJ
ajst-25629	29	9	other	other	ADJ
ajst-25629	29	10	phenomena	phenomenon	NOUN
ajst-25629	29	11	appear	appear	VERB
ajst-25629	29	12	which	which	PRON
ajst-25629	29	13	affects	affect	VERB
ajst-25629	29	14	the	the	DET
ajst-25629	29	15	stability	stability	NOUN
ajst-25629	29	16	and	and	CCONJ
ajst-25629	29	17	reliability	reliability	NOUN
ajst-25629	29	18	of	of	ADP
ajst-25629	29	19	the	the	DET
ajst-25629	29	20	source	source	NOUN
ajst-25629	29	21	device	device	NOUN
ajst-25629	29	22	.	.	PUNCT
ajst-25629	30	1	the	the	DET
ajst-25629	30	2	working	work	VERB
ajst-25629	30	3	pressure	pressure	NOUN
ajst-25629	30	4	is	be	AUX
ajst-25629	30	5	too	too	ADV
ajst-25629	30	6	low	low	ADJ
ajst-25629	30	7	to	to	PART
ajst-25629	30	8	play	play	VERB
ajst-25629	30	9	the	the	DET
ajst-25629	30	10	role	role	NOUN
ajst-25629	30	11	of	of	ADP
ajst-25629	30	12	glow	glow	NOUN
ajst-25629	30	13	discharge	discharge	NOUN
ajst-25629	30	14	,	,	PUNCT
ajst-25629	30	15	which	which	PRON
ajst-25629	30	16	is	be	AUX
ajst-25629	30	17	also	also	ADV
ajst-25629	30	18	can	can	AUX
ajst-25629	30	19	not	not	PART
ajst-25629	30	20	reach	reach	VERB
ajst-25629	30	21	the	the	DET
ajst-25629	30	22	ability	ability	NOUN
ajst-25629	30	23	to	to	PART
ajst-25629	30	24	bombard	bombard	VERB
ajst-25629	30	25	the	the	DET
ajst-25629	30	26	target	target	NOUN
ajst-25629	30	27	,	,	PUNCT
ajst-25629	30	28	thereby	thereby	ADV
ajst-25629	30	29	can	can	AUX
ajst-25629	30	30	not	not	PART
ajst-25629	30	31	play	play	VERB
ajst-25629	30	32	the	the	DET
ajst-25629	30	33	role	role	NOUN
ajst-25629	30	34	of	of	ADP
ajst-25629	30	35	coating	coating	NOUN
ajst-25629	30	36	.	.	PUNCT
ajst-25629	31	1	3.2	3.2	NUM
ajst-25629	31	2	.	.	PUNCT
ajst-25629	31	3	sputtering	sputter	VERB
ajst-25629	31	4	power	power	NOUN
ajst-25629	31	5	under	under	ADP
ajst-25629	31	6	a	a	DET
ajst-25629	31	7	certain	certain	ADJ
ajst-25629	31	8	pressure	pressure	NOUN
ajst-25629	31	9	,	,	PUNCT
ajst-25629	31	10	the	the	DET
ajst-25629	31	11	sputtering	sputter	VERB
ajst-25629	31	12	rate	rate	NOUN
ajst-25629	31	13	strongly	strongly	ADV
ajst-25629	31	14	depends	depend	VERB
ajst-25629	31	15	on	on	ADP
ajst-25629	31	16	the	the	DET
ajst-25629	31	17	size	size	NOUN
ajst-25629	31	18	of	of	ADP
ajst-25629	31	19	the	the	DET
ajst-25629	31	20	sputtering	sputtering	ADJ
ajst-25629	31	21	current	current	NOUN
ajst-25629	31	22	.	.	PUNCT
ajst-25629	32	1	raising	raise	VERB
ajst-25629	32	2	the	the	DET
ajst-25629	32	3	sputtering	sputter	VERB
ajst-25629	32	4	current	current	NOUN
ajst-25629	32	5	means	mean	VERB
ajst-25629	32	6	the	the	DET
ajst-25629	32	7	increase	increase	NOUN
ajst-25629	32	8	of	of	ADP
ajst-25629	32	9	sputtering	sputtering	ADJ
ajst-25629	32	10	power	power	NOUN
ajst-25629	32	11	increases	increase	VERB
ajst-25629	32	12	the	the	DET
ajst-25629	32	13	ionization	ionization	NOUN
ajst-25629	32	14	rate	rate	NOUN
ajst-25629	32	15	of	of	ADP
ajst-25629	32	16	ar	ar	NOUN
ajst-25629	32	17	gas	gas	NOUN
ajst-25629	32	18	which	which	PRON
ajst-25629	32	19	results	result	VERB
ajst-25629	32	20	to	to	ADP
ajst-25629	32	21	the	the	DET
ajst-25629	32	22	increase	increase	NOUN
ajst-25629	32	23	of	of	ADP
ajst-25629	32	24	the	the	DET
ajst-25629	32	25	sputtering	sputtering	ADJ
ajst-25629	32	26	rate	rate	NOUN
ajst-25629	32	27	.	.	PUNCT
ajst-25629	33	1	thereby	thereby	ADV
ajst-25629	33	2	the	the	DET
ajst-25629	33	3	covering	covering	NOUN
ajst-25629	33	4	ability	ability	NOUN
ajst-25629	33	5	,	,	PUNCT
ajst-25629	33	6	215	215	NUM
ajst-25629	33	7	adhesion	adhesion	NOUN
ajst-25629	33	8	ability	ability	NOUN
ajst-25629	33	9	and	and	CCONJ
ajst-25629	33	10	density	density	NOUN
ajst-25629	33	11	of	of	ADP
ajst-25629	33	12	the	the	DET
ajst-25629	33	13	substrate	substrate	NOUN
ajst-25629	33	14	surface	surface	NOUN
ajst-25629	33	15	are	be	AUX
ajst-25629	33	16	improved	improve	VERB
ajst-25629	33	17	,	,	PUNCT
ajst-25629	33	18	and	and	CCONJ
ajst-25629	33	19	the	the	DET
ajst-25629	33	20	corresponding	corresponding	ADJ
ajst-25629	33	21	sputtering	sputtering	ADJ
ajst-25629	33	22	time	time	NOUN
ajst-25629	33	23	is	be	AUX
ajst-25629	33	24	shortened	shorten	VERB
ajst-25629	33	25	,	,	PUNCT
ajst-25629	33	26	the	the	DET
ajst-25629	33	27	substrate	substrate	NOUN
ajst-25629	33	28	surface	surface	NOUN
ajst-25629	33	29	pollution	pollution	NOUN
ajst-25629	33	30	is	be	AUX
ajst-25629	33	31	reduced	reduce	VERB
ajst-25629	33	32	,	,	PUNCT
ajst-25629	33	33	ultimately	ultimately	ADV
ajst-25629	33	34	the	the	DET
ajst-25629	33	35	film	film	NOUN
ajst-25629	33	36	quality	quality	NOUN
ajst-25629	33	37	is	be	AUX
ajst-25629	33	38	improved	improve	VERB
ajst-25629	33	39	.	.	PUNCT
ajst-25629	34	1	on	on	ADP
ajst-25629	34	2	the	the	DET
ajst-25629	34	3	contrary	contrary	NOUN
ajst-25629	34	4	,	,	PUNCT
ajst-25629	34	5	if	if	SCONJ
ajst-25629	34	6	the	the	DET
ajst-25629	34	7	sputtering	sputtering	ADJ
ajst-25629	34	8	power	power	NOUN
ajst-25629	34	9	is	be	AUX
ajst-25629	34	10	low	low	ADJ
ajst-25629	34	11	,	,	PUNCT
ajst-25629	34	12	the	the	DET
ajst-25629	34	13	speed	speed	NOUN
ajst-25629	34	14	is	be	AUX
ajst-25629	34	15	slow	slow	ADJ
ajst-25629	34	16	,	,	PUNCT
ajst-25629	34	17	the	the	DET
ajst-25629	34	18	adhesion	adhesion	NOUN
ajst-25629	34	19	of	of	ADP
ajst-25629	34	20	the	the	DET
ajst-25629	34	21	film	film	NOUN
ajst-25629	34	22	is	be	AUX
ajst-25629	34	23	poor	poor	ADJ
ajst-25629	34	24	,	,	PUNCT
ajst-25629	34	25	the	the	DET
ajst-25629	34	26	structure	structure	NOUN
ajst-25629	34	27	is	be	AUX
ajst-25629	34	28	loose	loose	ADJ
ajst-25629	34	29	,	,	PUNCT
ajst-25629	34	30	and	and	CCONJ
ajst-25629	34	31	the	the	DET
ajst-25629	34	32	step	step	NOUN
ajst-25629	34	33	coverage	coverage	NOUN
ajst-25629	34	34	is	be	AUX
ajst-25629	34	35	not	not	PART
ajst-25629	34	36	good	good	ADJ
ajst-25629	34	37	,	,	PUNCT
ajst-25629	34	38	which	which	PRON
ajst-25629	34	39	affects	affect	VERB
ajst-25629	34	40	the	the	DET
ajst-25629	34	41	quality	quality	NOUN
ajst-25629	34	42	of	of	ADP
ajst-25629	34	43	the	the	DET
ajst-25629	34	44	film	film	NOUN
ajst-25629	34	45	.	.	PUNCT
ajst-25629	35	1	practice	practice	NOUN
ajst-25629	35	2	has	have	AUX
ajst-25629	35	3	proved	prove	VERB
ajst-25629	35	4	that	that	SCONJ
ajst-25629	35	5	the	the	DET
ajst-25629	35	6	general	general	ADJ
ajst-25629	35	7	sputtering	sputtering	ADJ
ajst-25629	35	8	current	current	NOUN
ajst-25629	35	9	should	should	AUX
ajst-25629	35	10	be	be	AUX
ajst-25629	35	11	controlled	control	VERB
ajst-25629	35	12	within	within	ADP
ajst-25629	35	13	5.5	5.5	NUM
ajst-25629	35	14	~	~	SYM
ajst-25629	35	15	6.5a	6.5a	NOUN
ajst-25629	35	16	,	,	PUNCT
ajst-25629	35	17	and	and	CCONJ
ajst-25629	35	18	the	the	DET
ajst-25629	35	19	voltage	voltage	NOUN
ajst-25629	35	20	should	should	AUX
ajst-25629	35	21	be	be	AUX
ajst-25629	35	22	controlled	control	VERB
ajst-25629	35	23	within	within	ADP
ajst-25629	35	24	0.4	0.4	NUM
ajst-25629	35	25	~	~	PUNCT
ajst-25629	35	26	0.5kv	0.5kv	PUNCT
ajst-25629	36	1	[	[	X
ajst-25629	36	2	5	5	NUM
ajst-25629	36	3	]	]	PUNCT
ajst-25629	36	4	.	.	PUNCT
ajst-25629	37	1	fig.1	fig.1	PROPN
ajst-25629	37	2	shows	show	VERB
ajst-25629	37	3	the	the	DET
ajst-25629	37	4	relationship	relationship	NOUN
ajst-25629	37	5	between	between	ADP
ajst-25629	37	6	sputtering	sputter	VERB
ajst-25629	37	7	power	power	NOUN
ajst-25629	37	8	and	and	CCONJ
ajst-25629	37	9	resistance	resistance	NOUN
ajst-25629	37	10	temperature	temperature	NOUN
ajst-25629	37	11	coefficient	coefficient	NOUN
ajst-25629	37	12	by	by	ADP
ajst-25629	37	13	experiments	experiment	NOUN
ajst-25629	37	14	.	.	PUNCT
ajst-25629	38	1	fig	fig	NOUN
ajst-25629	38	2	1	1	NUM
ajst-25629	38	3	.	.	PUNCT
ajst-25629	38	4	relationship	relationship	NOUN
ajst-25629	38	5	between	between	ADP
ajst-25629	38	6	sputtering	sputter	VERB
ajst-25629	38	7	power	power	NOUN
ajst-25629	38	8	and	and	CCONJ
ajst-25629	38	9	resistance	resistance	NOUN
ajst-25629	38	10	temperature	temperature	NOUN
ajst-25629	38	11	coefficient	coefficient	NOUN
ajst-25629	38	12	3.3	3.3	NUM
ajst-25629	38	13	.	.	PUNCT
ajst-25629	39	1	substrate	substrate	NOUN
ajst-25629	39	2	heating	heating	NOUN
ajst-25629	39	3	temperature	temperature	NOUN
ajst-25629	39	4	fig	fig	NOUN
ajst-25629	39	5	2	2	NUM
ajst-25629	39	6	.	.	X
ajst-25629	39	7	relationship	relationship	NOUN
ajst-25629	39	8	between	between	ADP
ajst-25629	39	9	substrate	substrate	NOUN
ajst-25629	39	10	heating	heating	NOUN
ajst-25629	39	11	temperature	temperature	NOUN
ajst-25629	39	12	and	and	CCONJ
ajst-25629	39	13	resistance	resistance	NOUN
ajst-25629	39	14	temperature	temperature	NOUN
ajst-25629	39	15	coefficient	coefficient	NOUN
ajst-25629	39	16	substrate	substrate	NOUN
ajst-25629	39	17	temperature	temperature	NOUN
ajst-25629	39	18	is	be	AUX
ajst-25629	39	19	one	one	NUM
ajst-25629	39	20	of	of	ADP
ajst-25629	39	21	the	the	DET
ajst-25629	39	22	important	important	ADJ
ajst-25629	39	23	factors	factor	NOUN
ajst-25629	39	24	affecting	affect	VERB
ajst-25629	39	25	the	the	DET
ajst-25629	39	26	grain	grain	NOUN
ajst-25629	39	27	size	size	NOUN
ajst-25629	39	28	of	of	ADP
ajst-25629	39	29	film	film	NOUN
ajst-25629	39	30	forming	form	VERB
ajst-25629	39	31	.	.	PUNCT
ajst-25629	40	1	under	under	ADP
ajst-25629	40	2	the	the	DET
ajst-25629	40	3	same	same	ADJ
ajst-25629	40	4	sputtering	sputtering	ADJ
ajst-25629	40	5	pressure	pressure	NOUN
ajst-25629	40	6	,	,	PUNCT
ajst-25629	40	7	the	the	DET
ajst-25629	40	8	grains	grain	NOUN
ajst-25629	40	9	of	of	ADP
ajst-25629	40	10	sputtering	sputter	VERB
ajst-25629	40	11	film	film	NOUN
ajst-25629	40	12	gradually	gradually	ADV
ajst-25629	40	13	increase	increase	VERB
ajst-25629	40	14	with	with	ADP
ajst-25629	40	15	the	the	DET
ajst-25629	40	16	increase	increase	NOUN
ajst-25629	40	17	of	of	ADP
ajst-25629	40	18	substrate	substrate	NOUN
ajst-25629	40	19	heating	heating	NOUN
ajst-25629	40	20	temperature	temperature	NOUN
ajst-25629	40	21	.	.	PUNCT
ajst-25629	41	1	this	this	PRON
ajst-25629	41	2	is	be	AUX
ajst-25629	41	3	because	because	SCONJ
ajst-25629	41	4	the	the	PRON
ajst-25629	41	5	higher	high	ADJ
ajst-25629	41	6	the	the	DET
ajst-25629	41	7	substrate	substrate	NOUN
ajst-25629	41	8	temperature	temperature	NOUN
ajst-25629	41	9	,	,	PUNCT
ajst-25629	41	10	the	the	PRON
ajst-25629	41	11	higher	high	ADJ
ajst-25629	41	12	the	the	DET
ajst-25629	41	13	energy	energy	NOUN
ajst-25629	41	14	of	of	ADP
ajst-25629	41	15	transverse	transverse	NOUN
ajst-25629	41	16	movement	movement	NOUN
ajst-25629	41	17	of	of	ADP
ajst-25629	41	18	target	target	NOUN
ajst-25629	41	19	atoms	atom	NOUN
ajst-25629	41	20	sputtering	sputter	VERB
ajst-25629	41	21	to	to	ADP
ajst-25629	41	22	the	the	DET
ajst-25629	41	23	substrate	substrate	NOUN
ajst-25629	41	24	is	be	AUX
ajst-25629	41	25	,	,	PUNCT
ajst-25629	41	26	the	the	PRON
ajst-25629	41	27	stronger	strong	ADJ
ajst-25629	41	28	the	the	DET
ajst-25629	41	29	transverse	transverse	NOUN
ajst-25629	41	30	movement	movement	NOUN
ajst-25629	41	31	activity	activity	NOUN
ajst-25629	41	32	is	be	AUX
ajst-25629	41	33	,	,	PUNCT
ajst-25629	41	34	the	the	PRON
ajst-25629	41	35	easier	easy	ADJ
ajst-25629	41	36	it	it	PRON
ajst-25629	41	37	is	be	AUX
ajst-25629	41	38	to	to	PART
ajst-25629	41	39	condensed	condense	VERB
ajst-25629	41	40	into	into	ADP
ajst-25629	41	41	large	large	ADJ
ajst-25629	41	42	grains	grain	NOUN
ajst-25629	41	43	,	,	PUNCT
ajst-25629	41	44	and	and	CCONJ
ajst-25629	41	45	the	the	DET
ajst-25629	41	46	grain	grain	NOUN
ajst-25629	41	47	spacing	spacing	NOUN
ajst-25629	41	48	becomes	become	VERB
ajst-25629	41	49	larger	large	ADJ
ajst-25629	41	50	.	.	PUNCT
ajst-25629	42	1	the	the	DET
ajst-25629	42	2	negative	negative	ADJ
ajst-25629	42	3	temperature	temperature	NOUN
ajst-25629	42	4	coefficient	coefficient	NOUN
ajst-25629	42	5	increases	increase	NOUN
ajst-25629	42	6	,	,	PUNCT
ajst-25629	42	7	and	and	CCONJ
ajst-25629	42	8	the	the	DET
ajst-25629	42	9	overall	overall	ADJ
ajst-25629	42	10	temperature	temperature	NOUN
ajst-25629	42	11	coefficient	coefficient	NOUN
ajst-25629	42	12	changes	change	NOUN
ajst-25629	42	13	to	to	ADP
ajst-25629	42	14	the	the	DET
ajst-25629	42	15	negative	negative	ADJ
ajst-25629	42	16	temperature	temperature	NOUN
ajst-25629	42	17	coefficient	coefficient	NOUN
ajst-25629	42	18	.	.	PUNCT
ajst-25629	43	1	besides	besides	ADV
ajst-25629	43	2	if	if	SCONJ
ajst-25629	43	3	the	the	DET
ajst-25629	43	4	baking	baking	NOUN
ajst-25629	43	5	temperature	temperature	NOUN
ajst-25629	43	6	is	be	AUX
ajst-25629	43	7	too	too	ADV
ajst-25629	43	8	low	low	ADJ
ajst-25629	43	9	,	,	PUNCT
ajst-25629	43	10	the	the	DET
ajst-25629	43	11	substrate	substrate	NOUN
ajst-25629	43	12	adsorbs	adsorb	VERB
ajst-25629	43	13	some	some	DET
ajst-25629	43	14	active	active	ADJ
ajst-25629	43	15	gases	gas	NOUN
ajst-25629	43	16	,	,	PUNCT
ajst-25629	43	17	trace	trace	NOUN
ajst-25629	43	18	oil	oil	NOUN
ajst-25629	43	19	molecules	molecule	NOUN
ajst-25629	43	20	as	as	ADV
ajst-25629	43	21	well	well	ADV
ajst-25629	43	22	as	as	ADP
ajst-25629	43	23	water	water	NOUN
ajst-25629	43	24	vapor	vapor	NOUN
ajst-25629	43	25	.	.	PUNCT
ajst-25629	44	1	the	the	DET
ajst-25629	44	2	residual	residual	ADJ
ajst-25629	44	3	activity	activity	NOUN
ajst-25629	44	4	gas	gas	NOUN
ajst-25629	44	5	on	on	ADP
ajst-25629	44	6	the	the	DET
ajst-25629	44	7	wall	wall	NOUN
ajst-25629	44	8	of	of	ADP
ajst-25629	44	9	the	the	DET
ajst-25629	44	10	vacuum	vacuum	PROPN
ajst-25629	44	11	chamber	chamber	NOUN
ajst-25629	44	12	is	be	AUX
ajst-25629	44	13	not	not	PART
ajst-25629	44	14	released	release	VERB
ajst-25629	44	15	;	;	PUNCT
ajst-25629	44	16	if	if	SCONJ
ajst-25629	44	17	the	the	DET
ajst-25629	44	18	baking	baking	NOUN
ajst-25629	44	19	temperature	temperature	NOUN
ajst-25629	44	20	is	be	AUX
ajst-25629	44	21	too	too	ADV
ajst-25629	44	22	high	high	ADJ
ajst-25629	44	23	,	,	PUNCT
ajst-25629	44	24	it	it	PRON
ajst-25629	44	25	will	will	AUX
ajst-25629	44	26	cause	cause	VERB
ajst-25629	44	27	a	a	DET
ajst-25629	44	28	new	new	ADJ
ajst-25629	44	29	oxide	oxide	NOUN
ajst-25629	44	30	layer	layer	NOUN
ajst-25629	44	31	to	to	ADP
ajst-25629	44	32	the	the	DET
ajst-25629	44	33	clean	clean	ADJ
ajst-25629	44	34	chip	chip	NOUN
ajst-25629	44	35	lead	lead	NOUN
ajst-25629	44	36	hole	hole	NOUN
ajst-25629	44	37	,	,	PUNCT
ajst-25629	44	38	which	which	PRON
ajst-25629	44	39	can	can	AUX
ajst-25629	44	40	not	not	PART
ajst-25629	44	41	get	get	VERB
ajst-25629	44	42	a	a	DET
ajst-25629	44	43	good	good	ADJ
ajst-25629	44	44	ohmic	ohmic	ADJ
ajst-25629	44	45	contact	contact	NOUN
ajst-25629	44	46	,	,	PUNCT
ajst-25629	44	47	increase	increase	VERB
ajst-25629	44	48	the	the	DET
ajst-25629	44	49	dc	dc	PROPN
ajst-25629	44	50	parameters	parameter	NOUN
ajst-25629	44	51	of	of	ADP
ajst-25629	44	52	the	the	DET
ajst-25629	44	53	circuit	circuit	NOUN
ajst-25629	44	54	vcd	vcd	PROPN
ajst-25629	44	55	and	and	CCONJ
ajst-25629	44	56	veb	veb	PROPN
ajst-25629	44	57	voltage	voltage	NOUN
ajst-25629	44	58	drop	drop	NOUN
ajst-25629	44	59	,	,	PUNCT
ajst-25629	44	60	resulting	result	VERB
ajst-25629	44	61	in	in	ADP
ajst-25629	44	62	a	a	DET
ajst-25629	44	63	small	small	ADJ
ajst-25629	44	64	schottky	schottky	NOUN
ajst-25629	44	65	forward	forward	ADV
ajst-25629	44	66	and	and	CCONJ
ajst-25629	44	67	reverse	reverse	VERB
ajst-25629	44	68	breakdown	breakdown	ADJ
ajst-25629	44	69	soft	soft	ADJ
ajst-25629	44	70	.	.	PUNCT
ajst-25629	45	1	practice	practice	NOUN
ajst-25629	45	2	shows	show	VERB
ajst-25629	45	3	that	that	SCONJ
ajst-25629	45	4	the	the	DET
ajst-25629	45	5	baking	baking	NOUN
ajst-25629	45	6	temperature	temperature	NOUN
ajst-25629	45	7	is	be	AUX
ajst-25629	45	8	generally	generally	ADV
ajst-25629	45	9	between	between	ADP
ajst-25629	45	10	100	100	NUM
ajst-25629	45	11	and	and	CCONJ
ajst-25629	45	12	180	180	NUM
ajst-25629	45	13	℃	℃	PROPN
ajst-25629	45	14	.	.	PUNCT
ajst-25629	46	1	fig.2	fig.2	PROPN
ajst-25629	46	2	shows	show	VERB
ajst-25629	46	3	the	the	DET
ajst-25629	46	4	relationship	relationship	NOUN
ajst-25629	46	5	between	between	ADP
ajst-25629	46	6	substrate	substrate	NOUN
ajst-25629	46	7	heating	heating	NOUN
ajst-25629	46	8	temperature	temperature	NOUN
ajst-25629	46	9	and	and	CCONJ
ajst-25629	46	10	resistance	resistance	NOUN
ajst-25629	46	11	temperature	temperature	NOUN
ajst-25629	46	12	coefficient	coefficient	NOUN
ajst-25629	46	13	by	by	ADP
ajst-25629	46	14	experiments	experiment	NOUN
ajst-25629	46	15	.	.	PUNCT
ajst-25629	47	1	3.4	3.4	NUM
ajst-25629	47	2	.	.	PUNCT
ajst-25629	47	3	gas	gas	NOUN
ajst-25629	47	4	volume	volume	NOUN
ajst-25629	47	5	flow	flow	VERB
ajst-25629	47	6	the	the	DET
ajst-25629	47	7	experimental	experimental	ADJ
ajst-25629	47	8	research	research	NOUN
ajst-25629	47	9	found	find	VERB
ajst-25629	47	10	that	that	SCONJ
ajst-25629	47	11	the	the	PRON
ajst-25629	47	12	larger	large	ADJ
ajst-25629	47	13	the	the	DET
ajst-25629	47	14	argon	argon	NOUN
ajst-25629	47	15	pressure	pressure	NOUN
ajst-25629	47	16	during	during	ADP
ajst-25629	47	17	sputtering	sputtering	NOUN
ajst-25629	47	18	,	,	PUNCT
ajst-25629	47	19	the	the	PRON
ajst-25629	47	20	larger	large	ADJ
ajst-25629	47	21	the	the	DET
ajst-25629	47	22	grain	grain	NOUN
ajst-25629	47	23	size	size	NOUN
ajst-25629	47	24	.	.	PUNCT
ajst-25629	48	1	the	the	DET
ajst-25629	48	2	sputtering	sputtering	ADJ
ajst-25629	48	3	argon	argon	NOUN
ajst-25629	48	4	pressure	pressure	NOUN
ajst-25629	48	5	and	and	CCONJ
ajst-25629	48	6	the	the	DET
ajst-25629	48	7	volume	volume	NOUN
ajst-25629	48	8	flow	flow	NOUN
ajst-25629	48	9	into	into	ADP
ajst-25629	48	10	the	the	DET
ajst-25629	48	11	process	process	NOUN
ajst-25629	48	12	chamber	chamber	NOUN
ajst-25629	48	13	(	(	PUNCT
ajst-25629	48	14	argon	argon	NOUN
ajst-25629	48	15	gas	gas	NOUN
ajst-25629	48	16	)	)	PUNCT
ajst-25629	48	17	are	be	AUX
ajst-25629	48	18	in	in	ADP
ajst-25629	48	19	a	a	DET
ajst-25629	48	20	positive	positive	ADJ
ajst-25629	48	21	ratio	ratio	NOUN
ajst-25629	48	22	,	,	PUNCT
ajst-25629	48	23	so	so	SCONJ
ajst-25629	48	24	the	the	DET
ajst-25629	48	25	influence	influence	NOUN
ajst-25629	48	26	of	of	ADP
ajst-25629	48	27	substrate	substrate	NOUN
ajst-25629	48	28	temperature	temperature	NOUN
ajst-25629	48	29	increase	increase	NOUN
ajst-25629	48	30	on	on	ADP
ajst-25629	48	31	the	the	DET
ajst-25629	48	32	temperature	temperature	NOUN
ajst-25629	48	33	coefficient	coefficient	NOUN
ajst-25629	48	34	of	of	ADP
ajst-25629	48	35	crsi	crsi	NOUN
ajst-25629	48	36	film	film	NOUN
ajst-25629	48	37	resistance	resistance	NOUN
ajst-25629	48	38	is	be	AUX
ajst-25629	48	39	similar	similar	ADJ
ajst-25629	48	40	to	to	ADP
ajst-25629	48	41	that	that	PRON
ajst-25629	48	42	of	of	ADP
ajst-25629	48	43	substrate	substrate	NOUN
ajst-25629	48	44	temperature	temperature	NOUN
ajst-25629	48	45	increase	increase	NOUN
ajst-25629	48	46	.	.	PUNCT
ajst-25629	49	1	the	the	DET
ajst-25629	49	2	positive	positive	ADJ
ajst-25629	49	3	temperature	temperature	NOUN
ajst-25629	49	4	coefficient	coefficient	NOUN
ajst-25629	49	5	of	of	ADP
ajst-25629	49	6	crsi	crsi	NOUN
ajst-25629	49	7	film	film	NOUN
ajst-25629	49	8	decreases	decrease	VERB
ajst-25629	49	9	with	with	ADP
ajst-25629	49	10	the	the	DET
ajst-25629	49	11	increase	increase	NOUN
ajst-25629	49	12	of	of	ADP
ajst-25629	49	13	grain	grain	NOUN
ajst-25629	49	14	resistance	resistance	NOUN
ajst-25629	49	15	and	and	CCONJ
ajst-25629	49	16	the	the	DET
ajst-25629	49	17	increase	increase	NOUN
ajst-25629	49	18	of	of	ADP
ajst-25629	49	19	grain	grain	NOUN
ajst-25629	49	20	spacing	spacing	NOUN
ajst-25629	49	21	.	.	PUNCT
ajst-25629	50	1	the	the	DET
ajst-25629	50	2	relationship	relationship	NOUN
ajst-25629	50	3	between	between	ADP
ajst-25629	50	4	the	the	DET
ajst-25629	50	5	volume	volume	NOUN
ajst-25629	50	6	flow	flow	NOUN
ajst-25629	50	7	rate	rate	NOUN
ajst-25629	50	8	(	(	PUNCT
ajst-25629	50	9	qv	qv	INTJ
ajst-25629	50	10	)	)	PUNCT
ajst-25629	50	11	of	of	ADP
ajst-25629	50	12	different	different	ADJ
ajst-25629	50	13	sputtering	sputtering	ADJ
ajst-25629	50	14	processes	process	NOUN
ajst-25629	50	15	and	and	CCONJ
ajst-25629	50	16	the	the	DET
ajst-25629	50	17	temperature	temperature	NOUN
ajst-25629	50	18	coefficient	coefficient	NOUN
ajst-25629	50	19	of	of	ADP
ajst-25629	50	20	the	the	DET
ajst-25629	50	21	resistance	resistance	NOUN
ajst-25629	50	22	of	of	ADP
ajst-25629	50	23	the	the	DET
ajst-25629	50	24	sputtered	sputter	VERB
ajst-25629	50	25	crsi	crsi	NOUN
ajst-25629	50	26	films	film	NOUN
ajst-25629	50	27	is	be	AUX
ajst-25629	50	28	shown	show	VERB
ajst-25629	50	29	in	in	ADP
ajst-25629	50	30	the	the	DET
ajst-25629	50	31	fig.3	fig.3	PROPN
ajst-25629	50	32	.	.	PUNCT
ajst-25629	51	1	it	it	PRON
ajst-25629	51	2	can	can	AUX
ajst-25629	51	3	be	be	AUX
ajst-25629	51	4	seen	see	VERB
ajst-25629	51	5	from	from	ADP
ajst-25629	51	6	fig.3	fig.3	PROPN
ajst-25629	51	7	that	that	SCONJ
ajst-25629	51	8	with	with	ADP
ajst-25629	51	9	the	the	DET
ajst-25629	51	10	increase	increase	NOUN
ajst-25629	51	11	of	of	ADP
ajst-25629	51	12	volume	volume	NOUN
ajst-25629	51	13	flow	flow	NOUN
ajst-25629	51	14	volume	volume	NOUN
ajst-25629	51	15	of	of	ADP
ajst-25629	51	16	spatterized	spatterize	VERB
ajst-25629	51	17	gas	gas	NOUN
ajst-25629	51	18	body	body	NOUN
ajst-25629	51	19	,	,	PUNCT
ajst-25629	51	20	the	the	DET
ajst-25629	51	21	temperature	temperature	NOUN
ajst-25629	51	22	series	series	NOUN
ajst-25629	51	23	of	of	ADP
ajst-25629	51	24	the	the	DET
ajst-25629	51	25	electrical	electrical	ADJ
ajst-25629	51	26	resistance	resistance	NOUN
ajst-25629	51	27	of	of	ADP
ajst-25629	51	28	crsi	crsi	NOUN
ajst-25629	51	29	film	film	NOUN
ajst-25629	51	30	decreases	decrease	VERB
ajst-25629	51	31	.	.	PUNCT
ajst-25629	52	1	when	when	SCONJ
ajst-25629	52	2	the	the	DET
ajst-25629	52	3	volume	volume	NOUN
ajst-25629	52	4	flow	flow	NOUN
ajst-25629	52	5	rate	rate	NOUN
ajst-25629	52	6	of	of	ADP
ajst-25629	52	7	gas	gas	NOUN
ajst-25629	52	8	body	body	NOUN
ajst-25629	52	9	is	be	AUX
ajst-25629	52	10	70cm3	70cm3	PROPN
ajst-25629	52	11	/	/	SYM
ajst-25629	52	12	min	min	PROPN
ajst-25629	52	13	,	,	PUNCT
ajst-25629	52	14	the	the	DET
ajst-25629	52	15	minimum	minimum	ADJ
ajst-25629	52	16	temperature	temperature	NOUN
ajst-25629	52	17	coefficient	coefficient	NOUN
ajst-25629	52	18	of	of	ADP
ajst-25629	52	19	resistance	resistance	NOUN
ajst-25629	52	20	of	of	ADP
ajst-25629	52	21	crsi	crsi	NOUN
ajst-25629	52	22	film	film	NOUN
ajst-25629	52	23	is	be	AUX
ajst-25629	52	24	about	about	ADV
ajst-25629	52	25	1.5	1.5	NUM
ajst-25629	52	26	×10	×10	NOUN
ajst-25629	52	27	-	-	SYM
ajst-25629	52	28	5	5	NUM
ajst-25629	52	29	/	/	SYM
ajst-25629	52	30	℃	℃	PROPN
ajst-25629	52	31	.	.	PUNCT
ajst-25629	53	1	fig.3	fig.3	PROPN
ajst-25629	53	2	shows	show	VERB
ajst-25629	53	3	the	the	DET
ajst-25629	53	4	relationship	relationship	NOUN
ajst-25629	53	5	between	between	ADP
ajst-25629	53	6	gas	gas	NOUN
ajst-25629	53	7	volume	volume	NOUN
ajst-25629	53	8	flow	flow	NOUN
ajst-25629	53	9	and	and	CCONJ
ajst-25629	53	10	resistance	resistance	NOUN
ajst-25629	53	11	temperature	temperature	NOUN
ajst-25629	53	12	coefficient	coefficient	NOUN
ajst-25629	53	13	by	by	ADP
ajst-25629	53	14	experiments	experiment	NOUN
ajst-25629	53	15	.	.	PUNCT
ajst-25629	54	1	fig	fig	NOUN
ajst-25629	54	2	3	3	NUM
ajst-25629	54	3	.	.	PUNCT
ajst-25629	54	4	relationship	relationship	NOUN
ajst-25629	54	5	between	between	ADP
ajst-25629	54	6	gas	gas	NOUN
ajst-25629	54	7	volume	volume	NOUN
ajst-25629	54	8	flow	flow	NOUN
ajst-25629	54	9	and	and	CCONJ
ajst-25629	54	10	resistance	resistance	NOUN
ajst-25629	54	11	temperature	temperature	NOUN
ajst-25629	54	12	coefficient	coefficient	NOUN
ajst-25629	54	13	3.5	3.5	NUM
ajst-25629	54	14	.	.	PUNCT
ajst-25629	55	1	volume	volume	NOUN
ajst-25629	55	2	flow	flow	NOUN
ajst-25629	55	3	of	of	ADP
ajst-25629	55	4	reaction	reaction	NOUN
ajst-25629	55	5	gas	gas	NOUN
ajst-25629	55	6	when	when	SCONJ
ajst-25629	55	7	sputtering	sputter	VERB
ajst-25629	55	8	,	,	PUNCT
ajst-25629	55	9	the	the	DET
ajst-25629	55	10	reaction	reaction	NOUN
ajst-25629	55	11	gas	gas	NOUN
ajst-25629	55	12	nitrogen	nitrogen	NOUN
ajst-25629	55	13	or	or	CCONJ
ajst-25629	55	14	oxygen	oxygen	NOUN
ajst-25629	55	15	is	be	AUX
ajst-25629	55	16	added	add	VERB
ajst-25629	55	17	,	,	PUNCT
ajst-25629	55	18	which	which	PRON
ajst-25629	55	19	helps	help	VERB
ajst-25629	55	20	to	to	PART
ajst-25629	55	21	adjust	adjust	VERB
ajst-25629	55	22	the	the	DET
ajst-25629	55	23	temperature	temperature	NOUN
ajst-25629	55	24	series	series	NOUN
ajst-25629	55	25	of	of	ADP
ajst-25629	55	26	crsi	crsi	ADJ
ajst-25629	55	27	film	film	NOUN
ajst-25629	55	28	resistance	resistance	NOUN
ajst-25629	55	29	and	and	CCONJ
ajst-25629	55	30	improve	improve	VERB
ajst-25629	55	31	the	the	DET
ajst-25629	55	32	stability	stability	NOUN
ajst-25629	55	33	of	of	ADP
ajst-25629	55	34	crsi	crsi	ADJ
ajst-25629	55	35	film	film	NOUN
ajst-25629	55	36	resistance	resistance	NOUN
ajst-25629	55	37	.	.	PUNCT
ajst-25629	56	1	due	due	ADP
ajst-25629	56	2	to	to	ADP
ajst-25629	56	3	the	the	DET
ajst-25629	56	4	incorporation	incorporation	NOUN
ajst-25629	56	5	of	of	ADP
ajst-25629	56	6	nitrogen	nitrogen	NOUN
ajst-25629	56	7	elements	element	NOUN
ajst-25629	56	8	in	in	ADP
ajst-25629	56	9	the	the	DET
ajst-25629	56	10	sputtering	sputtering	ADJ
ajst-25629	56	11	process	process	NOUN
ajst-25629	56	12	,	,	PUNCT
ajst-25629	56	13	silicon	silicon	NOUN
ajst-25629	56	14	nitride	nitride	NOUN
ajst-25629	56	15	is	be	AUX
ajst-25629	56	16	formed	form	VERB
ajst-25629	56	17	on	on	ADP
ajst-25629	56	18	the	the	DET
ajst-25629	56	19	substrate	substrate	NOUN
ajst-25629	56	20	.	.	PUNCT
ajst-25629	57	1	this	this	PRON
ajst-25629	57	2	insulating	insulate	VERB
ajst-25629	57	3	medium	medium	ADJ
ajst-25629	57	4	increases	increase	NOUN
ajst-25629	57	5	the	the	DET
ajst-25629	57	6	distance	distance	NOUN
ajst-25629	57	7	between	between	ADP
ajst-25629	57	8	the	the	DET
ajst-25629	57	9	resistance	resistance	NOUN
ajst-25629	57	10	grains	grain	NOUN
ajst-25629	57	11	of	of	ADP
ajst-25629	57	12	the	the	DET
ajst-25629	57	13	crsi	crsi	NOUN
ajst-25629	57	14	film	film	NOUN
ajst-25629	57	15	.	.	PUNCT
ajst-25629	58	1	from	from	ADP
ajst-25629	58	2	the	the	DET
ajst-25629	58	3	conduction	conduction	NOUN
ajst-25629	58	4	mechanism	mechanism	NOUN
ajst-25629	58	5	of	of	ADP
ajst-25629	58	6	crsi	crsi	NOUN
ajst-25629	58	7	films	film	NOUN
ajst-25629	58	8	,	,	PUNCT
ajst-25629	58	9	the	the	DET
ajst-25629	58	10	negative	negative	ADJ
ajst-25629	58	11	temperature	temperature	NOUN
ajst-25629	58	12	coefficient	coefficient	NOUN
ajst-25629	58	13	between	between	ADP
ajst-25629	58	14	the	the	DET
ajst-25629	58	15	resistive	resistive	ADJ
ajst-25629	58	16	grains	grain	NOUN
ajst-25629	58	17	of	of	ADP
ajst-25629	58	18	crsi	crsi	NOUN
ajst-25629	58	19	films	film	NOUN
ajst-25629	58	20	increases	increase	VERB
ajst-25629	58	21	with	with	ADP
ajst-25629	58	22	the	the	DET
ajst-25629	58	23	increase	increase	NOUN
ajst-25629	58	24	of	of	ADP
ajst-25629	58	25	nitrogen	nitrogen	NOUN
ajst-25629	58	26	flow	flow	NOUN
ajst-25629	58	27	rate	rate	NOUN
ajst-25629	58	28	.	.	PUNCT
ajst-25629	59	1	the	the	DET
ajst-25629	59	2	volume	volume	NOUN
ajst-25629	59	3	relationship	relationship	NOUN
ajst-25629	59	4	between	between	ADP
ajst-25629	59	5	the	the	DET
ajst-25629	59	6	volume	volume	NOUN
ajst-25629	59	7	flow	flow	NOUN
ajst-25629	59	8	rate	rate	NOUN
ajst-25629	59	9	of	of	ADP
ajst-25629	59	10	added	add	VERB
ajst-25629	59	11	nitrogen	nitrogen	NOUN
ajst-25629	59	12	(	(	PUNCT
ajst-25629	59	13	qv	qv	PROPN
ajst-25629	59	14	,	,	PUNCT
ajst-25629	59	15	n2	n2	ADJ
ajst-25629	59	16	)	)	PUNCT
ajst-25629	59	17	and	and	CCONJ
ajst-25629	59	18	the	the	DET
ajst-25629	59	19	temperature	temperature	NOUN
ajst-25629	59	20	coefficient	coefficient	NOUN
ajst-25629	59	21	of	of	ADP
ajst-25629	59	22	the	the	DET
ajst-25629	59	23	sputtered	sputter	VERB
ajst-25629	59	24	crsi	crsi	NOUN
ajst-25629	59	25	film	film	NOUN
ajst-25629	59	26	resistance	resistance	NOUN
ajst-25629	59	27	is	be	AUX
ajst-25629	59	28	shown	show	VERB
ajst-25629	59	29	in	in	ADP
ajst-25629	59	30	fig.4	fig.4	PROPN
ajst-25629	59	31	.	.	PUNCT
ajst-25629	60	1	as	as	SCONJ
ajst-25629	60	2	can	can	AUX
ajst-25629	60	3	be	be	AUX
ajst-25629	60	4	seen	see	VERB
ajst-25629	60	5	from	from	ADP
ajst-25629	60	6	fig.4	fig.4	PROPN
ajst-25629	60	7	,	,	PUNCT
ajst-25629	60	8	with	with	ADP
ajst-25629	60	9	the	the	DET
ajst-25629	60	10	continuous	continuous	ADJ
ajst-25629	60	11	increase	increase	NOUN
ajst-25629	60	12	of	of	ADP
ajst-25629	60	13	nitrogen	nitrogen	NOUN
ajst-25629	60	14	volume	volume	NOUN
ajst-25629	60	15	flow	flow	NOUN
ajst-25629	60	16	rate	rate	NOUN
ajst-25629	60	17	in	in	ADP
ajst-25629	60	18	reactive	reactive	ADJ
ajst-25629	60	19	sputtering	sputtering	NOUN
ajst-25629	60	20	,	,	PUNCT
ajst-25629	60	21	the	the	DET
ajst-25629	60	22	temperature	temperature	NOUN
ajst-25629	60	23	coefficient	coefficient	NOUN
ajst-25629	60	24	of	of	ADP
ajst-25629	60	25	crsi	crsi	NOUN
ajst-25629	60	26	film	film	NOUN
ajst-25629	60	27	resistance	resistance	NOUN
ajst-25629	60	28	decreases	decrease	VERB
ajst-25629	60	29	continuously	continuously	ADV
ajst-25629	60	30	.	.	PUNCT
ajst-25629	61	1	when	when	SCONJ
ajst-25629	61	2	the	the	DET
ajst-25629	61	3	volume	volume	NOUN
ajst-25629	61	4	flow	flow	NOUN
ajst-25629	61	5	rate	rate	NOUN
ajst-25629	61	6	of	of	ADP
ajst-25629	61	7	nitrogen	nitrogen	NOUN
ajst-25629	61	8	is	be	AUX
ajst-25629	61	9	less	less	ADJ
ajst-25629	61	10	than	than	ADP
ajst-25629	61	11	0	0	NUM
ajst-25629	61	12	,	,	PUNCT
ajst-25629	61	13	the	the	DET
ajst-25629	61	14	temperature	temperature	NOUN
ajst-25629	61	15	coefficient	coefficient	NOUN
ajst-25629	61	16	of	of	ADP
ajst-25629	61	17	crsi	crsi	NOUN
ajst-25629	61	18	film	film	NOUN
ajst-25629	61	19	resistance	resistance	NOUN
ajst-25629	61	20	is	be	AUX
ajst-25629	61	21	the	the	DET
ajst-25629	61	22	closest	close	ADJ
ajst-25629	61	23	216	216	NUM
ajst-25629	61	24	to	to	ADP
ajst-25629	61	25	0	0	NUM
ajst-25629	61	26	,	,	PUNCT
ajst-25629	61	27	which	which	PRON
ajst-25629	61	28	is	be	AUX
ajst-25629	61	29	-3.88	-3.88	NUM
ajst-25629	61	30	×10	×10	NOUN
ajst-25629	61	31	-	-	PUNCT
ajst-25629	61	32	6	6	NUM
ajst-25629	61	33	/	/	SYM
ajst-25629	61	34	℃	℃	PROPN
ajst-25629	61	35	.	.	PUNCT
ajst-25629	62	1	it	it	PRON
ajst-25629	62	2	is	be	AUX
ajst-25629	62	3	the	the	DET
ajst-25629	62	4	smallest	small	ADJ
ajst-25629	62	5	value	value	NOUN
ajst-25629	62	6	of	of	ADP
ajst-25629	62	7	temperature	temperature	NOUN
ajst-25629	62	8	coefficient	coefficient	NOUN
ajst-25629	62	9	in	in	ADP
ajst-25629	62	10	the	the	DET
ajst-25629	62	11	crsi	crsi	NOUN
ajst-25629	62	12	film	film	NOUN
ajst-25629	62	13	resistance	resistance	NOUN
ajst-25629	62	14	prepared	prepare	VERB
ajst-25629	62	15	in	in	ADP
ajst-25629	62	16	this	this	DET
ajst-25629	62	17	experiment	experiment	NOUN
ajst-25629	62	18	.	.	PUNCT
ajst-25629	63	1	it	it	PRON
ajst-25629	63	2	can	can	AUX
ajst-25629	63	3	be	be	AUX
ajst-25629	63	4	considered	consider	VERB
ajst-25629	63	5	that	that	SCONJ
ajst-25629	63	6	this	this	DET
ajst-25629	63	7	sputtering	sputtering	ADJ
ajst-25629	63	8	condition	condition	NOUN
ajst-25629	63	9	is	be	AUX
ajst-25629	63	10	the	the	DET
ajst-25629	63	11	most	most	ADV
ajst-25629	63	12	suitable	suitable	ADJ
ajst-25629	63	13	optimization	optimization	NOUN
ajst-25629	63	14	condition	condition	NOUN
ajst-25629	63	15	for	for	ADP
ajst-25629	63	16	crsi	crsi	ADJ
ajst-25629	63	17	grain	grain	NOUN
ajst-25629	63	18	size	size	NOUN
ajst-25629	63	19	and	and	CCONJ
ajst-25629	63	20	crsi	crsi	NOUN
ajst-25629	63	21	grain	grain	NOUN
ajst-25629	63	22	spacing	spacing	NOUN
ajst-25629	63	23	.	.	PUNCT
ajst-25629	64	1	fig	fig	NOUN
ajst-25629	64	2	4	4	NUM
ajst-25629	64	3	.	.	PUNCT
ajst-25629	64	4	relationship	relationship	NOUN
ajst-25629	64	5	between	between	ADP
ajst-25629	64	6	reaction	reaction	NOUN
ajst-25629	64	7	gas	gas	NOUN
ajst-25629	64	8	volume	volume	NOUN
ajst-25629	64	9	flow	flow	NOUN
ajst-25629	64	10	and	and	CCONJ
ajst-25629	64	11	resistance	resistance	NOUN
ajst-25629	64	12	temperature	temperature	NOUN
ajst-25629	64	13	coefficient	coefficient	NOUN
ajst-25629	64	14	3.6	3.6	NUM
ajst-25629	64	15	.	.	PUNCT
ajst-25629	65	1	annealing	anneal	VERB
ajst-25629	65	2	process	process	NOUN
ajst-25629	65	3	in	in	ADP
ajst-25629	65	4	order	order	NOUN
ajst-25629	65	5	to	to	PART
ajst-25629	65	6	improve	improve	VERB
ajst-25629	65	7	the	the	DET
ajst-25629	65	8	stability	stability	NOUN
ajst-25629	65	9	of	of	ADP
ajst-25629	65	10	the	the	DET
ajst-25629	65	11	resistance	resistance	NOUN
ajst-25629	65	12	of	of	ADP
ajst-25629	65	13	crsi	crsi	ADJ
ajst-25629	65	14	thin	thin	ADJ
ajst-25629	65	15	film	film	NOUN
ajst-25629	65	16	,	,	PUNCT
ajst-25629	65	17	high	high	ADJ
ajst-25629	65	18	temperature	temperature	NOUN
ajst-25629	65	19	annealing	anneal	VERB
ajst-25629	65	20	treatment	treatment	NOUN
ajst-25629	65	21	is	be	AUX
ajst-25629	65	22	generally	generally	ADV
ajst-25629	65	23	used	use	VERB
ajst-25629	65	24	after	after	ADP
ajst-25629	65	25	the	the	DET
ajst-25629	65	26	deposition	deposition	NOUN
ajst-25629	65	27	.	.	PUNCT
ajst-25629	66	1	on	on	ADP
ajst-25629	66	2	the	the	DET
ajst-25629	66	3	one	one	NUM
ajst-25629	66	4	hand	hand	NOUN
ajst-25629	66	5	,	,	PUNCT
ajst-25629	66	6	the	the	DET
ajst-25629	66	7	purpose	purpose	NOUN
ajst-25629	66	8	is	be	AUX
ajst-25629	66	9	to	to	PART
ajst-25629	66	10	accelerate	accelerate	VERB
ajst-25629	66	11	the	the	DET
ajst-25629	66	12	disappearance	disappearance	NOUN
ajst-25629	66	13	of	of	ADP
ajst-25629	66	14	defects	defect	NOUN
ajst-25629	66	15	,	,	PUNCT
ajst-25629	66	16	unsteady	unsteady	ADJ
ajst-25629	66	17	structure	structure	NOUN
ajst-25629	66	18	and	and	CCONJ
ajst-25629	66	19	internal	internal	ADJ
ajst-25629	66	20	stress	stress	NOUN
ajst-25629	66	21	in	in	ADP
ajst-25629	66	22	the	the	DET
ajst-25629	66	23	film	film	NOUN
ajst-25629	66	24	so	so	SCONJ
ajst-25629	66	25	that	that	SCONJ
ajst-25629	66	26	the	the	DET
ajst-25629	66	27	resistance	resistance	NOUN
ajst-25629	66	28	of	of	ADP
ajst-25629	66	29	crsi	crsi	NOUN
ajst-25629	66	30	film	film	NOUN
ajst-25629	66	31	is	be	AUX
ajst-25629	66	32	in	in	ADP
ajst-25629	66	33	a	a	DET
ajst-25629	66	34	stable	stable	ADJ
ajst-25629	66	35	state	state	NOUN
ajst-25629	66	36	to	to	PART
ajst-25629	66	37	improve	improve	VERB
ajst-25629	66	38	the	the	DET
ajst-25629	66	39	long	long	ADJ
ajst-25629	66	40	-	-	PUNCT
ajst-25629	66	41	term	term	NOUN
ajst-25629	66	42	stability	stability	NOUN
ajst-25629	66	43	of	of	ADP
ajst-25629	66	44	the	the	DET
ajst-25629	66	45	film	film	NOUN
ajst-25629	66	46	.	.	PUNCT
ajst-25629	67	1	on	on	ADP
ajst-25629	67	2	the	the	DET
ajst-25629	67	3	other	other	ADJ
ajst-25629	67	4	hand	hand	NOUN
ajst-25629	67	5	,	,	PUNCT
ajst-25629	67	6	a	a	DET
ajst-25629	67	7	certain	certain	ADJ
ajst-25629	67	8	amount	amount	NOUN
ajst-25629	67	9	of	of	ADP
ajst-25629	67	10	insulating	insulate	VERB
ajst-25629	67	11	phase	phase	NOUN
ajst-25629	67	12	is	be	AUX
ajst-25629	67	13	formed	form	VERB
ajst-25629	67	14	in	in	ADP
ajst-25629	67	15	the	the	DET
ajst-25629	67	16	film	film	NOUN
ajst-25629	67	17	to	to	PART
ajst-25629	67	18	improve	improve	VERB
ajst-25629	67	19	the	the	DET
ajst-25629	67	20	temperature	temperature	NOUN
ajst-25629	67	21	characteristics	characteristic	NOUN
ajst-25629	67	22	of	of	ADP
ajst-25629	67	23	the	the	DET
ajst-25629	67	24	film	film	NOUN
ajst-25629	67	25	.	.	PUNCT
ajst-25629	68	1	it	it	PRON
ajst-25629	68	2	can	can	AUX
ajst-25629	68	3	be	be	AUX
ajst-25629	68	4	seen	see	VERB
ajst-25629	68	5	from	from	ADP
ajst-25629	68	6	the	the	DET
ajst-25629	68	7	annealing	anneal	VERB
ajst-25629	68	8	temperature	temperature	NOUN
ajst-25629	68	9	experiment	experiment	NOUN
ajst-25629	68	10	that	that	PRON
ajst-25629	68	11	the	the	PRON
ajst-25629	68	12	higher	high	ADJ
ajst-25629	68	13	the	the	DET
ajst-25629	68	14	annealing	anneal	VERB
ajst-25629	68	15	temperature	temperature	NOUN
ajst-25629	68	16	,	,	PUNCT
ajst-25629	68	17	the	the	PRON
ajst-25629	68	18	higher	high	ADJ
ajst-25629	68	19	the	the	DET
ajst-25629	68	20	temperature	temperature	NOUN
ajst-25629	68	21	coefficient	coefficient	NOUN
ajst-25629	68	22	of	of	ADP
ajst-25629	68	23	crsi	crsi	NOUN
ajst-25629	68	24	film	film	NOUN
ajst-25629	68	25	resistance	resistance	NOUN
ajst-25629	68	26	and	and	CCONJ
ajst-25629	68	27	the	the	PRON
ajst-25629	68	28	worse	bad	ADJ
ajst-25629	68	29	the	the	DET
ajst-25629	68	30	stability	stability	NOUN
ajst-25629	68	31	.	.	PUNCT
ajst-25629	69	1	the	the	DET
ajst-25629	69	2	addition	addition	NOUN
ajst-25629	69	3	of	of	ADP
ajst-25629	69	4	appropriate	appropriate	ADJ
ajst-25629	69	5	oxygen	oxygen	NOUN
ajst-25629	69	6	in	in	ADP
ajst-25629	69	7	the	the	DET
ajst-25629	69	8	annealing	annealing	NOUN
ajst-25629	69	9	atmosphere	atmosphere	NOUN
ajst-25629	69	10	can	can	AUX
ajst-25629	69	11	reduce	reduce	VERB
ajst-25629	69	12	the	the	DET
ajst-25629	69	13	temperature	temperature	NOUN
ajst-25629	69	14	coefficient	coefficient	NOUN
ajst-25629	69	15	of	of	ADP
ajst-25629	69	16	crsi	crsi	NOUN
ajst-25629	69	17	film	film	NOUN
ajst-25629	69	18	resistance	resistance	NOUN
ajst-25629	69	19	and	and	CCONJ
ajst-25629	69	20	improve	improve	VERB
ajst-25629	69	21	the	the	DET
ajst-25629	69	22	stability	stability	NOUN
ajst-25629	69	23	of	of	ADP
ajst-25629	69	24	crsi	crsi	ADJ
ajst-25629	69	25	film	film	NOUN
ajst-25629	69	26	resistance	resistance	NOUN
ajst-25629	69	27	.	.	PUNCT
ajst-25629	70	1	4	4	X
ajst-25629	70	2	.	.	X
ajst-25629	70	3	conclusion	conclusion	NOUN
ajst-25629	70	4	in	in	ADP
ajst-25629	70	5	this	this	DET
ajst-25629	70	6	paper	paper	NOUN
ajst-25629	70	7	,	,	PUNCT
ajst-25629	70	8	the	the	DET
ajst-25629	70	9	important	important	ADJ
ajst-25629	70	10	influencing	influence	VERB
ajst-25629	70	11	factors	factor	NOUN
ajst-25629	70	12	in	in	ADP
ajst-25629	70	13	the	the	DET
ajst-25629	70	14	preparation	preparation	NOUN
ajst-25629	70	15	process	process	NOUN
ajst-25629	70	16	of	of	ADP
ajst-25629	70	17	crsi	crsi	NOUN
ajst-25629	70	18	thin	thin	ADJ
ajst-25629	70	19	film	film	NOUN
ajst-25629	70	20	resistance	resistance	NOUN
ajst-25629	70	21	by	by	ADP
ajst-25629	70	22	magnetron	magnetron	NOUN
ajst-25629	70	23	sputtering	sputtering	NOUN
ajst-25629	70	24	are	be	AUX
ajst-25629	70	25	studied	study	VERB
ajst-25629	70	26	;	;	PUNCT
ajst-25629	70	27	the	the	DET
ajst-25629	70	28	influencing	influence	VERB
ajst-25629	70	29	rules	rule	NOUN
ajst-25629	70	30	of	of	ADP
ajst-25629	70	31	various	various	ADJ
ajst-25629	70	32	factors	factor	NOUN
ajst-25629	70	33	are	be	AUX
ajst-25629	70	34	summarized	summarize	VERB
ajst-25629	70	35	from	from	ADP
ajst-25629	70	36	the	the	DET
ajst-25629	70	37	perspective	perspective	NOUN
ajst-25629	70	38	of	of	ADP
ajst-25629	70	39	theory	theory	NOUN
ajst-25629	70	40	and	and	CCONJ
ajst-25629	70	41	experimental	experimental	ADJ
ajst-25629	70	42	analysis	analysis	NOUN
ajst-25629	70	43	,	,	PUNCT
ajst-25629	70	44	which	which	PRON
ajst-25629	70	45	provides	provide	VERB
ajst-25629	70	46	a	a	DET
ajst-25629	70	47	favorable	favorable	ADJ
ajst-25629	70	48	reference	reference	NOUN
ajst-25629	70	49	for	for	ADP
ajst-25629	70	50	improving	improve	VERB
ajst-25629	70	51	the	the	DET
ajst-25629	70	52	preparation	preparation	NOUN
ajst-25629	70	53	process	process	NOUN
ajst-25629	70	54	of	of	ADP
ajst-25629	70	55	metal	metal	NOUN
ajst-25629	70	56	thin	thin	ADJ
ajst-25629	70	57	film	film	NOUN
ajst-25629	70	58	resistance	resistance	NOUN
ajst-25629	70	59	.	.	PUNCT
ajst-25629	71	1	references	reference	NOUN
ajst-25629	71	2	[	[	X
ajst-25629	71	3	1	1	X
ajst-25629	71	4	]	]	X
ajst-25629	71	5	j.j.zhu	j.j.zhu	PROPN
ajst-25629	71	6	,	,	PUNCT
ajst-25629	71	7	z.l	z.l	PROPN
ajst-25629	71	8	.	.	PROPN
ajst-25629	71	9	zhang	zhang	PROPN
ajst-25629	71	10	,	,	PUNCT
ajst-25629	71	11	n.l.he	n.l.he	ADV
ajst-25629	71	12	:	:	PUNCT
ajst-25629	71	13	electrical	electrical	ADJ
ajst-25629	71	14	properties	property	NOUN
ajst-25629	71	15	of	of	ADP
ajst-25629	71	16	crsi	crsi	ADJ
ajst-25629	71	17	thin	thin	ADJ
ajst-25629	71	18	film	film	NOUN
ajst-25629	71	19	resistors	resistor	NOUN
ajst-25629	71	20	for	for	ADP
ajst-25629	71	21	high	high	ADJ
ajst-25629	71	22	precision	precision	NOUN
ajst-25629	71	23	analog	analog	NOUN
ajst-25629	71	24	circuits	circuit	NOUN
ajst-25629	71	25	.	.	PUNCT
ajst-25629	72	1	2022	2022	NUM
ajst-25629	72	2	10th	10th	ADJ
ajst-25629	72	3	international	international	ADJ
ajst-25629	72	4	symposium	symposium	NOUN
ajst-25629	72	5	on	on	ADP
ajst-25629	72	6	next	next	ADJ
ajst-25629	72	7	-	-	PUNCT
ajst-25629	72	8	generation	generation	NOUN
ajst-25629	72	9	electronics	electronic	NOUN
ajst-25629	72	10	(	(	PUNCT
ajst-25629	72	11	2023	2023	NUM
ajst-25629	72	12	)	)	PUNCT
ajst-25629	72	13	,	,	PUNCT
ajst-25629	72	14	10221639	10221639	NUM
ajst-25629	72	15	.	.	PUNCT
ajst-25629	73	1	[	[	X
ajst-25629	73	2	2	2	NUM
ajst-25629	73	3	]	]	PUNCT
ajst-25629	73	4	jiang	jiang	PROPN
ajst-25629	73	5	wei	wei	PROPN
ajst-25629	73	6	,	,	PUNCT
ajst-25629	73	7	tang	tang	PROPN
ajst-25629	73	8	junfeng	junfeng	PROPN
ajst-25629	73	9	:	:	PUNCT
ajst-25629	73	10	crsi	crsi	VERB
ajst-25629	73	11	thin	thin	ADJ
ajst-25629	73	12	film	film	NOUN
ajst-25629	73	13	resistance	resistance	NOUN
ajst-25629	73	14	technology	technology	NOUN
ajst-25629	73	15	by	by	ADP
ajst-25629	73	16	sputtering	sputter	VERB
ajst-25629	73	17	method	method	NOUN
ajst-25629	73	18	,	,	PUNCT
ajst-25629	73	19	discussed	discuss	VERB
ajst-25629	73	20	at	at	ADP
ajst-25629	73	21	the	the	DET
ajst-25629	73	22	14th	14th	ADJ
ajst-25629	73	23	national	national	ADJ
ajst-25629	73	24	hybrid	hybrid	ADJ
ajst-25629	73	25	integrated	integrate	VERB
ajst-25629	73	26	circuit	circuit	NOUN
ajst-25629	73	27	academic	academic	ADJ
ajst-25629	73	28	-	-	PUNCT
ajst-25629	73	29	huangshan	huangshan	PROPN
ajst-25629	73	30	,	,	PUNCT
ajst-25629	73	31	anhui	anhui	PROPN
ajst-25629	73	32	,	,	PUNCT
ajst-25629	73	33	china	china	PROPN
ajst-25629	73	34	(	(	PUNCT
ajst-25629	73	35	2005):p.124	2005):p.124	NUM
ajst-25629	73	36	-	-	SYM
ajst-25629	73	37	130	130	NUM
ajst-25629	73	38	.	.	PUNCT
ajst-25629	74	1	[	[	X
ajst-25629	74	2	3	3	X
ajst-25629	74	3	]	]	X
ajst-25629	74	4	j.j	j.j	PROPN
ajst-25629	74	5	.	.	PROPN
ajst-25629	74	6	zhu	zhu	PROPN
ajst-25629	74	7	,	,	PUNCT
ajst-25629	74	8	z.	z.	PROPN
ajst-25629	74	9	l	l	PROPN
ajst-25629	74	10	,	,	PUNCT
ajst-25629	74	11	zhang	zhang	PROPN
ajst-25629	74	12	,	,	PUNCT
ajst-25629	74	13	l.h	l.h	PROPN
ajst-25629	74	14	.	.	PROPN
ajst-25629	74	15	gu	gu	PROPN
ajst-25629	74	16	:	:	PUNCT
ajst-25629	74	17	fabrication	fabrication	NOUN
ajst-25629	74	18	process	process	NOUN
ajst-25629	74	19	and	and	CCONJ
ajst-25629	74	20	variation	variation	NOUN
ajst-25629	74	21	rule	rule	NOUN
ajst-25629	74	22	of	of	ADP
ajst-25629	74	23	electrical	electrical	ADJ
ajst-25629	74	24	properties	property	NOUN
ajst-25629	74	25	of	of	ADP
ajst-25629	74	26	crsi	crsi	ADJ
ajst-25629	74	27	thin	thin	ADJ
ajst-25629	74	28	film	film	NOUN
ajst-25629	74	29	resistors	resistor	NOUN
ajst-25629	74	30	,	,	PUNCT
ajst-25629	74	31	journal	journal	NOUN
ajst-25629	74	32	of	of	ADP
ajst-25629	74	33	physics	physics	PROPN
ajst-25629	74	34	:	:	PUNCT
ajst-25629	74	35	conference	conference	NOUN
ajst-25629	74	36	series	series	NOUN
ajst-25629	74	37	,	,	PUNCT
ajst-25629	74	38	vol.2680	vol.2680	PROPN
ajst-25629	74	39	(	(	PUNCT
ajst-25629	74	40	2024	2024	NUM
ajst-25629	74	41	)	)	PUNCT
ajst-25629	74	42	,	,	PUNCT
ajst-25629	74	43	p.1	p.1	NOUN
ajst-25629	74	44	-	-	SYM
ajst-25629	74	45	6	6	NUM
ajst-25629	74	46	.	.	PUNCT
ajst-25629	75	1	[	[	X
ajst-25629	75	2	4	4	NUM
ajst-25629	75	3	]	]	X
ajst-25629	75	4	kong	kong	PROPN
ajst-25629	75	5	lingying	lingying	PROPN
ajst-25629	75	6	:	:	PUNCT
ajst-25629	75	7	process	process	NOUN
ajst-25629	75	8	factors	factor	NOUN
ajst-25629	75	9	affecting	affect	VERB
ajst-25629	75	10	the	the	DET
ajst-25629	75	11	quality	quality	NOUN
ajst-25629	75	12	of	of	ADP
ajst-25629	75	13	magnetron	magnetron	NOUN
ajst-25629	75	14	sputtering	sputtering	NOUN
ajst-25629	75	15	film	film	NOUN
ajst-25629	75	16	,	,	PUNCT
ajst-25629	75	17	semiconductor	semiconductor	NOUN
ajst-25629	75	18	technology	technology	NOUN
ajst-25629	75	19	,	,	PUNCT
ajst-25629	75	20	1997	1997	NUM
ajst-25629	75	21	(	(	PUNCT
ajst-25629	75	22	5	5	NUM
ajst-25629	75	23	):	):	PUNCT
ajst-25629	75	24	p.21	p.21	NOUN
ajst-25629	75	25	-	-	PUNCT
ajst-25629	75	26	23	23	NUM
ajst-25629	75	27	.	.	PUNCT
ajst-25629	76	1	[	[	X
ajst-25629	76	2	5	5	X
ajst-25629	76	3	]	]	PUNCT
ajst-25629	76	4	wang	wang	PROPN
ajst-25629	76	5	fei	fei	PROPN
ajst-25629	76	6	,	,	PUNCT
ajst-25629	76	7	chen	chen	PROPN
ajst-25629	76	8	jun	jun	PROPN
ajst-25629	76	9	,	,	PUNCT
ajst-25629	76	10	wang	wang	PROPN
ajst-25629	76	11	xue	xue	PROPN
ajst-25629	76	12	-	-	PUNCT
ajst-25629	76	13	yi	yi	PROPN
ajst-25629	76	14	:	:	PUNCT
ajst-25629	76	15	preparation	preparation	NOUN
ajst-25629	76	16	of	of	ADP
ajst-25629	76	17	crsi	crsi	ADJ
ajst-25629	76	18	thin	thin	ADJ
ajst-25629	76	19	film	film	NOUN
ajst-25629	76	20	resistance	resistance	NOUN
ajst-25629	76	21	with	with	ADP
ajst-25629	76	22	low	low	ADJ
ajst-25629	76	23	temperature	temperature	NOUN
ajst-25629	76	24	coefficient	coefficient	NOUN
ajst-25629	76	25	,	,	PUNCT
ajst-25629	76	26	micro	micro	ADJ
ajst-25629	76	27	and	and	CCONJ
ajst-25629	76	28	nano	nano	ADJ
ajst-25629	76	29	electronic	electronic	ADJ
ajst-25629	76	30	technology	technology	NOUN
ajst-25629	76	31	,	,	PUNCT
ajst-25629	76	32	vol	vol	NOUN
ajst-25629	76	33	.	.	PROPN
ajst-25629	76	34	54	54	NUM
ajst-25629	76	35	(	(	PUNCT
ajst-25629	76	36	5	5	NUM
ajst-25629	76	37	)	)	PUNCT
ajst-25629	76	38	,	,	PUNCT
ajst-25629	76	39	2017	2017	NUM
ajst-25629	76	40	:	:	PUNCT
ajst-25629	76	41	p.	p.	NOUN
ajst-25629	76	42	355	355	NUM
ajst-25629	76	43	-	-	SYM
ajst-25629	76	44	359	359	NUM
ajst-25629	76	45	.	.	PUNCT
ajst-25629	77	1	[	[	X
ajst-25629	77	2	6	6	NUM
ajst-25629	77	3	]	]	X
ajst-25629	77	4	luo	luo	PROPN
ajst-25629	77	5	shan	shan	PROPN
ajst-25629	77	6	,	,	PUNCT
ajst-25629	77	7	zhang	zhang	PROPN
ajst-25629	77	8	zhengyuan	zhengyuan	PROPN
ajst-25629	77	9	:	:	PUNCT
ajst-25629	77	10	optimization	optimization	NOUN
ajst-25629	77	11	of	of	ADP
ajst-25629	77	12	resistance	resistance	NOUN
ajst-25629	77	13	annealing	anneal	VERB
ajst-25629	77	14	conditions	condition	NOUN
ajst-25629	77	15	for	for	ADP
ajst-25629	77	16	crsi	crsi	ADJ
ajst-25629	77	17	thin	thin	ADJ
ajst-25629	77	18	films	film	NOUN
ajst-25629	77	19	,	,	PUNCT
ajst-25629	77	20	microelectronics	microelectronic	NOUN
ajst-25629	77	21	,	,	PUNCT
ajst-25629	77	22	vol38	vol38	PROPN
ajst-25629	77	23	(	(	PUNCT
ajst-25629	77	24	3	3	NUM
ajst-25629	77	25	)	)	PUNCT
ajst-25629	77	26	,	,	PUNCT
ajst-25629	77	27	2008	2008	NUM
ajst-25629	77	28	:	:	PUNCT
ajst-25629	77	29	p.	p.	NOUN
ajst-25629	77	30	316	316	NUM
ajst-25629	77	31	-	-	SYM
ajst-25629	77	32	319	319	NUM
ajst-25629	77	33	.	.	PUNCT