id	sid	tid	token	lemma	pos
ajst-2836	1	1	academic	academic	ADJ
ajst-2836	1	2	journal	journal	NOUN
ajst-2836	1	3	of	of	ADP
ajst-2836	1	4	science	science	NOUN
ajst-2836	1	5	and	and	CCONJ
ajst-2836	1	6	technology	technology	NOUN
ajst-2836	1	7	issn	issn	NOUN
ajst-2836	1	8	:	:	PUNCT
ajst-2836	1	9	2771	2771	NUM
ajst-2836	1	10	-	-	SYM
ajst-2836	1	11	3032	3032	NUM
ajst-2836	1	12	|	|	NOUN
ajst-2836	1	13	vol	vol	NOUN
ajst-2836	1	14	.	.	PROPN
ajst-2836	2	1	3	3	NUM
ajst-2836	2	2	,	,	PUNCT
ajst-2836	2	3	no	no	INTJ
ajst-2836	2	4	.	.	NOUN
ajst-2836	2	5	3	3	NUM
ajst-2836	2	6	,	,	PUNCT
ajst-2836	2	7	2022	2022	NUM
ajst-2836	2	8	130	130	NUM
ajst-2836	2	9	research	research	NOUN
ajst-2836	2	10	on	on	ADP
ajst-2836	2	11	skeleton	skeleton	NOUN
ajst-2836	2	12	plate	plate	NOUN
ajst-2836	2	13	flatness	flatness	NOUN
ajst-2836	2	14	detection	detection	NOUN
ajst-2836	2	15	method	method	NOUN
ajst-2836	2	16	based	base	VERB
ajst-2836	2	17	on	on	ADP
ajst-2836	2	18	laser	laser	NOUN
ajst-2836	2	19	sensor	sensor	NOUN
ajst-2836	2	20	hongchao	hongchao	PROPN
ajst-2836	2	21	xia1	xia1	PROPN
ajst-2836	2	22	,	,	PUNCT
ajst-2836	2	23	2	2	NUM
ajst-2836	2	24	,	,	PUNCT
ajst-2836	2	25	hongchang	hongchang	PROPN
ajst-2836	2	26	sun1	sun1	PROPN
ajst-2836	2	27	,	,	PUNCT
ajst-2836	2	28	2	2	NUM
ajst-2836	2	29	,	,	PUNCT
ajst-2836	2	30	yongxiang	yongxiang	PROPN
ajst-2836	2	31	jiang2	jiang2	PROPN
ajst-2836	2	32	,	,	PUNCT
ajst-2836	2	33	wanling	wanle	VERB
ajst-2836	2	34	he2	he2	PROPN
ajst-2836	2	35	,	,	PUNCT
ajst-2836	2	36	chao	chao	PROPN
ajst-2836	2	37	li2	li2	PROPN
ajst-2836	3	1	1institute	1institute	NUM
ajst-2836	3	2	of	of	ADP
ajst-2836	3	3	robotics	robotic	NOUN
ajst-2836	3	4	and	and	CCONJ
ajst-2836	3	5	intelligent	intelligent	ADJ
ajst-2836	3	6	equipment	equipment	NOUN
ajst-2836	3	7	,	,	PUNCT
ajst-2836	3	8	tianjin	tianjin	PROPN
ajst-2836	3	9	university	university	PROPN
ajst-2836	3	10	of	of	ADP
ajst-2836	3	11	technology	technology	NOUN
ajst-2836	3	12	and	and	CCONJ
ajst-2836	3	13	education	education	NOUN
ajst-2836	3	14	,	,	PUNCT
ajst-2836	3	15	tianjin	tianjin	NOUN
ajst-2836	3	16	,	,	PUNCT
ajst-2836	3	17	300222	300222	NUM
ajst-2836	3	18	,	,	PUNCT
ajst-2836	3	19	china	china	PROPN
ajst-2836	3	20	2tianjin	2tianjin	NUM
ajst-2836	3	21	key	key	ADJ
ajst-2836	3	22	laboratory	laboratory	NOUN
ajst-2836	3	23	of	of	ADP
ajst-2836	3	24	intelligent	intelligent	ADJ
ajst-2836	3	25	robot	robot	NOUN
ajst-2836	3	26	technology	technology	NOUN
ajst-2836	3	27	and	and	CCONJ
ajst-2836	3	28	application	application	NOUN
ajst-2836	3	29	enterprises	enterprise	NOUN
ajst-2836	3	30	,	,	PUNCT
ajst-2836	3	31	tianjin	tianjin	NOUN
ajst-2836	3	32	,	,	PUNCT
ajst-2836	3	33	300222	300222	NUM
ajst-2836	3	34	,	,	PUNCT
ajst-2836	3	35	china	china	PROPN
ajst-2836	3	36	abstract	abstract	NOUN
ajst-2836	3	37	:	:	PUNCT
ajst-2836	3	38	the	the	DET
ajst-2836	3	39	flatness	flatness	NOUN
ajst-2836	3	40	of	of	ADP
ajst-2836	3	41	the	the	DET
ajst-2836	3	42	seismic	seismic	ADJ
ajst-2836	3	43	isolation	isolation	NOUN
ajst-2836	3	44	support	support	NOUN
ajst-2836	3	45	skeleton	skeleton	NOUN
ajst-2836	3	46	plate	plate	NOUN
ajst-2836	3	47	determines	determine	VERB
ajst-2836	3	48	the	the	DET
ajst-2836	3	49	seismic	seismic	ADJ
ajst-2836	3	50	isolation	isolation	NOUN
ajst-2836	3	51	performance	performance	NOUN
ajst-2836	3	52	of	of	ADP
ajst-2836	3	53	the	the	DET
ajst-2836	3	54	seismic	seismic	ADJ
ajst-2836	3	55	isolation	isolation	NOUN
ajst-2836	3	56	support	support	NOUN
ajst-2836	3	57	,	,	PUNCT
ajst-2836	3	58	and	and	CCONJ
ajst-2836	3	59	in	in	ADP
ajst-2836	3	60	view	view	NOUN
ajst-2836	3	61	of	of	ADP
ajst-2836	3	62	the	the	DET
ajst-2836	3	63	limitations	limitation	NOUN
ajst-2836	3	64	of	of	ADP
ajst-2836	3	65	the	the	DET
ajst-2836	3	66	traditional	traditional	ADJ
ajst-2836	3	67	measurement	measurement	NOUN
ajst-2836	3	68	method	method	NOUN
ajst-2836	3	69	in	in	ADP
ajst-2836	3	70	the	the	DET
ajst-2836	3	71	engineering	engineering	NOUN
ajst-2836	3	72	field	field	NOUN
ajst-2836	3	73	,	,	PUNCT
ajst-2836	3	74	the	the	DET
ajst-2836	3	75	use	use	NOUN
ajst-2836	3	76	of	of	ADP
ajst-2836	3	77	laser	laser	NOUN
ajst-2836	3	78	sensor	sensor	NOUN
ajst-2836	3	79	and	and	CCONJ
ajst-2836	3	80	computer	computer	NOUN
ajst-2836	3	81	-	-	PUNCT
ajst-2836	3	82	related	relate	VERB
ajst-2836	3	83	processing	processing	NOUN
ajst-2836	3	84	technology	technology	NOUN
ajst-2836	3	85	is	be	AUX
ajst-2836	3	86	proposed	propose	VERB
ajst-2836	3	87	to	to	PART
ajst-2836	3	88	solve	solve	VERB
ajst-2836	3	89	the	the	DET
ajst-2836	3	90	problem	problem	NOUN
ajst-2836	3	91	of	of	ADP
ajst-2836	3	92	flatness	flatness	NOUN
ajst-2836	3	93	measurement	measurement	NOUN
ajst-2836	3	94	of	of	ADP
ajst-2836	3	95	the	the	DET
ajst-2836	3	96	seismic	seismic	ADJ
ajst-2836	3	97	isolation	isolation	NOUN
ajst-2836	3	98	support	support	NOUN
ajst-2836	3	99	skeleton	skeleton	NOUN
ajst-2836	3	100	plate	plate	NOUN
ajst-2836	3	101	.	.	PUNCT
ajst-2836	4	1	the	the	DET
ajst-2836	4	2	laser	laser	NOUN
ajst-2836	4	3	sensor	sensor	NOUN
ajst-2836	4	4	measurement	measurement	NOUN
ajst-2836	4	5	can	can	AUX
ajst-2836	4	6	obtain	obtain	VERB
ajst-2836	4	7	the	the	DET
ajst-2836	4	8	data	datum	NOUN
ajst-2836	4	9	of	of	ADP
ajst-2836	4	10	the	the	DET
ajst-2836	4	11	skeleton	skeleton	NOUN
ajst-2836	4	12	plate	plate	NOUN
ajst-2836	4	13	plane	plane	NOUN
ajst-2836	4	14	,	,	PUNCT
ajst-2836	4	15	and	and	CCONJ
ajst-2836	4	16	use	use	VERB
ajst-2836	4	17	the	the	DET
ajst-2836	4	18	relevant	relevant	ADJ
ajst-2836	4	19	tools	tool	NOUN
ajst-2836	4	20	to	to	PART
ajst-2836	4	21	calculate	calculate	VERB
ajst-2836	4	22	the	the	DET
ajst-2836	4	23	difference	difference	NOUN
ajst-2836	4	24	between	between	ADP
ajst-2836	4	25	the	the	DET
ajst-2836	4	26	maximum	maximum	ADJ
ajst-2836	4	27	offset	offset	NOUN
ajst-2836	4	28	value	value	NOUN
ajst-2836	4	29	and	and	CCONJ
ajst-2836	4	30	the	the	DET
ajst-2836	4	31	minimum	minimum	ADJ
ajst-2836	4	32	offset	offset	NOUN
ajst-2836	4	33	value	value	NOUN
ajst-2836	4	34	from	from	ADP
ajst-2836	4	35	each	each	DET
ajst-2836	4	36	measurement	measurement	NOUN
ajst-2836	4	37	point	point	NOUN
ajst-2836	4	38	to	to	ADP
ajst-2836	4	39	the	the	DET
ajst-2836	4	40	ideal	ideal	ADJ
ajst-2836	4	41	plane	plane	NOUN
ajst-2836	4	42	to	to	PART
ajst-2836	4	43	obtain	obtain	VERB
ajst-2836	4	44	the	the	DET
ajst-2836	4	45	flatness	flatness	NOUN
ajst-2836	4	46	value	value	NOUN
ajst-2836	4	47	.	.	PUNCT
ajst-2836	5	1	the	the	DET
ajst-2836	5	2	experimental	experimental	ADJ
ajst-2836	5	3	results	result	NOUN
ajst-2836	5	4	show	show	VERB
ajst-2836	5	5	that	that	SCONJ
ajst-2836	5	6	the	the	DET
ajst-2836	5	7	flatness	flatness	NOUN
ajst-2836	5	8	measurement	measurement	NOUN
ajst-2836	5	9	method	method	NOUN
ajst-2836	5	10	of	of	ADP
ajst-2836	5	11	seismic	seismic	ADJ
ajst-2836	5	12	isolation	isolation	NOUN
ajst-2836	5	13	support	support	NOUN
ajst-2836	5	14	skeleton	skeleton	NOUN
ajst-2836	5	15	plate	plate	NOUN
ajst-2836	5	16	based	base	VERB
ajst-2836	5	17	on	on	ADP
ajst-2836	5	18	laser	laser	NOUN
ajst-2836	5	19	sensor	sensor	NOUN
ajst-2836	5	20	can	can	AUX
ajst-2836	5	21	quickly	quickly	ADV
ajst-2836	5	22	and	and	CCONJ
ajst-2836	5	23	accurately	accurately	ADV
ajst-2836	5	24	complete	complete	VERB
ajst-2836	5	25	the	the	DET
ajst-2836	5	26	measurement	measurement	NOUN
ajst-2836	5	27	of	of	ADP
ajst-2836	5	28	skeleton	skeleton	NOUN
ajst-2836	5	29	plate	plate	NOUN
ajst-2836	5	30	flatness	flatness	NOUN
ajst-2836	5	31	,	,	PUNCT
ajst-2836	5	32	with	with	ADP
ajst-2836	5	33	low	low	ADJ
ajst-2836	5	34	requirements	requirement	NOUN
ajst-2836	5	35	for	for	ADP
ajst-2836	5	36	engineering	engineering	NOUN
ajst-2836	5	37	application	application	NOUN
ajst-2836	5	38	environment	environment	NOUN
ajst-2836	5	39	and	and	CCONJ
ajst-2836	5	40	good	good	ADJ
ajst-2836	5	41	measurement	measurement	NOUN
ajst-2836	5	42	stability	stability	NOUN
ajst-2836	5	43	.	.	PUNCT
ajst-2836	6	1	keywords	keyword	NOUN
ajst-2836	6	2	:	:	PUNCT
ajst-2836	6	3	seismic	seismic	ADJ
ajst-2836	6	4	isolation	isolation	NOUN
ajst-2836	6	5	support	support	NOUN
ajst-2836	6	6	skeleton	skeleton	NOUN
ajst-2836	6	7	plate	plate	NOUN
ajst-2836	6	8	,	,	PUNCT
ajst-2836	6	9	laser	laser	NOUN
ajst-2836	6	10	sensor	sensor	NOUN
ajst-2836	6	11	,	,	PUNCT
ajst-2836	6	12	flatness	flatness	NOUN
ajst-2836	6	13	.	.	PUNCT
ajst-2836	7	1	1	1	X
ajst-2836	7	2	.	.	X
ajst-2836	7	3	introduction	introduction	NOUN
ajst-2836	7	4	earthquakes	earthquake	NOUN
ajst-2836	7	5	happen	happen	VERB
ajst-2836	7	6	every	every	DET
ajst-2836	7	7	day	day	NOUN
ajst-2836	7	8	on	on	ADP
ajst-2836	7	9	earth	earth	NOUN
ajst-2836	7	10	.	.	PUNCT
ajst-2836	8	1	earthquakes	earthquake	NOUN
ajst-2836	8	2	often	often	ADV
ajst-2836	8	3	cause	cause	VERB
ajst-2836	8	4	serious	serious	ADJ
ajst-2836	8	5	casualties	casualty	NOUN
ajst-2836	8	6	and	and	CCONJ
ajst-2836	8	7	disasters	disaster	NOUN
ajst-2836	8	8	[	[	X
ajst-2836	8	9	1	1	NUM
ajst-2836	8	10	]	]	PUNCT
ajst-2836	8	11	.	.	PUNCT
ajst-2836	9	1	however	however	ADV
ajst-2836	9	2	,	,	PUNCT
ajst-2836	9	3	the	the	DET
ajst-2836	9	4	current	current	ADJ
ajst-2836	9	5	state	state	NOUN
ajst-2836	9	6	of	of	ADP
ajst-2836	9	7	technology	technology	NOUN
ajst-2836	9	8	is	be	AUX
ajst-2836	9	9	not	not	PART
ajst-2836	9	10	yet	yet	ADV
ajst-2836	9	11	able	able	ADJ
ajst-2836	9	12	to	to	PART
ajst-2836	9	13	accurately	accurately	ADV
ajst-2836	9	14	predict	predict	VERB
ajst-2836	9	15	the	the	DET
ajst-2836	9	16	arrival	arrival	NOUN
ajst-2836	9	17	of	of	ADP
ajst-2836	9	18	earthquakes	earthquake	NOUN
ajst-2836	9	19	.	.	PUNCT
ajst-2836	10	1	for	for	ADP
ajst-2836	10	2	earthquakes	earthquake	NOUN
ajst-2836	10	3	,	,	PUNCT
ajst-2836	10	4	what	what	PRON
ajst-2836	10	5	we	we	PRON
ajst-2836	10	6	should	should	AUX
ajst-2836	10	7	do	do	AUX
ajst-2836	10	8	is	be	AUX
ajst-2836	10	9	to	to	PART
ajst-2836	10	10	improve	improve	VERB
ajst-2836	10	11	the	the	DET
ajst-2836	10	12	seismic	seismic	ADJ
ajst-2836	10	13	resistance	resistance	NOUN
ajst-2836	10	14	level	level	NOUN
ajst-2836	10	15	of	of	ADP
ajst-2836	10	16	the	the	DET
ajst-2836	10	17	building	building	NOUN
ajst-2836	10	18	,	,	PUNCT
ajst-2836	10	19	not	not	PART
ajst-2836	10	20	predict	predict	VERB
ajst-2836	10	21	earthquakes	earthquake	NOUN
ajst-2836	10	22	.	.	PUNCT
ajst-2836	11	1	therefore	therefore	ADV
ajst-2836	11	2	,	,	PUNCT
ajst-2836	11	3	the	the	DET
ajst-2836	11	4	development	development	NOUN
ajst-2836	11	5	prospects	prospect	NOUN
ajst-2836	11	6	of	of	ADP
ajst-2836	11	7	seismic	seismic	ADJ
ajst-2836	11	8	damping	damp	VERB
ajst-2836	11	9	and	and	CCONJ
ajst-2836	11	10	anti	anti	ADJ
ajst-2836	11	11	-	-	ADJ
ajst-2836	11	12	seismic	seismic	ADJ
ajst-2836	11	13	products	product	NOUN
ajst-2836	11	14	are	be	AUX
ajst-2836	11	15	broad	broad	ADJ
ajst-2836	11	16	,	,	PUNCT
ajst-2836	11	17	and	and	CCONJ
ajst-2836	11	18	the	the	DET
ajst-2836	11	19	flatness	flatness	NOUN
ajst-2836	11	20	value	value	NOUN
ajst-2836	11	21	of	of	ADP
ajst-2836	11	22	the	the	DET
ajst-2836	11	23	seismic	seismic	ADJ
ajst-2836	11	24	isolation	isolation	NOUN
ajst-2836	11	25	support	support	NOUN
ajst-2836	11	26	skeleton	skeleton	NOUN
ajst-2836	11	27	plate	plate	NOUN
ajst-2836	11	28	affects	affect	VERB
ajst-2836	11	29	the	the	DET
ajst-2836	11	30	safety	safety	NOUN
ajst-2836	11	31	and	and	CCONJ
ajst-2836	11	32	reliability	reliability	NOUN
ajst-2836	11	33	of	of	ADP
ajst-2836	11	34	its	its	PRON
ajst-2836	11	35	work	work	NOUN
ajst-2836	11	36	,	,	PUNCT
ajst-2836	11	37	so	so	CCONJ
ajst-2836	11	38	in	in	ADP
ajst-2836	11	39	the	the	DET
ajst-2836	11	40	production	production	NOUN
ajst-2836	11	41	process	process	NOUN
ajst-2836	11	42	of	of	ADP
ajst-2836	11	43	the	the	DET
ajst-2836	11	44	skeleton	skeleton	NOUN
ajst-2836	11	45	plate	plate	NOUN
ajst-2836	11	46	,	,	PUNCT
ajst-2836	11	47	it	it	PRON
ajst-2836	11	48	is	be	AUX
ajst-2836	11	49	necessary	necessary	ADJ
ajst-2836	11	50	to	to	PART
ajst-2836	11	51	strictly	strictly	ADV
ajst-2836	11	52	control	control	VERB
ajst-2836	11	53	its	its	PRON
ajst-2836	11	54	flatness	flatness	NOUN
ajst-2836	11	55	to	to	PART
ajst-2836	11	56	ensure	ensure	VERB
ajst-2836	11	57	the	the	DET
ajst-2836	11	58	reliability	reliability	NOUN
ajst-2836	11	59	of	of	ADP
ajst-2836	11	60	its	its	PRON
ajst-2836	11	61	use	use	NOUN
ajst-2836	11	62	process	process	NOUN
ajst-2836	11	63	.	.	PUNCT
ajst-2836	12	1	in	in	ADP
ajst-2836	12	2	terms	term	NOUN
ajst-2836	12	3	of	of	ADP
ajst-2836	12	4	detection	detection	NOUN
ajst-2836	12	5	,	,	PUNCT
ajst-2836	12	6	the	the	DET
ajst-2836	12	7	current	current	ADJ
ajst-2836	12	8	traditional	traditional	ADJ
ajst-2836	12	9	methods	method	NOUN
ajst-2836	12	10	are	be	AUX
ajst-2836	12	11	mainly	mainly	ADV
ajst-2836	12	12	tactile	tactile	ADJ
ajst-2836	12	13	measurement	measurement	NOUN
ajst-2836	12	14	methods	method	NOUN
ajst-2836	12	15	[	[	PUNCT
ajst-2836	12	16	2	2	NUM
ajst-2836	12	17	-	-	SYM
ajst-2836	12	18	3	3	NUM
ajst-2836	12	19	]	]	PUNCT
ajst-2836	12	20	.	.	PUNCT
ajst-2836	13	1	however	however	ADV
ajst-2836	13	2	,	,	PUNCT
ajst-2836	13	3	contact	contact	NOUN
ajst-2836	13	4	measurement	measurement	NOUN
ajst-2836	13	5	will	will	AUX
ajst-2836	13	6	cause	cause	VERB
ajst-2836	13	7	tool	tool	NOUN
ajst-2836	13	8	wear	wear	VERB
ajst-2836	13	9	and	and	CCONJ
ajst-2836	13	10	human	human	ADJ
ajst-2836	13	11	influence	influence	NOUN
ajst-2836	13	12	,	,	PUNCT
ajst-2836	13	13	resulting	result	VERB
ajst-2836	13	14	in	in	ADP
ajst-2836	13	15	low	low	ADJ
ajst-2836	13	16	measurement	measurement	NOUN
ajst-2836	13	17	accuracy	accuracy	NOUN
ajst-2836	13	18	and	and	CCONJ
ajst-2836	13	19	large	large	ADJ
ajst-2836	13	20	error	error	NOUN
ajst-2836	13	21	,	,	PUNCT
ajst-2836	13	22	which	which	PRON
ajst-2836	13	23	can	can	AUX
ajst-2836	13	24	not	not	PART
ajst-2836	13	25	meet	meet	VERB
ajst-2836	13	26	the	the	DET
ajst-2836	13	27	requirements	requirement	NOUN
ajst-2836	13	28	of	of	ADP
ajst-2836	13	29	fast	fast	ADJ
ajst-2836	13	30	and	and	CCONJ
ajst-2836	13	31	accurate	accurate	ADJ
ajst-2836	13	32	flatness	flatness	NOUN
ajst-2836	13	33	measurement	measurement	NOUN
ajst-2836	13	34	.	.	PUNCT
ajst-2836	14	1	in	in	ADP
ajst-2836	14	2	contrast	contrast	NOUN
ajst-2836	14	3	,	,	PUNCT
ajst-2836	14	4	foreign	foreign	ADJ
ajst-2836	14	5	testing	testing	NOUN
ajst-2836	14	6	equipment	equipment	NOUN
ajst-2836	14	7	has	have	AUX
ajst-2836	14	8	mature	mature	ADJ
ajst-2836	14	9	technology	technology	NOUN
ajst-2836	14	10	and	and	CCONJ
ajst-2836	14	11	high	high	ADJ
ajst-2836	14	12	measurement	measurement	NOUN
ajst-2836	14	13	accuracy	accuracy	NOUN
ajst-2836	14	14	,	,	PUNCT
ajst-2836	14	15	but	but	CCONJ
ajst-2836	14	16	the	the	DET
ajst-2836	14	17	price	price	NOUN
ajst-2836	14	18	is	be	AUX
ajst-2836	14	19	also	also	ADV
ajst-2836	14	20	relatively	relatively	ADV
ajst-2836	14	21	expensive	expensive	ADJ
ajst-2836	14	22	.	.	PUNCT
ajst-2836	15	1	therefore	therefore	ADV
ajst-2836	15	2	,	,	PUNCT
ajst-2836	15	3	it	it	PRON
ajst-2836	15	4	is	be	AUX
ajst-2836	15	5	of	of	ADP
ajst-2836	15	6	practical	practical	ADJ
ajst-2836	15	7	significance	significance	NOUN
ajst-2836	15	8	to	to	PART
ajst-2836	15	9	study	study	VERB
ajst-2836	15	10	a	a	DET
ajst-2836	15	11	laser	laser	NOUN
ajst-2836	15	12	scanning	scan	VERB
ajst-2836	15	13	flatness	flatness	NOUN
ajst-2836	15	14	measurement	measurement	NOUN
ajst-2836	15	15	method	method	NOUN
ajst-2836	15	16	for	for	ADP
ajst-2836	15	17	flatness	flatness	NOUN
ajst-2836	15	18	detection	detection	NOUN
ajst-2836	15	19	.	.	PUNCT
ajst-2836	16	1	in	in	ADP
ajst-2836	16	2	addition	addition	NOUN
ajst-2836	16	3	,	,	PUNCT
ajst-2836	16	4	computer	computer	NOUN
ajst-2836	16	5	vision	vision	NOUN
ajst-2836	16	6	and	and	CCONJ
ajst-2836	16	7	image	image	NOUN
ajst-2836	16	8	processing	processing	NOUN
ajst-2836	16	9	technology	technology	NOUN
ajst-2836	16	10	are	be	AUX
ajst-2836	16	11	developing	develop	VERB
ajst-2836	16	12	rapidly	rapidly	ADV
ajst-2836	16	13	,	,	PUNCT
ajst-2836	16	14	so	so	ADV
ajst-2836	16	15	with	with	ADP
ajst-2836	16	16	the	the	DET
ajst-2836	16	17	help	help	NOUN
ajst-2836	16	18	of	of	ADP
ajst-2836	16	19	computers	computer	NOUN
ajst-2836	16	20	,	,	PUNCT
ajst-2836	16	21	the	the	DET
ajst-2836	16	22	postprocessing	postprocessing	NOUN
ajst-2836	16	23	of	of	ADP
ajst-2836	16	24	data	datum	NOUN
ajst-2836	16	25	has	have	AUX
ajst-2836	16	26	also	also	ADV
ajst-2836	16	27	become	become	VERB
ajst-2836	16	28	convenient	convenient	ADJ
ajst-2836	16	29	,	,	PUNCT
ajst-2836	16	30	fast	fast	ADJ
ajst-2836	16	31	and	and	CCONJ
ajst-2836	16	32	accurate	accurate	ADJ
ajst-2836	17	1	[	[	X
ajst-2836	17	2	4	4	NUM
ajst-2836	17	3	]	]	PUNCT
ajst-2836	17	4	.	.	PUNCT
ajst-2836	18	1	for	for	ADP
ajst-2836	18	2	the	the	DET
ajst-2836	18	3	measurement	measurement	NOUN
ajst-2836	18	4	of	of	ADP
ajst-2836	18	5	the	the	DET
ajst-2836	18	6	flatness	flatness	NOUN
ajst-2836	18	7	of	of	ADP
ajst-2836	18	8	the	the	DET
ajst-2836	18	9	seismic	seismic	ADJ
ajst-2836	18	10	isolation	isolation	NOUN
ajst-2836	18	11	support	support	NOUN
ajst-2836	18	12	skeleton	skeleton	NOUN
ajst-2836	18	13	plate	plate	NOUN
ajst-2836	18	14	,	,	PUNCT
ajst-2836	18	15	the	the	DET
ajst-2836	18	16	laser	laser	NOUN
ajst-2836	18	17	sensor	sensor	NOUN
ajst-2836	18	18	can	can	AUX
ajst-2836	18	19	be	be	AUX
ajst-2836	18	20	used	use	VERB
ajst-2836	18	21	to	to	PART
ajst-2836	18	22	scan	scan	VERB
ajst-2836	18	23	the	the	DET
ajst-2836	18	24	seismic	seismic	ADJ
ajst-2836	18	25	isolation	isolation	NOUN
ajst-2836	18	26	support	support	NOUN
ajst-2836	18	27	skeleton	skeleton	NOUN
ajst-2836	18	28	plate	plate	NOUN
ajst-2836	18	29	to	to	PART
ajst-2836	18	30	complete	complete	VERB
ajst-2836	18	31	the	the	DET
ajst-2836	18	32	acquisition	acquisition	NOUN
ajst-2836	18	33	of	of	ADP
ajst-2836	18	34	the	the	DET
ajst-2836	18	35	plane	plane	NOUN
ajst-2836	18	36	to	to	PART
ajst-2836	18	37	be	be	AUX
ajst-2836	18	38	measured	measure	VERB
ajst-2836	18	39	and	and	CCONJ
ajst-2836	18	40	a	a	DET
ajst-2836	18	41	large	large	ADJ
ajst-2836	18	42	number	number	NOUN
ajst-2836	18	43	of	of	ADP
ajst-2836	18	44	data	datum	NOUN
ajst-2836	18	45	points	point	NOUN
ajst-2836	18	46	,	,	PUNCT
ajst-2836	18	47	obtain	obtain	VERB
ajst-2836	18	48	the	the	DET
ajst-2836	18	49	spatial	spatial	ADJ
ajst-2836	18	50	position	position	NOUN
ajst-2836	18	51	of	of	ADP
ajst-2836	18	52	the	the	DET
ajst-2836	18	53	relevant	relevant	ADJ
ajst-2836	18	54	points	point	NOUN
ajst-2836	18	55	,	,	PUNCT
ajst-2836	18	56	and	and	CCONJ
ajst-2836	18	57	then	then	ADV
ajst-2836	18	58	obtain	obtain	VERB
ajst-2836	18	59	the	the	DET
ajst-2836	18	60	corresponding	corresponding	ADJ
ajst-2836	18	61	space	space	NOUN
ajst-2836	18	62	plane	plane	NOUN
ajst-2836	18	63	by	by	ADP
ajst-2836	18	64	least	least	ADJ
ajst-2836	18	65	squares	square	NOUN
ajst-2836	18	66	fitting	fitting	ADJ
ajst-2836	18	67	,	,	PUNCT
ajst-2836	18	68	calculate	calculate	VERB
ajst-2836	18	69	the	the	DET
ajst-2836	18	70	distance	distance	NOUN
ajst-2836	18	71	from	from	ADP
ajst-2836	18	72	the	the	DET
ajst-2836	18	73	point	point	NOUN
ajst-2836	18	74	to	to	ADP
ajst-2836	18	75	the	the	DET
ajst-2836	18	76	fitting	fitting	ADJ
ajst-2836	18	77	plane	plane	NOUN
ajst-2836	18	78	,	,	PUNCT
ajst-2836	18	79	and	and	CCONJ
ajst-2836	18	80	complete	complete	VERB
ajst-2836	18	81	the	the	DET
ajst-2836	18	82	flatness	flatness	NOUN
ajst-2836	18	83	measurement	measurement	NOUN
ajst-2836	19	1	[	[	X
ajst-2836	19	2	5	5	NUM
ajst-2836	19	3	]	]	PUNCT
ajst-2836	19	4	.	.	PUNCT
ajst-2836	20	1	2	2	X
ajst-2836	20	2	.	.	X
ajst-2836	20	3	organization	organization	NOUN
ajst-2836	20	4	of	of	ADP
ajst-2836	20	5	the	the	DET
ajst-2836	20	6	text	text	NOUN
ajst-2836	20	7	laser	laser	NOUN
ajst-2836	20	8	displacement	displacement	NOUN
ajst-2836	20	9	sensors	sensor	NOUN
ajst-2836	20	10	mainly	mainly	ADV
ajst-2836	20	11	use	use	VERB
ajst-2836	20	12	laser	laser	NOUN
ajst-2836	20	13	triangulation	triangulation	NOUN
ajst-2836	20	14	to	to	PART
ajst-2836	20	15	accurately	accurately	ADV
ajst-2836	20	16	measure	measure	VERB
ajst-2836	20	17	workpieces	workpiece	NOUN
ajst-2836	20	18	.	.	PUNCT
ajst-2836	21	1	the	the	DET
ajst-2836	21	2	principle	principle	NOUN
ajst-2836	21	3	of	of	ADP
ajst-2836	21	4	laser	laser	NOUN
ajst-2836	21	5	triangulation	triangulation	NOUN
ajst-2836	21	6	is	be	AUX
ajst-2836	21	7	shown	show	VERB
ajst-2836	21	8	in	in	ADP
ajst-2836	21	9	figure	figure	NOUN
ajst-2836	21	10	1	1	NUM
ajst-2836	21	11	.	.	PUNCT
ajst-2836	22	1	after	after	SCONJ
ajst-2836	22	2	the	the	DET
ajst-2836	22	3	laser	laser	NOUN
ajst-2836	22	4	beam	beam	NOUN
ajst-2836	22	5	is	be	AUX
ajst-2836	22	6	emitted	emit	VERB
ajst-2836	22	7	,	,	PUNCT
ajst-2836	22	8	it	it	PRON
ajst-2836	22	9	is	be	AUX
ajst-2836	22	10	irradiated	irradiate	VERB
ajst-2836	22	11	on	on	ADP
ajst-2836	22	12	the	the	DET
ajst-2836	22	13	plane	plane	NOUN
ajst-2836	22	14	to	to	PART
ajst-2836	22	15	be	be	AUX
ajst-2836	22	16	measured	measure	VERB
ajst-2836	22	17	by	by	ADP
ajst-2836	22	18	the	the	DET
ajst-2836	22	19	converging	converge	VERB
ajst-2836	22	20	lens	len	NOUN
ajst-2836	22	21	,	,	PUNCT
ajst-2836	22	22	and	and	CCONJ
ajst-2836	22	23	the	the	DET
ajst-2836	22	24	plane	plane	NOUN
ajst-2836	22	25	reflected	reflect	VERB
ajst-2836	22	26	light	light	NOUN
ajst-2836	22	27	is	be	AUX
ajst-2836	22	28	irradiated	irradiate	VERB
ajst-2836	22	29	on	on	ADP
ajst-2836	22	30	the	the	DET
ajst-2836	22	31	detector	detector	NOUN
ajst-2836	22	32	.	.	PUNCT
ajst-2836	23	1	after	after	ADP
ajst-2836	23	2	receiving	receive	VERB
ajst-2836	23	3	the	the	DET
ajst-2836	23	4	laser	laser	NOUN
ajst-2836	23	5	beam	beam	NOUN
ajst-2836	23	6	,	,	PUNCT
ajst-2836	23	7	the	the	DET
ajst-2836	23	8	detector	detector	NOUN
ajst-2836	23	9	obtains	obtain	VERB
ajst-2836	23	10	the	the	DET
ajst-2836	23	11	displacement	displacement	NOUN
ajst-2836	23	12	of	of	ADP
ajst-2836	23	13	the	the	DET
ajst-2836	23	14	measured	measured	ADJ
ajst-2836	23	15	object	object	NOUN
ajst-2836	23	16	from	from	ADP
ajst-2836	23	17	the	the	DET
ajst-2836	23	18	reference	reference	NOUN
ajst-2836	23	19	by	by	ADP
ajst-2836	23	20	comparing	compare	VERB
ajst-2836	23	21	it	it	PRON
ajst-2836	23	22	with	with	ADP
ajst-2836	23	23	the	the	DET
ajst-2836	23	24	position	position	NOUN
ajst-2836	23	25	change	change	NOUN
ajst-2836	23	26	of	of	ADP
ajst-2836	23	27	the	the	DET
ajst-2836	23	28	reflected	reflect	VERB
ajst-2836	23	29	laser	laser	NOUN
ajst-2836	23	30	beam	beam	NOUN
ajst-2836	23	31	from	from	ADP
ajst-2836	23	32	the	the	DET
ajst-2836	23	33	set	set	ADJ
ajst-2836	23	34	datum	datum	NOUN
ajst-2836	23	35	,	,	PUNCT
ajst-2836	23	36	that	that	ADV
ajst-2836	23	37	is	is	ADV
ajst-2836	23	38	,	,	PUNCT
ajst-2836	23	39	by	by	ADP
ajst-2836	23	40	image	image	NOUN
ajst-2836	23	41	shift	shift	NOUN
ajst-2836	23	42	.	.	PUNCT
ajst-2836	24	1	its	its	PRON
ajst-2836	24	2	derivation	derivation	NOUN
ajst-2836	24	3	formula	formula	NOUN
ajst-2836	24	4	is	be	AUX
ajst-2836	24	5	as	as	SCONJ
ajst-2836	24	6	follows	follow	VERB
ajst-2836	24	7	[	[	X
ajst-2836	24	8	6	6	NUM
ajst-2836	24	9	]	]	PUNCT
ajst-2836	24	10	.	.	PUNCT
ajst-2836	25	1	figure	figure	NOUN
ajst-2836	25	2	1	1	NUM
ajst-2836	25	3	.	.	PUNCT
ajst-2836	25	4	schematic	schematic	ADJ
ajst-2836	25	5	diagram	diagram	NOUN
ajst-2836	25	6	of	of	ADP
ajst-2836	25	7	laser	laser	NOUN
ajst-2836	25	8	trigonometry	trigonometry	NOUN
ajst-2836	25	9	131	131	NUM
ajst-2836	25	10	as	as	SCONJ
ajst-2836	25	11	can	can	AUX
ajst-2836	25	12	be	be	AUX
ajst-2836	25	13	obtained	obtain	VERB
ajst-2836	25	14	from	from	ADP
ajst-2836	25	15	figure	figure	NOUN
ajst-2836	25	16	1	1	NUM
ajst-2836	25	17	:	:	SYM
ajst-2836	25	18	1	1	NUM
ajst-2836	25	19	sin	sin	NOUN
ajst-2836	25	20	sin	sin	NOUN
ajst-2836	25	21	(	(	PUNCT
ajst-2836	25	22	)	)	PUNCT
ajst-2836	25	23	oo	oo	ADP
ajst-2836	25	24	a	a	DET
ajst-2836	25	25			ADJ
ajst-2836	25	26			NOUN
ajst-2836	25	27			NUM
ajst-2836	25	28			PROPN
ajst-2836	25	29			VERB
ajst-2836	25	30			NUM
ajst-2836	25	31	(	(	PUNCT
ajst-2836	25	32	1	1	NUM
ajst-2836	25	33	)	)	PUNCT
ajst-2836	25	34	'	'	PART
ajst-2836	25	35	sin	sin	NOUN
ajst-2836	25	36	sin	sin	NOUN
ajst-2836	25	37	(	(	PUNCT
ajst-2836	25	38	)	)	PUNCT
ajst-2836	25	39	x	x	SYM
ajst-2836	25	40	b	b	X
ajst-2836	25	41			PROPN
ajst-2836	25	42			PROPN
ajst-2836	25	43			PROPN
ajst-2836	25	44			PROPN
ajst-2836	25	45			X
ajst-2836	25	46	(	(	PUNCT
ajst-2836	25	47	2	2	X
ajst-2836	25	48	)	)	PUNCT
ajst-2836	25	49	comprehensive	comprehensive	ADJ
ajst-2836	25	50	equations	equation	NOUN
ajst-2836	25	51	(	(	PUNCT
ajst-2836	25	52	1	1	NUM
ajst-2836	25	53	)	)	PUNCT
ajst-2836	25	54	and	and	CCONJ
ajst-2836	25	55	(	(	PUNCT
ajst-2836	25	56	2	2	X
ajst-2836	25	57	)	)	PUNCT
ajst-2836	25	58	yield	yield	NOUN
ajst-2836	25	59	:	:	PUNCT
ajst-2836	25	60	1	1	NUM
ajst-2836	25	61	1	1	NUM
ajst-2836	25	62	)	)	PUNCT
ajst-2836	25	63	'	'	PUNCT
ajst-2836	25	64	sin	sin	NOUN
ajst-2836	25	65	'cos	'cos	NOUN
ajst-2836	25	66	sin	sin	NOUN
ajst-2836	25	67	(	(	PUNCT
ajst-2836	25	68	)	)	PUNCT
ajst-2836	25	69	cos	cos	PROPN
ajst-2836	25	70	(	(	PUNCT
ajst-2836	25	71	x	x	SYM
ajst-2836	25	72	b	b	X
ajst-2836	25	73	x	x	X
ajst-2836	25	74	oo	oo	INTJ
ajst-2836	25	75	a	a	DET
ajst-2836	25	76	oo	oo	ADJ
ajst-2836	25	77			PROPN
ajst-2836	25	78			PROPN
ajst-2836	25	79			NOUN
ajst-2836	25	80			ADP
ajst-2836	25	81			NUM
ajst-2836	25	82			NUM
ajst-2836	25	83			PROPN
ajst-2836	25	84			VERB
ajst-2836	25	85			PROPN
ajst-2836	25	86			PROPN
ajst-2836	25	87			X
ajst-2836	25	88	(	(	PUNCT
ajst-2836	25	89	3	3	NUM
ajst-2836	25	90	)	)	PUNCT
ajst-2836	25	91	as	as	SCONJ
ajst-2836	25	92	can	can	AUX
ajst-2836	25	93	be	be	AUX
ajst-2836	25	94	obtained	obtain	VERB
ajst-2836	25	95	from	from	ADP
ajst-2836	25	96	figure	figure	NOUN
ajst-2836	25	97	1	1	NUM
ajst-2836	25	98	:	:	SYM
ajst-2836	25	99	1	1	NUM
ajst-2836	25	100	cosx	cosx	PROPN
ajst-2836	25	101	oo	oo	PROPN
ajst-2836	25	102			PROPN
ajst-2836	25	103	(	(	PUNCT
ajst-2836	25	104	4	4	NUM
ajst-2836	25	105	)	)	PUNCT
ajst-2836	25	106	is	be	AUX
ajst-2836	25	107	available	available	ADJ
ajst-2836	25	108	:	:	PUNCT
ajst-2836	25	109	'	'	PUNCT
ajst-2836	25	110	sin	sin	NOUN
ajst-2836	25	111	sin	sin	NOUN
ajst-2836	25	112	(	(	PUNCT
ajst-2836	25	113	cos	cos	ADJ
ajst-2836	25	114	)	)	PUNCT
ajst-2836	25	115	sin	sin	NOUN
ajst-2836	25	116	(	(	PUNCT
ajst-2836	25	117	)	)	PUNCT
ajst-2836	25	118	'	'	PART
ajst-2836	25	119	ax	ax	NOUN
ajst-2836	25	120	x	x	X
ajst-2836	25	121	b	b	X
ajst-2836	25	122	x	x	PROPN
ajst-2836	25	123			PROPN
ajst-2836	25	124			NUM
ajst-2836	25	125			NOUN
ajst-2836	25	126			ADP
ajst-2836	25	127			NUM
ajst-2836	25	128			PROPN
ajst-2836	25	129			PROPN
ajst-2836	25	130			PROPN
ajst-2836	25	131			VERB
ajst-2836	25	132			PUNCT
ajst-2836	25	133			PROPN
ajst-2836	25	134	(	(	PUNCT
ajst-2836	25	135	5	5	NUM
ajst-2836	25	136	)	)	PUNCT
ajst-2836	25	137	among	among	ADP
ajst-2836	25	138	them	they	PRON
ajst-2836	25	139	,	,	PUNCT
ajst-2836	25	140	except	except	SCONJ
ajst-2836	25	141	for	for	ADP
ajst-2836	25	142	'	'	NUM
ajst-2836	25	143	x	x	SYM
ajst-2836	25	144	,	,	PUNCT
ajst-2836	25	145	the	the	DET
ajst-2836	25	146	other	other	ADJ
ajst-2836	25	147	parameters	parameter	NOUN
ajst-2836	25	148	are	be	AUX
ajst-2836	25	149	fixed	fix	VERB
ajst-2836	25	150	constants	constant	NOUN
ajst-2836	25	151	of	of	ADP
ajst-2836	25	152	the	the	DET
ajst-2836	25	153	sensor	sensor	NOUN
ajst-2836	25	154	.	.	PUNCT
ajst-2836	26	1	therefore	therefore	ADV
ajst-2836	26	2	,	,	PUNCT
ajst-2836	26	3	the	the	DET
ajst-2836	26	4	image	image	NOUN
ajst-2836	26	5	shift	shift	NOUN
ajst-2836	26	6	'	'	PUNCT
ajst-2836	26	7	x	x	PUNCT
ajst-2836	26	8	can	can	AUX
ajst-2836	26	9	be	be	AUX
ajst-2836	26	10	converted	convert	VERB
ajst-2836	26	11	to	to	ADP
ajst-2836	26	12	the	the	DET
ajst-2836	26	13	relative	relative	ADJ
ajst-2836	26	14	displacement	displacement	NOUN
ajst-2836	26	15	of	of	ADP
ajst-2836	26	16	the	the	DET
ajst-2836	26	17	measured	measured	ADJ
ajst-2836	26	18	surface	surface	NOUN
ajst-2836	26	19	x	x	X
ajst-2836	26	20	.	.	PUNCT
ajst-2836	27	1	3	3	X
ajst-2836	27	2	.	.	X
ajst-2836	27	3	algorithmic	algorithmic	ADJ
ajst-2836	27	4	analysis	analysis	NOUN
ajst-2836	27	5	of	of	ADP
ajst-2836	27	6	skeleton	skeleton	NOUN
ajst-2836	27	7	plate	plate	NOUN
ajst-2836	27	8	plane	plane	NOUN
ajst-2836	27	9	measurement	measurement	NOUN
ajst-2836	27	10	the	the	DET
ajst-2836	27	11	main	main	ADJ
ajst-2836	27	12	methods	method	NOUN
ajst-2836	27	13	for	for	ADP
ajst-2836	27	14	evaluating	evaluate	VERB
ajst-2836	27	15	the	the	DET
ajst-2836	27	16	flatness	flatness	NOUN
ajst-2836	27	17	error	error	NOUN
ajst-2836	27	18	of	of	ADP
ajst-2836	27	19	the	the	DET
ajst-2836	27	20	skeleton	skeleton	NOUN
ajst-2836	27	21	plate	plate	NOUN
ajst-2836	27	22	of	of	ADP
ajst-2836	27	23	seismic	seismic	ADJ
ajst-2836	27	24	isolation	isolation	NOUN
ajst-2836	27	25	support	support	NOUN
ajst-2836	27	26	are	be	AUX
ajst-2836	27	27	:	:	PUNCT
ajst-2836	27	28	three	three	NUM
ajst-2836	27	29	-	-	PUNCT
ajst-2836	27	30	point	point	NOUN
ajst-2836	27	31	plane	plane	NOUN
ajst-2836	27	32	method	method	NOUN
ajst-2836	27	33	,	,	PUNCT
ajst-2836	27	34	diagonal	diagonal	ADJ
ajst-2836	27	35	plane	plane	NOUN
ajst-2836	27	36	method	method	NOUN
ajst-2836	27	37	,	,	PUNCT
ajst-2836	27	38	minimum	minimum	ADJ
ajst-2836	27	39	area	area	NOUN
ajst-2836	27	40	method	method	NOUN
ajst-2836	27	41	and	and	CCONJ
ajst-2836	27	42	least	least	ADJ
ajst-2836	27	43	squares	square	NOUN
ajst-2836	27	44	method	method	NOUN
ajst-2836	27	45	.	.	PUNCT
ajst-2836	28	1	[	[	X
ajst-2836	28	2	7	7	X
ajst-2836	28	3	]	]	X
ajst-2836	28	4	the	the	DET
ajst-2836	28	5	ideal	ideal	ADJ
ajst-2836	28	6	plane	plane	NOUN
ajst-2836	28	7	selected	select	VERB
ajst-2836	28	8	by	by	ADP
ajst-2836	28	9	the	the	DET
ajst-2836	28	10	three	three	NUM
ajst-2836	28	11	-	-	PUNCT
ajst-2836	28	12	remote	remote	ADJ
ajst-2836	28	13	point	point	NOUN
ajst-2836	28	14	method	method	NOUN
ajst-2836	28	15	and	and	CCONJ
ajst-2836	28	16	the	the	DET
ajst-2836	28	17	diagonal	diagonal	ADJ
ajst-2836	28	18	method	method	NOUN
ajst-2836	28	19	does	do	AUX
ajst-2836	28	20	not	not	PART
ajst-2836	28	21	comprehensively	comprehensively	ADV
ajst-2836	28	22	use	use	VERB
ajst-2836	28	23	the	the	DET
ajst-2836	28	24	detected	detect	VERB
ajst-2836	28	25	plane	plane	NOUN
ajst-2836	28	26	data	datum	NOUN
ajst-2836	28	27	,	,	PUNCT
ajst-2836	28	28	and	and	CCONJ
ajst-2836	28	29	the	the	DET
ajst-2836	28	30	flatness	flatness	NOUN
ajst-2836	28	31	error	error	NOUN
ajst-2836	28	32	may	may	AUX
ajst-2836	28	33	cause	cause	VERB
ajst-2836	28	34	a	a	DET
ajst-2836	28	35	large	large	ADJ
ajst-2836	28	36	evaluation	evaluation	NOUN
ajst-2836	28	37	difference	difference	NOUN
ajst-2836	28	38	according	accord	VERB
ajst-2836	28	39	to	to	ADP
ajst-2836	28	40	the	the	DET
ajst-2836	28	41	different	different	ADJ
ajst-2836	28	42	reference	reference	NOUN
ajst-2836	28	43	data	data	NOUN
ajst-2836	28	44	points	point	NOUN
ajst-2836	28	45	selected	select	VERB
ajst-2836	28	46	each	each	DET
ajst-2836	28	47	time	time	NOUN
ajst-2836	28	48	,	,	PUNCT
ajst-2836	28	49	which	which	PRON
ajst-2836	28	50	is	be	AUX
ajst-2836	28	51	generally	generally	ADV
ajst-2836	28	52	only	only	ADV
ajst-2836	28	53	suitable	suitable	ADJ
ajst-2836	28	54	for	for	ADP
ajst-2836	28	55	flatness	flatness	NOUN
ajst-2836	28	56	error	error	NOUN
ajst-2836	28	57	measurement	measurement	NOUN
ajst-2836	28	58	with	with	ADP
ajst-2836	28	59	a	a	DET
ajst-2836	28	60	small	small	ADJ
ajst-2836	28	61	number	number	NOUN
ajst-2836	28	62	of	of	ADP
ajst-2836	28	63	plane	plane	NOUN
ajst-2836	28	64	distribution	distribution	NOUN
ajst-2836	28	65	points	point	NOUN
ajst-2836	28	66	and	and	CCONJ
ajst-2836	28	67	low	low	ADJ
ajst-2836	28	68	plane	plane	NOUN
ajst-2836	28	69	accuracy	accuracy	NOUN
ajst-2836	28	70	requirements	requirement	NOUN
ajst-2836	28	71	.	.	PUNCT
ajst-2836	29	1	[	[	X
ajst-2836	29	2	8	8	NUM
ajst-2836	29	3	]	]	PUNCT
ajst-2836	29	4	the	the	DET
ajst-2836	29	5	minimum	minimum	ADJ
ajst-2836	29	6	area	area	NOUN
ajst-2836	29	7	method	method	NOUN
ajst-2836	29	8	meets	meet	VERB
ajst-2836	29	9	the	the	DET
ajst-2836	29	10	minimum	minimum	ADJ
ajst-2836	29	11	condition	condition	NOUN
ajst-2836	29	12	criteria	criterion	NOUN
ajst-2836	29	13	formulated	formulate	VERB
ajst-2836	29	14	by	by	ADP
ajst-2836	29	15	national	national	ADJ
ajst-2836	29	16	standards	standard	NOUN
ajst-2836	29	17	,	,	PUNCT
ajst-2836	29	18	and	and	CCONJ
ajst-2836	29	19	the	the	DET
ajst-2836	29	20	calculated	calculate	VERB
ajst-2836	29	21	flatness	flatness	NOUN
ajst-2836	29	22	error	error	NOUN
ajst-2836	29	23	is	be	AUX
ajst-2836	29	24	the	the	DET
ajst-2836	29	25	most	most	ADV
ajst-2836	29	26	accurate	accurate	ADJ
ajst-2836	29	27	and	and	CCONJ
ajst-2836	29	28	unique	unique	ADJ
ajst-2836	29	29	,	,	PUNCT
ajst-2836	29	30	but	but	CCONJ
ajst-2836	29	31	its	its	PRON
ajst-2836	29	32	calculation	calculation	NOUN
ajst-2836	29	33	process	process	NOUN
ajst-2836	29	34	is	be	AUX
ajst-2836	29	35	complex	complex	ADJ
ajst-2836	29	36	and	and	CCONJ
ajst-2836	29	37	is	be	AUX
ajst-2836	29	38	mostly	mostly	ADV
ajst-2836	29	39	used	use	VERB
ajst-2836	29	40	for	for	ADP
ajst-2836	29	41	the	the	DET
ajst-2836	29	42	operation	operation	NOUN
ajst-2836	29	43	of	of	ADP
ajst-2836	29	44	large	large	ADJ
ajst-2836	29	45	and	and	CCONJ
ajst-2836	29	46	complex	complex	ADJ
ajst-2836	29	47	planar	planar	ADJ
ajst-2836	29	48	data	data	NOUN
ajst-2836	29	49	points	point	NOUN
ajst-2836	29	50	.	.	PUNCT
ajst-2836	30	1	the	the	DET
ajst-2836	30	2	least	least	ADJ
ajst-2836	30	3	squares	square	NOUN
ajst-2836	30	4	fitting	fitting	ADJ
ajst-2836	30	5	process	process	NOUN
ajst-2836	30	6	makes	make	VERB
ajst-2836	30	7	full	full	ADJ
ajst-2836	30	8	use	use	NOUN
ajst-2836	30	9	of	of	ADP
ajst-2836	30	10	the	the	DET
ajst-2836	30	11	sampled	sample	VERB
ajst-2836	30	12	plane	plane	NOUN
ajst-2836	30	13	data	datum	NOUN
ajst-2836	30	14	points	point	NOUN
ajst-2836	30	15	,	,	PUNCT
ajst-2836	30	16	the	the	PRON
ajst-2836	30	17	more	more	ADV
ajst-2836	30	18	accurate	accurate	ADJ
ajst-2836	30	19	the	the	DET
ajst-2836	30	20	number	number	NOUN
ajst-2836	30	21	of	of	ADP
ajst-2836	30	22	accurate	accurate	ADJ
ajst-2836	30	23	data	datum	NOUN
ajst-2836	30	24	points	point	NOUN
ajst-2836	30	25	sampled	sample	VERB
ajst-2836	30	26	,	,	PUNCT
ajst-2836	30	27	the	the	PRON
ajst-2836	30	28	more	more	ADV
ajst-2836	30	29	accurate	accurate	ADJ
ajst-2836	30	30	the	the	DET
ajst-2836	30	31	reference	reference	NOUN
ajst-2836	30	32	plane	plane	NOUN
ajst-2836	30	33	is	be	AUX
ajst-2836	30	34	fitted	fit	VERB
ajst-2836	30	35	,	,	PUNCT
ajst-2836	30	36	and	and	CCONJ
ajst-2836	30	37	the	the	DET
ajst-2836	30	38	calculation	calculation	NOUN
ajst-2836	30	39	process	process	NOUN
ajst-2836	30	40	is	be	AUX
ajst-2836	30	41	simple	simple	ADJ
ajst-2836	30	42	and	and	CCONJ
ajst-2836	30	43	fast	fast	ADJ
ajst-2836	30	44	,	,	PUNCT
ajst-2836	30	45	which	which	PRON
ajst-2836	30	46	can	can	AUX
ajst-2836	30	47	meet	meet	VERB
ajst-2836	30	48	the	the	DET
ajst-2836	30	49	requirements	requirement	NOUN
ajst-2836	30	50	of	of	ADP
ajst-2836	30	51	real	real	ADJ
ajst-2836	30	52	-	-	PUNCT
ajst-2836	30	53	time	time	NOUN
ajst-2836	30	54	on	on	ADP
ajst-2836	30	55	-	-	PUNCT
ajst-2836	30	56	site	site	NOUN
ajst-2836	30	57	detection	detection	NOUN
ajst-2836	30	58	.	.	PUNCT
ajst-2836	31	1	in	in	ADP
ajst-2836	31	2	summary	summary	NOUN
ajst-2836	31	3	,	,	PUNCT
ajst-2836	31	4	this	this	DET
ajst-2836	31	5	paper	paper	NOUN
ajst-2836	31	6	uses	use	VERB
ajst-2836	31	7	the	the	DET
ajst-2836	31	8	least	least	ADJ
ajst-2836	31	9	squares	square	NOUN
ajst-2836	31	10	method	method	VERB
ajst-2836	31	11	to	to	PART
ajst-2836	31	12	calculate	calculate	VERB
ajst-2836	31	13	the	the	DET
ajst-2836	31	14	flatness	flatness	NOUN
ajst-2836	31	15	value	value	NOUN
ajst-2836	31	16	of	of	ADP
ajst-2836	31	17	the	the	DET
ajst-2836	31	18	skeleton	skeleton	NOUN
ajst-2836	31	19	plate	plate	NOUN
ajst-2836	32	1	[	[	X
ajst-2836	32	2	9	9	NUM
ajst-2836	32	3	-	-	SYM
ajst-2836	32	4	10	10	NUM
ajst-2836	32	5	]	]	PUNCT
ajst-2836	32	6	.	.	PUNCT
ajst-2836	33	1	4	4	X
ajst-2836	33	2	.	.	X
ajst-2836	33	3	experiment	experiment	NOUN
ajst-2836	33	4	4.1	4.1	NUM
ajst-2836	33	5	.	.	PUNCT
ajst-2836	34	1	experimental	experimental	ADJ
ajst-2836	34	2	flow	flow	NOUN
ajst-2836	34	3	the	the	DET
ajst-2836	34	4	experiment	experiment	NOUN
ajst-2836	34	5	first	first	ADV
ajst-2836	34	6	builds	build	VERB
ajst-2836	34	7	the	the	DET
ajst-2836	34	8	skeleton	skeleton	NOUN
ajst-2836	34	9	plate	plate	NOUN
ajst-2836	34	10	flatness	flatness	NOUN
ajst-2836	34	11	detection	detection	NOUN
ajst-2836	34	12	test	test	NOUN
ajst-2836	34	13	platform	platform	NOUN
ajst-2836	34	14	,	,	PUNCT
ajst-2836	34	15	collects	collect	VERB
ajst-2836	34	16	the	the	DET
ajst-2836	34	17	skeleton	skeleton	NOUN
ajst-2836	34	18	plate	plate	NOUN
ajst-2836	34	19	plane	plane	NOUN
ajst-2836	34	20	image	image	NOUN
ajst-2836	34	21	and	and	CCONJ
ajst-2836	34	22	the	the	DET
ajst-2836	34	23	data	datum	NOUN
ajst-2836	34	24	of	of	ADP
ajst-2836	34	25	all	all	DET
ajst-2836	34	26	measurement	measurement	NOUN
ajst-2836	34	27	points	point	VERB
ajst-2836	34	28	through	through	ADP
ajst-2836	34	29	laser	laser	NOUN
ajst-2836	34	30	sensor	sensor	NOUN
ajst-2836	34	31	scanning	scanning	NOUN
ajst-2836	34	32	,	,	PUNCT
ajst-2836	34	33	and	and	CCONJ
ajst-2836	34	34	then	then	ADV
ajst-2836	34	35	preprocesses	preprocesse	VERB
ajst-2836	34	36	the	the	DET
ajst-2836	34	37	data	datum	NOUN
ajst-2836	34	38	by	by	ADP
ajst-2836	34	39	the	the	DET
ajst-2836	34	40	computer	computer	NOUN
ajst-2836	34	41	,	,	PUNCT
ajst-2836	34	42	selects	select	NOUN
ajst-2836	34	43	and	and	CCONJ
ajst-2836	34	44	determines	determine	VERB
ajst-2836	34	45	the	the	DET
ajst-2836	34	46	ideal	ideal	ADJ
ajst-2836	34	47	reference	reference	NOUN
ajst-2836	34	48	plane	plane	NOUN
ajst-2836	34	49	through	through	ADP
ajst-2836	34	50	data	datum	NOUN
ajst-2836	34	51	analysis	analysis	NOUN
ajst-2836	34	52	,	,	PUNCT
ajst-2836	34	53	and	and	CCONJ
ajst-2836	34	54	finally	finally	ADV
ajst-2836	34	55	calculates	calculate	VERB
ajst-2836	34	56	the	the	DET
ajst-2836	34	57	data	data	NOUN
ajst-2836	34	58	results	result	NOUN
ajst-2836	34	59	of	of	ADP
ajst-2836	34	60	the	the	DET
ajst-2836	34	61	measurement	measurement	NOUN
ajst-2836	34	62	point	point	NOUN
ajst-2836	34	63	and	and	CCONJ
ajst-2836	34	64	the	the	DET
ajst-2836	34	65	ideal	ideal	ADJ
ajst-2836	34	66	reference	reference	NOUN
ajst-2836	34	67	plane	plane	NOUN
ajst-2836	34	68	.	.	PUNCT
ajst-2836	35	1	in	in	ADP
ajst-2836	35	2	this	this	DET
ajst-2836	35	3	experiment	experiment	NOUN
ajst-2836	35	4	,	,	PUNCT
ajst-2836	35	5	the	the	DET
ajst-2836	35	6	keyence	keyence	NOUN
ajst-2836	35	7	linear	linear	PROPN
ajst-2836	35	8	laser	laser	NOUN
ajst-2836	35	9	sensor	sensor	NOUN
ajst-2836	35	10	was	be	AUX
ajst-2836	35	11	used	use	VERB
ajst-2836	35	12	to	to	PART
ajst-2836	35	13	verify	verify	VERB
ajst-2836	35	14	the	the	DET
ajst-2836	35	15	feasibility	feasibility	NOUN
ajst-2836	35	16	of	of	ADP
ajst-2836	35	17	measuring	measure	VERB
ajst-2836	35	18	the	the	DET
ajst-2836	35	19	flatness	flatness	NOUN
ajst-2836	35	20	of	of	ADP
ajst-2836	35	21	the	the	DET
ajst-2836	35	22	skeleton	skeleton	NOUN
ajst-2836	35	23	plate	plate	NOUN
ajst-2836	35	24	of	of	ADP
ajst-2836	35	25	the	the	DET
ajst-2836	35	26	seismic	seismic	ADJ
ajst-2836	35	27	isolation	isolation	NOUN
ajst-2836	35	28	support	support	NOUN
ajst-2836	35	29	.	.	PUNCT
ajst-2836	36	1	in	in	ADP
ajst-2836	36	2	order	order	NOUN
ajst-2836	36	3	to	to	PART
ajst-2836	36	4	ensure	ensure	VERB
ajst-2836	36	5	the	the	DET
ajst-2836	36	6	accuracy	accuracy	NOUN
ajst-2836	36	7	of	of	ADP
ajst-2836	36	8	the	the	DET
ajst-2836	36	9	flatness	flatness	NOUN
ajst-2836	36	10	measurement	measurement	NOUN
ajst-2836	36	11	of	of	ADP
ajst-2836	36	12	the	the	DET
ajst-2836	36	13	skeleton	skeleton	NOUN
ajst-2836	36	14	plate	plate	NOUN
ajst-2836	36	15	,	,	PUNCT
ajst-2836	36	16	two	two	NUM
ajst-2836	36	17	sensor	sensor	NOUN
ajst-2836	36	18	detection	detection	NOUN
ajst-2836	36	19	heads	head	NOUN
ajst-2836	36	20	are	be	AUX
ajst-2836	36	21	used	use	VERB
ajst-2836	36	22	for	for	ADP
ajst-2836	36	23	separate	separate	ADJ
ajst-2836	36	24	experiments	experiment	NOUN
ajst-2836	36	25	,	,	PUNCT
ajst-2836	36	26	and	and	CCONJ
ajst-2836	36	27	the	the	DET
ajst-2836	36	28	machine	machine	NOUN
ajst-2836	36	29	and	and	CCONJ
ajst-2836	36	30	main	main	ADJ
ajst-2836	36	31	parameters	parameter	NOUN
ajst-2836	36	32	are	be	AUX
ajst-2836	36	33	shown	show	VERB
ajst-2836	36	34	in	in	ADP
ajst-2836	36	35	table	table	NOUN
ajst-2836	36	36	1	1	NUM
ajst-2836	36	37	.	.	PUNCT
ajst-2836	37	1	the	the	DET
ajst-2836	37	2	hardware	hardware	NOUN
ajst-2836	37	3	structure	structure	NOUN
ajst-2836	37	4	composition	composition	NOUN
ajst-2836	37	5	and	and	CCONJ
ajst-2836	37	6	function	function	NOUN
ajst-2836	37	7	diagram	diagram	NOUN
ajst-2836	37	8	are	be	AUX
ajst-2836	37	9	shown	show	VERB
ajst-2836	37	10	in	in	ADP
ajst-2836	37	11	figure	figure	NOUN
ajst-2836	37	12	2	2	NUM
ajst-2836	37	13	.	.	PUNCT
ajst-2836	37	14	table	table	NOUN
ajst-2836	37	15	1	1	NUM
ajst-2836	37	16	.	.	PUNCT
ajst-2836	37	17	using	use	VERB
ajst-2836	37	18	machines	machine	NOUN
ajst-2836	37	19	and	and	CCONJ
ajst-2836	37	20	main	main	ADJ
ajst-2836	37	21	parameters	parameter	NOUN
ajst-2836	37	22	option	option	VERB
ajst-2836	37	23	1	1	NUM
ajst-2836	37	24	option	option	NOUN
ajst-2836	37	25	2	2	NUM
ajst-2836	37	26	sensor	sensor	NOUN
ajst-2836	37	27	head	head	NOUN
ajst-2836	37	28	lj	lj	PROPN
ajst-2836	37	29	-	-	PUNCT
ajst-2836	37	30	x8900	x8900	PROPN
ajst-2836	37	31	lj	lj	PROPN
ajst-2836	37	32	-	-	PUNCT
ajst-2836	37	33	x8400	x8400	PROPN
ajst-2836	37	34	controller	controller	NOUN
ajst-2836	37	35	lj-8000	lj-8000	PROPN
ajst-2836	37	36	lj-8000	lj-8000	PROPN
ajst-2836	37	37	z	z	PROPN
ajst-2836	37	38	-	-	PUNCT
ajst-2836	37	39	direction	direction	NOUN
ajst-2836	37	40	detection	detection	NOUN
ajst-2836	37	41	range	range	VERB
ajst-2836	37	42	400	400	NUM
ajst-2836	37	43	mm	mm	NUM
ajst-2836	37	44	60	60	NUM
ajst-2836	37	45	mm	mm	NOUN
ajst-2836	37	46	line	line	NOUN
ajst-2836	37	47	direction	direction	NOUN
ajst-2836	37	48	resolution	resolution	NOUN
ajst-2836	37	49	0.225mm	0.225mm	NOUN
ajst-2836	37	50	/	/	SYM
ajst-2836	37	51	pixel	pixel	PROPN
ajst-2836	37	52	0.075mm	0.075mm	PROPN
ajst-2836	37	53	/	/	SYM
ajst-2836	37	54	pixel	pixel	PROPN
ajst-2836	37	55	scan	scan	PROPN
ajst-2836	37	56	computer	computer	NOUN
ajst-2836	37	57	data	datum	NOUN
ajst-2836	37	58	processing	process	VERB
ajst-2836	37	59	laser	laser	NOUN
ajst-2836	37	60	sensor	sensor	NOUN
ajst-2836	37	61	controller	controller	NOUN
ajst-2836	37	62	laser	laser	NOUN
ajst-2836	37	63	sensor	sensor	NOUN
ajst-2836	37	64	detection	detection	NOUN
ajst-2836	37	65	head	head	NOUN
ajst-2836	37	66	motion	motion	NOUN
ajst-2836	37	67	motion	motion	NOUN
ajst-2836	37	68	control	control	NOUN
ajst-2836	37	69	platform	platform	NOUN
ajst-2836	37	70	controller	controller	NOUN
ajst-2836	37	71	figure	figure	NOUN
ajst-2836	37	72	2	2	NUM
ajst-2836	37	73	.	.	PUNCT
ajst-2836	37	74	structural	structural	ADJ
ajst-2836	37	75	composition	composition	NOUN
ajst-2836	37	76	and	and	CCONJ
ajst-2836	37	77	function	function	NOUN
ajst-2836	37	78	diagram	diagram	NOUN
ajst-2836	37	79	132	132	NUM
ajst-2836	37	80	4.2	4.2	NUM
ajst-2836	37	81	.	.	PUNCT
ajst-2836	38	1	experimental	experimental	ADJ
ajst-2836	38	2	results	result	NOUN
ajst-2836	38	3	and	and	CCONJ
ajst-2836	38	4	analysis	analysis	NOUN
ajst-2836	38	5	the	the	DET
ajst-2836	38	6	mounting	mount	VERB
ajst-2836	38	7	erection	erection	NOUN
ajst-2836	38	8	of	of	ADP
ajst-2836	38	9	the	the	DET
ajst-2836	38	10	seismic	seismic	ADJ
ajst-2836	38	11	isolation	isolation	NOUN
ajst-2836	38	12	support	support	NOUN
ajst-2836	38	13	skeleton	skeleton	NOUN
ajst-2836	38	14	plate	plate	NOUN
ajst-2836	38	15	and	and	CCONJ
ajst-2836	38	16	its	its	PRON
ajst-2836	38	17	laser	laser	NOUN
ajst-2836	38	18	sensor	sensor	NOUN
ajst-2836	38	19	in	in	ADP
ajst-2836	38	20	the	the	DET
ajst-2836	38	21	experiment	experiment	NOUN
ajst-2836	38	22	is	be	AUX
ajst-2836	38	23	shown	show	VERB
ajst-2836	38	24	in	in	ADP
ajst-2836	38	25	figure	figure	NOUN
ajst-2836	38	26	3	3	NUM
ajst-2836	38	27	.	.	PUNCT
ajst-2836	39	1	after	after	ADP
ajst-2836	39	2	scanning	scan	VERB
ajst-2836	39	3	by	by	ADP
ajst-2836	39	4	the	the	DET
ajst-2836	39	5	laser	laser	NOUN
ajst-2836	39	6	sensor	sensor	NOUN
ajst-2836	39	7	,	,	PUNCT
ajst-2836	39	8	the	the	DET
ajst-2836	39	9	scanned	scan	VERB
ajst-2836	39	10	skeleton	skeleton	NOUN
ajst-2836	39	11	plate	plate	NOUN
ajst-2836	39	12	image	image	NOUN
ajst-2836	39	13	and	and	CCONJ
ajst-2836	39	14	related	relate	VERB
ajst-2836	39	15	data	datum	NOUN
ajst-2836	39	16	need	need	VERB
ajst-2836	39	17	to	to	PART
ajst-2836	39	18	be	be	AUX
ajst-2836	39	19	processed	process	VERB
ajst-2836	39	20	,	,	PUNCT
ajst-2836	39	21	the	the	DET
ajst-2836	39	22	detection	detection	NOUN
ajst-2836	39	23	image	image	NOUN
ajst-2836	39	24	is	be	AUX
ajst-2836	39	25	shown	show	VERB
ajst-2836	39	26	in	in	ADP
ajst-2836	39	27	figure	figure	NOUN
ajst-2836	39	28	4	4	NUM
ajst-2836	39	29	,	,	PUNCT
ajst-2836	39	30	and	and	CCONJ
ajst-2836	39	31	the	the	DET
ajst-2836	39	32	image	image	NOUN
ajst-2836	39	33	analysis	analysis	NOUN
ajst-2836	39	34	uses	use	VERB
ajst-2836	39	35	its	its	PRON
ajst-2836	39	36	own	own	ADJ
ajst-2836	39	37	plane	plane	NOUN
ajst-2836	39	38	to	to	PART
ajst-2836	39	39	simulate	simulate	VERB
ajst-2836	39	40	a	a	DET
ajst-2836	39	41	reasonable	reasonable	ADJ
ajst-2836	39	42	plane	plane	NOUN
ajst-2836	39	43	,	,	PUNCT
ajst-2836	39	44	measure	measure	VERB
ajst-2836	39	45	the	the	DET
ajst-2836	39	46	maximum	maximum	ADJ
ajst-2836	39	47	and	and	CCONJ
ajst-2836	39	48	minimum	minimum	ADJ
ajst-2836	39	49	heights	height	NOUN
ajst-2836	39	50	,	,	PUNCT
ajst-2836	39	51	and	and	CCONJ
ajst-2836	39	52	subtract	subtract	VERB
ajst-2836	39	53	to	to	PART
ajst-2836	39	54	obtain	obtain	VERB
ajst-2836	39	55	flatness	flatness	NOUN
ajst-2836	39	56	.	.	PUNCT
ajst-2836	40	1	figure	figure	NOUN
ajst-2836	40	2	3	3	NUM
ajst-2836	40	3	.	.	X
ajst-2836	40	4	skeleton	skeleton	NOUN
ajst-2836	40	5	plate	plate	NOUN
ajst-2836	40	6	flatness	flatness	NOUN
ajst-2836	40	7	detection	detection	NOUN
ajst-2836	40	8	installation	installation	NOUN
ajst-2836	40	9	erection	erection	NOUN
ajst-2836	40	10	diagram	diagram	NOUN
ajst-2836	40	11	figure	figure	NOUN
ajst-2836	40	12	4	4	NUM
ajst-2836	40	13	.	.	PUNCT
ajst-2836	40	14	skeleton	skeleton	NOUN
ajst-2836	40	15	plate	plate	NOUN
ajst-2836	40	16	flatness	flatness	NOUN
ajst-2836	40	17	detection	detection	NOUN
ajst-2836	40	18	image	image	NOUN
ajst-2836	40	19	the	the	DET
ajst-2836	40	20	experimental	experimental	ADJ
ajst-2836	40	21	results	result	NOUN
ajst-2836	40	22	are	be	AUX
ajst-2836	40	23	shown	show	VERB
ajst-2836	40	24	in	in	ADP
ajst-2836	40	25	table	table	NOUN
ajst-2836	40	26	2	2	NUM
ajst-2836	40	27	.	.	PUNCT
ajst-2836	41	1	the	the	DET
ajst-2836	41	2	average	average	ADJ
ajst-2836	41	3	flatness	flatness	NOUN
ajst-2836	41	4	of	of	ADP
ajst-2836	41	5	scheme	scheme	NOUN
ajst-2836	41	6	1	1	NUM
ajst-2836	41	7	is	be	AUX
ajst-2836	41	8	3.2683	3.2683	NUM
ajst-2836	41	9	mm	mm	NOUN
ajst-2836	41	10	,	,	PUNCT
ajst-2836	41	11	the	the	DET
ajst-2836	41	12	maximum	maximum	ADJ
ajst-2836	41	13	value	value	NOUN
ajst-2836	41	14	is	be	AUX
ajst-2836	41	15	3.295	3.295	NUM
ajst-2836	41	16	mm	mm	NOUN
ajst-2836	41	17	,	,	PUNCT
ajst-2836	41	18	the	the	DET
ajst-2836	41	19	minimum	minimum	ADJ
ajst-2836	41	20	value	value	NOUN
ajst-2836	41	21	is	be	AUX
ajst-2836	41	22	3.222	3.222	NUM
ajst-2836	41	23	mm	mm	NOUN
ajst-2836	41	24	,	,	PUNCT
ajst-2836	41	25	and	and	CCONJ
ajst-2836	41	26	the	the	DET
ajst-2836	41	27	repeatability	repeatability	NOUN
ajst-2836	41	28	is	be	AUX
ajst-2836	41	29	0.073	0.073	NUM
ajst-2836	41	30	mm	mm	NOUN
ajst-2836	41	31	;	;	PUNCT
ajst-2836	41	32	the	the	DET
ajst-2836	41	33	average	average	ADJ
ajst-2836	41	34	flatness	flatness	NOUN
ajst-2836	41	35	of	of	ADP
ajst-2836	41	36	scheme	scheme	NOUN
ajst-2836	41	37	2	2	NUM
ajst-2836	41	38	is	be	AUX
ajst-2836	41	39	2.8762	2.8762	NUM
ajst-2836	41	40	mm	mm	NOUN
ajst-2836	41	41	,	,	PUNCT
ajst-2836	41	42	the	the	DET
ajst-2836	41	43	maximum	maximum	ADJ
ajst-2836	41	44	value	value	NOUN
ajst-2836	41	45	is	be	AUX
ajst-2836	41	46	2.895	2.895	NUM
ajst-2836	41	47	mm	mm	NOUN
ajst-2836	41	48	,	,	PUNCT
ajst-2836	41	49	the	the	DET
ajst-2836	41	50	minimum	minimum	ADJ
ajst-2836	41	51	value	value	NOUN
ajst-2836	41	52	is	be	AUX
ajst-2836	41	53	2.851	2.851	NUM
ajst-2836	41	54	mm	mm	NOUN
ajst-2836	41	55	,	,	PUNCT
ajst-2836	41	56	and	and	CCONJ
ajst-2836	41	57	the	the	DET
ajst-2836	41	58	repeatability	repeatability	NOUN
ajst-2836	41	59	is	be	AUX
ajst-2836	41	60	0.044	0.044	NUM
ajst-2836	41	61	mm	mm	NOUN
ajst-2836	41	62	.	.	PUNCT
ajst-2836	42	1	therefore	therefore	ADV
ajst-2836	42	2	,	,	PUNCT
ajst-2836	42	3	the	the	DET
ajst-2836	42	4	laser	laser	NOUN
ajst-2836	42	5	sensor	sensor	NOUN
ajst-2836	42	6	can	can	AUX
ajst-2836	42	7	well	well	ADV
ajst-2836	42	8	realize	realize	VERB
ajst-2836	42	9	the	the	DET
ajst-2836	42	10	flatness	flatness	NOUN
ajst-2836	42	11	detection	detection	NOUN
ajst-2836	42	12	of	of	ADP
ajst-2836	42	13	the	the	DET
ajst-2836	42	14	skeleton	skeleton	NOUN
ajst-2836	42	15	plate	plate	NOUN
ajst-2836	42	16	.	.	PUNCT
ajst-2836	43	1	in	in	ADP
ajst-2836	43	2	addition	addition	NOUN
ajst-2836	43	3	,	,	PUNCT
ajst-2836	43	4	the	the	DET
ajst-2836	43	5	laser	laser	NOUN
ajst-2836	43	6	sensor	sensor	NOUN
ajst-2836	43	7	detection	detection	NOUN
ajst-2836	43	8	has	have	VERB
ajst-2836	43	9	the	the	DET
ajst-2836	43	10	characteristics	characteristic	NOUN
ajst-2836	43	11	of	of	ADP
ajst-2836	43	12	fast	fast	ADJ
ajst-2836	43	13	measurement	measurement	NOUN
ajst-2836	43	14	speed	speed	NOUN
ajst-2836	43	15	,	,	PUNCT
ajst-2836	43	16	high	high	ADJ
ajst-2836	43	17	accuracy	accuracy	NOUN
ajst-2836	43	18	,	,	PUNCT
ajst-2836	43	19	large	large	ADJ
ajst-2836	43	20	measurement	measurement	NOUN
ajst-2836	43	21	range	range	NOUN
ajst-2836	43	22	and	and	CCONJ
ajst-2836	43	23	low	low	ADJ
ajst-2836	43	24	environmental	environmental	ADJ
ajst-2836	43	25	impact	impact	NOUN
ajst-2836	43	26	,	,	PUNCT
ajst-2836	43	27	and	and	CCONJ
ajst-2836	43	28	can	can	AUX
ajst-2836	43	29	complete	complete	VERB
ajst-2836	43	30	the	the	DET
ajst-2836	43	31	flatness	flatness	NOUN
ajst-2836	43	32	detection	detection	NOUN
ajst-2836	43	33	task	task	NOUN
ajst-2836	43	34	of	of	ADP
ajst-2836	43	35	the	the	DET
ajst-2836	43	36	predetermined	predetermined	ADJ
ajst-2836	43	37	function	function	NOUN
ajst-2836	43	38	.	.	PUNCT
ajst-2836	44	1	table	table	NOUN
ajst-2836	44	2	2	2	NUM
ajst-2836	44	3	.	.	X
ajst-2836	44	4	experimental	experimental	ADJ
ajst-2836	44	5	test	test	NOUN
ajst-2836	44	6	results	result	VERB
ajst-2836	44	7	serial	serial	ADJ
ajst-2836	44	8	number	number	NOUN
ajst-2836	44	9	scheme	scheme	NOUN
ajst-2836	44	10	1	1	NUM
ajst-2836	44	11	detects	detect	NOUN
ajst-2836	44	12	flatness	flatness	NOUN
ajst-2836	44	13	values	value	NOUN
ajst-2836	44	14	scheme	scheme	VERB
ajst-2836	44	15	2	2	NUM
ajst-2836	44	16	detects	detect	NOUN
ajst-2836	44	17	flatness	flatness	NOUN
ajst-2836	44	18	values	value	VERB
ajst-2836	44	19	1	1	NUM
ajst-2836	44	20	3.295	3.295	NUM
ajst-2836	44	21	2.889	2.889	NUM
ajst-2836	44	22	2	2	NUM
ajst-2836	44	23	3.271	3.271	NUM
ajst-2836	44	24	2.895	2.895	NUM
ajst-2836	44	25	3	3	NUM
ajst-2836	44	26	3.271	3.271	NUM
ajst-2836	44	27	2.889	2.889	NUM
ajst-2836	44	28	4	4	NUM
ajst-2836	44	29	3.246	3.246	NUM
ajst-2836	44	30	2.859	2.859	NUM
ajst-2836	44	31	5	5	NUM
ajst-2836	44	32	3.271	3.271	NUM
ajst-2836	44	33	2.885	2.885	NUM
ajst-2836	44	34	6	6	NUM
ajst-2836	44	35	3.246	3.246	NUM
ajst-2836	44	36	2.871	2.871	NUM
ajst-2836	44	37	7	7	NUM
ajst-2836	44	38	3.295	3.295	NUM
ajst-2836	44	39	2.884	2.884	NUM
ajst-2836	44	40	8	8	NUM
ajst-2836	44	41	3.295	3.295	NUM
ajst-2836	44	42	2.876	2.876	NUM
ajst-2836	44	43	9	9	NUM
ajst-2836	44	44	3.271	3.271	NUM
ajst-2836	44	45	2.851	2.851	NUM
ajst-2836	44	46	10	10	NUM
ajst-2836	44	47	3.222	3.222	NUM
ajst-2836	44	48	2.863	2.863	NUM
ajst-2836	44	49	repeatability	repeatability	NOUN
ajst-2836	44	50	0.073	0.073	NUM
ajst-2836	44	51	0.044	0.044	NUM
ajst-2836	44	52	5	5	NUM
ajst-2836	44	53	.	.	PUNCT
ajst-2836	44	54	conclusion	conclusion	NOUN
ajst-2836	44	55	according	accord	VERB
ajst-2836	44	56	to	to	ADP
ajst-2836	44	57	the	the	DET
ajst-2836	44	58	characteristics	characteristic	NOUN
ajst-2836	44	59	of	of	ADP
ajst-2836	44	60	the	the	DET
ajst-2836	44	61	seismic	seismic	ADJ
ajst-2836	44	62	isolation	isolation	NOUN
ajst-2836	44	63	support	support	NOUN
ajst-2836	44	64	skeleton	skeleton	NOUN
ajst-2836	44	65	plate	plate	NOUN
ajst-2836	44	66	,	,	PUNCT
ajst-2836	44	67	the	the	DET
ajst-2836	44	68	data	data	NOUN
ajst-2836	44	69	information	information	NOUN
ajst-2836	44	70	of	of	ADP
ajst-2836	44	71	the	the	DET
ajst-2836	44	72	skeleton	skeleton	NOUN
ajst-2836	44	73	plate	plate	NOUN
ajst-2836	44	74	plane	plane	NOUN
ajst-2836	44	75	is	be	AUX
ajst-2836	44	76	obtained	obtain	VERB
ajst-2836	44	77	by	by	ADP
ajst-2836	44	78	laser	laser	NOUN
ajst-2836	44	79	sensor	sensor	NOUN
ajst-2836	44	80	scanning	scanning	NOUN
ajst-2836	44	81	,	,	PUNCT
ajst-2836	44	82	and	and	CCONJ
ajst-2836	44	83	then	then	ADV
ajst-2836	44	84	the	the	DET
ajst-2836	44	85	flatness	flatness	NOUN
ajst-2836	44	86	value	value	NOUN
ajst-2836	44	87	is	be	AUX
ajst-2836	44	88	accurately	accurately	ADV
ajst-2836	44	89	calculated	calculate	VERB
ajst-2836	44	90	.	.	PUNCT
ajst-2836	45	1	since	since	SCONJ
ajst-2836	45	2	computers	computer	NOUN
ajst-2836	45	3	and	and	CCONJ
ajst-2836	45	4	related	relate	VERB
ajst-2836	45	5	programs	program	NOUN
ajst-2836	45	6	are	be	AUX
ajst-2836	45	7	widely	widely	ADV
ajst-2836	45	8	used	use	VERB
ajst-2836	45	9	and	and	CCONJ
ajst-2836	45	10	can	can	AUX
ajst-2836	45	11	be	be	AUX
ajst-2836	45	12	calculated	calculate	VERB
ajst-2836	45	13	quickly	quickly	ADV
ajst-2836	45	14	,	,	PUNCT
ajst-2836	45	15	especially	especially	ADV
ajst-2836	45	16	when	when	SCONJ
ajst-2836	45	17	measuring	measure	VERB
ajst-2836	45	18	large	large	ADJ
ajst-2836	45	19	planes	plane	NOUN
ajst-2836	45	20	,	,	PUNCT
ajst-2836	45	21	the	the	DET
ajst-2836	45	22	number	number	NOUN
ajst-2836	45	23	of	of	ADP
ajst-2836	45	24	data	datum	NOUN
ajst-2836	45	25	points	point	NOUN
ajst-2836	45	26	is	be	AUX
ajst-2836	45	27	large	large	ADJ
ajst-2836	45	28	enough	enough	ADV
ajst-2836	45	29	,	,	PUNCT
ajst-2836	45	30	and	and	CCONJ
ajst-2836	45	31	the	the	DET
ajst-2836	45	32	advantages	advantage	NOUN
ajst-2836	45	33	of	of	ADP
ajst-2836	45	34	this	this	DET
ajst-2836	45	35	algorithm	algorithm	NOUN
ajst-2836	45	36	will	will	AUX
ajst-2836	45	37	be	be	AUX
ajst-2836	45	38	further	far	ADV
ajst-2836	45	39	reflected	reflect	VERB
ajst-2836	45	40	.	.	PUNCT
ajst-2836	46	1	the	the	DET
ajst-2836	46	2	flatness	flatness	NOUN
ajst-2836	46	3	of	of	ADP
ajst-2836	46	4	the	the	DET
ajst-2836	46	5	skeleton	skeleton	NOUN
ajst-2836	46	6	plate	plate	NOUN
ajst-2836	46	7	is	be	AUX
ajst-2836	46	8	closely	closely	ADV
ajst-2836	46	9	related	relate	VERB
ajst-2836	46	10	to	to	ADP
ajst-2836	46	11	the	the	DET
ajst-2836	46	12	safety	safety	NOUN
ajst-2836	46	13	assessment	assessment	NOUN
ajst-2836	46	14	of	of	ADP
ajst-2836	46	15	seismic	seismic	ADJ
ajst-2836	46	16	isolation	isolation	NOUN
ajst-2836	46	17	support	support	NOUN
ajst-2836	46	18	,	,	PUNCT
ajst-2836	46	19	and	and	CCONJ
ajst-2836	46	20	has	have	VERB
ajst-2836	46	21	a	a	DET
ajst-2836	46	22	certain	certain	ADJ
ajst-2836	46	23	degree	degree	NOUN
ajst-2836	46	24	of	of	ADP
ajst-2836	46	25	social	social	ADJ
ajst-2836	46	26	value	value	NOUN
ajst-2836	46	27	and	and	CCONJ
ajst-2836	46	28	practical	practical	ADJ
ajst-2836	46	29	significance	significance	NOUN
ajst-2836	46	30	.	.	PUNCT
ajst-2836	47	1	acknowledgment	acknowledgment	NOUN
ajst-2836	47	2	the	the	DET
ajst-2836	47	3	thesis	thesis	NOUN
ajst-2836	47	4	is	be	AUX
ajst-2836	47	5	supported	support	VERB
ajst-2836	47	6	by	by	ADP
ajst-2836	47	7	tianjin	tianjin	PROPN
ajst-2836	47	8	key	key	PROPN
ajst-2836	47	9	laboratory	laboratory	NOUN
ajst-2836	47	10	of	of	ADP
ajst-2836	47	11	intelligent	intelligent	ADJ
ajst-2836	47	12	robot	robot	NOUN
ajst-2836	47	13	technology	technology	NOUN
ajst-2836	47	14	and	and	CCONJ
ajst-2836	47	15	application	application	NOUN
ajst-2836	47	16	,	,	PUNCT
ajst-2836	47	17	tianjin	tianjin	PROPN
ajst-2836	47	18	bonus	bonus	PROPN
ajst-2836	47	19	robotics	robotics	PROPN
ajst-2836	47	20	technology	technology	PROPN
ajst-2836	47	21	co.	co.	PROPN
ajst-2836	47	22	,	,	PUNCT
ajst-2836	47	23	ltd	ltd	PROPN
ajst-2836	47	24	,	,	PUNCT
ajst-2836	47	25	school	school	NOUN
ajst-2836	47	26	level	level	NOUN
ajst-2836	47	27	project	project	NOUN
ajst-2836	47	28	of	of	ADP
ajst-2836	47	29	tianjin	tianjin	PROPN
ajst-2836	47	30	vocational	vocational	PROPN
ajst-2836	47	31	and	and	CCONJ
ajst-2836	47	32	technical	technical	ADJ
ajst-2836	47	33	normal	normal	ADJ
ajst-2836	47	34	university	university	NOUN
ajst-2836	47	35	(	(	PUNCT
ajst-2836	47	36	kj2004	kj2004	PROPN
ajst-2836	47	37	)	)	PUNCT
ajst-2836	47	38	,	,	PUNCT
ajst-2836	47	39	jinnan	jinnan	PROPN
ajst-2836	47	40	district	district	NOUN
ajst-2836	47	41	"	"	PUNCT
ajst-2836	47	42	unveiling	unveil	VERB
ajst-2836	47	43	the	the	DET
ajst-2836	47	44	leader	leader	NOUN
ajst-2836	47	45	"	"	PUNCT
ajst-2836	47	46	science	science	NOUN
ajst-2836	47	47	and	and	CCONJ
ajst-2836	47	48	technology	technology	NOUN
ajst-2836	47	49	plan	plan	NOUN
ajst-2836	47	50	project	project	NOUN
ajst-2836	47	51	:	:	PUNCT
ajst-2836	47	52	development	development	NOUN
ajst-2836	47	53	and	and	CCONJ
ajst-2836	47	54	industrialization	industrialization	NOUN
ajst-2836	47	55	of	of	ADP
ajst-2836	47	56	general	general	ADJ
ajst-2836	47	57	chassis	chassis	NOUN
ajst-2836	47	58	system	system	NOUN
ajst-2836	47	59	for	for	ADP
ajst-2836	47	60	intelligent	intelligent	ADJ
ajst-2836	47	61	mobile	mobile	ADJ
ajst-2836	47	62	robots	robot	NOUN
ajst-2836	47	63	based	base	VERB
ajst-2836	47	64	on	on	ADP
ajst-2836	47	65	ros	ros	PROPN
ajst-2836	47	66	.	.	PUNCT
ajst-2836	48	1	references	reference	NOUN
ajst-2836	48	2	[	[	X
ajst-2836	48	3	1	1	NUM
ajst-2836	48	4	]	]	X
ajst-2836	48	5	liu	liu	PROPN
ajst-2836	48	6	guiping	guiping	PROPN
ajst-2836	48	7	.	.	PUNCT
ajst-2836	49	1	review	review	NOUN
ajst-2836	49	2	and	and	CCONJ
ajst-2836	49	3	prospect	prospect	NOUN
ajst-2836	49	4	of	of	ADP
ajst-2836	49	5	earthquake	earthquake	NOUN
ajst-2836	49	6	prediction	prediction	NOUN
ajst-2836	49	7	in	in	ADP
ajst-2836	49	8	china[j	china[j	PROPN
ajst-2836	49	9	]	]	PUNCT
ajst-2836	49	10	.	.	PUNCT
ajst-2836	50	1	urban	urban	ADJ
ajst-2836	50	2	and	and	CCONJ
ajst-2836	50	3	disaster	disaster	NOUN
ajst-2836	50	4	reduction	reduction	NOUN
ajst-2836	50	5	,	,	PUNCT
ajst-2836	50	6	2020(06):5	2020(06):5	NUM
ajst-2836	50	7	-	-	SYM
ajst-2836	50	8	9	9	NUM
ajst-2836	50	9	.	.	PUNCT
ajst-2836	51	1	[	[	X
ajst-2836	51	2	2	2	X
ajst-2836	51	3	]	]	X
ajst-2836	51	4	wang	wang	PROPN
ajst-2836	51	5	xiaojia	xiaojia	PROPN
ajst-2836	51	6	,	,	PUNCT
ajst-2836	51	7	gao	gao	PROPN
ajst-2836	51	8	jun	jun	PROPN
ajst-2836	51	9	,	,	PUNCT
ajst-2836	51	10	wang	wang	PROPN
ajst-2836	51	11	lei	lei	PROPN
ajst-2836	51	12	.	.	PROPN
ajst-2836	51	13	review	review	NOUN
ajst-2836	51	14	of	of	ADP
ajst-2836	51	15	laser	laser	NOUN
ajst-2836	51	16	triangulation[j	triangulation[j	PROPN
ajst-2836	51	17	]	]	X
ajst-2836	51	18	.	.	PUNCT
ajst-2836	52	1	chinese	chinese	ADJ
ajst-2836	52	2	journal	journal	PROPN
ajst-2836	52	3	of	of	ADP
ajst-2836	52	4	scientific	scientific	ADJ
ajst-2836	52	5	instrument	instrument	NOUN
ajst-2836	52	6	,	,	PUNCT
ajst-2836	52	7	2004(s2):601	2004(s2):601	NOUN
ajst-2836	52	8	-	-	NOUN
ajst-2836	52	9	604,608	604,608	NUM
ajst-2836	52	10	.	.	PUNCT
ajst-2836	53	1	[	[	X
ajst-2836	53	2	3	3	X
ajst-2836	53	3	]	]	X
ajst-2836	53	4	pierce	pierce	PROPN
ajst-2836	53	5	d.s	d.s	PROPN
ajst-2836	53	6	.	.	PROPN
ajst-2836	53	7	,	,	PUNCT
ajst-2836	53	8	ng	ng	PROPN
ajst-2836	53	9	t.s	t.s	PROPN
ajst-2836	53	10	.	.	PROPN
ajst-2836	53	11	,	,	PUNCT
ajst-2836	53	12	morrison	morrison	PROPN
ajst-2836	53	13	b.r	b.r	PROPN
ajst-2836	53	14	.	.	PROPN
ajst-2836	53	15	a	a	DET
ajst-2836	53	16	novel	novel	ADJ
ajst-2836	53	17	laser	laser	NOUN
ajst-2836	53	18	triangulation	triangulation	NOUN
ajst-2836	53	19	technique	technique	NOUN
ajst-2836	53	20	for	for	ADP
ajst-2836	53	21	high	high	ADJ
ajst-2836	53	22	precision	precision	NOUN
ajst-2836	53	23	distance	distance	NOUN
ajst-2836	53	24	measurement[j	measurement[j	NOUN
ajst-2836	53	25	]	]	PUNCT
ajst-2836	53	26	.	.	PUNCT
ajst-2836	54	1	industry	industry	NOUN
ajst-2836	54	2	applications	application	NOUN
ajst-2836	54	3	society	society	NOUN
ajst-2836	54	4	annual	annual	ADJ
ajst-2836	54	5	meeting	meeting	NOUN
ajst-2836	54	6	,	,	PUNCT
ajst-2836	54	7	1992(2):1762	1992(2):1762	PROPN
ajst-2836	54	8	-	-	PUNCT
ajst-2836	54	9	1769	1769	NUM
ajst-2836	54	10	.	.	PUNCT
ajst-2836	55	1	[	[	X
ajst-2836	55	2	4	4	NUM
ajst-2836	55	3	]	]	X
ajst-2836	55	4	zhou	zhou	PROPN
ajst-2836	55	5	jianping	jianping	NOUN
ajst-2836	55	6	,	,	PUNCT
ajst-2836	55	7	planarity	planarity	NOUN
ajst-2836	55	8	evaluation	evaluation	NOUN
ajst-2836	55	9	method	method	NOUN
ajst-2836	55	10	based	base	VERB
ajst-2836	55	11	on	on	ADP
ajst-2836	55	12	matlab	matlab	PROPN
ajst-2836	55	13	and	and	CCONJ
ajst-2836	55	14	regression	regression	VERB
ajst-2836	55	15	analysis[j	analysis[j	PROPN
ajst-2836	55	16	]	]	PUNCT
ajst-2836	55	17	.	.	PUNCT
ajst-2836	56	1	ordnance	ordnance	NOUN
ajst-2836	56	2	automation	automation	NOUN
ajst-2836	56	3	,	,	PUNCT
ajst-2836	56	4	2006(01):27	2006(01):27	NUM
ajst-2836	56	5	-	-	SYM
ajst-2836	56	6	28	28	NUM
ajst-2836	56	7	.	.	PUNCT
ajst-2836	57	1	[	[	X
ajst-2836	57	2	5	5	NUM
ajst-2836	57	3	]	]	X
ajst-2836	57	4	zhang	zhang	X
ajst-2836	57	5	fang	fang	X
ajst-2836	57	6	,	,	PUNCT
ajst-2836	57	7	least	least	ADJ
ajst-2836	57	8	squares	square	VERB
ajst-2836	57	9	analysis	analysis	NOUN
ajst-2836	57	10	of	of	ADP
ajst-2836	57	11	flatness	flatness	NOUN
ajst-2836	57	12	error[j	error[j	PROPN
ajst-2836	57	13	]	]	PUNCT
ajst-2836	57	14	.	.	PUNCT
ajst-2836	58	1	machinery	machinery	NOUN
ajst-2836	58	2	manufacturing	manufacturing	NOUN
ajst-2836	58	3	and	and	CCONJ
ajst-2836	58	4	automation	automation	NOUN
ajst-2836	58	5	.	.	PUNCT
ajst-2836	59	1	2002(03):17	2002(03):17	NUM
ajst-2836	59	2	-	-	SYM
ajst-2836	59	3	19	19	NUM
ajst-2836	59	4	.	.	PUNCT
ajst-2836	60	1	133	133	NUM
ajst-2836	61	1	[	[	X
ajst-2836	61	2	6	6	NUM
ajst-2836	61	3	]	]	X
ajst-2836	61	4	luo	luo	PROPN
ajst-2836	61	5	shengbin	shengbin	NOUN
ajst-2836	61	6	,	,	PUNCT
ajst-2836	61	7	song	song	NOUN
ajst-2836	61	8	chunhua	chunhua	PROPN
ajst-2836	61	9	,	,	PUNCT
ajst-2836	61	10	wei	wei	PROPN
ajst-2836	61	11	xingping	xingping	PROPN
ajst-2836	61	12	,	,	PUNCT
ajst-2836	61	13	et	et	PROPN
ajst-2836	61	14	al	al	PROPN
ajst-2836	61	15	.	.	PROPN
ajst-2836	61	16	review	review	PROPN
ajst-2836	61	17	of	of	ADP
ajst-2836	61	18	development	development	NOUN
ajst-2836	61	19	of	of	ADP
ajst-2836	61	20	non	non	ADJ
ajst-2836	61	21	-	-	ADJ
ajst-2836	61	22	contact	contact	ADJ
ajst-2836	61	23	measurement	measurement	NOUN
ajst-2836	61	24	technology[j	technology[j	NOUN
ajst-2836	61	25	]	]	PUNCT
ajst-2836	61	26	.	.	PUNCT
ajst-2836	62	1	machine	machine	NOUN
ajst-2836	62	2	tool	tool	PROPN
ajst-2836	62	3	&	&	CCONJ
ajst-2836	62	4	hydraulics	hydraulic	NOUN
ajst-2836	62	5	,	,	PUNCT
ajst-2836	62	6	2013(23):150	2013(23):150	NUM
ajst-2836	62	7	-	-	SYM
ajst-2836	62	8	153	153	NUM
ajst-2836	62	9	.	.	PUNCT
ajst-2836	63	1	[	[	X
ajst-2836	63	2	7	7	X
ajst-2836	63	3	]	]	X
ajst-2836	63	4	qin	qin	PROPN
ajst-2836	63	5	yu	yu	PROPN
ajst-2836	63	6	.	.	PROPN
ajst-2836	63	7	research	research	NOUN
ajst-2836	63	8	on	on	ADP
ajst-2836	63	9	three	three	NUM
ajst-2836	63	10	-	-	PUNCT
ajst-2836	63	11	dimensional	dimensional	ADJ
ajst-2836	63	12	measurement	measurement	NOUN
ajst-2836	63	13	technology	technology	NOUN
ajst-2836	63	14	of	of	ADP
ajst-2836	63	15	elevator	elevator	NOUN
ajst-2836	63	16	guide	guide	NOUN
ajst-2836	63	17	rail	rail	NOUN
ajst-2836	63	18	based	base	VERB
ajst-2836	63	19	on	on	ADP
ajst-2836	63	20	binocular	binocular	ADJ
ajst-2836	63	21	vision[d	vision[d	NOUN
ajst-2836	63	22	]	]	PUNCT
ajst-2836	63	23	.	.	PUNCT
ajst-2836	64	1	wuxi	wuxi	PROPN
ajst-2836	64	2	:	:	PUNCT
ajst-2836	64	3	jiangnan	jiangnan	PROPN
ajst-2836	64	4	university	university	PROPN
ajst-2836	64	5	,	,	PUNCT
ajst-2836	64	6	2017	2017	NUM
ajst-2836	64	7	.	.	PUNCT
ajst-2836	65	1	[	[	X
ajst-2836	65	2	8	8	NUM
ajst-2836	65	3	]	]	X
ajst-2836	65	4	wei	wei	PROPN
ajst-2836	65	5	xiaomei	xiaomei	PROPN
ajst-2836	65	6	.	.	PUNCT
ajst-2836	66	1	research	research	NOUN
ajst-2836	66	2	on	on	ADP
ajst-2836	66	3	two	two	NUM
ajst-2836	66	4	-	-	PUNCT
ajst-2836	66	5	dimensional	dimensional	ADJ
ajst-2836	66	6	laser	laser	NOUN
ajst-2836	66	7	displacement	displacement	NOUN
ajst-2836	66	8	measurement	measurement	NOUN
ajst-2836	66	9	technology	technology	NOUN
ajst-2836	66	10	based	base	VERB
ajst-2836	66	11	on	on	ADP
ajst-2836	66	12	fpga	fpga	PROPN
ajst-2836	66	13	and	and	CCONJ
ajst-2836	66	14	arm[d	arm[d	PROPN
ajst-2836	66	15	]	]	PUNCT
ajst-2836	66	16	.	.	PUNCT
ajst-2836	67	1	harbin	harbin	PROPN
ajst-2836	67	2	:	:	PUNCT
ajst-2836	67	3	harbin	harbin	PROPN
ajst-2836	67	4	institute	institute	PROPN
ajst-2836	67	5	of	of	ADP
ajst-2836	67	6	technology	technology	PROPN
ajst-2836	67	7	,	,	PUNCT
ajst-2836	67	8	2014	2014	NUM
ajst-2836	67	9	.	.	PUNCT
ajst-2836	68	1	[	[	X
ajst-2836	68	2	9	9	NUM
ajst-2836	68	3	]	]	X
ajst-2836	68	4	zhang	zhang	PROPN
ajst-2836	68	5	hao	hao	PROPN
ajst-2836	68	6	.	.	PUNCT
ajst-2836	68	7	research	research	NOUN
ajst-2836	68	8	on	on	ADP
ajst-2836	68	9	digital	digital	ADJ
ajst-2836	68	10	detection	detection	NOUN
ajst-2836	68	11	and	and	CCONJ
ajst-2836	68	12	evaluation	evaluation	NOUN
ajst-2836	68	13	algorithm	algorithm	NOUN
ajst-2836	68	14	of	of	ADP
ajst-2836	68	15	flatness	flatness	PROPN
ajst-2836	68	16	error[d	error[d	PROPN
ajst-2836	68	17	]	]	PUNCT
ajst-2836	68	18	.	.	PUNCT
ajst-2836	69	1	changsha	changsha	PROPN
ajst-2836	69	2	:	:	PUNCT
ajst-2836	69	3	hunan	hunan	PROPN
ajst-2836	69	4	university	university	PROPN
ajst-2836	69	5	,	,	PUNCT
ajst-2836	69	6	2016	2016	NUM
ajst-2836	69	7	.	.	PUNCT
ajst-2836	70	1	[	[	X
ajst-2836	70	2	10	10	NUM
ajst-2836	70	3	]	]	X
ajst-2836	70	4	dong	dong	PROPN
ajst-2836	70	5	xuepeng	xuepeng	PROPN
ajst-2836	70	6	.	.	PUNCT
ajst-2836	71	1	research	research	NOUN
ajst-2836	71	2	on	on	ADP
ajst-2836	71	3	non	non	ADJ
ajst-2836	71	4	-	-	ADJ
ajst-2836	71	5	contact	contact	ADJ
ajst-2836	71	6	flatness	flatness	NOUN
ajst-2836	71	7	error	error	NOUN
ajst-2836	71	8	detection	detection	NOUN
ajst-2836	71	9	system	system	NOUN
ajst-2836	71	10	for	for	ADP
ajst-2836	71	11	elevator	elevator	NOUN
ajst-2836	71	12	hall	hall	PROPN
ajst-2836	71	13	door[d	door[d	PROPN
ajst-2836	71	14	]	]	PUNCT
ajst-2836	71	15	.	.	PUNCT
ajst-2836	72	1	hebei	hebei	PROPN
ajst-2836	72	2	university	university	PROPN
ajst-2836	72	3	of	of	ADP
ajst-2836	72	4	technology,2017	technology,2017	ADJ
ajst-2836	72	5	.	.	PUNCT