id	sid	tid	token	lemma	pos
ajst-26745	1	1	academic	academic	ADJ
ajst-26745	1	2	journal	journal	NOUN
ajst-26745	1	3	of	of	ADP
ajst-26745	1	4	science	science	NOUN
ajst-26745	1	5	and	and	CCONJ
ajst-26745	1	6	technology	technology	NOUN
ajst-26745	1	7	issn	issn	NOUN
ajst-26745	1	8	:	:	PUNCT
ajst-26745	1	9	2771	2771	NUM
ajst-26745	1	10	-	-	SYM
ajst-26745	1	11	3032	3032	NUM
ajst-26745	1	12	|	|	NOUN
ajst-26745	1	13	vol	vol	NOUN
ajst-26745	1	14	.	.	PROPN
ajst-26745	1	15	13	13	NUM
ajst-26745	1	16	,	,	PUNCT
ajst-26745	1	17	no	no	INTJ
ajst-26745	1	18	.	.	NOUN
ajst-26745	1	19	1	1	NUM
ajst-26745	1	20	,	,	PUNCT
ajst-26745	1	21	2024	2024	NUM
ajst-26745	1	22	50	50	NUM
ajst-26745	1	23	mems	mem	NOUN
ajst-26745	1	24	precision	precision	NOUN
ajst-26745	1	25	sensors	sensor	NOUN
ajst-26745	1	26	based	base	VERB
ajst-26745	1	27	on	on	ADP
ajst-26745	1	28	process	process	NOUN
ajst-26745	1	29	innovation	innovation	NOUN
ajst-26745	1	30	technology	technology	NOUN
ajst-26745	1	31	kang	kang	PROPN
ajst-26745	1	32	shuai1	shuai1	PROPN
ajst-26745	1	33	,	,	PUNCT
ajst-26745	1	34	*	*	PUNCT
ajst-26745	1	35	,	,	PUNCT
ajst-26745	1	36	diandian	diandian	PROPN
ajst-26745	1	37	sang2	sang2	PROPN
ajst-26745	1	38	,	,	PUNCT
ajst-26745	1	39	xiaohu	xiaohu	PROPN
ajst-26745	1	40	tang3	tang3	PROPN
ajst-26745	2	1	1gachon	1gachon	NUM
ajst-26745	2	2	university	university	NOUN
ajst-26745	2	3	,	,	PUNCT
ajst-26745	2	4	korea	korea	PROPN
ajst-26745	2	5	2silla	2silla	PROPN
ajst-26745	2	6	university	university	PROPN
ajst-26745	2	7	,	,	PUNCT
ajst-26745	2	8	south	south	PROPN
ajst-26745	2	9	korea	korea	PROPN
ajst-26745	2	10	3dongmyung	3dongmyung	PROPN
ajst-26745	2	11	university	university	PROPN
ajst-26745	2	12	,	,	PUNCT
ajst-26745	2	13	south	south	PROPN
ajst-26745	2	14	korea	korea	PROPN
ajst-26745	2	15	*	*	PUNCT
ajst-26745	2	16	corresponding	correspond	VERB
ajst-26745	2	17	author	author	NOUN
ajst-26745	2	18	:	:	PUNCT
ajst-26745	2	19	ethel	ethel	PROPN
ajst-26745	2	20	tennyson	tennyson	PROPN
ajst-26745	2	21	abstract	abstract	PROPN
ajst-26745	2	22	:	:	PUNCT
ajst-26745	2	23	this	this	DET
ajst-26745	2	24	article	article	NOUN
ajst-26745	2	25	introduces	introduce	VERB
ajst-26745	2	26	a	a	DET
ajst-26745	2	27	novel	novel	ADJ
ajst-26745	2	28	process	process	NOUN
ajst-26745	2	29	for	for	ADP
ajst-26745	2	30	achieving	achieve	VERB
ajst-26745	2	31	micro	micro	ADJ
ajst-26745	2	32	-	-	ADJ
ajst-26745	2	33	scale	scale	ADJ
ajst-26745	2	34	thermal	thermal	ADJ
ajst-26745	2	35	isolation	isolation	NOUN
ajst-26745	2	36	through	through	ADP
ajst-26745	2	37	solid	solid	ADJ
ajst-26745	2	38	porous	porous	ADJ
ajst-26745	2	39	3d	3d	ADJ
ajst-26745	2	40	microstructures	microstructure	NOUN
ajst-26745	2	41	.	.	PUNCT
ajst-26745	3	1	it	it	PRON
ajst-26745	3	2	proposes	propose	VERB
ajst-26745	3	3	a	a	DET
ajst-26745	3	4	method	method	NOUN
ajst-26745	3	5	to	to	PART
ajst-26745	3	6	improve	improve	VERB
ajst-26745	3	7	existing	exist	VERB
ajst-26745	3	8	thermal	thermal	ADJ
ajst-26745	3	9	mems	mem	NOUN
ajst-26745	3	10	devices	device	NOUN
ajst-26745	3	11	by	by	ADP
ajst-26745	3	12	utilizing	utilize	VERB
ajst-26745	3	13	thin	thin	ADJ
ajst-26745	3	14	-	-	PUNCT
ajst-26745	3	15	film	film	NOUN
ajst-26745	3	16	membrane	membrane	NOUN
ajst-26745	3	17	structures	structure	NOUN
ajst-26745	3	18	,	,	PUNCT
ajst-26745	3	19	develops	develop	VERB
ajst-26745	3	20	a	a	DET
ajst-26745	3	21	model	model	NOUN
ajst-26745	3	22	for	for	ADP
ajst-26745	3	23	estimating	estimate	VERB
ajst-26745	3	24	the	the	DET
ajst-26745	3	25	thermal	thermal	ADJ
ajst-26745	3	26	conductivity	conductivity	NOUN
ajst-26745	3	27	of	of	ADP
ajst-26745	3	28	porous	porous	ADJ
ajst-26745	3	29	microstructures	microstructure	NOUN
ajst-26745	3	30	,	,	PUNCT
ajst-26745	3	31	and	and	CCONJ
ajst-26745	3	32	constructs	construct	VERB
ajst-26745	3	33	porous	porous	ADJ
ajst-26745	3	34	3d	3d	NOUN
ajst-26745	3	35	microstructures	microstructure	NOUN
ajst-26745	3	36	made	make	VERB
ajst-26745	3	37	of	of	ADP
ajst-26745	3	38	three	three	NUM
ajst-26745	3	39	different	different	ADJ
ajst-26745	3	40	powder	powder	NOUN
ajst-26745	3	41	materials	material	NOUN
ajst-26745	3	42	,	,	PUNCT
ajst-26745	3	43	studying	study	VERB
ajst-26745	3	44	their	their	PRON
ajst-26745	3	45	applicability	applicability	NOUN
ajst-26745	3	46	for	for	ADP
ajst-26745	3	47	thermal	thermal	ADJ
ajst-26745	3	48	isolation	isolation	NOUN
ajst-26745	3	49	.	.	PUNCT
ajst-26745	4	1	breakthroughs	breakthrough	NOUN
ajst-26745	4	2	have	have	AUX
ajst-26745	4	3	been	be	AUX
ajst-26745	4	4	achieved	achieve	VERB
ajst-26745	4	5	in	in	ADP
ajst-26745	4	6	process	process	NOUN
ajst-26745	4	7	preparation	preparation	NOUN
ajst-26745	4	8	technology	technology	NOUN
ajst-26745	4	9	,	,	PUNCT
ajst-26745	4	10	enabling	enable	VERB
ajst-26745	4	11	the	the	DET
ajst-26745	4	12	production	production	NOUN
ajst-26745	4	13	of	of	ADP
ajst-26745	4	14	precision	precision	NOUN
ajst-26745	4	15	mems	mem	NOUN
ajst-26745	4	16	sensors	sensor	NOUN
ajst-26745	4	17	.	.	PUNCT
ajst-26745	5	1	these	these	DET
ajst-26745	5	2	sensors	sensor	NOUN
ajst-26745	5	3	are	be	AUX
ajst-26745	5	4	expected	expect	VERB
ajst-26745	5	5	to	to	PART
ajst-26745	5	6	find	find	VERB
ajst-26745	5	7	wide	wide	ADJ
ajst-26745	5	8	applications	application	NOUN
ajst-26745	5	9	in	in	ADP
ajst-26745	5	10	smart	smart	ADJ
ajst-26745	5	11	cars	car	NOUN
ajst-26745	5	12	,	,	PUNCT
ajst-26745	5	13	intelligent	intelligent	ADJ
ajst-26745	5	14	healthcare	healthcare	NOUN
ajst-26745	5	15	,	,	PUNCT
ajst-26745	5	16	electronic	electronic	ADJ
ajst-26745	5	17	resonance	resonance	NOUN
ajst-26745	5	18	sensors	sensor	NOUN
ajst-26745	5	19	,	,	PUNCT
ajst-26745	5	20	and	and	CCONJ
ajst-26745	5	21	other	other	ADJ
ajst-26745	5	22	fields	field	NOUN
ajst-26745	5	23	.	.	PUNCT
ajst-26745	6	1	keywords	keyword	NOUN
ajst-26745	6	2	:	:	PUNCT
ajst-26745	6	3	micro	micro	ADJ
ajst-26745	6	4	-	-	ADJ
ajst-26745	6	5	electromechanical	electromechanical	ADJ
ajst-26745	6	6	systems	system	NOUN
ajst-26745	6	7	;	;	PUNCT
ajst-26745	6	8	sensor	sensor	NOUN
ajst-26745	6	9	;	;	PUNCT
ajst-26745	6	10	etching	etch	VERB
ajst-26745	6	11	process	process	NOUN
ajst-26745	6	12	;	;	PUNCT
ajst-26745	6	13	single	single	ADJ
ajst-26745	6	14	crystal	crystal	NOUN
ajst-26745	6	15	wafer	wafer	NOUN
ajst-26745	6	16	.	.	PUNCT
ajst-26745	7	1	1	1	X
ajst-26745	7	2	.	.	X
ajst-26745	7	3	research	research	NOUN
ajst-26745	7	4	background	background	NOUN
ajst-26745	7	5	through	through	ADP
ajst-26745	7	6	-	-	PUNCT
ajst-26745	7	7	silicon	silicon	NOUN
ajst-26745	7	8	via	via	ADP
ajst-26745	7	9	(	(	PUNCT
ajst-26745	7	10	tsv	tsv	NOUN
ajst-26745	7	11	)	)	PUNCT
ajst-26745	7	12	etching	etch	VERB
ajst-26745	7	13	and	and	CCONJ
ajst-26745	7	14	mems	mem	NOUN
ajst-26745	7	15	applications	application	NOUN
ajst-26745	7	16	require	require	VERB
ajst-26745	7	17	a	a	DET
ajst-26745	7	18	wide	wide	ADJ
ajst-26745	7	19	range	range	NOUN
ajst-26745	7	20	of	of	ADP
ajst-26745	7	21	etching	etch	VERB
ajst-26745	7	22	depths	depth	NOUN
ajst-26745	7	23	.	.	PUNCT
ajst-26745	8	1	in	in	ADP
ajst-26745	8	2	the	the	DET
ajst-26745	8	3	1980s	1980	NOUN
ajst-26745	8	4	,	,	PUNCT
ajst-26745	8	5	deep	deep	ADJ
ajst-26745	8	6	reactive	reactive	ADJ
ajst-26745	8	7	ion	ion	NOUN
ajst-26745	8	8	etching	etch	VERB
ajst-26745	8	9	(	(	PUNCT
ajst-26745	8	10	drie	drie	PROPN
ajst-26745	8	11	)	)	PUNCT
ajst-26745	8	12	was	be	AUX
ajst-26745	8	13	extensively	extensively	ADV
ajst-26745	8	14	studied	study	VERB
ajst-26745	8	15	in	in	ADP
ajst-26745	8	16	the	the	DET
ajst-26745	8	17	field	field	NOUN
ajst-26745	8	18	of	of	ADP
ajst-26745	8	19	mems	mem	NOUN
ajst-26745	8	20	,	,	PUNCT
ajst-26745	8	21	especially	especially	ADV
ajst-26745	8	22	in	in	ADP
ajst-26745	8	23	micromechanical	micromechanical	ADJ
ajst-26745	8	24	manufacturing	manufacturing	NOUN
ajst-26745	8	25	.	.	PUNCT
ajst-26745	9	1	the	the	DET
ajst-26745	9	2	results	result	NOUN
ajst-26745	9	3	entered	enter	VERB
ajst-26745	9	4	mass	mass	ADJ
ajst-26745	9	5	production	production	NOUN
ajst-26745	9	6	in	in	ADP
ajst-26745	9	7	the	the	DET
ajst-26745	9	8	1990s	1990s	NUM
ajst-26745	9	9	.	.	PUNCT
ajst-26745	10	1	by	by	ADP
ajst-26745	10	2	2018	2018	NUM
ajst-26745	10	3	,	,	PUNCT
ajst-26745	10	4	drie	drie	PROPN
ajst-26745	10	5	achieved	achieve	VERB
ajst-26745	10	6	breakthroughs	breakthrough	NOUN
ajst-26745	10	7	in	in	ADP
ajst-26745	10	8	manufacturing	manufacture	VERB
ajst-26745	10	9	multilayer	multilayer	ADJ
ajst-26745	10	10	complex	complex	ADJ
ajst-26745	10	11	mems	mem	NOUN
ajst-26745	10	12	structures	structure	NOUN
ajst-26745	10	13	.	.	PUNCT
ajst-26745	11	1	researchers	researcher	NOUN
ajst-26745	11	2	used	use	VERB
ajst-26745	11	3	drie	drie	PROPN
ajst-26745	11	4	to	to	PART
ajst-26745	11	5	create	create	VERB
ajst-26745	11	6	high	high	ADJ
ajst-26745	11	7	aspect	aspect	NOUN
ajst-26745	11	8	ratio	ratio	NOUN
ajst-26745	11	9	microstructures	microstructure	NOUN
ajst-26745	11	10	and	and	CCONJ
ajst-26745	11	11	integrated	integrate	VERB
ajst-26745	11	12	different	different	ADJ
ajst-26745	11	13	structural	structural	ADJ
ajst-26745	11	14	layers	layer	NOUN
ajst-26745	11	15	through	through	ADP
ajst-26745	11	16	wafer	wafer	NOUN
ajst-26745	11	17	bonding	bonding	NOUN
ajst-26745	11	18	.	.	PUNCT
ajst-26745	12	1	this	this	PRON
ajst-26745	12	2	provided	provide	VERB
ajst-26745	12	3	support	support	NOUN
ajst-26745	12	4	for	for	ADP
ajst-26745	12	5	high	high	ADJ
ajst-26745	12	6	-	-	PUNCT
ajst-26745	12	7	precision	precision	NOUN
ajst-26745	12	8	manufacturing	manufacturing	NOUN
ajst-26745	12	9	in	in	ADP
ajst-26745	12	10	fields	field	NOUN
ajst-26745	12	11	such	such	ADJ
ajst-26745	12	12	as	as	ADP
ajst-26745	12	13	inertial	inertial	ADJ
ajst-26745	12	14	sensors	sensor	NOUN
ajst-26745	12	15	and	and	CCONJ
ajst-26745	12	16	microfluidic	microfluidic	ADJ
ajst-26745	12	17	devices	device	NOUN
ajst-26745	12	18	.	.	PUNCT
ajst-26745	13	1	with	with	ADP
ajst-26745	13	2	continued	continued	ADJ
ajst-26745	13	3	research	research	NOUN
ajst-26745	13	4	on	on	ADP
ajst-26745	13	5	mems	mem	NOUN
ajst-26745	13	6	,	,	PUNCT
ajst-26745	13	7	drie	drie	PROPN
ajst-26745	13	8	technology	technology	PROPN
ajst-26745	13	9	reached	reach	VERB
ajst-26745	13	10	maturity	maturity	NOUN
ajst-26745	13	11	in	in	ADP
ajst-26745	13	12	mass	mass	ADJ
ajst-26745	13	13	production	production	NOUN
ajst-26745	13	14	by	by	ADP
ajst-26745	13	15	2022	2022	NUM
ajst-26745	13	16	,	,	PUNCT
ajst-26745	13	17	particularly	particularly	ADV
ajst-26745	13	18	in	in	ADP
ajst-26745	13	19	consumer	consumer	NOUN
ajst-26745	13	20	electronics	electronic	NOUN
ajst-26745	13	21	.	.	PUNCT
ajst-26745	14	1	optimized	optimize	VERB
ajst-26745	14	2	drie	drie	PROPN
ajst-26745	14	3	processes	process	NOUN
ajst-26745	14	4	enabled	enable	VERB
ajst-26745	14	5	large	large	ADJ
ajst-26745	14	6	-	-	PUNCT
ajst-26745	14	7	scale	scale	NOUN
ajst-26745	14	8	production	production	NOUN
ajst-26745	14	9	of	of	ADP
ajst-26745	14	10	mems	mems	ADJ
ajst-26745	14	11	microphones	microphone	NOUN
ajst-26745	14	12	and	and	CCONJ
ajst-26745	14	13	accelerometers	accelerometer	NOUN
ajst-26745	14	14	in	in	ADP
ajst-26745	14	15	smartphones	smartphone	NOUN
ajst-26745	14	16	while	while	SCONJ
ajst-26745	14	17	ensuring	ensure	VERB
ajst-26745	14	18	product	product	NOUN
ajst-26745	14	19	consistency	consistency	NOUN
ajst-26745	14	20	and	and	CCONJ
ajst-26745	14	21	reliability	reliability	NOUN
ajst-26745	14	22	.	.	PUNCT
ajst-26745	15	1	in	in	ADP
ajst-26745	15	2	2023	2023	NUM
ajst-26745	15	3	,	,	PUNCT
ajst-26745	15	4	drie	drie	PROPN
ajst-26745	15	5	technology	technology	NOUN
ajst-26745	15	6	made	make	VERB
ajst-26745	15	7	further	further	ADJ
ajst-26745	15	8	progress	progress	NOUN
ajst-26745	15	9	in	in	ADP
ajst-26745	15	10	manufacturing	manufacture	VERB
ajst-26745	15	11	mems	mem	NOUN
ajst-26745	15	12	devices	device	NOUN
ajst-26745	15	13	for	for	ADP
ajst-26745	15	14	microwave	microwave	NOUN
ajst-26745	15	15	and	and	CCONJ
ajst-26745	15	16	millimeterwave	millimeterwave	NOUN
ajst-26745	15	17	applications	application	NOUN
ajst-26745	15	18	.	.	PUNCT
ajst-26745	16	1	high	high	ADJ
ajst-26745	16	2	aspect	aspect	PROPN
ajst-26745	16	3	ratio	ratio	NOUN
ajst-26745	16	4	microstructures	microstructure	NOUN
ajst-26745	16	5	were	be	AUX
ajst-26745	16	6	used	use	VERB
ajst-26745	16	7	to	to	PART
ajst-26745	16	8	produce	produce	VERB
ajst-26745	16	9	high	high	ADJ
ajst-26745	16	10	-	-	PUNCT
ajst-26745	16	11	performance	performance	NOUN
ajst-26745	16	12	filters	filter	NOUN
ajst-26745	16	13	and	and	CCONJ
ajst-26745	16	14	antennas	antenna	NOUN
ajst-26745	16	15	for	for	ADP
ajst-26745	16	16	millimeter	millimeter	NOUN
ajst-26745	16	17	-	-	PUNCT
ajst-26745	16	18	wave	wave	NOUN
ajst-26745	16	19	frequencies	frequency	NOUN
ajst-26745	16	20	,	,	PUNCT
ajst-26745	16	21	showing	show	VERB
ajst-26745	16	22	superior	superior	ADJ
ajst-26745	16	23	characteristics	characteristic	NOUN
ajst-26745	16	24	in	in	ADP
ajst-26745	16	25	communication	communication	NOUN
ajst-26745	16	26	and	and	CCONJ
ajst-26745	16	27	radar	radar	NOUN
ajst-26745	16	28	systems	system	NOUN
ajst-26745	16	29	.	.	PUNCT
ajst-26745	17	1	2	2	X
ajst-26745	17	2	.	.	X
ajst-26745	17	3	research	research	NOUN
ajst-26745	17	4	status	status	NOUN
ajst-26745	17	5	at	at	ADP
ajst-26745	17	6	home	home	ADV
ajst-26745	17	7	and	and	CCONJ
ajst-26745	17	8	abroad	abroad	ADV
ajst-26745	17	9	(	(	PUNCT
ajst-26745	17	10	a	a	X
ajst-26745	17	11	)	)	PUNCT
ajst-26745	17	12	international	international	ADJ
ajst-26745	17	13	research	research	NOUN
ajst-26745	17	14	status	status	NOUN
ajst-26745	17	15	mems	mem	NOUN
ajst-26745	17	16	(	(	PUNCT
ajst-26745	17	17	micro	micro	NOUN
ajst-26745	17	18	-	-	ADJ
ajst-26745	17	19	electro	electro	ADJ
ajst-26745	17	20	-	-	PUNCT
ajst-26745	17	21	mechanical	mechanical	ADJ
ajst-26745	17	22	systems	system	NOUN
ajst-26745	17	23	)	)	PUNCT
ajst-26745	17	24	technology	technology	NOUN
ajst-26745	17	25	is	be	AUX
ajst-26745	17	26	a	a	DET
ajst-26745	17	27	multidisciplinary	multidisciplinary	ADJ
ajst-26745	17	28	field	field	NOUN
ajst-26745	17	29	combining	combine	VERB
ajst-26745	17	30	microelectronics	microelectronic	NOUN
ajst-26745	17	31	,	,	PUNCT
ajst-26745	17	32	optics	optic	NOUN
ajst-26745	17	33	,	,	PUNCT
ajst-26745	17	34	and	and	CCONJ
ajst-26745	17	35	microfluidics	microfluidic	NOUN
ajst-26745	17	36	.	.	PUNCT
ajst-26745	18	1	it	it	PRON
ajst-26745	18	2	has	have	AUX
ajst-26745	18	3	found	find	VERB
ajst-26745	18	4	widespread	widespread	ADJ
ajst-26745	18	5	global	global	ADJ
ajst-26745	18	6	application	application	NOUN
ajst-26745	18	7	.	.	PUNCT
ajst-26745	19	1	here	here	ADV
ajst-26745	19	2	is	be	AUX
ajst-26745	19	3	an	an	DET
ajst-26745	19	4	overview	overview	NOUN
ajst-26745	19	5	of	of	ADP
ajst-26745	19	6	mems	mem	NOUN
ajst-26745	19	7	process	process	NOUN
ajst-26745	19	8	technology	technology	NOUN
ajst-26745	19	9	research	research	NOUN
ajst-26745	19	10	abroad	abroad	ADV
ajst-26745	19	11	:	:	PUNCT
ajst-26745	19	12	1	1	X
ajst-26745	19	13	.	.	X
ajst-26745	19	14	silicon	silicon	NOUN
ajst-26745	19	15	-	-	PUNCT
ajst-26745	19	16	based	base	VERB
ajst-26745	19	17	mems	mem	NOUN
ajst-26745	19	18	process	process	NOUN
ajst-26745	19	19	technology	technology	NOUN
ajst-26745	19	20	:	:	PUNCT
ajst-26745	19	21	this	this	PRON
ajst-26745	19	22	is	be	AUX
ajst-26745	19	23	the	the	DET
ajst-26745	19	24	primary	primary	ADJ
ajst-26745	19	25	approach	approach	NOUN
ajst-26745	19	26	abroad	abroad	ADV
ajst-26745	19	27	,	,	PUNCT
ajst-26745	19	28	focusing	focus	VERB
ajst-26745	19	29	on	on	ADP
ajst-26745	19	30	improving	improve	VERB
ajst-26745	19	31	the	the	DET
ajst-26745	19	32	precision	precision	NOUN
ajst-26745	19	33	of	of	ADP
ajst-26745	19	34	silicon	silicon	NOUN
ajst-26745	19	35	micromachining	micromachine	VERB
ajst-26745	19	36	and	and	CCONJ
ajst-26745	19	37	ensuring	ensure	VERB
ajst-26745	19	38	reproducibility	reproducibility	NOUN
ajst-26745	19	39	in	in	ADP
ajst-26745	19	40	mems	mem	NOUN
ajst-26745	19	41	processes	process	NOUN
ajst-26745	19	42	.	.	PUNCT
ajst-26745	20	1	for	for	ADP
ajst-26745	20	2	example	example	NOUN
ajst-26745	20	3	,	,	PUNCT
ajst-26745	20	4	the	the	DET
ajst-26745	20	5	european	european	PROPN
ajst-26745	20	6	csem	csem	PROPN
ajst-26745	20	7	institute	institute	PROPN
ajst-26745	20	8	developed	develop	VERB
ajst-26745	20	9	a	a	DET
ajst-26745	20	10	new	new	ADJ
ajst-26745	20	11	micromachining	micromachine	VERB
ajst-26745	20	12	technology	technology	NOUN
ajst-26745	20	13	called	call	VERB
ajst-26745	20	14	"	"	PUNCT
ajst-26745	20	15	plowing	plow	VERB
ajst-26745	20	16	technique	technique	NOUN
ajst-26745	20	17	"	"	PUNCT
ajst-26745	20	18	that	that	PRON
ajst-26745	20	19	improves	improve	VERB
ajst-26745	20	20	the	the	DET
ajst-26745	20	21	accuracy	accuracy	NOUN
ajst-26745	20	22	and	and	CCONJ
ajst-26745	20	23	surface	surface	NOUN
ajst-26745	20	24	finish	finish	NOUN
ajst-26745	20	25	of	of	ADP
ajst-26745	20	26	silicon	silicon	PROPN
ajst-26745	20	27	micro	micro	NOUN
ajst-26745	20	28	-	-	NOUN
ajst-26745	20	29	machining	machining	ADJ
ajst-26745	20	30	.	.	PUNCT
ajst-26745	21	1	2	2	X
ajst-26745	21	2	.	.	NOUN
ajst-26745	21	3	piezoelectric	piezoelectric	NOUN
ajst-26745	21	4	mems	mem	NOUN
ajst-26745	21	5	process	process	NOUN
ajst-26745	21	6	technology	technology	NOUN
ajst-26745	21	7	:	:	PUNCT
ajst-26745	21	8	this	this	DET
ajst-26745	21	9	branch	branch	NOUN
ajst-26745	21	10	is	be	AUX
ajst-26745	21	11	mainly	mainly	ADV
ajst-26745	21	12	used	use	VERB
ajst-26745	21	13	for	for	ADP
ajst-26745	21	14	mems	mems	ADJ
ajst-26745	21	15	devices	device	NOUN
ajst-26745	21	16	like	like	ADP
ajst-26745	21	17	micro	micro	ADJ
ajst-26745	21	18	-	-	ADJ
ajst-26745	21	19	mechanical	mechanical	ADJ
ajst-26745	21	20	oscillators	oscillator	NOUN
ajst-26745	21	21	and	and	CCONJ
ajst-26745	21	22	sensors	sensor	NOUN
ajst-26745	21	23	.	.	PUNCT
ajst-26745	22	1	researchers	researcher	NOUN
ajst-26745	22	2	at	at	ADP
ajst-26745	22	3	the	the	DET
ajst-26745	22	4	university	university	PROPN
ajst-26745	22	5	of	of	ADP
ajst-26745	22	6	arizona	arizona	PROPN
ajst-26745	22	7	are	be	AUX
ajst-26745	22	8	studying	study	VERB
ajst-26745	22	9	new	new	ADJ
ajst-26745	22	10	piezoelectric	piezoelectric	NOUN
ajst-26745	22	11	materials	material	NOUN
ajst-26745	22	12	that	that	PRON
ajst-26745	22	13	enhance	enhance	VERB
ajst-26745	22	14	the	the	DET
ajst-26745	22	15	performance	performance	NOUN
ajst-26745	22	16	and	and	CCONJ
ajst-26745	22	17	stability	stability	NOUN
ajst-26745	22	18	of	of	ADP
ajst-26745	22	19	micro	micro	ADJ
ajst-26745	22	20	-	-	ADJ
ajst-26745	22	21	mechanical	mechanical	ADJ
ajst-26745	22	22	oscillators	oscillator	NOUN
ajst-26745	22	23	.	.	PUNCT
ajst-26745	23	1	3	3	X
ajst-26745	23	2	.	.	X
ajst-26745	23	3	bio	bio	ADJ
ajst-26745	23	4	-	-	PUNCT
ajst-26745	23	5	mems	mems	ADJ
ajst-26745	23	6	process	process	NOUN
ajst-26745	23	7	technology	technology	NOUN
ajst-26745	23	8	:	:	PUNCT
ajst-26745	23	9	a	a	DET
ajst-26745	23	10	burgeoning	burgeon	VERB
ajst-26745	23	11	field	field	NOUN
ajst-26745	23	12	focused	focus	VERB
ajst-26745	23	13	on	on	ADP
ajst-26745	23	14	biomedical	biomedical	ADJ
ajst-26745	23	15	devices	device	NOUN
ajst-26745	23	16	and	and	CCONJ
ajst-26745	23	17	biosensors	biosensor	NOUN
ajst-26745	23	18	.	.	PUNCT
ajst-26745	24	1	for	for	ADP
ajst-26745	24	2	example	example	NOUN
ajst-26745	24	3	,	,	PUNCT
ajst-26745	24	4	researchers	researcher	NOUN
ajst-26745	24	5	at	at	ADP
ajst-26745	24	6	mit	mit	PROPN
ajst-26745	24	7	are	be	AUX
ajst-26745	24	8	studying	study	VERB
ajst-26745	24	9	a	a	DET
ajst-26745	24	10	new	new	ADJ
ajst-26745	24	11	biomaterial	biomaterial	NOUN
ajst-26745	24	12	called	call	VERB
ajst-26745	24	13	"	"	PUNCT
ajst-26745	24	14	polymer	polymer	NOUN
ajst-26745	24	15	microarray	microarray	NOUN
ajst-26745	24	16	,	,	PUNCT
ajst-26745	24	17	"	"	PUNCT
ajst-26745	24	18	which	which	PRON
ajst-26745	24	19	can	can	AUX
ajst-26745	24	20	be	be	AUX
ajst-26745	24	21	used	use	VERB
ajst-26745	24	22	to	to	PART
ajst-26745	24	23	create	create	VERB
ajst-26745	24	24	highly	highly	ADV
ajst-26745	24	25	sensitive	sensitive	ADJ
ajst-26745	24	26	biosensors	biosensor	NOUN
ajst-26745	24	27	and	and	CCONJ
ajst-26745	24	28	microfluidic	microfluidic	ADJ
ajst-26745	24	29	controllers	controller	NOUN
ajst-26745	24	30	.	.	PUNCT
ajst-26745	25	1	4	4	X
ajst-26745	25	2	.	.	X
ajst-26745	25	3	optical	optical	ADJ
ajst-26745	25	4	mems	mem	NOUN
ajst-26745	25	5	process	process	NOUN
ajst-26745	25	6	technology	technology	NOUN
ajst-26745	25	7	:	:	PUNCT
ajst-26745	25	8	another	another	DET
ajst-26745	25	9	branch	branch	NOUN
ajst-26745	25	10	of	of	ADP
ajst-26745	25	11	mems	mem	NOUN
ajst-26745	25	12	technology	technology	NOUN
ajst-26745	25	13	that	that	PRON
ajst-26745	25	14	is	be	AUX
ajst-26745	25	15	primarily	primarily	ADV
ajst-26745	25	16	used	use	VERB
ajst-26745	25	17	in	in	ADP
ajst-26745	25	18	micro	micro	ADJ
ajst-26745	25	19	-	-	ADJ
ajst-26745	25	20	optical	optical	ADJ
ajst-26745	25	21	devices	device	NOUN
ajst-26745	25	22	and	and	CCONJ
ajst-26745	25	23	optical	optical	ADJ
ajst-26745	25	24	sensors	sensor	NOUN
ajst-26745	25	25	.	.	PUNCT
ajst-26745	26	1	overall	overall	ADJ
ajst-26745	26	2	,	,	PUNCT
ajst-26745	26	3	international	international	ADJ
ajst-26745	26	4	mems	mem	NOUN
ajst-26745	26	5	research	research	NOUN
ajst-26745	26	6	focuses	focus	VERB
ajst-26745	26	7	on	on	ADP
ajst-26745	26	8	improving	improve	VERB
ajst-26745	26	9	material	material	ADJ
ajst-26745	26	10	properties	property	NOUN
ajst-26745	26	11	and	and	CCONJ
ajst-26745	26	12	manufacturing	manufacturing	NOUN
ajst-26745	26	13	process	process	NOUN
ajst-26745	26	14	reproducibility	reproducibility	NOUN
ajst-26745	26	15	to	to	PART
ajst-26745	26	16	meet	meet	VERB
ajst-26745	26	17	the	the	DET
ajst-26745	26	18	needs	need	NOUN
ajst-26745	26	19	of	of	ADP
ajst-26745	26	20	various	various	ADJ
ajst-26745	26	21	applications	application	NOUN
ajst-26745	26	22	.	.	PUNCT
ajst-26745	27	1	(	(	PUNCT
ajst-26745	27	2	b	b	X
ajst-26745	27	3	)	)	PUNCT
ajst-26745	27	4	domestic	domestic	ADJ
ajst-26745	27	5	research	research	NOUN
ajst-26745	27	6	status	status	NOUN
ajst-26745	27	7	china	china	PROPN
ajst-26745	27	8	's	's	PART
ajst-26745	27	9	mems	mems	PROPN
ajst-26745	27	10	(	(	PUNCT
ajst-26745	27	11	micro	micro	NOUN
ajst-26745	27	12	-	-	ADJ
ajst-26745	27	13	electro	electro	ADJ
ajst-26745	27	14	-	-	PUNCT
ajst-26745	27	15	mechanical	mechanical	ADJ
ajst-26745	27	16	systems	system	NOUN
ajst-26745	27	17	)	)	PUNCT
ajst-26745	27	18	manufacturing	manufacturing	NOUN
ajst-26745	27	19	process	process	NOUN
ajst-26745	27	20	technology	technology	NOUN
ajst-26745	27	21	has	have	AUX
ajst-26745	27	22	made	make	VERB
ajst-26745	27	23	significant	significant	ADJ
ajst-26745	27	24	progress	progress	NOUN
ajst-26745	27	25	and	and	CCONJ
ajst-26745	27	26	achievements	achievement	NOUN
ajst-26745	27	27	,	,	PUNCT
ajst-26745	27	28	summarized	summarize	VERB
ajst-26745	27	29	as	as	SCONJ
ajst-26745	27	30	follows	follow	VERB
ajst-26745	27	31	:	:	PUNCT
ajst-26745	27	32	1	1	X
ajst-26745	27	33	.	.	X
ajst-26745	27	34	manufacturing	manufacturing	NOUN
ajst-26745	27	35	process	process	NOUN
ajst-26745	27	36	research	research	NOUN
ajst-26745	27	37	:	:	PUNCT
ajst-26745	27	38	china	china	PROPN
ajst-26745	27	39	's	's	PART
ajst-26745	27	40	mems	mems	PROPN
ajst-26745	27	41	manufacturing	manufacturing	NOUN
ajst-26745	27	42	process	process	NOUN
ajst-26745	27	43	has	have	AUX
ajst-26745	27	44	reached	reach	VERB
ajst-26745	27	45	a	a	DET
ajst-26745	27	46	certain	certain	ADJ
ajst-26745	27	47	level	level	NOUN
ajst-26745	27	48	,	,	PUNCT
ajst-26745	27	49	with	with	ADP
ajst-26745	27	50	capabilities	capability	NOUN
ajst-26745	27	51	in	in	ADP
ajst-26745	27	52	thin	thin	ADJ
ajst-26745	27	53	-	-	PUNCT
ajst-26745	27	54	film	film	NOUN
ajst-26745	27	55	deposition	deposition	NOUN
ajst-26745	27	56	,	,	PUNCT
ajst-26745	27	57	photolithography	photolithography	NOUN
ajst-26745	27	58	,	,	PUNCT
ajst-26745	27	59	wet	wet	ADJ
ajst-26745	27	60	etching	etching	NOUN
ajst-26745	27	61	,	,	PUNCT
ajst-26745	27	62	ion	ion	NOUN
ajst-26745	27	63	beam	beam	NOUN
ajst-26745	27	64	etching	etch	VERB
ajst-26745	27	65	,	,	PUNCT
ajst-26745	27	66	and	and	CCONJ
ajst-26745	27	67	laser	laser	NOUN
ajst-26745	27	68	micromachining	micromachining	NOUN
ajst-26745	27	69	.	.	PUNCT
ajst-26745	28	1	2	2	X
ajst-26745	28	2	.	.	X
ajst-26745	28	3	design	design	NOUN
ajst-26745	28	4	and	and	CCONJ
ajst-26745	28	5	simulation	simulation	NOUN
ajst-26745	28	6	research	research	NOUN
ajst-26745	28	7	:	:	PUNCT
ajst-26745	28	8	with	with	ADP
ajst-26745	28	9	advances	advance	NOUN
ajst-26745	28	10	in	in	ADP
ajst-26745	28	11	computer	computer	NOUN
ajst-26745	28	12	technology	technology	NOUN
ajst-26745	28	13	,	,	PUNCT
ajst-26745	28	14	various	various	ADJ
ajst-26745	28	15	design	design	NOUN
ajst-26745	28	16	and	and	CCONJ
ajst-26745	28	17	simulation	simulation	NOUN
ajst-26745	28	18	software	software	NOUN
ajst-26745	28	19	have	have	AUX
ajst-26745	28	20	become	become	VERB
ajst-26745	28	21	increasingly	increasingly	ADV
ajst-26745	28	22	sophisticated	sophisticated	ADJ
ajst-26745	28	23	,	,	PUNCT
ajst-26745	28	24	providing	provide	VERB
ajst-26745	28	25	strong	strong	ADJ
ajst-26745	28	26	support	support	NOUN
ajst-26745	28	27	for	for	ADP
ajst-26745	28	28	mems	mem	NOUN
ajst-26745	28	29	research	research	NOUN
ajst-26745	28	30	and	and	CCONJ
ajst-26745	28	31	development	development	NOUN
ajst-26745	28	32	.	.	PUNCT
ajst-26745	29	1	3	3	X
ajst-26745	29	2	.	.	X
ajst-26745	29	3	application	application	NOUN
ajst-26745	29	4	research	research	NOUN
ajst-26745	29	5	:	:	PUNCT
ajst-26745	29	6	china	china	PROPN
ajst-26745	29	7	's	's	PART
ajst-26745	29	8	mems	mems	PROPN
ajst-26745	29	9	application	application	NOUN
ajst-26745	29	10	research	research	NOUN
ajst-26745	29	11	is	be	AUX
ajst-26745	29	12	expanding	expand	VERB
ajst-26745	29	13	,	,	PUNCT
ajst-26745	29	14	covering	cover	VERB
ajst-26745	29	15	areas	area	NOUN
ajst-26745	29	16	like	like	ADP
ajst-26745	29	17	sensors	sensor	NOUN
ajst-26745	29	18	,	,	PUNCT
ajst-26745	29	19	microelectromechanical	microelectromechanical	ADJ
ajst-26745	29	20	systems	system	NOUN
ajst-26745	29	21	,	,	PUNCT
ajst-26745	29	22	optical	optical	ADJ
ajst-26745	29	23	devices	device	NOUN
ajst-26745	29	24	,	,	PUNCT
ajst-26745	29	25	and	and	CCONJ
ajst-26745	29	26	biomedical	biomedical	ADJ
ajst-26745	29	27	applications	application	NOUN
ajst-26745	29	28	.	.	PUNCT
ajst-26745	30	1	many	many	ADJ
ajst-26745	30	2	mems	mem	NOUN
ajst-26745	30	3	products	product	NOUN
ajst-26745	30	4	have	have	AUX
ajst-26745	30	5	been	be	AUX
ajst-26745	30	6	successfully	successfully	ADV
ajst-26745	30	7	applied	apply	VERB
ajst-26745	30	8	in	in	ADP
ajst-26745	30	9	industrial	industrial	ADJ
ajst-26745	30	10	control	control	NOUN
ajst-26745	30	11	,	,	PUNCT
ajst-26745	30	12	environmental	environmental	ADJ
ajst-26745	30	13	monitoring	monitoring	NOUN
ajst-26745	30	14	,	,	PUNCT
ajst-26745	30	15	medical	medical	ADJ
ajst-26745	30	16	diagnostics	diagnostic	NOUN
ajst-26745	30	17	,	,	PUNCT
ajst-26745	30	18	and	and	CCONJ
ajst-26745	30	19	have	have	AUX
ajst-26745	30	20	received	receive	VERB
ajst-26745	30	21	positive	positive	ADJ
ajst-26745	30	22	market	market	NOUN
ajst-26745	30	23	feedback	feedback	NOUN
ajst-26745	30	24	.	.	PUNCT
ajst-26745	31	1	4	4	X
ajst-26745	31	2	.	.	X
ajst-26745	31	3	national	national	ADJ
ajst-26745	31	4	policy	policy	NOUN
ajst-26745	31	5	support	support	NOUN
ajst-26745	31	6	:	:	PUNCT
ajst-26745	31	7	the	the	DET
ajst-26745	31	8	chinese	chinese	ADJ
ajst-26745	31	9	government	government	NOUN
ajst-26745	31	10	highly	highly	ADV
ajst-26745	31	11	prioritizes	prioritize	VERB
ajst-26745	31	12	the	the	DET
ajst-26745	31	13	development	development	NOUN
ajst-26745	31	14	of	of	ADP
ajst-26745	31	15	mems	mems	PROPN
ajst-26745	31	16	technology	technology	NOUN
ajst-26745	31	17	,	,	PUNCT
ajst-26745	31	18	51	51	NUM
ajst-26745	31	19	formulating	formulate	VERB
ajst-26745	31	20	policies	policy	NOUN
ajst-26745	31	21	and	and	CCONJ
ajst-26745	31	22	plans	plan	NOUN
ajst-26745	31	23	such	such	ADJ
ajst-26745	31	24	as	as	ADP
ajst-26745	31	25	the	the	DET
ajst-26745	31	26	"	"	PUNCT
ajst-26745	31	27	863	863	NUM
ajst-26745	31	28	plan	plan	NOUN
ajst-26745	31	29	,	,	PUNCT
ajst-26745	31	30	"	"	PUNCT
ajst-26745	31	31	"	"	PUNCT
ajst-26745	31	32	new	new	ADJ
ajst-26745	31	33	generation	generation	NOUN
ajst-26745	31	34	information	information	NOUN
ajst-26745	31	35	technology	technology	NOUN
ajst-26745	31	36	initiative	initiative	NOUN
ajst-26745	31	37	,	,	PUNCT
ajst-26745	31	38	"	"	PUNCT
ajst-26745	31	39	and	and	CCONJ
ajst-26745	31	40	"	"	PUNCT
ajst-26745	31	41	integrated	integrated	ADJ
ajst-26745	31	42	circuit	circuit	NOUN
ajst-26745	31	43	industry	industry	NOUN
ajst-26745	31	44	development	development	NOUN
ajst-26745	31	45	plan	plan	NOUN
ajst-26745	31	46	"	"	PUNCT
ajst-26745	31	47	to	to	PART
ajst-26745	31	48	ensure	ensure	VERB
ajst-26745	31	49	policy	policy	NOUN
ajst-26745	31	50	support	support	NOUN
ajst-26745	31	51	and	and	CCONJ
ajst-26745	31	52	funding	funding	NOUN
ajst-26745	31	53	,	,	PUNCT
ajst-26745	31	54	promoting	promote	VERB
ajst-26745	31	55	the	the	DET
ajst-26745	31	56	growth	growth	NOUN
ajst-26745	31	57	of	of	ADP
ajst-26745	31	58	mems	mems	ADJ
ajst-26745	31	59	technology	technology	NOUN
ajst-26745	31	60	.	.	PUNCT
ajst-26745	32	1	despite	despite	SCONJ
ajst-26745	32	2	significant	significant	ADJ
ajst-26745	32	3	progress	progress	NOUN
ajst-26745	32	4	in	in	ADP
ajst-26745	32	5	mems	mems	ADJ
ajst-26745	32	6	manufacturing	manufacturing	NOUN
ajst-26745	32	7	process	process	NOUN
ajst-26745	32	8	technology	technology	NOUN
ajst-26745	32	9	,	,	PUNCT
ajst-26745	32	10	china	china	PROPN
ajst-26745	32	11	still	still	ADV
ajst-26745	32	12	lags	lag	VERB
ajst-26745	32	13	behind	behind	ADP
ajst-26745	32	14	developed	develop	VERB
ajst-26745	32	15	countries	country	NOUN
ajst-26745	32	16	and	and	CCONJ
ajst-26745	32	17	needs	need	VERB
ajst-26745	32	18	to	to	PART
ajst-26745	32	19	further	far	ADV
ajst-26745	32	20	strengthen	strengthen	VERB
ajst-26745	32	21	research	research	NOUN
ajst-26745	32	22	and	and	CCONJ
ajst-26745	32	23	development	development	NOUN
ajst-26745	32	24	.	.	PUNCT
ajst-26745	33	1	3	3	X
ajst-26745	33	2	.	.	X
ajst-26745	33	3	core	core	NOUN
ajst-26745	33	4	technologies	technology	NOUN
ajst-26745	33	5	this	this	DET
ajst-26745	33	6	work	work	NOUN
ajst-26745	33	7	presents	present	VERB
ajst-26745	33	8	a	a	DET
ajst-26745	33	9	new	new	ADJ
ajst-26745	33	10	process	process	NOUN
ajst-26745	33	11	for	for	ADP
ajst-26745	33	12	achieving	achieve	VERB
ajst-26745	33	13	microscale	microscale	ADJ
ajst-26745	33	14	thermal	thermal	ADJ
ajst-26745	33	15	isolation	isolation	NOUN
ajst-26745	33	16	through	through	ADP
ajst-26745	33	17	solid	solid	ADJ
ajst-26745	33	18	porous	porous	ADJ
ajst-26745	33	19	3d	3d	ADJ
ajst-26745	33	20	microstructures	microstructure	NOUN
ajst-26745	33	21	,	,	PUNCT
ajst-26745	33	22	improving	improve	VERB
ajst-26745	33	23	existing	exist	VERB
ajst-26745	33	24	thermal	thermal	ADJ
ajst-26745	33	25	mems	mem	NOUN
ajst-26745	33	26	devices	device	NOUN
ajst-26745	33	27	using	use	VERB
ajst-26745	33	28	thin	thin	ADJ
ajst-26745	33	29	-	-	PUNCT
ajst-26745	33	30	film	film	NOUN
ajst-26745	33	31	membrane	membrane	NOUN
ajst-26745	33	32	structures	structure	NOUN
ajst-26745	33	33	.	.	PUNCT
ajst-26745	34	1	a	a	DET
ajst-26745	34	2	model	model	NOUN
ajst-26745	34	3	for	for	ADP
ajst-26745	34	4	estimating	estimate	VERB
ajst-26745	34	5	the	the	DET
ajst-26745	34	6	thermal	thermal	ADJ
ajst-26745	34	7	conductivity	conductivity	NOUN
ajst-26745	34	8	of	of	ADP
ajst-26745	34	9	porous	porous	ADJ
ajst-26745	34	10	microstructures	microstructure	NOUN
ajst-26745	34	11	was	be	AUX
ajst-26745	34	12	developed	develop	VERB
ajst-26745	34	13	,	,	PUNCT
ajst-26745	34	14	and	and	CCONJ
ajst-26745	34	15	porous	porous	ADJ
ajst-26745	34	16	3d	3d	NOUN
ajst-26745	34	17	microstructures	microstructure	NOUN
ajst-26745	34	18	made	make	VERB
ajst-26745	34	19	from	from	ADP
ajst-26745	34	20	three	three	NUM
ajst-26745	34	21	different	different	ADJ
ajst-26745	34	22	powder	powder	NOUN
ajst-26745	34	23	materials	material	NOUN
ajst-26745	34	24	were	be	AUX
ajst-26745	34	25	constructed	construct	VERB
ajst-26745	34	26	to	to	PART
ajst-26745	34	27	study	study	VERB
ajst-26745	34	28	their	their	PRON
ajst-26745	34	29	suitability	suitability	NOUN
ajst-26745	34	30	for	for	ADP
ajst-26745	34	31	thermal	thermal	ADJ
ajst-26745	34	32	isolation	isolation	NOUN
ajst-26745	34	33	.	.	PUNCT
ajst-26745	35	1	this	this	DET
ajst-26745	35	2	process	process	NOUN
ajst-26745	35	3	enables	enable	VERB
ajst-26745	35	4	the	the	DET
ajst-26745	35	5	production	production	NOUN
ajst-26745	35	6	of	of	ADP
ajst-26745	35	7	six	six	NUM
ajst-26745	35	8	-	-	PUNCT
ajst-26745	35	9	inch	inch	NOUN
ajst-26745	35	10	and	and	CCONJ
ajst-26745	35	11	eightinch	eightinch	ADJ
ajst-26745	35	12	wafers	wafer	NOUN
ajst-26745	35	13	at	at	ADP
ajst-26745	35	14	the	the	DET
ajst-26745	35	15	micron	micron	NOUN
ajst-26745	35	16	level	level	NOUN
ajst-26745	35	17	.	.	PUNCT
ajst-26745	36	1	for	for	ADP
ajst-26745	36	2	six	six	NUM
ajst-26745	36	3	-	-	PUNCT
ajst-26745	36	4	inch	inch	NOUN
ajst-26745	36	5	wafers	wafer	NOUN
ajst-26745	36	6	,	,	PUNCT
ajst-26745	36	7	a	a	DET
ajst-26745	36	8	batch	batch	NOUN
ajst-26745	36	9	yield	yield	NOUN
ajst-26745	36	10	of	of	ADP
ajst-26745	36	11	95	95	NUM
ajst-26745	36	12	%	%	NOUN
ajst-26745	36	13	can	can	AUX
ajst-26745	36	14	be	be	AUX
ajst-26745	36	15	achieved	achieve	VERB
ajst-26745	36	16	,	,	PUNCT
ajst-26745	36	17	producing	produce	VERB
ajst-26745	36	18	up	up	ADP
ajst-26745	36	19	to	to	PART
ajst-26745	36	20	576	576	NUM
ajst-26745	36	21	sensor	sensor	NOUN
ajst-26745	36	22	chips	chip	NOUN
ajst-26745	36	23	per	per	ADP
ajst-26745	36	24	wafer	wafer	NOUN
ajst-26745	36	25	,	,	PUNCT
ajst-26745	36	26	making	make	VERB
ajst-26745	36	27	it	it	PRON
ajst-26745	36	28	an	an	DET
ajst-26745	36	29	industry	industry	NOUN
ajst-26745	36	30	leader	leader	NOUN
ajst-26745	36	31	.	.	PUNCT
ajst-26745	37	1	during	during	ADP
ajst-26745	37	2	the	the	DET
ajst-26745	37	3	development	development	NOUN
ajst-26745	37	4	of	of	ADP
ajst-26745	37	5	precise	precise	ADJ
ajst-26745	37	6	mems	mem	NOUN
ajst-26745	37	7	sensors	sensor	NOUN
ajst-26745	37	8	,	,	PUNCT
ajst-26745	37	9	the	the	DET
ajst-26745	37	10	project	project	NOUN
ajst-26745	37	11	faced	face	VERB
ajst-26745	37	12	challenges	challenge	NOUN
ajst-26745	37	13	with	with	ADP
ajst-26745	37	14	high	high	ADJ
ajst-26745	37	15	-	-	PUNCT
ajst-26745	37	16	pressure	pressure	NOUN
ajst-26745	37	17	etching	etch	VERB
ajst-26745	37	18	processes	process	NOUN
ajst-26745	37	19	,	,	PUNCT
ajst-26745	37	20	including	include	VERB
ajst-26745	37	21	deep	deep	ADJ
ajst-26745	37	22	silicon	silicon	NOUN
ajst-26745	37	23	etching	etch	VERB
ajst-26745	37	24	,	,	PUNCT
ajst-26745	37	25	uneven	uneven	ADJ
ajst-26745	37	26	top	top	ADJ
ajst-26745	37	27	-	-	PUNCT
ajst-26745	37	28	to	to	ADP
ajst-26745	37	29	-	-	PUNCT
ajst-26745	37	30	bottom	bottom	NOUN
ajst-26745	37	31	passivation	passivation	NOUN
ajst-26745	37	32	,	,	PUNCT
ajst-26745	37	33	and	and	CCONJ
ajst-26745	37	34	rough	rough	ADJ
ajst-26745	37	35	sidewalls	sidewall	NOUN
ajst-26745	37	36	.	.	PUNCT
ajst-26745	38	1	to	to	PART
ajst-26745	38	2	address	address	VERB
ajst-26745	38	3	these	these	PRON
ajst-26745	38	4	,	,	PUNCT
ajst-26745	38	5	three	three	NUM
ajst-26745	38	6	core	core	NOUN
ajst-26745	38	7	technologies	technology	NOUN
ajst-26745	38	8	were	be	AUX
ajst-26745	38	9	proposed	propose	VERB
ajst-26745	38	10	:	:	PUNCT
ajst-26745	38	11	1	1	X
ajst-26745	38	12	.	.	X
ajst-26745	38	13	innovative	innovative	ADJ
ajst-26745	38	14	introduction	introduction	NOUN
ajst-26745	38	15	of	of	ADP
ajst-26745	38	16	micron	micron	NOUN
ajst-26745	38	17	-	-	PUNCT
ajst-26745	38	18	sized	sized	ADJ
ajst-26745	38	19	solid	solid	ADJ
ajst-26745	38	20	porous	porous	ADJ
ajst-26745	38	21	structures	structure	NOUN
ajst-26745	38	22	:	:	PUNCT
ajst-26745	38	23	by	by	ADP
ajst-26745	38	24	designing	design	VERB
ajst-26745	38	25	innovative	innovative	ADJ
ajst-26745	38	26	material	material	NOUN
ajst-26745	38	27	structures	structure	NOUN
ajst-26745	38	28	,	,	PUNCT
ajst-26745	38	29	the	the	DET
ajst-26745	38	30	thermal	thermal	ADJ
ajst-26745	38	31	resistance	resistance	NOUN
ajst-26745	38	32	effect	effect	NOUN
ajst-26745	38	33	is	be	AUX
ajst-26745	38	34	enhanced	enhance	VERB
ajst-26745	38	35	,	,	PUNCT
ajst-26745	38	36	preventing	prevent	VERB
ajst-26745	38	37	hightemperature	hightemperature	ADJ
ajst-26745	38	38	deformation	deformation	NOUN
ajst-26745	38	39	,	,	PUNCT
ajst-26745	38	40	reducing	reduce	VERB
ajst-26745	38	41	product	product	NOUN
ajst-26745	38	42	loss	loss	NOUN
ajst-26745	38	43	,	,	PUNCT
ajst-26745	38	44	and	and	CCONJ
ajst-26745	38	45	increasing	increase	VERB
ajst-26745	38	46	the	the	DET
ajst-26745	38	47	production	production	NOUN
ajst-26745	38	48	efficiency	efficiency	NOUN
ajst-26745	38	49	of	of	ADP
ajst-26745	38	50	low	low	ADJ
ajst-26745	38	51	-	-	PUNCT
ajst-26745	38	52	power	power	NOUN
ajst-26745	38	53	devices	device	NOUN
ajst-26745	38	54	such	such	ADJ
ajst-26745	38	55	as	as	ADP
ajst-26745	38	56	wearables	wearable	NOUN
ajst-26745	38	57	.	.	PUNCT
ajst-26745	39	1	2	2	X
ajst-26745	39	2	.	.	X
ajst-26745	39	3	pseudo	pseudo	NOUN
ajst-26745	39	4	-	-	NOUN
ajst-26745	39	5	bosch	bosch	ADV
ajst-26745	39	6	etching	etch	VERB
ajst-26745	39	7	mems	mem	NOUN
ajst-26745	39	8	deep	deep	ADJ
ajst-26745	39	9	etching	etch	VERB
ajst-26745	39	10	structural	structural	ADJ
ajst-26745	39	11	technology	technology	NOUN
ajst-26745	39	12	:	:	PUNCT
ajst-26745	39	13	by	by	ADP
ajst-26745	39	14	improving	improve	VERB
ajst-26745	39	15	equipment	equipment	NOUN
ajst-26745	39	16	to	to	PART
ajst-26745	39	17	increase	increase	VERB
ajst-26745	39	18	molecular	molecular	ADJ
ajst-26745	39	19	space	space	NOUN
ajst-26745	39	20	utilization	utilization	NOUN
ajst-26745	39	21	,	,	PUNCT
ajst-26745	39	22	the	the	DET
ajst-26745	39	23	optimal	optimal	ADJ
ajst-26745	39	24	etching	etch	VERB
ajst-26745	39	25	aspect	aspect	NOUN
ajst-26745	39	26	ratio	ratio	NOUN
ajst-26745	39	27	was	be	AUX
ajst-26745	39	28	determined	determine	VERB
ajst-26745	39	29	through	through	ADP
ajst-26745	39	30	thousands	thousand	NOUN
ajst-26745	39	31	of	of	ADP
ajst-26745	39	32	experiments	experiment	NOUN
ajst-26745	39	33	,	,	PUNCT
ajst-26745	39	34	enhancing	enhance	VERB
ajst-26745	39	35	yield	yield	NOUN
ajst-26745	39	36	and	and	CCONJ
ajst-26745	39	37	broadening	broaden	VERB
ajst-26745	39	38	the	the	DET
ajst-26745	39	39	application	application	NOUN
ajst-26745	39	40	scope	scope	NOUN
ajst-26745	39	41	.	.	PUNCT
ajst-26745	40	1	3	3	X
ajst-26745	40	2	.	.	X
ajst-26745	40	3	optimizing	optimize	VERB
ajst-26745	40	4	bulk	bulk	ADJ
ajst-26745	40	5	silicon	silicon	NOUN
ajst-26745	40	6	mems	mem	NOUN
ajst-26745	40	7	long	long	ADJ
ajst-26745	40	8	mask	mask	NOUN
ajst-26745	40	9	microfabrication	microfabrication	NOUN
ajst-26745	40	10	standard	standard	PROPN
ajst-26745	40	11	processes	process	NOUN
ajst-26745	40	12	:	:	PUNCT
ajst-26745	40	13	the	the	DET
ajst-26745	40	14	wafer	wafer	NOUN
ajst-26745	40	15	chip	chip	NOUN
ajst-26745	40	16	etching	etch	VERB
ajst-26745	40	17	layout	layout	NOUN
ajst-26745	40	18	was	be	AUX
ajst-26745	40	19	redesigned	redesign	VERB
ajst-26745	40	20	,	,	PUNCT
ajst-26745	40	21	and	and	CCONJ
ajst-26745	40	22	after	after	ADP
ajst-26745	40	23	applying	apply	VERB
ajst-26745	40	24	the	the	DET
ajst-26745	40	25	first	first	ADJ
ajst-26745	40	26	two	two	NUM
ajst-26745	40	27	technologies	technology	NOUN
ajst-26745	40	28	,	,	PUNCT
ajst-26745	40	29	the	the	DET
ajst-26745	40	30	preparation	preparation	NOUN
ajst-26745	40	31	process	process	NOUN
ajst-26745	40	32	was	be	AUX
ajst-26745	40	33	refined	refine	VERB
ajst-26745	40	34	,	,	PUNCT
ajst-26745	40	35	improving	improve	VERB
ajst-26745	40	36	batch	batch	NOUN
ajst-26745	40	37	production	production	NOUN
ajst-26745	40	38	capacity	capacity	NOUN
ajst-26745	40	39	.	.	PUNCT
ajst-26745	41	1	these	these	DET
ajst-26745	41	2	technologies	technology	NOUN
ajst-26745	41	3	enabled	enable	VERB
ajst-26745	41	4	high	high	ADJ
ajst-26745	41	5	-	-	PUNCT
ajst-26745	41	6	precision	precision	NOUN
ajst-26745	41	7	deep	deep	ADJ
ajst-26745	41	8	silicon	silicon	NOUN
ajst-26745	41	9	etching	etch	VERB
ajst-26745	41	10	at	at	ADP
ajst-26745	41	11	the	the	DET
ajst-26745	41	12	micron	micron	NOUN
ajst-26745	41	13	scale	scale	NOUN
ajst-26745	41	14	and	and	CCONJ
ajst-26745	41	15	successfully	successfully	ADV
ajst-26745	41	16	developed	develop	VERB
ajst-26745	41	17	and	and	CCONJ
ajst-26745	41	18	applied	apply	VERB
ajst-26745	41	19	a	a	DET
ajst-26745	41	20	model	model	NOUN
ajst-26745	41	21	for	for	ADP
ajst-26745	41	22	estimating	estimate	VERB
ajst-26745	41	23	the	the	DET
ajst-26745	41	24	thermal	thermal	ADJ
ajst-26745	41	25	conductivity	conductivity	NOUN
ajst-26745	41	26	of	of	ADP
ajst-26745	41	27	porous	porous	ADJ
ajst-26745	41	28	microstructures	microstructure	NOUN
ajst-26745	41	29	.	.	PUNCT
ajst-26745	42	1	the	the	DET
ajst-26745	42	2	depth	depth	NOUN
ajst-26745	42	3	can	can	AUX
ajst-26745	42	4	reach	reach	VERB
ajst-26745	42	5	several	several	ADJ
ajst-26745	42	6	hundred	hundred	NUM
ajst-26745	42	7	microns	micron	NOUN
ajst-26745	42	8	,	,	PUNCT
ajst-26745	42	9	with	with	ADP
ajst-26745	42	10	widths	width	NOUN
ajst-26745	42	11	of	of	ADP
ajst-26745	42	12	5	5	NUM
ajst-26745	42	13	-	-	SYM
ajst-26745	42	14	10	10	NUM
ajst-26745	42	15	microns	micron	NOUN
ajst-26745	42	16	,	,	PUNCT
ajst-26745	42	17	using	use	VERB
ajst-26745	42	18	porous	porous	ADJ
ajst-26745	42	19	3d	3d	NOUN
ajst-26745	42	20	microstructures	microstructure	NOUN
ajst-26745	42	21	made	make	VERB
ajst-26745	42	22	from	from	ADP
ajst-26745	42	23	three	three	NUM
ajst-26745	42	24	different	different	ADJ
ajst-26745	42	25	powders	powder	NOUN
ajst-26745	42	26	.	.	PUNCT
ajst-26745	43	1	4	4	X
ajst-26745	43	2	.	.	X
ajst-26745	43	3	conclusion	conclusion	VERB
ajst-26745	43	4	the	the	DET
ajst-26745	43	5	mems	mem	NOUN
ajst-26745	43	6	device	device	NOUN
ajst-26745	43	7	industry	industry	NOUN
ajst-26745	43	8	has	have	VERB
ajst-26745	43	9	increasingly	increasingly	ADV
ajst-26745	43	10	high	high	ADJ
ajst-26745	43	11	technological	technological	ADJ
ajst-26745	43	12	requirements	requirement	NOUN
ajst-26745	43	13	,	,	PUNCT
ajst-26745	43	14	and	and	CCONJ
ajst-26745	43	15	its	its	PRON
ajst-26745	43	16	process	process	NOUN
ajst-26745	43	17	flows	flow	NOUN
ajst-26745	43	18	have	have	AUX
ajst-26745	43	19	become	become	VERB
ajst-26745	43	20	more	more	ADV
ajst-26745	43	21	complex	complex	ADJ
ajst-26745	43	22	.	.	PUNCT
ajst-26745	44	1	due	due	ADP
ajst-26745	44	2	to	to	ADP
ajst-26745	44	3	the	the	DET
ajst-26745	44	4	diverse	diverse	ADJ
ajst-26745	44	5	types	type	NOUN
ajst-26745	44	6	of	of	ADP
ajst-26745	44	7	mems	mem	NOUN
ajst-26745	44	8	sensors	sensor	NOUN
ajst-26745	44	9	,	,	PUNCT
ajst-26745	44	10	each	each	PRON
ajst-26745	44	11	with	with	ADP
ajst-26745	44	12	unique	unique	ADJ
ajst-26745	44	13	functions	function	NOUN
ajst-26745	44	14	and	and	CCONJ
ajst-26745	44	15	application	application	NOUN
ajst-26745	44	16	scenarios	scenario	NOUN
ajst-26745	44	17	,	,	PUNCT
ajst-26745	44	18	there	there	PRON
ajst-26745	44	19	is	be	VERB
ajst-26745	44	20	no	no	DET
ajst-26745	44	21	standardized	standardized	ADJ
ajst-26745	44	22	fabrication	fabrication	NOUN
ajst-26745	44	23	process	process	NOUN
ajst-26745	44	24	.	.	PUNCT
ajst-26745	45	1	they	they	PRON
ajst-26745	45	2	differ	differ	VERB
ajst-26745	45	3	in	in	ADP
ajst-26745	45	4	design	design	NOUN
ajst-26745	45	5	principles	principle	NOUN
ajst-26745	45	6	,	,	PUNCT
ajst-26745	45	7	system	system	NOUN
ajst-26745	45	8	structures	structure	NOUN
ajst-26745	45	9	,	,	PUNCT
ajst-26745	45	10	and	and	CCONJ
ajst-26745	45	11	packaging	packaging	NOUN
ajst-26745	45	12	forms	form	NOUN
ajst-26745	45	13	.	.	PUNCT
ajst-26745	46	1	currently	currently	ADV
ajst-26745	46	2	,	,	PUNCT
ajst-26745	46	3	china	china	PROPN
ajst-26745	46	4	faces	face	VERB
ajst-26745	46	5	challenges	challenge	NOUN
ajst-26745	46	6	in	in	ADP
ajst-26745	46	7	the	the	DET
ajst-26745	46	8	mems	mem	NOUN
ajst-26745	46	9	sensor	sensor	NOUN
ajst-26745	46	10	field	field	NOUN
ajst-26745	46	11	,	,	PUNCT
ajst-26745	46	12	including	include	VERB
ajst-26745	46	13	insufficient	insufficient	ADJ
ajst-26745	46	14	system	system	NOUN
ajst-26745	46	15	applications	application	NOUN
ajst-26745	46	16	and	and	CCONJ
ajst-26745	46	17	supporting	support	VERB
ajst-26745	46	18	services	service	NOUN
ajst-26745	46	19	,	,	PUNCT
ajst-26745	46	20	as	as	ADV
ajst-26745	46	21	well	well	ADV
ajst-26745	46	22	as	as	ADP
ajst-26745	46	23	uneven	uneven	ADJ
ajst-26745	46	24	distribution	distribution	NOUN
ajst-26745	46	25	of	of	ADP
ajst-26745	46	26	industrial	industrial	ADJ
ajst-26745	46	27	resources	resource	NOUN
ajst-26745	46	28	.	.	PUNCT
ajst-26745	47	1	this	this	PRON
ajst-26745	47	2	is	be	AUX
ajst-26745	47	3	particularly	particularly	ADV
ajst-26745	47	4	evident	evident	ADJ
ajst-26745	47	5	in	in	ADP
ajst-26745	47	6	the	the	DET
ajst-26745	47	7	relatively	relatively	ADV
ajst-26745	47	8	weak	weak	ADJ
ajst-26745	47	9	technology	technology	NOUN
ajst-26745	47	10	in	in	ADP
ajst-26745	47	11	upstream	upstream	ADJ
ajst-26745	47	12	sectors	sector	NOUN
ajst-26745	47	13	such	such	ADJ
ajst-26745	47	14	as	as	ADP
ajst-26745	47	15	design	design	NOUN
ajst-26745	47	16	,	,	PUNCT
ajst-26745	47	17	processes	process	NOUN
ajst-26745	47	18	,	,	PUNCT
ajst-26745	47	19	and	and	CCONJ
ajst-26745	47	20	materials	material	NOUN
ajst-26745	47	21	.	.	PUNCT
ajst-26745	48	1	however	however	ADV
ajst-26745	48	2	,	,	PUNCT
ajst-26745	48	3	some	some	DET
ajst-26745	48	4	regions	region	NOUN
ajst-26745	48	5	that	that	PRON
ajst-26745	48	6	have	have	AUX
ajst-26745	48	7	developed	develop	VERB
ajst-26745	48	8	more	more	ADV
ajst-26745	48	9	maturely	maturely	ADV
ajst-26745	48	10	have	have	AUX
ajst-26745	48	11	established	establish	VERB
ajst-26745	48	12	a	a	DET
ajst-26745	48	13	comprehensive	comprehensive	ADJ
ajst-26745	48	14	mems	mem	NOUN
ajst-26745	48	15	industry	industry	NOUN
ajst-26745	48	16	system	system	NOUN
ajst-26745	48	17	and	and	CCONJ
ajst-26745	48	18	research	research	NOUN
ajst-26745	48	19	innovation	innovation	NOUN
ajst-26745	48	20	mechanisms	mechanism	NOUN
ajst-26745	48	21	,	,	PUNCT
ajst-26745	48	22	achieving	achieve	VERB
ajst-26745	48	23	several	several	ADJ
ajst-26745	48	24	key	key	ADJ
ajst-26745	48	25	technological	technological	ADJ
ajst-26745	48	26	breakthroughs	breakthrough	NOUN
ajst-26745	48	27	and	and	CCONJ
ajst-26745	48	28	gradually	gradually	ADV
ajst-26745	48	29	forming	form	VERB
ajst-26745	48	30	an	an	DET
ajst-26745	48	31	industrial	industrial	ADJ
ajst-26745	48	32	agglomeration	agglomeration	NOUN
ajst-26745	48	33	effect	effect	NOUN
ajst-26745	48	34	,	,	PUNCT
ajst-26745	48	35	laying	lay	VERB
ajst-26745	48	36	a	a	DET
ajst-26745	48	37	foundation	foundation	NOUN
ajst-26745	48	38	for	for	ADP
ajst-26745	48	39	the	the	DET
ajst-26745	48	40	commercialization	commercialization	NOUN
ajst-26745	48	41	of	of	ADP
ajst-26745	48	42	mems	mems	ADJ
ajst-26745	48	43	devices	device	NOUN
ajst-26745	48	44	.	.	PUNCT
ajst-26745	49	1	looking	look	VERB
ajst-26745	49	2	ahead	ahead	ADV
ajst-26745	49	3	,	,	PUNCT
ajst-26745	49	4	we	we	PRON
ajst-26745	49	5	can	can	AUX
ajst-26745	49	6	leverage	leverage	VERB
ajst-26745	49	7	the	the	DET
ajst-26745	49	8	advantages	advantage	NOUN
ajst-26745	49	9	of	of	ADP
ajst-26745	49	10	industrial	industrial	ADJ
ajst-26745	49	11	clusters	cluster	NOUN
ajst-26745	49	12	,	,	PUNCT
ajst-26745	49	13	fully	fully	ADV
ajst-26745	49	14	utilize	utilize	VERB
ajst-26745	49	15	the	the	DET
ajst-26745	49	16	benefits	benefit	NOUN
ajst-26745	49	17	of	of	ADP
ajst-26745	49	18	resource	resource	NOUN
ajst-26745	49	19	aggregation	aggregation	NOUN
ajst-26745	49	20	,	,	PUNCT
ajst-26745	49	21	enhance	enhance	VERB
ajst-26745	49	22	product	product	NOUN
ajst-26745	49	23	brand	brand	NOUN
ajst-26745	49	24	effects	effect	NOUN
ajst-26745	49	25	,	,	PUNCT
ajst-26745	49	26	optimize	optimize	VERB
ajst-26745	49	27	industrial	industrial	ADJ
ajst-26745	49	28	structures	structure	NOUN
ajst-26745	49	29	,	,	PUNCT
ajst-26745	49	30	and	and	CCONJ
ajst-26745	49	31	improve	improve	VERB
ajst-26745	49	32	the	the	DET
ajst-26745	49	33	mems	mem	NOUN
ajst-26745	49	34	industry	industry	NOUN
ajst-26745	49	35	chain	chain	NOUN
ajst-26745	49	36	.	.	PUNCT
ajst-26745	50	1	at	at	ADP
ajst-26745	50	2	the	the	DET
ajst-26745	50	3	same	same	ADJ
ajst-26745	50	4	time	time	NOUN
ajst-26745	50	5	,	,	PUNCT
ajst-26745	50	6	we	we	PRON
ajst-26745	50	7	should	should	AUX
ajst-26745	50	8	promote	promote	VERB
ajst-26745	50	9	deep	deep	ADJ
ajst-26745	50	10	collaboration	collaboration	NOUN
ajst-26745	50	11	between	between	ADP
ajst-26745	50	12	enterprises	enterprise	NOUN
ajst-26745	50	13	and	and	CCONJ
ajst-26745	50	14	research	research	NOUN
ajst-26745	50	15	institutions	institution	NOUN
ajst-26745	50	16	,	,	PUNCT
ajst-26745	50	17	construct	construct	VERB
ajst-26745	50	18	a	a	DET
ajst-26745	50	19	development	development	NOUN
ajst-26745	50	20	model	model	NOUN
ajst-26745	50	21	that	that	PRON
ajst-26745	50	22	integrates	integrate	VERB
ajst-26745	50	23	industry	industry	NOUN
ajst-26745	50	24	,	,	PUNCT
ajst-26745	50	25	academia	academia	NOUN
ajst-26745	50	26	,	,	PUNCT
ajst-26745	50	27	and	and	CCONJ
ajst-26745	50	28	research	research	NOUN
ajst-26745	50	29	,	,	PUNCT
ajst-26745	50	30	and	and	CCONJ
ajst-26745	50	31	form	form	VERB
ajst-26745	50	32	a	a	DET
ajst-26745	50	33	sensor	sensor	NOUN
ajst-26745	50	34	industry	industry	NOUN
ajst-26745	50	35	base	base	NOUN
ajst-26745	50	36	with	with	ADP
ajst-26745	50	37	strong	strong	ADJ
ajst-26745	50	38	independent	independent	ADJ
ajst-26745	50	39	innovation	innovation	NOUN
ajst-26745	50	40	capabilities	capability	NOUN
ajst-26745	50	41	and	and	CCONJ
ajst-26745	50	42	a	a	DET
ajst-26745	50	43	complete	complete	ADJ
ajst-26745	50	44	industrial	industrial	ADJ
ajst-26745	50	45	chain	chain	NOUN
ajst-26745	50	46	.	.	PUNCT
ajst-26745	51	1	additionally	additionally	ADV
ajst-26745	51	2	,	,	PUNCT
ajst-26745	51	3	improving	improve	VERB
ajst-26745	51	4	the	the	DET
ajst-26745	51	5	investment	investment	NOUN
ajst-26745	51	6	and	and	CCONJ
ajst-26745	51	7	financing	financing	NOUN
ajst-26745	51	8	environment	environment	NOUN
ajst-26745	51	9	and	and	CCONJ
ajst-26745	51	10	technology	technology	NOUN
ajst-26745	51	11	transfer	transfer	NOUN
ajst-26745	51	12	mechanisms	mechanism	NOUN
ajst-26745	51	13	will	will	AUX
ajst-26745	51	14	facilitate	facilitate	VERB
ajst-26745	51	15	the	the	DET
ajst-26745	51	16	healthy	healthy	ADJ
ajst-26745	51	17	and	and	CCONJ
ajst-26745	51	18	rapid	rapid	ADJ
ajst-26745	51	19	development	development	NOUN
ajst-26745	51	20	of	of	ADP
ajst-26745	51	21	the	the	DET
ajst-26745	51	22	mems	mems	PROPN
ajst-26745	51	23	sensor	sensor	NOUN
ajst-26745	51	24	industry	industry	NOUN
ajst-26745	51	25	.	.	PUNCT
ajst-26745	52	1	references	reference	NOUN
ajst-26745	52	2	[	[	X
ajst-26745	52	3	1	1	NUM
ajst-26745	52	4	]	]	X
ajst-26745	52	5	kayal	kayal	PROPN
ajst-26745	52	6	lakshmanan	lakshmanan	PROPN
ajst-26745	52	7	,	,	PUNCT
ajst-26745	52	8	fabrizio	fabrizio	PROPN
ajst-26745	52	9	tessicini	tessicini	PROPN
ajst-26745	52	10	,	,	PUNCT
ajst-26745	52	11	antonio	antonio	PROPN
ajst-26745	52	12	j.	j.	PROPN
ajst-26745	52	13	gil	gil	PROPN
ajst-26745	52	14	,	,	PUNCT
ajst-26745	52	15	ferdinando	ferdinando	PROPN
ajst-26745	52	16	auricchio	auricchio	PROPN
ajst-26745	52	17	.	.	PUNCT
ajst-26745	53	1	“	"	PUNCT
ajst-26745	53	2	a	a	DET
ajst-26745	53	3	fault	fault	NOUN
ajst-26745	53	4	prognosis	prognosis	NOUN
ajst-26745	53	5	strategy	strategy	NOUN
ajst-26745	53	6	for	for	ADP
ajst-26745	53	7	an	an	DET
ajst-26745	53	8	external	external	ADJ
ajst-26745	53	9	gear	gear	NOUN
ajst-26745	53	10	pump	pump	NOUN
ajst-26745	53	11	using	use	VERB
ajst-26745	53	12	machine	machine	NOUN
ajst-26745	53	13	learning	learn	VERB
ajst-26745	53	14	algorithms	algorithm	NOUN
ajst-26745	53	15	and	and	CCONJ
ajst-26745	53	16	synthetic	synthetic	ADJ
ajst-26745	53	17	data	data	NOUN
ajst-26745	53	18	generation	generation	NOUN
ajst-26745	53	19	methods	method	NOUN
ajst-26745	53	20	”	"	PUNCT
ajst-26745	53	21	,	,	PUNCT
ajst-26745	53	22	applied	apply	VERB
ajst-26745	53	23	mathematical	mathematical	ADJ
ajst-26745	53	24	modelling	modelling	NOUN
ajst-26745	53	25	,	,	PUNCT
ajst-26745	53	26	vol	vol	NOUN
ajst-26745	53	27	.	.	NOUN
ajst-26745	53	28	123	123	NUM
ajst-26745	53	29	,	,	PUNCT
ajst-26745	53	30	pp	pp	ADJ
ajst-26745	53	31	.	.	PUNCT
ajst-26745	54	1	348	348	NUM
ajst-26745	54	2	-	-	SYM
ajst-26745	54	3	372	372	NUM
ajst-26745	54	4	,	,	PUNCT
ajst-26745	54	5	2023	2023	NUM
ajst-26745	54	6	.	.	PUNCT
ajst-26745	55	1	https://doi.org/10.1016/j.apm.2023.07.001	https://doi.org/10.1016/j.apm.2023.07.001	PROPN
ajst-26745	56	1	[	[	X
ajst-26745	56	2	2	2	NUM
ajst-26745	56	3	]	]	PUNCT
ajst-26745	56	4	myers	myers	NOUN
ajst-26745	56	5	r	r	PROPN
ajst-26745	56	6	l	l	PROPN
ajst-26745	56	7	,	,	PUNCT
ajst-26745	56	8	shishkin	shishkin	PROPN
ajst-26745	56	9	y	y	PROPN
ajst-26745	56	10	,	,	PUNCT
ajst-26745	56	11	kordina	kordina	PROPN
ajst-26745	56	12	o	o	PROPN
ajst-26745	56	13	,	,	PUNCT
ajst-26745	56	14	et	et	PROPN
ajst-26745	57	1	al	al	PROPN
ajst-26745	57	2	.	.	PROPN
ajst-26745	57	3	high	high	ADJ
ajst-26745	57	4	growth	growth	NOUN
ajst-26745	57	5	rates	rate	NOUN
ajst-26745	57	6	(	(	PUNCT
ajst-26745	57	7	>	>	X
ajst-26745	57	8	30	30	NUM
ajst-26745	57	9	μm	μm	NUM
ajst-26745	57	10	/	/	SYM
ajst-26745	57	11	h	h	NOUN
ajst-26745	57	12	)	)	PUNCT
ajst-26745	57	13	of	of	ADP
ajst-26745	57	14	4h	4h	NUM
ajst-26745	57	15	-	-	PUNCT
ajst-26745	57	16	sic	sic	ADJ
ajst-26745	57	17	epitaxial	epitaxial	ADJ
ajst-26745	57	18	layers	layer	NOUN
ajst-26745	57	19	using	use	VERB
ajst-26745	57	20	a	a	DET
ajst-26745	57	21	hor	hor	PROPN
ajst-26745	57	22	izontal	izontal	PROPN
ajst-26745	57	23	hotwall	hotwall	PROPN
ajst-26745	57	24	cvd	cvd	PROPN
ajst-26745	57	25	reactor[j	reactor[j	PROPN
ajst-26745	57	26	]	]	PUNCT
ajst-26745	57	27	.	.	PUNCT
ajst-26745	58	1	journal	journal	PROPN
ajst-26745	58	2	of	of	ADP
ajst-26745	58	3	crystal	crystal	NOUN
ajst-26745	58	4	growth	growth	NOUN
ajst-26745	58	5	,	,	PUNCT
ajst-26745	58	6	2005	2005	NUM
ajst-26745	58	7	,	,	PUNCT
ajst-26745	58	8	285(4	285(4	NUM
ajst-26745	58	9	):	):	PUNCT
ajst-26745	58	10	486	486	NUM
ajst-26745	58	11	-	-	SYM
ajst-26745	58	12	490	490	NUM
ajst-26745	58	13	.	.	PUNCT
ajst-26745	59	1	[	[	X
ajst-26745	59	2	3	3	X
ajst-26745	59	3	]	]	X
ajst-26745	59	4	ito	ito	PROPN
ajst-26745	59	5	m	m	PROPN
ajst-26745	59	6	,	,	PUNCT
ajst-26745	59	7	storasta	storasta	PROPN
ajst-26745	59	8	l	l	NOUN
ajst-26745	59	9	,	,	PUNCT
ajst-26745	59	10	tsuchida	tsuchida	PROPN
ajst-26745	59	11	h.	h.	PROPN
ajst-26745	59	12	development	development	PROPN
ajst-26745	59	13	of	of	ADP
ajst-26745	59	14	4h	4h	NUM
ajst-26745	59	15	--	--	PUNCT
ajst-26745	59	16	sic	sic	ADJ
ajst-26745	59	17	epitaxial	epitaxial	ADJ
ajst-26745	59	18	growth	growth	NOUN
ajst-26745	59	19	technique	technique	NOUN
ajst-26745	59	20	achieving	achieve	VERB
ajst-26745	59	21	high	high	ADJ
ajst-26745	59	22	growth	growth	NOUN
ajst-26745	59	23	rate	rate	NOUN
ajst-26745	59	24	and	and	CCONJ
ajst-26745	59	25	large	large	ADJ
ajst-26745	59	26	-	-	PUNCT
ajst-26745	59	27	area	area	NOUN
ajst-26745	59	28	uniformity[j	uniformity[j	NOUN
ajst-26745	59	29	]	]	PUNCT
ajst-26745	59	30	.	.	PUNCT
ajst-26745	60	1	applied	apply	VERB
ajst-26745	60	2	physics	physics	NOUN
ajst-26745	60	3	express	express	PROPN
ajst-26745	60	4	,	,	PUNCT
ajst-26745	60	5	2008	2008	NUM
ajst-26745	60	6	,	,	PUNCT
ajst-26745	60	7	1(1	1(1	NUM
ajst-26745	60	8	):	):	PUNCT
ajst-26745	60	9	5001	5001	NUM
ajst-26745	60	10	.	.	PUNCT
ajst-26745	61	1	[	[	X
ajst-26745	61	2	4	4	X
ajst-26745	61	3	]	]	PUNCT
ajst-26745	61	4	burk	burk	VERB
ajst-26745	61	5	a	a	DET
ajst-26745	61	6	a	a	PROPN
ajst-26745	61	7	,	,	PUNCT
ajst-26745	61	8	o'loughlin	o'loughlin	PROPN
ajst-26745	61	9	m	m	PROPN
ajst-26745	61	10	j	j	PROPN
ajst-26745	61	11	,	,	PUNCT
ajst-26745	61	12	palmour	palmour	ADJ
ajst-26745	61	13	j	j	PROPN
ajst-26745	61	14	w	w	PROPN
ajst-26745	61	15	,	,	PUNCT
ajst-26745	61	16	et	et	PROPN
ajst-26745	61	17	al	al	PROPN
ajst-26745	61	18	.	.	PROPN
ajst-26745	61	19	sic	sic	ADJ
ajst-26745	61	20	epitaxial	epitaxial	ADJ
ajst-26745	61	21	layer	layer	NOUN
ajst-26745	61	22	growth	growth	NOUN
ajst-26745	61	23	in	in	ADP
ajst-26745	61	24	a	a	DET
ajst-26745	61	25	6x150	6x150	NUM
ajst-26745	61	26	mm	mm	NOUN
ajst-26745	61	27	warm	warm	ADJ
ajst-26745	61	28	-	-	PUNCT
ajst-26745	61	29	wall	wall	NOUN
ajst-26745	61	30	planetary	planetary	PROPN
ajst-26745	61	31	reactor[c]//materials	reactor[c]//materials	PROPN
ajst-26745	61	32	science	science	NOUN
ajst-26745	61	33	forum	forum	NOUN
ajst-26745	61	34	.	.	PUNCT
ajst-26745	62	1	2012，717	2012，717	NUM
ajst-26745	62	2	.	.	PUNCT
ajst-26745	63	1	75	75	NUM
ajst-26745	63	2	-	-	SYM
ajst-26745	63	3	80	80	NUM
ajst-26745	63	4	.	.	PUNCT
ajst-26745	64	1	[	[	X
ajst-26745	64	2	5	5	X
ajst-26745	64	3	]	]	X
ajst-26745	64	4	filipovic	filipovic	PROPN
ajst-26745	64	5	d	d	PROPN
ajst-26745	64	6	s	s	PROPN
ajst-26745	64	7	,	,	PUNCT
ajst-26745	64	8	popovic	popovic	PROPN
ajst-26745	64	9	z	z	PROPN
ajst-26745	64	10	,	,	PUNCT
ajst-26745	64	11	vanhille	vanhille	PROPN
ajst-26745	64	12	k	k	PROPN
ajst-26745	64	13	,	,	PUNCT
ajst-26745	64	14	et	et	PROPN
ajst-26745	64	15	al	al	PROPN
ajst-26745	64	16	.	.	PUNCT
ajst-26745	64	17	modeling	modeling	PROPN
ajst-26745	64	18	,	,	PUNCT
ajst-26745	64	19	design	design	NOUN
ajst-26745	64	20	,	,	PUNCT
ajst-26745	64	21	fabrication	fabrication	NOUN
ajst-26745	64	22	,	,	PUNCT
ajst-26745	64	23	and	and	CCONJ
ajst-26745	64	24	performance	performance	NOUN
ajst-26745	64	25	of	of	ADP
ajst-26745	64	26	rectangular	rectangular	ADJ
ajst-26745	64	27	coaxial	coaxial	ADJ
ajst-26745	64	28	lines	line	NOUN
ajst-26745	64	29	and	and	CCONJ
ajst-26745	64	30	components	component	NOUN
ajst-26745	64	31	[	[	X
ajst-26745	64	32	c]//proceedings	c]//proceeding	NOUN
ajst-26745	64	33	of	of	ADP
ajst-26745	64	34	the	the	DET
ajst-26745	64	35	ieee	ieee	NOUN
ajst-26745	64	36	mtts	mtts	PROPN
ajst-26745	64	37	international	international	ADJ
ajst-26745	64	38	microwave	microwave	NOUN
ajst-26745	64	39	symposium	symposium	NOUN
ajst-26745	64	40	(	(	PUNCT
ajst-26745	64	41	ims).san	ims).san	PROPN
ajst-26745	64	42	francisco	francisco	PROPN
ajst-26745	64	43	:	:	PUNCT
ajst-26745	64	44	ieee,2006:1393	ieee,2006:1393	PROPN
ajst-26745	64	45	.	.	PUNCT