id	sid	tid	token	lemma	pos
ajst-3262	1	1	academic	academic	ADJ
ajst-3262	1	2	journal	journal	NOUN
ajst-3262	1	3	of	of	ADP
ajst-3262	1	4	science	science	NOUN
ajst-3262	1	5	and	and	CCONJ
ajst-3262	1	6	technology	technology	NOUN
ajst-3262	1	7	issn	issn	NOUN
ajst-3262	1	8	:	:	PUNCT
ajst-3262	1	9	2771	2771	NUM
ajst-3262	1	10	-	-	SYM
ajst-3262	1	11	3032	3032	NUM
ajst-3262	1	12	|	|	NOUN
ajst-3262	1	13	vol	vol	NOUN
ajst-3262	1	14	.	.	PROPN
ajst-3262	2	1	4	4	NUM
ajst-3262	2	2	,	,	PUNCT
ajst-3262	2	3	no	no	INTJ
ajst-3262	2	4	.	.	NOUN
ajst-3262	2	5	1	1	NUM
ajst-3262	2	6	,	,	PUNCT
ajst-3262	2	7	2022	2022	NUM
ajst-3262	2	8	89	89	NUM
ajst-3262	2	9	study	study	NOUN
ajst-3262	2	10	on	on	ADP
ajst-3262	2	11	the	the	DET
ajst-3262	2	12	stability	stability	NOUN
ajst-3262	2	13	of	of	ADP
ajst-3262	2	14	porous	porous	ADJ
ajst-3262	2	15	silicon	silicon	NOUN
ajst-3262	2	16	energetic	energetic	ADJ
ajst-3262	2	17	materials	material	NOUN
ajst-3262	2	18	lei	lei	PROPN
ajst-3262	2	19	yang	yang	PROPN
ajst-3262	2	20	,	,	PUNCT
ajst-3262	2	21	xueming	xueming	PROPN
ajst-3262	2	22	li	li	PROPN
ajst-3262	2	23	,	,	PUNCT
ajst-3262	2	24	yinfang	yinfang	PROPN
ajst-3262	2	25	he	he	PRON
ajst-3262	2	26	college	college	PROPN
ajst-3262	2	27	of	of	ADP
ajst-3262	2	28	chemistry	chemistry	NOUN
ajst-3262	2	29	and	and	CCONJ
ajst-3262	2	30	chemical	chemical	PROPN
ajst-3262	2	31	engineering	engineering	NOUN
ajst-3262	2	32	,	,	PUNCT
ajst-3262	2	33	chongqing	chongqing	PROPN
ajst-3262	2	34	university	university	NOUN
ajst-3262	2	35	,	,	PUNCT
ajst-3262	2	36	401331	401331	NUM
ajst-3262	2	37	,	,	PUNCT
ajst-3262	2	38	china	china	PROPN
ajst-3262	2	39	abstract	abstract	NOUN
ajst-3262	2	40	:	:	PUNCT
ajst-3262	2	41	porous	porous	ADJ
ajst-3262	2	42	silicon	silicon	NOUN
ajst-3262	2	43	has	have	AUX
ajst-3262	2	44	been	be	AUX
ajst-3262	2	45	widely	widely	ADV
ajst-3262	2	46	studied	study	VERB
ajst-3262	2	47	due	due	ADP
ajst-3262	2	48	to	to	ADP
ajst-3262	2	49	its	its	PRON
ajst-3262	2	50	high	high	ADJ
ajst-3262	2	51	explosion	explosion	NOUN
ajst-3262	2	52	characteristics	characteristic	NOUN
ajst-3262	2	53	,	,	PUNCT
ajst-3262	2	54	less	less	ADJ
ajst-3262	2	55	harm	harm	NOUN
ajst-3262	2	56	to	to	ADP
ajst-3262	2	57	the	the	DET
ajst-3262	2	58	environment	environment	NOUN
ajst-3262	2	59	and	and	CCONJ
ajst-3262	2	60	compatibility	compatibility	NOUN
ajst-3262	2	61	with	with	ADP
ajst-3262	2	62	all	all	DET
ajst-3262	2	63	silicon	silicon	NOUN
ajst-3262	2	64	based	base	VERB
ajst-3262	2	65	production	production	NOUN
ajst-3262	2	66	processes	process	NOUN
ajst-3262	2	67	.	.	PUNCT
ajst-3262	3	1	at	at	ADP
ajst-3262	3	2	present	present	ADJ
ajst-3262	3	3	,	,	PUNCT
ajst-3262	3	4	it	it	PRON
ajst-3262	3	5	has	have	AUX
ajst-3262	3	6	been	be	AUX
ajst-3262	3	7	used	use	VERB
ajst-3262	3	8	in	in	ADP
ajst-3262	3	9	military	military	ADJ
ajst-3262	3	10	,	,	PUNCT
ajst-3262	3	11	national	national	ADJ
ajst-3262	3	12	defense	defense	NOUN
ajst-3262	3	13	and	and	CCONJ
ajst-3262	3	14	other	other	ADJ
ajst-3262	3	15	fields	field	NOUN
ajst-3262	3	16	.	.	PUNCT
ajst-3262	4	1	in	in	ADP
ajst-3262	4	2	this	this	DET
ajst-3262	4	3	paper	paper	NOUN
ajst-3262	4	4	,	,	PUNCT
ajst-3262	4	5	porous	porous	ADJ
ajst-3262	4	6	silicon	silicon	NOUN
ajst-3262	4	7	was	be	AUX
ajst-3262	4	8	prepared	prepare	VERB
ajst-3262	4	9	by	by	ADP
ajst-3262	4	10	electrochemical	electrochemical	ADJ
ajst-3262	4	11	anodic	anodic	ADJ
ajst-3262	4	12	oxidation	oxidation	NOUN
ajst-3262	4	13	.	.	PUNCT
ajst-3262	5	1	the	the	DET
ajst-3262	5	2	electrolysis	electrolysis	NOUN
ajst-3262	5	3	time	time	NOUN
ajst-3262	5	4	was	be	AUX
ajst-3262	5	5	35	35	NUM
ajst-3262	5	6	min	min	NOUN
ajst-3262	5	7	,	,	PUNCT
ajst-3262	5	8	the	the	DET
ajst-3262	5	9	current	current	ADJ
ajst-3262	5	10	density	density	NOUN
ajst-3262	5	11	was	be	AUX
ajst-3262	5	12	50	50	NUM
ajst-3262	5	13	ma	ma	PROPN
ajst-3262	5	14	/	/	SYM
ajst-3262	5	15	cm2	cm2	NOUN
ajst-3262	5	16	,	,	PUNCT
ajst-3262	5	17	and	and	CCONJ
ajst-3262	5	18	the	the	DET
ajst-3262	5	19	electrolyte	electrolyte	NOUN
ajst-3262	5	20	was	be	AUX
ajst-3262	5	21	hf	hf	ADP
ajst-3262	5	22	:	:	PUNCT
ajst-3262	5	23	dmac=5:1	dmac=5:1	X
ajst-3262	5	24	(	(	PUNCT
ajst-3262	5	25	volume	volume	NOUN
ajst-3262	5	26	ratio	ratio	NOUN
ajst-3262	5	27	)	)	PUNCT
ajst-3262	5	28	.	.	PUNCT
ajst-3262	6	1	the	the	DET
ajst-3262	6	2	effects	effect	NOUN
ajst-3262	6	3	of	of	ADP
ajst-3262	6	4	silane	silane	NOUN
ajst-3262	6	5	coupling	couple	VERB
ajst-3262	6	6	agents	agent	NOUN
ajst-3262	6	7	(	(	PUNCT
ajst-3262	6	8	kh550	kh550	PROPN
ajst-3262	6	9	and	and	CCONJ
ajst-3262	6	10	kh560	kh560	PROPN
ajst-3262	6	11	)	)	PUNCT
ajst-3262	6	12	and	and	CCONJ
ajst-3262	6	13	cathodic	cathodic	NOUN
ajst-3262	6	14	reduction	reduction	NOUN
ajst-3262	6	15	treatment	treatment	NOUN
ajst-3262	6	16	on	on	ADP
ajst-3262	6	17	the	the	DET
ajst-3262	6	18	life	life	NOUN
ajst-3262	6	19	of	of	ADP
ajst-3262	6	20	porous	porous	ADJ
ajst-3262	6	21	silicon	silicon	NOUN
ajst-3262	6	22	were	be	AUX
ajst-3262	6	23	investigated	investigate	VERB
ajst-3262	6	24	.	.	PUNCT
ajst-3262	7	1	the	the	DET
ajst-3262	7	2	results	result	NOUN
ajst-3262	7	3	show	show	VERB
ajst-3262	7	4	that	that	SCONJ
ajst-3262	7	5	the	the	DET
ajst-3262	7	6	life	life	NOUN
ajst-3262	7	7	of	of	ADP
ajst-3262	7	8	porous	porous	ADJ
ajst-3262	7	9	silicon	silicon	NOUN
ajst-3262	7	10	chips	chip	NOUN
ajst-3262	7	11	treated	treat	VERB
ajst-3262	7	12	by	by	ADP
ajst-3262	7	13	cathodic	cathodic	NOUN
ajst-3262	7	14	reduction+kh560	reduction+kh560	NOUN
ajst-3262	7	15	is	be	AUX
ajst-3262	7	16	longer	long	ADJ
ajst-3262	7	17	,	,	PUNCT
ajst-3262	7	18	and	and	CCONJ
ajst-3262	7	19	the	the	DET
ajst-3262	7	20	morphology	morphology	NOUN
ajst-3262	7	21	of	of	ADP
ajst-3262	7	22	porous	porous	ADJ
ajst-3262	7	23	silicon	silicon	NOUN
ajst-3262	7	24	chips	chip	NOUN
ajst-3262	7	25	treated	treat	VERB
ajst-3262	7	26	by	by	ADP
ajst-3262	7	27	cathodic	cathodic	NOUN
ajst-3262	7	28	reduction+kh560	reduction+kh560	NOUN
ajst-3262	7	29	is	be	AUX
ajst-3262	7	30	better	well	ADJ
ajst-3262	7	31	.	.	PUNCT
ajst-3262	8	1	keywords	keyword	NOUN
ajst-3262	8	2	:	:	PUNCT
ajst-3262	8	3	porous	porous	ADJ
ajst-3262	8	4	silicon	silicon	NOUN
ajst-3262	8	5	,	,	PUNCT
ajst-3262	8	6	electrochemical	electrochemical	ADJ
ajst-3262	8	7	anodic	anodic	ADJ
ajst-3262	8	8	oxidation	oxidation	NOUN
ajst-3262	8	9	,	,	PUNCT
ajst-3262	8	10	stabilization	stabilization	NOUN
ajst-3262	8	11	.	.	PUNCT
ajst-3262	9	1	1	1	X
ajst-3262	9	2	.	.	X
ajst-3262	9	3	introduction	introduction	NOUN
ajst-3262	9	4	porous	porous	ADJ
ajst-3262	9	5	silicon	silicon	NOUN
ajst-3262	9	6	has	have	VERB
ajst-3262	9	7	rich	rich	ADJ
ajst-3262	9	8	morphological	morphological	ADJ
ajst-3262	9	9	characteristics	characteristic	NOUN
ajst-3262	9	10	and	and	CCONJ
ajst-3262	9	11	excellent	excellent	ADJ
ajst-3262	9	12	properties	property	NOUN
ajst-3262	9	13	,	,	PUNCT
ajst-3262	9	14	such	such	ADJ
ajst-3262	9	15	as	as	ADP
ajst-3262	9	16	large	large	ADJ
ajst-3262	9	17	specific	specific	ADJ
ajst-3262	9	18	surface	surface	NOUN
ajst-3262	9	19	area	area	NOUN
ajst-3262	9	20	,	,	PUNCT
ajst-3262	9	21	high	high	ADJ
ajst-3262	9	22	resistivity	resistivity	NOUN
ajst-3262	10	1	[	[	X
ajst-3262	10	2	1	1	NUM
ajst-3262	10	3	]	]	PUNCT
ajst-3262	10	4	,	,	PUNCT
ajst-3262	10	5	photoluminescence	photoluminescence	NOUN
ajst-3262	10	6	,	,	PUNCT
ajst-3262	10	7	electroluminescence	electroluminescence	NOUN
ajst-3262	10	8	and	and	CCONJ
ajst-3262	10	9	good	good	ADJ
ajst-3262	10	10	biocompatibility	biocompatibility	NOUN
ajst-3262	10	11	,	,	PUNCT
ajst-3262	10	12	and	and	CCONJ
ajst-3262	10	13	has	have	VERB
ajst-3262	10	14	good	good	ADJ
ajst-3262	10	15	application	application	NOUN
ajst-3262	10	16	prospects	prospect	NOUN
ajst-3262	10	17	in	in	ADP
ajst-3262	10	18	mems	mem	NOUN
ajst-3262	10	19	,	,	PUNCT
ajst-3262	10	20	sensors	sensor	NOUN
ajst-3262	10	21	,	,	PUNCT
ajst-3262	10	22	medicine	medicine	NOUN
ajst-3262	10	23	and	and	CCONJ
ajst-3262	10	24	other	other	ADJ
ajst-3262	10	25	fields	field	NOUN
ajst-3262	10	26	[	[	X
ajst-3262	10	27	2	2	NUM
ajst-3262	10	28	]	]	PUNCT
ajst-3262	10	29	.	.	PUNCT
ajst-3262	11	1	porous	porous	ADJ
ajst-3262	11	2	silicon	silicon	NOUN
ajst-3262	11	3	as	as	ADP
ajst-3262	11	4	the	the	DET
ajst-3262	11	5	substrate	substrate	NOUN
ajst-3262	11	6	has	have	VERB
ajst-3262	11	7	the	the	DET
ajst-3262	11	8	characteristics	characteristic	NOUN
ajst-3262	11	9	of	of	ADP
ajst-3262	11	10	high	high	ADJ
ajst-3262	11	11	explosiveness	explosiveness	NOUN
ajst-3262	11	12	,	,	PUNCT
ajst-3262	11	13	less	less	ADJ
ajst-3262	11	14	environmental	environmental	ADJ
ajst-3262	11	15	harm	harm	NOUN
ajst-3262	11	16	of	of	ADP
ajst-3262	11	17	explosive	explosive	ADJ
ajst-3262	11	18	products	product	NOUN
ajst-3262	11	19	and	and	CCONJ
ajst-3262	11	20	compatibility	compatibility	NOUN
ajst-3262	11	21	with	with	ADP
ajst-3262	11	22	all	all	DET
ajst-3262	11	23	silicon	silicon	NOUN
ajst-3262	11	24	based	base	VERB
ajst-3262	11	25	production	production	NOUN
ajst-3262	11	26	process	process	NOUN
ajst-3262	11	27	,	,	PUNCT
ajst-3262	11	28	which	which	PRON
ajst-3262	11	29	is	be	AUX
ajst-3262	11	30	widely	widely	ADV
ajst-3262	11	31	used	use	VERB
ajst-3262	11	32	in	in	ADP
ajst-3262	11	33	small	small	ADJ
ajst-3262	11	34	initiation	initiation	NOUN
ajst-3262	11	35	devices	device	NOUN
ajst-3262	12	1	[	[	X
ajst-3262	12	2	3	3	NUM
ajst-3262	12	3	]	]	PUNCT
ajst-3262	12	4	.	.	PUNCT
ajst-3262	13	1	in	in	ADP
ajst-3262	13	2	the	the	DET
ajst-3262	13	3	decades	decade	NOUN
ajst-3262	13	4	since	since	SCONJ
ajst-3262	13	5	the	the	DET
ajst-3262	13	6	discovery	discovery	NOUN
ajst-3262	13	7	of	of	ADP
ajst-3262	13	8	the	the	DET
ajst-3262	13	9	luminescent	luminescent	NOUN
ajst-3262	13	10	properties	property	NOUN
ajst-3262	13	11	of	of	ADP
ajst-3262	13	12	porous	porous	ADJ
ajst-3262	13	13	silicon	silicon	NOUN
ajst-3262	13	14	,	,	PUNCT
ajst-3262	13	15	researchers	researcher	NOUN
ajst-3262	13	16	have	have	AUX
ajst-3262	13	17	studied	study	VERB
ajst-3262	13	18	the	the	DET
ajst-3262	13	19	optical	optical	ADJ
ajst-3262	13	20	,	,	PUNCT
ajst-3262	13	21	electrical	electrical	ADJ
ajst-3262	13	22	,	,	PUNCT
ajst-3262	13	23	physical	physical	ADJ
ajst-3262	13	24	,	,	PUNCT
ajst-3262	13	25	chemical	chemical	NOUN
ajst-3262	13	26	and	and	CCONJ
ajst-3262	13	27	other	other	ADJ
ajst-3262	13	28	properties	property	NOUN
ajst-3262	13	29	of	of	ADP
ajst-3262	13	30	porous	porous	ADJ
ajst-3262	13	31	silicon	silicon	NOUN
ajst-3262	13	32	[	[	X
ajst-3262	13	33	4	4	NUM
ajst-3262	13	34	]	]	PUNCT
ajst-3262	13	35	.	.	PUNCT
ajst-3262	14	1	when	when	SCONJ
ajst-3262	14	2	the	the	DET
ajst-3262	14	3	newly	newly	ADV
ajst-3262	14	4	prepared	prepared	ADJ
ajst-3262	14	5	porous	porous	ADJ
ajst-3262	14	6	silicon	silicon	NOUN
ajst-3262	14	7	sample	sample	NOUN
ajst-3262	14	8	is	be	AUX
ajst-3262	14	9	placed	place	VERB
ajst-3262	14	10	in	in	ADP
ajst-3262	14	11	air	air	NOUN
ajst-3262	14	12	,	,	PUNCT
ajst-3262	14	13	its	its	PRON
ajst-3262	14	14	surface	surface	NOUN
ajst-3262	14	15	will	will	AUX
ajst-3262	14	16	react	react	VERB
ajst-3262	14	17	with	with	ADP
ajst-3262	14	18	oxygen	oxygen	NOUN
ajst-3262	14	19	,	,	PUNCT
ajst-3262	14	20	which	which	PRON
ajst-3262	14	21	will	will	AUX
ajst-3262	14	22	reduce	reduce	VERB
ajst-3262	14	23	the	the	DET
ajst-3262	14	24	reactivity	reactivity	NOUN
ajst-3262	14	25	of	of	ADP
ajst-3262	14	26	porous	porous	ADJ
ajst-3262	14	27	silicon	silicon	NOUN
ajst-3262	14	28	.	.	PUNCT
ajst-3262	15	1	with	with	ADP
ajst-3262	15	2	the	the	DET
ajst-3262	15	3	increase	increase	NOUN
ajst-3262	15	4	of	of	ADP
ajst-3262	15	5	time	time	NOUN
ajst-3262	15	6	,	,	PUNCT
ajst-3262	15	7	the	the	DET
ajst-3262	15	8	structure	structure	NOUN
ajst-3262	15	9	and	and	CCONJ
ajst-3262	15	10	some	some	DET
ajst-3262	15	11	characteristics	characteristic	NOUN
ajst-3262	15	12	of	of	ADP
ajst-3262	15	13	porous	porous	ADJ
ajst-3262	15	14	silicon	silicon	NOUN
ajst-3262	15	15	will	will	AUX
ajst-3262	15	16	also	also	ADV
ajst-3262	15	17	change	change	VERB
ajst-3262	15	18	,	,	PUNCT
ajst-3262	15	19	affecting	affect	VERB
ajst-3262	15	20	the	the	DET
ajst-3262	15	21	actual	actual	ADJ
ajst-3262	15	22	use	use	NOUN
ajst-3262	15	23	.	.	PUNCT
ajst-3262	16	1	the	the	DET
ajst-3262	16	2	research	research	NOUN
ajst-3262	16	3	results	result	NOUN
ajst-3262	16	4	show	show	VERB
ajst-3262	16	5	that	that	SCONJ
ajst-3262	16	6	the	the	DET
ajst-3262	16	7	fresh	fresh	ADJ
ajst-3262	16	8	porous	porous	ADJ
ajst-3262	16	9	silicon	silicon	NOUN
ajst-3262	16	10	surface	surface	NOUN
ajst-3262	16	11	contains	contain	VERB
ajst-3262	16	12	a	a	DET
ajst-3262	16	13	large	large	ADJ
ajst-3262	16	14	number	number	NOUN
ajst-3262	16	15	of	of	ADP
ajst-3262	16	16	si	si	PROPN
ajst-3262	16	17	hx	hx	PROPN
ajst-3262	16	18	(	(	PUNCT
ajst-3262	16	19	x=1,2,3	x=1,2,3	NUM
ajst-3262	16	20	)	)	PUNCT
ajst-3262	16	21	bonds	bond	NOUN
ajst-3262	16	22	[	[	X
ajst-3262	16	23	5	5	NUM
ajst-3262	16	24	]	]	PUNCT
ajst-3262	16	25	,	,	PUNCT
ajst-3262	16	26	which	which	PRON
ajst-3262	16	27	are	be	AUX
ajst-3262	16	28	very	very	ADV
ajst-3262	16	29	active	active	ADJ
ajst-3262	16	30	.	.	PUNCT
ajst-3262	17	1	when	when	SCONJ
ajst-3262	17	2	the	the	DET
ajst-3262	17	3	sample	sample	NOUN
ajst-3262	17	4	is	be	AUX
ajst-3262	17	5	stored	store	VERB
ajst-3262	17	6	in	in	ADP
ajst-3262	17	7	air	air	NOUN
ajst-3262	17	8	,	,	PUNCT
ajst-3262	17	9	the	the	DET
ajst-3262	17	10	oxygen	oxygen	NOUN
ajst-3262	17	11	in	in	ADP
ajst-3262	17	12	the	the	DET
ajst-3262	17	13	air	air	NOUN
ajst-3262	17	14	will	will	AUX
ajst-3262	17	15	destroy	destroy	VERB
ajst-3262	17	16	the	the	DET
ajst-3262	17	17	si	si	PROPN
ajst-3262	17	18	hx	hx	PROPN
ajst-3262	17	19	bond	bond	NOUN
ajst-3262	17	20	,	,	PUNCT
ajst-3262	17	21	and	and	CCONJ
ajst-3262	17	22	hydrogen	hydrogen	NOUN
ajst-3262	17	23	passivation	passivation	NOUN
ajst-3262	17	24	is	be	AUX
ajst-3262	17	25	gradually	gradually	ADV
ajst-3262	17	26	replaced	replace	VERB
ajst-3262	17	27	by	by	ADP
ajst-3262	17	28	oxygen	oxygen	NOUN
ajst-3262	17	29	passivation	passivation	NOUN
ajst-3262	17	30	,	,	PUNCT
ajst-3262	17	31	which	which	PRON
ajst-3262	17	32	eventually	eventually	ADV
ajst-3262	17	33	changes	change	VERB
ajst-3262	17	34	the	the	DET
ajst-3262	17	35	performance	performance	NOUN
ajst-3262	17	36	of	of	ADP
ajst-3262	17	37	porous	porous	ADJ
ajst-3262	17	38	silicon	silicon	NOUN
ajst-3262	17	39	.	.	PUNCT
ajst-3262	18	1	in	in	ADP
ajst-3262	18	2	addition	addition	NOUN
ajst-3262	18	3	,	,	PUNCT
ajst-3262	18	4	if	if	SCONJ
ajst-3262	18	5	the	the	DET
ajst-3262	18	6	prepared	prepared	ADJ
ajst-3262	18	7	porous	porous	ADJ
ajst-3262	18	8	silicon	silicon	NOUN
ajst-3262	18	9	is	be	AUX
ajst-3262	18	10	separated	separate	VERB
ajst-3262	18	11	from	from	ADP
ajst-3262	18	12	the	the	DET
ajst-3262	18	13	liquid	liquid	NOUN
ajst-3262	18	14	and	and	CCONJ
ajst-3262	18	15	dried	dry	VERB
ajst-3262	18	16	naturally	naturally	ADV
ajst-3262	18	17	in	in	ADP
ajst-3262	18	18	air	air	NOUN
ajst-3262	18	19	[	[	X
ajst-3262	18	20	6	6	NUM
ajst-3262	18	21	]	]	PUNCT
ajst-3262	18	22	,	,	PUNCT
ajst-3262	18	23	the	the	DET
ajst-3262	18	24	solution	solution	NOUN
ajst-3262	18	25	will	will	AUX
ajst-3262	18	26	volatilize	volatilize	VERB
ajst-3262	18	27	from	from	ADP
ajst-3262	18	28	the	the	DET
ajst-3262	18	29	pores	pore	NOUN
ajst-3262	18	30	during	during	ADP
ajst-3262	18	31	the	the	DET
ajst-3262	18	32	drying	dry	VERB
ajst-3262	18	33	process	process	NOUN
ajst-3262	18	34	,	,	PUNCT
ajst-3262	18	35	and	and	CCONJ
ajst-3262	18	36	the	the	DET
ajst-3262	18	37	porous	porous	ADJ
ajst-3262	18	38	silicon	silicon	NOUN
ajst-3262	18	39	will	will	AUX
ajst-3262	18	40	crack	crack	VERB
ajst-3262	18	41	,	,	PUNCT
ajst-3262	18	42	or	or	CCONJ
ajst-3262	18	43	curly	curly	ADJ
ajst-3262	18	44	capillaries	capillary	NOUN
ajst-3262	18	45	will	will	AUX
ajst-3262	18	46	fall	fall	VERB
ajst-3262	18	47	off	off	ADP
ajst-3262	18	48	from	from	ADP
ajst-3262	18	49	the	the	DET
ajst-3262	18	50	substrate	substrate	NOUN
ajst-3262	18	51	,	,	PUNCT
ajst-3262	18	52	damaging	damage	VERB
ajst-3262	18	53	the	the	DET
ajst-3262	18	54	original	original	ADJ
ajst-3262	18	55	morphology	morphology	NOUN
ajst-3262	18	56	of	of	ADP
ajst-3262	18	57	porous	porous	ADJ
ajst-3262	18	58	silicon	silicon	NOUN
ajst-3262	18	59	.	.	PUNCT
ajst-3262	19	1	this	this	DET
ajst-3262	19	2	process	process	NOUN
ajst-3262	19	3	only	only	ADV
ajst-3262	19	4	takes	take	VERB
ajst-3262	19	5	a	a	DET
ajst-3262	19	6	few	few	ADJ
ajst-3262	19	7	minutes	minute	NOUN
ajst-3262	19	8	[	[	X
ajst-3262	19	9	7	7	NUM
ajst-3262	19	10	]	]	PUNCT
ajst-3262	19	11	.	.	PUNCT
ajst-3262	20	1	if	if	SCONJ
ajst-3262	20	2	porous	porous	ADJ
ajst-3262	20	3	silicon	silicon	NOUN
ajst-3262	20	4	can	can	AUX
ajst-3262	20	5	not	not	PART
ajst-3262	20	6	be	be	AUX
ajst-3262	20	7	dried	dry	VERB
ajst-3262	20	8	and	and	CCONJ
ajst-3262	20	9	stored	store	VERB
ajst-3262	20	10	in	in	ADP
ajst-3262	20	11	the	the	DET
ajst-3262	20	12	air	air	NOUN
ajst-3262	20	13	and	and	CCONJ
ajst-3262	20	14	has	have	VERB
ajst-3262	20	15	a	a	DET
ajst-3262	20	16	flat	flat	ADJ
ajst-3262	20	17	and	and	CCONJ
ajst-3262	20	18	smooth	smooth	ADJ
ajst-3262	20	19	surface	surface	NOUN
ajst-3262	21	1	[	[	X
ajst-3262	21	2	8	8	NUM
ajst-3262	21	3	]	]	PUNCT
ajst-3262	21	4	,	,	PUNCT
ajst-3262	21	5	other	other	ADJ
ajst-3262	21	6	processes	process	NOUN
ajst-3262	21	7	can	can	AUX
ajst-3262	21	8	not	not	PART
ajst-3262	21	9	be	be	AUX
ajst-3262	21	10	carried	carry	VERB
ajst-3262	21	11	out	out	ADP
ajst-3262	21	12	on	on	ADP
ajst-3262	21	13	the	the	DET
ajst-3262	21	14	surface	surface	NOUN
ajst-3262	21	15	of	of	ADP
ajst-3262	21	16	porous	porous	ADJ
ajst-3262	21	17	silicon	silicon	NOUN
ajst-3262	21	18	,	,	PUNCT
ajst-3262	21	19	which	which	PRON
ajst-3262	21	20	seriously	seriously	ADV
ajst-3262	21	21	affects	affect	VERB
ajst-3262	21	22	the	the	DET
ajst-3262	21	23	explosive	explosive	ADJ
ajst-3262	21	24	performance	performance	NOUN
ajst-3262	21	25	of	of	ADP
ajst-3262	21	26	porous	porous	ADJ
ajst-3262	21	27	silicon	silicon	NOUN
ajst-3262	21	28	and	and	CCONJ
ajst-3262	21	29	greatly	greatly	ADV
ajst-3262	21	30	limits	limit	VERB
ajst-3262	21	31	the	the	DET
ajst-3262	21	32	application	application	NOUN
ajst-3262	21	33	of	of	ADP
ajst-3262	21	34	porous	porous	ADJ
ajst-3262	21	35	silicon	silicon	NOUN
ajst-3262	22	1	[	[	X
ajst-3262	22	2	9	9	NUM
ajst-3262	22	3	]	]	PUNCT
ajst-3262	22	4	.	.	PUNCT
ajst-3262	23	1	in	in	ADP
ajst-3262	23	2	order	order	NOUN
ajst-3262	23	3	to	to	PART
ajst-3262	23	4	prolong	prolong	VERB
ajst-3262	23	5	the	the	DET
ajst-3262	23	6	storage	storage	NOUN
ajst-3262	23	7	time	time	NOUN
ajst-3262	23	8	of	of	ADP
ajst-3262	23	9	porous	porous	ADJ
ajst-3262	23	10	silicon	silicon	NOUN
ajst-3262	23	11	,	,	PUNCT
ajst-3262	23	12	electric	electric	ADJ
ajst-3262	23	13	heater	heater	NOUN
ajst-3262	23	14	is	be	AUX
ajst-3262	23	15	used	use	VERB
ajst-3262	23	16	to	to	PART
ajst-3262	23	17	provide	provide	VERB
ajst-3262	23	18	heat	heat	NOUN
ajst-3262	23	19	source	source	NOUN
ajst-3262	23	20	by	by	ADP
ajst-3262	23	21	using	use	VERB
ajst-3262	23	22	cathodic	cathodic	NOUN
ajst-3262	23	23	reduction	reduction	NOUN
ajst-3262	23	24	surface	surface	NOUN
ajst-3262	23	25	treatment	treatment	NOUN
ajst-3262	23	26	technology	technology	NOUN
ajst-3262	23	27	,	,	PUNCT
ajst-3262	23	28	anodic	anodic	ADJ
ajst-3262	23	29	oxidation	oxidation	NOUN
ajst-3262	23	30	treatment	treatment	NOUN
ajst-3262	23	31	technology	technology	NOUN
ajst-3262	23	32	,	,	PUNCT
ajst-3262	23	33	silane	silane	NOUN
ajst-3262	23	34	coupling	couple	VERB
ajst-3262	23	35	agent	agent	NOUN
ajst-3262	23	36	kh550	kh550	PROPN
ajst-3262	23	37	,	,	PUNCT
ajst-3262	23	38	kh560	kh560	PROPN
ajst-3262	23	39	treatment	treatment	NOUN
ajst-3262	23	40	and	and	CCONJ
ajst-3262	23	41	other	other	ADJ
ajst-3262	23	42	methods	method	NOUN
ajst-3262	23	43	[	[	X
ajst-3262	23	44	10	10	NUM
ajst-3262	23	45	]	]	PUNCT
ajst-3262	23	46	to	to	PART
ajst-3262	23	47	evaluate	evaluate	VERB
ajst-3262	23	48	the	the	DET
ajst-3262	23	49	maintenance	maintenance	NOUN
ajst-3262	23	50	of	of	ADP
ajst-3262	23	51	the	the	DET
ajst-3262	23	52	explosive	explosive	ADJ
ajst-3262	23	53	performance	performance	NOUN
ajst-3262	23	54	of	of	ADP
ajst-3262	23	55	porous	porous	ADJ
ajst-3262	23	56	silicon	silicon	NOUN
ajst-3262	23	57	under	under	ADP
ajst-3262	23	58	different	different	ADJ
ajst-3262	23	59	treatment	treatment	NOUN
ajst-3262	23	60	methods	method	NOUN
ajst-3262	23	61	.	.	PUNCT
ajst-3262	24	1	2	2	X
ajst-3262	24	2	.	.	NUM
ajst-3262	24	3	reagents	reagent	NOUN
ajst-3262	24	4	and	and	CCONJ
ajst-3262	24	5	methods	method	NOUN
ajst-3262	24	6	monocrystalline	monocrystalline	ADJ
ajst-3262	24	7	silicon	silicon	NOUN
ajst-3262	24	8	wafer	wafer	NOUN
ajst-3262	24	9	is	be	AUX
ajst-3262	24	10	provided	provide	VERB
ajst-3262	24	11	by	by	ADP
ajst-3262	24	12	emei	emei	PROPN
ajst-3262	24	13	semiconductor	semiconductor	PROPN
ajst-3262	24	14	materials	materials	PROPN
ajst-3262	24	15	co.	co.	PROPN
ajst-3262	24	16	,	,	PUNCT
ajst-3262	24	17	ltd	ltd	PROPN
ajst-3262	24	18	.	.	PROPN
ajst-3262	24	19	of	of	ADP
ajst-3262	24	20	dongfang	dongfang	PROPN
ajst-3262	24	21	electric	electric	PROPN
ajst-3262	24	22	group	group	PROPN
ajst-3262	24	23	,	,	PUNCT
ajst-3262	24	24	which	which	PRON
ajst-3262	24	25	is	be	AUX
ajst-3262	24	26	n	n	PRON
ajst-3262	24	27	-	-	PUNCT
ajst-3262	24	28	type	type	NOUN
ajst-3262	24	29	p	p	NOUN
ajst-3262	24	30	-	-	PUNCT
ajst-3262	24	31	doped	dope	VERB
ajst-3262	24	32	monocrystalline	monocrystalline	ADJ
ajst-3262	24	33	silicon	silicon	NOUN
ajst-3262	24	34	wafer	wafer	NOUN
ajst-3262	24	35	with	with	ADP
ajst-3262	24	36	resistivity	resistivity	NOUN
ajst-3262	24	37	of	of	ADP
ajst-3262	24	38	2~4	2~4	NUM
ajst-3262	24	39	ω	ω	PROPN
ajst-3262	24	40	·	·	SYM
ajst-3262	24	41	cm	cm	PROPN
ajst-3262	24	42	,	,	PUNCT
ajst-3262	24	43	crystal	crystal	NOUN
ajst-3262	24	44	plane	plane	NOUN
ajst-3262	24	45	direction<100	direction<100	PROPN
ajst-3262	24	46	>	>	PUNCT
ajst-3262	24	47	,	,	PUNCT
ajst-3262	24	48	and	and	CCONJ
ajst-3262	24	49	thickness	thickness	NOUN
ajst-3262	24	50	of	of	ADP
ajst-3262	24	51	500~550	500~550	NUM
ajst-3262	24	52	μ	μ	PROPN
ajst-3262	24	53	m.	m.	NOUN
ajst-3262	24	54	cut	cut	NOUN
ajst-3262	24	55	to	to	ADP
ajst-3262	24	56	1.0	1.0	NUM
ajst-3262	24	57	cm	cm	NOUN
ajst-3262	24	58	×	×	NOUN
ajst-3262	24	59	1.0	1.0	NUM
ajst-3262	24	60	cm	cm	NOUN
ajst-3262	24	61	square	square	ADJ
ajst-3262	24	62	machining	machining	NOUN
ajst-3262	24	63	unit	unit	NOUN
ajst-3262	24	64	.	.	PUNCT
ajst-3262	25	1	during	during	ADP
ajst-3262	25	2	transportation	transportation	NOUN
ajst-3262	25	3	and	and	CCONJ
ajst-3262	25	4	storage	storage	NOUN
ajst-3262	25	5	,	,	PUNCT
ajst-3262	25	6	a	a	DET
ajst-3262	25	7	small	small	ADJ
ajst-3262	25	8	amount	amount	NOUN
ajst-3262	25	9	of	of	ADP
ajst-3262	25	10	silicon	silicon	NOUN
ajst-3262	25	11	oxide	oxide	NOUN
ajst-3262	25	12	layer	layer	NOUN
ajst-3262	25	13	(	(	PUNCT
ajst-3262	25	14	mainly	mainly	ADV
ajst-3262	25	15	composed	compose	VERB
ajst-3262	25	16	of	of	ADP
ajst-3262	25	17	sio2	sio2	PROPN
ajst-3262	25	18	)	)	PUNCT
ajst-3262	25	19	or	or	CCONJ
ajst-3262	25	20	dust	dust	NOUN
ajst-3262	25	21	will	will	AUX
ajst-3262	25	22	gradually	gradually	ADV
ajst-3262	25	23	form	form	VERB
ajst-3262	25	24	on	on	ADP
ajst-3262	25	25	the	the	DET
ajst-3262	25	26	surface	surface	NOUN
ajst-3262	25	27	of	of	ADP
ajst-3262	25	28	monocrystalline	monocrystalline	ADJ
ajst-3262	25	29	silicon	silicon	NOUN
ajst-3262	25	30	wafers	wafer	NOUN
ajst-3262	25	31	,	,	PUNCT
ajst-3262	25	32	as	as	ADV
ajst-3262	25	33	well	well	ADV
ajst-3262	25	34	as	as	ADP
ajst-3262	25	35	other	other	ADJ
ajst-3262	25	36	impurities	impurity	NOUN
ajst-3262	25	37	such	such	ADJ
ajst-3262	25	38	as	as	ADP
ajst-3262	25	39	grease	grease	NOUN
ajst-3262	25	40	.	.	PUNCT
ajst-3262	26	1	these	these	DET
ajst-3262	26	2	impurities	impurity	NOUN
ajst-3262	26	3	on	on	ADP
ajst-3262	26	4	the	the	DET
ajst-3262	26	5	silicon	silicon	NOUN
ajst-3262	26	6	surface	surface	NOUN
ajst-3262	26	7	will	will	AUX
ajst-3262	26	8	have	have	VERB
ajst-3262	26	9	a	a	DET
ajst-3262	26	10	certain	certain	ADJ
ajst-3262	26	11	impact	impact	NOUN
ajst-3262	26	12	on	on	ADP
ajst-3262	26	13	the	the	DET
ajst-3262	26	14	deposition	deposition	NOUN
ajst-3262	26	15	process	process	NOUN
ajst-3262	26	16	.	.	PUNCT
ajst-3262	27	1	therefore	therefore	ADV
ajst-3262	27	2	,	,	PUNCT
ajst-3262	27	3	monocrystalline	monocrystalline	ADJ
ajst-3262	27	4	silicon	silicon	NOUN
ajst-3262	27	5	wafers	wafer	NOUN
ajst-3262	27	6	need	need	VERB
ajst-3262	27	7	to	to	PART
ajst-3262	27	8	be	be	AUX
ajst-3262	27	9	pretreated	pretreate	VERB
ajst-3262	27	10	before	before	ADP
ajst-3262	27	11	chemical	chemical	NOUN
ajst-3262	27	12	reduction	reduction	NOUN
ajst-3262	27	13	deposition	deposition	NOUN
ajst-3262	27	14	.	.	PUNCT
ajst-3262	28	1	soak	soak	VERB
ajst-3262	28	2	them	they	PRON
ajst-3262	28	3	in	in	ADP
ajst-3262	28	4	acetone	acetone	NOUN
ajst-3262	28	5	and	and	CCONJ
ajst-3262	28	6	ethanol	ethanol	NOUN
ajst-3262	28	7	solution	solution	NOUN
ajst-3262	28	8	for	for	ADP
ajst-3262	28	9	five	five	NUM
ajst-3262	28	10	minutes	minute	NOUN
ajst-3262	28	11	respectively	respectively	ADV
ajst-3262	28	12	,	,	PUNCT
ajst-3262	28	13	take	take	VERB
ajst-3262	28	14	them	they	PRON
ajst-3262	28	15	out	out	ADP
ajst-3262	28	16	and	and	CCONJ
ajst-3262	28	17	soak	soak	VERB
ajst-3262	28	18	them	they	PRON
ajst-3262	28	19	in	in	ADP
ajst-3262	28	20	10	10	NUM
ajst-3262	28	21	%	%	NOUN
ajst-3262	28	22	hydrofluoric	hydrofluoric	ADJ
ajst-3262	28	23	acid	acid	NOUN
ajst-3262	28	24	for	for	ADP
ajst-3262	28	25	10	10	NUM
ajst-3262	28	26	minutes	minute	NOUN
ajst-3262	28	27	,	,	PUNCT
ajst-3262	28	28	and	and	CCONJ
ajst-3262	28	29	finally	finally	ADV
ajst-3262	28	30	soak	soak	VERB
ajst-3262	28	31	them	they	PRON
ajst-3262	28	32	in	in	ADP
ajst-3262	28	33	acid	acid	NOUN
ajst-3262	28	34	pickling	pickling	NOUN
ajst-3262	28	35	solution	solution	NOUN
ajst-3262	28	36	(	(	PUNCT
ajst-3262	28	37	hydrochloric	hydrochloric	ADJ
ajst-3262	28	38	acid	acid	NOUN
ajst-3262	28	39	,	,	PUNCT
ajst-3262	28	40	hydrogen	hydrogen	NOUN
ajst-3262	28	41	peroxide	peroxide	NOUN
ajst-3262	28	42	,	,	PUNCT
ajst-3262	28	43	deionized	deionize	VERB
ajst-3262	28	44	water	water	NOUN
ajst-3262	28	45	,	,	PUNCT
ajst-3262	28	46	volume	volume	NOUN
ajst-3262	28	47	ratio	ratio	NOUN
ajst-3262	28	48	1:1:5	1:1:5	NUM
ajst-3262	28	49	)	)	PUNCT
ajst-3262	28	50	,	,	PUNCT
ajst-3262	28	51	alkali	alkali	ADJ
ajst-3262	28	52	pickling	pickling	NOUN
ajst-3262	28	53	solution	solution	NOUN
ajst-3262	28	54	(	(	PUNCT
ajst-3262	28	55	salt	salt	NOUN
ajst-3262	28	56	ammonia	ammonia	NOUN
ajst-3262	28	57	water	water	NOUN
ajst-3262	28	58	,	,	PUNCT
ajst-3262	28	59	hydrogen	hydrogen	NOUN
ajst-3262	28	60	peroxide	peroxide	NOUN
ajst-3262	28	61	,	,	PUNCT
ajst-3262	28	62	deionized	deionize	VERB
ajst-3262	28	63	water	water	NOUN
ajst-3262	28	64	,	,	PUNCT
ajst-3262	28	65	volume	volume	NOUN
ajst-3262	28	66	ratio	ratio	NOUN
ajst-3262	28	67	1:1:5	1:1:5	NUM
ajst-3262	28	68	)	)	PUNCT
ajst-3262	28	69	at	at	ADP
ajst-3262	28	70	70	70	NUM
ajst-3262	28	71	℃	℃	PROPN
ajst-3262	28	72	for	for	ADP
ajst-3262	28	73	five	five	NUM
ajst-3262	28	74	minutes	minute	NOUN
ajst-3262	28	75	,	,	PUNCT
ajst-3262	28	76	and	and	CCONJ
ajst-3262	28	77	then	then	ADV
ajst-3262	28	78	wash	wash	VERB
ajst-3262	28	79	them	they	PRON
ajst-3262	28	80	dry	dry	ADJ
ajst-3262	28	81	for	for	ADP
ajst-3262	28	82	standby	standby	NOUN
ajst-3262	28	83	.	.	PUNCT
ajst-3262	29	1	after	after	ADP
ajst-3262	29	2	pretreatment	pretreatment	NOUN
ajst-3262	29	3	,	,	PUNCT
ajst-3262	29	4	silicon	silicon	NOUN
ajst-3262	29	5	wafer	wafer	NOUN
ajst-3262	29	6	is	be	AUX
ajst-3262	29	7	used	use	VERB
ajst-3262	29	8	as	as	ADP
ajst-3262	29	9	anode	anode	NOUN
ajst-3262	29	10	and	and	CCONJ
ajst-3262	29	11	platinum	platinum	NOUN
ajst-3262	29	12	wafer	wafer	NOUN
ajst-3262	29	13	as	as	ADP
ajst-3262	29	14	cathode	cathode	NOUN
ajst-3262	29	15	during	during	ADP
ajst-3262	29	16	electrochemical	electrochemical	ADJ
ajst-3262	29	17	anodizing	anodizing	NOUN
ajst-3262	29	18	.	.	PUNCT
ajst-3262	30	1	the	the	DET
ajst-3262	30	2	electrolyte	electrolyte	NOUN
ajst-3262	30	3	used	use	VERB
ajst-3262	30	4	is	be	AUX
ajst-3262	30	5	the	the	DET
ajst-3262	30	6	mixed	mixed	ADJ
ajst-3262	30	7	solution	solution	NOUN
ajst-3262	30	8	of	of	ADP
ajst-3262	30	9	hydrofluoric	hydrofluoric	ADJ
ajst-3262	30	10	acid	acid	NOUN
ajst-3262	30	11	and	and	CCONJ
ajst-3262	30	12	dmac	dmac	PROPN
ajst-3262	30	13	,	,	PUNCT
ajst-3262	30	14	the	the	DET
ajst-3262	30	15	volume	volume	NOUN
ajst-3262	30	16	ratio	ratio	NOUN
ajst-3262	30	17	is	be	AUX
ajst-3262	30	18	1:5	1:5	NUM
ajst-3262	30	19	,	,	PUNCT
ajst-3262	30	20	the	the	DET
ajst-3262	30	21	current	current	ADJ
ajst-3262	30	22	density	density	NOUN
ajst-3262	30	23	is	be	AUX
ajst-3262	30	24	50ma	50ma	ADJ
ajst-3262	30	25	/	/	SYM
ajst-3262	30	26	cm2	cm2	NOUN
ajst-3262	30	27	,	,	PUNCT
ajst-3262	30	28	and	and	CCONJ
ajst-3262	30	29	the	the	DET
ajst-3262	30	30	electrolysis	electrolysis	NOUN
ajst-3262	30	31	time	time	NOUN
ajst-3262	30	32	is	be	AUX
ajst-3262	30	33	35min	35min	ADJ
ajst-3262	30	34	.	.	PUNCT
ajst-3262	31	1	after	after	ADP
ajst-3262	31	2	the	the	DET
ajst-3262	31	3	preparation	preparation	NOUN
ajst-3262	31	4	,	,	PUNCT
ajst-3262	31	5	dry	dry	VERB
ajst-3262	31	6	it	it	PRON
ajst-3262	31	7	in	in	ADP
ajst-3262	31	8	a	a	DET
ajst-3262	31	9	vacuum	vacuum	NOUN
ajst-3262	31	10	drying	dry	VERB
ajst-3262	31	11	oven	oven	NOUN
ajst-3262	31	12	at	at	ADP
ajst-3262	31	13	60	60	NUM
ajst-3262	31	14	℃	℃	PROPN
ajst-3262	31	15	for	for	ADP
ajst-3262	31	16	5min	5min	NOUN
ajst-3262	31	17	.	.	PUNCT
ajst-3262	32	1	3	3	X
ajst-3262	32	2	.	.	X
ajst-3262	32	3	conclusion	conclusion	NOUN
ajst-3262	32	4	electrochemical	electrochemical	ADJ
ajst-3262	32	5	anodizing	anodizing	NOUN
ajst-3262	32	6	conditions	condition	NOUN
ajst-3262	32	7	for	for	ADP
ajst-3262	32	8	preparing	prepare	VERB
ajst-3262	32	9	porous	porous	ADJ
ajst-3262	32	10	silicon	silicon	NOUN
ajst-3262	32	11	:	:	PUNCT
ajst-3262	32	12	electrolysis	electrolysis	NOUN
ajst-3262	32	13	time	time	NOUN
ajst-3262	32	14	35	35	NUM
ajst-3262	32	15	min	min	NOUN
ajst-3262	32	16	,	,	PUNCT
ajst-3262	32	17	current	current	ADJ
ajst-3262	32	18	density	density	NOUN
ajst-3262	32	19	50	50	NUM
ajst-3262	32	20	ma	ma	PROPN
ajst-3262	32	21	/	/	SYM
ajst-3262	32	22	cm2	cm2	PROPN
ajst-3262	32	23	,	,	PUNCT
ajst-3262	32	24	electrolyte	electrolyte	ADJ
ajst-3262	32	25	hf	hf	NOUN
ajst-3262	32	26	:	:	PUNCT
ajst-3262	32	27	dmac=5:1	dmac=5:1	PROPN
ajst-3262	32	28	.	.	PUNCT
ajst-3262	33	1	two	two	NUM
ajst-3262	33	2	methods	method	NOUN
ajst-3262	33	3	,	,	PUNCT
ajst-3262	33	4	silane	silane	NOUN
ajst-3262	33	5	coupling	couple	VERB
ajst-3262	33	6	agent	agent	NOUN
ajst-3262	33	7	(	(	PUNCT
ajst-3262	33	8	kh550	kh550	PROPN
ajst-3262	33	9	and	and	CCONJ
ajst-3262	33	10	kh560	kh560	PROPN
ajst-3262	33	11	)	)	PUNCT
ajst-3262	33	12	and	and	CCONJ
ajst-3262	33	13	cathodic	cathodic	NOUN
ajst-3262	33	14	reduction	reduction	NOUN
ajst-3262	33	15	,	,	PUNCT
ajst-3262	33	16	were	be	AUX
ajst-3262	33	17	used	use	VERB
ajst-3262	33	18	to	to	PART
ajst-3262	33	19	stabilize	stabilize	VERB
ajst-3262	33	20	the	the	DET
ajst-3262	33	21	porous	porous	ADJ
ajst-3262	33	22	silicon	silicon	NOUN
ajst-3262	33	23	chips	chip	NOUN
ajst-3262	33	24	.	.	PUNCT
ajst-3262	34	1	after	after	ADP
ajst-3262	34	2	treatment	treatment	NOUN
ajst-3262	34	3	,	,	PUNCT
ajst-3262	34	4	the	the	DET
ajst-3262	34	5	porous	porous	ADJ
ajst-3262	34	6	silicon	silicon	NOUN
ajst-3262	34	7	chips	chip	NOUN
ajst-3262	34	8	were	be	AUX
ajst-3262	34	9	stored	store	VERB
ajst-3262	34	10	in	in	ADP
ajst-3262	34	11	vacuum	vacuum	NOUN
ajst-3262	34	12	.	.	PUNCT
ajst-3262	35	1	with	with	ADP
ajst-3262	35	2	natural	natural	ADJ
ajst-3262	35	3	conditions	condition	NOUN
ajst-3262	35	4	and	and	CCONJ
ajst-3262	35	5	vacuum	vacuum	NOUN
ajst-3262	35	6	storage	storage	NOUN
ajst-3262	35	7	as	as	ADP
ajst-3262	35	8	the	the	DET
ajst-3262	35	9	blank	blank	PROPN
ajst-3262	35	10	control	control	PROPN
ajst-3262	35	11	group	group	PROPN
ajst-3262	35	12	,	,	PUNCT
ajst-3262	35	13	the	the	DET
ajst-3262	35	14	explosion	explosion	NOUN
ajst-3262	35	15	characteristics	characteristic	NOUN
ajst-3262	35	16	of	of	ADP
ajst-3262	35	17	porous	porous	ADJ
ajst-3262	35	18	silicon	silicon	NOUN
ajst-3262	35	19	chips	chip	NOUN
ajst-3262	35	20	compounded	compound	VERB
ajst-3262	35	21	90	90	NUM
ajst-3262	35	22	with	with	ADP
ajst-3262	35	23	1.2mol	1.2mol	NUM
ajst-3262	35	24	/	/	SYM
ajst-3262	35	25	l	l	NOUN
ajst-3262	35	26	gadolinium	gadolinium	NOUN
ajst-3262	35	27	nitrate	nitrate	NOUN
ajst-3262	35	28	/	/	SYM
ajst-3262	35	29	ethanol	ethanol	NOUN
ajst-3262	35	30	solution	solution	NOUN
ajst-3262	35	31	under	under	ADP
ajst-3262	35	32	seven	seven	NUM
ajst-3262	35	33	conditions	condition	NOUN
ajst-3262	35	34	were	be	AUX
ajst-3262	35	35	tested	test	VERB
ajst-3262	35	36	.	.	PUNCT
ajst-3262	36	1	vertically	vertically	ADV
ajst-3262	36	2	,	,	PUNCT
ajst-3262	36	3	the	the	DET
ajst-3262	36	4	explosion	explosion	NOUN
ajst-3262	36	5	strength	strength	NOUN
ajst-3262	36	6	of	of	ADP
ajst-3262	36	7	porous	porous	ADJ
ajst-3262	36	8	silicon	silicon	NOUN
ajst-3262	36	9	energetic	energetic	ADJ
ajst-3262	36	10	materials	material	NOUN
ajst-3262	36	11	generally	generally	ADV
ajst-3262	36	12	decreases	decrease	VERB
ajst-3262	36	13	with	with	ADP
ajst-3262	36	14	the	the	DET
ajst-3262	36	15	increase	increase	NOUN
ajst-3262	36	16	of	of	ADP
ajst-3262	36	17	storage	storage	NOUN
ajst-3262	36	18	time	time	NOUN
ajst-3262	36	19	.	.	PUNCT
ajst-3262	37	1	this	this	PRON
ajst-3262	37	2	is	be	AUX
ajst-3262	37	3	because	because	SCONJ
ajst-3262	37	4	the	the	DET
ajst-3262	37	5	freshly	freshly	ADV
ajst-3262	37	6	prepared	prepared	ADJ
ajst-3262	37	7	porous	porous	ADJ
ajst-3262	37	8	silicon	silicon	NOUN
ajst-3262	37	9	is	be	AUX
ajst-3262	37	10	unstable	unstable	ADJ
ajst-3262	37	11	,	,	PUNCT
ajst-3262	37	12	and	and	CCONJ
ajst-3262	37	13	the	the	DET
ajst-3262	37	14	surface	surface	NOUN
ajst-3262	37	15	is	be	AUX
ajst-3262	37	16	covered	cover	VERB
ajst-3262	37	17	with	with	ADP
ajst-3262	37	18	a	a	DET
ajst-3262	37	19	large	large	ADJ
ajst-3262	37	20	number	number	NOUN
ajst-3262	37	21	of	of	ADP
ajst-3262	37	22	highly	highly	ADV
ajst-3262	37	23	active	active	ADJ
ajst-3262	37	24	si	si	NOUN
ajst-3262	37	25	-	-	NOUN
ajst-3262	37	26	hx	hx	NOUN
ajst-3262	37	27	.	.	PUNCT
ajst-3262	38	1	with	with	ADP
ajst-3262	38	2	the	the	DET
ajst-3262	38	3	increase	increase	NOUN
ajst-3262	38	4	of	of	ADP
ajst-3262	38	5	storage	storage	NOUN
ajst-3262	38	6	time	time	NOUN
ajst-3262	38	7	,	,	PUNCT
ajst-3262	38	8	the	the	DET
ajst-3262	38	9	oxidation	oxidation	NOUN
ajst-3262	38	10	of	of	ADP
ajst-3262	38	11	the	the	DET
ajst-3262	38	12	porous	porous	ADJ
ajst-3262	38	13	silicon	silicon	NOUN
ajst-3262	38	14	surface	surface	NOUN
ajst-3262	38	15	becomes	become	VERB
ajst-3262	38	16	more	more	ADV
ajst-3262	38	17	and	and	CCONJ
ajst-3262	38	18	more	more	ADV
ajst-3262	38	19	serious	serious	ADJ
ajst-3262	38	20	,	,	PUNCT
ajst-3262	38	21	and	and	CCONJ
ajst-3262	38	22	the	the	DET
ajst-3262	38	23	dehydrogenation	dehydrogenation	NOUN
ajst-3262	38	24	of	of	ADP
ajst-3262	38	25	si	si	PROPN
ajst-3262	38	26	-	-	PUNCT
ajst-3262	38	27	hx	hx	PROPN
ajst-3262	38	28	occurs	occur	VERB
ajst-3262	38	29	,	,	PUNCT
ajst-3262	38	30	so	so	SCONJ
ajst-3262	38	31	that	that	SCONJ
ajst-3262	38	32	si	si	PROPN
ajst-3262	38	33	-	-	PUNCT
ajst-3262	38	34	hx	hx	PROPN
ajst-3262	38	35	is	be	AUX
ajst-3262	38	36	replaced	replace	VERB
ajst-3262	38	37	by	by	ADP
ajst-3262	38	38	si	si	NOUN
ajst-3262	38	39	-	-	NOUN
ajst-3262	38	40	ox	ox	NOUN
ajst-3262	38	41	.	.	PUNCT
ajst-3262	39	1	the	the	DET
ajst-3262	39	2	energy	energy	NOUN
ajst-3262	39	3	intensity	intensity	NOUN
ajst-3262	39	4	of	of	ADP
ajst-3262	39	5	porous	porous	ADJ
ajst-3262	39	6	silicon	silicon	NOUN
ajst-3262	39	7	energetic	energetic	ADJ
ajst-3262	39	8	materials	material	NOUN
ajst-3262	39	9	is	be	AUX
ajst-3262	39	10	related	relate	VERB
ajst-3262	39	11	to	to	ADP
ajst-3262	39	12	the	the	DET
ajst-3262	39	13	number	number	NOUN
ajst-3262	39	14	of	of	ADP
ajst-3262	39	15	si	si	NOUN
ajst-3262	39	16	-	-	PUNCT
ajst-3262	39	17	hx	hx	NOUN
ajst-3262	39	18	.	.	PUNCT
ajst-3262	40	1	therefore	therefore	ADV
ajst-3262	40	2	,	,	PUNCT
ajst-3262	40	3	with	with	ADP
ajst-3262	40	4	the	the	DET
ajst-3262	40	5	decrease	decrease	NOUN
ajst-3262	40	6	of	of	ADP
ajst-3262	40	7	active	active	ADJ
ajst-3262	40	8	hydrogen	hydrogen	NOUN
ajst-3262	40	9	,	,	PUNCT
ajst-3262	40	10	the	the	DET
ajst-3262	40	11	trigger	trigger	NOUN
ajst-3262	40	12	energy	energy	NOUN
ajst-3262	40	13	required	require	VERB
ajst-3262	40	14	for	for	ADP
ajst-3262	40	15	the	the	DET
ajst-3262	40	16	reaction	reaction	NOUN
ajst-3262	40	17	of	of	ADP
ajst-3262	40	18	porous	porous	ADJ
ajst-3262	40	19	silicon	silicon	NOUN
ajst-3262	40	20	energetic	energetic	ADJ
ajst-3262	40	21	materials	material	NOUN
ajst-3262	40	22	increases	increase	NOUN
ajst-3262	40	23	.	.	PUNCT
ajst-3262	41	1	however	however	ADV
ajst-3262	41	2	,	,	PUNCT
ajst-3262	41	3	in	in	ADP
ajst-3262	41	4	order	order	NOUN
ajst-3262	41	5	to	to	PART
ajst-3262	41	6	ensure	ensure	VERB
ajst-3262	41	7	the	the	DET
ajst-3262	41	8	same	same	ADJ
ajst-3262	41	9	test	test	NOUN
ajst-3262	41	10	conditions	condition	NOUN
ajst-3262	41	11	,	,	PUNCT
ajst-3262	41	12	the	the	DET
ajst-3262	41	13	detonation	detonation	NOUN
ajst-3262	41	14	energy	energy	NOUN
ajst-3262	41	15	provided	provide	VERB
ajst-3262	41	16	each	each	DET
ajst-3262	41	17	time	time	NOUN
ajst-3262	41	18	is	be	AUX
ajst-3262	41	19	the	the	DET
ajst-3262	41	20	same	same	ADJ
ajst-3262	41	21	,	,	PUNCT
ajst-3262	41	22	which	which	PRON
ajst-3262	41	23	can	can	AUX
ajst-3262	41	24	not	not	PART
ajst-3262	41	25	meet	meet	VERB
ajst-3262	41	26	the	the	DET
ajst-3262	41	27	requirements	requirement	NOUN
ajst-3262	41	28	of	of	ADP
ajst-3262	41	29	the	the	DET
ajst-3262	41	30	detonation	detonation	NOUN
ajst-3262	41	31	energy	energy	NOUN
ajst-3262	41	32	of	of	ADP
ajst-3262	41	33	porous	porous	ADJ
ajst-3262	41	34	silicon	silicon	NOUN
ajst-3262	41	35	energetic	energetic	ADJ
ajst-3262	41	36	materials	material	NOUN
ajst-3262	41	37	with	with	ADP
ajst-3262	41	38	a	a	DET
ajst-3262	41	39	long	long	ADJ
ajst-3262	41	40	storage	storage	NOUN
ajst-3262	41	41	time	time	NOUN
ajst-3262	41	42	,	,	PUNCT
ajst-3262	41	43	leading	lead	VERB
ajst-3262	41	44	to	to	ADP
ajst-3262	41	45	poor	poor	ADJ
ajst-3262	41	46	explosion	explosion	NOUN
ajst-3262	41	47	test	test	NOUN
ajst-3262	41	48	effect	effect	NOUN
ajst-3262	41	49	.	.	PUNCT
ajst-3262	42	1	by	by	ADP
ajst-3262	42	2	comparing	compare	VERB
ajst-3262	42	3	the	the	DET
ajst-3262	42	4	explosion	explosion	NOUN
ajst-3262	42	5	performance	performance	NOUN
ajst-3262	42	6	of	of	ADP
ajst-3262	42	7	porous	porous	ADJ
ajst-3262	42	8	silicon	silicon	NOUN
ajst-3262	42	9	energetic	energetic	ADJ
ajst-3262	42	10	materials	material	NOUN
ajst-3262	42	11	under	under	ADP
ajst-3262	42	12	the	the	DET
ajst-3262	42	13	same	same	ADJ
ajst-3262	42	14	storage	storage	NOUN
ajst-3262	42	15	time	time	NOUN
ajst-3262	42	16	and	and	CCONJ
ajst-3262	42	17	different	different	ADJ
ajst-3262	42	18	stabilization	stabilization	NOUN
ajst-3262	42	19	conditions	condition	NOUN
ajst-3262	42	20	,	,	PUNCT
ajst-3262	42	21	the	the	DET
ajst-3262	42	22	porous	porous	ADJ
ajst-3262	42	23	silicon	silicon	NOUN
ajst-3262	42	24	energetic	energetic	ADJ
ajst-3262	42	25	materials	material	NOUN
ajst-3262	42	26	using	use	VERB
ajst-3262	42	27	cathodic	cathodic	NOUN
ajst-3262	42	28	reduction	reduction	NOUN
ajst-3262	42	29	treatment+kh560	treatment+kh560	NOUN
ajst-3262	42	30	still	still	ADV
ajst-3262	42	31	have	have	VERB
ajst-3262	42	32	good	good	ADJ
ajst-3262	42	33	explosion	explosion	NOUN
ajst-3262	42	34	characteristics	characteristic	NOUN
ajst-3262	42	35	after	after	ADP
ajst-3262	42	36	long	long	ADJ
ajst-3262	42	37	vacuum	vacuum	NOUN
ajst-3262	42	38	storage	storage	NOUN
ajst-3262	42	39	conditions	condition	NOUN
ajst-3262	42	40	and	and	CCONJ
ajst-3262	42	41	composite	composite	ADJ
ajst-3262	42	42	ignition	ignition	NOUN
ajst-3262	42	43	with	with	ADP
ajst-3262	42	44	gadolinium	gadolinium	NOUN
ajst-3262	42	45	nitrate	nitrate	NOUN
ajst-3262	42	46	.	.	PUNCT
ajst-3262	43	1	cathodic	cathodic	NOUN
ajst-3262	43	2	reduction	reduction	NOUN
ajst-3262	43	3	treatment	treatment	NOUN
ajst-3262	43	4	is	be	AUX
ajst-3262	43	5	to	to	PART
ajst-3262	43	6	move	move	VERB
ajst-3262	43	7	the	the	DET
ajst-3262	43	8	f	f	NOUN
ajst-3262	43	9	-	-	PUNCT
ajst-3262	43	10	eft	eft	PROPN
ajst-3262	43	11	in	in	ADP
ajst-3262	43	12	the	the	DET
ajst-3262	43	13	porous	porous	ADJ
ajst-3262	43	14	silicon	silicon	NOUN
ajst-3262	43	15	energetic	energetic	ADJ
ajst-3262	43	16	material	material	NOUN
ajst-3262	43	17	to	to	ADP
ajst-3262	43	18	the	the	DET
ajst-3262	43	19	anode	anode	NOUN
ajst-3262	43	20	under	under	ADP
ajst-3262	43	21	the	the	DET
ajst-3262	43	22	effect	effect	NOUN
ajst-3262	43	23	of	of	ADP
ajst-3262	43	24	electric	electric	ADJ
ajst-3262	43	25	field	field	NOUN
ajst-3262	43	26	during	during	ADP
ajst-3262	43	27	reverse	reverse	ADJ
ajst-3262	43	28	power	power	NOUN
ajst-3262	43	29	supply	supply	NOUN
ajst-3262	43	30	,	,	PUNCT
ajst-3262	43	31	while	while	SCONJ
ajst-3262	43	32	pulling	pull	VERB
ajst-3262	43	33	h+to	h+to	NOUN
ajst-3262	43	34	the	the	DET
ajst-3262	43	35	cathode	cathode	NOUN
ajst-3262	43	36	,	,	PUNCT
ajst-3262	43	37	promoting	promote	VERB
ajst-3262	43	38	the	the	DET
ajst-3262	43	39	combination	combination	NOUN
ajst-3262	43	40	of	of	ADP
ajst-3262	43	41	silicon	silicon	NOUN
ajst-3262	43	42	suspension	suspension	NOUN
ajst-3262	43	43	bond	bond	NOUN
ajst-3262	43	44	and	and	CCONJ
ajst-3262	43	45	h+to	h+to	NOUN
ajst-3262	43	46	form	form	NOUN
ajst-3262	43	47	a	a	DET
ajst-3262	43	48	more	more	ADV
ajst-3262	43	49	stable	stable	ADJ
ajst-3262	43	50	si	si	ADJ
ajst-3262	43	51	-	-	ADJ
ajst-3262	43	52	h	h	NOUN
ajst-3262	43	53	bond	bond	NOUN
ajst-3262	43	54	,	,	PUNCT
ajst-3262	43	55	weakening	weaken	VERB
ajst-3262	43	56	the	the	DET
ajst-3262	43	57	original	original	ADJ
ajst-3262	43	58	possible	possible	ADJ
ajst-3262	43	59	oxidation	oxidation	NOUN
ajst-3262	43	60	reaction	reaction	NOUN
ajst-3262	43	61	,	,	PUNCT
ajst-3262	43	62	reducing	reduce	VERB
ajst-3262	43	63	the	the	DET
ajst-3262	43	64	fleft	fleft	NOUN
ajst-3262	43	65	in	in	ADP
ajst-3262	43	66	the	the	DET
ajst-3262	43	67	porous	porous	ADJ
ajst-3262	43	68	silicon	silicon	NOUN
ajst-3262	43	69	energetic	energetic	ADJ
ajst-3262	43	70	material	material	NOUN
ajst-3262	43	71	,	,	PUNCT
ajst-3262	43	72	eliminating	eliminate	VERB
ajst-3262	43	73	the	the	DET
ajst-3262	43	74	corrosion	corrosion	NOUN
ajst-3262	43	75	of	of	ADP
ajst-3262	43	76	fluoride	fluoride	NOUN
ajst-3262	43	77	ions	ion	NOUN
ajst-3262	43	78	on	on	ADP
ajst-3262	43	79	silicon	silicon	NOUN
ajst-3262	43	80	,	,	PUNCT
ajst-3262	43	81	and	and	CCONJ
ajst-3262	43	82	ensuring	ensure	VERB
ajst-3262	43	83	the	the	DET
ajst-3262	43	84	morphology	morphology	NOUN
ajst-3262	43	85	of	of	ADP
ajst-3262	43	86	surface	surface	NOUN
ajst-3262	43	87	porous	porous	ADJ
ajst-3262	43	88	silicon	silicon	NOUN
ajst-3262	43	89	.	.	PUNCT
ajst-3262	44	1	the	the	DET
ajst-3262	44	2	bubbles	bubble	NOUN
ajst-3262	44	3	of	of	ADP
ajst-3262	44	4	porous	porous	ADJ
ajst-3262	44	5	silicon	silicon	NOUN
ajst-3262	44	6	energetic	energetic	ADJ
ajst-3262	44	7	material	material	NOUN
ajst-3262	44	8	soaked	soak	VERB
ajst-3262	44	9	in	in	ADP
ajst-3262	44	10	kh560	kh560	PROPN
ajst-3262	44	11	/	/	SYM
ajst-3262	44	12	ethanol	ethanol	NOUN
ajst-3262	44	13	appear	appear	VERB
ajst-3262	44	14	for	for	ADP
ajst-3262	44	15	a	a	DET
ajst-3262	44	16	short	short	ADJ
ajst-3262	44	17	time	time	NOUN
ajst-3262	44	18	and	and	CCONJ
ajst-3262	44	19	disappear	disappear	VERB
ajst-3262	44	20	after	after	ADP
ajst-3262	44	21	only	only	ADV
ajst-3262	44	22	a	a	DET
ajst-3262	44	23	few	few	ADJ
ajst-3262	44	24	minutes	minute	NOUN
ajst-3262	44	25	.	.	PUNCT
ajst-3262	45	1	the	the	DET
ajst-3262	45	2	color	color	NOUN
ajst-3262	45	3	of	of	ADP
ajst-3262	45	4	porous	porous	ADJ
ajst-3262	45	5	silicon	silicon	NOUN
ajst-3262	45	6	layer	layer	NOUN
ajst-3262	45	7	becomes	become	VERB
ajst-3262	45	8	light	light	ADJ
ajst-3262	45	9	,	,	PUNCT
ajst-3262	45	10	showing	show	VERB
ajst-3262	45	11	light	light	NOUN
ajst-3262	45	12	yellow	yellow	ADJ
ajst-3262	45	13	.	.	PUNCT
ajst-3262	46	1	figure	figure	NOUN
ajst-3262	46	2	1	1	NUM
ajst-3262	46	3	.	.	PUNCT
ajst-3262	46	4	a.	a.	PROPN
ajst-3262	46	5	kh560	kh560	PROPN
ajst-3262	46	6	;	;	PUNCT
ajst-3262	46	7	b.	b.	PROPN
ajst-3262	46	8	kh550	kh550	PROPN
ajst-3262	46	9	;	;	PUNCT
ajst-3262	46	10	c.	c.	PROPN
ajst-3262	46	11	suspended	suspend	VERB
ajst-3262	46	12	keys	key	NOUN
ajst-3262	46	13	on	on	ADP
ajst-3262	46	14	porous	porous	ADJ
ajst-3262	46	15	silicon	silicon	NOUN
ajst-3262	46	16	surface	surface	NOUN
ajst-3262	46	17	;	;	PUNCT
ajst-3262	46	18	d.	d.	PROPN
ajst-3262	46	19	eliminate	eliminate	VERB
ajst-3262	46	20	suspended	suspend	VERB
ajst-3262	46	21	bonds	bond	NOUN
ajst-3262	46	22	on	on	ADP
ajst-3262	46	23	porous	porous	ADJ
ajst-3262	46	24	silicon	silicon	NOUN
ajst-3262	46	25	surface	surface	NOUN
ajst-3262	46	26	the	the	DET
ajst-3262	46	27	storage	storage	NOUN
ajst-3262	46	28	life	life	NOUN
ajst-3262	46	29	of	of	ADP
ajst-3262	46	30	porous	porous	ADJ
ajst-3262	46	31	silicon	silicon	NOUN
ajst-3262	46	32	energetic	energetic	ADJ
ajst-3262	46	33	materials	material	NOUN
ajst-3262	46	34	can	can	AUX
ajst-3262	46	35	be	be	AUX
ajst-3262	46	36	prolonged	prolong	VERB
ajst-3262	46	37	by	by	ADP
ajst-3262	46	38	the	the	DET
ajst-3262	46	39	treatment	treatment	NOUN
ajst-3262	46	40	of	of	ADP
ajst-3262	46	41	porous	porous	ADJ
ajst-3262	46	42	silicon	silicon	NOUN
ajst-3262	46	43	energetic	energetic	ADJ
ajst-3262	46	44	materials	material	NOUN
ajst-3262	46	45	with	with	ADP
ajst-3262	46	46	silane	silane	NOUN
ajst-3262	46	47	coupling	couple	VERB
ajst-3262	46	48	agents	agent	NOUN
ajst-3262	46	49	,	,	PUNCT
ajst-3262	46	50	because	because	SCONJ
ajst-3262	46	51	the	the	DET
ajst-3262	46	52	oxygen	oxygen	NOUN
ajst-3262	46	53	containing	contain	VERB
ajst-3262	46	54	groups	group	NOUN
ajst-3262	46	55	in	in	ADP
ajst-3262	46	56	silane	silane	NOUN
ajst-3262	46	57	coupling	couple	VERB
ajst-3262	46	58	agents	agent	NOUN
ajst-3262	46	59	replace	replace	VERB
ajst-3262	46	60	the	the	DET
ajst-3262	46	61	hydrogen	hydrogen	NOUN
ajst-3262	46	62	atoms	atom	NOUN
ajst-3262	46	63	adsorbed	adsorb	VERB
ajst-3262	46	64	by	by	ADP
ajst-3262	46	65	silicon	silicon	NOUN
ajst-3262	46	66	atoms	atom	NOUN
ajst-3262	46	67	on	on	ADP
ajst-3262	46	68	the	the	DET
ajst-3262	46	69	freshly	freshly	ADV
ajst-3262	46	70	prepared	prepare	VERB
ajst-3262	46	71	porous	porous	ADJ
ajst-3262	46	72	silicon	silicon	NOUN
ajst-3262	46	73	energetic	energetic	ADJ
ajst-3262	46	74	materials	material	NOUN
ajst-3262	46	75	.	.	PUNCT
ajst-3262	47	1	the	the	DET
ajst-3262	47	2	silicon	silicon	NOUN
ajst-3262	47	3	atom	atom	NOUN
ajst-3262	47	4	in	in	ADP
ajst-3262	47	5	the	the	DET
ajst-3262	47	6	silane	silane	NOUN
ajst-3262	47	7	coupling	couple	VERB
ajst-3262	47	8	agent	agent	NOUN
ajst-3262	47	9	is	be	AUX
ajst-3262	47	10	combined	combine	VERB
ajst-3262	47	11	with	with	ADP
ajst-3262	47	12	the	the	DET
ajst-3262	47	13	unsaturated	unsaturated	ADJ
ajst-3262	47	14	silicon	silicon	NOUN
ajst-3262	47	15	atom	atom	NOUN
ajst-3262	47	16	on	on	ADP
ajst-3262	47	17	the	the	DET
ajst-3262	47	18	surface	surface	NOUN
ajst-3262	47	19	of	of	ADP
ajst-3262	47	20	the	the	DET
ajst-3262	47	21	porous	porous	ADJ
ajst-3262	47	22	silicon	silicon	NOUN
ajst-3262	47	23	energetic	energetic	ADJ
ajst-3262	47	24	material	material	NOUN
ajst-3262	47	25	to	to	PART
ajst-3262	47	26	eliminate	eliminate	VERB
ajst-3262	47	27	the	the	DET
ajst-3262	47	28	hanging	hang	VERB
ajst-3262	47	29	bond	bond	NOUN
ajst-3262	47	30	on	on	ADP
ajst-3262	47	31	the	the	DET
ajst-3262	47	32	surface	surface	NOUN
ajst-3262	47	33	of	of	ADP
ajst-3262	47	34	the	the	DET
ajst-3262	47	35	porous	porous	ADJ
ajst-3262	47	36	silicon	silicon	NOUN
ajst-3262	47	37	energetic	energetic	ADJ
ajst-3262	47	38	material	material	NOUN
ajst-3262	47	39	.	.	PUNCT
ajst-3262	48	1	at	at	ADP
ajst-3262	48	2	the	the	DET
ajst-3262	48	3	same	same	ADJ
ajst-3262	48	4	time	time	NOUN
ajst-3262	48	5	,	,	PUNCT
ajst-3262	48	6	a	a	DET
ajst-3262	48	7	new	new	ADJ
ajst-3262	48	8	alkyl	alkyl	ADJ
ajst-3262	48	9	protective	protective	ADJ
ajst-3262	48	10	layer	layer	NOUN
ajst-3262	48	11	with	with	ADP
ajst-3262	48	12	strength	strength	NOUN
ajst-3262	48	13	much	much	ADV
ajst-3262	48	14	higher	high	ADJ
ajst-3262	48	15	than	than	SCONJ
ajst-3262	48	16	the	the	DET
ajst-3262	48	17	hydrogen	hydrogen	NOUN
ajst-3262	48	18	atom	atom	NOUN
ajst-3262	48	19	layer	layer	NOUN
ajst-3262	48	20	adsorbed	adsorb	VERB
ajst-3262	48	21	on	on	ADP
ajst-3262	48	22	the	the	DET
ajst-3262	48	23	surface	surface	NOUN
ajst-3262	48	24	of	of	ADP
ajst-3262	48	25	the	the	DET
ajst-3262	48	26	porous	porous	ADJ
ajst-3262	48	27	silicon	silicon	NOUN
ajst-3262	48	28	energetic	energetic	ADJ
ajst-3262	48	29	material	material	NOUN
ajst-3262	48	30	is	be	AUX
ajst-3262	48	31	formed	form	VERB
ajst-3262	48	32	on	on	ADP
ajst-3262	48	33	the	the	DET
ajst-3262	48	34	surface	surface	NOUN
ajst-3262	48	35	of	of	ADP
ajst-3262	48	36	the	the	DET
ajst-3262	48	37	porous	porous	ADJ
ajst-3262	48	38	silicon	silicon	NOUN
ajst-3262	48	39	energetic	energetic	ADJ
ajst-3262	48	40	material	material	NOUN
ajst-3262	48	41	to	to	PART
ajst-3262	48	42	prevent	prevent	VERB
ajst-3262	48	43	oxygen	oxygen	NOUN
ajst-3262	48	44	and	and	CCONJ
ajst-3262	48	45	other	other	ADJ
ajst-3262	48	46	oxygen	oxygen	NOUN
ajst-3262	48	47	from	from	ADP
ajst-3262	48	48	oxidizing	oxidize	VERB
ajst-3262	48	49	the	the	DET
ajst-3262	48	50	porous	porous	ADJ
ajst-3262	48	51	silicon	silicon	NOUN
ajst-3262	48	52	energetic	energetic	ADJ
ajst-3262	48	53	material	material	NOUN
ajst-3262	48	54	during	during	ADP
ajst-3262	48	55	storage	storage	NOUN
ajst-3262	48	56	,	,	PUNCT
ajst-3262	48	57	so	so	SCONJ
ajst-3262	48	58	as	as	SCONJ
ajst-3262	48	59	to	to	PART
ajst-3262	48	60	stabilize	stabilize	VERB
ajst-3262	48	61	the	the	DET
ajst-3262	48	62	porous	porous	ADJ
ajst-3262	48	63	silicon	silicon	NOUN
ajst-3262	48	64	energetic	energetic	ADJ
ajst-3262	48	65	material	material	NOUN
ajst-3262	48	66	.	.	PUNCT
ajst-3262	49	1	at	at	ADP
ajst-3262	49	2	the	the	DET
ajst-3262	49	3	same	same	ADJ
ajst-3262	49	4	time	time	NOUN
ajst-3262	49	5	,	,	PUNCT
ajst-3262	49	6	because	because	SCONJ
ajst-3262	49	7	the	the	DET
ajst-3262	49	8	alkyl	alkyl	PROPN
ajst-3262	49	9	group	group	NOUN
ajst-3262	49	10	forms	form	VERB
ajst-3262	49	11	the	the	DET
ajst-3262	49	12	protective	protective	ADJ
ajst-3262	49	13	layer	layer	NOUN
ajst-3262	49	14	on	on	ADP
ajst-3262	49	15	the	the	DET
ajst-3262	49	16	surface	surface	NOUN
ajst-3262	49	17	of	of	ADP
ajst-3262	49	18	the	the	DET
ajst-3262	49	19	porous	porous	ADJ
ajst-3262	49	20	silicon	silicon	NOUN
ajst-3262	49	21	energetic	energetic	ADJ
ajst-3262	49	22	material	material	NOUN
ajst-3262	49	23	,	,	PUNCT
ajst-3262	49	24	it	it	PRON
ajst-3262	49	25	is	be	AUX
ajst-3262	49	26	completely	completely	ADV
ajst-3262	49	27	different	different	ADJ
ajst-3262	49	28	from	from	ADP
ajst-3262	49	29	the	the	DET
ajst-3262	49	30	silicon	silicon	NOUN
ajst-3262	49	31	oxide	oxide	NOUN
ajst-3262	49	32	on	on	ADP
ajst-3262	49	33	the	the	DET
ajst-3262	49	34	surface	surface	NOUN
ajst-3262	49	35	of	of	ADP
ajst-3262	49	36	the	the	DET
ajst-3262	49	37	porous	porous	ADJ
ajst-3262	49	38	silicon	silicon	NOUN
ajst-3262	49	39	energetic	energetic	ADJ
ajst-3262	49	40	material	material	NOUN
ajst-3262	49	41	.	.	PUNCT
ajst-3262	50	1	the	the	DET
ajst-3262	50	2	alkyl	alkyl	PROPN
ajst-3262	50	3	group	group	NOUN
ajst-3262	50	4	protective	protective	ADJ
ajst-3262	50	5	layer	layer	NOUN
ajst-3262	50	6	will	will	AUX
ajst-3262	50	7	not	not	PART
ajst-3262	50	8	affect	affect	VERB
ajst-3262	50	9	the	the	DET
ajst-3262	50	10	reactivity	reactivity	NOUN
ajst-3262	50	11	of	of	ADP
ajst-3262	50	12	the	the	DET
ajst-3262	50	13	porous	porous	ADJ
ajst-3262	50	14	silicon	silicon	NOUN
ajst-3262	50	15	energetic	energetic	ADJ
ajst-3262	50	16	material	material	NOUN
ajst-3262	50	17	.	.	PUNCT
ajst-3262	51	1	from	from	ADP
ajst-3262	51	2	the	the	DET
ajst-3262	51	3	perspective	perspective	NOUN
ajst-3262	51	4	of	of	ADP
ajst-3262	51	5	explosion	explosion	NOUN
ajst-3262	51	6	performance	performance	NOUN
ajst-3262	51	7	,	,	PUNCT
ajst-3262	51	8	silane	silane	NOUN
ajst-3262	51	9	coupling	couple	VERB
ajst-3262	51	10	agent	agent	NOUN
ajst-3262	51	11	kh560	kh560	PROPN
ajst-3262	51	12	is	be	AUX
ajst-3262	51	13	better	well	ADJ
ajst-3262	51	14	than	than	ADP
ajst-3262	51	15	silane	silane	NOUN
ajst-3262	51	16	coupling	couple	VERB
ajst-3262	51	17	agent	agent	NOUN
ajst-3262	51	18	kh550	kh550	PROPN
ajst-3262	51	19	.	.	PUNCT
ajst-3262	52	1	the	the	DET
ajst-3262	52	2	reason	reason	NOUN
ajst-3262	52	3	may	may	AUX
ajst-3262	52	4	be	be	AUX
ajst-3262	52	5	that	that	SCONJ
ajst-3262	52	6	the	the	DET
ajst-3262	52	7	porous	porous	ADJ
ajst-3262	52	8	silicon	silicon	NOUN
ajst-3262	52	9	is	be	AUX
ajst-3262	52	10	prepared	prepare	VERB
ajst-3262	52	11	by	by	ADP
ajst-3262	52	12	oxidation	oxidation	NOUN
ajst-3262	52	13	in	in	ADP
ajst-3262	52	14	the	the	DET
ajst-3262	52	15	electrolyte	electrolyte	NOUN
ajst-3262	52	16	mainly	mainly	ADV
ajst-3262	52	17	composed	compose	VERB
ajst-3262	52	18	of	of	ADP
ajst-3262	52	19	hydrofluoric	hydrofluoric	ADJ
ajst-3262	52	20	acid	acid	NOUN
ajst-3262	52	21	.	.	PUNCT
ajst-3262	53	1	although	although	SCONJ
ajst-3262	53	2	the	the	DET
ajst-3262	53	3	porous	porous	ADJ
ajst-3262	53	4	silicon	silicon	NOUN
ajst-3262	53	5	layer	layer	NOUN
ajst-3262	53	6	is	be	AUX
ajst-3262	53	7	cleaned	clean	VERB
ajst-3262	53	8	after	after	ADP
ajst-3262	53	9	electrolysis	electrolysis	NOUN
ajst-3262	53	10	,	,	PUNCT
ajst-3262	53	11	it	it	PRON
ajst-3262	53	12	is	be	AUX
ajst-3262	53	13	still	still	ADV
ajst-3262	53	14	acidic	acidic	ADJ
ajst-3262	53	15	in	in	ADP
ajst-3262	53	16	fact	fact	NOUN
ajst-3262	53	17	.	.	PUNCT
ajst-3262	54	1	kh550	kh550	PROPN
ajst-3262	54	2	is	be	AUX
ajst-3262	54	3	an	an	DET
ajst-3262	54	4	alkaline	alkaline	NOUN
ajst-3262	54	5	solution	solution	NOUN
ajst-3262	54	6	.	.	PUNCT
ajst-3262	55	1	neutralization	neutralization	NOUN
ajst-3262	55	2	reaction	reaction	NOUN
ajst-3262	55	3	occurs	occur	VERB
ajst-3262	55	4	during	during	ADP
ajst-3262	55	5	the	the	DET
ajst-3262	55	6	treatment	treatment	NOUN
ajst-3262	55	7	of	of	ADP
ajst-3262	55	8	the	the	DET
ajst-3262	55	9	porous	porous	ADJ
ajst-3262	55	10	silicon	silicon	NOUN
ajst-3262	55	11	layer	layer	NOUN
ajst-3262	55	12	,	,	PUNCT
ajst-3262	55	13	which	which	PRON
ajst-3262	55	14	will	will	AUX
ajst-3262	55	15	reduce	reduce	VERB
ajst-3262	55	16	a	a	DET
ajst-3262	55	17	certain	certain	ADJ
ajst-3262	55	18	amount	amount	NOUN
ajst-3262	55	19	of	of	ADP
ajst-3262	55	20	si	si	ADJ
ajst-3262	55	21	-	-	ADJ
ajst-3262	55	22	h	h	NOUN
ajst-3262	55	23	bonds	bond	NOUN
ajst-3262	55	24	,	,	PUNCT
ajst-3262	55	25	thus	thus	ADV
ajst-3262	55	26	affecting	affect	VERB
ajst-3262	55	27	the	the	DET
ajst-3262	55	28	storage	storage	NOUN
ajst-3262	55	29	performance	performance	NOUN
ajst-3262	55	30	,	,	PUNCT
ajst-3262	55	31	then	then	ADV
ajst-3262	55	32	the	the	DET
ajst-3262	55	33	explosion	explosion	NOUN
ajst-3262	55	34	effect	effect	NOUN
ajst-3262	55	35	is	be	AUX
ajst-3262	55	36	reduced	reduce	VERB
ajst-3262	55	37	;	;	PUNCT
ajst-3262	55	38	although	although	SCONJ
ajst-3262	55	39	silane	silane	NOUN
ajst-3262	55	40	coupling	couple	VERB
ajst-3262	55	41	agent	agent	NOUN
ajst-3262	55	42	kh560	kh560	PROPN
ajst-3262	55	43	is	be	AUX
ajst-3262	55	44	also	also	ADV
ajst-3262	55	45	weakly	weakly	ADV
ajst-3262	55	46	acidic	acidic	ADJ
ajst-3262	55	47	,	,	PUNCT
ajst-3262	55	48	kh560	kh560	PROPN
ajst-3262	55	49	is	be	AUX
ajst-3262	55	50	soluble	soluble	ADJ
ajst-3262	55	51	in	in	ADP
ajst-3262	55	52	water	water	NOUN
ajst-3262	55	53	,	,	PUNCT
ajst-3262	55	54	and	and	CCONJ
ajst-3262	55	55	hydrolysis	hydrolysis	NOUN
ajst-3262	55	56	reaction	reaction	NOUN
ajst-3262	55	57	occurs	occur	VERB
ajst-3262	55	58	at	at	ADP
ajst-3262	55	59	the	the	DET
ajst-3262	55	60	same	same	ADJ
ajst-3262	55	61	time	time	NOUN
ajst-3262	55	62	.	.	PUNCT
ajst-3262	56	1	the	the	DET
ajst-3262	56	2	hydrolysis	hydrolysis	NOUN
ajst-3262	56	3	reaction	reaction	NOUN
ajst-3262	56	4	releases	release	VERB
ajst-3262	56	5	methanol	methanol	NOUN
ajst-3262	56	6	,	,	PUNCT
ajst-3262	56	7	which	which	PRON
ajst-3262	56	8	can	can	AUX
ajst-3262	56	9	squeeze	squeeze	VERB
ajst-3262	56	10	the	the	DET
ajst-3262	56	11	ethanol	ethanol	NOUN
ajst-3262	56	12	that	that	PRON
ajst-3262	56	13	can	can	AUX
ajst-3262	56	14	not	not	PART
ajst-3262	56	15	be	be	AUX
ajst-3262	56	16	cleaned	clean	VERB
ajst-3262	56	17	from	from	ADP
ajst-3262	56	18	the	the	DET
ajst-3262	56	19	pores	pore	NOUN
ajst-3262	56	20	during	during	ADP
ajst-3262	56	21	the	the	DET
ajst-3262	56	22	electrolytic	electrolytic	ADJ
ajst-3262	56	23	preparation	preparation	NOUN
ajst-3262	56	24	of	of	ADP
ajst-3262	56	25	porous	porous	ADJ
ajst-3262	56	26	silicon	silicon	NOUN
ajst-3262	56	27	,	,	PUNCT
ajst-3262	56	28	thus	thus	ADV
ajst-3262	56	29	generating	generate	VERB
ajst-3262	56	30	more	more	ADJ
ajst-3262	56	31	si	si	ADJ
ajst-3262	56	32	-	-	ADJ
ajst-3262	56	33	h	h	ADJ
ajst-3262	56	34	bonds	bond	NOUN
ajst-3262	56	35	.	.	PUNCT
ajst-3262	57	1	the	the	DET
ajst-3262	57	2	si	si	PROPN
ajst-3262	57	3	-	-	ADJ
ajst-3262	57	4	h	h	ADJ
ajst-3262	57	5	bonds	bond	NOUN
ajst-3262	57	6	are	be	AUX
ajst-3262	57	7	replaced	replace	VERB
ajst-3262	57	8	by	by	ADP
ajst-3262	57	9	more	more	ADV
ajst-3262	57	10	stable	stable	ADJ
ajst-3262	57	11	functional	functional	ADJ
ajst-3262	57	12	groups	group	NOUN
ajst-3262	57	13	on	on	ADP
ajst-3262	57	14	the	the	DET
ajst-3262	57	15	silane	silane	NOUN
ajst-3262	57	16	coupling	couple	VERB
ajst-3262	57	17	agent	agent	NOUN
ajst-3262	57	18	,	,	PUNCT
ajst-3262	57	19	forming	form	VERB
ajst-3262	57	20	an	an	DET
ajst-3262	57	21	alkyl	alkyl	ADJ
ajst-3262	57	22	protective	protective	ADJ
ajst-3262	57	23	layer	layer	NOUN
ajst-3262	57	24	,	,	PUNCT
ajst-3262	57	25	which	which	PRON
ajst-3262	57	26	has	have	VERB
ajst-3262	57	27	a	a	DET
ajst-3262	57	28	stronger	strong	ADJ
ajst-3262	57	29	protective	protective	ADJ
ajst-3262	57	30	effect	effect	NOUN
ajst-3262	57	31	on	on	ADP
ajst-3262	57	32	the	the	DET
ajst-3262	57	33	porous	porous	ADJ
ajst-3262	57	34	silicon	silicon	NOUN
ajst-3262	57	35	layer	layer	NOUN
ajst-3262	57	36	,	,	PUNCT
ajst-3262	57	37	and	and	CCONJ
ajst-3262	57	38	the	the	DET
ajst-3262	57	39	explosive	explosive	ADJ
ajst-3262	57	40	performance	performance	NOUN
ajst-3262	57	41	is	be	AUX
ajst-3262	57	42	greatly	greatly	ADV
ajst-3262	57	43	stabilized	stabilize	VERB
ajst-3262	57	44	.	.	PUNCT
ajst-3262	58	1	figure	figure	NOUN
ajst-3262	58	2	2	2	NUM
ajst-3262	58	3	.	.	PUNCT
ajst-3262	58	4	sem	sem	NOUN
ajst-3262	58	5	of	of	ADP
ajst-3262	58	6	the	the	DET
ajst-3262	58	7	surface	surface	NOUN
ajst-3262	58	8	of	of	ADP
ajst-3262	58	9	porous	porous	ADJ
ajst-3262	58	10	silicon	silicon	NOUN
ajst-3262	58	11	a.	a.	NOUN
ajst-3262	58	12	natural	natural	PROPN
ajst-3262	58	13	;	;	PUNCT
ajst-3262	58	14	b.	b.	PROPN
ajst-3262	58	15	vacuum	vacuum	PROPN
ajst-3262	58	16	;	;	PUNCT
ajst-3262	59	1	c.kh560	c.kh560	PROPN
ajst-3262	59	2	;	;	PUNCT
ajst-3262	59	3	d.	d.	PROPN
ajst-3262	59	4	cathodic	cathodic	PROPN
ajst-3262	59	5	reduction+kh560	reduction+kh560	PROPN
ajst-3262	59	6	;	;	PUNCT
ajst-3262	59	7	e.	e.	PROPN
ajst-3262	59	8	kh550	kh550	PROPN
ajst-3262	59	9	;	;	PUNCT
ajst-3262	59	10	f.	f.	PROPN
ajst-3262	59	11	cathodic	cathodic	PROPN
ajst-3262	59	12	reduction+kh550	reduction+kh550	PROPN
ajst-3262	59	13	;	;	PUNCT
ajst-3262	59	14	g.	g.	PROPN
ajst-3262	59	15	cathodic	cathodic	NOUN
ajst-3262	59	16	reduction	reduction	NOUN
ajst-3262	59	17	the	the	DET
ajst-3262	59	18	scanning	scan	VERB
ajst-3262	59	19	electron	electron	NOUN
ajst-3262	59	20	microscope	microscope	NOUN
ajst-3262	59	21	characterization	characterization	NOUN
ajst-3262	59	22	results	result	NOUN
ajst-3262	59	23	of	of	ADP
ajst-3262	59	24	porous	porous	ADJ
ajst-3262	59	25	silicon	silicon	NOUN
ajst-3262	59	26	morphology	morphology	NOUN
ajst-3262	59	27	under	under	ADP
ajst-3262	59	28	different	different	ADJ
ajst-3262	59	29	stabilization	stabilization	NOUN
ajst-3262	59	30	conditions	condition	NOUN
ajst-3262	59	31	under	under	ADP
ajst-3262	59	32	the	the	DET
ajst-3262	59	33	same	same	ADJ
ajst-3262	59	34	storage	storage	NOUN
ajst-3262	59	35	time	time	NOUN
ajst-3262	59	36	are	be	AUX
ajst-3262	59	37	as	as	SCONJ
ajst-3262	59	38	shown	show	VERB
ajst-3262	59	39	in	in	ADP
ajst-3262	59	40	fig	fig	NOUN
ajst-3262	59	41	.	.	PUNCT
ajst-3262	60	1	91	91	NUM
ajst-3262	60	2	3.2	3.2	NUM
ajst-3262	60	3	.	.	PUNCT
ajst-3262	61	1	it	it	PRON
ajst-3262	61	2	can	can	AUX
ajst-3262	61	3	be	be	AUX
ajst-3262	61	4	seen	see	VERB
ajst-3262	61	5	that	that	SCONJ
ajst-3262	61	6	the	the	DET
ajst-3262	61	7	porous	porous	ADJ
ajst-3262	61	8	silicon	silicon	NOUN
ajst-3262	61	9	layer	layer	NOUN
ajst-3262	61	10	under	under	ADP
ajst-3262	61	11	natural	natural	ADJ
ajst-3262	61	12	conditions	condition	NOUN
ajst-3262	61	13	and	and	CCONJ
ajst-3262	61	14	vacuum	vacuum	NOUN
ajst-3262	61	15	conditions	condition	NOUN
ajst-3262	61	16	is	be	AUX
ajst-3262	61	17	seriously	seriously	ADV
ajst-3262	61	18	cracked	crack	VERB
ajst-3262	61	19	,	,	PUNCT
ajst-3262	61	20	and	and	CCONJ
ajst-3262	61	21	the	the	DET
ajst-3262	61	22	pore	pore	ADJ
ajst-3262	61	23	structure	structure	NOUN
ajst-3262	61	24	is	be	AUX
ajst-3262	61	25	difficult	difficult	ADJ
ajst-3262	61	26	to	to	PART
ajst-3262	61	27	observe	observe	VERB
ajst-3262	61	28	,	,	PUNCT
ajst-3262	61	29	resulting	result	VERB
ajst-3262	61	30	in	in	ADP
ajst-3262	61	31	poor	poor	ADJ
ajst-3262	61	32	composite	composite	ADJ
ajst-3262	61	33	effect	effect	NOUN
ajst-3262	61	34	with	with	ADP
ajst-3262	61	35	oxidants	oxidant	NOUN
ajst-3262	61	36	and	and	CCONJ
ajst-3262	61	37	poor	poor	ADJ
ajst-3262	61	38	explosion	explosion	NOUN
ajst-3262	61	39	effect	effect	NOUN
ajst-3262	61	40	;	;	PUNCT
ajst-3262	61	41	the	the	DET
ajst-3262	61	42	porous	porous	ADJ
ajst-3262	61	43	silicon	silicon	NOUN
ajst-3262	61	44	layer	layer	NOUN
ajst-3262	61	45	treated	treat	VERB
ajst-3262	61	46	with	with	ADP
ajst-3262	61	47	silane	silane	NOUN
ajst-3262	61	48	coupling	couple	VERB
ajst-3262	61	49	agent	agent	NOUN
ajst-3262	61	50	kh550	kh550	PROPN
ajst-3262	61	51	can	can	AUX
ajst-3262	61	52	prevent	prevent	VERB
ajst-3262	61	53	cracking	cracking	NOUN
ajst-3262	61	54	,	,	PUNCT
ajst-3262	61	55	but	but	CCONJ
ajst-3262	61	56	the	the	DET
ajst-3262	61	57	holes	hole	NOUN
ajst-3262	61	58	are	be	AUX
ajst-3262	61	59	small	small	ADJ
ajst-3262	61	60	and	and	CCONJ
ajst-3262	61	61	uneven	uneven	ADJ
ajst-3262	61	62	;	;	PUNCT
ajst-3262	61	63	the	the	DET
ajst-3262	61	64	morphology	morphology	NOUN
ajst-3262	61	65	of	of	ADP
ajst-3262	61	66	porous	porous	ADJ
ajst-3262	61	67	silicon	silicon	NOUN
ajst-3262	61	68	layer	layer	NOUN
ajst-3262	61	69	treated	treat	VERB
ajst-3262	61	70	with	with	ADP
ajst-3262	61	71	silane	silane	NOUN
ajst-3262	61	72	coupling	couple	VERB
ajst-3262	61	73	agent	agent	NOUN
ajst-3262	61	74	kh560	kh560	PROPN
ajst-3262	61	75	is	be	AUX
ajst-3262	61	76	well	well	ADV
ajst-3262	61	77	preserved	preserve	VERB
ajst-3262	61	78	.	.	PUNCT
ajst-3262	62	1	there	there	PRON
ajst-3262	62	2	are	be	VERB
ajst-3262	62	3	few	few	ADJ
ajst-3262	62	4	cracked	crack	VERB
ajst-3262	62	5	areas	area	NOUN
ajst-3262	62	6	,	,	PUNCT
ajst-3262	62	7	which	which	PRON
ajst-3262	62	8	are	be	AUX
ajst-3262	62	9	spongy	spongy	ADJ
ajst-3262	62	10	.	.	PUNCT
ajst-3262	63	1	there	there	PRON
ajst-3262	63	2	are	be	VERB
ajst-3262	63	3	many	many	ADJ
ajst-3262	63	4	holes	hole	NOUN
ajst-3262	63	5	with	with	ADP
ajst-3262	63	6	uniform	uniform	ADJ
ajst-3262	63	7	distribution	distribution	NOUN
ajst-3262	63	8	.	.	PUNCT
ajst-3262	64	1	the	the	DET
ajst-3262	64	2	dense	dense	ADJ
ajst-3262	64	3	holes	hole	NOUN
ajst-3262	64	4	absorb	absorb	VERB
ajst-3262	64	5	more	more	ADJ
ajst-3262	64	6	oxidants	oxidant	NOUN
ajst-3262	64	7	,	,	PUNCT
ajst-3262	64	8	ensuring	ensure	VERB
ajst-3262	64	9	good	good	ADJ
ajst-3262	64	10	explosion	explosion	NOUN
ajst-3262	64	11	performance	performance	NOUN
ajst-3262	64	12	after	after	ADP
ajst-3262	64	13	treatment	treatment	NOUN
ajst-3262	64	14	with	with	ADP
ajst-3262	64	15	kh560	kh560	PROPN
ajst-3262	64	16	.	.	PUNCT
ajst-3262	65	1	to	to	PART
ajst-3262	65	2	sum	sum	VERB
ajst-3262	65	3	up	up	ADP
ajst-3262	65	4	,	,	PUNCT
ajst-3262	65	5	porous	porous	ADJ
ajst-3262	65	6	silicon	silicon	NOUN
ajst-3262	65	7	energetic	energetic	ADJ
ajst-3262	65	8	materials	material	NOUN
ajst-3262	65	9	treated	treat	VERB
ajst-3262	65	10	with	with	ADP
ajst-3262	65	11	silane	silane	NOUN
ajst-3262	65	12	coupling	couple	VERB
ajst-3262	65	13	agent	agent	NOUN
ajst-3262	65	14	kh560	kh560	PROPN
ajst-3262	65	15	still	still	ADV
ajst-3262	65	16	maintain	maintain	VERB
ajst-3262	65	17	explosive	explosive	ADJ
ajst-3262	65	18	properties	property	NOUN
ajst-3262	65	19	after	after	ADP
ajst-3262	65	20	25	25	NUM
ajst-3262	65	21	days	day	NOUN
ajst-3262	65	22	of	of	ADP
ajst-3262	65	23	vacuum	vacuum	NOUN
ajst-3262	65	24	storage	storage	NOUN
ajst-3262	65	25	.	.	PUNCT
ajst-3262	66	1	references	reference	NOUN
ajst-3262	66	2	[	[	X
ajst-3262	66	3	1	1	NUM
ajst-3262	66	4	]	]	X
ajst-3262	66	5	zhang	zhang	PROPN
ajst-3262	66	6	hua	hua	PROPN
ajst-3262	66	7	,	,	PUNCT
ajst-3262	66	8	li	li	PROPN
ajst-3262	66	9	jiao	jiao	PROPN
ajst-3262	66	10	,	,	PUNCT
ajst-3262	66	11	cong	cong	NOUN
ajst-3262	66	12	rimin	rimin	PROPN
ajst-3262	66	13	research	research	PROPN
ajst-3262	66	14	survey	survey	NOUN
ajst-3262	66	15	and	and	CCONJ
ajst-3262	66	16	application	application	NOUN
ajst-3262	66	17	of	of	ADP
ajst-3262	66	18	porous	porous	ADJ
ajst-3262	66	19	silicon	silicon	NOUN
ajst-3262	67	1	[	[	X
ajst-3262	67	2	j	j	X
ajst-3262	67	3	]	]	X
ajst-3262	67	4	journal	journal	PROPN
ajst-3262	67	5	of	of	ADP
ajst-3262	67	6	shandong	shandong	PROPN
ajst-3262	67	7	university	university	PROPN
ajst-3262	67	8	of	of	ADP
ajst-3262	67	9	technology	technology	NOUN
ajst-3262	67	10	(	(	PUNCT
ajst-3262	67	11	natural	natural	ADJ
ajst-3262	67	12	science	science	NOUN
ajst-3262	67	13	edition	edition	NOUN
ajst-3262	67	14	)	)	PUNCT
ajst-3262	67	15	,	,	PUNCT
ajst-3262	67	16	2015	2015	NUM
ajst-3262	67	17	(	(	PUNCT
ajst-3262	67	18	3	3	NUM
ajst-3262	67	19	)	)	PUNCT
ajst-3262	67	20	doi:10.3969	doi:10.3969	NOUN
ajst-3262	67	21	/	/	SYM
ajst-3262	67	22	j.issn.1672	j.issn.1672	NOUN
ajst-3262	67	23	-	-	PUNCT
ajst-3262	67	24	6197.2015.03.005	6197.2015.03.005	PROPN
ajst-3262	67	25	.	.	PUNCT
ajst-3262	68	1	[	[	X
ajst-3262	68	2	2	2	NUM
ajst-3262	68	3	]	]	X
ajst-3262	68	4	yang	yang	PROPN
ajst-3262	68	5	jiale	jiale	PROPN
ajst-3262	68	6	,	,	PUNCT
ajst-3262	68	7	shen	shen	PROPN
ajst-3262	68	8	honglie	honglie	PROPN
ajst-3262	68	9	,	,	PUNCT
ajst-3262	68	10	xing	xing	PROPN
ajst-3262	68	11	zhengwei	zhengwei	NOUN
ajst-3262	68	12	progress	progress	NOUN
ajst-3262	68	13	in	in	ADP
ajst-3262	68	14	preparation	preparation	NOUN
ajst-3262	68	15	and	and	CCONJ
ajst-3262	68	16	application	application	NOUN
ajst-3262	68	17	of	of	ADP
ajst-3262	68	18	porous	porous	ADJ
ajst-3262	68	19	silicon	silicon	NOUN
ajst-3262	68	20	composites	composite	NOUN
ajst-3262	69	1	[	[	X
ajst-3262	69	2	j	j	X
ajst-3262	69	3	]	]	X
ajst-3262	69	4	micro	micro	X
ajst-3262	69	5	nano	nano	NOUN
ajst-3262	69	6	electronics	electronic	NOUN
ajst-3262	69	7	technology	technology	NOUN
ajst-3262	69	8	,	,	PUNCT
ajst-3262	69	9	2016	2016	NUM
ajst-3262	69	10	(	(	PUNCT
ajst-3262	69	11	12	12	NUM
ajst-3262	69	12	)	)	PUNCT
ajst-3262	69	13	doi:10.13250	doi:10.13250	NOUN
ajst-3262	69	14	/	/	SYM
ajst-3262	70	1	j.cnki.wndz.2016.12.002	j.cnki.wndz.2016.12.002	PROPN
ajst-3262	70	2	.	.	PUNCT
ajst-3262	71	1	[	[	X
ajst-3262	71	2	3	3	NUM
ajst-3262	71	3	]	]	X
ajst-3262	71	4	tian	tian	PROPN
ajst-3262	71	5	bin	bin	PROPN
ajst-3262	71	6	,	,	PUNCT
ajst-3262	71	7	hu	hu	PROPN
ajst-3262	71	8	ming	ming	PROPN
ajst-3262	71	9	,	,	PUNCT
ajst-3262	71	10	ma	ma	PROPN
ajst-3262	71	11	jiazhi	jiazhi	PROPN
ajst-3262	71	12	,	,	PUNCT
ajst-3262	71	13	et	et	PROPN
ajst-3262	71	14	al	al	PROPN
ajst-3262	71	15	new	new	ADJ
ajst-3262	71	16	progress	progress	NOUN
ajst-3262	71	17	in	in	ADP
ajst-3262	71	18	preparation	preparation	NOUN
ajst-3262	71	19	methods	method	NOUN
ajst-3262	71	20	of	of	ADP
ajst-3262	71	21	porous	porous	ADJ
ajst-3262	71	22	silicon	silicon	NOUN
ajst-3262	71	23	and	and	CCONJ
ajst-3262	71	24	its	its	PRON
ajst-3262	71	25	application	application	NOUN
ajst-3262	71	26	in	in	ADP
ajst-3262	71	27	micro	micro	ADJ
ajst-3262	71	28	sensors	sensor	NOUN
ajst-3262	71	29	[	[	X
ajst-3262	71	30	j	j	X
ajst-3262	71	31	]	]	X
ajst-3262	71	32	piezoelectricity	piezoelectricity	NOUN
ajst-3262	71	33	and	and	CCONJ
ajst-3262	71	34	acousto	acousto	ADJ
ajst-3262	71	35	optics	optic	NOUN
ajst-3262	71	36	,	,	PUNCT
ajst-3262	71	37	2003	2003	NUM
ajst-3262	71	38	(	(	PUNCT
ajst-3262	71	39	6	6	NUM
ajst-3262	71	40	)	)	PUNCT
ajst-3262	71	41	doi:10.3969	doi:10.3969	NOUN
ajst-3262	71	42	/	/	SYM
ajst-3262	71	43	j.issn.1004	j.issn.1004	NOUN
ajst-3262	71	44	-	-	PUNCT
ajst-3262	71	45	2474.2003.06.025	2474.2003.06.025	NOUN
ajst-3262	71	46	.	.	PUNCT
ajst-3262	72	1	[	[	X
ajst-3262	72	2	4	4	NUM
ajst-3262	72	3	]	]	X
ajst-3262	72	4	zhao	zhao	NOUN
ajst-3262	72	5	fengqi	fengqi	PROPN
ajst-3262	72	6	,	,	PUNCT
ajst-3262	72	7	yao	yao	PROPN
ajst-3262	72	8	ergang	ergang	PROPN
ajst-3262	72	9	,	,	PUNCT
ajst-3262	72	10	an	an	DET
ajst-3262	72	11	ting	ting	ADJ
ajst-3262	72	12	research	research	NOUN
ajst-3262	72	13	progress	progress	NOUN
ajst-3262	72	14	of	of	ADP
ajst-3262	72	15	nano	nano	VERB
ajst-3262	72	16	porous	porous	ADJ
ajst-3262	72	17	silicon	silicon	NOUN
ajst-3262	72	18	based	base	VERB
ajst-3262	72	19	composite	composite	ADJ
ajst-3262	72	20	energetic	energetic	ADJ
ajst-3262	72	21	materials	material	NOUN
ajst-3262	72	22	[	[	X
ajst-3262	72	23	j	j	X
ajst-3262	72	24	]	]	X
ajst-3262	72	25	journal	journal	NOUN
ajst-3262	72	26	of	of	ADP
ajst-3262	72	27	propellants	propellant	NOUN
ajst-3262	72	28	and	and	CCONJ
ajst-3262	72	29	explosives	explosive	NOUN
ajst-3262	72	30	,	,	PUNCT
ajst-3262	72	31	2013	2013	NUM
ajst-3262	72	32	(	(	PUNCT
ajst-3262	72	33	1	1	NUM
ajst-3262	72	34	)	)	PUNCT
ajst-3262	72	35	doi:10.3969	doi:10.3969	NOUN
ajst-3262	72	36	/	/	SYM
ajst-3262	72	37	j.issn.1007	j.issn.1007	ADJ
ajst-3262	72	38	-	-	PUNCT
ajst-3262	72	39	7812.2013.01.001	7812.2013.01.001	NOUN
ajst-3262	72	40	.	.	PUNCT
ajst-3262	73	1	[	[	X
ajst-3262	73	2	5	5	NUM
ajst-3262	73	3	]	]	PUNCT
ajst-3262	73	4	yu	yu	PROPN
ajst-3262	73	5	weifei	weifei	PROPN
ajst-3262	73	6	,	,	PUNCT
ajst-3262	73	7	huang	huang	PROPN
ajst-3262	73	8	hui	hui	PROPN
ajst-3262	73	9	,	,	PUNCT
ajst-3262	73	10	nieford	nieford	ADJ
ajst-3262	73	11	,	,	PUNCT
ajst-3262	73	12	etc	etc	X
ajst-3262	73	13	experimental	experimental	ADJ
ajst-3262	73	14	and	and	CCONJ
ajst-3262	73	15	theoretical	theoretical	ADJ
ajst-3262	73	16	studies	study	NOUN
ajst-3262	73	17	on	on	ADP
ajst-3262	73	18	explosion	explosion	NOUN
ajst-3262	73	19	reaction	reaction	NOUN
ajst-3262	73	20	of	of	ADP
ajst-3262	73	21	nano	nano	ADJ
ajst-3262	73	22	porous	porous	ADJ
ajst-3262	73	23	silicon	silicon	NOUN
ajst-3262	73	24	composites	composite	NOUN
ajst-3262	74	1	[	[	X
ajst-3262	74	2	j	j	X
ajst-3262	74	3	]	]	X
ajst-3262	74	4	energetic	energetic	ADJ
ajst-3262	74	5	materials	material	NOUN
ajst-3262	74	6	,	,	PUNCT
ajst-3262	74	7	2004	2004	NUM
ajst-3262	74	8	(	(	PUNCT
ajst-3262	74	9	z2	z2	NOUN
ajst-3262	74	10	)	)	PUNCT
ajst-3262	74	11	doi:10.3969	doi:10.3969	NOUN
ajst-3262	74	12	/	/	SYM
ajst-3262	74	13	j.issn.1006	j.issn.1006	ADJ
ajst-3262	74	14	-	-	PUNCT
ajst-3262	74	15	9941.2004.z2.035	9941.2004.z2.035	NUM
ajst-3262	74	16	.	.	PUNCT
ajst-3262	75	1	[	[	X
ajst-3262	75	2	6	6	NUM
ajst-3262	75	3	]	]	PUNCT
ajst-3262	75	4	yu	yu	PROPN
ajst-3262	75	5	xianwen	xianwen	PROPN
ajst-3262	75	6	,	,	PUNCT
ajst-3262	75	7	chen	chen	PROPN
ajst-3262	75	8	yanyan	yanyan	PROPN
ajst-3262	75	9	,	,	PUNCT
ajst-3262	75	10	ying	ying	PROPN
ajst-3262	75	11	taokai	taokai	NOUN
ajst-3262	75	12	,	,	PUNCT
ajst-3262	75	13	etc	etc	X
ajst-3262	75	14	new	new	ADJ
ajst-3262	75	15	surface	surface	NOUN
ajst-3262	75	16	treatment	treatment	NOUN
ajst-3262	75	17	technology	technology	NOUN
ajst-3262	75	18	of	of	ADP
ajst-3262	75	19	porous	porous	ADJ
ajst-3262	75	20	silicon	silicon	NOUN
ajst-3262	76	1	[	[	X
ajst-3262	76	2	j	j	X
ajst-3262	76	3	]	]	X
ajst-3262	76	4	journal	journal	NOUN
ajst-3262	76	5	of	of	ADP
ajst-3262	76	6	semiconductors	semiconductor	NOUN
ajst-3262	76	7	,	,	PUNCT
ajst-3262	76	8	2005	2005	NUM
ajst-3262	76	9	(	(	PUNCT
ajst-3262	76	10	2	2	NUM
ajst-3262	76	11	)	)	PUNCT
ajst-3262	76	12	doi:10.3969	doi:10.3969	NOUN
ajst-3262	76	13	/	/	SYM
ajst-3262	76	14	j.issn.16744926.2005.02.036	j.issn.16744926.2005.02.036	PROPN
ajst-3262	76	15	.	.	PUNCT
ajst-3262	77	1	[	[	X
ajst-3262	77	2	7	7	X
ajst-3262	77	3	]	]	X
ajst-3262	77	4	leng	leng	PROPN
ajst-3262	77	5	xinli	xinli	PROPN
ajst-3262	77	6	study	study	NOUN
ajst-3262	77	7	on	on	ADP
ajst-3262	77	8	luminescence	luminescence	NOUN
ajst-3262	77	9	stability	stability	NOUN
ajst-3262	77	10	of	of	ADP
ajst-3262	77	11	porous	porous	ADJ
ajst-3262	77	12	silicon	silicon	NOUN
ajst-3262	78	1	[	[	X
ajst-3262	78	2	d	d	X
ajst-3262	78	3	]	]	X
ajst-3262	78	4	.	.	PUNCT
ajst-3262	79	1	nanchang	nanchang	PROPN
ajst-3262	79	2	university	university	PROPN
ajst-3262	79	3	,	,	PUNCT
ajst-3262	79	4	2010	2010	NUM
ajst-3262	80	1	[	[	X
ajst-3262	80	2	8	8	NUM
ajst-3262	80	3	]	]	PUNCT
ajst-3262	80	4	cui	cui	PROPN
ajst-3262	80	5	meng	meng	PROPN
ajst-3262	80	6	,	,	PUNCT
ajst-3262	80	7	hu	hu	PROPN
ajst-3262	80	8	ming	ming	PROPN
ajst-3262	80	9	,	,	PUNCT
ajst-3262	80	10	lei	lei	PROPN
ajst-3262	80	11	zhenkun	zhenkun	PROPN
ajst-3262	80	12	,	,	PUNCT
ajst-3262	80	13	dou	dou	PROPN
ajst-3262	80	14	yanwei	yanwei	NOUN
ajst-3262	80	15	,	,	PUNCT
ajst-3262	80	16	tian	tian	PROPN
ajst-3262	80	17	bin	bin	PROPN
ajst-3262	80	18	research	research	NOUN
ajst-3262	80	19	on	on	ADP
ajst-3262	80	20	porous	porous	ADJ
ajst-3262	80	21	silicon	silicon	NOUN
ajst-3262	80	22	applied	apply	VERB
ajst-3262	80	23	in	in	ADP
ajst-3262	80	24	microelectromechanical	microelectromechanical	ADJ
ajst-3262	80	25	systems	system	NOUN
ajst-3262	80	26	[	[	X
ajst-3262	80	27	c]//.	c]//.	NOUN
ajst-3262	80	28	proceedings	proceeding	NOUN
ajst-3262	80	29	of	of	ADP
ajst-3262	80	30	the	the	DET
ajst-3262	80	31	fifth	fifth	ADJ
ajst-3262	80	32	chinese	chinese	ADJ
ajst-3262	80	33	academic	academic	ADJ
ajst-3262	80	34	conference	conference	NOUN
ajst-3262	80	35	on	on	ADP
ajst-3262	80	36	functional	functional	ADJ
ajst-3262	80	37	materials	material	NOUN
ajst-3262	80	38	and	and	CCONJ
ajst-3262	80	39	their	their	PRON
ajst-3262	80	40	applications	application	NOUN
ajst-3262	80	41	ⅲ.	ⅲ.	PROPN
ajst-3262	80	42	,	,	PUNCT
ajst-3262	80	43	2004	2004	NUM
ajst-3262	80	44	:	:	PUNCT
ajst-3262	80	45	862	862	NUM
ajst-3262	80	46	-	-	SYM
ajst-3262	80	47	864	864	NUM
ajst-3262	81	1	[	[	X
ajst-3262	81	2	9	9	NUM
ajst-3262	81	3	]	]	SYM
ajst-3262	81	4	li	li	PROPN
ajst-3262	81	5	xueming	xueming	PROPN
ajst-3262	81	6	,	,	PUNCT
ajst-3262	81	7	chen	chen	PROPN
ajst-3262	81	8	jianwen	jianwen	PROPN
ajst-3262	81	9	,	,	PUNCT
ajst-3262	81	10	yang	yang	PROPN
ajst-3262	81	11	wenjing	wenjing	PROPN
ajst-3262	81	12	,	,	PUNCT
ajst-3262	81	13	huang	huang	PROPN
ajst-3262	81	14	hui	hui	PROPN
ajst-3262	81	15	,	,	PUNCT
ajst-3262	81	16	yu	yu	PROPN
ajst-3262	81	17	weifei	weifei	PROPN
ajst-3262	81	18	,	,	PUNCT
ajst-3262	81	19	nie	nie	PROPN
ajst-3262	81	20	fude	fude	PROPN
ajst-3262	81	21	.	.	PUNCT
ajst-3262	82	1	preparation	preparation	NOUN
ajst-3262	82	2	and	and	CCONJ
ajst-3262	82	3	characterization	characterization	NOUN
ajst-3262	82	4	of	of	ADP
ajst-3262	82	5	porous	porous	ADJ
ajst-3262	82	6	silicon	silicon	NOUN
ajst-3262	82	7	/	/	SYM
ajst-3262	82	8	gadolinium	gadolinium	NOUN
ajst-3262	82	9	nitrate	nitrate	NOUN
ajst-3262	82	10	composite	composite	NOUN
ajst-3262	82	11	[	[	X
ajst-3262	82	12	j	j	X
ajst-3262	82	13	]	]	X
ajst-3262	82	14	.	.	PUNCT
ajst-3262	83	1	chemical	chemical	PROPN
ajst-3262	83	2	bulletin	bulletin	PROPN
ajst-3262	83	3	,	,	PUNCT
ajst-3262	83	4	2009	2009	NUM
ajst-3262	83	5	,	,	PUNCT
ajst-3262	83	6	72	72	NUM
ajst-3262	83	7	(	(	PUNCT
ajst-3262	83	8	05	05	NUM
ajst-3262	83	9	):	):	PUNCT
ajst-3262	83	10	470	470	NUM
ajst-3262	83	11	-	-	SYM
ajst-3262	83	12	473	473	NUM
ajst-3262	83	13	.	.	PUNCT
ajst-3262	84	1	doi	doi	NOUN
ajst-3262	84	2	:	:	PUNCT
ajst-3262	84	3	10.14159	10.14159	NUM
ajst-3262	84	4	/	/	SYM
ajst-3262	84	5	j.cnki.04413776.2009.05.006	j.cnki.04413776.2009.05.006	NOUN
ajst-3262	84	6	[	[	X
ajst-3262	84	7	10	10	NUM
ajst-3262	84	8	]	]	X
ajst-3262	84	9	wang	wang	PROPN
ajst-3262	84	10	shouxu	shouxu	PROPN
ajst-3262	84	11	study	study	NOUN
ajst-3262	84	12	on	on	ADP
ajst-3262	84	13	the	the	DET
ajst-3262	84	14	ignition	ignition	NOUN
ajst-3262	84	15	performance	performance	NOUN
ajst-3262	84	16	of	of	ADP
ajst-3262	84	17	porous	porous	ADJ
ajst-3262	84	18	silicon	silicon	NOUN
ajst-3262	84	19	explosive	explosive	ADJ
ajst-3262	84	20	composite	composite	NOUN
ajst-3262	85	1	[	[	X
ajst-3262	85	2	d	d	X
ajst-3262	85	3	]	]	X
ajst-3262	85	4	.	.	PUNCT
ajst-3262	86	1	nanjing	nanjing	PROPN
ajst-3262	86	2	university	university	PROPN
ajst-3262	86	3	of	of	ADP
ajst-3262	86	4	science	science	NOUN
ajst-3262	86	5	and	and	CCONJ
ajst-3262	86	6	technology	technology	NOUN
ajst-3262	86	7	,	,	PUNCT
ajst-3262	86	8	2007	2007	NUM