id	sid	tid	token	lemma	pos
ajst-32384	1	1	117	117	NUM
ajst-32384	1	2	research	research	NOUN
ajst-32384	1	3	status	status	NOUN
ajst-32384	1	4	and	and	CCONJ
ajst-32384	1	5	prospects	prospect	NOUN
ajst-32384	1	6	of	of	ADP
ajst-32384	1	7	voice	voice	NOUN
ajst-32384	1	8	coil	coil	NOUN
ajst-32384	1	9	motor	motor	PROPN
ajst-32384	1	10	control	control	PROPN
ajst-32384	1	11	technology	technology	PROPN
ajst-32384	1	12	zhonghao	zhonghao	PROPN
ajst-32384	1	13	chen	chen	PROPN
ajst-32384	2	1	*	*	PUNCT
ajst-32384	2	2	department	department	PROPN
ajst-32384	2	3	of	of	ADP
ajst-32384	2	4	qingdao	qingdao	PROPN
ajst-32384	2	5	university	university	PROPN
ajst-32384	2	6	of	of	ADP
ajst-32384	2	7	science	science	NOUN
ajst-32384	2	8	and	and	CCONJ
ajst-32384	2	9	technology	technology	NOUN
ajst-32384	2	10	,	,	PUNCT
ajst-32384	2	11	qingdao	qingdao	PROPN
ajst-32384	2	12	,	,	PUNCT
ajst-32384	2	13	china	china	PROPN
ajst-32384	2	14	*	*	PUNCT
ajst-32384	2	15	corresponding	correspond	VERB
ajst-32384	2	16	author	author	NOUN
ajst-32384	2	17	email	email	NOUN
ajst-32384	2	18	:	:	PUNCT
ajst-32384	3	1	chenzhonghao11@gmail.com	chenzhonghao11@gmail.com	X
ajst-32384	3	2	abstract	abstract	ADJ
ajst-32384	3	3	.	.	PUNCT
ajst-32384	4	1	the	the	DET
ajst-32384	4	2	voice	voice	NOUN
ajst-32384	4	3	coil	coil	NOUN
ajst-32384	4	4	motor	motor	PROPN
ajst-32384	4	5	(	(	PUNCT
ajst-32384	4	6	vcm	vcm	PROPN
ajst-32384	4	7	)	)	PUNCT
ajst-32384	4	8	represents	represent	VERB
ajst-32384	4	9	a	a	DET
ajst-32384	4	10	unique	unique	ADJ
ajst-32384	4	11	type	type	NOUN
ajst-32384	4	12	of	of	ADP
ajst-32384	4	13	direct	direct	ADJ
ajst-32384	4	14	-	-	PUNCT
ajst-32384	4	15	drive	drive	NOUN
ajst-32384	4	16	motor	motor	NOUN
ajst-32384	4	17	,	,	PUNCT
ajst-32384	4	18	named	name	VERB
ajst-32384	4	19	for	for	ADP
ajst-32384	4	20	its	its	PRON
ajst-32384	4	21	operational	operational	ADJ
ajst-32384	4	22	principle	principle	NOUN
ajst-32384	4	23	.	.	PUNCT
ajst-32384	5	1	its	its	PRON
ajst-32384	5	2	working	work	VERB
ajst-32384	5	3	mechanism	mechanism	NOUN
ajst-32384	5	4	resembles	resemble	VERB
ajst-32384	5	5	that	that	PRON
ajst-32384	5	6	of	of	ADP
ajst-32384	5	7	a	a	DET
ajst-32384	5	8	loudspeaker	loudspeaker	NOUN
ajst-32384	5	9	diaphragm	diaphragm	NOUN
ajst-32384	5	10	,	,	PUNCT
ajst-32384	5	11	wherein	wherein	SCONJ
ajst-32384	5	12	a	a	DET
ajst-32384	5	13	voice	voice	NOUN
ajst-32384	5	14	coil	coil	NOUN
ajst-32384	5	15	generates	generate	VERB
ajst-32384	5	16	motion	motion	NOUN
ajst-32384	5	17	through	through	ADP
ajst-32384	5	18	the	the	DET
ajst-32384	5	19	application	application	NOUN
ajst-32384	5	20	of	of	ADP
ajst-32384	5	21	a	a	DET
ajst-32384	5	22	controlled	control	VERB
ajst-32384	5	23	electric	electric	ADJ
ajst-32384	5	24	current	current	NOUN
ajst-32384	5	25	.	.	PUNCT
ajst-32384	6	1	the	the	DET
ajst-32384	6	2	fundamental	fundamental	ADJ
ajst-32384	6	3	principle	principle	NOUN
ajst-32384	6	4	involves	involve	VERB
ajst-32384	6	5	a	a	DET
ajst-32384	6	6	current	current	ADJ
ajst-32384	6	7	-	-	PUNCT
ajst-32384	6	8	carrying	carry	VERB
ajst-32384	6	9	conductor	conductor	NOUN
ajst-32384	6	10	producing	produce	VERB
ajst-32384	6	11	force	force	NOUN
ajst-32384	6	12	within	within	ADP
ajst-32384	6	13	a	a	DET
ajst-32384	6	14	magnetic	magnetic	ADJ
ajst-32384	6	15	field	field	NOUN
ajst-32384	6	16	,	,	PUNCT
ajst-32384	6	17	with	with	ADP
ajst-32384	6	18	the	the	DET
ajst-32384	6	19	magnitude	magnitude	NOUN
ajst-32384	6	20	of	of	ADP
ajst-32384	6	21	the	the	DET
ajst-32384	6	22	force	force	NOUN
ajst-32384	6	23	directly	directly	ADV
ajst-32384	6	24	proportional	proportional	ADJ
ajst-32384	6	25	to	to	ADP
ajst-32384	6	26	the	the	DET
ajst-32384	6	27	input	input	NOUN
ajst-32384	6	28	current	current	ADJ
ajst-32384	6	29	.	.	PUNCT
ajst-32384	7	1	the	the	DET
ajst-32384	7	2	resulting	result	VERB
ajst-32384	7	3	motion	motion	NOUN
ajst-32384	7	4	is	be	AUX
ajst-32384	7	5	typically	typically	ADV
ajst-32384	7	6	linear	linear	ADJ
ajst-32384	7	7	or	or	CCONJ
ajst-32384	7	8	follows	follow	VERB
ajst-32384	7	9	an	an	DET
ajst-32384	7	10	arc	arc	NOUN
ajst-32384	7	11	trajectory	trajectory	NOUN
ajst-32384	7	12	.	.	PUNCT
ajst-32384	8	1	as	as	ADP
ajst-32384	8	2	a	a	DET
ajst-32384	8	3	distinct	distinct	ADJ
ajst-32384	8	4	variant	variant	NOUN
ajst-32384	8	5	of	of	ADP
ajst-32384	8	6	linear	linear	PROPN
ajst-32384	8	7	motors	motor	NOUN
ajst-32384	8	8	,	,	PUNCT
ajst-32384	8	9	the	the	DET
ajst-32384	8	10	vcm	vcm	PROPN
ajst-32384	8	11	features	feature	VERB
ajst-32384	8	12	a	a	DET
ajst-32384	8	13	coreless	coreless	NOUN
ajst-32384	8	14	design	design	NOUN
ajst-32384	8	15	and	and	CCONJ
ajst-32384	8	16	operates	operate	VERB
ajst-32384	8	17	without	without	ADP
ajst-32384	8	18	a	a	DET
ajst-32384	8	19	traditional	traditional	ADJ
ajst-32384	8	20	transmission	transmission	NOUN
ajst-32384	8	21	system	system	NOUN
ajst-32384	8	22	.	.	PUNCT
ajst-32384	9	1	this	this	DET
ajst-32384	9	2	structural	structural	ADJ
ajst-32384	9	3	simplification	simplification	NOUN
ajst-32384	9	4	enhances	enhance	VERB
ajst-32384	9	5	system	system	NOUN
ajst-32384	9	6	compactness	compactness	NOUN
ajst-32384	9	7	and	and	CCONJ
ajst-32384	9	8	reduces	reduce	VERB
ajst-32384	9	9	mechanical	mechanical	ADJ
ajst-32384	9	10	complexity	complexity	NOUN
ajst-32384	9	11	.	.	PUNCT
ajst-32384	10	1	additionally	additionally	ADV
ajst-32384	10	2	,	,	PUNCT
ajst-32384	10	3	vcms	vcms	NOUN
ajst-32384	10	4	offer	offer	VERB
ajst-32384	10	5	numerous	numerous	ADJ
ajst-32384	10	6	advantages	advantage	NOUN
ajst-32384	10	7	,	,	PUNCT
ajst-32384	10	8	including	include	VERB
ajst-32384	10	9	high	high	ADJ
ajst-32384	10	10	stiffness	stiffness	NOUN
ajst-32384	10	11	,	,	PUNCT
ajst-32384	10	12	rapid	rapid	ADJ
ajst-32384	10	13	response	response	NOUN
ajst-32384	10	14	,	,	PUNCT
ajst-32384	10	15	silent	silent	ADJ
ajst-32384	10	16	operation	operation	NOUN
ajst-32384	10	17	,	,	PUNCT
ajst-32384	10	18	excellent	excellent	ADJ
ajst-32384	10	19	linearity	linearity	NOUN
ajst-32384	10	20	,	,	PUNCT
ajst-32384	10	21	and	and	CCONJ
ajst-32384	10	22	the	the	DET
ajst-32384	10	23	absence	absence	NOUN
ajst-32384	10	24	of	of	ADP
ajst-32384	10	25	cogging	cogging	NOUN
ajst-32384	10	26	and	and	CCONJ
ajst-32384	10	27	pulsation	pulsation	NOUN
ajst-32384	10	28	.	.	PUNCT
ajst-32384	11	1	these	these	DET
ajst-32384	11	2	attributes	attribute	NOUN
ajst-32384	11	3	make	make	VERB
ajst-32384	11	4	them	they	PRON
ajst-32384	11	5	well	well	ADV
ajst-32384	11	6	-	-	PUNCT
ajst-32384	11	7	suited	suit	VERB
ajst-32384	11	8	for	for	ADP
ajst-32384	11	9	short	short	ADJ
ajst-32384	11	10	-	-	PUNCT
ajst-32384	11	11	stroke	stroke	NOUN
ajst-32384	11	12	,	,	PUNCT
ajst-32384	11	13	highfrequency	highfrequency	NOUN
ajst-32384	11	14	,	,	PUNCT
ajst-32384	11	15	and	and	CCONJ
ajst-32384	11	16	highly	highly	ADV
ajst-32384	11	17	precise	precise	ADJ
ajst-32384	11	18	reciprocating	reciprocating	NOUN
ajst-32384	11	19	movements	movement	NOUN
ajst-32384	11	20	,	,	PUNCT
ajst-32384	11	21	contributing	contribute	VERB
ajst-32384	11	22	to	to	ADP
ajst-32384	11	23	their	their	PRON
ajst-32384	11	24	widespread	widespread	ADJ
ajst-32384	11	25	use	use	NOUN
ajst-32384	11	26	in	in	ADP
ajst-32384	11	27	highprecision	highprecision	NOUN
ajst-32384	11	28	servo	servo	NOUN
ajst-32384	11	29	applications	application	NOUN
ajst-32384	11	30	.	.	PUNCT
ajst-32384	12	1	while	while	SCONJ
ajst-32384	12	2	the	the	DET
ajst-32384	12	3	removal	removal	NOUN
ajst-32384	12	4	of	of	ADP
ajst-32384	12	5	transmission	transmission	NOUN
ajst-32384	12	6	components	component	NOUN
ajst-32384	12	7	improves	improve	VERB
ajst-32384	12	8	efficiency	efficiency	NOUN
ajst-32384	12	9	and	and	CCONJ
ajst-32384	12	10	design	design	NOUN
ajst-32384	12	11	simplicity	simplicity	NOUN
ajst-32384	12	12	,	,	PUNCT
ajst-32384	12	13	it	it	PRON
ajst-32384	12	14	also	also	ADV
ajst-32384	12	15	increases	increase	VERB
ajst-32384	12	16	the	the	DET
ajst-32384	12	17	system	system	NOUN
ajst-32384	12	18	’s	’s	PART
ajst-32384	12	19	sensitivity	sensitivity	NOUN
ajst-32384	12	20	to	to	ADP
ajst-32384	12	21	external	external	ADJ
ajst-32384	12	22	disturbances	disturbance	NOUN
ajst-32384	12	23	and	and	CCONJ
ajst-32384	12	24	variations	variation	NOUN
ajst-32384	12	25	in	in	ADP
ajst-32384	12	26	load	load	NOUN
ajst-32384	12	27	.	.	PUNCT
ajst-32384	13	1	moreover	moreover	ADV
ajst-32384	13	2	,	,	PUNCT
ajst-32384	13	3	challenges	challenge	NOUN
ajst-32384	13	4	such	such	ADJ
ajst-32384	13	5	as	as	ADP
ajst-32384	13	6	low	low	ADJ
ajst-32384	13	7	thrust	thrust	ADJ
ajst-32384	13	8	density	density	NOUN
ajst-32384	13	9	,	,	PUNCT
ajst-32384	13	10	mechanical	mechanical	ADJ
ajst-32384	13	11	resonance	resonance	NOUN
ajst-32384	13	12	,	,	PUNCT
ajst-32384	13	13	and	and	CCONJ
ajst-32384	13	14	the	the	DET
ajst-32384	13	15	difficulty	difficulty	NOUN
ajst-32384	13	16	of	of	ADP
ajst-32384	13	17	developing	develop	VERB
ajst-32384	13	18	accurate	accurate	ADJ
ajst-32384	13	19	system	system	NOUN
ajst-32384	13	20	models	model	NOUN
ajst-32384	13	21	hinder	hinder	VERB
ajst-32384	13	22	the	the	DET
ajst-32384	13	23	performance	performance	NOUN
ajst-32384	13	24	of	of	ADP
ajst-32384	13	25	vcms	vcms	NOUN
ajst-32384	13	26	in	in	ADP
ajst-32384	13	27	precision	precision	NOUN
ajst-32384	13	28	control	control	NOUN
ajst-32384	13	29	scenarios	scenario	NOUN
ajst-32384	13	30	.	.	PUNCT
ajst-32384	14	1	this	this	DET
ajst-32384	14	2	paper	paper	NOUN
ajst-32384	14	3	focuses	focus	VERB
ajst-32384	14	4	on	on	ADP
ajst-32384	14	5	the	the	DET
ajst-32384	14	6	analysis	analysis	NOUN
ajst-32384	14	7	of	of	ADP
ajst-32384	14	8	several	several	ADJ
ajst-32384	14	9	prominent	prominent	ADJ
ajst-32384	14	10	control	control	NOUN
ajst-32384	14	11	strategies	strategy	NOUN
ajst-32384	14	12	for	for	ADP
ajst-32384	14	13	vcms	vcms	NOUN
ajst-32384	14	14	,	,	PUNCT
ajst-32384	14	15	detailing	detail	VERB
ajst-32384	14	16	their	their	PRON
ajst-32384	14	17	operating	operate	VERB
ajst-32384	14	18	principles	principle	NOUN
ajst-32384	14	19	and	and	CCONJ
ajst-32384	14	20	characteristics	characteristic	NOUN
ajst-32384	14	21	.	.	PUNCT
ajst-32384	15	1	it	it	PRON
ajst-32384	15	2	also	also	ADV
ajst-32384	15	3	summarizes	summarize	VERB
ajst-32384	15	4	their	their	PRON
ajst-32384	15	5	practical	practical	ADJ
ajst-32384	15	6	application	application	NOUN
ajst-32384	15	7	domains	domain	NOUN
ajst-32384	15	8	,	,	PUNCT
ajst-32384	15	9	aiming	aim	VERB
ajst-32384	15	10	to	to	PART
ajst-32384	15	11	provide	provide	VERB
ajst-32384	15	12	insight	insight	NOUN
ajst-32384	15	13	into	into	ADP
ajst-32384	15	14	the	the	DET
ajst-32384	15	15	implementation	implementation	NOUN
ajst-32384	15	16	of	of	ADP
ajst-32384	15	17	vcms	vcms	NOUN
ajst-32384	15	18	in	in	ADP
ajst-32384	15	19	advanced	advanced	ADJ
ajst-32384	15	20	servo	servo	NOUN
ajst-32384	15	21	systems	system	NOUN
ajst-32384	15	22	.	.	PUNCT
ajst-32384	16	1	keywords	keyword	NOUN
ajst-32384	16	2	:	:	PUNCT
ajst-32384	16	3	voice	voice	NOUN
ajst-32384	16	4	coil	coil	NOUN
ajst-32384	16	5	motor	motor	PROPN
ajst-32384	16	6	control	control	PROPN
ajst-32384	16	7	,	,	PUNCT
ajst-32384	16	8	control	control	NOUN
ajst-32384	16	9	strategies	strategy	NOUN
ajst-32384	16	10	,	,	PUNCT
ajst-32384	16	11	engineering	engineering	NOUN
ajst-32384	16	12	application	application	NOUN
ajst-32384	16	13	scenarios	scenario	NOUN
ajst-32384	16	14	.	.	PUNCT
ajst-32384	17	1	1	1	X
ajst-32384	17	2	.	.	X
ajst-32384	17	3	introduction	introduction	NOUN
ajst-32384	17	4	currently	currently	ADV
ajst-32384	17	5	,	,	PUNCT
ajst-32384	17	6	precision	precision	NOUN
ajst-32384	17	7	engineering	engineering	NOUN
ajst-32384	17	8	,	,	PUNCT
ajst-32384	17	9	as	as	ADP
ajst-32384	17	10	an	an	DET
ajst-32384	17	11	interdisciplinary	interdisciplinary	ADJ
ajst-32384	17	12	technology	technology	NOUN
ajst-32384	17	13	system	system	NOUN
ajst-32384	17	14	,	,	PUNCT
ajst-32384	17	15	covers	cover	VERB
ajst-32384	17	16	multiple	multiple	ADJ
ajst-32384	17	17	technical	technical	ADJ
ajst-32384	17	18	fields	field	NOUN
ajst-32384	17	19	such	such	ADJ
ajst-32384	17	20	as	as	ADP
ajst-32384	17	21	semiconductor	semiconductor	NOUN
ajst-32384	17	22	manufacturing	manufacturing	NOUN
ajst-32384	17	23	processes	process	NOUN
ajst-32384	17	24	,	,	PUNCT
ajst-32384	17	25	microelectronic	microelectronic	ADJ
ajst-32384	17	26	device	device	NOUN
ajst-32384	17	27	processing	processing	NOUN
ajst-32384	17	28	,	,	PUNCT
ajst-32384	17	29	optoelectronic	optoelectronic	ADJ
ajst-32384	17	30	testing	testing	NOUN
ajst-32384	17	31	systems	system	NOUN
ajst-32384	17	32	,	,	PUNCT
ajst-32384	17	33	and	and	CCONJ
ajst-32384	17	34	submicron	submicron	PROPN
ajst-32384	17	35	precision	precision	NOUN
ajst-32384	17	36	machining	machining	NOUN
ajst-32384	18	1	[	[	X
ajst-32384	18	2	1	1	NUM
ajst-32384	18	3	]	]	PUNCT
ajst-32384	18	4	.	.	PUNCT
ajst-32384	19	1	among	among	ADP
ajst-32384	19	2	them	they	PRON
ajst-32384	19	3	,	,	PUNCT
ajst-32384	19	4	precision	precision	NOUN
ajst-32384	19	5	positioning	positioning	NOUN
ajst-32384	19	6	technology	technology	NOUN
ajst-32384	19	7	,	,	PUNCT
ajst-32384	19	8	as	as	ADP
ajst-32384	19	9	a	a	DET
ajst-32384	19	10	core	core	NOUN
ajst-32384	19	11	enabling	enable	VERB
ajst-32384	19	12	technology	technology	NOUN
ajst-32384	19	13	,	,	PUNCT
ajst-32384	19	14	plays	play	VERB
ajst-32384	19	15	a	a	DET
ajst-32384	19	16	decisive	decisive	ADJ
ajst-32384	19	17	role	role	NOUN
ajst-32384	19	18	in	in	ADP
ajst-32384	19	19	enhancing	enhance	VERB
ajst-32384	19	20	the	the	DET
ajst-32384	19	21	performance	performance	NOUN
ajst-32384	19	22	of	of	ADP
ajst-32384	19	23	precision	precision	NOUN
ajst-32384	19	24	engineering	engineering	NOUN
ajst-32384	19	25	systems	system	NOUN
ajst-32384	19	26	[	[	X
ajst-32384	19	27	2	2	NUM
ajst-32384	19	28	]	]	PUNCT
ajst-32384	19	29	.	.	PUNCT
ajst-32384	20	1	taking	take	VERB
ajst-32384	20	2	the	the	DET
ajst-32384	20	3	motion	motion	NOUN
ajst-32384	20	4	control	control	NOUN
ajst-32384	20	5	system	system	NOUN
ajst-32384	20	6	of	of	ADP
ajst-32384	20	7	semiconductor	semiconductor	NOUN
ajst-32384	20	8	packaging	packaging	NOUN
ajst-32384	20	9	equipment	equipment	NOUN
ajst-32384	20	10	as	as	ADP
ajst-32384	20	11	an	an	DET
ajst-32384	20	12	example	example	NOUN
ajst-32384	20	13	,	,	PUNCT
ajst-32384	20	14	the	the	DET
ajst-32384	20	15	positioning	positioning	NOUN
ajst-32384	20	16	accuracy	accuracy	NOUN
ajst-32384	20	17	of	of	ADP
ajst-32384	20	18	its	its	PRON
ajst-32384	20	19	core	core	NOUN
ajst-32384	20	20	control	control	NOUN
ajst-32384	20	21	unit	unit	NOUN
ajst-32384	20	22	directly	directly	ADV
ajst-32384	20	23	determines	determine	VERB
ajst-32384	20	24	the	the	DET
ajst-32384	20	25	quality	quality	NOUN
ajst-32384	20	26	and	and	CCONJ
ajst-32384	20	27	yield	yield	NOUN
ajst-32384	20	28	of	of	ADP
ajst-32384	20	29	chip	chip	NOUN
ajst-32384	20	30	packaging	packaging	NOUN
ajst-32384	20	31	,	,	PUNCT
ajst-32384	20	32	and	and	CCONJ
ajst-32384	20	33	this	this	DET
ajst-32384	20	34	technical	technical	ADJ
ajst-32384	20	35	indicator	indicator	NOUN
ajst-32384	20	36	has	have	AUX
ajst-32384	20	37	become	become	VERB
ajst-32384	20	38	one	one	NUM
ajst-32384	20	39	of	of	ADP
ajst-32384	20	40	the	the	DET
ajst-32384	20	41	important	important	ADJ
ajst-32384	20	42	parameters	parameter	NOUN
ajst-32384	20	43	for	for	ADP
ajst-32384	20	44	measuring	measure	VERB
ajst-32384	20	45	the	the	DET
ajst-32384	20	46	technological	technological	ADJ
ajst-32384	20	47	level	level	NOUN
ajst-32384	20	48	of	of	ADP
ajst-32384	20	49	advanced	advanced	ADJ
ajst-32384	20	50	packaging	packaging	NOUN
ajst-32384	20	51	equipment	equipment	NOUN
ajst-32384	20	52	[	[	X
ajst-32384	20	53	3,4	3,4	NUM
ajst-32384	20	54	]	]	PUNCT
ajst-32384	20	55	.	.	PUNCT
ajst-32384	21	1	due	due	ADP
ajst-32384	21	2	to	to	ADP
ajst-32384	21	3	its	its	PRON
ajst-32384	21	4	high	high	ADJ
ajst-32384	21	5	dynamic	dynamic	ADJ
ajst-32384	21	6	performance	performance	NOUN
ajst-32384	21	7	,	,	PUNCT
ajst-32384	21	8	rapid	rapid	ADJ
ajst-32384	21	9	response	response	NOUN
ajst-32384	21	10	,	,	PUNCT
ajst-32384	21	11	and	and	CCONJ
ajst-32384	21	12	precise	precise	ADJ
ajst-32384	21	13	control	control	NOUN
ajst-32384	21	14	capabilities	capability	NOUN
ajst-32384	21	15	,	,	PUNCT
ajst-32384	21	16	voice	voice	NOUN
ajst-32384	21	17	coil	coil	NOUN
ajst-32384	21	18	motors	motor	NOUN
ajst-32384	21	19	are	be	AUX
ajst-32384	21	20	widely	widely	ADV
ajst-32384	21	21	used	use	VERB
ajst-32384	21	22	in	in	ADP
ajst-32384	21	23	precision	precision	NOUN
ajst-32384	21	24	positioning	positioning	NOUN
ajst-32384	21	25	technology	technology	NOUN
ajst-32384	21	26	in	in	ADP
ajst-32384	21	27	fields	field	NOUN
ajst-32384	21	28	such	such	ADJ
ajst-32384	21	29	as	as	ADP
ajst-32384	21	30	semiconductor	semiconductor	NOUN
ajst-32384	21	31	packaging	packaging	NOUN
ajst-32384	21	32	,	,	PUNCT
ajst-32384	21	33	precision	precision	NOUN
ajst-32384	21	34	instruments	instrument	NOUN
ajst-32384	21	35	,	,	PUNCT
ajst-32384	21	36	and	and	CCONJ
ajst-32384	21	37	medical	medical	ADJ
ajst-32384	21	38	equipment	equipment	NOUN
ajst-32384	21	39	[	[	X
ajst-32384	21	40	5	5	NUM
ajst-32384	21	41	]	]	PUNCT
ajst-32384	21	42	.	.	PUNCT
ajst-32384	22	1	as	as	ADP
ajst-32384	22	2	a	a	DET
ajst-32384	22	3	type	type	NOUN
ajst-32384	22	4	of	of	ADP
ajst-32384	22	5	linear	linear	PROPN
ajst-32384	22	6	motor	motor	NOUN
ajst-32384	22	7	,	,	PUNCT
ajst-32384	22	8	voice	voice	NOUN
ajst-32384	22	9	coil	coil	NOUN
ajst-32384	22	10	motors	motor	NOUN
ajst-32384	22	11	are	be	AUX
ajst-32384	22	12	characterized	characterize	VERB
ajst-32384	22	13	by	by	ADP
ajst-32384	22	14	their	their	PRON
ajst-32384	22	15	small	small	ADJ
ajst-32384	22	16	size	size	NOUN
ajst-32384	22	17	,	,	PUNCT
ajst-32384	22	18	simple	simple	ADJ
ajst-32384	22	19	structure	structure	NOUN
ajst-32384	22	20	,	,	PUNCT
ajst-32384	22	21	light	light	ADJ
ajst-32384	22	22	mover	mover	NOUN
ajst-32384	22	23	mass	mass	NOUN
ajst-32384	22	24	,	,	PUNCT
ajst-32384	22	25	and	and	CCONJ
ajst-32384	22	26	low	low	ADJ
ajst-32384	22	27	inertia	inertia	NOUN
ajst-32384	22	28	,	,	PUNCT
ajst-32384	22	29	enabling	enable	VERB
ajst-32384	22	30	millisecond	millisecond	NOUN
ajst-32384	22	31	-	-	PUNCT
ajst-32384	22	32	level	level	NOUN
ajst-32384	22	33	(	(	PUNCT
ajst-32384	22	34	<	<	NOUN
ajst-32384	22	35	1ms	1ms	ADJ
ajst-32384	22	36	)	)	PUNCT
ajst-32384	22	37	rapid	rapid	ADJ
ajst-32384	22	38	start	start	NOUN
ajst-32384	22	39	-	-	PUNCT
ajst-32384	22	40	stop	stop	NOUN
ajst-32384	22	41	,	,	PUNCT
ajst-32384	22	42	suitable	suitable	ADJ
ajst-32384	22	43	for	for	ADP
ajst-32384	22	44	high	high	ADJ
ajst-32384	22	45	-	-	PUNCT
ajst-32384	22	46	frequency	frequency	NOUN
ajst-32384	22	47	reciprocating	reciprocating	NOUN
ajst-32384	22	48	motion	motion	NOUN
ajst-32384	22	49	scenarios	scenario	NOUN
ajst-32384	22	50	[	[	X
ajst-32384	22	51	6	6	NUM
ajst-32384	22	52	]	]	PUNCT
ajst-32384	22	53	.	.	PUNCT
ajst-32384	23	1	they	they	PRON
ajst-32384	23	2	also	also	ADV
ajst-32384	23	3	feature	feature	VERB
ajst-32384	23	4	high	high	ADJ
ajst-32384	23	5	acceleration	acceleration	NOUN
ajst-32384	23	6	,	,	PUNCT
ajst-32384	23	7	with	with	ADP
ajst-32384	23	8	instantaneous	instantaneous	ADJ
ajst-32384	23	9	acceleration	acceleration	NOUN
ajst-32384	23	10	up	up	ADP
ajst-32384	23	11	to	to	PART
ajst-32384	23	12	tens	ten	NOUN
ajst-32384	23	13	of	of	ADP
ajst-32384	23	14	times	time	NOUN
ajst-32384	23	15	the	the	DET
ajst-32384	23	16	gravitational	gravitational	ADJ
ajst-32384	23	17	acceleration	acceleration	NOUN
ajst-32384	23	18	(	(	PUNCT
ajst-32384	23	19	>	>	SYM
ajst-32384	23	20	20	20	NUM
ajst-32384	23	21	g	g	NOUN
ajst-32384	23	22	)	)	PUNCT
ajst-32384	23	23	,	,	PUNCT
ajst-32384	23	24	supporting	support	VERB
ajst-32384	23	25	high	high	ADJ
ajst-32384	23	26	-	-	PUNCT
ajst-32384	23	27	speed	speed	NOUN
ajst-32384	23	28	precision	precision	NOUN
ajst-32384	23	29	positioning	positioning	NOUN
ajst-32384	23	30	[	[	X
ajst-32384	23	31	7	7	NUM
ajst-32384	23	32	]	]	PUNCT
ajst-32384	23	33	.	.	PUNCT
ajst-32384	24	1	due	due	ADP
ajst-32384	24	2	to	to	ADP
ajst-32384	24	3	these	these	DET
ajst-32384	24	4	characteristics	characteristic	NOUN
ajst-32384	24	5	,	,	PUNCT
ajst-32384	24	6	they	they	PRON
ajst-32384	24	7	are	be	AUX
ajst-32384	24	8	commonly	commonly	ADV
ajst-32384	24	9	used	use	VERB
ajst-32384	24	10	in	in	ADP
ajst-32384	24	11	precision	precision	NOUN
ajst-32384	24	12	positioning	positioning	NOUN
ajst-32384	24	13	systems	system	NOUN
ajst-32384	24	14	requiring	require	VERB
ajst-32384	24	15	high	high	ADJ
ajst-32384	24	16	accuracy	accuracy	NOUN
ajst-32384	24	17	and	and	CCONJ
ajst-32384	24	18	high	high	ADJ
ajst-32384	24	19	acceleration	acceleration	NOUN
ajst-32384	24	20	performance	performance	NOUN
ajst-32384	24	21	[	[	X
ajst-32384	24	22	8	8	NUM
ajst-32384	24	23	]	]	PUNCT
ajst-32384	24	24	.	.	PUNCT
ajst-32384	25	1	118	118	NUM
ajst-32384	25	2	2	2	NUM
ajst-32384	25	3	.	.	PUNCT
ajst-32384	25	4	analysis	analysis	NOUN
ajst-32384	25	5	of	of	ADP
ajst-32384	25	6	existing	exist	VERB
ajst-32384	25	7	control	control	NOUN
ajst-32384	25	8	strategies	strategy	NOUN
ajst-32384	25	9	2.1	2.1	NUM
ajst-32384	25	10	.	.	PUNCT
ajst-32384	25	11	model	model	NOUN
ajst-32384	25	12	of	of	ADP
ajst-32384	25	13	voice	voice	NOUN
ajst-32384	25	14	coil	coil	NOUN
ajst-32384	25	15	motor	motor	NOUN
ajst-32384	25	16	as	as	SCONJ
ajst-32384	25	17	shown	show	VERB
ajst-32384	25	18	in	in	ADP
ajst-32384	25	19	fig	fig	NOUN
ajst-32384	25	20	.	.	PUNCT
ajst-32384	26	1	1	1	NUM
ajst-32384	26	2	,	,	PUNCT
ajst-32384	26	3	it	it	PRON
ajst-32384	26	4	is	be	AUX
ajst-32384	26	5	the	the	DET
ajst-32384	26	6	internal	internal	ADJ
ajst-32384	26	7	equivalent	equivalent	ADJ
ajst-32384	26	8	circuit	circuit	NOUN
ajst-32384	26	9	diagram	diagram	NOUN
ajst-32384	26	10	of	of	ADP
ajst-32384	26	11	the	the	DET
ajst-32384	26	12	voice	voice	NOUN
ajst-32384	26	13	coil	coil	NOUN
ajst-32384	26	14	motor	motor	NOUN
ajst-32384	26	15	.	.	PUNCT
ajst-32384	27	1	the	the	DET
ajst-32384	27	2	internal	internal	ADJ
ajst-32384	27	3	permanent	permanent	ADJ
ajst-32384	27	4	magnet	magnet	NOUN
ajst-32384	27	5	of	of	ADP
ajst-32384	27	6	the	the	DET
ajst-32384	27	7	voice	voice	NOUN
ajst-32384	27	8	coil	coil	NOUN
ajst-32384	27	9	motor	motor	NOUN
ajst-32384	27	10	generates	generate	VERB
ajst-32384	27	11	a	a	DET
ajst-32384	27	12	roughly	roughly	ADV
ajst-32384	27	13	uniform	uniform	ADJ
ajst-32384	27	14	magnetic	magnetic	ADJ
ajst-32384	27	15	field	field	NOUN
ajst-32384	27	16	within	within	ADP
ajst-32384	27	17	the	the	DET
ajst-32384	27	18	range	range	NOUN
ajst-32384	27	19	of	of	ADP
ajst-32384	27	20	mover	mover	NOUN
ajst-32384	27	21	movement	movement	NOUN
ajst-32384	27	22	.	.	PUNCT
ajst-32384	28	1	when	when	SCONJ
ajst-32384	28	2	an	an	DET
ajst-32384	28	3	external	external	ADJ
ajst-32384	28	4	power	power	NOUN
ajst-32384	28	5	supply	supply	NOUN
ajst-32384	28	6	is	be	AUX
ajst-32384	28	7	applied	apply	VERB
ajst-32384	28	8	and	and	CCONJ
ajst-32384	28	9	current	current	ADJ
ajst-32384	28	10	flows	flow	NOUN
ajst-32384	28	11	through	through	ADP
ajst-32384	28	12	the	the	DET
ajst-32384	28	13	armature	armature	NOUN
ajst-32384	28	14	circuit	circuit	NOUN
ajst-32384	28	15	,	,	PUNCT
ajst-32384	28	16	the	the	DET
ajst-32384	28	17	electrified	electrify	VERB
ajst-32384	28	18	conductor	conductor	NOUN
ajst-32384	28	19	will	will	AUX
ajst-32384	28	20	be	be	AUX
ajst-32384	28	21	subjected	subject	VERB
ajst-32384	28	22	to	to	ADP
ajst-32384	28	23	electromagnetic	electromagnetic	ADJ
ajst-32384	28	24	force	force	NOUN
ajst-32384	28	25	in	in	ADP
ajst-32384	28	26	the	the	DET
ajst-32384	28	27	magnetic	magnetic	ADJ
ajst-32384	28	28	field	field	NOUN
ajst-32384	28	29	[	[	X
ajst-32384	28	30	9	9	NUM
ajst-32384	28	31	]	]	PUNCT
ajst-32384	28	32	.	.	PUNCT
ajst-32384	29	1	the	the	DET
ajst-32384	29	2	mover	mover	NOUN
ajst-32384	29	3	will	will	AUX
ajst-32384	29	4	move	move	VERB
ajst-32384	29	5	due	due	ADJ
ajst-32384	29	6	to	to	ADP
ajst-32384	29	7	the	the	DET
ajst-32384	29	8	electromagnetic	electromagnetic	ADJ
ajst-32384	29	9	force	force	NOUN
ajst-32384	29	10	.	.	PUNCT
ajst-32384	30	1	when	when	SCONJ
ajst-32384	30	2	the	the	DET
ajst-32384	30	3	mover	mover	NOUN
ajst-32384	30	4	moves	move	VERB
ajst-32384	30	5	under	under	ADP
ajst-32384	30	6	the	the	DET
ajst-32384	30	7	traction	traction	NOUN
ajst-32384	30	8	of	of	ADP
ajst-32384	30	9	electromagnetic	electromagnetic	ADJ
ajst-32384	30	10	force	force	NOUN
ajst-32384	30	11	,	,	PUNCT
ajst-32384	30	12	the	the	DET
ajst-32384	30	13	coil	coil	NOUN
ajst-32384	30	14	simultaneously	simultaneously	ADV
ajst-32384	30	15	cuts	cut	VERB
ajst-32384	30	16	the	the	DET
ajst-32384	30	17	magnetic	magnetic	ADJ
ajst-32384	30	18	field	field	NOUN
ajst-32384	30	19	lines	line	NOUN
ajst-32384	30	20	,	,	PUNCT
ajst-32384	30	21	generating	generate	VERB
ajst-32384	30	22	a	a	DET
ajst-32384	30	23	counter	counter	ADJ
ajst-32384	30	24	electromotive	electromotive	ADJ
ajst-32384	30	25	force	force	NOUN
ajst-32384	30	26	.	.	PUNCT
ajst-32384	31	1	the	the	DET
ajst-32384	31	2	external	external	ADJ
ajst-32384	31	3	power	power	NOUN
ajst-32384	31	4	supply	supply	NOUN
ajst-32384	31	5	voltage	voltage	NOUN
ajst-32384	31	6	of	of	ADP
ajst-32384	31	7	the	the	DET
ajst-32384	31	8	motor	motor	NOUN
ajst-32384	31	9	is	be	AUX
ajst-32384	31	10	u	u	NOUN
ajst-32384	31	11	,	,	PUNCT
ajst-32384	31	12	the	the	DET
ajst-32384	31	13	equivalent	equivalent	ADJ
ajst-32384	31	14	resistance	resistance	NOUN
ajst-32384	31	15	of	of	ADP
ajst-32384	31	16	the	the	DET
ajst-32384	31	17	mover	mover	NOUN
ajst-32384	31	18	winding	winding	NOUN
ajst-32384	31	19	is	be	AUX
ajst-32384	31	20	r	r	NOUN
ajst-32384	31	21	,	,	PUNCT
ajst-32384	31	22	the	the	DET
ajst-32384	31	23	equivalent	equivalent	ADJ
ajst-32384	31	24	inductance	inductance	NOUN
ajst-32384	31	25	of	of	ADP
ajst-32384	31	26	the	the	DET
ajst-32384	31	27	winding	wind	VERB
ajst-32384	31	28	coil	coil	NOUN
ajst-32384	31	29	is	be	AUX
ajst-32384	31	30	l	l	NOUN
ajst-32384	31	31	,	,	PUNCT
ajst-32384	31	32	the	the	DET
ajst-32384	31	33	current	current	ADJ
ajst-32384	31	34	passing	pass	VERB
ajst-32384	31	35	through	through	ADP
ajst-32384	31	36	the	the	DET
ajst-32384	31	37	winding	wind	VERB
ajst-32384	31	38	coil	coil	NOUN
ajst-32384	31	39	is	be	AUX
ajst-32384	31	40	i	i	PROPN
ajst-32384	31	41	,	,	PUNCT
ajst-32384	31	42	the	the	DET
ajst-32384	31	43	back	back	ADJ
ajst-32384	31	44	electromotive	electromotive	ADJ
ajst-32384	31	45	force	force	NOUN
ajst-32384	31	46	generated	generate	VERB
ajst-32384	31	47	by	by	ADP
ajst-32384	31	48	the	the	DET
ajst-32384	31	49	motion	motion	NOUN
ajst-32384	31	50	of	of	ADP
ajst-32384	31	51	the	the	DET
ajst-32384	31	52	voice	voice	NOUN
ajst-32384	31	53	coil	coil	NOUN
ajst-32384	31	54	motor	motor	NOUN
ajst-32384	31	55	is	be	AUX
ajst-32384	31	56	e	e	NOUN
ajst-32384	31	57	,	,	PUNCT
ajst-32384	31	58	the	the	DET
ajst-32384	31	59	displacement	displacement	NOUN
ajst-32384	31	60	of	of	ADP
ajst-32384	31	61	the	the	DET
ajst-32384	31	62	motion	motion	NOUN
ajst-32384	31	63	is	be	AUX
ajst-32384	31	64	x	x	X
ajst-32384	31	65	,	,	PUNCT
ajst-32384	31	66	and	and	CCONJ
ajst-32384	31	67	the	the	DET
ajst-32384	31	68	damping	damp	VERB
ajst-32384	31	69	coefficient	coefficient	NOUN
ajst-32384	31	70	(	(	PUNCT
ajst-32384	31	71	friction	friction	NOUN
ajst-32384	31	72	damping	damping	NOUN
ajst-32384	31	73	,	,	PUNCT
ajst-32384	31	74	air	air	NOUN
ajst-32384	31	75	damping	damping	NOUN
ajst-32384	31	76	,	,	PUNCT
ajst-32384	31	77	etc	etc	X
ajst-32384	31	78	.	.	X
ajst-32384	31	79	)	)	PUNCT
ajst-32384	31	80	of	of	ADP
ajst-32384	31	81	the	the	DET
ajst-32384	31	82	motor	motor	NOUN
ajst-32384	31	83	is	be	AUX
ajst-32384	31	84	ck	ck	ADP
ajst-32384	31	85	.the	.the	PRON
ajst-32384	31	86	back	back	ADJ
ajst-32384	31	87	electromotive	electromotive	ADJ
ajst-32384	31	88	force	force	NOUN
ajst-32384	31	89	coefficient	coefficient	NOUN
ajst-32384	31	90	and	and	CCONJ
ajst-32384	31	91	electromagnetic	electromagnetic	ADJ
ajst-32384	31	92	force	force	NOUN
ajst-32384	31	93	coefficient	coefficient	NOUN
ajst-32384	31	94	of	of	ADP
ajst-32384	31	95	the	the	DET
ajst-32384	31	96	motor	motor	NOUN
ajst-32384	31	97	are	be	AUX
ajst-32384	31	98	respectively	respectively	ADV
ajst-32384	31	99	denoted	denote	VERB
ajst-32384	31	100	ek	ek	PROPN
ajst-32384	31	101	as	as	ADP
ajst-32384	31	102	and	and	CCONJ
ajst-32384	31	103	mk	mk	NOUN
ajst-32384	31	104	.	.	PUNCT
ajst-32384	32	1	r	r	NOUN
ajst-32384	32	2	u	u	NOUN
ajst-32384	32	3	e	e	NOUN
ajst-32384	32	4	l	l	NOUN
ajst-32384	32	5	i	i	PRON
ajst-32384	32	6	fig	fig	VERB
ajst-32384	32	7	.	.	PUNCT
ajst-32384	33	1	1	1	NUM
ajst-32384	33	2	equivalent	equivalent	ADJ
ajst-32384	33	3	circuit	circuit	NOUN
ajst-32384	33	4	diagram	diagram	NOUN
ajst-32384	33	5	of	of	ADP
ajst-32384	33	6	voice	voice	NOUN
ajst-32384	33	7	coil	coil	NOUN
ajst-32384	33	8	motor	motor	NOUN
ajst-32384	33	9	(	(	PUNCT
ajst-32384	33	10	vcm	vcm	PROPN
ajst-32384	33	11	)	)	PUNCT
ajst-32384	33	12	according	accord	VERB
ajst-32384	33	13	to	to	ADP
ajst-32384	33	14	kirchhoff	kirchhoff	PROPN
ajst-32384	33	15	's	's	PART
ajst-32384	33	16	law	law	NOUN
ajst-32384	33	17	,	,	PUNCT
ajst-32384	33	18	the	the	DET
ajst-32384	33	19	electronic	electronic	ADJ
ajst-32384	33	20	mechanical	mechanical	ADJ
ajst-32384	33	21	equation	equation	NOUN
ajst-32384	33	22	expression	expression	NOUN
ajst-32384	33	23	for	for	ADP
ajst-32384	33	24	the	the	DET
ajst-32384	33	25	armature	armature	NOUN
ajst-32384	33	26	circuit	circuit	NOUN
ajst-32384	33	27	of	of	ADP
ajst-32384	33	28	a	a	DET
ajst-32384	33	29	voice	voice	NOUN
ajst-32384	33	30	coil	coil	NOUN
ajst-32384	33	31	motor	motor	NOUN
ajst-32384	33	32	can	can	AUX
ajst-32384	33	33	be	be	AUX
ajst-32384	33	34	derived	derive	VERB
ajst-32384	33	35	as	as	ADP
ajst-32384	33	36	:	:	PUNCT
ajst-32384	33	37	dx	dx	PROPN
ajst-32384	33	38	u	u	NOUN
ajst-32384	33	39	e	e	PROPN
ajst-32384	33	40	ir	ir	NOUN
ajst-32384	33	41	l	l	NOUN
ajst-32384	33	42	dt	dt	X
ajst-32384	34	1	=	=	PUNCT
ajst-32384	35	1	+	+	PUNCT
ajst-32384	35	2	+	+	CCONJ
ajst-32384	35	3	the	the	DET
ajst-32384	35	4	mechanical	mechanical	ADJ
ajst-32384	35	5	equilibrium	equilibrium	NOUN
ajst-32384	35	6	equation	equation	NOUN
ajst-32384	35	7	is	be	AUX
ajst-32384	35	8	as	as	SCONJ
ajst-32384	35	9	follows	follow	VERB
ajst-32384	35	10	:	:	PUNCT
ajst-32384	35	11	2	2	NUM
ajst-32384	35	12	2e	2e	NOUN
ajst-32384	35	13	c	c	NOUN
ajst-32384	35	14	m	m	NOUN
ajst-32384	35	15	d	d	NOUN
ajst-32384	35	16	x	x	X
ajst-32384	35	17	dx	dx	PROPN
ajst-32384	35	18	f	f	PROPN
ajst-32384	35	19	m	m	VERB
ajst-32384	35	20	k	k	PROPN
ajst-32384	36	1	k	k	NOUN
ajst-32384	37	1	i	i	PRON
ajst-32384	37	2	dt	dt	VERB
ajst-32384	37	3	dt	dt	X
ajst-32384	38	1	=	=	PUNCT
ajst-32384	38	2	+	+	PUNCT
ajst-32384	38	3	=	=	PUNCT
ajst-32384	38	4			VERB
ajst-32384	38	5	due	due	ADP
ajst-32384	38	6	to	to	ADP
ajst-32384	38	7	the	the	DET
ajst-32384	38	8	typically	typically	ADV
ajst-32384	38	9	compact	compact	ADJ
ajst-32384	38	10	size	size	NOUN
ajst-32384	38	11	of	of	ADP
ajst-32384	38	12	voice	voice	NOUN
ajst-32384	38	13	coil	coil	NOUN
ajst-32384	38	14	motors	motor	NOUN
ajst-32384	38	15	(	(	PUNCT
ajst-32384	38	16	vcms	vcms	NOUN
ajst-32384	38	17	)	)	PUNCT
ajst-32384	38	18	,	,	PUNCT
ajst-32384	38	19	their	their	PRON
ajst-32384	38	20	servo	servo	NOUN
ajst-32384	38	21	control	control	NOUN
ajst-32384	38	22	systems	system	NOUN
ajst-32384	38	23	often	often	ADV
ajst-32384	38	24	adopt	adopt	VERB
ajst-32384	38	25	a	a	DET
ajst-32384	38	26	dual	dual	ADJ
ajst-32384	38	27	closed	closed	ADJ
ajst-32384	38	28	-	-	PUNCT
ajst-32384	38	29	loop	loop	NOUN
ajst-32384	38	30	configuration	configuration	NOUN
ajst-32384	38	31	—	—	PUNCT
ajst-32384	38	32	comprising	comprise	VERB
ajst-32384	38	33	both	both	CCONJ
ajst-32384	38	34	position	position	NOUN
ajst-32384	38	35	and	and	CCONJ
ajst-32384	38	36	current	current	ADJ
ajst-32384	38	37	loops	loop	NOUN
ajst-32384	38	38	—	—	PUNCT
ajst-32384	38	39	to	to	PART
ajst-32384	38	40	enable	enable	VERB
ajst-32384	38	41	highspeed	highspeed	NOUN
ajst-32384	38	42	tracking	tracking	NOUN
ajst-32384	38	43	performance	performance	NOUN
ajst-32384	38	44	.	.	PUNCT
ajst-32384	39	1	among	among	ADP
ajst-32384	39	2	these	these	PRON
ajst-32384	39	3	,	,	PUNCT
ajst-32384	39	4	the	the	DET
ajst-32384	39	5	position	position	NOUN
ajst-32384	39	6	loop	loop	NOUN
ajst-32384	39	7	plays	play	VERB
ajst-32384	39	8	a	a	DET
ajst-32384	39	9	central	central	ADJ
ajst-32384	39	10	role	role	NOUN
ajst-32384	39	11	in	in	ADP
ajst-32384	39	12	the	the	DET
ajst-32384	39	13	overall	overall	ADJ
ajst-32384	39	14	control	control	NOUN
ajst-32384	39	15	architecture	architecture	NOUN
ajst-32384	39	16	.	.	PUNCT
ajst-32384	40	1	in	in	ADP
ajst-32384	40	2	this	this	DET
ajst-32384	40	3	section	section	NOUN
ajst-32384	40	4	,	,	PUNCT
ajst-32384	40	5	we	we	PRON
ajst-32384	40	6	provide	provide	VERB
ajst-32384	40	7	a	a	DET
ajst-32384	40	8	concise	concise	ADJ
ajst-32384	40	9	overview	overview	NOUN
ajst-32384	40	10	of	of	ADP
ajst-32384	40	11	several	several	ADJ
ajst-32384	40	12	commonly	commonly	ADV
ajst-32384	40	13	implemented	implement	VERB
ajst-32384	40	14	controllers	controller	NOUN
ajst-32384	40	15	used	use	VERB
ajst-32384	40	16	in	in	ADP
ajst-32384	40	17	the	the	DET
ajst-32384	40	18	position	position	NOUN
ajst-32384	40	19	loop	loop	NOUN
ajst-32384	40	20	of	of	ADP
ajst-32384	40	21	vcm	vcm	PROPN
ajst-32384	40	22	systems	system	NOUN
ajst-32384	40	23	.	.	PUNCT
ajst-32384	41	1	2.2	2.2	NUM
ajst-32384	41	2	.	.	PUNCT
ajst-32384	42	1	pid	pid	NOUN
ajst-32384	42	2	control	control	NOUN
ajst-32384	42	3	pid	pid	PROPN
ajst-32384	42	4	control	control	PROPN
ajst-32384	42	5	,	,	PUNCT
ajst-32384	42	6	with	with	ADP
ajst-32384	42	7	its	its	PRON
ajst-32384	42	8	clear	clear	ADJ
ajst-32384	42	9	structure	structure	NOUN
ajst-32384	42	10	and	and	CCONJ
ajst-32384	42	11	convenient	convenient	ADJ
ajst-32384	42	12	parameter	parameter	NOUN
ajst-32384	42	13	tuning	tuning	NOUN
ajst-32384	42	14	,	,	PUNCT
ajst-32384	42	15	is	be	AUX
ajst-32384	42	16	the	the	DET
ajst-32384	42	17	most	most	ADV
ajst-32384	42	18	basic	basic	ADJ
ajst-32384	42	19	and	and	CCONJ
ajst-32384	42	20	widely	widely	ADV
ajst-32384	42	21	used	use	VERB
ajst-32384	42	22	controller	controller	NOUN
ajst-32384	42	23	in	in	ADP
ajst-32384	42	24	vcm	vcm	PROPN
ajst-32384	42	25	servo	servo	NOUN
ajst-32384	42	26	control	control	NOUN
ajst-32384	42	27	.	.	PUNCT
ajst-32384	43	1	it	it	PRON
ajst-32384	43	2	exhibits	exhibit	VERB
ajst-32384	43	3	strong	strong	ADJ
ajst-32384	43	4	reliability	reliability	NOUN
ajst-32384	43	5	and	and	CCONJ
ajst-32384	43	6	good	good	ADJ
ajst-32384	43	7	stability	stability	NOUN
ajst-32384	43	8	in	in	ADP
ajst-32384	43	9	industrial	industrial	ADJ
ajst-32384	43	10	practice	practice	NOUN
ajst-32384	43	11	and	and	CCONJ
ajst-32384	43	12	is	be	AUX
ajst-32384	43	13	suitable	suitable	ADJ
ajst-32384	43	14	for	for	ADP
ajst-32384	43	15	the	the	DET
ajst-32384	43	16	conventional	conventional	ADJ
ajst-32384	43	17	positioning	positioning	NOUN
ajst-32384	43	18	requirements	requirement	NOUN
ajst-32384	43	19	of	of	ADP
ajst-32384	43	20	vcm	vcm	PROPN
ajst-32384	43	21	.	.	PUNCT
ajst-32384	44	1	fig	fig	PROPN
ajst-32384	44	2	.	.	PUNCT
ajst-32384	45	1	2	2	NUM
ajst-32384	45	2	shows	show	VERB
ajst-32384	45	3	the	the	DET
ajst-32384	45	4	control	control	NOUN
ajst-32384	45	5	block	block	NOUN
ajst-32384	45	6	diagram	diagram	NOUN
ajst-32384	45	7	of	of	ADP
ajst-32384	45	8	pid	pid	PROPN
ajst-32384	45	9	control	control	NOUN
ajst-32384	45	10	.	.	PUNCT
ajst-32384	46	1	119	119	NUM
ajst-32384	46	2	pid	pid	NOUN
ajst-32384	46	3	control	control	NOUN
ajst-32384	46	4	ler	ler	PROPN
ajst-32384	46	5	position	position	NOUN
ajst-32384	46	6	detection	detection	NOUN
ajst-32384	46	7	limit	limit	NOUN
ajst-32384	46	8	range	range	NOUN
ajst-32384	46	9	vcm	vcm	NOUN
ajst-32384	46	10	x	x	PROPN
ajst-32384	46	11	x	x	PUNCT
ajst-32384	46	12	fig	fig	NOUN
ajst-32384	46	13	.	.	PUNCT
ajst-32384	47	1	2	2	NUM
ajst-32384	47	2	pid	pid	NOUN
ajst-32384	47	3	controller	controller	NOUN
ajst-32384	47	4	diagram	diagram	PROPN
ajst-32384	47	5	vcm	vcm	PROPN
ajst-32384	47	6	systems	system	NOUN
ajst-32384	47	7	commonly	commonly	ADV
ajst-32384	47	8	utilize	utilize	VERB
ajst-32384	47	9	a	a	DET
ajst-32384	47	10	dual	dual	ADJ
ajst-32384	47	11	-	-	PUNCT
ajst-32384	47	12	loop	loop	NOUN
ajst-32384	47	13	control	control	NOUN
ajst-32384	47	14	framework	framework	NOUN
ajst-32384	47	15	composed	compose	VERB
ajst-32384	47	16	of	of	ADP
ajst-32384	47	17	an	an	DET
ajst-32384	47	18	outer	outer	ADJ
ajst-32384	47	19	position	position	NOUN
ajst-32384	47	20	loop	loop	NOUN
ajst-32384	47	21	and	and	CCONJ
ajst-32384	47	22	an	an	DET
ajst-32384	47	23	inner	inner	ADJ
ajst-32384	47	24	current	current	ADJ
ajst-32384	47	25	loop	loop	NOUN
ajst-32384	47	26	,	,	PUNCT
ajst-32384	47	27	with	with	ADP
ajst-32384	47	28	the	the	DET
ajst-32384	47	29	position	position	NOUN
ajst-32384	47	30	loop	loop	NOUN
ajst-32384	47	31	serving	serve	VERB
ajst-32384	47	32	as	as	ADP
ajst-32384	47	33	the	the	DET
ajst-32384	47	34	central	central	ADJ
ajst-32384	47	35	element	element	NOUN
ajst-32384	47	36	in	in	ADP
ajst-32384	47	37	control	control	NOUN
ajst-32384	47	38	system	system	NOUN
ajst-32384	47	39	design	design	NOUN
ajst-32384	47	40	.	.	PUNCT
ajst-32384	48	1	the	the	DET
ajst-32384	48	2	implementation	implementation	NOUN
ajst-32384	48	3	of	of	ADP
ajst-32384	48	4	a	a	DET
ajst-32384	48	5	pid	pid	NOUN
ajst-32384	48	6	controller	controller	NOUN
ajst-32384	48	7	within	within	ADP
ajst-32384	48	8	the	the	DET
ajst-32384	48	9	position	position	NOUN
ajst-32384	48	10	loop	loop	NOUN
ajst-32384	48	11	plays	play	VERB
ajst-32384	48	12	a	a	DET
ajst-32384	48	13	pivotal	pivotal	ADJ
ajst-32384	48	14	role	role	NOUN
ajst-32384	48	15	in	in	ADP
ajst-32384	48	16	determining	determine	VERB
ajst-32384	48	17	the	the	DET
ajst-32384	48	18	system	system	NOUN
ajst-32384	48	19	's	's	PART
ajst-32384	48	20	tracking	tracking	NOUN
ajst-32384	48	21	accuracy	accuracy	NOUN
ajst-32384	48	22	and	and	CCONJ
ajst-32384	48	23	dynamic	dynamic	ADJ
ajst-32384	48	24	response	response	NOUN
ajst-32384	48	25	[	[	X
ajst-32384	48	26	10	10	NUM
ajst-32384	48	27	]	]	PUNCT
ajst-32384	48	28	.	.	PUNCT
ajst-32384	49	1	however	however	ADV
ajst-32384	49	2	,	,	PUNCT
ajst-32384	49	3	pid	pid	PROPN
ajst-32384	49	4	control	control	NOUN
ajst-32384	49	5	also	also	ADV
ajst-32384	49	6	has	have	VERB
ajst-32384	49	7	many	many	ADJ
ajst-32384	49	8	limitations	limitation	NOUN
ajst-32384	49	9	,	,	PUNCT
ajst-32384	49	10	such	such	ADJ
ajst-32384	49	11	as	as	ADP
ajst-32384	49	12	insufficient	insufficient	ADJ
ajst-32384	49	13	dynamic	dynamic	ADJ
ajst-32384	49	14	performance	performance	NOUN
ajst-32384	49	15	.	.	PUNCT
ajst-32384	50	1	when	when	SCONJ
ajst-32384	50	2	faced	face	VERB
ajst-32384	50	3	with	with	ADP
ajst-32384	50	4	high	high	ADJ
ajst-32384	50	5	-	-	PUNCT
ajst-32384	50	6	frequency	frequency	NOUN
ajst-32384	50	7	response	response	NOUN
ajst-32384	50	8	,	,	PUNCT
ajst-32384	50	9	nonlinear	nonlinear	ADJ
ajst-32384	50	10	disturbances	disturbance	NOUN
ajst-32384	50	11	(	(	PUNCT
ajst-32384	50	12	such	such	ADJ
ajst-32384	50	13	as	as	ADP
ajst-32384	50	14	friction	friction	NOUN
ajst-32384	50	15	and	and	CCONJ
ajst-32384	50	16	vibration	vibration	NOUN
ajst-32384	50	17	)	)	PUNCT
ajst-32384	50	18	,	,	PUNCT
ajst-32384	50	19	or	or	CCONJ
ajst-32384	50	20	high	high	ADJ
ajst-32384	50	21	-	-	PUNCT
ajst-32384	50	22	precision	precision	NOUN
ajst-32384	50	23	requirements	requirement	NOUN
ajst-32384	50	24	,	,	PUNCT
ajst-32384	50	25	traditional	traditional	ADJ
ajst-32384	50	26	pid	pid	NOUN
ajst-32384	50	27	methods	method	NOUN
ajst-32384	50	28	struggle	struggle	VERB
ajst-32384	50	29	to	to	PART
ajst-32384	50	30	satisfy	satisfy	VERB
ajst-32384	50	31	the	the	DET
ajst-32384	50	32	necessary	necessary	ADJ
ajst-32384	50	33	control	control	NOUN
ajst-32384	50	34	criteria	criterion	NOUN
ajst-32384	50	35	.	.	PUNCT
ajst-32384	51	1	weak	weak	ADJ
ajst-32384	51	2	anti	anti	ADJ
ajst-32384	51	3	-	-	ADJ
ajst-32384	51	4	interference	interference	ADJ
ajst-32384	51	5	capability	capability	NOUN
ajst-32384	51	6	:	:	PUNCT
ajst-32384	51	7	sensitive	sensitive	ADJ
ajst-32384	51	8	to	to	PART
ajst-32384	51	9	parameter	parameter	NOUN
ajst-32384	51	10	changes	change	NOUN
ajst-32384	51	11	(	(	PUNCT
ajst-32384	51	12	such	such	ADJ
ajst-32384	51	13	as	as	ADP
ajst-32384	51	14	load	load	NOUN
ajst-32384	51	15	fluctuations	fluctuation	NOUN
ajst-32384	51	16	)	)	PUNCT
ajst-32384	51	17	and	and	CCONJ
ajst-32384	51	18	external	external	ADJ
ajst-32384	51	19	disturbances	disturbance	NOUN
ajst-32384	51	20	(	(	PUNCT
ajst-32384	51	21	airflow	airflow	NOUN
ajst-32384	51	22	damping	damp	VERB
ajst-32384	51	23	,	,	PUNCT
ajst-32384	51	24	mechanical	mechanical	ADJ
ajst-32384	51	25	resonance	resonance	NOUN
ajst-32384	51	26	)	)	PUNCT
ajst-32384	51	27	.	.	PUNCT
ajst-32384	52	1	therefore	therefore	ADV
ajst-32384	52	2	,	,	PUNCT
ajst-32384	52	3	pid	pid	PRON
ajst-32384	52	4	is	be	AUX
ajst-32384	52	5	often	often	ADV
ajst-32384	52	6	integrated	integrate	VERB
ajst-32384	52	7	with	with	ADP
ajst-32384	52	8	other	other	ADJ
ajst-32384	52	9	control	control	NOUN
ajst-32384	52	10	techniques	technique	NOUN
ajst-32384	52	11	to	to	PART
ajst-32384	52	12	enhance	enhance	VERB
ajst-32384	52	13	performance	performance	NOUN
ajst-32384	52	14	:	:	PUNCT
ajst-32384	52	15	for	for	ADP
ajst-32384	52	16	example	example	NOUN
ajst-32384	52	17	,	,	PUNCT
ajst-32384	52	18	fuzzy	fuzzy	ADJ
ajst-32384	52	19	pid	pid	NOUN
ajst-32384	52	20	,	,	PUNCT
ajst-32384	52	21	which	which	PRON
ajst-32384	52	22	enhances	enhance	VERB
ajst-32384	52	23	adaptability	adaptability	NOUN
ajst-32384	52	24	to	to	ADP
ajst-32384	52	25	nonlinear	nonlinear	ADJ
ajst-32384	52	26	disturbances	disturbance	NOUN
ajst-32384	52	27	(	(	PUNCT
ajst-32384	52	28	such	such	ADJ
ajst-32384	52	29	as	as	ADP
ajst-32384	52	30	friction	friction	NOUN
ajst-32384	52	31	compensation	compensation	NOUN
ajst-32384	52	32	)	)	PUNCT
ajst-32384	52	33	.	.	PUNCT
ajst-32384	53	1	neural	neural	ADJ
ajst-32384	53	2	network	network	PROPN
ajst-32384	53	3	pid	pid	PROPN
ajst-32384	53	4	,	,	PUNCT
ajst-32384	53	5	which	which	PRON
ajst-32384	53	6	optimizes	optimize	VERB
ajst-32384	53	7	parameters	parameter	NOUN
ajst-32384	53	8	online	online	ADV
ajst-32384	53	9	and	and	CCONJ
ajst-32384	53	10	approximates	approximate	VERB
ajst-32384	53	11	complex	complex	ADJ
ajst-32384	53	12	nonlinear	nonlinear	ADJ
ajst-32384	53	13	characteristics	characteristic	NOUN
ajst-32384	53	14	.	.	PUNCT
ajst-32384	54	1	predictive	predictive	ADJ
ajst-32384	54	2	compensation	compensation	NOUN
ajst-32384	54	3	,	,	PUNCT
ajst-32384	54	4	which	which	PRON
ajst-32384	54	5	predicts	predict	VERB
ajst-32384	54	6	the	the	DET
ajst-32384	54	7	next	next	ADJ
ajst-32384	54	8	moment	moment	NOUN
ajst-32384	54	9	's	's	PART
ajst-32384	54	10	input	input	NOUN
ajst-32384	54	11	through	through	ADP
ajst-32384	54	12	current	current	ADJ
ajst-32384	54	13	errors	error	NOUN
ajst-32384	54	14	to	to	PART
ajst-32384	54	15	improve	improve	VERB
ajst-32384	54	16	positioning	positioning	NOUN
ajst-32384	54	17	accuracy	accuracy	NOUN
ajst-32384	55	1	[	[	X
ajst-32384	55	2	11	11	NUM
ajst-32384	55	3	]	]	PUNCT
ajst-32384	55	4	.	.	PUNCT
ajst-32384	56	1	two	two	NUM
ajst-32384	56	2	-	-	PUNCT
ajst-32384	56	3	degree	degree	NOUN
ajst-32384	56	4	-	-	PUNCT
ajst-32384	56	5	of	of	ADP
ajst-32384	56	6	-	-	PUNCT
ajst-32384	56	7	freedom	freedom	NOUN
ajst-32384	56	8	structure	structure	NOUN
ajst-32384	56	9	,	,	PUNCT
ajst-32384	56	10	which	which	PRON
ajst-32384	56	11	independently	independently	ADV
ajst-32384	56	12	designs	design	VERB
ajst-32384	56	13	set	set	VERB
ajst-32384	56	14	point	point	NOUN
ajst-32384	56	15	tracking	tracking	NOUN
ajst-32384	56	16	and	and	CCONJ
ajst-32384	56	17	disturbance	disturbance	NOUN
ajst-32384	56	18	rejection	rejection	NOUN
ajst-32384	56	19	links	link	NOUN
ajst-32384	56	20	to	to	PART
ajst-32384	56	21	enhance	enhance	VERB
ajst-32384	56	22	dynamic	dynamic	ADJ
ajst-32384	56	23	response	response	NOUN
ajst-32384	56	24	and	and	CCONJ
ajst-32384	56	25	robustness	robustness	NOUN
ajst-32384	56	26	.	.	PUNCT
ajst-32384	57	1	2.3	2.3	NUM
ajst-32384	57	2	.	.	PUNCT
ajst-32384	57	3	iterative	iterative	NOUN
ajst-32384	57	4	learning	learning	NOUN
ajst-32384	57	5	control	control	NOUN
ajst-32384	57	6	(	(	PUNCT
ajst-32384	57	7	ilc	ilc	PROPN
ajst-32384	57	8	)	)	PUNCT
ajst-32384	57	9	iterative	iterative	NOUN
ajst-32384	57	10	learning	learning	NOUN
ajst-32384	57	11	control	control	NOUN
ajst-32384	57	12	is	be	AUX
ajst-32384	57	13	an	an	DET
ajst-32384	57	14	intelligent	intelligent	ADJ
ajst-32384	57	15	control	control	NOUN
ajst-32384	57	16	strategy	strategy	NOUN
ajst-32384	57	17	tailored	tailor	VERB
ajst-32384	57	18	for	for	ADP
ajst-32384	57	19	periodic	periodic	ADJ
ajst-32384	57	20	operational	operational	ADJ
ajst-32384	57	21	tasks	task	NOUN
ajst-32384	57	22	.	.	PUNCT
ajst-32384	58	1	its	its	PRON
ajst-32384	58	2	core	core	NOUN
ajst-32384	58	3	principle	principle	NOUN
ajst-32384	58	4	lies	lie	VERB
ajst-32384	58	5	in	in	ADP
ajst-32384	58	6	a	a	DET
ajst-32384	58	7	closed	closed	ADJ
ajst-32384	58	8	-	-	PUNCT
ajst-32384	58	9	loop	loop	NOUN
ajst-32384	58	10	optimization	optimization	NOUN
ajst-32384	58	11	mechanism	mechanism	NOUN
ajst-32384	58	12	based	base	VERB
ajst-32384	58	13	on	on	ADP
ajst-32384	58	14	historical	historical	ADJ
ajst-32384	58	15	operational	operational	ADJ
ajst-32384	58	16	data	datum	NOUN
ajst-32384	58	17	.	.	PUNCT
ajst-32384	59	1	this	this	DET
ajst-32384	59	2	method	method	NOUN
ajst-32384	59	3	involves	involve	VERB
ajst-32384	59	4	collecting	collect	VERB
ajst-32384	59	5	deviation	deviation	NOUN
ajst-32384	59	6	information	information	NOUN
ajst-32384	59	7	between	between	ADP
ajst-32384	59	8	the	the	DET
ajst-32384	59	9	output	output	NOUN
ajst-32384	59	10	feedback	feedback	NOUN
ajst-32384	59	11	of	of	ADP
ajst-32384	59	12	the	the	DET
ajst-32384	59	13	current	current	ADJ
ajst-32384	59	14	control	control	NOUN
ajst-32384	59	15	cycle	cycle	NOUN
ajst-32384	59	16	and	and	CCONJ
ajst-32384	59	17	the	the	DET
ajst-32384	59	18	preset	preset	ADJ
ajst-32384	59	19	target	target	NOUN
ajst-32384	59	20	trajectory	trajectory	NOUN
ajst-32384	59	21	[	[	X
ajst-32384	59	22	12	12	NUM
ajst-32384	59	23	]	]	PUNCT
ajst-32384	59	24	.	.	PUNCT
ajst-32384	60	1	after	after	ADP
ajst-32384	60	2	processing	process	VERB
ajst-32384	60	3	with	with	ADP
ajst-32384	60	4	an	an	DET
ajst-32384	60	5	iterative	iterative	NOUN
ajst-32384	60	6	learning	learning	NOUN
ajst-32384	60	7	algorithm	algorithm	NOUN
ajst-32384	60	8	,	,	PUNCT
ajst-32384	60	9	optimized	optimize	VERB
ajst-32384	60	10	control	control	NOUN
ajst-32384	60	11	inputs	input	NOUN
ajst-32384	60	12	are	be	AUX
ajst-32384	60	13	generated	generate	VERB
ajst-32384	60	14	,	,	PUNCT
ajst-32384	60	15	ultimately	ultimately	ADV
ajst-32384	60	16	achieving	achieve	VERB
ajst-32384	60	17	precise	precise	ADJ
ajst-32384	60	18	suppression	suppression	NOUN
ajst-32384	60	19	of	of	ADP
ajst-32384	60	20	periodic	periodic	ADJ
ajst-32384	60	21	disturbances	disturbance	NOUN
ajst-32384	60	22	and	and	CCONJ
ajst-32384	60	23	continuous	continuous	ADJ
ajst-32384	60	24	improvement	improvement	NOUN
ajst-32384	60	25	in	in	ADP
ajst-32384	60	26	trajectory	trajectory	NOUN
ajst-32384	60	27	tracking	tracking	NOUN
ajst-32384	60	28	accuracy	accuracy	NOUN
ajst-32384	60	29	within	within	ADP
ajst-32384	60	30	a	a	DET
ajst-32384	60	31	finite	finite	ADJ
ajst-32384	60	32	time	time	NOUN
ajst-32384	60	33	domain	domain	NOUN
ajst-32384	60	34	.	.	PUNCT
ajst-32384	61	1	its	its	PRON
ajst-32384	61	2	control	control	NOUN
ajst-32384	61	3	architecture	architecture	NOUN
ajst-32384	61	4	typically	typically	ADV
ajst-32384	61	5	includes	include	VERB
ajst-32384	61	6	three	three	NUM
ajst-32384	61	7	key	key	ADJ
ajst-32384	61	8	elements	element	NOUN
ajst-32384	61	9	:	:	PUNCT
ajst-32384	61	10	a	a	DET
ajst-32384	61	11	preset	preset	ADJ
ajst-32384	61	12	reference	reference	NOUN
ajst-32384	61	13	trajectory	trajectory	NOUN
ajst-32384	61	14	generation	generation	NOUN
ajst-32384	61	15	module	module	NOUN
ajst-32384	61	16	;	;	PUNCT
ajst-32384	61	17	a	a	DET
ajst-32384	61	18	dynamic	dynamic	ADJ
ajst-32384	61	19	error	error	NOUN
ajst-32384	61	20	compensation	compensation	NOUN
ajst-32384	61	21	calculation	calculation	NOUN
ajst-32384	61	22	unit	unit	NOUN
ajst-32384	61	23	;	;	PUNCT
ajst-32384	61	24	and	and	CCONJ
ajst-32384	61	25	an	an	DET
ajst-32384	61	26	iterative	iterative	NOUN
ajst-32384	61	27	learning	learning	NOUN
ajst-32384	61	28	gain	gain	VERB
ajst-32384	61	29	adjustment	adjustment	NOUN
ajst-32384	61	30	mechanism	mechanism	NOUN
ajst-32384	61	31	.	.	PUNCT
ajst-32384	62	1	by	by	ADP
ajst-32384	62	2	introducing	introduce	VERB
ajst-32384	62	3	a	a	DET
ajst-32384	62	4	memory	memory	NOUN
ajst-32384	62	5	storage	storage	NOUN
ajst-32384	62	6	unit	unit	NOUN
ajst-32384	62	7	,	,	PUNCT
ajst-32384	62	8	iterative	iterative	NOUN
ajst-32384	62	9	learning	learning	NOUN
ajst-32384	62	10	control	control	NOUN
ajst-32384	62	11	uses	use	VERB
ajst-32384	62	12	the	the	DET
ajst-32384	62	13	control	control	NOUN
ajst-32384	62	14	inputs	input	NOUN
ajst-32384	62	15	and	and	CCONJ
ajst-32384	62	16	error	error	NOUN
ajst-32384	62	17	information	information	NOUN
ajst-32384	62	18	from	from	ADP
ajst-32384	62	19	previous	previous	ADJ
ajst-32384	62	20	runs	run	NOUN
ajst-32384	62	21	as	as	ADP
ajst-32384	62	22	references	reference	NOUN
ajst-32384	62	23	for	for	ADP
ajst-32384	62	24	current	current	ADJ
ajst-32384	62	25	control	control	NOUN
ajst-32384	62	26	decisions	decision	NOUN
ajst-32384	62	27	,	,	PUNCT
ajst-32384	62	28	forming	form	VERB
ajst-32384	62	29	a	a	DET
ajst-32384	62	30	control	control	NOUN
ajst-32384	62	31	law	law	NOUN
ajst-32384	62	32	with	with	ADP
ajst-32384	62	33	recursive	recursive	ADJ
ajst-32384	62	34	optimization	optimization	NOUN
ajst-32384	62	35	characteristics	characteristic	NOUN
ajst-32384	62	36	.	.	PUNCT
ajst-32384	63	1	this	this	DET
ajst-32384	63	2	learning	learning	NOUN
ajst-32384	63	3	mechanism	mechanism	NOUN
ajst-32384	63	4	based	base	VERB
ajst-32384	63	5	on	on	ADP
ajst-32384	63	6	historical	historical	ADJ
ajst-32384	63	7	data	datum	NOUN
ajst-32384	63	8	enables	enable	VERB
ajst-32384	63	9	the	the	DET
ajst-32384	63	10	control	control	NOUN
ajst-32384	63	11	system	system	NOUN
ajst-32384	63	12	to	to	PART
ajst-32384	63	13	continuously	continuously	ADV
ajst-32384	63	14	improve	improve	VERB
ajst-32384	63	15	performance	performance	NOUN
ajst-32384	63	16	in	in	ADP
ajst-32384	63	17	repetitive	repetitive	ADJ
ajst-32384	63	18	tasks	task	NOUN
ajst-32384	63	19	,	,	PUNCT
ajst-32384	63	20	ultimately	ultimately	ADV
ajst-32384	63	21	achieving	achieve	VERB
ajst-32384	63	22	an	an	DET
ajst-32384	63	23	exponential	exponential	ADJ
ajst-32384	63	24	improvement	improvement	NOUN
ajst-32384	63	25	in	in	ADP
ajst-32384	63	26	control	control	NOUN
ajst-32384	63	27	accuracy	accuracy	NOUN
ajst-32384	63	28	.	.	PUNCT
ajst-32384	64	1	the	the	DET
ajst-32384	64	2	block	block	NOUN
ajst-32384	64	3	diagram	diagram	NOUN
ajst-32384	64	4	of	of	ADP
ajst-32384	64	5	feedback	feedback	NOUN
ajst-32384	64	6	control	control	NOUN
ajst-32384	64	7	with	with	ADP
ajst-32384	64	8	iterative	iterative	NOUN
ajst-32384	64	9	learning	learning	NOUN
ajst-32384	64	10	control	control	NOUN
ajst-32384	64	11	is	be	AUX
ajst-32384	64	12	shown	show	VERB
ajst-32384	64	13	in	in	ADP
ajst-32384	64	14	fig	fig	NOUN
ajst-32384	64	15	.	.	PUNCT
ajst-32384	65	1	3	3	X
ajst-32384	65	2	.	.	X
ajst-32384	65	3	120	120	NUM
ajst-32384	65	4	storage	storage	NOUN
ajst-32384	65	5	iterative	iterative	NOUN
ajst-32384	65	6	learning	learning	NOUN
ajst-32384	65	7	gain	gain	VERB
ajst-32384	65	8	storage	storage	NOUN
ajst-32384	65	9	pid	pid	NOUN
ajst-32384	65	10	controller	controller	PROPN
ajst-32384	65	11	vcm	vcm	PROPN
ajst-32384	65	12	fig	fig	PROPN
ajst-32384	65	13	.	.	PUNCT
ajst-32384	66	1	3	3	NUM
ajst-32384	66	2	block	block	NOUN
ajst-32384	66	3	diagram	diagram	NOUN
ajst-32384	66	4	of	of	ADP
ajst-32384	66	5	feedback	feedback	NOUN
ajst-32384	66	6	control	control	NOUN
ajst-32384	66	7	with	with	ADP
ajst-32384	66	8	iterative	iterative	NOUN
ajst-32384	66	9	learning	learning	NOUN
ajst-32384	66	10	control	control	NOUN
ajst-32384	66	11	in	in	ADP
ajst-32384	66	12	summary	summary	NOUN
ajst-32384	66	13	,	,	PUNCT
ajst-32384	66	14	iterative	iterative	NOUN
ajst-32384	66	15	learning	learning	NOUN
ajst-32384	66	16	control	control	NOUN
ajst-32384	66	17	utilizes	utilize	VERB
ajst-32384	66	18	memory	memory	NOUN
ajst-32384	66	19	for	for	ADP
ajst-32384	66	20	real	real	ADJ
ajst-32384	66	21	-	-	PUNCT
ajst-32384	66	22	time	time	NOUN
ajst-32384	66	23	data	datum	NOUN
ajst-32384	66	24	update	update	NOUN
ajst-32384	66	25	driving	driving	NOUN
ajst-32384	66	26	,	,	PUNCT
ajst-32384	66	27	incorporating	incorporate	VERB
ajst-32384	66	28	the	the	DET
ajst-32384	66	29	previous	previous	ADJ
ajst-32384	66	30	or	or	CCONJ
ajst-32384	66	31	current	current	ADJ
ajst-32384	66	32	system	system	NOUN
ajst-32384	66	33	error	error	NOUN
ajst-32384	66	34	into	into	ADP
ajst-32384	66	35	the	the	DET
ajst-32384	66	36	control	control	NOUN
ajst-32384	66	37	system	system	NOUN
ajst-32384	66	38	.	.	PUNCT
ajst-32384	67	1	compared	compare	VERB
ajst-32384	67	2	to	to	ADP
ajst-32384	67	3	traditional	traditional	ADJ
ajst-32384	67	4	control	control	NOUN
ajst-32384	67	5	methods	method	NOUN
ajst-32384	67	6	,	,	PUNCT
ajst-32384	67	7	it	it	PRON
ajst-32384	67	8	compensates	compensate	VERB
ajst-32384	67	9	for	for	ADP
ajst-32384	67	10	the	the	DET
ajst-32384	67	11	shortcomings	shortcoming	NOUN
ajst-32384	67	12	of	of	ADP
ajst-32384	67	13	time	time	NOUN
ajst-32384	67	14	delay	delay	NOUN
ajst-32384	67	15	and	and	CCONJ
ajst-32384	67	16	provides	provide	VERB
ajst-32384	67	17	a	a	DET
ajst-32384	67	18	more	more	ADV
ajst-32384	67	19	sensitive	sensitive	ADJ
ajst-32384	67	20	and	and	CCONJ
ajst-32384	67	21	rapid	rapid	ADJ
ajst-32384	67	22	response	response	NOUN
ajst-32384	67	23	to	to	ADP
ajst-32384	67	24	external	external	ADJ
ajst-32384	67	25	system	system	NOUN
ajst-32384	67	26	disturbances	disturbance	NOUN
ajst-32384	67	27	.	.	PUNCT
ajst-32384	68	1	2.4	2.4	NUM
ajst-32384	68	2	.	.	PUNCT
ajst-32384	68	3	neural	neural	ADJ
ajst-32384	68	4	network	network	NOUN
ajst-32384	68	5	pid	pid	NOUN
ajst-32384	68	6	feed	feed	VERB
ajst-32384	68	7	forward	forward	ADV
ajst-32384	68	8	control	control	NOUN
ajst-32384	68	9	error	error	NOUN
ajst-32384	68	10	back	back	NOUN
ajst-32384	68	11	propagation	propagation	NOUN
ajst-32384	68	12	training	training	NOUN
ajst-32384	68	13	neural	neural	ADJ
ajst-32384	68	14	network	network	NOUN
ajst-32384	68	15	,	,	PUNCT
ajst-32384	68	16	abbreviated	abbreviate	VERB
ajst-32384	68	17	as	as	ADP
ajst-32384	68	18	bp	bp	PROPN
ajst-32384	68	19	neural	neural	ADJ
ajst-32384	68	20	network	network	NOUN
ajst-32384	68	21	,	,	PUNCT
ajst-32384	68	22	is	be	AUX
ajst-32384	68	23	currently	currently	ADV
ajst-32384	68	24	the	the	DET
ajst-32384	68	25	most	most	ADV
ajst-32384	68	26	widely	widely	ADV
ajst-32384	68	27	used	use	VERB
ajst-32384	68	28	method	method	NOUN
ajst-32384	68	29	for	for	ADP
ajst-32384	68	30	training	train	VERB
ajst-32384	68	31	neural	neural	ADJ
ajst-32384	68	32	networks	network	NOUN
ajst-32384	68	33	.	.	PUNCT
ajst-32384	69	1	using	use	VERB
ajst-32384	69	2	a	a	DET
ajst-32384	69	3	very	very	ADV
ajst-32384	69	4	widely	widely	ADV
ajst-32384	69	5	used	use	VERB
ajst-32384	69	6	neural	neural	ADJ
ajst-32384	69	7	network	network	NOUN
ajst-32384	69	8	,	,	PUNCT
ajst-32384	69	9	the	the	DET
ajst-32384	69	10	topological	topological	ADJ
ajst-32384	69	11	structure	structure	NOUN
ajst-32384	69	12	of	of	ADP
ajst-32384	69	13	its	its	PRON
ajst-32384	69	14	model	model	NOUN
ajst-32384	69	15	.	.	PUNCT
ajst-32384	70	1	it	it	PRON
ajst-32384	70	2	includes	include	VERB
ajst-32384	70	3	one	one	NUM
ajst-32384	70	4	input	input	NOUN
ajst-32384	70	5	layer	layer	NOUN
ajst-32384	70	6	,	,	PUNCT
ajst-32384	70	7	one	one	NUM
ajst-32384	70	8	or	or	CCONJ
ajst-32384	70	9	multiple	multiple	ADJ
ajst-32384	70	10	hidden	hide	VERB
ajst-32384	70	11	layers	layer	NOUN
ajst-32384	70	12	,	,	PUNCT
ajst-32384	70	13	and	and	CCONJ
ajst-32384	70	14	one	one	NUM
ajst-32384	70	15	output	output	NOUN
ajst-32384	70	16	layer	layer	NOUN
ajst-32384	70	17	.	.	PUNCT
ajst-32384	71	1	layer	layer	NOUN
ajst-32384	71	2	.	.	PUNCT
ajst-32384	72	1	existing	exist	VERB
ajst-32384	72	2	research	research	NOUN
ajst-32384	72	3	has	have	AUX
ajst-32384	72	4	proven	prove	VERB
ajst-32384	72	5	that	that	SCONJ
ajst-32384	72	6	a	a	DET
ajst-32384	72	7	3	3	NUM
ajst-32384	72	8	-	-	PUNCT
ajst-32384	72	9	layer	layer	NOUN
ajst-32384	72	10	bp	bp	PROPN
ajst-32384	72	11	network	network	NOUN
ajst-32384	72	12	can	can	AUX
ajst-32384	72	13	achieve	achieve	VERB
ajst-32384	72	14	.	.	PUNCT
ajst-32384	73	1	approximate	approximate	ADJ
ajst-32384	73	2	various	various	ADJ
ajst-32384	73	3	nonlinear	nonlinear	ADJ
ajst-32384	73	4	physical	physical	ADJ
ajst-32384	73	5	objects	object	NOUN
ajst-32384	73	6	with	with	ADP
ajst-32384	73	7	sufficient	sufficient	ADJ
ajst-32384	73	8	accuracy	accuracy	NOUN
ajst-32384	73	9	,	,	PUNCT
ajst-32384	73	10	and	and	CCONJ
ajst-32384	73	11	increasing	increase	VERB
ajst-32384	73	12	the	the	DET
ajst-32384	73	13	number	number	NOUN
ajst-32384	73	14	of	of	ADP
ajst-32384	73	15	layers	layer	NOUN
ajst-32384	73	16	.	.	PUNCT
ajst-32384	74	1	to	to	PART
ajst-32384	74	2	further	far	ADV
ajst-32384	74	3	reduce	reduce	VERB
ajst-32384	74	4	errors	error	NOUN
ajst-32384	74	5	and	and	CCONJ
ajst-32384	74	6	improve	improve	VERB
ajst-32384	74	7	accuracy	accuracy	NOUN
ajst-32384	74	8	,	,	PUNCT
ajst-32384	74	9	but	but	CCONJ
ajst-32384	74	10	also	also	ADV
ajst-32384	74	11	to	to	PART
ajst-32384	74	12	make	make	VERB
ajst-32384	74	13	the	the	DET
ajst-32384	74	14	network	network	NOUN
ajst-32384	74	15	.	.	PUNCT
ajst-32384	75	1	the	the	DET
ajst-32384	75	2	network	network	NOUN
ajst-32384	75	3	is	be	AUX
ajst-32384	75	4	more	more	ADV
ajst-32384	75	5	complex	complex	ADJ
ajst-32384	75	6	,	,	PUNCT
ajst-32384	75	7	increasing	increase	VERB
ajst-32384	75	8	the	the	DET
ajst-32384	75	9	training	training	NOUN
ajst-32384	75	10	time	time	NOUN
ajst-32384	75	11	for	for	ADP
ajst-32384	75	12	network	network	NOUN
ajst-32384	75	13	weights	weight	NOUN
ajst-32384	75	14	and	and	CCONJ
ajst-32384	75	15	thresholds	threshold	NOUN
ajst-32384	75	16	.	.	PUNCT
ajst-32384	76	1	bp	bp	PROPN
ajst-32384	76	2	neural	neural	ADJ
ajst-32384	76	3	network	network	NOUN
ajst-32384	76	4	.	.	PUNCT
ajst-32384	77	1	the	the	DET
ajst-32384	77	2	learning	learning	NOUN
ajst-32384	77	3	process	process	NOUN
ajst-32384	77	4	can	can	AUX
ajst-32384	77	5	be	be	AUX
ajst-32384	77	6	divided	divide	VERB
ajst-32384	77	7	into	into	ADP
ajst-32384	77	8	forward	forward	ADJ
ajst-32384	77	9	propagation	propagation	NOUN
ajst-32384	77	10	of	of	ADP
ajst-32384	77	11	signals	signal	NOUN
ajst-32384	77	12	and	and	CCONJ
ajst-32384	77	13	error	error	NOUN
ajst-32384	77	14	back	back	NOUN
ajst-32384	77	15	propagation	propagation	NOUN
ajst-32384	77	16	has	have	VERB
ajst-32384	77	17	two	two	NUM
ajst-32384	77	18	stages	stage	NOUN
ajst-32384	78	1	[	[	X
ajst-32384	78	2	13	13	NUM
ajst-32384	78	3	]	]	PUNCT
ajst-32384	78	4	.	.	PUNCT
ajst-32384	79	1	the	the	DET
ajst-32384	79	2	forward	forward	ADJ
ajst-32384	79	3	propagation	propagation	NOUN
ajst-32384	79	4	stage	stage	NOUN
ajst-32384	79	5	of	of	ADP
ajst-32384	79	6	the	the	DET
ajst-32384	79	7	signal	signal	NOUN
ajst-32384	79	8	,	,	PUNCT
ajst-32384	79	9	and	and	CCONJ
ajst-32384	79	10	the	the	DET
ajst-32384	79	11	sample	sample	NOUN
ajst-32384	79	12	data	datum	NOUN
ajst-32384	79	13	.	.	PUNCT
ajst-32384	80	1	input	input	NOUN
ajst-32384	80	2	is	be	AUX
ajst-32384	80	3	fed	feed	VERB
ajst-32384	80	4	into	into	ADP
ajst-32384	80	5	the	the	DET
ajst-32384	80	6	input	input	NOUN
ajst-32384	80	7	layer	layer	NOUN
ajst-32384	80	8	,	,	PUNCT
ajst-32384	80	9	processed	process	VERB
ajst-32384	80	10	by	by	ADP
ajst-32384	80	11	the	the	DET
ajst-32384	80	12	hidden	hide	VERB
ajst-32384	80	13	layer	layer	NOUN
ajst-32384	80	14	,	,	PUNCT
ajst-32384	80	15	and	and	CCONJ
ajst-32384	80	16	then	then	ADV
ajst-32384	80	17	passed	pass	VERB
ajst-32384	80	18	to	to	ADP
ajst-32384	80	19	the	the	DET
ajst-32384	80	20	output	output	NOUN
ajst-32384	80	21	layer	layer	NOUN
ajst-32384	80	22	.	.	PUNCT
ajst-32384	81	1	if	if	SCONJ
ajst-32384	81	2	the	the	DET
ajst-32384	81	3	actual	actual	ADJ
ajst-32384	81	4	output	output	NOUN
ajst-32384	81	5	of	of	ADP
ajst-32384	81	6	the	the	DET
ajst-32384	81	7	layer	layer	NOUN
ajst-32384	81	8	does	do	AUX
ajst-32384	81	9	not	not	PART
ajst-32384	81	10	match	match	VERB
ajst-32384	81	11	the	the	DET
ajst-32384	81	12	expected	expect	VERB
ajst-32384	81	13	output	output	NOUN
ajst-32384	81	14	,	,	PUNCT
ajst-32384	81	15	proceed	proceed	VERB
ajst-32384	81	16	to	to	PART
ajst-32384	81	17	error	error	VERB
ajst-32384	81	18	back	back	NOUN
ajst-32384	81	19	propagation	propagation	NOUN
ajst-32384	81	20	.	.	PUNCT
ajst-32384	82	1	"	"	PUNCT
ajst-32384	82	2	to	to	ADP
ajst-32384	82	3	the	the	DET
ajst-32384	82	4	stage	stage	NOUN
ajst-32384	82	5	of	of	ADP
ajst-32384	82	6	propagation	propagation	NOUN
ajst-32384	82	7	.	.	PUNCT
ajst-32384	83	1	in	in	ADP
ajst-32384	83	2	the	the	DET
ajst-32384	83	3	error	error	NOUN
ajst-32384	83	4	back	back	NOUN
ajst-32384	83	5	propagation	propagation	NOUN
ajst-32384	83	6	stage	stage	NOUN
ajst-32384	83	7	,	,	PUNCT
ajst-32384	83	8	the	the	DET
ajst-32384	83	9	output	output	NOUN
ajst-32384	83	10	error	error	NOUN
ajst-32384	83	11	is	be	AUX
ajst-32384	83	12	...	...	PUNCT
ajst-32384	83	13	"back	"back	VERB
ajst-32384	83	14	propagate	propagate	ADJ
ajst-32384	83	15	layer	layer	NOUN
ajst-32384	83	16	by	by	ADP
ajst-32384	83	17	layer	layer	NOUN
ajst-32384	83	18	from	from	ADP
ajst-32384	83	19	the	the	DET
ajst-32384	83	20	hidden	hide	VERB
ajst-32384	83	21	layer	layer	NOUN
ajst-32384	83	22	to	to	ADP
ajst-32384	83	23	the	the	DET
ajst-32384	83	24	input	input	NOUN
ajst-32384	83	25	layer	layer	NOUN
ajst-32384	83	26	,	,	PUNCT
ajst-32384	83	27	and	and	CCONJ
ajst-32384	83	28	allocate	allocate	VERB
ajst-32384	83	29	the	the	DET
ajst-32384	83	30	error	error	NOUN
ajst-32384	83	31	to	to	ADP
ajst-32384	83	32	each	each	PRON
ajst-32384	83	33	.	.	PUNCT
ajst-32384	84	1	all	all	DET
ajst-32384	84	2	nodes	node	NOUN
ajst-32384	84	3	in	in	ADP
ajst-32384	84	4	the	the	DET
ajst-32384	84	5	layer	layer	NOUN
ajst-32384	84	6	serve	serve	VERB
ajst-32384	84	7	as	as	ADP
ajst-32384	84	8	the	the	DET
ajst-32384	84	9	basis	basis	NOUN
ajst-32384	84	10	for	for	ADP
ajst-32384	84	11	adjusting	adjust	VERB
ajst-32384	84	12	the	the	DET
ajst-32384	84	13	weights	weight	NOUN
ajst-32384	84	14	of	of	ADP
ajst-32384	84	15	each	each	DET
ajst-32384	84	16	node	node	NOUN
ajst-32384	84	17	.	.	PUNCT
ajst-32384	85	1	the	the	DET
ajst-32384	85	2	learning	learning	NOUN
ajst-32384	85	3	and	and	CCONJ
ajst-32384	85	4	training	training	NOUN
ajst-32384	85	5	process	process	NOUN
ajst-32384	85	6	of	of	ADP
ajst-32384	85	7	a	a	DET
ajst-32384	85	8	neural	neural	ADJ
ajst-32384	85	9	network	network	NOUN
ajst-32384	85	10	involves	involve	VERB
ajst-32384	85	11	the	the	DET
ajst-32384	85	12	forward	forward	ADJ
ajst-32384	85	13	propagation	propagation	NOUN
ajst-32384	85	14	of	of	ADP
ajst-32384	85	15	signals	signal	NOUN
ajst-32384	85	16	and	and	CCONJ
ajst-32384	85	17	the	the	DET
ajst-32384	85	18	calculation	calculation	NOUN
ajst-32384	85	19	of	of	ADP
ajst-32384	85	20	errors	error	NOUN
ajst-32384	85	21	.	.	PUNCT
ajst-32384	86	1	the	the	DET
ajst-32384	86	2	back	back	ADJ
ajst-32384	86	3	propagation	propagation	NOUN
ajst-32384	86	4	process	process	NOUN
ajst-32384	86	5	is	be	AUX
ajst-32384	86	6	carried	carry	VERB
ajst-32384	86	7	out	out	ADP
ajst-32384	86	8	iteratively	iteratively	ADV
ajst-32384	86	9	,	,	PUNCT
ajst-32384	86	10	during	during	ADP
ajst-32384	86	11	which	which	PRON
ajst-32384	86	12	the	the	DET
ajst-32384	86	13	weights	weight	NOUN
ajst-32384	86	14	of	of	ADP
ajst-32384	86	15	each	each	DET
ajst-32384	86	16	layer	layer	NOUN
ajst-32384	86	17	are	be	AUX
ajst-32384	86	18	continuously	continuously	ADV
ajst-32384	86	19	updated	update	VERB
ajst-32384	86	20	.	.	PUNCT
ajst-32384	87	1	adjust	adjust	VERB
ajst-32384	87	2	.	.	PUNCT
ajst-32384	88	1	the	the	DET
ajst-32384	88	2	learning	learning	NOUN
ajst-32384	88	3	process	process	NOUN
ajst-32384	88	4	continues	continue	VERB
ajst-32384	88	5	until	until	SCONJ
ajst-32384	88	6	the	the	DET
ajst-32384	88	7	error	error	NOUN
ajst-32384	88	8	of	of	ADP
ajst-32384	88	9	the	the	DET
ajst-32384	88	10	network	network	NOUN
ajst-32384	88	11	output	output	NOUN
ajst-32384	88	12	becomes	become	VERB
ajst-32384	88	13	acceptable	acceptable	ADJ
ajst-32384	88	14	.	.	PUNCT
ajst-32384	89	1	or	or	CCONJ
ajst-32384	89	2	until	until	SCONJ
ajst-32384	89	3	the	the	DET
ajst-32384	89	4	preset	preset	ADJ
ajst-32384	89	5	number	number	NOUN
ajst-32384	89	6	of	of	ADP
ajst-32384	89	7	cyclic	cyclic	ADJ
ajst-32384	89	8	learning	learning	NOUN
ajst-32384	89	9	times	time	NOUN
ajst-32384	89	10	is	be	AUX
ajst-32384	89	11	reached	reach	VERB
ajst-32384	89	12	.	.	PUNCT
ajst-32384	90	1	bp	bp	PROPN
ajst-32384	90	2	neural	neural	PROPN
ajst-32384	90	3	networks	network	NOUN
ajst-32384	90	4	are	be	AUX
ajst-32384	90	5	often	often	ADV
ajst-32384	90	6	used	use	VERB
ajst-32384	90	7	to	to	ADP
ajst-32384	90	8	self	self	NOUN
ajst-32384	90	9	-	-	PUNCT
ajst-32384	90	10	tune	tune	NOUN
ajst-32384	90	11	pid	pid	NOUN
ajst-32384	90	12	parameters	parameter	NOUN
ajst-32384	90	13	online	online	ADV
ajst-32384	90	14	.	.	PUNCT
ajst-32384	91	1	the	the	DET
ajst-32384	91	2	control	control	NOUN
ajst-32384	91	3	model	model	NOUN
ajst-32384	91	4	of	of	ADP
ajst-32384	91	5	voice	voice	NOUN
ajst-32384	91	6	coil	coil	NOUN
ajst-32384	91	7	motor	motor	NOUN
ajst-32384	91	8	positioning	positioning	NOUN
ajst-32384	91	9	system	system	NOUN
ajst-32384	91	10	is	be	AUX
ajst-32384	91	11	shown	show	VERB
ajst-32384	91	12	in	in	ADP
ajst-32384	91	13	fig	fig	NOUN
ajst-32384	91	14	.	.	PUNCT
ajst-32384	92	1	4	4	X
ajst-32384	92	2	.	.	X
ajst-32384	92	3	pid	pid	NOUN
ajst-32384	92	4	controller	controller	PROPN
ajst-32384	92	5	bp	bp	PROPN
ajst-32384	92	6	neural	neural	PROPN
ajst-32384	92	7	network	network	NOUN
ajst-32384	92	8	position	position	NOUN
ajst-32384	92	9	detection	detection	NOUN
ajst-32384	92	10	current	current	ADJ
ajst-32384	92	11	detection	detection	NOUN
ajst-32384	92	12	current	current	NOUN
ajst-32384	92	13	p	p	ADJ
ajst-32384	92	14	regulati	regulati	NOUN
ajst-32384	92	15	on	on	ADP
ajst-32384	92	16	current	current	ADJ
ajst-32384	92	17	increase	increase	NOUN
ajst-32384	92	18	vcm	vcm	PROPN
ajst-32384	92	19	kp	kp	PROPN
ajst-32384	92	20	ki	ki	PROPN
ajst-32384	92	21	kd	kd	PROPN
ajst-32384	92	22	fig	fig	PROPN
ajst-32384	92	23	.	.	PUNCT
ajst-32384	93	1	4	4	NUM
ajst-32384	93	2	control	control	NOUN
ajst-32384	93	3	model	model	NOUN
ajst-32384	93	4	of	of	ADP
ajst-32384	93	5	voice	voice	NOUN
ajst-32384	93	6	coil	coil	NOUN
ajst-32384	93	7	motor	motor	NOUN
ajst-32384	93	8	positioning	positioning	NOUN
ajst-32384	93	9	system	system	NOUN
ajst-32384	93	10	121	121	NUM
ajst-32384	93	11	2.5	2.5	NUM
ajst-32384	93	12	.	.	PUNCT
ajst-32384	94	1	fuzzy	fuzzy	ADJ
ajst-32384	94	2	control	control	PROPN
ajst-32384	94	3	fuzzy	fuzzy	ADJ
ajst-32384	94	4	control	control	NOUN
ajst-32384	94	5	,	,	PUNCT
ajst-32384	94	6	or	or	CCONJ
ajst-32384	94	7	fuzzy	fuzzy	ADJ
ajst-32384	94	8	control	control	NOUN
ajst-32384	94	9	system	system	NOUN
ajst-32384	94	10	,	,	PUNCT
ajst-32384	94	11	is	be	AUX
ajst-32384	94	12	an	an	DET
ajst-32384	94	13	automatic	automatic	ADJ
ajst-32384	94	14	control	control	NOUN
ajst-32384	94	15	system	system	NOUN
ajst-32384	94	16	that	that	PRON
ajst-32384	94	17	utilizes	utilize	VERB
ajst-32384	94	18	fuzzy	fuzzy	ADJ
ajst-32384	94	19	mathematics	mathematic	NOUN
ajst-32384	94	20	and	and	CCONJ
ajst-32384	94	21	fuzzy	fuzzy	ADJ
ajst-32384	94	22	language	language	NOUN
ajst-32384	94	23	.	.	PUNCT
ajst-32384	95	1	based	base	VERB
ajst-32384	95	2	on	on	ADP
ajst-32384	95	3	the	the	DET
ajst-32384	95	4	theoretical	theoretical	ADJ
ajst-32384	95	5	foundation	foundation	NOUN
ajst-32384	95	6	of	of	ADP
ajst-32384	95	7	formal	formal	ADJ
ajst-32384	95	8	knowledge	knowledge	NOUN
ajst-32384	95	9	representation	representation	NOUN
ajst-32384	95	10	and	and	CCONJ
ajst-32384	95	11	fuzzy	fuzzy	ADJ
ajst-32384	95	12	logic	logic	NOUN
ajst-32384	95	13	reasoning	reasoning	NOUN
ajst-32384	95	14	,	,	PUNCT
ajst-32384	95	15	it	it	PRON
ajst-32384	95	16	is	be	AUX
ajst-32384	95	17	a	a	DET
ajst-32384	95	18	system	system	NOUN
ajst-32384	95	19	composed	compose	VERB
ajst-32384	95	20	of	of	ADP
ajst-32384	95	21	computer	computer	NOUN
ajst-32384	95	22	technology	technology	NOUN
ajst-32384	95	23	with	with	ADP
ajst-32384	95	24	a	a	DET
ajst-32384	95	25	closed	closed	ADJ
ajst-32384	95	26	-	-	PUNCT
ajst-32384	95	27	loop	loop	NOUN
ajst-32384	95	28	structure	structure	NOUN
ajst-32384	95	29	[	[	X
ajst-32384	95	30	14	14	NUM
ajst-32384	95	31	]	]	PUNCT
ajst-32384	95	32	.	.	PUNCT
ajst-32384	96	1	the	the	DET
ajst-32384	96	2	digital	digital	ADJ
ajst-32384	96	3	control	control	NOUN
ajst-32384	96	4	system	system	NOUN
ajst-32384	96	5	of	of	ADP
ajst-32384	96	6	the	the	DET
ajst-32384	96	7	structure	structure	NOUN
ajst-32384	96	8	.	.	PUNCT
ajst-32384	97	1	the	the	DET
ajst-32384	97	2	structural	structural	ADJ
ajst-32384	97	3	block	block	NOUN
ajst-32384	97	4	diagram	diagram	NOUN
ajst-32384	97	5	of	of	ADP
ajst-32384	97	6	the	the	DET
ajst-32384	97	7	fuzzy	fuzzy	ADJ
ajst-32384	97	8	control	control	NOUN
ajst-32384	97	9	system	system	NOUN
ajst-32384	97	10	,	,	PUNCT
ajst-32384	97	11	which	which	PRON
ajst-32384	97	12	consists	consist	VERB
ajst-32384	97	13	of	of	ADP
ajst-32384	97	14	a	a	DET
ajst-32384	97	15	/	/	SYM
ajst-32384	97	16	d	d	NOUN
ajst-32384	97	17	,	,	PUNCT
ajst-32384	97	18	d	d	NOUN
ajst-32384	97	19	/	/	SYM
ajst-32384	97	20	a	a	DET
ajst-32384	97	21	conversion	conversion	NOUN
ajst-32384	97	22	interfaces	interface	NOUN
ajst-32384	97	23	,	,	PUNCT
ajst-32384	97	24	fuzzy	fuzzy	ADJ
ajst-32384	97	25	controllers	controller	NOUN
ajst-32384	97	26	,	,	PUNCT
ajst-32384	97	27	sensors	sensor	NOUN
ajst-32384	97	28	,	,	PUNCT
ajst-32384	97	29	and	and	CCONJ
ajst-32384	97	30	other	other	ADJ
ajst-32384	97	31	components	component	NOUN
ajst-32384	97	32	.	.	PUNCT
ajst-32384	98	1	the	the	DET
ajst-32384	98	2	block	block	NOUN
ajst-32384	98	3	diagram	diagram	NOUN
ajst-32384	98	4	of	of	ADP
ajst-32384	98	5	fuzzy	fuzzy	ADJ
ajst-32384	98	6	system	system	NOUN
ajst-32384	98	7	control	control	NOUN
ajst-32384	98	8	structure	structure	NOUN
ajst-32384	98	9	is	be	AUX
ajst-32384	98	10	shown	show	VERB
ajst-32384	98	11	in	in	ADP
ajst-32384	98	12	fig	fig	NOUN
ajst-32384	98	13	.	.	PUNCT
ajst-32384	99	1	5	5	X
ajst-32384	99	2	.	.	X
ajst-32384	99	3	a	a	PRON
ajst-32384	99	4	/	/	SYM
ajst-32384	99	5	d	d	NOUN
ajst-32384	99	6	fuzzy	fuzzy	ADJ
ajst-32384	99	7	controller	controller	NOUN
ajst-32384	99	8	d	d	NOUN
ajst-32384	99	9	/	/	SYM
ajst-32384	99	10	a	a	DET
ajst-32384	99	11	actuator	actuator	NOUN
ajst-32384	99	12	vcm	vcm	PROPN
ajst-32384	99	13	sensor	sensor	PROPN
ajst-32384	99	14	fig	fig	NOUN
ajst-32384	99	15	.	.	PUNCT
ajst-32384	100	1	5	5	NUM
ajst-32384	100	2	block	block	NOUN
ajst-32384	100	3	diagram	diagram	NOUN
ajst-32384	100	4	of	of	ADP
ajst-32384	100	5	fuzzy	fuzzy	ADJ
ajst-32384	100	6	system	system	NOUN
ajst-32384	100	7	control	control	NOUN
ajst-32384	100	8	structure	structure	NOUN
ajst-32384	100	9	2.6	2.6	NUM
ajst-32384	100	10	.	.	PUNCT
ajst-32384	101	1	modern	modern	ADJ
ajst-32384	101	2	control	control	NOUN
ajst-32384	101	3	strategy	strategy	NOUN
ajst-32384	101	4	taking	take	VERB
ajst-32384	101	5	into	into	ADP
ajst-32384	101	6	account	account	NOUN
ajst-32384	101	7	the	the	DET
ajst-32384	101	8	time	time	NOUN
ajst-32384	101	9	-	-	PUNCT
ajst-32384	101	10	varying	vary	VERB
ajst-32384	101	11	and	and	CCONJ
ajst-32384	101	12	uncertain	uncertain	ADJ
ajst-32384	101	13	factors	factor	NOUN
ajst-32384	101	14	such	such	ADJ
ajst-32384	101	15	as	as	ADP
ajst-32384	101	16	the	the	DET
ajst-32384	101	17	structure	structure	NOUN
ajst-32384	101	18	and	and	CCONJ
ajst-32384	101	19	parameter	parameter	NOUN
ajst-32384	101	20	variations	variation	NOUN
ajst-32384	101	21	of	of	ADP
ajst-32384	101	22	the	the	DET
ajst-32384	101	23	vcm	vcm	PROPN
ajst-32384	101	24	servo	servo	NOUN
ajst-32384	101	25	system	system	NOUN
ajst-32384	101	26	,	,	PUNCT
ajst-32384	101	27	various	various	ADJ
ajst-32384	101	28	nonlinear	nonlinear	ADJ
ajst-32384	101	29	effects	effect	NOUN
ajst-32384	101	30	,	,	PUNCT
ajst-32384	101	31	changes	change	NOUN
ajst-32384	101	32	in	in	ADP
ajst-32384	101	33	the	the	DET
ajst-32384	101	34	working	working	NOUN
ajst-32384	101	35	environment	environment	NOUN
ajst-32384	101	36	,	,	PUNCT
ajst-32384	101	37	and	and	CCONJ
ajst-32384	101	38	environmental	environmental	ADJ
ajst-32384	101	39	disturbances	disturbance	NOUN
ajst-32384	101	40	,	,	PUNCT
ajst-32384	101	41	other	other	ADJ
ajst-32384	101	42	modern	modern	ADJ
ajst-32384	101	43	control	control	NOUN
ajst-32384	101	44	strategies	strategy	NOUN
ajst-32384	101	45	such	such	ADJ
ajst-32384	101	46	as	as	ADP
ajst-32384	101	47	adaptive	adaptive	ADJ
ajst-32384	101	48	control	control	NOUN
ajst-32384	101	49	and	and	CCONJ
ajst-32384	101	50	robust	robust	ADJ
ajst-32384	101	51	control	control	NOUN
ajst-32384	101	52	have	have	AUX
ajst-32384	101	53	been	be	AUX
ajst-32384	101	54	applied	apply	VERB
ajst-32384	101	55	in	in	ADP
ajst-32384	101	56	vcm	vcm	PROPN
ajst-32384	101	57	.	.	PUNCT
ajst-32384	102	1	here	here	ADV
ajst-32384	102	2	are	be	AUX
ajst-32384	102	3	a	a	DET
ajst-32384	102	4	few	few	ADJ
ajst-32384	102	5	simple	simple	ADJ
ajst-32384	102	6	examples	example	NOUN
ajst-32384	102	7	.	.	PUNCT
ajst-32384	103	1	adaptive	adaptive	ADJ
ajst-32384	103	2	control	control	NOUN
ajst-32384	103	3	integrates	integrate	VERB
ajst-32384	103	4	feedback	feedback	NOUN
ajst-32384	103	5	mechanisms	mechanism	NOUN
ajst-32384	103	6	with	with	ADP
ajst-32384	103	7	system	system	NOUN
ajst-32384	103	8	identification	identification	NOUN
ajst-32384	103	9	theory	theory	NOUN
ajst-32384	103	10	to	to	PART
ajst-32384	103	11	adjust	adjust	VERB
ajst-32384	103	12	the	the	DET
ajst-32384	103	13	dynamics	dynamic	NOUN
ajst-32384	103	14	of	of	ADP
ajst-32384	103	15	the	the	DET
ajst-32384	103	16	controlled	control	VERB
ajst-32384	103	17	system	system	NOUN
ajst-32384	103	18	based	base	VERB
ajst-32384	103	19	on	on	ADP
ajst-32384	103	20	the	the	DET
ajst-32384	103	21	pursuit	pursuit	NOUN
ajst-32384	103	22	of	of	ADP
ajst-32384	103	23	an	an	DET
ajst-32384	103	24	optimal	optimal	ADJ
ajst-32384	103	25	performance	performance	NOUN
ajst-32384	103	26	criterion	criterion	NOUN
ajst-32384	103	27	[	[	X
ajst-32384	103	28	15	15	NUM
ajst-32384	103	29	]	]	PUNCT
ajst-32384	103	30	.	.	PUNCT
ajst-32384	104	1	it	it	PRON
ajst-32384	104	2	is	be	AUX
ajst-32384	104	3	generally	generally	ADV
ajst-32384	104	4	categorized	categorize	VERB
ajst-32384	104	5	into	into	ADP
ajst-32384	104	6	two	two	NUM
ajst-32384	104	7	main	main	ADJ
ajst-32384	104	8	approaches	approach	NOUN
ajst-32384	104	9	:	:	PUNCT
ajst-32384	104	10	self	self	NOUN
ajst-32384	104	11	-	-	PUNCT
ajst-32384	104	12	tuning	tune	VERB
ajst-32384	104	13	regulators	regulator	NOUN
ajst-32384	104	14	and	and	CCONJ
ajst-32384	104	15	model	model	NOUN
ajst-32384	104	16	reference	reference	NOUN
ajst-32384	104	17	adaptive	adaptive	ADJ
ajst-32384	104	18	control	control	NOUN
ajst-32384	104	19	.	.	PUNCT
ajst-32384	105	1	by	by	ADP
ajst-32384	105	2	formulating	formulate	VERB
ajst-32384	105	3	appropriate	appropriate	ADJ
ajst-32384	105	4	parameter	parameter	NOUN
ajst-32384	105	5	adaptation	adaptation	NOUN
ajst-32384	105	6	laws	law	NOUN
ajst-32384	105	7	,	,	PUNCT
ajst-32384	105	8	the	the	DET
ajst-32384	105	9	control	control	NOUN
ajst-32384	105	10	error	error	NOUN
ajst-32384	105	11	can	can	AUX
ajst-32384	105	12	asymptotically	asymptotically	ADV
ajst-32384	105	13	converge	converge	VERB
ajst-32384	105	14	to	to	ADP
ajst-32384	105	15	zero	zero	NUM
ajst-32384	105	16	while	while	SCONJ
ajst-32384	105	17	preserving	preserve	VERB
ajst-32384	105	18	system	system	NOUN
ajst-32384	105	19	stability	stability	NOUN
ajst-32384	105	20	.	.	PUNCT
ajst-32384	106	1	this	this	DET
ajst-32384	106	2	control	control	NOUN
ajst-32384	106	3	technique	technique	NOUN
ajst-32384	106	4	is	be	AUX
ajst-32384	106	5	valued	value	VERB
ajst-32384	106	6	for	for	ADP
ajst-32384	106	7	its	its	PRON
ajst-32384	106	8	practicality	practicality	NOUN
ajst-32384	106	9	and	and	CCONJ
ajst-32384	106	10	effectiveness	effectiveness	NOUN
ajst-32384	106	11	in	in	ADP
ajst-32384	106	12	coping	cope	VERB
ajst-32384	106	13	with	with	ADP
ajst-32384	106	14	time	time	NOUN
ajst-32384	106	15	-	-	PUNCT
ajst-32384	106	16	varying	vary	VERB
ajst-32384	106	17	parameters	parameter	NOUN
ajst-32384	106	18	and	and	CCONJ
ajst-32384	106	19	various	various	ADJ
ajst-32384	106	20	internal	internal	ADJ
ajst-32384	106	21	or	or	CCONJ
ajst-32384	106	22	external	external	ADJ
ajst-32384	106	23	disturbances	disturbance	NOUN
ajst-32384	106	24	.	.	PUNCT
ajst-32384	107	1	in	in	ADP
ajst-32384	107	2	the	the	DET
ajst-32384	107	3	context	context	NOUN
ajst-32384	107	4	of	of	ADP
ajst-32384	107	5	vcm	vcm	PROPN
ajst-32384	107	6	applications	application	NOUN
ajst-32384	107	7	,	,	PUNCT
ajst-32384	107	8	adaptive	adaptive	ADJ
ajst-32384	107	9	control	control	NOUN
ajst-32384	107	10	is	be	AUX
ajst-32384	107	11	commonly	commonly	ADV
ajst-32384	107	12	utilized	utilize	VERB
ajst-32384	107	13	to	to	PART
ajst-32384	107	14	mitigate	mitigate	VERB
ajst-32384	107	15	uncertainties	uncertainty	NOUN
ajst-32384	107	16	such	such	ADJ
ajst-32384	107	17	as	as	ADP
ajst-32384	107	18	frictional	frictional	ADJ
ajst-32384	107	19	effects	effect	NOUN
ajst-32384	107	20	and	and	CCONJ
ajst-32384	107	21	mechanical	mechanical	ADJ
ajst-32384	107	22	vibrations	vibration	NOUN
ajst-32384	108	1	[	[	X
ajst-32384	108	2	16	16	NUM
ajst-32384	108	3	]	]	PUNCT
ajst-32384	108	4	.	.	PUNCT
ajst-32384	109	1	robust	robust	ADJ
ajst-32384	109	2	control	control	NOUN
ajst-32384	109	3	,	,	PUNCT
ajst-32384	109	4	on	on	ADP
ajst-32384	109	5	the	the	DET
ajst-32384	109	6	other	other	ADJ
ajst-32384	109	7	hand	hand	NOUN
ajst-32384	109	8	,	,	PUNCT
ajst-32384	109	9	relies	rely	VERB
ajst-32384	109	10	on	on	ADP
ajst-32384	109	11	state	state	NOUN
ajst-32384	109	12	-	-	PUNCT
ajst-32384	109	13	space	space	NOUN
ajst-32384	109	14	techniques	technique	NOUN
ajst-32384	109	15	to	to	PART
ajst-32384	109	16	design	design	VERB
ajst-32384	109	17	controllers	controller	NOUN
ajst-32384	109	18	capable	capable	ADJ
ajst-32384	109	19	of	of	ADP
ajst-32384	109	20	maintaining	maintain	VERB
ajst-32384	109	21	desired	desire	VERB
ajst-32384	109	22	performance	performance	NOUN
ajst-32384	109	23	levels	level	NOUN
ajst-32384	109	24	in	in	ADP
ajst-32384	109	25	the	the	DET
ajst-32384	109	26	presence	presence	NOUN
ajst-32384	109	27	of	of	ADP
ajst-32384	109	28	parameter	parameter	NOUN
ajst-32384	109	29	uncertainties	uncertainty	NOUN
ajst-32384	109	30	—	—	PUNCT
ajst-32384	109	31	whether	whether	SCONJ
ajst-32384	109	32	structural	structural	ADJ
ajst-32384	109	33	or	or	CCONJ
ajst-32384	109	34	parametric	parametric	ADJ
ajst-32384	109	35	.	.	PUNCT
ajst-32384	110	1	it	it	PRON
ajst-32384	110	2	is	be	AUX
ajst-32384	110	3	characterized	characterize	VERB
ajst-32384	110	4	by	by	ADP
ajst-32384	110	5	its	its	PRON
ajst-32384	110	6	strong	strong	ADJ
ajst-32384	110	7	disturbance	disturbance	NOUN
ajst-32384	110	8	rejection	rejection	NOUN
ajst-32384	110	9	capabilities	capability	NOUN
ajst-32384	110	10	and	and	CCONJ
ajst-32384	110	11	inherent	inherent	ADJ
ajst-32384	110	12	system	system	NOUN
ajst-32384	110	13	stability	stability	NOUN
ajst-32384	110	14	.	.	PUNCT
ajst-32384	111	1	however	however	ADV
ajst-32384	111	2	,	,	PUNCT
ajst-32384	111	3	due	due	ADP
ajst-32384	111	4	to	to	ADP
ajst-32384	111	5	its	its	PRON
ajst-32384	111	6	conservative	conservative	ADJ
ajst-32384	111	7	nature	nature	NOUN
ajst-32384	111	8	,	,	PUNCT
ajst-32384	111	9	robust	robust	ADJ
ajst-32384	111	10	control	control	NOUN
ajst-32384	111	11	systems	system	NOUN
ajst-32384	111	12	may	may	AUX
ajst-32384	111	13	not	not	PART
ajst-32384	111	14	always	always	ADV
ajst-32384	111	15	achieve	achieve	VERB
ajst-32384	111	16	optimal	optimal	ADJ
ajst-32384	111	17	steady	steady	ADJ
ajst-32384	111	18	-	-	PUNCT
ajst-32384	111	19	state	state	NOUN
ajst-32384	111	20	accuracy	accuracy	NOUN
ajst-32384	111	21	.	.	PUNCT
ajst-32384	112	1	as	as	ADP
ajst-32384	112	2	a	a	DET
ajst-32384	112	3	result	result	NOUN
ajst-32384	112	4	,	,	PUNCT
ajst-32384	112	5	this	this	DET
ajst-32384	112	6	method	method	NOUN
ajst-32384	112	7	is	be	AUX
ajst-32384	112	8	particularly	particularly	ADV
ajst-32384	112	9	advantageous	advantageous	ADJ
ajst-32384	112	10	in	in	ADP
ajst-32384	112	11	systems	system	NOUN
ajst-32384	112	12	subject	subject	ADJ
ajst-32384	112	13	to	to	ADP
ajst-32384	112	14	wide	wide	ADV
ajst-32384	112	15	-	-	PUNCT
ajst-32384	112	16	ranging	range	VERB
ajst-32384	112	17	uncertainties	uncertainty	NOUN
ajst-32384	112	18	and	and	CCONJ
ajst-32384	112	19	narrow	narrow	ADJ
ajst-32384	112	20	stability	stability	NOUN
ajst-32384	112	21	margins	margin	NOUN
ajst-32384	112	22	[	[	X
ajst-32384	112	23	17	17	NUM
ajst-32384	112	24	]	]	PUNCT
ajst-32384	112	25	.	.	PUNCT
ajst-32384	113	1	in	in	ADP
ajst-32384	113	2	the	the	DET
ajst-32384	113	3	field	field	NOUN
ajst-32384	113	4	of	of	ADP
ajst-32384	113	5	vcms	vcms	NOUN
ajst-32384	113	6	,	,	PUNCT
ajst-32384	113	7	robust	robust	ADJ
ajst-32384	113	8	control	control	NOUN
ajst-32384	113	9	has	have	AUX
ajst-32384	113	10	been	be	AUX
ajst-32384	113	11	proposed	propose	VERB
ajst-32384	113	12	as	as	ADP
ajst-32384	113	13	a	a	DET
ajst-32384	113	14	viable	viable	ADJ
ajst-32384	113	15	strategy	strategy	NOUN
ajst-32384	113	16	to	to	PART
ajst-32384	113	17	counteract	counteract	VERB
ajst-32384	113	18	unknown	unknown	ADJ
ajst-32384	113	19	external	external	ADJ
ajst-32384	113	20	influences	influence	NOUN
ajst-32384	113	21	and	and	CCONJ
ajst-32384	113	22	model	model	NOUN
ajst-32384	113	23	inaccuracies	inaccuracy	NOUN
ajst-32384	113	24	,	,	PUNCT
ajst-32384	113	25	thereby	thereby	ADV
ajst-32384	113	26	improving	improve	VERB
ajst-32384	113	27	both	both	CCONJ
ajst-32384	113	28	system	system	NOUN
ajst-32384	113	29	stability	stability	NOUN
ajst-32384	113	30	and	and	CCONJ
ajst-32384	113	31	trajectory	trajectory	NOUN
ajst-32384	113	32	tracking	tracking	NOUN
ajst-32384	113	33	accuracy	accuracy	NOUN
ajst-32384	113	34	.	.	PUNCT
ajst-32384	114	1	optimal	optimal	ADJ
ajst-32384	114	2	control	control	NOUN
ajst-32384	114	3	,	,	PUNCT
ajst-32384	114	4	which	which	PRON
ajst-32384	114	5	places	place	VERB
ajst-32384	114	6	significant	significant	ADJ
ajst-32384	114	7	emphasis	emphasis	NOUN
ajst-32384	114	8	on	on	ADP
ajst-32384	114	9	time	time	NOUN
ajst-32384	114	10	-	-	PUNCT
ajst-32384	114	11	response	response	NOUN
ajst-32384	114	12	characteristics	characteristic	NOUN
ajst-32384	114	13	,	,	PUNCT
ajst-32384	114	14	is	be	AUX
ajst-32384	114	15	often	often	ADV
ajst-32384	114	16	employed	employ	VERB
ajst-32384	114	17	in	in	ADP
ajst-32384	114	18	vcm	vcm	NOUN
ajst-32384	114	19	positioning	positioning	NOUN
ajst-32384	114	20	systems	system	NOUN
ajst-32384	114	21	to	to	PART
ajst-32384	114	22	achieve	achieve	VERB
ajst-32384	114	23	fast	fast	ADJ
ajst-32384	114	24	and	and	CCONJ
ajst-32384	114	25	precise	precise	ADJ
ajst-32384	114	26	motion	motion	NOUN
ajst-32384	114	27	.	.	PUNCT
ajst-32384	115	1	time	time	NOUN
ajst-32384	115	2	-	-	PUNCT
ajst-32384	115	3	optimal	optimal	ADJ
ajst-32384	115	4	control	control	NOUN
ajst-32384	115	5	(	(	PUNCT
ajst-32384	115	6	toc	toc	PROPN
ajst-32384	115	7	)	)	PUNCT
ajst-32384	115	8	,	,	PUNCT
ajst-32384	115	9	for	for	ADP
ajst-32384	115	10	example	example	NOUN
ajst-32384	115	11	,	,	PUNCT
ajst-32384	115	12	guides	guide	VERB
ajst-32384	115	13	the	the	DET
ajst-32384	115	14	system	system	NOUN
ajst-32384	115	15	through	through	ADP
ajst-32384	115	16	maximum	maximum	ADJ
ajst-32384	115	17	acceleration	acceleration	NOUN
ajst-32384	115	18	and	and	CCONJ
ajst-32384	115	19	deceleration	deceleration	NOUN
ajst-32384	115	20	phases	phase	NOUN
ajst-32384	115	21	,	,	PUNCT
ajst-32384	115	22	resembling	resemble	VERB
ajst-32384	115	23	bang	bang	PROPN
ajst-32384	115	24	-	-	PUNCT
ajst-32384	115	25	bang	bang	PROPN
ajst-32384	115	26	control	control	NOUN
ajst-32384	115	27	strategies	strategy	NOUN
ajst-32384	115	28	.	.	PUNCT
ajst-32384	116	1	while	while	SCONJ
ajst-32384	116	2	toc	toc	NOUN
ajst-32384	116	3	offers	offer	VERB
ajst-32384	116	4	outstanding	outstanding	ADJ
ajst-32384	116	5	dynamic	dynamic	ADJ
ajst-32384	116	6	behavior	behavior	NOUN
ajst-32384	116	7	,	,	PUNCT
ajst-32384	116	8	its	its	PRON
ajst-32384	116	9	sensitivity	sensitivity	NOUN
ajst-32384	116	10	to	to	ADP
ajst-32384	116	11	modeling	model	VERB
ajst-32384	116	12	errors	error	NOUN
ajst-32384	116	13	and	and	CCONJ
ajst-32384	116	14	disturbances	disturbance	NOUN
ajst-32384	116	15	can	can	AUX
ajst-32384	116	16	undermine	undermine	VERB
ajst-32384	116	17	performance	performance	NOUN
ajst-32384	116	18	[	[	X
ajst-32384	116	19	18	18	NUM
ajst-32384	116	20	]	]	PUNCT
ajst-32384	116	21	.	.	PUNCT
ajst-32384	117	1	to	to	PART
ajst-32384	117	2	enhance	enhance	VERB
ajst-32384	117	3	robustness	robustness	NOUN
ajst-32384	117	4	,	,	PUNCT
ajst-32384	117	5	proximate	proximate	VERB
ajst-32384	117	6	time	time	NOUN
ajst-32384	117	7	-	-	PUNCT
ajst-32384	117	8	optimal	optimal	ADJ
ajst-32384	117	9	control	control	NOUN
ajst-32384	117	10	(	(	PUNCT
ajst-32384	117	11	ptoc	ptoc	NOUN
ajst-32384	117	12	)	)	PUNCT
ajst-32384	117	13	introduces	introduce	VERB
ajst-32384	117	14	a	a	DET
ajst-32384	117	15	linear	linear	ADJ
ajst-32384	117	16	control	control	NOUN
ajst-32384	117	17	region	region	NOUN
ajst-32384	117	18	around	around	ADP
ajst-32384	117	19	small	small	ADJ
ajst-32384	117	20	error	error	NOUN
ajst-32384	117	21	values	value	NOUN
ajst-32384	117	22	,	,	PUNCT
ajst-32384	117	23	softening	soften	VERB
ajst-32384	117	24	the	the	DET
ajst-32384	117	25	switching	switch	VERB
ajst-32384	117	26	action	action	NOUN
ajst-32384	117	27	of	of	ADP
ajst-32384	117	28	toc	toc	NOUN
ajst-32384	117	29	and	and	CCONJ
ajst-32384	117	30	thereby	thereby	ADV
ajst-32384	117	31	increasing	increase	VERB
ajst-32384	117	32	resistance	resistance	NOUN
ajst-32384	117	33	to	to	ADP
ajst-32384	117	34	model	model	NOUN
ajst-32384	117	35	uncertainties	uncertainty	NOUN
ajst-32384	117	36	.	.	PUNCT
ajst-32384	118	1	within	within	ADP
ajst-32384	118	2	vcm	vcm	PROPN
ajst-32384	118	3	applications	application	NOUN
ajst-32384	118	4	,	,	PUNCT
ajst-32384	118	5	optimal	optimal	ADJ
ajst-32384	118	6	control	control	NOUN
ajst-32384	118	7	approaches	approach	NOUN
ajst-32384	118	8	—	—	PUNCT
ajst-32384	118	9	particularly	particularly	ADV
ajst-32384	118	10	ptoc	ptoc	NOUN
ajst-32384	118	11	—	—	PUNCT
ajst-32384	118	12	have	have	AUX
ajst-32384	118	13	demonstrated	demonstrate	VERB
ajst-32384	118	14	notable	notable	ADJ
ajst-32384	118	15	improvements	improvement	NOUN
ajst-32384	118	16	in	in	ADP
ajst-32384	118	17	motion	motion	NOUN
ajst-32384	118	18	responsiveness	responsiveness	NOUN
ajst-32384	118	19	and	and	CCONJ
ajst-32384	118	20	dynamic	dynamic	ADJ
ajst-32384	118	21	control	control	NOUN
ajst-32384	118	22	performance	performance	NOUN
ajst-32384	118	23	.	.	PUNCT
ajst-32384	119	1	122	122	NUM
ajst-32384	119	2	3	3	NUM
ajst-32384	119	3	.	.	PUNCT
ajst-32384	119	4	analysis	analysis	NOUN
ajst-32384	119	5	of	of	ADP
ajst-32384	119	6	engineering	engineering	NOUN
ajst-32384	119	7	application	application	NOUN
ajst-32384	119	8	scenarios	scenario	NOUN
ajst-32384	119	9	although	although	SCONJ
ajst-32384	119	10	the	the	DET
ajst-32384	119	11	voice	voice	NOUN
ajst-32384	119	12	coil	coil	NOUN
ajst-32384	119	13	motor	motor	NOUN
ajst-32384	119	14	position	position	NOUN
ajst-32384	119	15	servo	servo	NOUN
ajst-32384	119	16	drive	drive	NOUN
ajst-32384	119	17	system	system	NOUN
ajst-32384	119	18	eliminates	eliminate	VERB
ajst-32384	119	19	some	some	PRON
ajst-32384	119	20	of	of	ADP
ajst-32384	119	21	the	the	DET
ajst-32384	119	22	adverse	adverse	ADJ
ajst-32384	119	23	effects	effect	NOUN
ajst-32384	119	24	brought	bring	VERB
ajst-32384	119	25	by	by	ADP
ajst-32384	119	26	traditional	traditional	ADJ
ajst-32384	119	27	mechanical	mechanical	ADJ
ajst-32384	119	28	transmission	transmission	NOUN
ajst-32384	119	29	.	.	PUNCT
ajst-32384	120	1	the	the	DET
ajst-32384	120	2	design	design	NOUN
ajst-32384	120	3	difficulty	difficulty	NOUN
ajst-32384	120	4	of	of	ADP
ajst-32384	120	5	its	its	PRON
ajst-32384	120	6	drive	drive	ADJ
ajst-32384	120	7	controller	controller	NOUN
ajst-32384	120	8	has	have	AUX
ajst-32384	120	9	also	also	ADV
ajst-32384	120	10	increased	increase	VERB
ajst-32384	120	11	significantly	significantly	ADV
ajst-32384	120	12	.	.	PUNCT
ajst-32384	121	1	it	it	PRON
ajst-32384	121	2	is	be	AUX
ajst-32384	121	3	necessary	necessary	ADJ
ajst-32384	121	4	to	to	PART
ajst-32384	121	5	comprehensively	comprehensively	ADV
ajst-32384	121	6	consider	consider	VERB
ajst-32384	121	7	the	the	DET
ajst-32384	121	8	direct	direct	ADJ
ajst-32384	121	9	drive	drive	NOUN
ajst-32384	121	10	system	system	NOUN
ajst-32384	121	11	of	of	ADP
ajst-32384	121	12	the	the	DET
ajst-32384	121	13	voice	voice	NOUN
ajst-32384	121	14	coil	coil	NOUN
ajst-32384	121	15	motor	motor	NOUN
ajst-32384	121	16	.	.	PUNCT
ajst-32384	122	1	take	take	VERB
ajst-32384	122	2	into	into	ADP
ajst-32384	122	3	account	account	NOUN
ajst-32384	122	4	and	and	CCONJ
ajst-32384	122	5	design	design	NOUN
ajst-32384	122	6	reasonably	reasonably	ADV
ajst-32384	122	7	based	base	VERB
ajst-32384	122	8	on	on	ADP
ajst-32384	122	9	its	its	PRON
ajst-32384	122	10	specific	specific	ADJ
ajst-32384	122	11	application	application	NOUN
ajst-32384	122	12	,	,	PUNCT
ajst-32384	122	13	while	while	SCONJ
ajst-32384	122	14	also	also	ADV
ajst-32384	122	15	considering	consider	VERB
ajst-32384	122	16	the	the	DET
ajst-32384	122	17	many	many	ADJ
ajst-32384	122	18	uncertain	uncertain	ADJ
ajst-32384	122	19	factors	factor	NOUN
ajst-32384	122	20	that	that	PRON
ajst-32384	122	21	may	may	AUX
ajst-32384	122	22	affect	affect	VERB
ajst-32384	122	23	the	the	DET
ajst-32384	122	24	control	control	NOUN
ajst-32384	122	25	.	.	PUNCT
ajst-32384	123	1	the	the	DET
ajst-32384	123	2	impact	impact	NOUN
ajst-32384	123	3	of	of	ADP
ajst-32384	123	4	the	the	DET
ajst-32384	123	5	control	control	NOUN
ajst-32384	123	6	system	system	NOUN
ajst-32384	123	7	.	.	PUNCT
ajst-32384	124	1	by	by	ADP
ajst-32384	124	2	combining	combine	VERB
ajst-32384	124	3	the	the	DET
ajst-32384	124	4	voice	voice	NOUN
ajst-32384	124	5	coil	coil	NOUN
ajst-32384	124	6	motor	motor	NOUN
ajst-32384	124	7	drive	drive	NOUN
ajst-32384	124	8	system	system	NOUN
ajst-32384	124	9	with	with	ADP
ajst-32384	124	10	the	the	DET
ajst-32384	124	11	closed	closed	ADJ
ajst-32384	124	12	-	-	PUNCT
ajst-32384	124	13	loop	loop	NOUN
ajst-32384	124	14	control	control	NOUN
ajst-32384	124	15	system	system	NOUN
ajst-32384	124	16	,	,	PUNCT
ajst-32384	124	17	it	it	PRON
ajst-32384	124	18	can	can	AUX
ajst-32384	124	19	greatly	greatly	ADV
ajst-32384	124	20	improve	improve	VERB
ajst-32384	124	21	the	the	DET
ajst-32384	124	22	rapid	rapid	ADJ
ajst-32384	124	23	response	response	NOUN
ajst-32384	124	24	capability	capability	NOUN
ajst-32384	124	25	and	and	CCONJ
ajst-32384	124	26	position	position	NOUN
ajst-32384	124	27	servo	servo	NOUN
ajst-32384	124	28	control	control	NOUN
ajst-32384	124	29	accuracy	accuracy	NOUN
ajst-32384	124	30	of	of	ADP
ajst-32384	124	31	the	the	DET
ajst-32384	124	32	feed	feed	NOUN
ajst-32384	124	33	system	system	NOUN
ajst-32384	124	34	,	,	PUNCT
ajst-32384	124	35	in	in	ADP
ajst-32384	124	36	various	various	ADJ
ajst-32384	124	37	high	high	ADJ
ajst-32384	124	38	-	-	PUNCT
ajst-32384	124	39	speed	speed	NOUN
ajst-32384	124	40	and	and	CCONJ
ajst-32384	124	41	precision	precision	NOUN
ajst-32384	124	42	machining	machining	NOUN
ajst-32384	124	43	equipment	equipment	NOUN
ajst-32384	124	44	.	.	PUNCT
ajst-32384	125	1	it	it	PRON
ajst-32384	125	2	has	have	VERB
ajst-32384	125	3	broad	broad	ADJ
ajst-32384	125	4	application	application	NOUN
ajst-32384	125	5	prospects	prospect	NOUN
ajst-32384	125	6	.	.	PUNCT
ajst-32384	126	1	in	in	ADP
ajst-32384	126	2	recent	recent	ADJ
ajst-32384	126	3	years	year	NOUN
ajst-32384	126	4	,	,	PUNCT
ajst-32384	126	5	with	with	ADP
ajst-32384	126	6	the	the	DET
ajst-32384	126	7	development	development	NOUN
ajst-32384	126	8	of	of	ADP
ajst-32384	126	9	micro	micro	ADJ
ajst-32384	126	10	-	-	NOUN
ajst-32384	126	11	motor	motor	ADJ
ajst-32384	126	12	technology	technology	NOUN
ajst-32384	126	13	,	,	PUNCT
ajst-32384	126	14	power	power	NOUN
ajst-32384	126	15	electronics	electronic	NOUN
ajst-32384	126	16	technology	technology	NOUN
ajst-32384	126	17	,	,	PUNCT
ajst-32384	126	18	sensor	sensor	NOUN
ajst-32384	126	19	technology	technology	NOUN
ajst-32384	126	20	,	,	PUNCT
ajst-32384	126	21	permanent	permanent	ADJ
ajst-32384	126	22	magnet	magnet	NOUN
ajst-32384	126	23	material	material	NOUN
ajst-32384	126	24	technology	technology	NOUN
ajst-32384	126	25	,	,	PUNCT
ajst-32384	126	26	and	and	CCONJ
ajst-32384	126	27	automatic	automatic	ADJ
ajst-32384	126	28	control	control	NOUN
ajst-32384	126	29	.	.	PUNCT
ajst-32384	127	1	with	with	ADP
ajst-32384	127	2	the	the	DET
ajst-32384	127	3	advancements	advancement	NOUN
ajst-32384	127	4	in	in	ADP
ajst-32384	127	5	manufacturing	manufacturing	NOUN
ajst-32384	127	6	technology	technology	NOUN
ajst-32384	127	7	,	,	PUNCT
ajst-32384	127	8	microcomputer	microcomputer	NOUN
ajst-32384	127	9	application	application	NOUN
ajst-32384	127	10	technology	technology	NOUN
ajst-32384	127	11	,	,	PUNCT
ajst-32384	127	12	as	as	ADV
ajst-32384	127	13	well	well	ADV
ajst-32384	127	14	as	as	ADP
ajst-32384	127	15	various	various	ADJ
ajst-32384	127	16	modern	modern	ADJ
ajst-32384	127	17	control	control	NOUN
ajst-32384	127	18	technologies	technology	NOUN
ajst-32384	127	19	and	and	CCONJ
ajst-32384	127	20	intelligent	intelligent	ADJ
ajst-32384	127	21	control	control	NOUN
ajst-32384	127	22	technologies	technology	NOUN
ajst-32384	127	23	,	,	PUNCT
ajst-32384	127	24	there	there	PRON
ajst-32384	127	25	has	have	AUX
ajst-32384	127	26	been	be	AUX
ajst-32384	127	27	a	a	DET
ajst-32384	127	28	surge	surge	NOUN
ajst-32384	127	29	in	in	ADP
ajst-32384	127	30	the	the	DET
ajst-32384	127	31	development	development	NOUN
ajst-32384	127	32	of	of	ADP
ajst-32384	127	33	various	various	ADJ
ajst-32384	127	34	high	high	ADJ
ajst-32384	127	35	-	-	PUNCT
ajst-32384	127	36	performance	performance	NOUN
ajst-32384	127	37	technologies	technology	NOUN
ajst-32384	127	38	.	.	PUNCT
ajst-32384	128	1	performance	performance	NOUN
ajst-32384	128	2	-	-	PUNCT
ajst-32384	128	3	driven	drive	VERB
ajst-32384	128	4	control	control	NOUN
ajst-32384	128	5	systems	system	NOUN
ajst-32384	128	6	are	be	AUX
ajst-32384	128	7	constantly	constantly	ADV
ajst-32384	128	8	emerging	emerge	VERB
ajst-32384	128	9	,	,	PUNCT
ajst-32384	128	10	and	and	CCONJ
ajst-32384	128	11	the	the	DET
ajst-32384	128	12	development	development	NOUN
ajst-32384	128	13	of	of	ADP
ajst-32384	128	14	direct	direct	ADJ
ajst-32384	128	15	drive	drive	NOUN
ajst-32384	128	16	systems	system	NOUN
ajst-32384	128	17	for	for	ADP
ajst-32384	128	18	voice	voice	NOUN
ajst-32384	128	19	coil	coil	NOUN
ajst-32384	128	20	motors	motor	NOUN
ajst-32384	128	21	has	have	AUX
ajst-32384	128	22	entered	enter	VERB
ajst-32384	128	23	a	a	DET
ajst-32384	128	24	new	new	ADJ
ajst-32384	128	25	stage	stage	NOUN
ajst-32384	128	26	.	.	PUNCT
ajst-32384	129	1	voice	voice	NOUN
ajst-32384	129	2	coil	coil	PROPN
ajst-32384	129	3	motors	motor	NOUN
ajst-32384	129	4	play	play	VERB
ajst-32384	129	5	an	an	DET
ajst-32384	129	6	important	important	ADJ
ajst-32384	129	7	role	role	NOUN
ajst-32384	129	8	in	in	ADP
ajst-32384	129	9	many	many	ADJ
ajst-32384	129	10	fields	field	NOUN
ajst-32384	129	11	.	.	PUNCT
ajst-32384	130	1	3.1	3.1	NUM
ajst-32384	130	2	.	.	PUNCT
ajst-32384	130	3	mobile	mobile	ADJ
ajst-32384	130	4	phone	phone	NOUN
ajst-32384	130	5	camera	camera	NOUN
ajst-32384	130	6	module	module	NOUN
ajst-32384	130	7	in	in	ADP
ajst-32384	130	8	the	the	DET
ajst-32384	130	9	production	production	NOUN
ajst-32384	130	10	process	process	NOUN
ajst-32384	130	11	of	of	ADP
ajst-32384	130	12	packaging	package	VERB
ajst-32384	130	13	mobile	mobile	ADJ
ajst-32384	130	14	phone	phone	NOUN
ajst-32384	130	15	camera	camera	NOUN
ajst-32384	130	16	modules	module	NOUN
ajst-32384	130	17	,	,	PUNCT
ajst-32384	130	18	it	it	PRON
ajst-32384	130	19	is	be	AUX
ajst-32384	130	20	necessary	necessary	ADJ
ajst-32384	130	21	to	to	PART
ajst-32384	130	22	utilize	utilize	VERB
ajst-32384	130	23	voice	voice	NOUN
ajst-32384	130	24	coil	coil	NOUN
ajst-32384	130	25	motors	motor	NOUN
ajst-32384	130	26	to	to	PART
ajst-32384	130	27	position	position	VERB
ajst-32384	130	28	the	the	DET
ajst-32384	130	29	camera	camera	NOUN
ajst-32384	130	30	pose	pose	VERB
ajst-32384	130	31	on	on	ADP
ajst-32384	130	32	a	a	DET
ajst-32384	130	33	six	six	NUM
ajst-32384	130	34	-	-	PUNCT
ajst-32384	130	35	degree	degree	NOUN
ajst-32384	130	36	-	-	PUNCT
ajst-32384	130	37	of	of	ADP
ajst-32384	130	38	-	-	PUNCT
ajst-32384	130	39	freedom	freedom	NOUN
ajst-32384	130	40	(	(	PUNCT
ajst-32384	130	41	6	6	NUM
ajst-32384	130	42	-	-	PUNCT
ajst-32384	130	43	dof	dof	NOUN
ajst-32384	130	44	)	)	PUNCT
ajst-32384	130	45	work	work	NOUN
ajst-32384	130	46	platform	platform	NOUN
ajst-32384	130	47	.	.	PUNCT
ajst-32384	131	1	during	during	ADP
ajst-32384	131	2	the	the	DET
ajst-32384	131	3	adjustment	adjustment	NOUN
ajst-32384	131	4	process	process	NOUN
ajst-32384	131	5	,	,	PUNCT
ajst-32384	131	6	precise	precise	ADJ
ajst-32384	131	7	positioning	positioning	NOUN
ajst-32384	131	8	is	be	AUX
ajst-32384	131	9	required	require	VERB
ajst-32384	131	10	to	to	PART
ajst-32384	131	11	ensure	ensure	VERB
ajst-32384	131	12	product	product	NOUN
ajst-32384	131	13	quality	quality	NOUN
ajst-32384	131	14	;	;	PUNCT
ajst-32384	131	15	meanwhile	meanwhile	ADV
ajst-32384	131	16	,	,	PUNCT
ajst-32384	131	17	rapid	rapid	ADJ
ajst-32384	131	18	adjustment	adjustment	NOUN
ajst-32384	131	19	is	be	AUX
ajst-32384	131	20	necessary	necessary	ADJ
ajst-32384	131	21	to	to	PART
ajst-32384	131	22	enhance	enhance	VERB
ajst-32384	131	23	production	production	NOUN
ajst-32384	131	24	efficiency	efficiency	NOUN
ajst-32384	131	25	.	.	PUNCT
ajst-32384	132	1	during	during	ADP
ajst-32384	132	2	the	the	DET
ajst-32384	132	3	production	production	NOUN
ajst-32384	132	4	of	of	ADP
ajst-32384	132	5	mobile	mobile	ADJ
ajst-32384	132	6	phone	phone	NOUN
ajst-32384	132	7	camera	camera	NOUN
ajst-32384	132	8	modules	module	NOUN
ajst-32384	132	9	,	,	PUNCT
ajst-32384	132	10	the	the	DET
ajst-32384	132	11	camera	camera	NOUN
ajst-32384	132	12	pose	pose	VERB
ajst-32384	132	13	needs	need	VERB
ajst-32384	132	14	to	to	PART
ajst-32384	132	15	be	be	AUX
ajst-32384	132	16	adjusted	adjust	VERB
ajst-32384	132	17	,	,	PUNCT
ajst-32384	132	18	and	and	CCONJ
ajst-32384	132	19	then	then	ADV
ajst-32384	132	20	the	the	DET
ajst-32384	132	21	camera	camera	NOUN
ajst-32384	132	22	is	be	AUX
ajst-32384	132	23	fixed	fix	VERB
ajst-32384	132	24	to	to	ADP
ajst-32384	132	25	the	the	DET
ajst-32384	132	26	frame	frame	NOUN
ajst-32384	132	27	using	use	VERB
ajst-32384	132	28	adhesive	adhesive	NOUN
ajst-32384	132	29	.	.	PUNCT
ajst-32384	133	1	first	first	ADV
ajst-32384	133	2	,	,	PUNCT
ajst-32384	133	3	a	a	DET
ajst-32384	133	4	macro	macro	ADJ
ajst-32384	133	5	world	world	NOUN
ajst-32384	133	6	coordinate	coordinate	NOUN
ajst-32384	133	7	system	system	NOUN
ajst-32384	133	8	is	be	AUX
ajst-32384	133	9	established	establish	VERB
ajst-32384	133	10	,	,	PUNCT
ajst-32384	133	11	where	where	SCONJ
ajst-32384	133	12	θx	θx	ADP
ajst-32384	133	13	,	,	PUNCT
ajst-32384	133	14	θy	θy	ADP
ajst-32384	133	15	,	,	PUNCT
ajst-32384	133	16	and	and	CCONJ
ajst-32384	133	17	θz	θz	PART
ajst-32384	133	18	represent	represent	VERB
ajst-32384	133	19	the	the	DET
ajst-32384	133	20	rotation	rotation	NOUN
ajst-32384	133	21	angles	angle	NOUN
ajst-32384	133	22	of	of	ADP
ajst-32384	133	23	the	the	DET
ajst-32384	133	24	camera	camera	NOUN
ajst-32384	133	25	coordinate	coordinate	NOUN
ajst-32384	133	26	system	system	NOUN
ajst-32384	133	27	relative	relative	ADJ
ajst-32384	133	28	to	to	ADP
ajst-32384	133	29	the	the	DET
ajst-32384	133	30	x	x	NOUN
ajst-32384	133	31	-	-	NOUN
ajst-32384	133	32	axis	axis	ADJ
ajst-32384	133	33	,	,	PUNCT
ajst-32384	133	34	y	y	NOUN
ajst-32384	133	35	-	-	PUNCT
ajst-32384	133	36	axis	axis	NOUN
ajst-32384	133	37	,	,	PUNCT
ajst-32384	133	38	and	and	CCONJ
ajst-32384	133	39	zaxis	zaxis	NOUN
ajst-32384	133	40	of	of	ADP
ajst-32384	133	41	the	the	DET
ajst-32384	133	42	world	world	NOUN
ajst-32384	133	43	coordinate	coordinate	NOUN
ajst-32384	133	44	system	system	NOUN
ajst-32384	133	45	,	,	PUNCT
ajst-32384	133	46	respectively	respectively	ADV
ajst-32384	133	47	;	;	PUNCT
ajst-32384	133	48	δx	δx	PROPN
ajst-32384	133	49	,	,	PUNCT
ajst-32384	133	50	δy	δy	NOUN
ajst-32384	133	51	,	,	PUNCT
ajst-32384	133	52	and	and	CCONJ
ajst-32384	133	53	δz	δz	PRON
ajst-32384	133	54	represent	represent	VERB
ajst-32384	133	55	the	the	DET
ajst-32384	133	56	offsets	offset	NOUN
ajst-32384	133	57	of	of	ADP
ajst-32384	133	58	the	the	DET
ajst-32384	133	59	origin	origin	NOUN
ajst-32384	133	60	of	of	ADP
ajst-32384	133	61	the	the	DET
ajst-32384	133	62	camera	camera	NOUN
ajst-32384	133	63	coordinate	coordinate	NOUN
ajst-32384	133	64	system	system	NOUN
ajst-32384	133	65	relative	relative	ADJ
ajst-32384	133	66	to	to	ADP
ajst-32384	133	67	the	the	DET
ajst-32384	133	68	origin	origin	NOUN
ajst-32384	133	69	of	of	ADP
ajst-32384	133	70	the	the	DET
ajst-32384	133	71	world	world	NOUN
ajst-32384	133	72	coordinate	coordinate	NOUN
ajst-32384	133	73	system	system	NOUN
ajst-32384	133	74	in	in	ADP
ajst-32384	133	75	the	the	DET
ajst-32384	133	76	x	x	NOUN
ajst-32384	133	77	-	-	NOUN
ajst-32384	133	78	axis	axis	ADJ
ajst-32384	133	79	,	,	PUNCT
ajst-32384	133	80	y	y	NOUN
ajst-32384	133	81	-	-	PUNCT
ajst-32384	133	82	axis	axis	NOUN
ajst-32384	133	83	,	,	PUNCT
ajst-32384	133	84	and	and	CCONJ
ajst-32384	133	85	z	z	NOUN
ajst-32384	133	86	-	-	PUNCT
ajst-32384	133	87	axis	axis	NOUN
ajst-32384	133	88	directions	direction	NOUN
ajst-32384	133	89	,	,	PUNCT
ajst-32384	133	90	respectively	respectively	ADV
ajst-32384	133	91	.	.	PUNCT
ajst-32384	134	1	the	the	DET
ajst-32384	134	2	camera	camera	NOUN
ajst-32384	134	3	coordinate	coordinate	NOUN
ajst-32384	134	4	system	system	NOUN
ajst-32384	134	5	is	be	AUX
ajst-32384	134	6	shown	show	VERB
ajst-32384	134	7	in	in	ADP
ajst-32384	134	8	fig	fig	NOUN
ajst-32384	134	9	.	.	PUNCT
ajst-32384	135	1	6	6	NUM
ajst-32384	135	2	xc	xc	PROPN
ajst-32384	135	3	yc	yc	PROPN
ajst-32384	135	4	zc	zc	PROPN
ajst-32384	135	5	oc	oc	ADP
ajst-32384	135	6	θx	θx	ADP
ajst-32384	135	7	θy	θy	INTJ
ajst-32384	135	8	θz	θz	ADP
ajst-32384	135	9	δy	δy	NOUN
ajst-32384	135	10	δz	δz	NOUN
ajst-32384	135	11	δx	δx	VERB
ajst-32384	135	12	fig	fig	NOUN
ajst-32384	135	13	.	.	PUNCT
ajst-32384	136	1	6	6	NUM
ajst-32384	136	2	camera	camera	NOUN
ajst-32384	136	3	coordinate	coordinate	NOUN
ajst-32384	136	4	system	system	NOUN
ajst-32384	136	5	the	the	DET
ajst-32384	136	6	rotation	rotation	NOUN
ajst-32384	136	7	amounts	amount	VERB
ajst-32384	136	8	θx	θx	ADP
ajst-32384	136	9	,	,	PUNCT
ajst-32384	136	10	θy	θy	ADP
ajst-32384	136	11	,	,	PUNCT
ajst-32384	136	12	and	and	CCONJ
ajst-32384	136	13	θz	θz	PROPN
ajst-32384	136	14	of	of	ADP
ajst-32384	136	15	the	the	DET
ajst-32384	136	16	camera	camera	NOUN
ajst-32384	136	17	coordinate	coordinate	NOUN
ajst-32384	136	18	system	system	NOUN
ajst-32384	136	19	on	on	ADP
ajst-32384	136	20	the	the	DET
ajst-32384	136	21	three	three	NUM
ajst-32384	136	22	axes	axis	NOUN
ajst-32384	136	23	are	be	AUX
ajst-32384	136	24	adjusted	adjust	VERB
ajst-32384	136	25	to	to	PART
ajst-32384	136	26	make	make	VERB
ajst-32384	136	27	the	the	DET
ajst-32384	136	28	camera	camera	NOUN
ajst-32384	136	29	coordinate	coordinate	NOUN
ajst-32384	136	30	system	system	NOUN
ajst-32384	136	31	parallel	parallel	ADJ
ajst-32384	136	32	to	to	ADP
ajst-32384	136	33	the	the	DET
ajst-32384	136	34	three	three	NUM
ajst-32384	136	35	axes	axis	NOUN
ajst-32384	136	36	of	of	ADP
ajst-32384	136	37	the	the	DET
ajst-32384	136	38	world	world	NOUN
ajst-32384	136	39	coordinate	coordinate	NOUN
ajst-32384	136	40	system	system	NOUN
ajst-32384	136	41	;	;	PUNCT
ajst-32384	136	42	the	the	DET
ajst-32384	136	43	translation	translation	NOUN
ajst-32384	136	44	amounts	amount	VERB
ajst-32384	136	45	δx	δx	PROPN
ajst-32384	136	46	,	,	PUNCT
ajst-32384	136	47	δy	δy	NOUN
ajst-32384	136	48	,	,	PUNCT
ajst-32384	136	49	and	and	CCONJ
ajst-32384	136	50	δz	δz	NOUN
ajst-32384	136	51	of	of	ADP
ajst-32384	136	52	the	the	DET
ajst-32384	136	53	camera	camera	NOUN
ajst-32384	136	54	coordinate	coordinate	NOUN
ajst-32384	136	55	system	system	NOUN
ajst-32384	136	56	on	on	ADP
ajst-32384	136	57	the	the	DET
ajst-32384	136	58	three	three	NUM
ajst-32384	136	59	axes	axis	NOUN
ajst-32384	136	60	are	be	AUX
ajst-32384	136	61	adjusted	adjust	VERB
ajst-32384	136	62	to	to	PART
ajst-32384	136	63	position	position	VERB
ajst-32384	136	64	the	the	DET
ajst-32384	136	65	origin	origin	NOUN
ajst-32384	136	66	of	of	ADP
ajst-32384	136	67	the	the	DET
ajst-32384	136	68	camera	camera	NOUN
ajst-32384	136	69	coordinate	coordinate	NOUN
ajst-32384	136	70	system	system	NOUN
ajst-32384	136	71	at	at	ADP
ajst-32384	136	72	a	a	DET
ajst-32384	136	73	given	give	VERB
ajst-32384	136	74	location	location	NOUN
ajst-32384	136	75	in	in	ADP
ajst-32384	136	76	the	the	DET
ajst-32384	136	77	world	world	NOUN
ajst-32384	136	78	coordinate	coordinate	NOUN
ajst-32384	136	79	system	system	NOUN
ajst-32384	136	80	.	.	PUNCT
ajst-32384	137	1	the	the	DET
ajst-32384	137	2	camera	camera	NOUN
ajst-32384	137	3	is	be	AUX
ajst-32384	137	4	connected	connect	VERB
ajst-32384	137	5	to	to	ADP
ajst-32384	137	6	the	the	DET
ajst-32384	137	7	6	6	NUM
ajst-32384	137	8	-	-	PUNCT
ajst-32384	137	9	dof	dof	NOUN
ajst-32384	137	10	work	work	NOUN
ajst-32384	137	11	platform	platform	NOUN
ajst-32384	137	12	through	through	ADP
ajst-32384	137	13	a	a	DET
ajst-32384	137	14	fixture	fixture	NOUN
ajst-32384	137	15	,	,	PUNCT
ajst-32384	137	16	and	and	CCONJ
ajst-32384	137	17	six	six	NUM
ajst-32384	137	18	123	123	NUM
ajst-32384	137	19	voice	voice	NOUN
ajst-32384	137	20	coil	coil	NOUN
ajst-32384	137	21	motors	motor	NOUN
ajst-32384	137	22	are	be	AUX
ajst-32384	137	23	used	use	VERB
ajst-32384	137	24	to	to	PART
ajst-32384	137	25	adjust	adjust	VERB
ajst-32384	137	26	the	the	DET
ajst-32384	137	27	six	six	NUM
ajst-32384	137	28	degrees	degree	NOUN
ajst-32384	137	29	of	of	ADP
ajst-32384	137	30	freedom	freedom	NOUN
ajst-32384	137	31	(	(	PUNCT
ajst-32384	137	32	θx	θx	PROPN
ajst-32384	137	33	,	,	PUNCT
ajst-32384	137	34	θy	θy	VERB
ajst-32384	137	35	,	,	PUNCT
ajst-32384	137	36	θz	θz	NOUN
ajst-32384	137	37	,	,	PUNCT
ajst-32384	137	38	δx	δx	PROPN
ajst-32384	137	39	,	,	PUNCT
ajst-32384	137	40	δy	δy	NOUN
ajst-32384	137	41	,	,	PUNCT
ajst-32384	137	42	and	and	CCONJ
ajst-32384	137	43	δz	δz	X
ajst-32384	137	44	)	)	PUNCT
ajst-32384	137	45	to	to	PART
ajst-32384	137	46	achieve	achieve	VERB
ajst-32384	137	47	camera	camera	NOUN
ajst-32384	137	48	pose	pose	NOUN
ajst-32384	137	49	correction	correction	NOUN
ajst-32384	138	1	[	[	X
ajst-32384	138	2	19	19	NUM
ajst-32384	138	3	]	]	PUNCT
ajst-32384	138	4	.	.	PUNCT
ajst-32384	139	1	during	during	ADP
ajst-32384	139	2	the	the	DET
ajst-32384	139	3	adjustment	adjustment	NOUN
ajst-32384	139	4	and	and	CCONJ
ajst-32384	139	5	positioning	positioning	NOUN
ajst-32384	139	6	process	process	NOUN
ajst-32384	139	7	of	of	ADP
ajst-32384	139	8	the	the	DET
ajst-32384	139	9	voice	voice	NOUN
ajst-32384	139	10	coil	coil	NOUN
ajst-32384	139	11	motors	motor	NOUN
ajst-32384	139	12	,	,	PUNCT
ajst-32384	139	13	there	there	PRON
ajst-32384	139	14	are	be	VERB
ajst-32384	139	15	no	no	DET
ajst-32384	139	16	external	external	ADJ
ajst-32384	139	17	disturbances	disturbance	NOUN
ajst-32384	139	18	,	,	PUNCT
ajst-32384	139	19	and	and	CCONJ
ajst-32384	139	20	the	the	DET
ajst-32384	139	21	mass	mass	NOUN
ajst-32384	139	22	of	of	ADP
ajst-32384	139	23	the	the	DET
ajst-32384	139	24	work	work	NOUN
ajst-32384	139	25	platform	platform	NOUN
ajst-32384	139	26	connected	connect	VERB
ajst-32384	139	27	to	to	ADP
ajst-32384	139	28	the	the	DET
ajst-32384	139	29	voice	voice	NOUN
ajst-32384	139	30	coil	coil	NOUN
ajst-32384	139	31	motor	motor	NOUN
ajst-32384	139	32	mover	mover	NOUN
ajst-32384	139	33	is	be	AUX
ajst-32384	139	34	fixed	fix	VERB
ajst-32384	139	35	.	.	PUNCT
ajst-32384	140	1	it	it	PRON
ajst-32384	140	2	is	be	AUX
ajst-32384	140	3	required	require	VERB
ajst-32384	140	4	to	to	PART
ajst-32384	140	5	adjust	adjust	VERB
ajst-32384	140	6	and	and	CCONJ
ajst-32384	140	7	position	position	VERB
ajst-32384	140	8	quickly	quickly	ADV
ajst-32384	140	9	and	and	CCONJ
ajst-32384	140	10	accurately	accurately	ADV
ajst-32384	140	11	according	accord	VERB
ajst-32384	140	12	to	to	ADP
ajst-32384	140	13	the	the	DET
ajst-32384	140	14	given	give	VERB
ajst-32384	140	15	adjustment	adjustment	NOUN
ajst-32384	140	16	amounts	amount	NOUN
ajst-32384	140	17	of	of	ADP
ajst-32384	140	18	the	the	DET
ajst-32384	140	19	six	six	NUM
ajst-32384	140	20	degrees	degree	NOUN
ajst-32384	140	21	of	of	ADP
ajst-32384	140	22	freedom	freedom	NOUN
ajst-32384	140	23	to	to	PART
ajst-32384	140	24	improve	improve	VERB
ajst-32384	140	25	production	production	NOUN
ajst-32384	140	26	efficiency	efficiency	NOUN
ajst-32384	140	27	and	and	CCONJ
ajst-32384	140	28	ensure	ensure	VERB
ajst-32384	140	29	product	product	NOUN
ajst-32384	140	30	quality	quality	NOUN
ajst-32384	140	31	.	.	PUNCT
ajst-32384	141	1	3.2	3.2	NUM
ajst-32384	141	2	.	.	PUNCT
ajst-32384	141	3	trajectory	trajectory	NOUN
ajst-32384	141	4	tracking	track	VERB
ajst-32384	141	5	the	the	DET
ajst-32384	141	6	wire	wire	NOUN
ajst-32384	141	7	bonding	bonding	NOUN
ajst-32384	141	8	process	process	NOUN
ajst-32384	141	9	of	of	ADP
ajst-32384	141	10	a	a	DET
ajst-32384	141	11	wire	wire	NOUN
ajst-32384	141	12	bonding	bonding	NOUN
ajst-32384	141	13	machine	machine	NOUN
ajst-32384	141	14	includes	include	VERB
ajst-32384	141	15	:	:	PUNCT
ajst-32384	141	16	forming	form	VERB
ajst-32384	141	17	a	a	DET
ajst-32384	141	18	gold	gold	NOUN
ajst-32384	141	19	ball	ball	NOUN
ajst-32384	141	20	through	through	ADP
ajst-32384	141	21	electronic	electronic	ADJ
ajst-32384	141	22	sparking	sparking	NOUN
ajst-32384	141	23	,	,	PUNCT
ajst-32384	141	24	driving	drive	VERB
ajst-32384	141	25	the	the	DET
ajst-32384	141	26	cleaver	cleaver	NOUN
ajst-32384	141	27	down	down	ADP
ajst-32384	141	28	to	to	ADP
ajst-32384	141	29	the	the	DET
ajst-32384	141	30	bonding	bonding	NOUN
ajst-32384	141	31	point	point	NOUN
ajst-32384	141	32	at	at	ADP
ajst-32384	141	33	high	high	ADJ
ajst-32384	141	34	speed	speed	NOUN
ajst-32384	141	35	using	use	VERB
ajst-32384	141	36	a	a	DET
ajst-32384	141	37	voice	voice	NOUN
ajst-32384	141	38	coil	coil	NOUN
ajst-32384	141	39	motor	motor	NOUN
ajst-32384	141	40	and	and	CCONJ
ajst-32384	141	41	performing	perform	VERB
ajst-32384	141	42	contact	contact	NOUN
ajst-32384	141	43	detection	detection	NOUN
ajst-32384	141	44	for	for	ADP
ajst-32384	141	45	wire	wire	NOUN
ajst-32384	141	46	bonding	bonding	NOUN
ajst-32384	141	47	,	,	PUNCT
ajst-32384	141	48	followed	follow	VERB
ajst-32384	141	49	by	by	ADP
ajst-32384	141	50	arc	arc	NOUN
ajst-32384	141	51	pulling	pull	VERB
ajst-32384	141	52	operation	operation	NOUN
ajst-32384	141	53	,	,	PUNCT
ajst-32384	141	54	and	and	CCONJ
ajst-32384	141	55	finally	finally	ADV
ajst-32384	141	56	repeating	repeat	VERB
ajst-32384	141	57	the	the	DET
ajst-32384	141	58	process	process	NOUN
ajst-32384	141	59	of	of	ADP
ajst-32384	141	60	searching	search	VERB
ajst-32384	141	61	for	for	ADP
ajst-32384	141	62	bonding	bonding	NOUN
ajst-32384	141	63	points	point	NOUN
ajst-32384	141	64	and	and	CCONJ
ajst-32384	141	65	wire	wire	NOUN
ajst-32384	141	66	bonding	bonding	NOUN
ajst-32384	141	67	.	.	PUNCT
ajst-32384	142	1	it	it	PRON
ajst-32384	142	2	can	can	AUX
ajst-32384	142	3	be	be	AUX
ajst-32384	142	4	seen	see	VERB
ajst-32384	142	5	that	that	SCONJ
ajst-32384	142	6	the	the	DET
ajst-32384	142	7	wire	wire	NOUN
ajst-32384	142	8	bonding	bonding	NOUN
ajst-32384	142	9	process	process	NOUN
ajst-32384	142	10	is	be	AUX
ajst-32384	142	11	a	a	DET
ajst-32384	142	12	high	high	ADJ
ajst-32384	142	13	-	-	PUNCT
ajst-32384	142	14	precision	precision	NOUN
ajst-32384	142	15	,	,	PUNCT
ajst-32384	142	16	repetitive	repetitive	ADJ
ajst-32384	142	17	motion	motion	NOUN
ajst-32384	142	18	process	process	NOUN
ajst-32384	142	19	,	,	PUNCT
ajst-32384	142	20	where	where	SCONJ
ajst-32384	142	21	the	the	DET
ajst-32384	142	22	most	most	ADV
ajst-32384	142	23	critical	critical	ADJ
ajst-32384	142	24	steps	step	NOUN
ajst-32384	142	25	are	be	AUX
ajst-32384	142	26	the	the	DET
ajst-32384	142	27	position	position	NOUN
ajst-32384	142	28	search	search	NOUN
ajst-32384	142	29	and	and	CCONJ
ajst-32384	142	30	arc	arc	NOUN
ajst-32384	142	31	pulling	pull	VERB
ajst-32384	142	32	processes	process	NOUN
ajst-32384	142	33	,	,	PUNCT
ajst-32384	142	34	that	that	ADV
ajst-32384	142	35	is	is	ADV
ajst-32384	142	36	,	,	PUNCT
ajst-32384	142	37	the	the	DET
ajst-32384	142	38	ability	ability	NOUN
ajst-32384	142	39	to	to	PART
ajst-32384	142	40	track	track	VERB
ajst-32384	142	41	the	the	DET
ajst-32384	142	42	planned	plan	VERB
ajst-32384	142	43	trajectory	trajectory	NOUN
ajst-32384	142	44	.	.	PUNCT
ajst-32384	143	1	to	to	PART
ajst-32384	143	2	improve	improve	VERB
ajst-32384	143	3	the	the	DET
ajst-32384	143	4	trajectory	trajectory	NOUN
ajst-32384	143	5	tracking	tracking	NOUN
ajst-32384	143	6	capability	capability	NOUN
ajst-32384	143	7	of	of	ADP
ajst-32384	143	8	the	the	DET
ajst-32384	143	9	control	control	NOUN
ajst-32384	143	10	system	system	NOUN
ajst-32384	143	11	,	,	PUNCT
ajst-32384	143	12	a	a	DET
ajst-32384	143	13	feed	feed	NOUN
ajst-32384	143	14	forward	forward	ADV
ajst-32384	143	15	+	+	CCONJ
ajst-32384	143	16	fuzzy	fuzzy	ADJ
ajst-32384	143	17	feedback	feedback	NOUN
ajst-32384	143	18	control	control	NOUN
ajst-32384	143	19	algorithm	algorithm	PROPN
ajst-32384	143	20	was	be	AUX
ajst-32384	143	21	initially	initially	ADV
ajst-32384	143	22	proposed	propose	VERB
ajst-32384	143	23	for	for	ADP
ajst-32384	143	24	trajectory	trajectory	NOUN
ajst-32384	143	25	tracking	tracking	NOUN
ajst-32384	143	26	of	of	ADP
ajst-32384	143	27	wheeled	wheel	VERB
ajst-32384	143	28	mobile	mobile	ADJ
ajst-32384	143	29	robots	robot	NOUN
ajst-32384	143	30	.	.	PUNCT
ajst-32384	144	1	its	its	PRON
ajst-32384	144	2	control	control	NOUN
ajst-32384	144	3	effect	effect	NOUN
ajst-32384	144	4	was	be	AUX
ajst-32384	144	5	improved	improve	VERB
ajst-32384	144	6	compared	compare	VERB
ajst-32384	144	7	to	to	ADP
ajst-32384	144	8	standard	standard	ADJ
ajst-32384	144	9	inverse	inverse	NOUN
ajst-32384	144	10	control	control	NOUN
ajst-32384	144	11	,	,	PUNCT
ajst-32384	144	12	but	but	CCONJ
ajst-32384	144	13	the	the	DET
ajst-32384	144	14	formulation	formulation	NOUN
ajst-32384	144	15	of	of	ADP
ajst-32384	144	16	its	its	PRON
ajst-32384	144	17	fuzzy	fuzzy	ADJ
ajst-32384	144	18	rule	rule	NOUN
ajst-32384	144	19	table	table	NOUN
ajst-32384	144	20	relied	rely	VERB
ajst-32384	144	21	too	too	ADV
ajst-32384	144	22	much	much	ADJ
ajst-32384	144	23	on	on	ADP
ajst-32384	144	24	prior	prior	ADJ
ajst-32384	144	25	conditions	condition	NOUN
ajst-32384	144	26	.	.	PUNCT
ajst-32384	145	1	another	another	DET
ajst-32384	145	2	approach	approach	NOUN
ajst-32384	145	3	adopted	adopt	VERB
ajst-32384	145	4	adaptive	adaptive	ADJ
ajst-32384	145	5	neural	neural	ADJ
ajst-32384	145	6	sliding	slide	VERB
ajst-32384	145	7	mode	mode	NOUN
ajst-32384	145	8	control	control	NOUN
ajst-32384	145	9	to	to	PART
ajst-32384	145	10	eliminate	eliminate	VERB
ajst-32384	145	11	chattering	chatter	VERB
ajst-32384	145	12	and	and	CCONJ
ajst-32384	145	13	improve	improve	VERB
ajst-32384	145	14	the	the	DET
ajst-32384	145	15	robustness	robustness	NOUN
ajst-32384	145	16	of	of	ADP
ajst-32384	145	17	the	the	DET
ajst-32384	145	18	system	system	NOUN
ajst-32384	145	19	during	during	ADP
ajst-32384	145	20	trajectory	trajectory	NOUN
ajst-32384	145	21	tracking	tracking	NOUN
ajst-32384	145	22	.	.	PUNCT
ajst-32384	146	1	the	the	DET
ajst-32384	146	2	above	above	ADJ
ajst-32384	146	3	methods	method	NOUN
ajst-32384	146	4	have	have	VERB
ajst-32384	146	5	limited	limit	VERB
ajst-32384	146	6	effect	effect	NOUN
ajst-32384	146	7	on	on	ADP
ajst-32384	146	8	reducing	reduce	VERB
ajst-32384	146	9	the	the	DET
ajst-32384	146	10	error	error	NOUN
ajst-32384	146	11	of	of	ADP
ajst-32384	146	12	trajectory	trajectory	NOUN
ajst-32384	146	13	tracking	tracking	NOUN
ajst-32384	146	14	,	,	PUNCT
ajst-32384	146	15	slow	slow	ADJ
ajst-32384	146	16	convergence	convergence	NOUN
ajst-32384	146	17	to	to	ADP
ajst-32384	146	18	the	the	DET
ajst-32384	146	19	expected	expect	VERB
ajst-32384	146	20	trajectory	trajectory	NOUN
ajst-32384	146	21	,	,	PUNCT
ajst-32384	146	22	or	or	CCONJ
ajst-32384	146	23	involve	involve	VERB
ajst-32384	146	24	overly	overly	ADV
ajst-32384	146	25	complex	complex	ADJ
ajst-32384	146	26	processes	process	NOUN
ajst-32384	146	27	leading	lead	VERB
ajst-32384	146	28	to	to	ADP
ajst-32384	146	29	too	too	ADV
ajst-32384	146	30	many	many	ADJ
ajst-32384	146	31	design	design	NOUN
ajst-32384	146	32	variables	variable	NOUN
ajst-32384	146	33	[	[	X
ajst-32384	146	34	20	20	NUM
ajst-32384	146	35	]	]	PUNCT
ajst-32384	146	36	.	.	PUNCT
ajst-32384	147	1	the	the	DET
ajst-32384	147	2	pd	pd	ADJ
ajst-32384	147	3	-	-	PUNCT
ajst-32384	147	4	type	type	NOUN
ajst-32384	147	5	iterative	iterative	NOUN
ajst-32384	147	6	learning	learning	NOUN
ajst-32384	147	7	control	control	NOUN
ajst-32384	147	8	algorithm	algorithm	NOUN
ajst-32384	147	9	with	with	ADP
ajst-32384	147	10	a	a	DET
ajst-32384	147	11	forgetting	forget	VERB
ajst-32384	147	12	factor	factor	NOUN
ajst-32384	147	13	is	be	AUX
ajst-32384	147	14	very	very	ADV
ajst-32384	147	15	suitable	suitable	ADJ
ajst-32384	147	16	for	for	ADP
ajst-32384	147	17	such	such	ADJ
ajst-32384	147	18	highly	highly	ADV
ajst-32384	147	19	repetitive	repetitive	ADJ
ajst-32384	147	20	and	and	CCONJ
ajst-32384	147	21	high	high	ADJ
ajst-32384	147	22	-	-	PUNCT
ajst-32384	147	23	precision	precision	NOUN
ajst-32384	147	24	motion	motion	NOUN
ajst-32384	147	25	processes	process	NOUN
ajst-32384	147	26	,	,	PUNCT
ajst-32384	147	27	and	and	CCONJ
ajst-32384	147	28	theoretically	theoretically	ADV
ajst-32384	147	29	can	can	AUX
ajst-32384	147	30	achieve	achieve	VERB
ajst-32384	147	31	high	high	ADJ
ajst-32384	147	32	-	-	PUNCT
ajst-32384	147	33	precision	precision	NOUN
ajst-32384	147	34	,	,	PUNCT
ajst-32384	147	35	error	error	NOUN
ajst-32384	147	36	-	-	PUNCT
ajst-32384	147	37	free	free	ADJ
ajst-32384	147	38	trajectory	trajectory	NOUN
ajst-32384	147	39	tracking	tracking	NOUN
ajst-32384	147	40	.	.	PUNCT
ajst-32384	148	1	the	the	DET
ajst-32384	148	2	simplified	simplified	ADJ
ajst-32384	148	3	z	z	NOUN
ajst-32384	148	4	-	-	PUNCT
ajst-32384	148	5	axis	axis	NOUN
ajst-32384	148	6	model	model	NOUN
ajst-32384	148	7	of	of	ADP
ajst-32384	148	8	wire	wire	NOUN
ajst-32384	148	9	bonder	bonder	NOUN
ajst-32384	148	10	is	be	AUX
ajst-32384	148	11	shown	show	VERB
ajst-32384	148	12	in	in	ADP
ajst-32384	148	13	fig	fig	NOUN
ajst-32384	148	14	.	.	PUNCT
ajst-32384	149	1	7	7	X
ajst-32384	149	2	.	.	X
ajst-32384	149	3	zax	zax	PROPN
ajst-32384	149	4	is	be	AUX
ajst-32384	149	5	center	center	NOUN
ajst-32384	149	6	of	of	ADP
ajst-32384	149	7	rotatio	rotatio	NOUN
ajst-32384	149	8	n	n	PROPN
ajst-32384	149	9	vcm	vcm	PROPN
ajst-32384	149	10	suc	suc	PROPN
ajst-32384	149	11	tio	tio	PROPN
ajst-32384	149	12	n	n	DET
ajst-32384	149	13	fig	fig	NOUN
ajst-32384	149	14	.	.	PUNCT
ajst-32384	150	1	7	7	NUM
ajst-32384	150	2	simplified	simplified	ADJ
ajst-32384	150	3	z	z	NOUN
ajst-32384	150	4	-	-	PUNCT
ajst-32384	150	5	axis	axis	NOUN
ajst-32384	150	6	model	model	NOUN
ajst-32384	150	7	of	of	ADP
ajst-32384	150	8	wire	wire	NOUN
ajst-32384	150	9	bonder	bonder	NOUN
ajst-32384	150	10	since	since	SCONJ
ajst-32384	150	11	the	the	DET
ajst-32384	150	12	bonding	bonding	NOUN
ajst-32384	150	13	head	head	NOUN
ajst-32384	150	14	module	module	NOUN
ajst-32384	150	15	of	of	ADP
ajst-32384	150	16	the	the	DET
ajst-32384	150	17	wire	wire	NOUN
ajst-32384	150	18	bonding	bonding	NOUN
ajst-32384	150	19	machine	machine	NOUN
ajst-32384	150	20	is	be	AUX
ajst-32384	150	21	a	a	DET
ajst-32384	150	22	high	high	ADJ
ajst-32384	150	23	-	-	PUNCT
ajst-32384	150	24	precision	precision	NOUN
ajst-32384	150	25	,	,	PUNCT
ajst-32384	150	26	high	high	ADJ
ajst-32384	150	27	-	-	PUNCT
ajst-32384	150	28	speed	speed	NOUN
ajst-32384	150	29	motion	motion	NOUN
ajst-32384	150	30	module	module	NOUN
ajst-32384	150	31	,	,	PUNCT
ajst-32384	150	32	using	use	VERB
ajst-32384	150	33	only	only	ADV
ajst-32384	150	34	a	a	DET
ajst-32384	150	35	feedback	feedback	NOUN
ajst-32384	150	36	controller	controller	NOUN
ajst-32384	150	37	can	can	AUX
ajst-32384	150	38	not	not	PART
ajst-32384	150	39	guarantee	guarantee	VERB
ajst-32384	150	40	a	a	DET
ajst-32384	150	41	sufficiently	sufficiently	ADV
ajst-32384	150	42	fast	fast	ADJ
ajst-32384	150	43	response	response	NOUN
ajst-32384	150	44	speed	speed	NOUN
ajst-32384	150	45	under	under	ADP
ajst-32384	150	46	high	high	ADJ
ajst-32384	150	47	acceleration	acceleration	NOUN
ajst-32384	150	48	conditions	condition	NOUN
ajst-32384	150	49	,	,	PUNCT
ajst-32384	150	50	which	which	PRON
ajst-32384	150	51	will	will	AUX
ajst-32384	150	52	result	result	VERB
ajst-32384	150	53	in	in	ADP
ajst-32384	150	54	time	time	NOUN
ajst-32384	150	55	delay	delay	NOUN
ajst-32384	150	56	.	.	PUNCT
ajst-32384	151	1	pure	pure	ADJ
ajst-32384	151	2	feed	feed	NOUN
ajst-32384	151	3	forward	forward	ADV
ajst-32384	151	4	control	control	NOUN
ajst-32384	151	5	can	can	AUX
ajst-32384	151	6	only	only	ADV
ajst-32384	151	7	compensate	compensate	VERB
ajst-32384	151	8	for	for	ADP
ajst-32384	151	9	specified	specified	ADJ
ajst-32384	151	10	disturbances	disturbance	NOUN
ajst-32384	151	11	and	and	CCONJ
ajst-32384	151	12	can	can	AUX
ajst-32384	151	13	not	not	PART
ajst-32384	151	14	improve	improve	VERB
ajst-32384	151	15	the	the	DET
ajst-32384	151	16	existing	exist	VERB
ajst-32384	151	17	deviations	deviation	NOUN
ajst-32384	151	18	in	in	ADP
ajst-32384	151	19	the	the	DET
ajst-32384	151	20	control	control	NOUN
ajst-32384	151	21	system	system	NOUN
ajst-32384	151	22	.	.	PUNCT
ajst-32384	152	1	therefore	therefore	ADV
ajst-32384	152	2	,	,	PUNCT
ajst-32384	152	3	a	a	DET
ajst-32384	152	4	two	two	NUM
ajst-32384	152	5	-	-	PUNCT
ajst-32384	152	6	degree	degree	NOUN
ajst-32384	152	7	-	-	PUNCT
ajst-32384	152	8	of	of	ADP
ajst-32384	152	9	-	-	PUNCT
ajst-32384	152	10	freedom	freedom	NOUN
ajst-32384	152	11	control	control	NOUN
ajst-32384	152	12	system	system	NOUN
ajst-32384	152	13	combining	combine	VERB
ajst-32384	152	14	feed	feed	NOUN
ajst-32384	152	15	forward	forward	ADV
ajst-32384	152	16	and	and	CCONJ
ajst-32384	152	17	feedback	feedback	NOUN
ajst-32384	152	18	is	be	AUX
ajst-32384	152	19	adopted	adopt	VERB
ajst-32384	152	20	.	.	PUNCT
ajst-32384	153	1	compared	compare	VERB
ajst-32384	153	2	to	to	ADP
ajst-32384	153	3	the	the	DET
ajst-32384	153	4	inevitable	inevitable	ADJ
ajst-32384	153	5	errors	error	NOUN
ajst-32384	153	6	in	in	ADP
ajst-32384	153	7	feedback	feedback	NOUN
ajst-32384	153	8	control	control	NOUN
ajst-32384	153	9	,	,	PUNCT
ajst-32384	153	10	feed	feed	NOUN
ajst-32384	153	11	forward	forward	ADV
ajst-32384	153	12	control	control	NOUN
ajst-32384	153	13	can	can	AUX
ajst-32384	153	14	theoretically	theoretically	ADV
ajst-32384	153	15	achieve	achieve	VERB
ajst-32384	153	16	completely	completely	ADV
ajst-32384	153	17	error	error	NOUN
ajst-32384	153	18	-	-	PUNCT
ajst-32384	153	19	free	free	ADJ
ajst-32384	153	20	control	control	NOUN
ajst-32384	153	21	of	of	ADP
ajst-32384	153	22	the	the	DET
ajst-32384	153	23	system	system	NOUN
ajst-32384	153	24	.	.	PUNCT
ajst-32384	154	1	the	the	DET
ajst-32384	154	2	movement	movement	NOUN
ajst-32384	154	3	of	of	ADP
ajst-32384	154	4	the	the	DET
ajst-32384	154	5	bonding	bonding	NOUN
ajst-32384	154	6	head	head	NOUN
ajst-32384	154	7	of	of	ADP
ajst-32384	154	8	the	the	DET
ajst-32384	154	9	wire	wire	NOUN
ajst-32384	154	10	bonding	bonding	NOUN
ajst-32384	154	11	machine	machine	NOUN
ajst-32384	154	12	not	not	PART
ajst-32384	154	13	only	only	ADV
ajst-32384	154	14	requires	require	VERB
ajst-32384	154	15	high	high	ADJ
ajst-32384	154	16	response	response	NOUN
ajst-32384	154	17	capability	capability	NOUN
ajst-32384	154	18	,	,	PUNCT
ajst-32384	154	19	but	but	CCONJ
ajst-32384	154	20	its	its	PRON
ajst-32384	154	21	trajectory	trajectory	NOUN
ajst-32384	154	22	tracking	tracking	NOUN
ajst-32384	154	23	ability	ability	NOUN
ajst-32384	154	24	also	also	ADV
ajst-32384	154	25	has	have	VERB
ajst-32384	154	26	a	a	DET
ajst-32384	154	27	significant	significant	ADJ
ajst-32384	154	28	impact	impact	NOUN
ajst-32384	154	29	on	on	ADP
ajst-32384	154	30	the	the	DET
ajst-32384	154	31	quality	quality	NOUN
ajst-32384	154	32	of	of	ADP
ajst-32384	154	33	wire	wire	NOUN
ajst-32384	154	34	bonding	bonding	NOUN
ajst-32384	154	35	.	.	PUNCT
ajst-32384	155	1	therefore	therefore	ADV
ajst-32384	155	2	,	,	PUNCT
ajst-32384	155	3	the	the	DET
ajst-32384	155	4	control	control	NOUN
ajst-32384	155	5	requirement	requirement	NOUN
ajst-32384	155	6	is	be	AUX
ajst-32384	155	7	preferably	preferably	ADV
ajst-32384	155	8	to	to	PART
ajst-32384	155	9	achieve	achieve	VERB
ajst-32384	155	10	complete	complete	ADJ
ajst-32384	155	11	tracking	tracking	NOUN
ajst-32384	155	12	of	of	ADP
ajst-32384	155	13	the	the	DET
ajst-32384	155	14	desired	desire	VERB
ajst-32384	155	15	trajectory	trajectory	NOUN
ajst-32384	155	16	,	,	PUNCT
ajst-32384	155	17	and	and	CCONJ
ajst-32384	155	18	iterative	iterative	NOUN
ajst-32384	155	19	learning	learning	NOUN
ajst-32384	155	20	is	be	AUX
ajst-32384	155	21	a	a	DET
ajst-32384	155	22	good	good	ADJ
ajst-32384	155	23	control	control	NOUN
ajst-32384	155	24	method	method	NOUN
ajst-32384	155	25	that	that	PRON
ajst-32384	155	26	can	can	AUX
ajst-32384	155	27	meet	meet	VERB
ajst-32384	155	28	the	the	DET
ajst-32384	155	29	requirement	requirement	NOUN
ajst-32384	155	30	of	of	ADP
ajst-32384	155	31	complete	complete	ADJ
ajst-32384	155	32	trajectory	trajectory	NOUN
ajst-32384	155	33	tracking	tracking	NOUN
ajst-32384	155	34	.	.	PUNCT
ajst-32384	156	1	therefore	therefore	ADV
ajst-32384	156	2	,	,	PUNCT
ajst-32384	156	3	iterative	iterative	NOUN
ajst-32384	156	4	learning	learning	NOUN
ajst-32384	156	5	feed	feed	NOUN
ajst-32384	156	6	forward	forward	ADV
ajst-32384	156	7	control	control	NOUN
ajst-32384	156	8	is	be	AUX
ajst-32384	156	9	now	now	ADV
ajst-32384	156	10	widely	widely	ADV
ajst-32384	156	11	used	use	VERB
ajst-32384	156	12	to	to	PART
ajst-32384	156	13	achieve	achieve	VERB
ajst-32384	156	14	complete	complete	ADJ
ajst-32384	156	15	trajectory	trajectory	NOUN
ajst-32384	156	16	tracking	tracking	NOUN
ajst-32384	156	17	.	.	PUNCT
ajst-32384	157	1	124	124	NUM
ajst-32384	157	2	overall	overall	ADJ
ajst-32384	157	3	,	,	PUNCT
ajst-32384	157	4	voice	voice	NOUN
ajst-32384	157	5	coil	coil	NOUN
ajst-32384	157	6	motors	motor	NOUN
ajst-32384	157	7	have	have	AUX
ajst-32384	157	8	achieved	achieve	VERB
ajst-32384	157	9	multi	multi	ADJ
ajst-32384	157	10	-	-	ADJ
ajst-32384	157	11	dimensional	dimensional	ADJ
ajst-32384	157	12	penetration	penetration	NOUN
ajst-32384	157	13	in	in	ADP
ajst-32384	157	14	the	the	DET
ajst-32384	157	15	field	field	NOUN
ajst-32384	157	16	of	of	ADP
ajst-32384	157	17	precision	precision	NOUN
ajst-32384	157	18	motion	motion	NOUN
ajst-32384	157	19	control	control	NOUN
ajst-32384	157	20	,	,	PUNCT
ajst-32384	157	21	leveraging	leverage	VERB
ajst-32384	157	22	their	their	PRON
ajst-32384	157	23	core	core	NOUN
ajst-32384	157	24	advantages	advantage	NOUN
ajst-32384	157	25	of	of	ADP
ajst-32384	157	26	direct	direct	ADJ
ajst-32384	157	27	drive	drive	NOUN
ajst-32384	157	28	without	without	ADP
ajst-32384	157	29	a	a	DET
ajst-32384	157	30	transmission	transmission	NOUN
ajst-32384	157	31	chain	chain	NOUN
ajst-32384	157	32	,	,	PUNCT
ajst-32384	157	33	millisecond	millisecond	NOUN
ajst-32384	157	34	-	-	PUNCT
ajst-32384	157	35	level	level	NOUN
ajst-32384	157	36	dynamic	dynamic	ADJ
ajst-32384	157	37	response	response	NOUN
ajst-32384	157	38	,	,	PUNCT
ajst-32384	157	39	and	and	CCONJ
ajst-32384	157	40	high	high	ADJ
ajst-32384	157	41	linearity	linearity	NOUN
ajst-32384	157	42	output	output	NOUN
ajst-32384	157	43	.	.	PUNCT
ajst-32384	158	1	from	from	ADP
ajst-32384	158	2	nanometer	nanometer	NOUN
ajst-32384	158	3	level	level	NOUN
ajst-32384	158	4	positioning	positioning	NOUN
ajst-32384	158	5	of	of	ADP
ajst-32384	158	6	hard	hard	ADJ
ajst-32384	158	7	disk	disk	NOUN
ajst-32384	158	8	drive	drive	NOUN
ajst-32384	158	9	(	(	PUNCT
ajst-32384	158	10	hdd	hdd	NOUN
ajst-32384	158	11	)	)	PUNCT
ajst-32384	158	12	heads	head	NOUN
ajst-32384	158	13	to	to	ADP
ajst-32384	158	14	anti	anti	ADJ
ajst-32384	158	15	-	-	ADJ
ajst-32384	158	16	vibration	vibration	ADJ
ajst-32384	158	17	and	and	CCONJ
ajst-32384	158	18	anti	anti	ADJ
ajst-32384	158	19	-	-	ADJ
ajst-32384	158	20	shake	shake	ADJ
ajst-32384	158	21	capabilities	capability	NOUN
ajst-32384	158	22	for	for	ADP
ajst-32384	158	23	mobile	mobile	ADJ
ajst-32384	158	24	phone	phone	NOUN
ajst-32384	158	25	lenses	lense	NOUN
ajst-32384	158	26	,	,	PUNCT
ajst-32384	158	27	from	from	ADP
ajst-32384	158	28	submicron	submicron	NOUN
ajst-32384	158	29	synchronization	synchronization	NOUN
ajst-32384	158	30	of	of	ADP
ajst-32384	158	31	lithography	lithography	NOUN
ajst-32384	158	32	platforms	platform	NOUN
ajst-32384	158	33	to	to	ADP
ajst-32384	158	34	micro	micro	ADJ
ajst-32384	158	35	-	-	NOUN
ajst-32384	158	36	force	force	ADJ
ajst-32384	158	37	manipulation	manipulation	NOUN
ajst-32384	158	38	of	of	ADP
ajst-32384	158	39	microscopic	microscopic	ADJ
ajst-32384	158	40	instruments	instrument	NOUN
ajst-32384	158	41	,	,	PUNCT
ajst-32384	158	42	the	the	DET
ajst-32384	158	43	technological	technological	ADJ
ajst-32384	158	44	value	value	NOUN
ajst-32384	158	45	of	of	ADP
ajst-32384	158	46	vcms	vcms	NOUN
ajst-32384	158	47	continues	continue	VERB
ajst-32384	158	48	to	to	PART
ajst-32384	158	49	break	break	VERB
ajst-32384	158	50	through	through	ADP
ajst-32384	158	51	the	the	DET
ajst-32384	158	52	triangular	triangular	NOUN
ajst-32384	158	53	performance	performance	NOUN
ajst-32384	158	54	limits	limit	NOUN
ajst-32384	158	55	of	of	ADP
ajst-32384	158	56	"	"	PUNCT
ajst-32384	158	57	precision	precision	NOUN
ajst-32384	158	58	-	-	PUNCT
ajst-32384	158	59	speed	speed	NOUN
ajst-32384	158	60	-	-	PUNCT
ajst-32384	158	61	disturbance	disturbance	NOUN
ajst-32384	158	62	resistance	resistance	NOUN
ajst-32384	158	63	"	"	PUNCT
ajst-32384	158	64	.	.	PUNCT
ajst-32384	159	1	the	the	DET
ajst-32384	159	2	differentiated	differentiate	VERB
ajst-32384	159	3	needs	need	NOUN
ajst-32384	159	4	of	of	ADP
ajst-32384	159	5	different	different	ADJ
ajst-32384	159	6	application	application	NOUN
ajst-32384	159	7	scenarios	scenario	NOUN
ajst-32384	159	8	(	(	PUNCT
ajst-32384	159	9	such	such	ADJ
ajst-32384	159	10	as	as	ADP
ajst-32384	159	11	hdd	hdd	NOUN
ajst-32384	159	12	resistance	resistance	NOUN
ajst-32384	159	13	to	to	ADP
ajst-32384	159	14	vibration	vibration	NOUN
ajst-32384	159	15	disturbances	disturbance	NOUN
ajst-32384	159	16	and	and	CCONJ
ajst-32384	159	17	semiconductor	semiconductor	NOUN
ajst-32384	159	18	manufacturing	manufacturing	NOUN
ajst-32384	159	19	pursuit	pursuit	NOUN
ajst-32384	159	20	of	of	ADP
ajst-32384	159	21	multi	multi	ADJ
ajst-32384	159	22	-	-	ADJ
ajst-32384	159	23	axis	axis	ADJ
ajst-32384	159	24	collaborative	collaborative	ADJ
ajst-32384	159	25	precision	precision	NOUN
ajst-32384	159	26	)	)	PUNCT
ajst-32384	159	27	not	not	PART
ajst-32384	159	28	only	only	ADV
ajst-32384	159	29	drive	drive	VERB
ajst-32384	159	30	the	the	DET
ajst-32384	159	31	evolution	evolution	NOUN
ajst-32384	159	32	of	of	ADP
ajst-32384	159	33	key	key	ADJ
ajst-32384	159	34	technologies	technology	NOUN
ajst-32384	159	35	such	such	ADJ
ajst-32384	159	36	as	as	ADP
ajst-32384	159	37	macro	macro	ADJ
ajst-32384	159	38	-	-	ADJ
ajst-32384	159	39	micro	micro	ADJ
ajst-32384	159	40	composite	composite	ADJ
ajst-32384	159	41	structures	structure	NOUN
ajst-32384	159	42	and	and	CCONJ
ajst-32384	159	43	intelligent	intelligent	ADJ
ajst-32384	159	44	control	control	NOUN
ajst-32384	159	45	algorithms	algorithm	NOUN
ajst-32384	159	46	,	,	PUNCT
ajst-32384	159	47	but	but	CCONJ
ajst-32384	159	48	also	also	ADV
ajst-32384	159	49	reveal	reveal	VERB
ajst-32384	159	50	the	the	DET
ajst-32384	159	51	trend	trend	NOUN
ajst-32384	159	52	of	of	ADP
ajst-32384	159	53	vcms	vcms	NOUN
ajst-32384	159	54	transitioning	transition	VERB
ajst-32384	159	55	from	from	ADP
ajst-32384	159	56	single	single	ADJ
ajst-32384	159	57	actuators	actuator	NOUN
ajst-32384	159	58	to	to	ADP
ajst-32384	159	59	electronic	electronic	ADJ
ajst-32384	159	60	mechanical	mechanical	ADJ
ajst-32384	159	61	integrated	integrate	VERB
ajst-32384	159	62	intelligent	intelligent	ADJ
ajst-32384	159	63	modules	module	NOUN
ajst-32384	159	64	.	.	PUNCT
ajst-32384	160	1	in	in	ADP
ajst-32384	160	2	the	the	DET
ajst-32384	160	3	future	future	NOUN
ajst-32384	160	4	,	,	PUNCT
ajst-32384	160	5	as	as	SCONJ
ajst-32384	160	6	precision	precision	NOUN
ajst-32384	160	7	engineering	engineering	NOUN
ajst-32384	160	8	advances	advance	NOUN
ajst-32384	160	9	towards	towards	ADP
ajst-32384	160	10	the	the	DET
ajst-32384	160	11	nanometer	nanometer	NOUN
ajst-32384	160	12	/	/	SYM
ajst-32384	160	13	quantum	quantum	NOUN
ajst-32384	160	14	scale	scale	NOUN
ajst-32384	160	15	,	,	PUNCT
ajst-32384	160	16	vcms	vcms	NOUN
ajst-32384	160	17	will	will	AUX
ajst-32384	160	18	further	far	ADV
ajst-32384	160	19	integrate	integrate	VERB
ajst-32384	160	20	embedded	embed	VERB
ajst-32384	160	21	sensing	sensing	NOUN
ajst-32384	160	22	,	,	PUNCT
ajst-32384	160	23	ai	ai	VERB
ajst-32384	160	24	real	real	ADJ
ajst-32384	160	25	-	-	PUNCT
ajst-32384	160	26	time	time	NOUN
ajst-32384	160	27	optimization	optimization	NOUN
ajst-32384	160	28	,	,	PUNCT
ajst-32384	160	29	and	and	CCONJ
ajst-32384	160	30	new	new	ADJ
ajst-32384	160	31	material	material	NOUN
ajst-32384	160	32	technologies	technology	NOUN
ajst-32384	160	33	,	,	PUNCT
ajst-32384	160	34	expanding	expand	VERB
ajst-32384	160	35	irreplaceable	irreplaceable	ADJ
ajst-32384	160	36	application	application	NOUN
ajst-32384	160	37	boundaries	boundary	NOUN
ajst-32384	160	38	in	in	ADP
ajst-32384	160	39	emerging	emerge	VERB
ajst-32384	160	40	fields	field	NOUN
ajst-32384	160	41	such	such	ADJ
ajst-32384	160	42	as	as	ADP
ajst-32384	160	43	biomedical	biomedical	ADJ
ajst-32384	160	44	robots	robot	NOUN
ajst-32384	160	45	and	and	CCONJ
ajst-32384	160	46	space	space	NOUN
ajst-32384	160	47	optical	optical	ADJ
ajst-32384	160	48	payloads	payload	NOUN
ajst-32384	160	49	.	.	PUNCT
ajst-32384	161	1	4	4	X
ajst-32384	161	2	.	.	X
ajst-32384	161	3	conclusion	conclusion	NOUN
ajst-32384	161	4	initially	initially	ADV
ajst-32384	161	5	,	,	PUNCT
ajst-32384	161	6	the	the	DET
ajst-32384	161	7	research	research	NOUN
ajst-32384	161	8	on	on	ADP
ajst-32384	161	9	voice	voice	NOUN
ajst-32384	161	10	coil	coil	NOUN
ajst-32384	161	11	motors	motor	NOUN
ajst-32384	161	12	was	be	AUX
ajst-32384	161	13	quite	quite	ADV
ajst-32384	161	14	backward	backward	ADJ
ajst-32384	161	15	due	due	ADP
ajst-32384	161	16	to	to	ADP
ajst-32384	161	17	the	the	DET
ajst-32384	161	18	limitations	limitation	NOUN
ajst-32384	161	19	of	of	ADP
ajst-32384	161	20	knowledge	knowledge	NOUN
ajst-32384	161	21	at	at	ADP
ajst-32384	161	22	that	that	DET
ajst-32384	161	23	time	time	NOUN
ajst-32384	161	24	and	and	CCONJ
ajst-32384	161	25	various	various	ADJ
ajst-32384	161	26	social	social	ADJ
ajst-32384	161	27	factors	factor	NOUN
ajst-32384	161	28	.	.	PUNCT
ajst-32384	162	1	however	however	ADV
ajst-32384	162	2	,	,	PUNCT
ajst-32384	162	3	with	with	ADP
ajst-32384	162	4	the	the	DET
ajst-32384	162	5	advancement	advancement	NOUN
ajst-32384	162	6	of	of	ADP
ajst-32384	162	7	science	science	NOUN
ajst-32384	162	8	and	and	CCONJ
ajst-32384	162	9	technology	technology	NOUN
ajst-32384	162	10	,	,	PUNCT
ajst-32384	162	11	voice	voice	NOUN
ajst-32384	162	12	coil	coil	NOUN
ajst-32384	162	13	motors	motor	NOUN
ajst-32384	162	14	have	have	AUX
ajst-32384	162	15	become	become	VERB
ajst-32384	162	16	a	a	DET
ajst-32384	162	17	crucial	crucial	ADJ
ajst-32384	162	18	presence	presence	NOUN
ajst-32384	162	19	in	in	ADP
ajst-32384	162	20	various	various	ADJ
ajst-32384	162	21	modern	modern	ADJ
ajst-32384	162	22	industrial	industrial	ADJ
ajst-32384	162	23	fields	field	NOUN
ajst-32384	162	24	due	due	ADP
ajst-32384	162	25	to	to	ADP
ajst-32384	162	26	their	their	PRON
ajst-32384	162	27	structural	structural	ADJ
ajst-32384	162	28	characteristics	characteristic	NOUN
ajst-32384	162	29	and	and	CCONJ
ajst-32384	162	30	various	various	ADJ
ajst-32384	162	31	performance	performance	NOUN
ajst-32384	162	32	advantages	advantage	NOUN
ajst-32384	162	33	.	.	PUNCT
ajst-32384	163	1	the	the	DET
ajst-32384	163	2	research	research	NOUN
ajst-32384	163	3	on	on	ADP
ajst-32384	163	4	voice	voice	NOUN
ajst-32384	163	5	coil	coil	NOUN
ajst-32384	163	6	motors	motor	NOUN
ajst-32384	163	7	has	have	AUX
ajst-32384	163	8	gradually	gradually	ADV
ajst-32384	163	9	gained	gain	VERB
ajst-32384	163	10	attention	attention	NOUN
ajst-32384	163	11	,	,	PUNCT
ajst-32384	163	12	which	which	PRON
ajst-32384	163	13	has	have	AUX
ajst-32384	163	14	also	also	ADV
ajst-32384	163	15	accelerated	accelerate	VERB
ajst-32384	163	16	the	the	DET
ajst-32384	163	17	technological	technological	ADJ
ajst-32384	163	18	development	development	NOUN
ajst-32384	163	19	of	of	ADP
ajst-32384	163	20	voice	voice	NOUN
ajst-32384	163	21	coil	coil	NOUN
ajst-32384	163	22	motors	motors	PROPN
ajst-32384	163	23	.	.	PUNCT
ajst-32384	164	1	based	base	VERB
ajst-32384	164	2	on	on	ADP
ajst-32384	164	3	research	research	NOUN
ajst-32384	164	4	on	on	ADP
ajst-32384	164	5	vcm	vcm	PROPN
ajst-32384	164	6	control	control	PROPN
ajst-32384	164	7	systems	system	NOUN
ajst-32384	164	8	conducted	conduct	VERB
ajst-32384	164	9	by	by	ADP
ajst-32384	164	10	researchers	researcher	NOUN
ajst-32384	164	11	from	from	ADP
ajst-32384	164	12	various	various	ADJ
ajst-32384	164	13	countries	country	NOUN
ajst-32384	164	14	,	,	PUNCT
ajst-32384	164	15	this	this	DET
ajst-32384	164	16	article	article	NOUN
ajst-32384	164	17	summarizes	summarize	VERB
ajst-32384	164	18	various	various	ADJ
ajst-32384	164	19	vcm	vcm	PROPN
ajst-32384	164	20	control	control	PROPN
ajst-32384	164	21	technologies	technology	NOUN
ajst-32384	164	22	.	.	PUNCT
ajst-32384	165	1	this	this	DET
ajst-32384	165	2	article	article	NOUN
ajst-32384	165	3	comprehensively	comprehensively	ADV
ajst-32384	165	4	introduces	introduce	VERB
ajst-32384	165	5	the	the	DET
ajst-32384	165	6	principles	principle	NOUN
ajst-32384	165	7	and	and	CCONJ
ajst-32384	165	8	characteristics	characteristic	NOUN
ajst-32384	165	9	of	of	ADP
ajst-32384	165	10	some	some	DET
ajst-32384	165	11	common	common	ADJ
ajst-32384	165	12	control	control	NOUN
ajst-32384	165	13	systems	system	NOUN
ajst-32384	165	14	.	.	PUNCT
ajst-32384	166	1	currently	currently	ADV
ajst-32384	166	2	,	,	PUNCT
ajst-32384	166	3	most	most	ADJ
ajst-32384	166	4	mainstream	mainstream	NOUN
ajst-32384	166	5	control	control	NOUN
ajst-32384	166	6	technologies	technology	NOUN
ajst-32384	166	7	are	be	AUX
ajst-32384	166	8	based	base	VERB
ajst-32384	166	9	on	on	ADP
ajst-32384	166	10	traditional	traditional	ADJ
ajst-32384	166	11	pid	pid	NOUN
ajst-32384	166	12	control	control	NOUN
ajst-32384	166	13	.	.	PUNCT
ajst-32384	167	1	however	however	ADV
ajst-32384	167	2	,	,	PUNCT
ajst-32384	167	3	these	these	DET
ajst-32384	167	4	technologies	technology	NOUN
ajst-32384	167	5	have	have	VERB
ajst-32384	167	6	many	many	ADJ
ajst-32384	167	7	drawbacks	drawback	NOUN
ajst-32384	167	8	,	,	PUNCT
ajst-32384	167	9	such	such	ADJ
ajst-32384	167	10	as	as	ADP
ajst-32384	167	11	susceptibility	susceptibility	NOUN
ajst-32384	167	12	to	to	ADP
ajst-32384	167	13	external	external	ADJ
ajst-32384	167	14	interference	interference	NOUN
ajst-32384	167	15	,	,	PUNCT
ajst-32384	167	16	information	information	NOUN
ajst-32384	167	17	time	time	NOUN
ajst-32384	167	18	lag	lag	NOUN
ajst-32384	167	19	,	,	PUNCT
ajst-32384	167	20	and	and	CCONJ
ajst-32384	167	21	mechanical	mechanical	ADJ
ajst-32384	167	22	friction	friction	NOUN
ajst-32384	167	23	.	.	PUNCT
ajst-32384	168	1	these	these	DET
ajst-32384	168	2	factors	factor	NOUN
ajst-32384	168	3	can	can	AUX
ajst-32384	168	4	lead	lead	VERB
ajst-32384	168	5	to	to	PART
ajst-32384	168	6	control	control	VERB
ajst-32384	168	7	errors	error	NOUN
ajst-32384	168	8	.	.	PUNCT
ajst-32384	169	1	consequently	consequently	ADV
ajst-32384	169	2	,	,	PUNCT
ajst-32384	169	3	a	a	DET
ajst-32384	169	4	number	number	NOUN
ajst-32384	169	5	of	of	ADP
ajst-32384	169	6	advanced	advanced	ADJ
ajst-32384	169	7	technologies	technology	NOUN
ajst-32384	169	8	have	have	AUX
ajst-32384	169	9	been	be	AUX
ajst-32384	169	10	developed	develop	VERB
ajst-32384	169	11	to	to	PART
ajst-32384	169	12	address	address	VERB
ajst-32384	169	13	these	these	DET
ajst-32384	169	14	issues	issue	NOUN
ajst-32384	169	15	.	.	PUNCT
ajst-32384	170	1	for	for	ADP
ajst-32384	170	2	example	example	NOUN
ajst-32384	170	3	,	,	PUNCT
ajst-32384	170	4	iterative	iterative	NOUN
ajst-32384	170	5	learning	learning	NOUN
ajst-32384	170	6	control	control	NOUN
ajst-32384	170	7	uses	use	VERB
ajst-32384	170	8	the	the	DET
ajst-32384	170	9	previous	previous	ADJ
ajst-32384	170	10	output	output	NOUN
ajst-32384	170	11	as	as	ADP
ajst-32384	170	12	the	the	DET
ajst-32384	170	13	input	input	NOUN
ajst-32384	170	14	signal	signal	NOUN
ajst-32384	170	15	to	to	PART
ajst-32384	170	16	continuously	continuously	ADV
ajst-32384	170	17	reduce	reduce	VERB
ajst-32384	170	18	tracking	tracking	NOUN
ajst-32384	170	19	error	error	NOUN
ajst-32384	170	20	,	,	PUNCT
ajst-32384	170	21	ultimately	ultimately	ADV
ajst-32384	170	22	achieving	achieve	VERB
ajst-32384	170	23	perfect	perfect	ADJ
ajst-32384	170	24	tracking	tracking	NOUN
ajst-32384	170	25	through	through	ADP
ajst-32384	170	26	increasing	increase	VERB
ajst-32384	170	27	iterations	iteration	NOUN
ajst-32384	170	28	.	.	PUNCT
ajst-32384	171	1	of	of	ADP
ajst-32384	171	2	course	course	NOUN
ajst-32384	171	3	,	,	PUNCT
ajst-32384	171	4	there	there	PRON
ajst-32384	171	5	are	be	VERB
ajst-32384	171	6	many	many	ADJ
ajst-32384	171	7	other	other	ADJ
ajst-32384	171	8	approaches	approach	NOUN
ajst-32384	171	9	,	,	PUNCT
ajst-32384	171	10	such	such	ADJ
ajst-32384	171	11	as	as	ADP
ajst-32384	171	12	fuzzy	fuzzy	ADJ
ajst-32384	171	13	control	control	NOUN
ajst-32384	171	14	,	,	PUNCT
ajst-32384	171	15	neural	neural	ADJ
ajst-32384	171	16	networks	network	NOUN
ajst-32384	171	17	,	,	PUNCT
ajst-32384	171	18	and	and	CCONJ
ajst-32384	171	19	other	other	ADJ
ajst-32384	171	20	modern	modern	ADJ
ajst-32384	171	21	control	control	NOUN
ajst-32384	171	22	methods	method	NOUN
ajst-32384	171	23	.	.	PUNCT
ajst-32384	172	1	furthermore	furthermore	ADV
ajst-32384	172	2	,	,	PUNCT
ajst-32384	172	3	this	this	DET
ajst-32384	172	4	article	article	NOUN
ajst-32384	172	5	introduces	introduce	VERB
ajst-32384	172	6	common	common	ADJ
ajst-32384	172	7	vcm	vcm	PROPN
ajst-32384	172	8	application	application	NOUN
ajst-32384	172	9	areas	area	NOUN
ajst-32384	172	10	,	,	PUNCT
ajst-32384	172	11	such	such	ADJ
ajst-32384	172	12	as	as	ADP
ajst-32384	172	13	bond	bond	NOUN
ajst-32384	172	14	head	head	NOUN
ajst-32384	172	15	control	control	NOUN
ajst-32384	172	16	in	in	ADP
ajst-32384	172	17	wire	wire	NOUN
ajst-32384	172	18	bonders	bonder	NOUN
ajst-32384	172	19	,	,	PUNCT
ajst-32384	172	20	primarily	primarily	ADV
ajst-32384	172	21	addressing	address	VERB
ajst-32384	172	22	bond	bond	NOUN
ajst-32384	172	23	head	head	NOUN
ajst-32384	172	24	trajectory	trajectory	NOUN
ajst-32384	172	25	tracking	tracking	NOUN
ajst-32384	172	26	,	,	PUNCT
ajst-32384	172	27	where	where	SCONJ
ajst-32384	172	28	iterative	iterative	NOUN
ajst-32384	172	29	learning	learning	NOUN
ajst-32384	172	30	control	control	NOUN
ajst-32384	172	31	is	be	AUX
ajst-32384	172	32	used	use	VERB
ajst-32384	172	33	to	to	PART
ajst-32384	172	34	eliminate	eliminate	VERB
ajst-32384	172	35	tracking	track	VERB
ajst-32384	172	36	errors	error	NOUN
ajst-32384	172	37	.	.	PUNCT
ajst-32384	173	1	this	this	DET
ajst-32384	173	2	article	article	NOUN
ajst-32384	173	3	also	also	ADV
ajst-32384	173	4	discusses	discuss	VERB
ajst-32384	173	5	applications	application	NOUN
ajst-32384	173	6	in	in	ADP
ajst-32384	173	7	mobile	mobile	ADJ
ajst-32384	173	8	phone	phone	NOUN
ajst-32384	173	9	camera	camera	NOUN
ajst-32384	173	10	modules	module	NOUN
ajst-32384	173	11	,	,	PUNCT
ajst-32384	173	12	and	and	CCONJ
ajst-32384	173	13	summarizes	summarize	VERB
ajst-32384	173	14	the	the	DET
ajst-32384	173	15	key	key	ADJ
ajst-32384	173	16	issues	issue	NOUN
ajst-32384	173	17	that	that	PRON
ajst-32384	173	18	need	need	VERB
ajst-32384	173	19	to	to	PART
ajst-32384	173	20	be	be	AUX
ajst-32384	173	21	addressed	address	VERB
ajst-32384	173	22	in	in	ADP
ajst-32384	173	23	each	each	DET
ajst-32384	173	24	application	application	NOUN
ajst-32384	173	25	scenario	scenario	NOUN
ajst-32384	173	26	.	.	PUNCT
ajst-32384	174	1	now	now	ADV
ajst-32384	174	2	,	,	PUNCT
ajst-32384	174	3	as	as	SCONJ
ajst-32384	174	4	the	the	DET
ajst-32384	174	5	application	application	NOUN
ajst-32384	174	6	fields	field	NOUN
ajst-32384	174	7	of	of	ADP
ajst-32384	174	8	voice	voice	NOUN
ajst-32384	174	9	coil	coil	NOUN
ajst-32384	174	10	motors	motor	NOUN
ajst-32384	174	11	are	be	AUX
ajst-32384	174	12	becoming	become	VERB
ajst-32384	174	13	more	more	ADV
ajst-32384	174	14	and	and	CCONJ
ajst-32384	174	15	more	more	ADV
ajst-32384	174	16	,	,	PUNCT
ajst-32384	174	17	even	even	ADV
ajst-32384	174	18	covering	cover	VERB
ajst-32384	174	19	our	our	PRON
ajst-32384	174	20	daily	daily	ADJ
ajst-32384	174	21	lives	life	NOUN
ajst-32384	174	22	such	such	ADJ
ajst-32384	174	23	as	as	ADP
ajst-32384	174	24	mobile	mobile	ADJ
ajst-32384	174	25	phone	phone	NOUN
ajst-32384	174	26	cameras	camera	NOUN
ajst-32384	174	27	to	to	ADP
ajst-32384	174	28	some	some	DET
ajst-32384	174	29	highend	highend	ADJ
ajst-32384	174	30	precision	precision	NOUN
ajst-32384	174	31	equipment	equipment	NOUN
ajst-32384	174	32	,	,	PUNCT
ajst-32384	174	33	more	more	ADJ
ajst-32384	174	34	and	and	CCONJ
ajst-32384	174	35	more	more	ADJ
ajst-32384	174	36	problems	problem	NOUN
ajst-32384	174	37	are	be	AUX
ajst-32384	174	38	exposed	expose	VERB
ajst-32384	174	39	in	in	ADP
ajst-32384	174	40	their	their	PRON
ajst-32384	174	41	use	use	NOUN
ajst-32384	174	42	,	,	PUNCT
ajst-32384	174	43	so	so	CCONJ
ajst-32384	174	44	more	more	ADJ
ajst-32384	174	45	control	control	NOUN
ajst-32384	174	46	methods	method	NOUN
ajst-32384	174	47	are	be	AUX
ajst-32384	174	48	constantly	constantly	ADV
ajst-32384	174	49	being	be	AUX
ajst-32384	174	50	created	create	VERB
ajst-32384	174	51	.	.	PUNCT
ajst-32384	175	1	the	the	DET
ajst-32384	175	2	main	main	ADJ
ajst-32384	175	3	challenges	challenge	NOUN
ajst-32384	175	4	currently	currently	ADV
ajst-32384	175	5	facing	face	VERB
ajst-32384	175	6	vcms	vcms	NOUN
ajst-32384	175	7	are	be	AUX
ajst-32384	175	8	improving	improve	VERB
ajst-32384	175	9	positioning	positioning	NOUN
ajst-32384	175	10	accuracy	accuracy	NOUN
ajst-32384	175	11	and	and	CCONJ
ajst-32384	175	12	timing	timing	NOUN
ajst-32384	175	13	,	,	PUNCT
ajst-32384	175	14	as	as	ADV
ajst-32384	175	15	well	well	ADV
ajst-32384	175	16	as	as	ADP
ajst-32384	175	17	enhancing	enhance	VERB
ajst-32384	175	18	anti	anti	ADJ
ajst-32384	175	19	-	-	ADJ
ajst-32384	175	20	interference	interference	ADJ
ajst-32384	175	21	capabilities	capability	NOUN
ajst-32384	175	22	.	.	PUNCT
ajst-32384	176	1	in	in	ADP
ajst-32384	176	2	various	various	ADJ
ajst-32384	176	3	working	work	VERB
ajst-32384	176	4	environments	environment	NOUN
ajst-32384	176	5	,	,	PUNCT
ajst-32384	176	6	external	external	ADJ
ajst-32384	176	7	interference	interference	NOUN
ajst-32384	176	8	factors	factor	NOUN
ajst-32384	176	9	such	such	ADJ
ajst-32384	176	10	as	as	ADP
ajst-32384	176	11	temperature	temperature	NOUN
ajst-32384	176	12	,	,	PUNCT
ajst-32384	176	13	air	air	NOUN
ajst-32384	176	14	pressure	pressure	NOUN
ajst-32384	176	15	,	,	PUNCT
ajst-32384	176	16	friction	friction	NOUN
ajst-32384	176	17	,	,	PUNCT
ajst-32384	176	18	and	and	CCONJ
ajst-32384	176	19	so	so	ADV
ajst-32384	176	20	on	on	ADV
ajst-32384	176	21	,	,	PUNCT
ajst-32384	176	22	may	may	AUX
ajst-32384	176	23	pose	pose	VERB
ajst-32384	176	24	challenges	challenge	NOUN
ajst-32384	176	25	.	.	PUNCT
ajst-32384	177	1	in	in	ADP
ajst-32384	177	2	the	the	DET
ajst-32384	177	3	future	future	NOUN
ajst-32384	177	4	,	,	PUNCT
ajst-32384	177	5	it	it	PRON
ajst-32384	177	6	can	can	AUX
ajst-32384	177	7	be	be	AUX
ajst-32384	177	8	reasonably	reasonably	ADV
ajst-32384	177	9	anticipated	anticipate	VERB
ajst-32384	177	10	that	that	SCONJ
ajst-32384	177	11	as	as	SCONJ
ajst-32384	177	12	the	the	DET
ajst-32384	177	13	application	application	NOUN
ajst-32384	177	14	of	of	ADP
ajst-32384	177	15	vcms	vcms	NOUN
ajst-32384	177	16	in	in	ADP
ajst-32384	177	17	various	various	ADJ
ajst-32384	177	18	fields	field	NOUN
ajst-32384	177	19	gradually	gradually	ADV
ajst-32384	177	20	increases	increase	VERB
ajst-32384	177	21	,	,	PUNCT
ajst-32384	177	22	and	and	CCONJ
ajst-32384	177	23	as	as	SCONJ
ajst-32384	177	24	research	research	NOUN
ajst-32384	177	25	deepens	deepen	VERB
ajst-32384	177	26	and	and	CCONJ
ajst-32384	177	27	widens	widen	VERB
ajst-32384	177	28	,	,	PUNCT
ajst-32384	177	29	the	the	DET
ajst-32384	177	30	performance	performance	NOUN
ajst-32384	177	31	of	of	ADP
ajst-32384	177	32	vcm	vcm	PROPN
ajst-32384	177	33	control	control	PROPN
ajst-32384	177	34	systems	system	NOUN
ajst-32384	177	35	will	will	AUX
ajst-32384	177	36	continue	continue	VERB
ajst-32384	177	37	to	to	PART
ajst-32384	177	38	improve	improve	VERB
ajst-32384	177	39	.	.	PUNCT
ajst-32384	178	1	125	125	NUM
ajst-32384	178	2	references	reference	NOUN
ajst-32384	178	3	[	[	X
ajst-32384	178	4	1	1	NUM
ajst-32384	178	5	]	]	PUNCT
ajst-32384	178	6	hoffer	hoffer	PROPN
ajst-32384	178	7	b	b	PROPN
ajst-32384	178	8	,	,	PUNCT
ajst-32384	178	9	rana	rana	PROPN
ajst-32384	178	10	v	v	PROPN
ajst-32384	178	11	,	,	PUNCT
ajst-32384	178	12	menzel	menzel	PROPN
ajst-32384	178	13	s	s	SYM
ajst-32384	178	14	,	,	PUNCT
ajst-32384	178	15	waser	waser	NOUN
ajst-32384	178	16	r	r	NOUN
ajst-32384	178	17	,	,	PUNCT
ajst-32384	178	18	kvatinsky	kvatinsky	PROPN
ajst-32384	178	19	s.	s.	PROPN
ajst-32384	178	20	experimental	experimental	ADJ
ajst-32384	178	21	demonstration	demonstration	NOUN
ajst-32384	178	22	of	of	ADP
ajst-32384	178	23	memristor	memristor	NOUN
ajst-32384	178	24	-	-	PUNCT
ajst-32384	178	25	aided	aid	VERB
ajst-32384	178	26	logic	logic	NOUN
ajst-32384	178	27	(	(	PUNCT
ajst-32384	178	28	magic	magic	NOUN
ajst-32384	178	29	)	)	PUNCT
ajst-32384	178	30	using	use	VERB
ajst-32384	178	31	valence	valence	NOUN
ajst-32384	178	32	change	change	NOUN
ajst-32384	178	33	memory	memory	NOUN
ajst-32384	178	34	(	(	PUNCT
ajst-32384	178	35	vcm	vcm	PROPN
ajst-32384	178	36	)	)	PUNCT
ajst-32384	178	37	.	.	PUNCT
ajst-32384	179	1	ieee	ieee	NOUN
ajst-32384	179	2	transactions	transaction	NOUN
ajst-32384	179	3	on	on	ADP
ajst-32384	179	4	electron	electron	NOUN
ajst-32384	179	5	devices	device	NOUN
ajst-32384	179	6	.	.	PUNCT
ajst-32384	180	1	2020	2020	NUM
ajst-32384	180	2	jun	jun	PROPN
ajst-32384	180	3	25;67	25;67	NUM
ajst-32384	180	4	(	(	PUNCT
ajst-32384	180	5	8):3115–22	8):3115–22	NUM
ajst-32384	180	6	.	.	PUNCT
ajst-32384	181	1	[	[	X
ajst-32384	181	2	2	2	X
ajst-32384	181	3	]	]	PUNCT
ajst-32384	181	4	hsieh	hsieh	PROPN
ajst-32384	181	5	c	c	PROPN
ajst-32384	181	6	-	-	PUNCT
ajst-32384	181	7	l	l	NOUN
ajst-32384	181	8	,	,	PUNCT
ajst-32384	181	9	liu	liu	PROPN
ajst-32384	181	10	c	c	PROPN
ajst-32384	181	11	-	-	PUNCT
ajst-32384	181	12	s.	s.	PROPN
ajst-32384	181	13	design	design	NOUN
ajst-32384	181	14	of	of	ADP
ajst-32384	181	15	a	a	DET
ajst-32384	181	16	voice	voice	NOUN
ajst-32384	181	17	coil	coil	NOUN
ajst-32384	181	18	motor	motor	NOUN
ajst-32384	181	19	actuator	actuator	NOUN
ajst-32384	181	20	with	with	ADP
ajst-32384	181	21	l	l	ADJ
ajst-32384	181	22	-	-	PUNCT
ajst-32384	181	23	shape	shape	NOUN
ajst-32384	181	24	coils	coil	NOUN
ajst-32384	181	25	for	for	ADP
ajst-32384	181	26	optical	optical	ADJ
ajst-32384	181	27	zooming	zoom	VERB
ajst-32384	181	28	smartphone	smartphone	NOUN
ajst-32384	181	29	cameras	camera	NOUN
ajst-32384	181	30	.	.	PUNCT
ajst-32384	182	1	ieee	ieee	NOUN
ajst-32384	182	2	access	access	NOUN
ajst-32384	182	3	.	.	PUNCT
ajst-32384	183	1	2020	2020	NUM
ajst-32384	183	2	jan	jan	PROPN
ajst-32384	183	3	1;8:20884–91	1;8:20884–91	NUM
ajst-32384	183	4	.	.	PUNCT
ajst-32384	184	1	[	[	X
ajst-32384	184	2	3	3	X
ajst-32384	184	3	]	]	X
ajst-32384	184	4	kang	kang	PROPN
ajst-32384	184	5	j	j	PROPN
ajst-32384	184	6	,	,	PUNCT
ajst-32384	184	7	an	an	DET
ajst-32384	184	8	js	js	PROPN
ajst-32384	184	9	,	,	PUNCT
ajst-32384	184	10	wang	wang	PROPN
ajst-32384	184	11	b.	b.	PROPN
ajst-32384	184	12	an	an	DET
ajst-32384	184	13	efficient	efficient	ADJ
ajst-32384	184	14	fec	fec	PROPN
ajst-32384	184	15	encoder	encoder	NOUN
ajst-32384	184	16	core	core	NOUN
ajst-32384	184	17	for	for	ADP
ajst-32384	184	18	vcm	vcm	PROPN
ajst-32384	184	19	leo	leo	PROPN
ajst-32384	184	20	satellite	satellite	PROPN
ajst-32384	184	21	-	-	PUNCT
ajst-32384	184	22	ground	ground	NOUN
ajst-32384	184	23	communications	communication	NOUN
ajst-32384	184	24	.	.	PUNCT
ajst-32384	185	1	ieee	ieee	NOUN
ajst-32384	185	2	access	access	NOUN
ajst-32384	185	3	.	.	PUNCT
ajst-32384	186	1	2020	2020	NUM
ajst-32384	186	2	jan	jan	PROPN
ajst-32384	186	3	1;8:125692–701	1;8:125692–701	NUM
ajst-32384	186	4	.	.	PUNCT
ajst-32384	187	1	[	[	X
ajst-32384	187	2	4	4	NUM
ajst-32384	187	3	]	]	PUNCT
ajst-32384	187	4	qiao	qiao	PROPN
ajst-32384	187	5	y	y	PROPN
ajst-32384	187	6	,	,	PUNCT
ajst-32384	187	7	zhao	zhao	PROPN
ajst-32384	187	8	t	t	PROPN
ajst-32384	187	9	,	,	PUNCT
ajst-32384	187	10	gui	gui	NOUN
ajst-32384	187	11	x.	x.	NOUN
ajst-32384	187	12	overview	overview	NOUN
ajst-32384	187	13	of	of	ADP
ajst-32384	187	14	position	position	NOUN
ajst-32384	187	15	servo	servo	NOUN
ajst-32384	187	16	control	control	NOUN
ajst-32384	187	17	technology	technology	NOUN
ajst-32384	187	18	and	and	CCONJ
ajst-32384	187	19	development	development	NOUN
ajst-32384	187	20	of	of	ADP
ajst-32384	187	21	voice	voice	NOUN
ajst-32384	187	22	coil	coil	NOUN
ajst-32384	187	23	motor	motor	NOUN
ajst-32384	187	24	.	.	PUNCT
ajst-32384	188	1	ces	ce	NOUN
ajst-32384	188	2	transactions	transaction	NOUN
ajst-32384	188	3	on	on	ADP
ajst-32384	188	4	electrical	electrical	ADJ
ajst-32384	188	5	machines	machine	NOUN
ajst-32384	188	6	and	and	CCONJ
ajst-32384	188	7	systems	system	NOUN
ajst-32384	188	8	.	.	PUNCT
ajst-32384	189	1	2022	2022	NUM
ajst-32384	189	2	sep	sep	NOUN
ajst-32384	189	3	1;6	1;6	NUM
ajst-32384	189	4	(	(	PUNCT
ajst-32384	189	5	3):269–78	3):269–78	NUM
ajst-32384	189	6	.	.	PUNCT
ajst-32384	190	1	[	[	X
ajst-32384	190	2	5	5	NUM
ajst-32384	190	3	]	]	X
ajst-32384	190	4	smith	smith	PROPN
ajst-32384	190	5	kj	kj	PROPN
ajst-32384	190	6	,	,	PUNCT
ajst-32384	190	7	graham	graham	PROPN
ajst-32384	190	8	dj	dj	PROPN
ajst-32384	190	9	,	,	PUNCT
ajst-32384	190	10	neasham	neasham	PROPN
ajst-32384	190	11	ja	ja	PROPN
ajst-32384	190	12	.	.	PUNCT
ajst-32384	190	13	design	design	NOUN
ajst-32384	190	14	and	and	CCONJ
ajst-32384	190	15	optimization	optimization	NOUN
ajst-32384	190	16	of	of	ADP
ajst-32384	190	17	a	a	DET
ajst-32384	190	18	voice	voice	NOUN
ajst-32384	190	19	coil	coil	NOUN
ajst-32384	190	20	motor	motor	NOUN
ajst-32384	190	21	with	with	ADP
ajst-32384	190	22	a	a	DET
ajst-32384	190	23	rotary	rotary	ADJ
ajst-32384	190	24	actuator	actuator	NOUN
ajst-32384	190	25	for	for	ADP
ajst-32384	190	26	an	an	DET
ajst-32384	190	27	ultrasound	ultrasound	ADJ
ajst-32384	190	28	scanner	scanner	NOUN
ajst-32384	190	29	.	.	PUNCT
ajst-32384	191	1	ieee	ieee	NOUN
ajst-32384	191	2	transactions	transaction	NOUN
ajst-32384	191	3	on	on	ADP
ajst-32384	191	4	industrial	industrial	ADJ
ajst-32384	191	5	electronics	electronic	NOUN
ajst-32384	191	6	.	.	PUNCT
ajst-32384	192	1	2015	2015	NUM
ajst-32384	192	2	jul	jul	NOUN
ajst-32384	192	3	22;62	22;62	NUM
ajst-32384	192	4	(	(	PUNCT
ajst-32384	192	5	11):7073–8	11):7073–8	NUM
ajst-32384	192	6	.	.	PUNCT
ajst-32384	193	1	[	[	X
ajst-32384	193	2	6	6	NUM
ajst-32384	193	3	]	]	PUNCT
ajst-32384	193	4	xing	xing	PROPN
ajst-32384	193	5	f	f	X
ajst-32384	193	6	,	,	PUNCT
ajst-32384	193	7	kwon	kwon	VERB
ajst-32384	193	8	b	b	X
ajst-32384	193	9	-	-	PUNCT
ajst-32384	193	10	i.	i.	NOUN
ajst-32384	193	11	design	design	NOUN
ajst-32384	193	12	of	of	ADP
ajst-32384	193	13	a	a	DET
ajst-32384	193	14	rotary	rotary	ADJ
ajst-32384	193	15	-	-	PUNCT
ajst-32384	193	16	linear	linear	NOUN
ajst-32384	193	17	motor	motor	NOUN
ajst-32384	193	18	with	with	ADP
ajst-32384	193	19	unipolar	unipolar	ADJ
ajst-32384	193	20	spm	spm	PROPN
ajst-32384	193	21	and	and	CCONJ
ajst-32384	193	22	voice	voice	NOUN
ajst-32384	193	23	coil	coil	NOUN
ajst-32384	193	24	structure	structure	NOUN
ajst-32384	193	25	.	.	PUNCT
ajst-32384	194	1	ieee	ieee	NOUN
ajst-32384	194	2	access	access	NOUN
ajst-32384	194	3	.	.	PUNCT
ajst-32384	195	1	2020	2020	NUM
ajst-32384	195	2	jan	jan	PROPN
ajst-32384	195	3	1;8:150291–300	1;8:150291–300	NUM
ajst-32384	195	4	.	.	PUNCT
ajst-32384	196	1	[	[	X
ajst-32384	196	2	7	7	X
ajst-32384	196	3	]	]	PUNCT
ajst-32384	196	4	xing	xing	PROPN
ajst-32384	196	5	f	f	PROPN
ajst-32384	196	6	,	,	PUNCT
ajst-32384	196	7	kwon	kwon	VERB
ajst-32384	196	8	j	j	PROPN
ajst-32384	196	9	-	-	PUNCT
ajst-32384	196	10	w	w	PROPN
ajst-32384	196	11	,	,	PUNCT
ajst-32384	196	12	li	li	PROPN
ajst-32384	196	13	m	m	PROPN
ajst-32384	196	14	,	,	PUNCT
ajst-32384	196	15	kwon	kwon	VERB
ajst-32384	196	16	b	b	X
ajst-32384	196	17	-	-	PUNCT
ajst-32384	196	18	i.	i.	NOUN
ajst-32384	196	19	a	a	DET
ajst-32384	196	20	rotary	rotary	NOUN
ajst-32384	196	21	-	-	PUNCT
ajst-32384	196	22	linear	linear	NOUN
ajst-32384	196	23	spm	spm	PROPN
ajst-32384	196	24	voice	voice	PROPN
ajst-32384	196	25	coil	coil	NOUN
ajst-32384	196	26	motor	motor	NOUN
ajst-32384	196	27	with	with	ADP
ajst-32384	196	28	pm	pm	NOUN
ajst-32384	196	29	flux	flux	NOUN
ajst-32384	196	30	bridges	bridge	NOUN
ajst-32384	196	31	for	for	ADP
ajst-32384	196	32	output	output	NOUN
ajst-32384	196	33	performance	performance	NOUN
ajst-32384	196	34	improvement	improvement	NOUN
ajst-32384	196	35	.	.	PUNCT
ajst-32384	197	1	ieee	ieee	NOUN
ajst-32384	197	2	access	access	NOUN
ajst-32384	197	3	.	.	PUNCT
ajst-32384	198	1	2021	2021	NUM
ajst-32384	198	2	jan	jan	PROPN
ajst-32384	198	3	1;9:57054–63	1;9:57054–63	NUM
ajst-32384	198	4	.	.	PUNCT
ajst-32384	199	1	[	[	X
ajst-32384	199	2	8	8	NUM
ajst-32384	199	3	]	]	X
ajst-32384	199	4	chang	chang	PROPN
ajst-32384	199	5	y	y	PROPN
ajst-32384	199	6	-	-	PUNCT
ajst-32384	199	7	h	h	PROPN
ajst-32384	199	8	,	,	PUNCT
ajst-32384	199	9	liu	liu	PROPN
ajst-32384	199	10	c	c	PROPN
ajst-32384	199	11	-	-	PUNCT
ajst-32384	199	12	s	s	PROPN
ajst-32384	199	13	,	,	PUNCT
ajst-32384	199	14	chen	chen	PROPN
ajst-32384	199	15	i	i	PROPN
ajst-32384	199	16	-	-	PUNCT
ajst-32384	199	17	w	w	PROPN
ajst-32384	199	18	,	,	PUNCT
ajst-32384	199	19	tsai	tsai	PROPN
ajst-32384	199	20	m	m	PROPN
ajst-32384	199	21	-	-	PUNCT
ajst-32384	199	22	s	s	PROPN
ajst-32384	199	23	,	,	PUNCT
ajst-32384	199	24	tseng	tseng	PROPN
ajst-32384	199	25	h	h	PROPN
ajst-32384	199	26	-	-	PUNCT
ajst-32384	199	27	c.	c.	PROPN
ajst-32384	199	28	open	open	ADJ
ajst-32384	199	29	-	-	PUNCT
ajst-32384	199	30	loop	loop	NOUN
ajst-32384	199	31	control	control	NOUN
ajst-32384	199	32	of	of	ADP
ajst-32384	199	33	voice	voice	NOUN
ajst-32384	199	34	coil	coil	NOUN
ajst-32384	199	35	motor	motor	NOUN
ajst-32384	199	36	with	with	ADP
ajst-32384	199	37	magnetic	magnetic	ADJ
ajst-32384	199	38	restoring	restore	VERB
ajst-32384	199	39	force	force	NOUN
ajst-32384	199	40	using	use	VERB
ajst-32384	199	41	high	high	ADJ
ajst-32384	199	42	-	-	PUNCT
ajst-32384	199	43	low	low	ADJ
ajst-32384	199	44	frequency	frequency	NOUN
ajst-32384	199	45	composite	composite	ADJ
ajst-32384	199	46	signals	signal	NOUN
ajst-32384	199	47	.	.	PUNCT
ajst-32384	200	1	ieee	ieee	NOUN
ajst-32384	200	2	access	access	NOUN
ajst-32384	200	3	.	.	PUNCT
ajst-32384	201	1	2019	2019	NUM
ajst-32384	201	2	jan	jan	PROPN
ajst-32384	201	3	1;7:146258–63	1;7:146258–63	NUM
ajst-32384	201	4	.	.	PUNCT
ajst-32384	202	1	[	[	X
ajst-32384	202	2	9	9	NUM
ajst-32384	202	3	]	]	X
ajst-32384	202	4	hekimoglu	hekimoglu	PROPN
ajst-32384	202	5	b.	b.	PROPN
ajst-32384	202	6	optimal	optimal	ADJ
ajst-32384	202	7	tuning	tuning	NOUN
ajst-32384	202	8	of	of	ADP
ajst-32384	202	9	fractional	fractional	ADJ
ajst-32384	202	10	order	order	NOUN
ajst-32384	202	11	pid	pid	NOUN
ajst-32384	202	12	controller	controller	NOUN
ajst-32384	202	13	for	for	ADP
ajst-32384	202	14	dc	dc	PROPN
ajst-32384	202	15	motor	motor	NOUN
ajst-32384	202	16	speed	speed	NOUN
ajst-32384	202	17	control	control	NOUN
ajst-32384	202	18	via	via	ADP
ajst-32384	202	19	chaotic	chaotic	ADJ
ajst-32384	202	20	atom	atom	NOUN
ajst-32384	202	21	search	search	NOUN
ajst-32384	202	22	optimization	optimization	NOUN
ajst-32384	202	23	algorithm	algorithm	NOUN
ajst-32384	202	24	.	.	PUNCT
ajst-32384	203	1	ieee	ieee	NOUN
ajst-32384	203	2	access	access	NOUN
ajst-32384	203	3	.	.	PUNCT
ajst-32384	204	1	2019	2019	NUM
ajst-32384	204	2	jan	jan	PROPN
ajst-32384	204	3	1;7:38100–14	1;7:38100–14	NUM
ajst-32384	204	4	.	.	PUNCT
ajst-32384	205	1	[	[	X
ajst-32384	205	2	10	10	NUM
ajst-32384	205	3	]	]	X
ajst-32384	205	4	padhy	padhy	PROPN
ajst-32384	205	5	s	s	PROPN
ajst-32384	205	6	,	,	PUNCT
ajst-32384	205	7	panda	panda	NOUN
ajst-32384	205	8	s.	s.	PROPN
ajst-32384	205	9	application	application	NOUN
ajst-32384	205	10	of	of	ADP
ajst-32384	205	11	a	a	DET
ajst-32384	205	12	simplified	simplified	ADJ
ajst-32384	205	13	grey	grey	ADJ
ajst-32384	205	14	wolf	wolf	PROPN
ajst-32384	205	15	optimization	optimization	NOUN
ajst-32384	205	16	technique	technique	NOUN
ajst-32384	205	17	for	for	ADP
ajst-32384	205	18	adaptive	adaptive	ADJ
ajst-32384	205	19	fuzzy	fuzzy	ADJ
ajst-32384	205	20	pid	pid	NOUN
ajst-32384	205	21	controller	controller	NOUN
ajst-32384	205	22	design	design	NOUN
ajst-32384	205	23	for	for	ADP
ajst-32384	205	24	frequency	frequency	NOUN
ajst-32384	205	25	regulation	regulation	NOUN
ajst-32384	205	26	of	of	ADP
ajst-32384	205	27	a	a	DET
ajst-32384	205	28	distributed	distribute	VERB
ajst-32384	205	29	power	power	NOUN
ajst-32384	205	30	generation	generation	NOUN
ajst-32384	205	31	system	system	NOUN
ajst-32384	205	32	.	.	PUNCT
ajst-32384	206	1	protection	protection	NOUN
ajst-32384	206	2	and	and	CCONJ
ajst-32384	206	3	control	control	NOUN
ajst-32384	206	4	of	of	ADP
ajst-32384	206	5	modern	modern	ADJ
ajst-32384	206	6	power	power	NOUN
ajst-32384	206	7	systems	system	NOUN
ajst-32384	206	8	.	.	PUNCT
ajst-32384	207	1	2021	2021	NUM
ajst-32384	207	2	feb	feb	NOUN
ajst-32384	207	3	1;6	1;6	NUM
ajst-32384	207	4	(	(	PUNCT
ajst-32384	207	5	1	1	NUM
ajst-32384	207	6	)	)	PUNCT
ajst-32384	207	7	.	.	PUNCT
ajst-32384	208	1	[	[	X
ajst-32384	208	2	11	11	NUM
ajst-32384	208	3	]	]	X
ajst-32384	208	4	gao	gao	PROPN
ajst-32384	208	5	p	p	X
ajst-32384	208	6	,	,	PUNCT
ajst-32384	208	7	zhang	zhang	PROPN
ajst-32384	208	8	g	g	PROPN
ajst-32384	208	9	,	,	PUNCT
ajst-32384	208	10	ouyang	ouyang	PROPN
ajst-32384	208	11	h	h	PROPN
ajst-32384	208	12	,	,	PUNCT
ajst-32384	208	13	mei	mei	PROPN
ajst-32384	208	14	l.	l.	PROPN
ajst-32384	208	15	an	an	DET
ajst-32384	208	16	adaptive	adaptive	ADJ
ajst-32384	208	17	super	super	ADJ
ajst-32384	208	18	twisting	twisting	NOUN
ajst-32384	208	19	nonlinear	nonlinear	ADJ
ajst-32384	208	20	fractional	fractional	ADJ
ajst-32384	208	21	order	order	NOUN
ajst-32384	208	22	pid	pid	NOUN
ajst-32384	208	23	sliding	slide	VERB
ajst-32384	208	24	mode	mode	NOUN
ajst-32384	208	25	control	control	NOUN
ajst-32384	208	26	of	of	ADP
ajst-32384	208	27	permanent	permanent	ADJ
ajst-32384	208	28	magnet	magnet	NOUN
ajst-32384	208	29	synchronous	synchronous	ADJ
ajst-32384	208	30	motor	motor	NOUN
ajst-32384	208	31	speed	speed	NOUN
ajst-32384	208	32	regulation	regulation	NOUN
ajst-32384	208	33	system	system	NOUN
ajst-32384	208	34	based	base	VERB
ajst-32384	208	35	on	on	ADP
ajst-32384	208	36	extended	extended	ADJ
ajst-32384	208	37	state	state	NOUN
ajst-32384	208	38	observer	observer	NOUN
ajst-32384	208	39	.	.	PUNCT
ajst-32384	208	40	ieee	ieee	NOUN
ajst-32384	208	41	access	access	NOUN
ajst-32384	208	42	.	.	PUNCT
ajst-32384	209	1	2020	2020	NUM
ajst-32384	209	2	jan	jan	PROPN
ajst-32384	209	3	1;8:53498–510	1;8:53498–510	NUM
ajst-32384	209	4	.	.	PUNCT
ajst-32384	210	1	[	[	X
ajst-32384	210	2	12	12	NUM
ajst-32384	210	3	]	]	X
ajst-32384	210	4	wei	wei	PROPN
ajst-32384	210	5	y	y	PROPN
ajst-32384	210	6	-	-	PUNCT
ajst-32384	210	7	s	s	PROPN
ajst-32384	210	8	,	,	PUNCT
ajst-32384	210	9	wan	wan	PROPN
ajst-32384	210	10	k	k	PROPN
ajst-32384	210	11	,	,	PUNCT
ajst-32384	210	12	xu	xu	PROPN
ajst-32384	210	13	q	q	ADJ
ajst-32384	210	14	-	-	PUNCT
ajst-32384	210	15	y.	y.	ADJ
ajst-32384	210	16	design	design	NOUN
ajst-32384	210	17	of	of	ADP
ajst-32384	210	18	adaptive	adaptive	ADJ
ajst-32384	210	19	ilc	ilc	NOUN
ajst-32384	210	20	for	for	ADP
ajst-32384	210	21	2	2	NUM
ajst-32384	210	22	-	-	SYM
ajst-32384	210	23	d	d	PROPN
ajst-32384	210	24	fmm	fmm	PROPN
ajst-32384	210	25	systems	system	NOUN
ajst-32384	210	26	with	with	ADP
ajst-32384	210	27	unknown	unknown	ADJ
ajst-32384	210	28	control	control	NOUN
ajst-32384	210	29	directions	direction	NOUN
ajst-32384	210	30	.	.	PUNCT
ajst-32384	211	1	ieee	ieee	NOUN
ajst-32384	211	2	access	access	NOUN
ajst-32384	211	3	.	.	PUNCT
ajst-32384	212	1	2019	2019	NUM
ajst-32384	212	2	jan	jan	PROPN
ajst-32384	212	3	1;7:134920–5	1;7:134920–5	NUM
ajst-32384	212	4	.	.	PUNCT
ajst-32384	213	1	[	[	X
ajst-32384	213	2	13	13	NUM
ajst-32384	213	3	]	]	X
ajst-32384	213	4	zheng	zheng	PROPN
ajst-32384	213	5	y	y	PROPN
ajst-32384	213	6	,	,	PUNCT
ajst-32384	213	7	xu	xu	PROPN
ajst-32384	214	1	r	r	PROPN
ajst-32384	214	2	,	,	PUNCT
ajst-32384	214	3	fei	fei	PROPN
ajst-32384	214	4	c	c	PROPN
ajst-32384	214	5	,	,	PUNCT
ajst-32384	214	6	castelli	castelli	PROPN
ajst-32384	214	7	vp	vp	PROPN
ajst-32384	214	8	,	,	PUNCT
ajst-32384	214	9	meng	meng	PROPN
ajst-32384	214	10	q	q	PROPN
ajst-32384	214	11	,	,	PUNCT
ajst-32384	214	12	yu	yu	PROPN
ajst-32384	214	13	h.	h.	PROPN
ajst-32384	214	14	a	a	DET
ajst-32384	214	15	neural	neural	ADJ
ajst-32384	214	16	network	network	NOUN
ajst-32384	214	17	feedforward	feedforward	NOUN
ajst-32384	214	18	pid	pid	NOUN
ajst-32384	214	19	control	control	NOUN
ajst-32384	214	20	method	method	NOUN
ajst-32384	214	21	for	for	ADP
ajst-32384	214	22	soft	soft	ADJ
ajst-32384	214	23	pneumatic	pneumatic	ADJ
ajst-32384	214	24	actuator	actuator	NOUN
ajst-32384	214	25	based	base	VERB
ajst-32384	214	26	on	on	ADP
ajst-32384	214	27	origami	origami	NOUN
ajst-32384	214	28	mechanism	mechanism	NOUN
ajst-32384	214	29	:	:	PUNCT
ajst-32384	214	30	achieving	achieve	VERB
ajst-32384	214	31	accurate	accurate	ADJ
ajst-32384	214	32	position	position	NOUN
ajst-32384	214	33	control	control	NOUN
ajst-32384	214	34	.	.	PUNCT
ajst-32384	215	1	2021	2021	NUM
ajst-32384	215	2	6th	6th	ADJ
ajst-32384	215	3	international	international	ADJ
ajst-32384	215	4	conference	conference	NOUN
ajst-32384	215	5	on	on	ADP
ajst-32384	215	6	automation	automation	NOUN
ajst-32384	215	7	,	,	PUNCT
ajst-32384	215	8	control	control	NOUN
ajst-32384	215	9	and	and	CCONJ
ajst-32384	215	10	robotics	robotic	NOUN
ajst-32384	215	11	engineering	engineering	NOUN
ajst-32384	215	12	(	(	PUNCT
ajst-32384	215	13	cacre	cacre	NOUN
ajst-32384	215	14	)	)	PUNCT
ajst-32384	215	15	.	.	PUNCT
ajst-32384	216	1	2024	2024	NUM
ajst-32384	216	2	jul	jul	PROPN
ajst-32384	216	3	18;220	18;220	NUM
ajst-32384	216	4	–	–	PUNCT
ajst-32384	216	5	4	4	NUM
ajst-32384	216	6	.	.	PUNCT
ajst-32384	217	1	[	[	X
ajst-32384	217	2	14	14	NUM
ajst-32384	217	3	]	]	X
ajst-32384	217	4	zuo	zuo	PROPN
ajst-32384	217	5	d	d	PROPN
ajst-32384	217	6	,	,	PUNCT
ajst-32384	217	7	qian	qian	PROPN
ajst-32384	217	8	l	l	PROPN
ajst-32384	217	9	,	,	PUNCT
ajst-32384	217	10	yang	yang	PROPN
ajst-32384	217	11	t	t	PROPN
ajst-32384	217	12	,	,	PUNCT
ajst-32384	217	13	cui	cui	NOUN
ajst-32384	217	14	x	x	PROPN
ajst-32384	217	15	,	,	PUNCT
ajst-32384	217	16	luo	luo	PROPN
ajst-32384	217	17	q.	q.	PROPN
ajst-32384	217	18	coupling	couple	VERB
ajst-32384	217	19	leveling	leveling	NOUN
ajst-32384	217	20	control	control	NOUN
ajst-32384	217	21	based	base	VERB
ajst-32384	217	22	on	on	ADP
ajst-32384	217	23	fuzzy	fuzzy	ADJ
ajst-32384	217	24	pid	pid	NOUN
ajst-32384	217	25	for	for	ADP
ajst-32384	217	26	synchronous	synchronous	ADJ
ajst-32384	217	27	loading	loading	NOUN
ajst-32384	217	28	system	system	NOUN
ajst-32384	217	29	of	of	ADP
ajst-32384	217	30	load‐bearing	load‐beare	VERB
ajst-32384	217	31	test	test	NOUN
ajst-32384	217	32	bed	bed	NOUN
ajst-32384	217	33	.	.	PUNCT
ajst-32384	218	1	chinese	chinese	ADJ
ajst-32384	218	2	journal	journal	PROPN
ajst-32384	218	3	of	of	ADP
ajst-32384	218	4	electronics	electronic	NOUN
ajst-32384	218	5	.	.	PUNCT
ajst-32384	219	1	2017	2017	NUM
ajst-32384	219	2	nov	nov	NOUN
ajst-32384	219	3	1;26	1;26	NUM
ajst-32384	219	4	(	(	PUNCT
ajst-32384	219	5	6):1206–12	6):1206–12	NOUN
ajst-32384	219	6	.	.	PUNCT
ajst-32384	220	1	[	[	X
ajst-32384	220	2	15	15	NUM
ajst-32384	220	3	]	]	X
ajst-32384	220	4	yang	yang	PROPN
ajst-32384	220	5	j	j	PROPN
ajst-32384	220	6	,	,	PUNCT
ajst-32384	220	7	hou	hou	PROPN
ajst-32384	220	8	d	d	PROPN
ajst-32384	220	9	,	,	PUNCT
ajst-32384	220	10	sun	sun	PROPN
ajst-32384	220	11	x	x	AUX
ajst-32384	220	12	,	,	PUNCT
ajst-32384	220	13	zuo	zuo	PROPN
ajst-32384	220	14	j.	j.	PROPN
ajst-32384	220	15	force	force	PROPN
ajst-32384	220	16	equalization	equalization	PROPN
ajst-32384	220	17	control	control	NOUN
ajst-32384	220	18	of	of	ADP
ajst-32384	220	19	redundant	redundant	ADJ
ajst-32384	220	20	electromechanical	electromechanical	ADJ
ajst-32384	220	21	actuation	actuation	NOUN
ajst-32384	220	22	system	system	NOUN
ajst-32384	220	23	by	by	ADP
ajst-32384	220	24	fopid	fopid	NOUN
ajst-32384	220	25	and	and	CCONJ
ajst-32384	220	26	current	current	ADJ
ajst-32384	220	27	feedforward	feedforward	NOUN
ajst-32384	220	28	.	.	PUNCT
ajst-32384	221	1	ieee	ieee	NOUN
ajst-32384	221	2	access	access	NOUN
ajst-32384	221	3	.	.	PUNCT
ajst-32384	222	1	2023	2023	NUM
ajst-32384	222	2	jan	jan	PROPN
ajst-32384	222	3	1;11:109283–93	1;11:109283–93	NUM
ajst-32384	222	4	.	.	PUNCT
ajst-32384	223	1	[	[	X
ajst-32384	223	2	16	16	NUM
ajst-32384	223	3	]	]	X
ajst-32384	223	4	wan	wan	PROPN
ajst-32384	223	5	j	j	PROPN
ajst-32384	223	6	,	,	PUNCT
ajst-32384	223	7	he	he	PRON
ajst-32384	223	8	b	b	PROPN
ajst-32384	223	9	,	,	PUNCT
ajst-32384	223	10	wang	wang	PROPN
ajst-32384	223	11	d	d	PROPN
ajst-32384	223	12	,	,	PUNCT
ajst-32384	223	13	yan	yan	PROPN
ajst-32384	223	14	t	t	PROPN
ajst-32384	223	15	,	,	PUNCT
ajst-32384	223	16	shen	shen	PROPN
ajst-32384	223	17	y.	y.	PROPN
ajst-32384	223	18	fractional	fractional	PROPN
ajst-32384	223	19	-	-	PUNCT
ajst-32384	223	20	order	order	NOUN
ajst-32384	223	21	pid	pid	NOUN
ajst-32384	223	22	motion	motion	NOUN
ajst-32384	223	23	control	control	NOUN
ajst-32384	223	24	for	for	ADP
ajst-32384	223	25	auv	auv	PROPN
ajst-32384	223	26	using	use	VERB
ajst-32384	223	27	cloudmodel	cloudmodel	NOUN
ajst-32384	223	28	-	-	PUNCT
ajst-32384	223	29	based	base	VERB
ajst-32384	223	30	quantum	quantum	ADJ
ajst-32384	223	31	genetic	genetic	ADJ
ajst-32384	223	32	algorithm	algorithm	NOUN
ajst-32384	223	33	.	.	PUNCT
ajst-32384	224	1	ieee	ieee	NOUN
ajst-32384	224	2	access	access	NOUN
ajst-32384	224	3	.	.	PUNCT
ajst-32384	225	1	2019	2019	NUM
ajst-32384	225	2	jan	jan	PROPN
ajst-32384	225	3	1;7:124828–43	1;7:124828–43	NUM
ajst-32384	225	4	.	.	PUNCT
ajst-32384	226	1	[	[	X
ajst-32384	226	2	17	17	NUM
ajst-32384	226	3	]	]	X
ajst-32384	226	4	liu	liu	PROPN
ajst-32384	226	5	j	j	PROPN
ajst-32384	226	6	,	,	PUNCT
ajst-32384	226	7	li	li	PROPN
ajst-32384	226	8	t	t	PROPN
ajst-32384	226	9	,	,	PUNCT
ajst-32384	226	10	zhang	zhang	PROPN
ajst-32384	226	11	z	z	PROPN
ajst-32384	226	12	,	,	PUNCT
ajst-32384	226	13	chen	chen	PROPN
ajst-32384	226	14	j.	j.	PROPN
ajst-32384	226	15	narx	narx	PROPN
ajst-32384	226	16	prediction	prediction	NOUN
ajst-32384	226	17	-	-	PUNCT
ajst-32384	226	18	based	base	VERB
ajst-32384	226	19	parameters	parameter	NOUN
ajst-32384	226	20	online	online	ADJ
ajst-32384	226	21	tuning	tuning	NOUN
ajst-32384	226	22	method	method	NOUN
ajst-32384	226	23	of	of	ADP
ajst-32384	226	24	intelligent	intelligent	ADJ
ajst-32384	226	25	pid	pid	NOUN
ajst-32384	226	26	system	system	NOUN
ajst-32384	226	27	.	.	PUNCT
ajst-32384	227	1	ieee	ieee	NOUN
ajst-32384	227	2	access	access	NOUN
ajst-32384	227	3	.	.	PUNCT
ajst-32384	228	1	2020	2020	NUM
ajst-32384	228	2	jan	jan	PROPN
ajst-32384	228	3	1;8:130922–36	1;8:130922–36	NUM
ajst-32384	228	4	.	.	PUNCT
ajst-32384	229	1	[	[	X
ajst-32384	229	2	18	18	NUM
ajst-32384	229	3	]	]	X
ajst-32384	229	4	liu	liu	PROPN
ajst-32384	229	5	f	f	PROPN
ajst-32384	229	6	,	,	PUNCT
ajst-32384	229	7	wang	wang	PROPN
ajst-32384	229	8	h	h	PROPN
ajst-32384	229	9	,	,	PUNCT
ajst-32384	229	10	shi	shi	PROPN
ajst-32384	229	11	q	q	PROPN
ajst-32384	229	12	,	,	PUNCT
ajst-32384	229	13	wang	wang	PROPN
ajst-32384	229	14	h	h	PROPN
ajst-32384	229	15	,	,	PUNCT
ajst-32384	229	16	zhang	zhang	PROPN
ajst-32384	229	17	m	m	PROPN
ajst-32384	229	18	,	,	PUNCT
ajst-32384	229	19	zhao	zhao	PROPN
ajst-32384	229	20	h.	h.	PROPN
ajst-32384	229	21	comparison	comparison	NOUN
ajst-32384	229	22	of	of	ADP
ajst-32384	229	23	an	an	DET
ajst-32384	229	24	anfis	anfis	ADJ
ajst-32384	229	25	and	and	CCONJ
ajst-32384	229	26	fuzzy	fuzzy	ADJ
ajst-32384	229	27	pid	pid	NOUN
ajst-32384	229	28	control	control	NOUN
ajst-32384	229	29	model	model	NOUN
ajst-32384	229	30	for	for	ADP
ajst-32384	229	31	performance	performance	NOUN
ajst-32384	229	32	in	in	ADP
ajst-32384	229	33	a	a	DET
ajst-32384	229	34	two	two	NUM
ajst-32384	229	35	-	-	PUNCT
ajst-32384	229	36	axis	axis	NOUN
ajst-32384	229	37	inertial	inertial	NOUN
ajst-32384	229	38	stabilized	stabilize	VERB
ajst-32384	229	39	platform	platform	NOUN
ajst-32384	229	40	.	.	PUNCT
ajst-32384	230	1	ieee	ieee	NOUN
ajst-32384	230	2	access	access	NOUN
ajst-32384	230	3	.	.	PUNCT
ajst-32384	231	1	2017	2017	NUM
ajst-32384	231	2	jan	jan	PROPN
ajst-32384	231	3	1;5:12951–62	1;5:12951–62	NUM
ajst-32384	231	4	.	.	PUNCT
ajst-32384	232	1	[	[	X
ajst-32384	232	2	19	19	NUM
ajst-32384	232	3	]	]	X
ajst-32384	232	4	gabdullin	gabdullin	PROPN
ajst-32384	232	5	n	n	CCONJ
ajst-32384	232	6	,	,	PUNCT
ajst-32384	232	7	ahmad	ahmad	PROPN
ajst-32384	232	8	h	h	PROPN
ajst-32384	232	9	,	,	PUNCT
ajst-32384	232	10	ro	ro	PROPN
ajst-32384	232	11	j.	j.	PROPN
ajst-32384	232	12	next	next	ADJ
ajst-32384	232	13	generation	generation	NOUN
ajst-32384	232	14	autofocus	autofocus	NOUN
ajst-32384	232	15	and	and	CCONJ
ajst-32384	232	16	optical	optical	ADJ
ajst-32384	232	17	image	image	NOUN
ajst-32384	232	18	stabilization	stabilization	NOUN
ajst-32384	232	19	system	system	NOUN
ajst-32384	232	20	for	for	ADP
ajst-32384	232	21	camera	camera	NOUN
ajst-32384	232	22	modules	module	NOUN
ajst-32384	232	23	using	use	VERB
ajst-32384	232	24	magnetic	magnetic	ADJ
ajst-32384	232	25	shape	shape	NOUN
ajst-32384	232	26	memory	memory	NOUN
ajst-32384	232	27	actuators	actuator	NOUN
ajst-32384	232	28	.	.	PUNCT
ajst-32384	233	1	ieee	ieee	NOUN
ajst-32384	233	2	access	access	NOUN
ajst-32384	233	3	.	.	PUNCT
ajst-32384	234	1	2020	2020	NUM
ajst-32384	234	2	jan	jan	PROPN
ajst-32384	234	3	1;8:160177–87	1;8:160177–87	NUM
ajst-32384	234	4	.	.	PUNCT
ajst-32384	235	1	[	[	X
ajst-32384	235	2	20	20	NUM
ajst-32384	235	3	]	]	PUNCT
ajst-32384	235	4	luo	luo	PROPN
ajst-32384	235	5	l	l	PROPN
ajst-32384	235	6	,	,	PUNCT
ajst-32384	235	7	zhang	zhang	PROPN
ajst-32384	235	8	y	y	PROPN
ajst-32384	235	9	,	,	PUNCT
ajst-32384	235	10	sun	sun	PROPN
ajst-32384	235	11	z.	z.	PROPN
ajst-32384	235	12	task	task	PROPN
ajst-32384	235	13	space	space	NOUN
ajst-32384	235	14	division	division	NOUN
ajst-32384	235	15	and	and	CCONJ
ajst-32384	235	16	trajectory	trajectory	NOUN
ajst-32384	235	17	planning	planning	NOUN
ajst-32384	235	18	for	for	ADP
ajst-32384	235	19	a	a	DET
ajst-32384	235	20	flexible	flexible	ADJ
ajst-32384	235	21	macro	macro	ADJ
ajst-32384	235	22	-	-	ADJ
ajst-32384	235	23	micro	micro	ADJ
ajst-32384	235	24	manipulator	manipulator	NOUN
ajst-32384	235	25	system	system	NOUN
ajst-32384	235	26	.	.	PUNCT
ajst-32384	236	1	tsinghua	tsinghua	PROPN
ajst-32384	236	2	science	science	PROPN
ajst-32384	236	3	&	&	CCONJ
ajst-32384	236	4	technology	technology	PROPN
ajst-32384	236	5	.	.	PUNCT
ajst-32384	237	1	2007	2007	NUM
ajst-32384	237	2	oct	oct	NOUN
ajst-32384	237	3	1;12	1;12	NUM
ajst-32384	237	4	(	(	PUNCT
ajst-32384	237	5	5):607–13	5):607–13	PROPN
ajst-32384	237	6	.	.	PUNCT