id	sid	tid	token	lemma	pos
ajst-5047	1	1	academic	academic	ADJ
ajst-5047	1	2	journal	journal	NOUN
ajst-5047	1	3	of	of	ADP
ajst-5047	1	4	science	science	NOUN
ajst-5047	1	5	and	and	CCONJ
ajst-5047	1	6	technology	technology	NOUN
ajst-5047	1	7	issn	issn	NOUN
ajst-5047	1	8	:	:	PUNCT
ajst-5047	1	9	2771	2771	NUM
ajst-5047	1	10	-	-	SYM
ajst-5047	1	11	3032	3032	NUM
ajst-5047	1	12	|	|	NOUN
ajst-5047	1	13	vol	vol	NOUN
ajst-5047	1	14	.	.	PROPN
ajst-5047	2	1	4	4	NUM
ajst-5047	2	2	,	,	PUNCT
ajst-5047	2	3	no	no	INTJ
ajst-5047	2	4	.	.	NOUN
ajst-5047	2	5	3	3	NUM
ajst-5047	2	6	,	,	PUNCT
ajst-5047	2	7	2022	2022	NUM
ajst-5047	2	8	146	146	NUM
ajst-5047	2	9	advances	advance	NOUN
ajst-5047	2	10	in	in	ADP
ajst-5047	2	11	preparation	preparation	NOUN
ajst-5047	2	12	technology	technology	NOUN
ajst-5047	2	13	of	of	ADP
ajst-5047	2	14	tool	tool	NOUN
ajst-5047	2	15	coatings	coating	NOUN
ajst-5047	2	16	ouyang	ouyang	PROPN
ajst-5047	2	17	liu	liu	PROPN
ajst-5047	2	18	tianjin	tianjin	PROPN
ajst-5047	2	19	university	university	PROPN
ajst-5047	2	20	of	of	ADP
ajst-5047	2	21	technology	technology	NOUN
ajst-5047	2	22	and	and	CCONJ
ajst-5047	2	23	education	education	NOUN
ajst-5047	2	24	,	,	PUNCT
ajst-5047	2	25	tianjin	tianjin	PROPN
ajst-5047	2	26	300222	300222	NUM
ajst-5047	2	27	,	,	PUNCT
ajst-5047	2	28	china	china	PROPN
ajst-5047	2	29	abstract	abstract	NOUN
ajst-5047	2	30	:	:	PUNCT
ajst-5047	2	31	with	with	ADP
ajst-5047	2	32	the	the	DET
ajst-5047	2	33	continuous	continuous	ADJ
ajst-5047	2	34	development	development	NOUN
ajst-5047	2	35	of	of	ADP
ajst-5047	2	36	modern	modern	ADJ
ajst-5047	2	37	industry	industry	NOUN
ajst-5047	2	38	and	and	CCONJ
ajst-5047	2	39	the	the	DET
ajst-5047	2	40	difficult	difficult	ADJ
ajst-5047	2	41	-	-	PUNCT
ajst-5047	2	42	to	to	ADP
ajst-5047	2	43	-	-	PUNCT
ajst-5047	2	44	machine	machine	NOUN
ajst-5047	2	45	materials	material	NOUN
ajst-5047	2	46	gradually	gradually	ADV
ajst-5047	2	47	increases	increase	VERB
ajst-5047	2	48	,	,	PUNCT
ajst-5047	2	49	the	the	DET
ajst-5047	2	50	machining	machining	NOUN
ajst-5047	2	51	requirements	requirement	NOUN
ajst-5047	2	52	of	of	ADP
ajst-5047	2	53	cutting	cut	VERB
ajst-5047	2	54	tools	tool	NOUN
ajst-5047	2	55	continue	continue	VERB
ajst-5047	2	56	to	to	PART
ajst-5047	2	57	improve	improve	VERB
ajst-5047	2	58	and	and	CCONJ
ajst-5047	2	59	the	the	DET
ajst-5047	2	60	cutting	cut	VERB
ajst-5047	2	61	environment	environment	NOUN
ajst-5047	2	62	is	be	AUX
ajst-5047	2	63	increasingly	increasingly	ADV
ajst-5047	2	64	harsh	harsh	ADJ
ajst-5047	2	65	.	.	PUNCT
ajst-5047	3	1	as	as	SCONJ
ajst-5047	3	2	the	the	DET
ajst-5047	3	3	coating	coating	NOUN
ajst-5047	3	4	applies	apply	VERB
ajst-5047	3	5	,	,	PUNCT
ajst-5047	3	6	the	the	DET
ajst-5047	3	7	efficiency	efficiency	NOUN
ajst-5047	3	8	and	and	CCONJ
ajst-5047	3	9	precision	precision	NOUN
ajst-5047	3	10	of	of	ADP
ajst-5047	3	11	machining	machining	NOUN
ajst-5047	3	12	have	have	AUX
ajst-5047	3	13	been	be	AUX
ajst-5047	3	14	effectively	effectively	ADV
ajst-5047	3	15	improved	improve	VERB
ajst-5047	3	16	.	.	PUNCT
ajst-5047	4	1	coating	coat	VERB
ajst-5047	4	2	on	on	ADP
ajst-5047	4	3	the	the	DET
ajst-5047	4	4	tool	tool	NOUN
ajst-5047	4	5	surface	surface	NOUN
ajst-5047	4	6	can	can	AUX
ajst-5047	4	7	not	not	PART
ajst-5047	4	8	only	only	ADV
ajst-5047	4	9	extend	extend	VERB
ajst-5047	4	10	the	the	DET
ajst-5047	4	11	service	service	NOUN
ajst-5047	4	12	life	life	NOUN
ajst-5047	4	13	of	of	ADP
ajst-5047	4	14	the	the	DET
ajst-5047	4	15	cutting	cut	VERB
ajst-5047	4	16	tool	tool	NOUN
ajst-5047	4	17	,	,	PUNCT
ajst-5047	4	18	greatly	greatly	ADV
ajst-5047	4	19	reduce	reduce	VERB
ajst-5047	4	20	the	the	DET
ajst-5047	4	21	processing	processing	NOUN
ajst-5047	4	22	cost	cost	NOUN
ajst-5047	4	23	,	,	PUNCT
ajst-5047	4	24	but	but	CCONJ
ajst-5047	4	25	also	also	ADV
ajst-5047	4	26	reduce	reduce	VERB
ajst-5047	4	27	the	the	DET
ajst-5047	4	28	environmental	environmental	ADJ
ajst-5047	4	29	pollution	pollution	NOUN
ajst-5047	4	30	in	in	ADP
ajst-5047	4	31	the	the	DET
ajst-5047	4	32	process	process	NOUN
ajst-5047	4	33	of	of	ADP
ajst-5047	4	34	processing	processing	NOUN
ajst-5047	4	35	.	.	PUNCT
ajst-5047	5	1	excellent	excellent	ADJ
ajst-5047	5	2	coating	coating	NOUN
ajst-5047	5	3	preparation	preparation	NOUN
ajst-5047	5	4	technology	technology	NOUN
ajst-5047	5	5	is	be	AUX
ajst-5047	5	6	an	an	DET
ajst-5047	5	7	important	important	ADJ
ajst-5047	5	8	factor	factor	NOUN
ajst-5047	5	9	for	for	ADP
ajst-5047	5	10	its	its	PRON
ajst-5047	5	11	effective	effective	ADJ
ajst-5047	5	12	performance	performance	NOUN
ajst-5047	5	13	.	.	PUNCT
ajst-5047	6	1	according	accord	VERB
ajst-5047	6	2	to	to	ADP
ajst-5047	6	3	different	different	ADJ
ajst-5047	6	4	processing	processing	NOUN
ajst-5047	6	5	requirements	requirement	NOUN
ajst-5047	6	6	,	,	PUNCT
ajst-5047	6	7	processing	processing	NOUN
ajst-5047	6	8	costs	cost	NOUN
ajst-5047	6	9	and	and	CCONJ
ajst-5047	6	10	processing	processing	NOUN
ajst-5047	6	11	environment	environment	NOUN
ajst-5047	6	12	,	,	PUNCT
ajst-5047	6	13	researchers	researcher	NOUN
ajst-5047	6	14	have	have	AUX
ajst-5047	6	15	been	be	AUX
ajst-5047	6	16	working	work	VERB
ajst-5047	6	17	hard	hard	ADV
ajst-5047	6	18	on	on	ADP
ajst-5047	6	19	the	the	DET
ajst-5047	6	20	road	road	NOUN
ajst-5047	6	21	of	of	ADP
ajst-5047	6	22	coating	coat	VERB
ajst-5047	6	23	preparation	preparation	NOUN
ajst-5047	6	24	technology	technology	NOUN
ajst-5047	6	25	.	.	PUNCT
ajst-5047	7	1	in	in	ADP
ajst-5047	7	2	this	this	DET
ajst-5047	7	3	work	work	NOUN
ajst-5047	7	4	,	,	PUNCT
ajst-5047	7	5	it	it	PRON
ajst-5047	7	6	summarizes	summarize	VERB
ajst-5047	7	7	the	the	DET
ajst-5047	7	8	principle	principle	NOUN
ajst-5047	7	9	of	of	ADP
ajst-5047	7	10	physical	physical	ADJ
ajst-5047	7	11	vapor	vapor	NOUN
ajst-5047	7	12	deposition	deposition	NOUN
ajst-5047	7	13	,	,	PUNCT
ajst-5047	7	14	chemical	chemical	NOUN
ajst-5047	7	15	vapor	vapor	NOUN
ajst-5047	7	16	deposition	deposition	NOUN
ajst-5047	7	17	and	and	CCONJ
ajst-5047	7	18	the	the	DET
ajst-5047	7	19	corresponding	corresponding	ADJ
ajst-5047	7	20	advantages	advantage	NOUN
ajst-5047	7	21	and	and	CCONJ
ajst-5047	7	22	disadvantages	disadvantage	NOUN
ajst-5047	7	23	,	,	PUNCT
ajst-5047	7	24	and	and	CCONJ
ajst-5047	7	25	briefly	briefly	ADV
ajst-5047	7	26	introduces	introduce	VERB
ajst-5047	7	27	the	the	DET
ajst-5047	7	28	pulsed	pulse	VERB
ajst-5047	7	29	dc	dc	PROPN
ajst-5047	7	30	magnetron	magnetron	PROPN
ajst-5047	7	31	sputtering	sputtering	NOUN
ajst-5047	7	32	,	,	PUNCT
ajst-5047	7	33	high	high	ADJ
ajst-5047	7	34	power	power	NOUN
ajst-5047	7	35	pulsed	pulse	VERB
ajst-5047	7	36	magnetron	magnetron	NOUN
ajst-5047	7	37	sputtering	sputtering	NOUN
ajst-5047	7	38	,	,	PUNCT
ajst-5047	7	39	arc	arc	NOUN
ajst-5047	7	40	ion	ion	NOUN
ajst-5047	7	41	plating	plating	NOUN
ajst-5047	7	42	and	and	CCONJ
ajst-5047	7	43	a	a	DET
ajst-5047	7	44	variety	variety	NOUN
ajst-5047	7	45	of	of	ADP
ajst-5047	7	46	composite	composite	ADJ
ajst-5047	7	47	magnetron	magnetron	NOUN
ajst-5047	7	48	sputtering	sputtering	NOUN
ajst-5047	7	49	technologies	technology	NOUN
ajst-5047	7	50	.	.	PUNCT
ajst-5047	8	1	keywords	keyword	NOUN
ajst-5047	8	2	:	:	PUNCT
ajst-5047	8	3	tool	tool	NOUN
ajst-5047	8	4	coating	coating	NOUN
ajst-5047	8	5	,	,	PUNCT
ajst-5047	8	6	physical	physical	ADJ
ajst-5047	8	7	vapor	vapor	NOUN
ajst-5047	8	8	deposition	deposition	NOUN
ajst-5047	8	9	,	,	PUNCT
ajst-5047	8	10	chemical	chemical	NOUN
ajst-5047	8	11	vapor	vapor	NOUN
ajst-5047	8	12	deposition	deposition	NOUN
ajst-5047	8	13	,	,	PUNCT
ajst-5047	8	14	magnetron	magnetron	NOUN
ajst-5047	8	15	sputtering	sputtering	NOUN
ajst-5047	8	16	.	.	PUNCT
ajst-5047	9	1	1	1	X
ajst-5047	9	2	.	.	X
ajst-5047	9	3	introduction	introduction	NOUN
ajst-5047	9	4	in	in	ADP
ajst-5047	9	5	the	the	DET
ajst-5047	9	6	metal	metal	NOUN
ajst-5047	9	7	processing	processing	NOUN
ajst-5047	9	8	manufacturing	manufacturing	NOUN
ajst-5047	9	9	industry	industry	NOUN
ajst-5047	9	10	,	,	PUNCT
ajst-5047	9	11	the	the	DET
ajst-5047	9	12	number	number	NOUN
ajst-5047	9	13	of	of	ADP
ajst-5047	9	14	materials	material	NOUN
ajst-5047	9	15	that	that	PRON
ajst-5047	9	16	are	be	AUX
ajst-5047	9	17	difficult	difficult	ADJ
ajst-5047	9	18	to	to	PART
ajst-5047	9	19	process	process	VERB
ajst-5047	9	20	is	be	AUX
ajst-5047	9	21	increasing	increase	VERB
ajst-5047	9	22	,	,	PUNCT
ajst-5047	9	23	and	and	CCONJ
ajst-5047	9	24	the	the	DET
ajst-5047	9	25	requirements	requirement	NOUN
ajst-5047	9	26	for	for	ADP
ajst-5047	9	27	cutting	cut	VERB
ajst-5047	9	28	toughness	toughness	NOUN
ajst-5047	9	29	,	,	PUNCT
ajst-5047	9	30	hardness	hardness	NOUN
ajst-5047	9	31	,	,	PUNCT
ajst-5047	9	32	environmental	environmental	ADJ
ajst-5047	9	33	protection	protection	NOUN
ajst-5047	9	34	and	and	CCONJ
ajst-5047	9	35	life	life	NOUN
ajst-5047	9	36	of	of	ADP
ajst-5047	9	37	cutting	cut	VERB
ajst-5047	9	38	tools	tool	NOUN
ajst-5047	9	39	are	be	AUX
ajst-5047	9	40	getting	get	VERB
ajst-5047	9	41	higher	high	ADJ
ajst-5047	9	42	and	and	CCONJ
ajst-5047	9	43	higher	high	ADJ
ajst-5047	10	1	[	[	X
ajst-5047	10	2	1	1	NUM
ajst-5047	10	3	-	-	SYM
ajst-5047	10	4	3	3	NUM
ajst-5047	10	5	]	]	PUNCT
ajst-5047	10	6	.	.	PUNCT
ajst-5047	11	1	the	the	DET
ajst-5047	11	2	use	use	NOUN
ajst-5047	11	3	of	of	ADP
ajst-5047	11	4	coated	coated	ADJ
ajst-5047	11	5	tool	tool	NOUN
ajst-5047	11	6	improves	improve	VERB
ajst-5047	11	7	the	the	DET
ajst-5047	11	8	cutting	cut	VERB
ajst-5047	11	9	performance	performance	NOUN
ajst-5047	11	10	of	of	ADP
ajst-5047	11	11	the	the	DET
ajst-5047	11	12	tool	tool	NOUN
ajst-5047	11	13	,	,	PUNCT
ajst-5047	11	14	reduces	reduce	VERB
ajst-5047	11	15	the	the	DET
ajst-5047	11	16	cutting	cutting	NOUN
ajst-5047	11	17	wear	wear	NOUN
ajst-5047	11	18	of	of	ADP
ajst-5047	11	19	the	the	DET
ajst-5047	11	20	tool	tool	NOUN
ajst-5047	11	21	,	,	PUNCT
ajst-5047	11	22	and	and	CCONJ
ajst-5047	11	23	prolongs	prolong	VERB
ajst-5047	11	24	the	the	DET
ajst-5047	11	25	service	service	NOUN
ajst-5047	11	26	life	life	NOUN
ajst-5047	11	27	of	of	ADP
ajst-5047	11	28	the	the	DET
ajst-5047	11	29	tool	tool	NOUN
ajst-5047	11	30	[	[	X
ajst-5047	11	31	4,5	4,5	NUM
ajst-5047	11	32	]	]	PUNCT
ajst-5047	11	33	.	.	PUNCT
ajst-5047	12	1	tool	tool	NOUN
ajst-5047	12	2	coating	coating	NOUN
ajst-5047	12	3	plays	play	VERB
ajst-5047	12	4	a	a	DET
ajst-5047	12	5	role	role	NOUN
ajst-5047	12	6	of	of	ADP
ajst-5047	12	7	buffer	buffer	NOUN
ajst-5047	12	8	and	and	CCONJ
ajst-5047	12	9	protection	protection	NOUN
ajst-5047	12	10	in	in	ADP
ajst-5047	12	11	the	the	DET
ajst-5047	12	12	cutting	cutting	NOUN
ajst-5047	12	13	process	process	NOUN
ajst-5047	12	14	.	.	PUNCT
ajst-5047	13	1	the	the	DET
ajst-5047	13	2	existence	existence	NOUN
ajst-5047	13	3	of	of	ADP
ajst-5047	13	4	coating	coating	NOUN
ajst-5047	13	5	can	can	AUX
ajst-5047	13	6	avoid	avoid	VERB
ajst-5047	13	7	the	the	DET
ajst-5047	13	8	direct	direct	ADJ
ajst-5047	13	9	contact	contact	NOUN
ajst-5047	13	10	between	between	ADP
ajst-5047	13	11	tool	tool	NOUN
ajst-5047	13	12	matrix	matrix	NOUN
ajst-5047	13	13	and	and	CCONJ
ajst-5047	13	14	cutting	cut	VERB
ajst-5047	13	15	material	material	NOUN
ajst-5047	13	16	,	,	PUNCT
ajst-5047	13	17	reduce	reduce	VERB
ajst-5047	13	18	the	the	DET
ajst-5047	13	19	cutting	cut	VERB
ajst-5047	13	20	heat	heat	NOUN
ajst-5047	13	21	transfer	transfer	NOUN
ajst-5047	13	22	,	,	PUNCT
ajst-5047	13	23	reduce	reduce	VERB
ajst-5047	13	24	the	the	DET
ajst-5047	13	25	possibility	possibility	NOUN
ajst-5047	13	26	of	of	ADP
ajst-5047	13	27	chemical	chemical	ADJ
ajst-5047	13	28	reaction	reaction	NOUN
ajst-5047	13	29	in	in	ADP
ajst-5047	13	30	tool	tool	NOUN
ajst-5047	13	31	matrix	matrix	NOUN
ajst-5047	13	32	,	,	PUNCT
ajst-5047	13	33	thus	thus	ADV
ajst-5047	13	34	improving	improve	VERB
ajst-5047	13	35	the	the	DET
ajst-5047	13	36	cutting	cut	VERB
ajst-5047	13	37	accuracy	accuracy	NOUN
ajst-5047	13	38	of	of	ADP
ajst-5047	13	39	coating	coat	VERB
ajst-5047	13	40	and	and	CCONJ
ajst-5047	13	41	increasing	increase	VERB
ajst-5047	13	42	the	the	DET
ajst-5047	13	43	service	service	NOUN
ajst-5047	13	44	life	life	NOUN
ajst-5047	13	45	of	of	ADP
ajst-5047	13	46	tool	tool	NOUN
ajst-5047	13	47	[	[	X
ajst-5047	13	48	6	6	NUM
ajst-5047	13	49	]	]	PUNCT
ajst-5047	13	50	.	.	PUNCT
ajst-5047	14	1	in	in	ADP
ajst-5047	14	2	order	order	NOUN
ajst-5047	14	3	to	to	PART
ajst-5047	14	4	maximize	maximize	VERB
ajst-5047	14	5	the	the	DET
ajst-5047	14	6	performance	performance	NOUN
ajst-5047	14	7	of	of	ADP
ajst-5047	14	8	the	the	DET
ajst-5047	14	9	coating	coating	NOUN
ajst-5047	14	10	,	,	PUNCT
ajst-5047	14	11	the	the	DET
ajst-5047	14	12	coating	coat	VERB
ajst-5047	14	13	preparation	preparation	NOUN
ajst-5047	14	14	technology	technology	NOUN
ajst-5047	14	15	is	be	AUX
ajst-5047	14	16	continuously	continuously	ADV
ajst-5047	14	17	developed	develop	VERB
ajst-5047	14	18	and	and	CCONJ
ajst-5047	14	19	optimized	optimize	VERB
ajst-5047	14	20	.	.	PUNCT
ajst-5047	15	1	at	at	ADP
ajst-5047	15	2	present	present	ADJ
ajst-5047	15	3	,	,	PUNCT
ajst-5047	15	4	the	the	DET
ajst-5047	15	5	preparation	preparation	NOUN
ajst-5047	15	6	technologies	technology	NOUN
ajst-5047	15	7	of	of	ADP
ajst-5047	15	8	tool	tool	NOUN
ajst-5047	15	9	coatings	coating	NOUN
ajst-5047	15	10	mainly	mainly	ADV
ajst-5047	15	11	include	include	VERB
ajst-5047	15	12	chemical	chemical	ADJ
ajst-5047	15	13	heat	heat	NOUN
ajst-5047	15	14	treatment	treatment	NOUN
ajst-5047	15	15	technology	technology	NOUN
ajst-5047	15	16	,	,	PUNCT
ajst-5047	15	17	plasma	plasma	NOUN
ajst-5047	15	18	spraying	spray	VERB
ajst-5047	15	19	technology	technology	NOUN
ajst-5047	15	20	,	,	PUNCT
ajst-5047	15	21	thermal	thermal	ADJ
ajst-5047	15	22	spraying	spray	VERB
ajst-5047	15	23	technology	technology	NOUN
ajst-5047	15	24	,	,	PUNCT
ajst-5047	15	25	sol	sol	NOUN
ajst-5047	15	26	-	-	PUNCT
ajst-5047	15	27	gel	gel	NOUN
ajst-5047	15	28	technology	technology	NOUN
ajst-5047	15	29	and	and	CCONJ
ajst-5047	15	30	gas	gas	NOUN
ajst-5047	15	31	deposition	deposition	NOUN
ajst-5047	15	32	technology	technology	NOUN
ajst-5047	15	33	,	,	PUNCT
ajst-5047	15	34	etc	etc	X
ajst-5047	15	35	.	.	X
ajst-5047	16	1	[	[	X
ajst-5047	16	2	7	7	NUM
ajst-5047	16	3	]	]	PUNCT
ajst-5047	16	4	.	.	PUNCT
ajst-5047	17	1	vapor	vapor	NOUN
ajst-5047	17	2	deposition	deposition	NOUN
ajst-5047	17	3	technology	technology	NOUN
ajst-5047	17	4	is	be	AUX
ajst-5047	17	5	a	a	DET
ajst-5047	17	6	technology	technology	NOUN
ajst-5047	17	7	that	that	PRON
ajst-5047	17	8	converts	convert	VERB
ajst-5047	17	9	the	the	DET
ajst-5047	17	10	required	require	VERB
ajst-5047	17	11	materials	material	NOUN
ajst-5047	17	12	into	into	ADP
ajst-5047	17	13	gaseous	gaseous	ADJ
ajst-5047	17	14	atoms	atom	NOUN
ajst-5047	17	15	or	or	CCONJ
ajst-5047	17	16	molecules	molecule	NOUN
ajst-5047	17	17	in	in	ADP
ajst-5047	17	18	a	a	DET
ajst-5047	17	19	vacuum	vacuum	NOUN
ajst-5047	17	20	chamber	chamber	NOUN
ajst-5047	17	21	and	and	CCONJ
ajst-5047	17	22	then	then	ADV
ajst-5047	17	23	deposits	deposit	VERB
ajst-5047	17	24	them	they	PRON
ajst-5047	17	25	on	on	ADP
ajst-5047	17	26	the	the	DET
ajst-5047	17	27	substrate	substrate	NOUN
ajst-5047	17	28	surface	surface	NOUN
ajst-5047	17	29	to	to	PART
ajst-5047	17	30	form	form	VERB
ajst-5047	17	31	solid	solid	ADJ
ajst-5047	17	32	films	film	NOUN
ajst-5047	17	33	.	.	PUNCT
ajst-5047	18	1	it	it	PRON
ajst-5047	18	2	is	be	AUX
ajst-5047	18	3	mainly	mainly	ADV
ajst-5047	18	4	divided	divide	VERB
ajst-5047	18	5	into	into	ADP
ajst-5047	18	6	physical	physical	ADJ
ajst-5047	18	7	vapor	vapor	NOUN
ajst-5047	18	8	deposition	deposition	NOUN
ajst-5047	18	9	(	(	PUNCT
ajst-5047	18	10	pvd	pvd	PROPN
ajst-5047	18	11	)	)	PUNCT
ajst-5047	18	12	,	,	PUNCT
ajst-5047	18	13	chemical	chemical	NOUN
ajst-5047	18	14	vapor	vapor	NOUN
ajst-5047	18	15	deposition	deposition	NOUN
ajst-5047	18	16	(	(	PUNCT
ajst-5047	18	17	cvd	cvd	NOUN
ajst-5047	18	18	)	)	PUNCT
ajst-5047	18	19	and	and	CCONJ
ajst-5047	18	20	plasma	plasma	NOUN
ajst-5047	18	21	vapor	vapor	NOUN
ajst-5047	18	22	deposition	deposition	NOUN
ajst-5047	18	23	(	(	PUNCT
ajst-5047	18	24	pcvd	pcvd	NOUN
ajst-5047	18	25	)	)	PUNCT
ajst-5047	18	26	.	.	PUNCT
ajst-5047	19	1	this	this	DET
ajst-5047	19	2	coating	coat	VERB
ajst-5047	19	3	preparation	preparation	NOUN
ajst-5047	19	4	method	method	NOUN
ajst-5047	19	5	is	be	AUX
ajst-5047	19	6	mainly	mainly	ADV
ajst-5047	19	7	carried	carry	VERB
ajst-5047	19	8	out	out	ADP
ajst-5047	19	9	in	in	ADP
ajst-5047	19	10	vacuum	vacuum	PROPN
ajst-5047	19	11	chamber	chamber	PROPN
ajst-5047	19	12	,	,	PUNCT
ajst-5047	19	13	which	which	PRON
ajst-5047	19	14	can	can	AUX
ajst-5047	19	15	reduce	reduce	VERB
ajst-5047	19	16	the	the	DET
ajst-5047	19	17	pollution	pollution	NOUN
ajst-5047	19	18	to	to	ADP
ajst-5047	19	19	the	the	DET
ajst-5047	19	20	outside	outside	ADJ
ajst-5047	19	21	world	world	NOUN
ajst-5047	19	22	to	to	ADP
ajst-5047	19	23	a	a	DET
ajst-5047	19	24	certain	certain	ADJ
ajst-5047	19	25	extent	extent	NOUN
ajst-5047	19	26	,	,	PUNCT
ajst-5047	19	27	and	and	CCONJ
ajst-5047	19	28	is	be	AUX
ajst-5047	19	29	widely	widely	ADV
ajst-5047	19	30	used	use	VERB
ajst-5047	19	31	by	by	ADP
ajst-5047	19	32	modern	modern	ADJ
ajst-5047	19	33	coating	coating	NOUN
ajst-5047	19	34	researchers	researcher	NOUN
ajst-5047	19	35	.	.	PUNCT
ajst-5047	20	1	2	2	X
ajst-5047	20	2	.	.	X
ajst-5047	20	3	vacuum	vacuum	NOUN
ajst-5047	20	4	vapor	vapor	NOUN
ajst-5047	20	5	deposition	deposition	NOUN
ajst-5047	20	6	2.1	2.1	NUM
ajst-5047	20	7	.	.	PUNCT
ajst-5047	21	1	chemical	chemical	ADJ
ajst-5047	21	2	vapor	vapor	NOUN
ajst-5047	21	3	deposition	deposition	NOUN
ajst-5047	21	4	technique	technique	NOUN
ajst-5047	21	5	chemical	chemical	NOUN
ajst-5047	21	6	vapor	vapor	NOUN
ajst-5047	21	7	deposition	deposition	NOUN
ajst-5047	21	8	technology	technology	NOUN
ajst-5047	21	9	is	be	AUX
ajst-5047	21	10	the	the	DET
ajst-5047	21	11	earliest	early	ADJ
ajst-5047	21	12	vapor	vapor	NOUN
ajst-5047	21	13	deposition	deposition	NOUN
ajst-5047	21	14	technology	technology	NOUN
ajst-5047	21	15	and	and	CCONJ
ajst-5047	21	16	the	the	DET
ajst-5047	21	17	most	most	ADV
ajst-5047	21	18	common	common	ADJ
ajst-5047	21	19	coating	coating	NOUN
ajst-5047	21	20	preparation	preparation	NOUN
ajst-5047	21	21	technology	technology	NOUN
ajst-5047	21	22	.	.	PUNCT
ajst-5047	22	1	its	its	PRON
ajst-5047	22	2	main	main	ADJ
ajst-5047	22	3	principle	principle	NOUN
ajst-5047	22	4	is	be	AUX
ajst-5047	22	5	to	to	PART
ajst-5047	22	6	decompose	decompose	VERB
ajst-5047	22	7	volatile	volatile	ADJ
ajst-5047	22	8	compounds	compound	NOUN
ajst-5047	22	9	or	or	CCONJ
ajst-5047	22	10	make	make	VERB
ajst-5047	22	11	them	they	PRON
ajst-5047	22	12	undergo	undergo	VERB
ajst-5047	22	13	chemical	chemical	NOUN
ajst-5047	22	14	reactions	reaction	NOUN
ajst-5047	22	15	,	,	PUNCT
ajst-5047	22	16	and	and	CCONJ
ajst-5047	22	17	then	then	ADV
ajst-5047	22	18	deposit	deposit	VERB
ajst-5047	22	19	the	the	DET
ajst-5047	22	20	generated	generate	VERB
ajst-5047	22	21	substances	substance	NOUN
ajst-5047	22	22	in	in	ADP
ajst-5047	22	23	the	the	DET
ajst-5047	22	24	form	form	NOUN
ajst-5047	22	25	of	of	ADP
ajst-5047	22	26	molecules	molecule	NOUN
ajst-5047	22	27	,	,	PUNCT
ajst-5047	22	28	ions	ion	NOUN
ajst-5047	22	29	and	and	CCONJ
ajst-5047	22	30	even	even	ADV
ajst-5047	22	31	atoms	atom	NOUN
ajst-5047	22	32	onto	onto	ADP
ajst-5047	22	33	the	the	DET
ajst-5047	22	34	required	require	VERB
ajst-5047	22	35	matrix	matrix	NOUN
ajst-5047	22	36	to	to	PART
ajst-5047	22	37	form	form	VERB
ajst-5047	22	38	solid	solid	ADJ
ajst-5047	22	39	films	film	NOUN
ajst-5047	22	40	.	.	PUNCT
ajst-5047	23	1	compared	compare	VERB
ajst-5047	23	2	with	with	ADP
ajst-5047	23	3	other	other	ADJ
ajst-5047	23	4	coating	coating	NOUN
ajst-5047	23	5	preparation	preparation	NOUN
ajst-5047	23	6	technologies	technology	NOUN
ajst-5047	23	7	,	,	PUNCT
ajst-5047	23	8	cvd	cvd	PROPN
ajst-5047	23	9	is	be	AUX
ajst-5047	23	10	a	a	DET
ajst-5047	23	11	simple	simple	ADJ
ajst-5047	23	12	and	and	CCONJ
ajst-5047	23	13	mature	mature	ADJ
ajst-5047	23	14	surface	surface	NOUN
ajst-5047	23	15	coating	coating	NOUN
ajst-5047	23	16	manufacturing	manufacturing	NOUN
ajst-5047	23	17	technology	technology	NOUN
ajst-5047	23	18	.	.	PUNCT
ajst-5047	24	1	even	even	ADV
ajst-5047	24	2	on	on	ADP
ajst-5047	24	3	complex	complex	ADJ
ajst-5047	24	4	shapes	shape	NOUN
ajst-5047	24	5	,	,	PUNCT
ajst-5047	24	6	uniform	uniform	ADJ
ajst-5047	24	7	nanocrystalline	nanocrystalline	ADJ
ajst-5047	24	8	films	film	NOUN
ajst-5047	24	9	with	with	ADP
ajst-5047	24	10	good	good	ADJ
ajst-5047	24	11	step	step	NOUN
ajst-5047	24	12	coverage	coverage	NOUN
ajst-5047	24	13	can	can	AUX
ajst-5047	24	14	be	be	AUX
ajst-5047	24	15	deposited	deposit	VERB
ajst-5047	24	16	.	.	PUNCT
ajst-5047	25	1	at	at	ADP
ajst-5047	25	2	the	the	DET
ajst-5047	25	3	same	same	ADJ
ajst-5047	25	4	time	time	NOUN
ajst-5047	25	5	,	,	PUNCT
ajst-5047	25	6	films	film	NOUN
ajst-5047	25	7	prepared	prepare	VERB
ajst-5047	25	8	using	use	VERB
ajst-5047	25	9	the	the	DET
ajst-5047	25	10	cvd	cvd	PROPN
ajst-5047	25	11	method	method	NOUN
ajst-5047	25	12	usually	usually	ADV
ajst-5047	25	13	show	show	VERB
ajst-5047	25	14	better	well	ADJ
ajst-5047	25	15	adhesion	adhesion	NOUN
ajst-5047	25	16	and	and	CCONJ
ajst-5047	25	17	higher	high	ADJ
ajst-5047	25	18	internal	internal	ADJ
ajst-5047	25	19	stress	stress	NOUN
ajst-5047	26	1	[	[	X
ajst-5047	26	2	8	8	NUM
ajst-5047	26	3	]	]	PUNCT
ajst-5047	26	4	.	.	PUNCT
ajst-5047	27	1	in	in	ADP
ajst-5047	27	2	addition	addition	NOUN
ajst-5047	27	3	,	,	PUNCT
ajst-5047	27	4	at	at	ADP
ajst-5047	27	5	low	low	ADJ
ajst-5047	27	6	deposition	deposition	NOUN
ajst-5047	27	7	temperature	temperature	NOUN
ajst-5047	27	8	and	and	CCONJ
ajst-5047	27	9	within	within	ADP
ajst-5047	27	10	a	a	DET
ajst-5047	27	11	short	short	ADJ
ajst-5047	27	12	time	time	NOUN
ajst-5047	27	13	,	,	PUNCT
ajst-5047	27	14	cvd	cvd	PROPN
ajst-5047	27	15	technology	technology	PROPN
ajst-5047	27	16	can	can	AUX
ajst-5047	27	17	well	well	ADV
ajst-5047	27	18	control	control	VERB
ajst-5047	27	19	the	the	DET
ajst-5047	27	20	size	size	NOUN
ajst-5047	27	21	and	and	CCONJ
ajst-5047	27	22	structure	structure	NOUN
ajst-5047	27	23	of	of	ADP
ajst-5047	27	24	the	the	DET
ajst-5047	27	25	coating	coat	VERB
ajst-5047	27	26	-single	-single	NOUN
ajst-5047	27	27	layer	layer	NOUN
ajst-5047	27	28	coating	coating	NOUN
ajst-5047	27	29	,	,	PUNCT
ajst-5047	27	30	multi	multi	ADJ
ajst-5047	27	31	-	-	ADJ
ajst-5047	27	32	layer	layer	ADJ
ajst-5047	27	33	coating	coating	NOUN
ajst-5047	27	34	,	,	PUNCT
ajst-5047	27	35	composite	composite	ADJ
ajst-5047	27	36	coating	coating	NOUN
ajst-5047	27	37	,	,	PUNCT
ajst-5047	27	38	nanostructure	nanostructure	NOUN
ajst-5047	27	39	and	and	CCONJ
ajst-5047	27	40	functional	functional	ADJ
ajst-5047	27	41	gradient	gradient	NOUN
ajst-5047	27	42	coating	coating	NOUN
ajst-5047	27	43	[	[	X
ajst-5047	27	44	9	9	NUM
ajst-5047	27	45	]	]	PUNCT
ajst-5047	27	46	.	.	PUNCT
ajst-5047	28	1	cvd	cvd	PROPN
ajst-5047	28	2	is	be	AUX
ajst-5047	28	3	a	a	DET
ajst-5047	28	4	flexible	flexible	ADJ
ajst-5047	28	5	technology	technology	NOUN
ajst-5047	28	6	that	that	PRON
ajst-5047	28	7	can	can	AUX
ajst-5047	28	8	complement	complement	VERB
ajst-5047	28	9	other	other	ADJ
ajst-5047	28	10	technologies	technology	NOUN
ajst-5047	28	11	such	such	ADJ
ajst-5047	28	12	as	as	ADP
ajst-5047	28	13	laser	laser	NOUN
ajst-5047	28	14	,	,	PUNCT
ajst-5047	28	15	plasma	plasma	NOUN
ajst-5047	28	16	,	,	PUNCT
ajst-5047	28	17	vacuum	vacuum	NOUN
ajst-5047	28	18	and	and	CCONJ
ajst-5047	28	19	thermal	thermal	ADJ
ajst-5047	28	20	spraying	spraying	NOUN
ajst-5047	28	21	[	[	PUNCT
ajst-5047	28	22	10	10	NUM
ajst-5047	28	23	-	-	SYM
ajst-5047	28	24	14	14	NUM
ajst-5047	28	25	]	]	PUNCT
ajst-5047	28	26	.	.	PUNCT
ajst-5047	29	1	however	however	ADV
ajst-5047	29	2	,	,	PUNCT
ajst-5047	29	3	the	the	DET
ajst-5047	29	4	high	high	ADJ
ajst-5047	29	5	ambient	ambient	ADJ
ajst-5047	29	6	temperature	temperature	NOUN
ajst-5047	29	7	required	require	VERB
ajst-5047	29	8	by	by	ADP
ajst-5047	29	9	cvd	cvd	PROPN
ajst-5047	29	10	technology	technology	PROPN
ajst-5047	29	11	limits	limit	VERB
ajst-5047	29	12	its	its	PRON
ajst-5047	29	13	application	application	NOUN
ajst-5047	29	14	in	in	ADP
ajst-5047	29	15	tool	tool	NOUN
ajst-5047	29	16	coating	coating	NOUN
ajst-5047	29	17	.	.	PUNCT
ajst-5047	30	1	in	in	ADP
ajst-5047	30	2	the	the	DET
ajst-5047	30	3	process	process	NOUN
ajst-5047	30	4	of	of	ADP
ajst-5047	30	5	coating	coat	VERB
ajst-5047	30	6	deposition	deposition	NOUN
ajst-5047	30	7	by	by	ADP
ajst-5047	30	8	cvd	cvd	PROPN
ajst-5047	30	9	technology	technology	PROPN
ajst-5047	30	10	in	in	ADP
ajst-5047	30	11	common	common	ADJ
ajst-5047	30	12	cemented	cement	VERB
ajst-5047	30	13	carbide	carbide	NOUN
ajst-5047	30	14	cutting	cutting	NOUN
ajst-5047	30	15	tools	tool	NOUN
ajst-5047	30	16	,	,	PUNCT
ajst-5047	30	17	the	the	DET
ajst-5047	30	18	internal	internal	ADJ
ajst-5047	30	19	structure	structure	NOUN
ajst-5047	30	20	of	of	ADP
ajst-5047	30	21	matrix	matrix	NOUN
ajst-5047	30	22	will	will	AUX
ajst-5047	30	23	be	be	AUX
ajst-5047	30	24	changed	change	VERB
ajst-5047	30	25	and	and	CCONJ
ajst-5047	30	26	different	different	ADJ
ajst-5047	30	27	phases	phase	NOUN
ajst-5047	30	28	will	will	AUX
ajst-5047	30	29	appear	appear	VERB
ajst-5047	30	30	when	when	SCONJ
ajst-5047	30	31	the	the	DET
ajst-5047	30	32	temperature	temperature	NOUN
ajst-5047	30	33	is	be	AUX
ajst-5047	30	34	too	too	ADV
ajst-5047	30	35	high	high	ADJ
ajst-5047	30	36	.	.	PUNCT
ajst-5047	31	1	at	at	ADP
ajst-5047	31	2	the	the	DET
ajst-5047	31	3	same	same	ADJ
ajst-5047	31	4	time	time	NOUN
ajst-5047	31	5	,	,	PUNCT
ajst-5047	31	6	problems	problem	NOUN
ajst-5047	31	7	such	such	ADJ
ajst-5047	31	8	as	as	ADP
ajst-5047	31	9	low	low	ADJ
ajst-5047	31	10	deposition	deposition	NOUN
ajst-5047	31	11	rate	rate	NOUN
ajst-5047	31	12	,	,	PUNCT
ajst-5047	31	13	rough	rough	ADJ
ajst-5047	31	14	surface	surface	NOUN
ajst-5047	31	15	and	and	CCONJ
ajst-5047	31	16	environmental	environmental	ADJ
ajst-5047	31	17	pollution	pollution	NOUN
ajst-5047	31	18	of	of	ADP
ajst-5047	31	19	cvd	cvd	PROPN
ajst-5047	31	20	technology	technology	PROPN
ajst-5047	31	21	need	need	VERB
ajst-5047	31	22	to	to	PART
ajst-5047	31	23	be	be	AUX
ajst-5047	31	24	further	far	ADV
ajst-5047	31	25	improved	improve	VERB
ajst-5047	31	26	[	[	X
ajst-5047	31	27	15,16	15,16	NUM
ajst-5047	31	28	]	]	PUNCT
ajst-5047	31	29	.	.	PUNCT
ajst-5047	32	1	2.2	2.2	NUM
ajst-5047	32	2	.	.	PUNCT
ajst-5047	33	1	physical	physical	ADJ
ajst-5047	33	2	vapor	vapor	NOUN
ajst-5047	33	3	deposition	deposition	NOUN
ajst-5047	33	4	technique	technique	NOUN
ajst-5047	33	5	as	as	ADP
ajst-5047	33	6	one	one	NUM
ajst-5047	33	7	of	of	ADP
ajst-5047	33	8	the	the	DET
ajst-5047	33	9	widely	widely	ADV
ajst-5047	33	10	used	use	VERB
ajst-5047	33	11	surface	surface	NOUN
ajst-5047	33	12	modification	modification	NOUN
ajst-5047	33	13	technologies	technology	NOUN
ajst-5047	33	14	,	,	PUNCT
ajst-5047	33	15	physical	physical	ADJ
ajst-5047	33	16	vapor	vapor	NOUN
ajst-5047	33	17	deposition	deposition	NOUN
ajst-5047	33	18	technology	technology	NOUN
ajst-5047	33	19	has	have	VERB
ajst-5047	33	20	the	the	DET
ajst-5047	33	21	advantages	advantage	NOUN
ajst-5047	33	22	of	of	ADP
ajst-5047	33	23	high	high	ADJ
ajst-5047	33	24	density	density	NOUN
ajst-5047	33	25	of	of	ADP
ajst-5047	33	26	coating	coating	NOUN
ajst-5047	33	27	structure	structure	NOUN
ajst-5047	33	28	,	,	PUNCT
ajst-5047	33	29	good	good	ADJ
ajst-5047	33	30	adhesion	adhesion	NOUN
ajst-5047	33	31	,	,	PUNCT
ajst-5047	33	32	low	low	ADJ
ajst-5047	33	33	deposition	deposition	NOUN
ajst-5047	33	34	temperature	temperature	NOUN
ajst-5047	33	35	and	and	CCONJ
ajst-5047	33	36	environmental	environmental	ADJ
ajst-5047	33	37	protection	protection	NOUN
ajst-5047	33	38	[	[	X
ajst-5047	33	39	17	17	NUM
ajst-5047	33	40	]	]	PUNCT
ajst-5047	33	41	.	.	PUNCT
ajst-5047	34	1	pvd	pvd	PROPN
ajst-5047	34	2	coating	coating	NOUN
ajst-5047	34	3	has	have	VERB
ajst-5047	34	4	a	a	DET
ajst-5047	34	5	very	very	ADV
ajst-5047	34	6	wide	wide	ADJ
ajst-5047	34	7	range	range	NOUN
ajst-5047	34	8	of	of	ADP
ajst-5047	34	9	applications	application	NOUN
ajst-5047	34	10	,	,	PUNCT
ajst-5047	34	11	as	as	ADV
ajst-5047	34	12	large	large	ADJ
ajst-5047	34	13	as	as	ADP
ajst-5047	34	14	automotive	automotive	ADJ
ajst-5047	34	15	aircraft	aircraft	NOUN
ajst-5047	34	16	parts	part	NOUN
ajst-5047	34	17	protection	protection	NOUN
ajst-5047	34	18	,	,	PUNCT
ajst-5047	34	19	small	small	ADJ
ajst-5047	34	20	tool	tool	NOUN
ajst-5047	34	21	surface	surface	NOUN
ajst-5047	34	22	.	.	PUNCT
ajst-5047	35	1	the	the	DET
ajst-5047	35	2	basic	basic	ADJ
ajst-5047	35	3	principle	principle	NOUN
ajst-5047	35	4	of	of	ADP
ajst-5047	35	5	pvd	pvd	PROPN
ajst-5047	35	6	is	be	AUX
ajst-5047	35	7	to	to	PART
ajst-5047	35	8	convert	convert	VERB
ajst-5047	35	9	solid	solid	ADJ
ajst-5047	35	10	materials	material	NOUN
ajst-5047	35	11	into	into	ADP
ajst-5047	35	12	vapor	vapor	NOUN
ajst-5047	35	13	atoms	atom	NOUN
ajst-5047	35	14	in	in	ADP
ajst-5047	35	15	the	the	DET
ajst-5047	35	16	form	form	NOUN
ajst-5047	35	17	of	of	ADP
ajst-5047	35	18	evaporation	evaporation	NOUN
ajst-5047	35	19	or	or	CCONJ
ajst-5047	35	20	ionization	ionization	NOUN
ajst-5047	35	21	in	in	ADP
ajst-5047	35	22	a	a	DET
ajst-5047	35	23	vacuum	vacuum	NOUN
ajst-5047	35	24	environment	environment	NOUN
ajst-5047	35	25	,	,	PUNCT
ajst-5047	35	26	and	and	CCONJ
ajst-5047	35	27	then	then	ADV
ajst-5047	35	28	transfer	transfer	VERB
ajst-5047	35	29	these	these	DET
ajst-5047	35	30	atoms	atom	NOUN
ajst-5047	35	31	to	to	ADP
ajst-5047	35	32	the	the	DET
ajst-5047	35	33	substrate	substrate	NOUN
ajst-5047	35	34	surface	surface	NOUN
ajst-5047	35	35	to	to	PART
ajst-5047	35	36	form	form	VERB
ajst-5047	35	37	a	a	DET
ajst-5047	35	38	solid	solid	ADJ
ajst-5047	35	39	film	film	NOUN
ajst-5047	35	40	.	.	PUNCT
ajst-5047	36	1	the	the	DET
ajst-5047	36	2	coating	coating	NOUN
ajst-5047	36	3	prepared	prepare	VERB
ajst-5047	36	4	by	by	ADP
ajst-5047	36	5	pvd	pvd	PROPN
ajst-5047	36	6	has	have	VERB
ajst-5047	36	7	high	high	ADJ
ajst-5047	36	8	hardness	hardness	NOUN
ajst-5047	36	9	,	,	PUNCT
ajst-5047	36	10	heat	heat	NOUN
ajst-5047	36	11	resistance	resistance	NOUN
ajst-5047	36	12	,	,	PUNCT
ajst-5047	36	13	wear	wear	VERB
ajst-5047	36	14	resistance	resistance	NOUN
ajst-5047	36	15	and	and	CCONJ
ajst-5047	36	16	corrosion	corrosion	NOUN
ajst-5047	36	17	resistance	resistance	NOUN
ajst-5047	36	18	.	.	PUNCT
ajst-5047	37	1	pvd	pvd	PROPN
ajst-5047	37	2	preparation	preparation	NOUN
ajst-5047	37	3	technology	technology	NOUN
ajst-5047	37	4	is	be	AUX
ajst-5047	37	5	mainly	mainly	ADV
ajst-5047	37	6	used	use	VERB
ajst-5047	37	7	for	for	ADP
ajst-5047	37	8	coating	coat	VERB
ajst-5047	37	9	preparation	preparation	NOUN
ajst-5047	37	10	in	in	ADP
ajst-5047	37	11	vacuum	vacuum	PROPN
ajst-5047	37	12	environment	environment	NOUN
ajst-5047	37	13	,	,	PUNCT
ajst-5047	37	14	which	which	PRON
ajst-5047	37	15	has	have	VERB
ajst-5047	37	16	relatively	relatively	ADV
ajst-5047	37	17	lower	low	ADJ
ajst-5047	37	18	pollution	pollution	NOUN
ajst-5047	37	19	to	to	ADP
ajst-5047	37	20	the	the	DET
ajst-5047	37	21	environment	environment	NOUN
ajst-5047	37	22	compared	compare	VERB
ajst-5047	37	23	with	with	ADP
ajst-5047	37	24	cvd	cvd	PROPN
ajst-5047	37	25	.	.	PUNCT
ajst-5047	38	1	in	in	ADP
ajst-5047	38	2	addition	addition	NOUN
ajst-5047	38	3	,	,	PUNCT
ajst-5047	38	4	the	the	DET
ajst-5047	38	5	coating	coating	NOUN
ajst-5047	38	6	deposited	deposit	VERB
ajst-5047	38	7	by	by	ADP
ajst-5047	38	8	pvd	pvd	PROPN
ajst-5047	38	9	technology	technology	NOUN
ajst-5047	38	10	is	be	AUX
ajst-5047	38	11	very	very	ADV
ajst-5047	38	12	thin	thin	ADJ
ajst-5047	38	13	and	and	CCONJ
ajst-5047	38	14	has	have	VERB
ajst-5047	38	15	a	a	DET
ajst-5047	38	16	high	high	ADJ
ajst-5047	38	17	density	density	NOUN
ajst-5047	38	18	,	,	PUNCT
ajst-5047	38	19	so	so	ADV
ajst-5047	38	20	different	different	ADJ
ajst-5047	38	21	coatings	coating	NOUN
ajst-5047	38	22	can	can	AUX
ajst-5047	38	23	be	be	AUX
ajst-5047	38	24	deposited	deposit	VERB
ajst-5047	38	25	on	on	ADP
ajst-5047	38	26	the	the	DET
ajst-5047	38	27	same	same	ADJ
ajst-5047	38	28	substrate	substrate	NOUN
ajst-5047	38	29	according	accord	VERB
ajst-5047	38	30	to	to	ADP
ajst-5047	38	31	requirements	requirement	NOUN
ajst-5047	38	32	to	to	PART
ajst-5047	38	33	improve	improve	VERB
ajst-5047	38	34	the	the	DET
ajst-5047	38	35	surface	surface	NOUN
ajst-5047	38	36	performance	performance	NOUN
ajst-5047	38	37	of	of	ADP
ajst-5047	38	38	the	the	DET
ajst-5047	38	39	substrate	substrate	NOUN
ajst-5047	38	40	.	.	PUNCT
ajst-5047	39	1	however	however	ADV
ajst-5047	39	2	,	,	PUNCT
ajst-5047	39	3	the	the	DET
ajst-5047	39	4	pvd	pvd	PROPN
ajst-5047	39	5	technology	technology	NOUN
ajst-5047	39	6	requires	require	VERB
ajst-5047	39	7	a	a	DET
ajst-5047	39	8	greater	great	ADJ
ajst-5047	39	9	energy	energy	NOUN
ajst-5047	39	10	consumption	consumption	NOUN
ajst-5047	39	11	,	,	PUNCT
ajst-5047	39	12	147	147	NUM
ajst-5047	39	13	accounting	account	VERB
ajst-5047	39	14	for	for	ADP
ajst-5047	39	15	33.5	33.5	NUM
ajst-5047	39	16	%	%	NOUN
ajst-5047	39	17	of	of	ADP
ajst-5047	39	18	the	the	DET
ajst-5047	39	19	consumption	consumption	NOUN
ajst-5047	39	20	in	in	ADP
ajst-5047	39	21	the	the	DET
ajst-5047	39	22	cvd	cvd	PROPN
ajst-5047	39	23	process	process	NOUN
ajst-5047	39	24	and	and	CCONJ
ajst-5047	39	25	77.7	77.7	NUM
ajst-5047	39	26	%	%	NOUN
ajst-5047	39	27	in	in	ADP
ajst-5047	39	28	the	the	DET
ajst-5047	39	29	pvd	pvd	PROPN
ajst-5047	39	30	process	process	NOUN
ajst-5047	39	31	during	during	ADP
ajst-5047	39	32	the	the	DET
ajst-5047	39	33	same	same	ADJ
ajst-5047	39	34	deposition	deposition	NOUN
ajst-5047	39	35	step	step	NOUN
ajst-5047	39	36	[	[	X
ajst-5047	39	37	18	18	NUM
ajst-5047	39	38	]	]	PUNCT
ajst-5047	39	39	.	.	PUNCT
ajst-5047	40	1	with	with	ADP
ajst-5047	40	2	the	the	DET
ajst-5047	40	3	continuous	continuous	ADJ
ajst-5047	40	4	improvement	improvement	NOUN
ajst-5047	40	5	of	of	ADP
ajst-5047	40	6	social	social	ADJ
ajst-5047	40	7	demand	demand	NOUN
ajst-5047	40	8	,	,	PUNCT
ajst-5047	40	9	physical	physical	ADJ
ajst-5047	40	10	vapor	vapor	NOUN
ajst-5047	40	11	deposition	deposition	NOUN
ajst-5047	40	12	technology	technology	NOUN
ajst-5047	40	13	has	have	AUX
ajst-5047	40	14	been	be	AUX
ajst-5047	40	15	developed	develop	VERB
ajst-5047	40	16	and	and	CCONJ
ajst-5047	40	17	optimized	optimize	VERB
ajst-5047	40	18	,	,	PUNCT
ajst-5047	40	19	and	and	CCONJ
ajst-5047	40	20	some	some	DET
ajst-5047	40	21	branches	branch	NOUN
ajst-5047	40	22	have	have	AUX
ajst-5047	40	23	been	be	AUX
ajst-5047	40	24	produced	produce	VERB
ajst-5047	40	25	according	accord	VERB
ajst-5047	40	26	to	to	ADP
ajst-5047	40	27	different	different	ADJ
ajst-5047	40	28	principles	principle	NOUN
ajst-5047	40	29	.	.	PUNCT
ajst-5047	41	1	the	the	DET
ajst-5047	41	2	commonly	commonly	ADV
ajst-5047	41	3	used	use	VERB
ajst-5047	41	4	methods	method	NOUN
ajst-5047	41	5	include	include	VERB
ajst-5047	41	6	vacuum	vacuum	NOUN
ajst-5047	41	7	evaporation	evaporation	NOUN
ajst-5047	41	8	plating	plating	NOUN
ajst-5047	41	9	,	,	PUNCT
ajst-5047	41	10	ion	ion	NOUN
ajst-5047	41	11	plating	plating	NOUN
ajst-5047	41	12	,	,	PUNCT
ajst-5047	41	13	sputtering	sputtering	ADJ
ajst-5047	41	14	coating	coating	NOUN
ajst-5047	41	15	,	,	PUNCT
ajst-5047	41	16	etc.[19	etc.[19	NOUN
ajst-5047	41	17	]	]	PUNCT
ajst-5047	41	18	.	.	PUNCT
ajst-5047	42	1	vacuum	vacuum	NOUN
ajst-5047	42	2	evaporation	evaporation	NOUN
ajst-5047	42	3	coating	coating	NOUN
ajst-5047	42	4	is	be	AUX
ajst-5047	42	5	a	a	DET
ajst-5047	42	6	film	film	NOUN
ajst-5047	42	7	forming	form	VERB
ajst-5047	42	8	method	method	NOUN
ajst-5047	42	9	in	in	ADP
ajst-5047	42	10	which	which	PRON
ajst-5047	42	11	solid	solid	ADJ
ajst-5047	42	12	materials	material	NOUN
ajst-5047	42	13	are	be	AUX
ajst-5047	42	14	vaporized	vaporize	VERB
ajst-5047	42	15	in	in	ADP
ajst-5047	42	16	a	a	DET
ajst-5047	42	17	vacuum	vacuum	NOUN
ajst-5047	42	18	environment	environment	NOUN
ajst-5047	42	19	to	to	PART
ajst-5047	42	20	transform	transform	VERB
ajst-5047	42	21	them	they	PRON
ajst-5047	42	22	into	into	ADP
ajst-5047	42	23	gaseous	gaseous	ADJ
ajst-5047	42	24	state	state	NOUN
ajst-5047	42	25	,	,	PUNCT
ajst-5047	42	26	and	and	CCONJ
ajst-5047	42	27	then	then	ADV
ajst-5047	42	28	the	the	DET
ajst-5047	42	29	gaseous	gaseous	ADJ
ajst-5047	42	30	atoms	atom	NOUN
ajst-5047	42	31	are	be	AUX
ajst-5047	42	32	deposited	deposit	VERB
ajst-5047	42	33	on	on	ADP
ajst-5047	42	34	the	the	DET
ajst-5047	42	35	surface	surface	NOUN
ajst-5047	42	36	of	of	ADP
ajst-5047	42	37	the	the	DET
ajst-5047	42	38	coated	coated	ADJ
ajst-5047	42	39	product	product	NOUN
ajst-5047	42	40	.	.	PUNCT
ajst-5047	43	1	the	the	DET
ajst-5047	43	2	vacuum	vacuum	NOUN
ajst-5047	43	3	degree	degree	NOUN
ajst-5047	43	4	of	of	ADP
ajst-5047	43	5	vacuum	vacuum	NOUN
ajst-5047	43	6	coating	coating	NOUN
ajst-5047	43	7	can	can	AUX
ajst-5047	43	8	reach	reach	VERB
ajst-5047	43	9	the	the	DET
ajst-5047	43	10	level	level	NOUN
ajst-5047	43	11	of	of	ADP
ajst-5047	43	12	105~10	105~10	NUM
ajst-5047	43	13	-	-	SYM
ajst-5047	43	14	3	3	NUM
ajst-5047	43	15	.	.	PUNCT
ajst-5047	44	1	in	in	ADP
ajst-5047	44	2	this	this	DET
ajst-5047	44	3	environment	environment	NOUN
ajst-5047	44	4	,	,	PUNCT
ajst-5047	44	5	gaseous	gaseous	ADJ
ajst-5047	44	6	particles	particle	NOUN
ajst-5047	44	7	obtained	obtain	VERB
ajst-5047	44	8	can	can	AUX
ajst-5047	44	9	reach	reach	VERB
ajst-5047	44	10	the	the	DET
ajst-5047	44	11	surface	surface	NOUN
ajst-5047	44	12	of	of	ADP
ajst-5047	44	13	the	the	DET
ajst-5047	44	14	coated	coated	ADJ
ajst-5047	44	15	product	product	NOUN
ajst-5047	44	16	smoothly	smoothly	ADV
ajst-5047	44	17	.	.	PUNCT
ajst-5047	45	1	meanwhile	meanwhile	ADV
ajst-5047	45	2	,	,	PUNCT
ajst-5047	45	3	the	the	DET
ajst-5047	45	4	oxygen	oxygen	NOUN
ajst-5047	45	5	content	content	NOUN
ajst-5047	45	6	in	in	ADP
ajst-5047	45	7	the	the	DET
ajst-5047	45	8	air	air	NOUN
ajst-5047	45	9	is	be	AUX
ajst-5047	45	10	less	less	ADJ
ajst-5047	45	11	,	,	PUNCT
ajst-5047	45	12	which	which	PRON
ajst-5047	45	13	reduces	reduce	VERB
ajst-5047	45	14	the	the	DET
ajst-5047	45	15	possibility	possibility	NOUN
ajst-5047	45	16	of	of	ADP
ajst-5047	45	17	the	the	DET
ajst-5047	45	18	coating	coating	NOUN
ajst-5047	45	19	structure	structure	NOUN
ajst-5047	45	20	being	be	AUX
ajst-5047	45	21	destroyed	destroy	VERB
ajst-5047	45	22	by	by	ADP
ajst-5047	45	23	oxidation	oxidation	NOUN
ajst-5047	45	24	.	.	PUNCT
ajst-5047	46	1	vacuum	vacuum	NOUN
ajst-5047	46	2	evaporation	evaporation	NOUN
ajst-5047	46	3	technology	technology	NOUN
ajst-5047	46	4	has	have	VERB
ajst-5047	46	5	the	the	DET
ajst-5047	46	6	advantages	advantage	NOUN
ajst-5047	46	7	of	of	ADP
ajst-5047	46	8	a	a	DET
ajst-5047	46	9	wide	wide	ADJ
ajst-5047	46	10	range	range	NOUN
ajst-5047	46	11	of	of	ADP
ajst-5047	46	12	substrate	substrate	NOUN
ajst-5047	46	13	materials	material	NOUN
ajst-5047	46	14	,	,	PUNCT
ajst-5047	46	15	fine	fine	ADJ
ajst-5047	46	16	film	film	NOUN
ajst-5047	46	17	structure	structure	NOUN
ajst-5047	46	18	and	and	CCONJ
ajst-5047	46	19	high	high	ADJ
ajst-5047	46	20	purity	purity	NOUN
ajst-5047	46	21	.	.	PUNCT
ajst-5047	47	1	vacuum	vacuum	NOUN
ajst-5047	47	2	evaporation	evaporation	NOUN
ajst-5047	47	3	technology	technology	NOUN
ajst-5047	47	4	is	be	AUX
ajst-5047	47	5	the	the	DET
ajst-5047	47	6	deposition	deposition	NOUN
ajst-5047	47	7	and	and	CCONJ
ajst-5047	47	8	coating	coating	NOUN
ajst-5047	47	9	of	of	ADP
ajst-5047	47	10	materials	material	NOUN
ajst-5047	47	11	in	in	ADP
ajst-5047	47	12	the	the	DET
ajst-5047	47	13	way	way	NOUN
ajst-5047	47	14	of	of	ADP
ajst-5047	47	15	atoms	atom	NOUN
ajst-5047	47	16	,	,	PUNCT
ajst-5047	47	17	relying	rely	VERB
ajst-5047	47	18	on	on	ADP
ajst-5047	47	19	the	the	DET
ajst-5047	47	20	heat	heat	NOUN
ajst-5047	47	21	energy	energy	NOUN
ajst-5047	47	22	of	of	ADP
ajst-5047	47	23	evaporation	evaporation	NOUN
ajst-5047	47	24	to	to	PART
ajst-5047	47	25	drive	drive	VERB
ajst-5047	47	26	the	the	DET
ajst-5047	47	27	movement	movement	NOUN
ajst-5047	47	28	of	of	ADP
ajst-5047	47	29	molecules	molecule	NOUN
ajst-5047	47	30	in	in	ADP
ajst-5047	47	31	the	the	DET
ajst-5047	47	32	vacuum	vacuum	PROPN
ajst-5047	47	33	chamber	chamber	NOUN
ajst-5047	47	34	,	,	PUNCT
ajst-5047	47	35	so	so	SCONJ
ajst-5047	47	36	the	the	DET
ajst-5047	47	37	melting	melting	NOUN
ajst-5047	47	38	point	point	NOUN
ajst-5047	47	39	of	of	ADP
ajst-5047	47	40	the	the	DET
ajst-5047	47	41	evaporation	evaporation	NOUN
ajst-5047	47	42	source	source	NOUN
ajst-5047	47	43	is	be	AUX
ajst-5047	47	44	required	require	VERB
ajst-5047	47	45	to	to	PART
ajst-5047	47	46	be	be	AUX
ajst-5047	47	47	high	high	ADJ
ajst-5047	47	48	enough	enough	ADV
ajst-5047	47	49	.	.	PUNCT
ajst-5047	48	1	at	at	ADP
ajst-5047	48	2	the	the	DET
ajst-5047	48	3	same	same	ADJ
ajst-5047	48	4	time	time	NOUN
ajst-5047	48	5	,	,	PUNCT
ajst-5047	48	6	there	there	PRON
ajst-5047	48	7	is	be	VERB
ajst-5047	48	8	no	no	DET
ajst-5047	48	9	bias	bias	NOUN
ajst-5047	48	10	between	between	ADP
ajst-5047	48	11	the	the	DET
ajst-5047	48	12	substrate	substrate	NOUN
ajst-5047	48	13	and	and	CCONJ
ajst-5047	48	14	the	the	DET
ajst-5047	48	15	emission	emission	NOUN
ajst-5047	48	16	source	source	NOUN
ajst-5047	48	17	,	,	PUNCT
ajst-5047	48	18	the	the	DET
ajst-5047	48	19	kinetic	kinetic	ADJ
ajst-5047	48	20	energy	energy	NOUN
ajst-5047	48	21	of	of	ADP
ajst-5047	48	22	particles	particle	NOUN
ajst-5047	48	23	is	be	AUX
ajst-5047	48	24	low	low	ADJ
ajst-5047	48	25	,	,	PUNCT
ajst-5047	48	26	and	and	CCONJ
ajst-5047	48	27	the	the	DET
ajst-5047	48	28	binding	bind	VERB
ajst-5047	48	29	force	force	NOUN
ajst-5047	48	30	between	between	ADP
ajst-5047	48	31	the	the	DET
ajst-5047	48	32	coating	coating	NOUN
ajst-5047	48	33	and	and	CCONJ
ajst-5047	48	34	the	the	DET
ajst-5047	48	35	substrate	substrate	NOUN
ajst-5047	48	36	is	be	AUX
ajst-5047	48	37	poor	poor	ADJ
ajst-5047	48	38	.	.	PUNCT
ajst-5047	49	1	ion	ion	NOUN
ajst-5047	49	2	plating	plating	NOUN
ajst-5047	49	3	technology	technology	NOUN
ajst-5047	49	4	is	be	AUX
ajst-5047	49	5	a	a	DET
ajst-5047	49	6	kind	kind	NOUN
ajst-5047	49	7	of	of	ADP
ajst-5047	49	8	evaporation	evaporation	NOUN
ajst-5047	49	9	coating	coating	NOUN
ajst-5047	49	10	technology	technology	NOUN
ajst-5047	49	11	on	on	ADP
ajst-5047	49	12	the	the	DET
ajst-5047	49	13	basis	basis	NOUN
ajst-5047	49	14	of	of	ADP
ajst-5047	49	15	applying	apply	VERB
ajst-5047	49	16	an	an	DET
ajst-5047	49	17	electric	electric	ADJ
ajst-5047	49	18	field	field	NOUN
ajst-5047	49	19	evaporation	evaporation	NOUN
ajst-5047	49	20	of	of	ADP
ajst-5047	49	21	atoms	atom	NOUN
ajst-5047	49	22	into	into	ADP
ajst-5047	49	23	high	high	ADJ
ajst-5047	49	24	-	-	PUNCT
ajst-5047	49	25	energy	energy	NOUN
ajst-5047	49	26	ion	ion	NOUN
ajst-5047	49	27	deposition	deposition	NOUN
ajst-5047	49	28	to	to	ADP
ajst-5047	49	29	the	the	DET
ajst-5047	49	30	solid	solid	ADJ
ajst-5047	49	31	state	state	NOUN
ajst-5047	49	32	thin	thin	ADJ
ajst-5047	49	33	film	film	NOUN
ajst-5047	49	34	is	be	AUX
ajst-5047	49	35	formed	form	VERB
ajst-5047	49	36	on	on	ADP
ajst-5047	49	37	the	the	DET
ajst-5047	49	38	substrate	substrate	NOUN
ajst-5047	49	39	material	material	NOUN
ajst-5047	49	40	of	of	ADP
ajst-5047	49	41	coating	coating	NOUN
ajst-5047	49	42	technology	technology	NOUN
ajst-5047	49	43	.	.	PUNCT
ajst-5047	50	1	this	this	DET
ajst-5047	50	2	deposition	deposition	NOUN
ajst-5047	50	3	technique	technique	NOUN
ajst-5047	50	4	can	can	AUX
ajst-5047	50	5	effectively	effectively	ADV
ajst-5047	50	6	improve	improve	VERB
ajst-5047	50	7	the	the	DET
ajst-5047	50	8	adhesion	adhesion	NOUN
ajst-5047	50	9	between	between	ADP
ajst-5047	50	10	coating	coating	NOUN
ajst-5047	50	11	and	and	CCONJ
ajst-5047	50	12	substrate	substrate	NOUN
ajst-5047	50	13	.	.	PUNCT
ajst-5047	51	1	with	with	ADP
ajst-5047	51	2	the	the	DET
ajst-5047	51	3	continuous	continuous	ADJ
ajst-5047	51	4	improvement	improvement	NOUN
ajst-5047	51	5	and	and	CCONJ
ajst-5047	51	6	optimization	optimization	NOUN
ajst-5047	51	7	of	of	ADP
ajst-5047	51	8	technology	technology	NOUN
ajst-5047	51	9	,	,	PUNCT
ajst-5047	51	10	ion	ion	NOUN
ajst-5047	51	11	plating	plating	NOUN
ajst-5047	51	12	technology	technology	NOUN
ajst-5047	51	13	has	have	AUX
ajst-5047	51	14	gradually	gradually	ADV
ajst-5047	51	15	evolved	evolve	VERB
ajst-5047	51	16	from	from	ADP
ajst-5047	51	17	the	the	DET
ajst-5047	51	18	original	original	ADJ
ajst-5047	51	19	glow	glow	NOUN
ajst-5047	51	20	discharge	discharge	NOUN
ajst-5047	51	21	ion	ion	NOUN
ajst-5047	51	22	plating	plating	NOUN
ajst-5047	51	23	technology	technology	NOUN
ajst-5047	51	24	to	to	PART
ajst-5047	51	25	arc	arc	VERB
ajst-5047	51	26	ion	ion	NOUN
ajst-5047	51	27	plating	plating	NOUN
ajst-5047	51	28	technology	technology	NOUN
ajst-5047	51	29	,	,	PUNCT
ajst-5047	51	30	which	which	PRON
ajst-5047	51	31	includes	include	VERB
ajst-5047	51	32	hollow	hollow	ADJ
ajst-5047	51	33	cathode	cathode	NOUN
ajst-5047	51	34	ion	ion	NOUN
ajst-5047	51	35	plating	plating	NOUN
ajst-5047	51	36	technology	technology	NOUN
ajst-5047	51	37	,	,	PUNCT
ajst-5047	51	38	hot	hot	ADJ
ajst-5047	51	39	wire	wire	NOUN
ajst-5047	51	40	arc	arc	NOUN
ajst-5047	51	41	ion	ion	NOUN
ajst-5047	51	42	plating	plating	NOUN
ajst-5047	51	43	technology	technology	NOUN
ajst-5047	51	44	,	,	PUNCT
ajst-5047	51	45	cathode	cathode	NOUN
ajst-5047	51	46	arc	arc	NOUN
ajst-5047	51	47	ion	ion	NOUN
ajst-5047	51	48	plating	plating	NOUN
ajst-5047	51	49	technology	technology	NOUN
ajst-5047	51	50	,	,	PUNCT
ajst-5047	51	51	etc	etc	X
ajst-5047	51	52	.	.	X
ajst-5047	51	53	arc	arc	NOUN
ajst-5047	51	54	discharge	discharge	VERB
ajst-5047	51	55	ion	ion	NOUN
ajst-5047	51	56	plating	plating	NOUN
ajst-5047	51	57	technology	technology	NOUN
ajst-5047	51	58	is	be	AUX
ajst-5047	51	59	characterized	characterize	VERB
ajst-5047	51	60	by	by	ADP
ajst-5047	51	61	high	high	ADJ
ajst-5047	51	62	plasma	plasma	NOUN
ajst-5047	51	63	density	density	NOUN
ajst-5047	51	64	,	,	PUNCT
ajst-5047	51	65	high	high	ADJ
ajst-5047	51	66	metal	metal	NOUN
ajst-5047	51	67	ionization	ionization	NOUN
ajst-5047	51	68	rate	rate	NOUN
ajst-5047	51	69	,	,	PUNCT
ajst-5047	51	70	high	high	ADJ
ajst-5047	51	71	ion	ion	NOUN
ajst-5047	51	72	activity	activity	NOUN
ajst-5047	51	73	in	in	ADP
ajst-5047	51	74	the	the	DET
ajst-5047	51	75	film	film	NOUN
ajst-5047	51	76	layer	layer	NOUN
ajst-5047	51	77	,	,	PUNCT
ajst-5047	51	78	and	and	CCONJ
ajst-5047	51	79	easy	easy	ADJ
ajst-5047	51	80	to	to	PART
ajst-5047	51	81	react	react	VERB
ajst-5047	51	82	into	into	ADP
ajst-5047	51	83	compound	compound	NOUN
ajst-5047	51	84	coatings	coating	NOUN
ajst-5047	51	85	.	.	PUNCT
ajst-5047	52	1	in	in	ADP
ajst-5047	52	2	the	the	DET
ajst-5047	52	3	process	process	NOUN
ajst-5047	52	4	of	of	ADP
ajst-5047	52	5	coating	coat	VERB
ajst-5047	52	6	deposition	deposition	NOUN
ajst-5047	52	7	,	,	PUNCT
ajst-5047	52	8	high	high	ADJ
ajst-5047	52	9	-	-	PUNCT
ajst-5047	52	10	energy	energy	NOUN
ajst-5047	52	11	ions	ion	NOUN
ajst-5047	52	12	can	can	AUX
ajst-5047	52	13	clean	clean	VERB
ajst-5047	52	14	the	the	DET
ajst-5047	52	15	surface	surface	NOUN
ajst-5047	52	16	of	of	ADP
ajst-5047	52	17	the	the	DET
ajst-5047	52	18	sample	sample	NOUN
ajst-5047	52	19	,	,	PUNCT
ajst-5047	52	20	remove	remove	VERB
ajst-5047	52	21	impurities	impurity	NOUN
ajst-5047	52	22	on	on	ADP
ajst-5047	52	23	the	the	DET
ajst-5047	52	24	surface	surface	NOUN
ajst-5047	52	25	of	of	ADP
ajst-5047	52	26	the	the	DET
ajst-5047	52	27	sample	sample	NOUN
ajst-5047	52	28	,	,	PUNCT
ajst-5047	52	29	and	and	CCONJ
ajst-5047	52	30	improve	improve	VERB
ajst-5047	52	31	the	the	DET
ajst-5047	52	32	binding	bind	VERB
ajst-5047	52	33	strength	strength	NOUN
ajst-5047	52	34	of	of	ADP
ajst-5047	52	35	the	the	DET
ajst-5047	52	36	coating	coating	NOUN
ajst-5047	52	37	.	.	PUNCT
ajst-5047	53	1	however	however	ADV
ajst-5047	53	2	,	,	PUNCT
ajst-5047	53	3	at	at	ADP
ajst-5047	53	4	the	the	DET
ajst-5047	53	5	same	same	ADJ
ajst-5047	53	6	time	time	NOUN
ajst-5047	53	7	,	,	PUNCT
ajst-5047	53	8	the	the	DET
ajst-5047	53	9	surface	surface	NOUN
ajst-5047	53	10	of	of	ADP
ajst-5047	53	11	the	the	DET
ajst-5047	53	12	coating	coating	NOUN
ajst-5047	53	13	deposited	deposit	VERB
ajst-5047	53	14	by	by	ADP
ajst-5047	53	15	highenergy	highenergy	NOUN
ajst-5047	53	16	ions	ion	NOUN
ajst-5047	53	17	is	be	AUX
ajst-5047	53	18	rough	rough	ADJ
ajst-5047	53	19	,	,	PUNCT
ajst-5047	53	20	which	which	PRON
ajst-5047	53	21	reduces	reduce	VERB
ajst-5047	53	22	the	the	DET
ajst-5047	53	23	overall	overall	ADJ
ajst-5047	53	24	performance	performance	NOUN
ajst-5047	53	25	of	of	ADP
ajst-5047	53	26	the	the	DET
ajst-5047	53	27	coating	coating	NOUN
ajst-5047	53	28	.	.	PUNCT
ajst-5047	54	1	the	the	DET
ajst-5047	54	2	main	main	ADJ
ajst-5047	54	3	principle	principle	NOUN
ajst-5047	54	4	of	of	ADP
ajst-5047	54	5	magnetron	magnetron	NOUN
ajst-5047	54	6	sputtering	sputtering	NOUN
ajst-5047	54	7	technology	technology	NOUN
ajst-5047	54	8	is	be	AUX
ajst-5047	54	9	to	to	PART
ajst-5047	54	10	establish	establish	VERB
ajst-5047	54	11	a	a	DET
ajst-5047	54	12	magnetic	magnetic	ADJ
ajst-5047	54	13	field	field	NOUN
ajst-5047	54	14	perpendicular	perpendicular	NOUN
ajst-5047	54	15	to	to	ADP
ajst-5047	54	16	the	the	DET
ajst-5047	54	17	electric	electric	ADJ
ajst-5047	54	18	field	field	NOUN
ajst-5047	54	19	on	on	ADP
ajst-5047	54	20	the	the	DET
ajst-5047	54	21	basis	basis	NOUN
ajst-5047	54	22	of	of	ADP
ajst-5047	54	23	ion	ion	NOUN
ajst-5047	54	24	plating	plating	NOUN
ajst-5047	54	25	.	.	PUNCT
ajst-5047	55	1	at	at	ADP
ajst-5047	55	2	the	the	DET
ajst-5047	55	3	same	same	ADJ
ajst-5047	55	4	time	time	NOUN
ajst-5047	55	5	,	,	PUNCT
ajst-5047	55	6	ions	ion	NOUN
ajst-5047	55	7	generated	generate	VERB
ajst-5047	55	8	by	by	ADP
ajst-5047	55	9	the	the	DET
ajst-5047	55	10	protective	protective	ADJ
ajst-5047	55	11	gas	gas	NOUN
ajst-5047	55	12	in	in	ADP
ajst-5047	55	13	the	the	DET
ajst-5047	55	14	glow	glow	NOUN
ajst-5047	55	15	discharge	discharge	NOUN
ajst-5047	55	16	process	process	NOUN
ajst-5047	55	17	are	be	AUX
ajst-5047	55	18	used	use	VERB
ajst-5047	55	19	to	to	PART
ajst-5047	55	20	bombard	bombard	VERB
ajst-5047	55	21	the	the	DET
ajst-5047	55	22	cathode	cathode	NOUN
ajst-5047	55	23	target	target	NOUN
ajst-5047	55	24	,	,	PUNCT
ajst-5047	55	25	and	and	CCONJ
ajst-5047	55	26	the	the	DET
ajst-5047	55	27	film	film	NOUN
ajst-5047	55	28	-	-	PUNCT
ajst-5047	55	29	forming	form	VERB
ajst-5047	55	30	particles	particle	NOUN
ajst-5047	55	31	produced	produce	VERB
ajst-5047	55	32	by	by	ADP
ajst-5047	55	33	sputtering	sputtering	NOUN
ajst-5047	55	34	are	be	AUX
ajst-5047	55	35	used	use	VERB
ajst-5047	55	36	to	to	PART
ajst-5047	55	37	crystallize	crystallize	VERB
ajst-5047	55	38	and	and	CCONJ
ajst-5047	55	39	solidify	solidify	VERB
ajst-5047	55	40	on	on	ADP
ajst-5047	55	41	the	the	DET
ajst-5047	55	42	substrate	substrate	NOUN
ajst-5047	56	1	[	[	X
ajst-5047	56	2	20	20	NUM
ajst-5047	56	3	]	]	PUNCT
ajst-5047	56	4	.	.	PUNCT
ajst-5047	57	1	compared	compare	VERB
ajst-5047	57	2	with	with	ADP
ajst-5047	57	3	vacuum	vacuum	NOUN
ajst-5047	57	4	evaporation	evaporation	NOUN
ajst-5047	57	5	,	,	PUNCT
ajst-5047	57	6	the	the	DET
ajst-5047	57	7	substrate	substrate	NOUN
ajst-5047	57	8	temperature	temperature	NOUN
ajst-5047	57	9	rises	rise	NOUN
ajst-5047	57	10	of	of	ADP
ajst-5047	57	11	magnetron	magnetron	NOUN
ajst-5047	57	12	sputtering	sputtering	NOUN
ajst-5047	57	13	technology	technology	NOUN
ajst-5047	57	14	is	be	AUX
ajst-5047	57	15	lower	low	ADJ
ajst-5047	57	16	and	and	CCONJ
ajst-5047	57	17	the	the	DET
ajst-5047	57	18	coating	coat	VERB
ajst-5047	57	19	bonding	bonding	NOUN
ajst-5047	57	20	strength	strength	NOUN
ajst-5047	57	21	is	be	AUX
ajst-5047	57	22	stronger	strong	ADJ
ajst-5047	57	23	.	.	PUNCT
ajst-5047	58	1	compared	compare	VERB
ajst-5047	58	2	with	with	ADP
ajst-5047	58	3	ion	ion	NOUN
ajst-5047	58	4	plating	plating	NOUN
ajst-5047	58	5	technology	technology	NOUN
ajst-5047	58	6	,	,	PUNCT
ajst-5047	58	7	the	the	DET
ajst-5047	58	8	films	film	NOUN
ajst-5047	58	9	deposited	deposit	VERB
ajst-5047	58	10	by	by	ADP
ajst-5047	58	11	magnetron	magnetron	NOUN
ajst-5047	58	12	sputtering	sputtering	NOUN
ajst-5047	58	13	technology	technology	NOUN
ajst-5047	58	14	are	be	AUX
ajst-5047	58	15	denser	dense	ADJ
ajst-5047	58	16	and	and	CCONJ
ajst-5047	58	17	smoother	smooth	ADJ
ajst-5047	58	18	in	in	ADP
ajst-5047	58	19	surface	surface	NOUN
ajst-5047	58	20	,	,	PUNCT
ajst-5047	58	21	and	and	CCONJ
ajst-5047	58	22	are	be	AUX
ajst-5047	58	23	widely	widely	ADV
ajst-5047	58	24	used	use	VERB
ajst-5047	58	25	in	in	ADP
ajst-5047	58	26	the	the	DET
ajst-5047	58	27	preparation	preparation	NOUN
ajst-5047	58	28	of	of	ADP
ajst-5047	58	29	various	various	ADJ
ajst-5047	58	30	tool	tool	NOUN
ajst-5047	58	31	coatings	coating	NOUN
ajst-5047	58	32	.	.	PUNCT
ajst-5047	59	1	2.3	2.3	NUM
ajst-5047	59	2	.	.	PUNCT
ajst-5047	60	1	magnetron	magnetron	NOUN
ajst-5047	60	2	sputtering	sputtering	ADJ
ajst-5047	60	3	technology	technology	NOUN
ajst-5047	60	4	according	accord	VERB
ajst-5047	60	5	to	to	ADP
ajst-5047	60	6	the	the	DET
ajst-5047	60	7	type	type	NOUN
ajst-5047	60	8	of	of	ADP
ajst-5047	60	9	target	target	NOUN
ajst-5047	60	10	material	material	NOUN
ajst-5047	60	11	,	,	PUNCT
ajst-5047	60	12	magnetron	magnetron	NOUN
ajst-5047	60	13	sputtering	sputter	VERB
ajst-5047	60	14	technology	technology	NOUN
ajst-5047	60	15	can	can	AUX
ajst-5047	60	16	be	be	AUX
ajst-5047	60	17	divided	divide	VERB
ajst-5047	60	18	into	into	ADP
ajst-5047	60	19	three	three	NUM
ajst-5047	60	20	categories	category	NOUN
ajst-5047	60	21	,	,	PUNCT
ajst-5047	60	22	namely	namely	ADV
ajst-5047	60	23	two	two	NUM
ajst-5047	60	24	-	-	PUNCT
ajst-5047	60	25	stage	stage	NOUN
ajst-5047	60	26	sputtering	sputtering	ADJ
ajst-5047	60	27	coating	coating	NOUN
ajst-5047	60	28	,	,	PUNCT
ajst-5047	60	29	planar	planar	ADJ
ajst-5047	60	30	target	target	NOUN
ajst-5047	60	31	magnetron	magnetron	NOUN
ajst-5047	60	32	sputtering	sputtering	ADJ
ajst-5047	60	33	coating	coating	NOUN
ajst-5047	60	34	and	and	CCONJ
ajst-5047	60	35	cylindrical	cylindrical	ADJ
ajst-5047	60	36	target	target	NOUN
ajst-5047	60	37	magnetron	magnetron	NOUN
ajst-5047	60	38	sputtering	sputter	VERB
ajst-5047	60	39	coating	coating	NOUN
ajst-5047	60	40	,	,	PUNCT
ajst-5047	60	41	while	while	SCONJ
ajst-5047	60	42	planar	planar	ADJ
ajst-5047	60	43	target	target	NOUN
ajst-5047	60	44	magnetron	magnetron	NOUN
ajst-5047	60	45	sputtering	sputtering	NOUN
ajst-5047	60	46	is	be	AUX
ajst-5047	60	47	currently	currently	ADV
ajst-5047	60	48	commonly	commonly	ADV
ajst-5047	60	49	used	use	VERB
ajst-5047	60	50	pulsed	pulse	VERB
ajst-5047	60	51	dc	dc	PROPN
ajst-5047	60	52	magnetron	magnetron	NOUN
ajst-5047	60	53	sputtering	sputtering	NOUN
ajst-5047	60	54	technology	technology	NOUN
ajst-5047	60	55	,	,	PUNCT
ajst-5047	60	56	high	high	ADJ
ajst-5047	60	57	power	power	NOUN
ajst-5047	60	58	pulsed	pulse	VERB
ajst-5047	60	59	magnetron	magnetron	NOUN
ajst-5047	60	60	sputtering	sputter	VERB
ajst-5047	60	61	technology	technology	NOUN
ajst-5047	60	62	,	,	PUNCT
ajst-5047	60	63	high	high	ADJ
ajst-5047	60	64	power	power	NOUN
ajst-5047	60	65	pulsed	pulse	VERB
ajst-5047	60	66	magnetron	magnetron	NOUN
ajst-5047	60	67	sputtering	sputter	VERB
ajst-5047	60	68	and	and	CCONJ
ajst-5047	60	69	pulsed	pulse	VERB
ajst-5047	60	70	dc	dc	PROPN
ajst-5047	60	71	magnetron	magnetron	ADJ
ajst-5047	60	72	sputtering	sputtering	ADJ
ajst-5047	60	73	composite	composite	ADJ
ajst-5047	60	74	technology	technology	NOUN
ajst-5047	60	75	.	.	PUNCT
ajst-5047	61	1	although	although	SCONJ
ajst-5047	61	2	pulsed	pulse	VERB
ajst-5047	61	3	dc	dc	PROPN
ajst-5047	61	4	magnetron	magnetron	NOUN
ajst-5047	61	5	sputtering	sputtering	NOUN
ajst-5047	61	6	technology	technology	NOUN
ajst-5047	61	7	can	can	AUX
ajst-5047	61	8	theoretically	theoretically	ADV
ajst-5047	61	9	reduce	reduce	VERB
ajst-5047	61	10	or	or	CCONJ
ajst-5047	61	11	even	even	ADV
ajst-5047	61	12	eliminate	eliminate	VERB
ajst-5047	61	13	the	the	DET
ajst-5047	61	14	cluster	cluster	NOUN
ajst-5047	61	15	particles	particle	NOUN
ajst-5047	61	16	produced	produce	VERB
ajst-5047	61	17	by	by	ADP
ajst-5047	61	18	arc	arc	NOUN
ajst-5047	61	19	ion	ion	NOUN
ajst-5047	61	20	coating	coating	NOUN
ajst-5047	61	21	technology	technology	NOUN
ajst-5047	61	22	,	,	PUNCT
ajst-5047	61	23	the	the	DET
ajst-5047	61	24	ionization	ionization	NOUN
ajst-5047	61	25	rate	rate	NOUN
ajst-5047	61	26	of	of	ADP
ajst-5047	61	27	pulsed	pulse	VERB
ajst-5047	61	28	dc	dc	PROPN
ajst-5047	61	29	magnetron	magnetron	NOUN
ajst-5047	61	30	sputtering	sputtering	NOUN
ajst-5047	61	31	is	be	AUX
ajst-5047	61	32	low	low	ADJ
ajst-5047	61	33	,	,	PUNCT
ajst-5047	61	34	making	make	VERB
ajst-5047	61	35	it	it	PRON
ajst-5047	61	36	difficult	difficult	ADJ
ajst-5047	61	37	to	to	PART
ajst-5047	61	38	control	control	VERB
ajst-5047	61	39	the	the	DET
ajst-5047	61	40	forming	forming	NOUN
ajst-5047	61	41	of	of	ADP
ajst-5047	61	42	a	a	DET
ajst-5047	61	43	large	large	ADJ
ajst-5047	61	44	number	number	NOUN
ajst-5047	61	45	of	of	ADP
ajst-5047	61	46	ions	ion	NOUN
ajst-5047	61	47	.	.	PUNCT
ajst-5047	62	1	the	the	DET
ajst-5047	62	2	instantaneous	instantaneous	ADJ
ajst-5047	62	3	power	power	NOUN
ajst-5047	62	4	of	of	ADP
ajst-5047	62	5	high	high	ADJ
ajst-5047	62	6	-	-	PUNCT
ajst-5047	62	7	power	power	NOUN
ajst-5047	62	8	pulsed	pulse	VERB
ajst-5047	62	9	magnetron	magnetron	NOUN
ajst-5047	62	10	sputtering	sputtering	NOUN
ajst-5047	62	11	technology	technology	NOUN
ajst-5047	62	12	is	be	AUX
ajst-5047	62	13	3	3	NUM
ajst-5047	62	14	orders	order	NOUN
ajst-5047	62	15	of	of	ADP
ajst-5047	62	16	magnitude	magnitude	NOUN
ajst-5047	62	17	higher	high	ADJ
ajst-5047	62	18	than	than	ADP
ajst-5047	62	19	the	the	DET
ajst-5047	62	20	normal	normal	ADJ
ajst-5047	62	21	value	value	NOUN
ajst-5047	62	22	,	,	PUNCT
ajst-5047	62	23	and	and	CCONJ
ajst-5047	62	24	the	the	DET
ajst-5047	62	25	ionization	ionization	NOUN
ajst-5047	62	26	rate	rate	NOUN
ajst-5047	62	27	is	be	AUX
ajst-5047	62	28	higher	high	ADJ
ajst-5047	62	29	,	,	PUNCT
ajst-5047	62	30	which	which	PRON
ajst-5047	62	31	improves	improve	VERB
ajst-5047	62	32	the	the	DET
ajst-5047	62	33	nucleation	nucleation	NOUN
ajst-5047	62	34	rate	rate	NOUN
ajst-5047	62	35	and	and	CCONJ
ajst-5047	62	36	mobility	mobility	NOUN
ajst-5047	62	37	of	of	ADP
ajst-5047	62	38	the	the	DET
ajst-5047	62	39	coating	coating	NOUN
ajst-5047	62	40	,	,	PUNCT
ajst-5047	62	41	and	and	CCONJ
ajst-5047	62	42	greatly	greatly	ADV
ajst-5047	62	43	promotes	promote	VERB
ajst-5047	62	44	the	the	DET
ajst-5047	62	45	growth	growth	NOUN
ajst-5047	62	46	of	of	ADP
ajst-5047	62	47	the	the	DET
ajst-5047	62	48	film	film	NOUN
ajst-5047	62	49	[	[	X
ajst-5047	62	50	21	21	NUM
ajst-5047	62	51	]	]	PUNCT
ajst-5047	62	52	.	.	PUNCT
ajst-5047	63	1	it	it	PRON
ajst-5047	63	2	has	have	AUX
ajst-5047	63	3	been	be	AUX
ajst-5047	63	4	proved	prove	VERB
ajst-5047	63	5	by	by	ADP
ajst-5047	63	6	experiments	experiment	NOUN
ajst-5047	63	7	that	that	SCONJ
ajst-5047	63	8	highpower	highpower	PROPN
ajst-5047	63	9	pulsed	pulse	VERB
ajst-5047	63	10	magnetron	magnetron	NOUN
ajst-5047	63	11	sputtering	sputtering	NOUN
ajst-5047	63	12	technology	technology	NOUN
ajst-5047	63	13	can	can	AUX
ajst-5047	63	14	further	far	ADV
ajst-5047	63	15	densify	densify	VERB
ajst-5047	63	16	and	and	CCONJ
ajst-5047	63	17	smooth	smooth	VERB
ajst-5047	63	18	the	the	DET
ajst-5047	63	19	surface	surface	NOUN
ajst-5047	63	20	of	of	ADP
ajst-5047	63	21	the	the	DET
ajst-5047	63	22	coating	coating	NOUN
ajst-5047	64	1	[	[	X
ajst-5047	64	2	21	21	NUM
ajst-5047	64	3	-	-	SYM
ajst-5047	64	4	23	23	NUM
ajst-5047	64	5	]	]	PUNCT
ajst-5047	64	6	.	.	PUNCT
ajst-5047	65	1	however	however	ADV
ajst-5047	65	2	,	,	PUNCT
ajst-5047	65	3	metal	metal	NOUN
ajst-5047	65	4	ions	ion	NOUN
ajst-5047	65	5	ionized	ionize	VERB
ajst-5047	65	6	from	from	ADP
ajst-5047	65	7	the	the	DET
ajst-5047	65	8	surface	surface	NOUN
ajst-5047	65	9	of	of	ADP
ajst-5047	65	10	the	the	DET
ajst-5047	65	11	target	target	NOUN
ajst-5047	65	12	are	be	AUX
ajst-5047	65	13	sucked	suck	VERB
ajst-5047	65	14	back	back	ADV
ajst-5047	65	15	,	,	PUNCT
ajst-5047	65	16	and	and	CCONJ
ajst-5047	65	17	the	the	DET
ajst-5047	65	18	deposition	deposition	NOUN
ajst-5047	65	19	rate	rate	NOUN
ajst-5047	65	20	of	of	ADP
ajst-5047	65	21	high	high	ADJ
ajst-5047	65	22	-	-	PUNCT
ajst-5047	65	23	power	power	NOUN
ajst-5047	65	24	pulsed	pulse	VERB
ajst-5047	65	25	magnetron	magnetron	NOUN
ajst-5047	65	26	sputtering	sputtering	NOUN
ajst-5047	65	27	is	be	AUX
ajst-5047	65	28	relatively	relatively	ADV
ajst-5047	65	29	low	low	ADJ
ajst-5047	65	30	,	,	PUNCT
ajst-5047	65	31	which	which	PRON
ajst-5047	65	32	restricts	restrict	VERB
ajst-5047	65	33	its	its	PRON
ajst-5047	65	34	development	development	NOUN
ajst-5047	65	35	[	[	X
ajst-5047	65	36	24	24	NUM
ajst-5047	65	37	]	]	PUNCT
ajst-5047	65	38	.	.	PUNCT
ajst-5047	66	1	high	high	ADJ
ajst-5047	66	2	power	power	NOUN
ajst-5047	66	3	pulsed	pulse	VERB
ajst-5047	66	4	magnetron	magnetron	NOUN
ajst-5047	66	5	sputtering	sputtering	NOUN
ajst-5047	66	6	technology	technology	NOUN
ajst-5047	66	7	and	and	CCONJ
ajst-5047	66	8	pulsed	pulse	VERB
ajst-5047	66	9	dc	dc	PROPN
ajst-5047	66	10	magnetron	magnetron	NOUN
ajst-5047	66	11	sputtering	sputtering	NOUN
ajst-5047	66	12	technology	technology	NOUN
ajst-5047	66	13	have	have	VERB
ajst-5047	66	14	their	their	PRON
ajst-5047	66	15	own	own	ADJ
ajst-5047	66	16	advantages	advantage	NOUN
ajst-5047	66	17	and	and	CCONJ
ajst-5047	66	18	disadvantages	disadvantage	NOUN
ajst-5047	66	19	.	.	PUNCT
ajst-5047	67	1	combining	combine	VERB
ajst-5047	67	2	the	the	DET
ajst-5047	67	3	two	two	NUM
ajst-5047	67	4	technologies	technology	NOUN
ajst-5047	67	5	to	to	PART
ajst-5047	67	6	form	form	VERB
ajst-5047	67	7	a	a	DET
ajst-5047	67	8	composite	composite	ADJ
ajst-5047	67	9	technology	technology	NOUN
ajst-5047	67	10	can	can	AUX
ajst-5047	67	11	avoid	avoid	VERB
ajst-5047	67	12	the	the	DET
ajst-5047	67	13	technical	technical	ADJ
ajst-5047	67	14	defects	defect	NOUN
ajst-5047	67	15	of	of	ADP
ajst-5047	67	16	the	the	DET
ajst-5047	67	17	two	two	NUM
ajst-5047	67	18	technologies	technology	NOUN
ajst-5047	67	19	,	,	PUNCT
ajst-5047	67	20	improve	improve	VERB
ajst-5047	67	21	the	the	DET
ajst-5047	67	22	deposition	deposition	NOUN
ajst-5047	67	23	rate	rate	NOUN
ajst-5047	67	24	of	of	ADP
ajst-5047	67	25	the	the	DET
ajst-5047	67	26	coating	coating	NOUN
ajst-5047	67	27	,	,	PUNCT
ajst-5047	67	28	the	the	DET
ajst-5047	67	29	ionization	ionization	NOUN
ajst-5047	67	30	rate	rate	NOUN
ajst-5047	67	31	of	of	ADP
ajst-5047	67	32	the	the	DET
ajst-5047	67	33	sputtering	sputtering	ADJ
ajst-5047	67	34	material	material	NOUN
ajst-5047	67	35	and	and	CCONJ
ajst-5047	67	36	improve	improve	VERB
ajst-5047	67	37	the	the	DET
ajst-5047	67	38	coating	coating	NOUN
ajst-5047	67	39	performance	performance	NOUN
ajst-5047	67	40	.	.	PUNCT
ajst-5047	68	1	luo	luo	PROPN
ajst-5047	68	2	et	et	PROPN
ajst-5047	68	3	al	al	PROPN
ajst-5047	68	4	.	.	PUNCT
ajst-5047	69	1	[	[	X
ajst-5047	69	2	25	25	NUM
ajst-5047	69	3	]	]	PUNCT
ajst-5047	69	4	used	use	VERB
ajst-5047	69	5	the	the	DET
ajst-5047	69	6	composite	composite	ADJ
ajst-5047	69	7	process	process	NOUN
ajst-5047	69	8	composed	compose	VERB
ajst-5047	69	9	of	of	ADP
ajst-5047	69	10	hipims	hipim	NOUN
ajst-5047	69	11	and	and	CCONJ
ajst-5047	69	12	dcms	dcms	NOUN
ajst-5047	69	13	to	to	PART
ajst-5047	69	14	deposit	deposit	VERB
ajst-5047	69	15	tin	tin	NOUN
ajst-5047	69	16	hard	hard	ADJ
ajst-5047	69	17	coatings	coating	NOUN
ajst-5047	69	18	on	on	ADP
ajst-5047	69	19	the	the	DET
ajst-5047	69	20	hardened	harden	VERB
ajst-5047	69	21	steel	steel	NOUN
ajst-5047	69	22	matrix	matrix	NOUN
ajst-5047	69	23	.	.	PUNCT
ajst-5047	70	1	the	the	DET
ajst-5047	70	2	results	result	NOUN
ajst-5047	70	3	showed	show	VERB
ajst-5047	70	4	that	that	SCONJ
ajst-5047	70	5	the	the	DET
ajst-5047	70	6	deposition	deposition	NOUN
ajst-5047	70	7	rate	rate	NOUN
ajst-5047	70	8	of	of	ADP
ajst-5047	70	9	the	the	DET
ajst-5047	70	10	coatings	coating	NOUN
ajst-5047	70	11	reached	reach	VERB
ajst-5047	70	12	0.049un	0.049un	PROPN
ajst-5047	70	13	/	/	SYM
ajst-5047	70	14	min	min	PROPN
ajst-5047	70	15	,	,	PUNCT
ajst-5047	70	16	the	the	DET
ajst-5047	70	17	compressive	compressive	ADJ
ajst-5047	70	18	residual	residual	ADJ
ajst-5047	70	19	stress	stress	NOUN
ajst-5047	70	20	decreased	decrease	VERB
ajst-5047	70	21	significantly	significantly	ADV
ajst-5047	70	22	from	from	ADP
ajst-5047	70	23	-6.0	-6.0	PROPN
ajst-5047	70	24	to	to	ADP
ajst-5047	70	25	-3.5	-3.5	PROPN
ajst-5047	70	26	gpa	gpa	PROPN
ajst-5047	70	27	,	,	PUNCT
ajst-5047	70	28	and	and	CCONJ
ajst-5047	70	29	the	the	DET
ajst-5047	70	30	coating	coat	VERB
ajst-5047	70	31	hardness	hardness	NOUN
ajst-5047	70	32	increased	increase	VERB
ajst-5047	70	33	from	from	ADP
ajst-5047	70	34	34.8	34.8	NUM
ajst-5047	70	35	to	to	ADP
ajst-5047	70	36	38.0	38.0	NUM
ajst-5047	70	37	gpa	gpa	NOUN
ajst-5047	70	38	.	.	PUNCT
ajst-5047	71	1	the	the	DET
ajst-5047	71	2	cross	cross	NOUN
ajst-5047	71	3	section	section	NOUN
ajst-5047	71	4	of	of	ADP
ajst-5047	71	5	the	the	DET
ajst-5047	71	6	coating	coating	NOUN
ajst-5047	71	7	shows	show	VERB
ajst-5047	71	8	a	a	DET
ajst-5047	71	9	dense	dense	ADJ
ajst-5047	71	10	columnar	columnar	NOUN
ajst-5047	71	11	crystal	crystal	NOUN
ajst-5047	71	12	structure	structure	NOUN
ajst-5047	71	13	,	,	PUNCT
ajst-5047	71	14	and	and	CCONJ
ajst-5047	71	15	the	the	DET
ajst-5047	71	16	coating	coat	VERB
ajst-5047	71	17	surface	surface	NOUN
ajst-5047	71	18	is	be	AUX
ajst-5047	71	19	smooth	smooth	ADJ
ajst-5047	71	20	.	.	PUNCT
ajst-5047	72	1	a	a	DET
ajst-5047	72	2	30	30	NUM
ajst-5047	72	3	-	-	SYM
ajst-5047	72	4	50	50	NUM
ajst-5047	72	5	nm	nm	ADV
ajst-5047	72	6	thick	thick	ADJ
ajst-5047	72	7	interfacial	interfacial	ADJ
ajst-5047	72	8	ion	ion	NOUN
ajst-5047	72	9	mixing	mix	VERB
ajst-5047	72	10	layer	layer	NOUN
ajst-5047	72	11	was	be	AUX
ajst-5047	72	12	observed	observe	VERB
ajst-5047	72	13	on	on	ADP
ajst-5047	72	14	the	the	DET
ajst-5047	72	15	surface	surface	NOUN
ajst-5047	72	16	of	of	ADP
ajst-5047	72	17	the	the	DET
ajst-5047	72	18	ion	ion	NOUN
ajst-5047	72	19	-	-	PUNCT
ajst-5047	72	20	etched	etch	VERB
ajst-5047	72	21	substrate	substrate	NOUN
ajst-5047	72	22	,	,	PUNCT
ajst-5047	72	23	and	and	CCONJ
ajst-5047	72	24	the	the	DET
ajst-5047	72	25	interfacial	interfacial	ADJ
ajst-5047	72	26	ion	ion	NOUN
ajst-5047	72	27	mixing	mix	VERB
ajst-5047	72	28	layer	layer	NOUN
ajst-5047	72	29	combined	combine	VERB
ajst-5047	72	30	with	with	ADP
ajst-5047	72	31	the	the	DET
ajst-5047	72	32	metal	metal	NOUN
ajst-5047	72	33	ti	ti	NOUN
ajst-5047	72	34	base	base	NOUN
ajst-5047	72	35	layer	layer	NOUN
ajst-5047	72	36	contributed	contribute	VERB
ajst-5047	72	37	to	to	ADP
ajst-5047	72	38	excellent	excellent	ADJ
ajst-5047	72	39	adhesion	adhesion	NOUN
ajst-5047	72	40	properties	property	NOUN
ajst-5047	72	41	.	.	PUNCT
ajst-5047	73	1	poolcharuansin	poolcharuansin	PROPN
ajst-5047	73	2	p	p	PROPN
ajst-5047	73	3	et	et	PROPN
ajst-5047	73	4	al	al	PROPN
ajst-5047	73	5	.	.	PUNCT
ajst-5047	74	1	[	[	X
ajst-5047	74	2	26	26	NUM
ajst-5047	74	3	]	]	PUNCT
ajst-5047	74	4	studied	study	VERB
ajst-5047	74	5	the	the	DET
ajst-5047	74	6	discharge	discharge	NOUN
ajst-5047	74	7	behavior	behavior	NOUN
ajst-5047	74	8	of	of	ADP
ajst-5047	74	9	composite	composite	ADJ
ajst-5047	74	10	magnetron	magnetron	NOUN
ajst-5047	74	11	sputtering	sputtering	NOUN
ajst-5047	74	12	,	,	PUNCT
ajst-5047	74	13	and	and	CCONJ
ajst-5047	74	14	the	the	DET
ajst-5047	74	15	results	result	NOUN
ajst-5047	74	16	showed	show	VERB
ajst-5047	74	17	that	that	SCONJ
ajst-5047	74	18	when	when	SCONJ
ajst-5047	74	19	the	the	DET
ajst-5047	74	20	working	work	VERB
ajst-5047	74	21	pressure	pressure	NOUN
ajst-5047	74	22	changed	change	VERB
ajst-5047	74	23	,	,	PUNCT
ajst-5047	74	24	the	the	DET
ajst-5047	74	25	plasma	plasma	NOUN
ajst-5047	74	26	ignition	ignition	NOUN
ajst-5047	74	27	caused	cause	VERB
ajst-5047	74	28	by	by	ADP
ajst-5047	74	29	hipims	hipim	NOUN
ajst-5047	74	30	technology	technology	NOUN
ajst-5047	74	31	would	would	AUX
ajst-5047	74	32	be	be	AUX
ajst-5047	74	33	delayed	delay	VERB
ajst-5047	74	34	,	,	PUNCT
ajst-5047	74	35	while	while	SCONJ
ajst-5047	74	36	the	the	DET
ajst-5047	74	37	composite	composite	ADJ
ajst-5047	74	38	magnetron	magnetron	NOUN
ajst-5047	74	39	sputtering	sputtering	NOUN
ajst-5047	74	40	technology	technology	NOUN
ajst-5047	74	41	did	do	VERB
ajst-5047	74	42	not	not	PART
ajst-5047	74	43	,	,	PUNCT
ajst-5047	74	44	and	and	CCONJ
ajst-5047	74	45	the	the	DET
ajst-5047	74	46	number	number	NOUN
ajst-5047	74	47	of	of	ADP
ajst-5047	74	48	ions	ion	NOUN
ajst-5047	74	49	in	in	ADP
ajst-5047	74	50	the	the	DET
ajst-5047	74	51	vacuum	vacuum	PROPN
ajst-5047	74	52	chamber	chamber	PROPN
ajst-5047	74	53	increased	increase	VERB
ajst-5047	74	54	.	.	PUNCT
ajst-5047	75	1	compared	compare	VERB
ajst-5047	75	2	with	with	ADP
ajst-5047	75	3	hipims	hipims	NOUN
ajst-5047	75	4	technology	technology	NOUN
ajst-5047	75	5	,	,	PUNCT
ajst-5047	75	6	dcms	dcms	NOUN
ajst-5047	75	7	technology	technology	NOUN
ajst-5047	75	8	can	can	AUX
ajst-5047	75	9	provide	provide	VERB
ajst-5047	75	10	stable	stable	ADJ
ajst-5047	75	11	sputtering	sputtering	ADJ
ajst-5047	75	12	power	power	NOUN
ajst-5047	75	13	and	and	CCONJ
ajst-5047	75	14	inhibit	inhibit	VERB
ajst-5047	75	15	the	the	DET
ajst-5047	75	16	accumulation	accumulation	NOUN
ajst-5047	75	17	of	of	ADP
ajst-5047	75	18	charge	charge	NOUN
ajst-5047	75	19	on	on	ADP
ajst-5047	75	20	the	the	DET
ajst-5047	75	21	target	target	NOUN
ajst-5047	75	22	surface	surface	NOUN
ajst-5047	75	23	of	of	ADP
ajst-5047	75	24	high	high	ADJ
ajst-5047	75	25	-	-	PUNCT
ajst-5047	75	26	power	power	NOUN
ajst-5047	75	27	supply	supply	NOUN
ajst-5047	75	28	.	.	PUNCT
ajst-5047	76	1	the	the	DET
ajst-5047	76	2	effective	effective	ADJ
ajst-5047	76	3	combination	combination	NOUN
ajst-5047	76	4	of	of	ADP
ajst-5047	76	5	the	the	DET
ajst-5047	76	6	two	two	NUM
ajst-5047	76	7	technologies	technology	NOUN
ajst-5047	76	8	is	be	AUX
ajst-5047	76	9	expected	expect	VERB
ajst-5047	76	10	to	to	PART
ajst-5047	76	11	produce	produce	VERB
ajst-5047	76	12	tool	tool	NOUN
ajst-5047	76	13	coatings	coating	NOUN
ajst-5047	76	14	with	with	ADP
ajst-5047	76	15	good	good	ADJ
ajst-5047	76	16	mechanical	mechanical	ADJ
ajst-5047	76	17	properties	property	NOUN
ajst-5047	76	18	,	,	PUNCT
ajst-5047	76	19	tribological	tribological	ADJ
ajst-5047	76	20	properties	property	NOUN
ajst-5047	76	21	and	and	CCONJ
ajst-5047	76	22	microstructure	microstructure	NOUN
ajst-5047	76	23	.	.	PUNCT
ajst-5047	77	1	3	3	X
ajst-5047	77	2	.	.	X
ajst-5047	77	3	conclusion	conclusion	VERB
ajst-5047	77	4	the	the	DET
ajst-5047	77	5	preparation	preparation	NOUN
ajst-5047	77	6	technology	technology	NOUN
ajst-5047	77	7	of	of	ADP
ajst-5047	77	8	tool	tool	NOUN
ajst-5047	77	9	coating	coating	NOUN
ajst-5047	77	10	is	be	AUX
ajst-5047	77	11	developing	develop	VERB
ajst-5047	77	12	continuously	continuously	ADV
ajst-5047	77	13	.	.	PUNCT
ajst-5047	78	1	with	with	ADP
ajst-5047	78	2	the	the	DET
ajst-5047	78	3	continuous	continuous	ADJ
ajst-5047	78	4	optimization	optimization	NOUN
ajst-5047	78	5	of	of	ADP
ajst-5047	78	6	technology	technology	NOUN
ajst-5047	78	7	,	,	PUNCT
ajst-5047	78	8	it	it	PRON
ajst-5047	78	9	is	be	AUX
ajst-5047	78	10	also	also	ADV
ajst-5047	78	11	gradually	gradually	ADV
ajst-5047	78	12	adapting	adapt	VERB
ajst-5047	78	13	to	to	ADP
ajst-5047	78	14	the	the	DET
ajst-5047	78	15	growing	grow	VERB
ajst-5047	78	16	demand	demand	NOUN
ajst-5047	78	17	of	of	ADP
ajst-5047	78	18	processing	processing	NOUN
ajst-5047	78	19	industry	industry	NOUN
ajst-5047	78	20	.	.	PUNCT
ajst-5047	79	1	the	the	DET
ajst-5047	79	2	new	new	ADJ
ajst-5047	79	3	technology	technology	NOUN
ajst-5047	79	4	not	not	PART
ajst-5047	79	5	only	only	ADV
ajst-5047	79	6	requires	require	VERB
ajst-5047	79	7	the	the	DET
ajst-5047	79	8	148	148	NUM
ajst-5047	79	9	hardness	hardness	NOUN
ajst-5047	79	10	,	,	PUNCT
ajst-5047	79	11	binding	bind	VERB
ajst-5047	79	12	force	force	NOUN
ajst-5047	79	13	and	and	CCONJ
ajst-5047	79	14	residual	residual	ADJ
ajst-5047	79	15	stress	stress	NOUN
ajst-5047	79	16	of	of	ADP
ajst-5047	79	17	the	the	DET
ajst-5047	79	18	coating	coating	NOUN
ajst-5047	79	19	,	,	PUNCT
ajst-5047	79	20	friction	friction	NOUN
ajst-5047	79	21	coefficient	coefficient	NOUN
ajst-5047	79	22	,	,	PUNCT
ajst-5047	79	23	wear	wear	VERB
ajst-5047	79	24	rate	rate	NOUN
ajst-5047	79	25	and	and	CCONJ
ajst-5047	79	26	other	other	ADJ
ajst-5047	79	27	mechanical	mechanical	ADJ
ajst-5047	79	28	and	and	CCONJ
ajst-5047	79	29	tribological	tribological	ADJ
ajst-5047	79	30	properties	property	NOUN
ajst-5047	79	31	as	as	ADV
ajst-5047	79	32	well	well	ADV
ajst-5047	79	33	as	as	ADP
ajst-5047	79	34	the	the	DET
ajst-5047	79	35	internal	internal	ADJ
ajst-5047	79	36	microscopic	microscopic	ADJ
ajst-5047	79	37	characterization	characterization	NOUN
ajst-5047	79	38	of	of	ADP
ajst-5047	79	39	the	the	DET
ajst-5047	79	40	coating	coating	NOUN
ajst-5047	79	41	,	,	PUNCT
ajst-5047	79	42	but	but	CCONJ
ajst-5047	79	43	also	also	ADV
ajst-5047	79	44	needs	need	VERB
ajst-5047	79	45	to	to	PART
ajst-5047	79	46	reduce	reduce	VERB
ajst-5047	79	47	the	the	DET
ajst-5047	79	48	energy	energy	NOUN
ajst-5047	79	49	consumption	consumption	NOUN
ajst-5047	79	50	required	require	VERB
ajst-5047	79	51	for	for	ADP
ajst-5047	79	52	preparation	preparation	NOUN
ajst-5047	79	53	.	.	PUNCT
ajst-5047	80	1	through	through	ADP
ajst-5047	80	2	the	the	DET
ajst-5047	80	3	progress	progress	NOUN
ajst-5047	80	4	and	and	CCONJ
ajst-5047	80	5	popularization	popularization	NOUN
ajst-5047	80	6	of	of	ADP
ajst-5047	80	7	tool	tool	NOUN
ajst-5047	80	8	coating	coat	VERB
ajst-5047	80	9	preparation	preparation	NOUN
ajst-5047	80	10	technology	technology	NOUN
ajst-5047	80	11	,	,	PUNCT
ajst-5047	80	12	it	it	PRON
ajst-5047	80	13	will	will	AUX
ajst-5047	80	14	add	add	VERB
ajst-5047	80	15	a	a	DET
ajst-5047	80	16	boost	boost	NOUN
ajst-5047	80	17	to	to	ADP
ajst-5047	80	18	the	the	DET
ajst-5047	80	19	development	development	NOUN
ajst-5047	80	20	of	of	ADP
ajst-5047	80	21	the	the	DET
ajst-5047	80	22	processing	processing	NOUN
ajst-5047	80	23	manufacturing	manufacturing	NOUN
ajst-5047	80	24	industry	industry	NOUN
ajst-5047	80	25	and	and	CCONJ
ajst-5047	80	26	even	even	ADV
ajst-5047	80	27	the	the	DET
ajst-5047	80	28	industry	industry	NOUN
ajst-5047	80	29	in	in	ADP
ajst-5047	80	30	the	the	DET
ajst-5047	80	31	future	future	NOUN
ajst-5047	80	32	.	.	PUNCT
ajst-5047	81	1	references	reference	NOUN
ajst-5047	81	2	[	[	X
ajst-5047	81	3	1	1	X
ajst-5047	81	4	]	]	X
ajst-5047	81	5	feng	feng	X
ajst-5047	81	6	x	x	SYM
ajst-5047	81	7	q	q	PROPN
ajst-5047	81	8	,	,	PUNCT
ajst-5047	81	9	wang	wang	PROPN
ajst-5047	81	10	x	x	PROPN
ajst-5047	81	11	,	,	PUNCT
ajst-5047	81	12	liu	liu	PROPN
ajst-5047	81	13	y	y	PROPN
ajst-5047	81	14	,	,	PUNCT
ajst-5047	81	15	et	et	PROPN
ajst-5047	81	16	al	al	PROPN
ajst-5047	81	17	.	.	PUNCT
ajst-5047	82	1	pursuing	pursue	VERB
ajst-5047	82	2	enhanced	enhance	VERB
ajst-5047	82	3	oxidation	oxidation	ADJ
ajst-5047	82	4	resistance	resistance	NOUN
ajst-5047	82	5	of	of	ADP
ajst-5047	82	6	zrb2	zrb2	PROPN
ajst-5047	82	7	ceramics	ceramic	NOUN
ajst-5047	82	8	by	by	ADP
ajst-5047	82	9	sic	sic	ADJ
ajst-5047	82	10	and	and	CCONJ
ajst-5047	82	11	wc	wc	PROPN
ajst-5047	82	12	co	co	NOUN
ajst-5047	82	13	-	-	NOUN
ajst-5047	82	14	doping[j	doping[j	NOUN
ajst-5047	82	15	]	]	PUNCT
ajst-5047	82	16	.	.	PUNCT
ajst-5047	83	1	journal	journal	PROPN
ajst-5047	83	2	of	of	ADP
ajst-5047	83	3	the	the	DET
ajst-5047	83	4	european	european	PROPN
ajst-5047	83	5	ceramic	ceramic	PROPN
ajst-5047	83	6	society	society	NOUN
ajst-5047	83	7	,	,	PUNCT
ajst-5047	83	8	2018	2018	NUM
ajst-5047	83	9	,	,	PUNCT
ajst-5047	83	10	38	38	NUM
ajst-5047	83	11	:	:	SYM
ajst-5047	83	12	5311	5311	NUM
ajst-5047	83	13	-	-	SYM
ajst-5047	83	14	5318	5318	NUM
ajst-5047	83	15	.	.	PUNCT
ajst-5047	84	1	[	[	X
ajst-5047	84	2	2	2	NUM
ajst-5047	84	3	]	]	X
ajst-5047	84	4	zhanqiang	zhanqiang	PROPN
ajst-5047	84	5	l.	l.	PROPN
ajst-5047	84	6	advanced	advanced	PROPN
ajst-5047	84	7	tool	tool	PROPN
ajst-5047	84	8	design	design	NOUN
ajst-5047	84	9	technology	technology	NOUN
ajst-5047	84	10	:	:	PUNCT
ajst-5047	84	11	tool	tool	NOUN
ajst-5047	84	12	structure	structure	NOUN
ajst-5047	84	13	and	and	CCONJ
ajst-5047	84	14	cutting	cut	VERB
ajst-5047	84	15	tool	tool	NOUN
ajst-5047	84	16	materials	material	NOUN
ajst-5047	84	17	and	and	CCONJ
ajst-5047	84	18	coating	coat	VERB
ajst-5047	84	19	technology[j	technology[j	PROPN
ajst-5047	84	20	]	]	PUNCT
ajst-5047	84	21	.	.	PUNCT
ajst-5047	85	1	aeronautical	aeronautical	PROPN
ajst-5047	85	2	manufacturing	manufacturing	NOUN
ajst-5047	85	3	technology	technology	NOUN
ajst-5047	85	4	,	,	PUNCT
ajst-5047	85	5	2006	2006	NUM
ajst-5047	85	6	,	,	PUNCT
ajst-5047	85	7	7	7	NUM
ajst-5047	85	8	:	:	SYM
ajst-5047	85	9	38	38	NUM
ajst-5047	85	10	-	-	SYM
ajst-5047	85	11	42	42	NUM
ajst-5047	85	12	.	.	PUNCT
ajst-5047	86	1	[	[	X
ajst-5047	86	2	3	3	X
ajst-5047	86	3	]	]	X
ajst-5047	86	4	sortino	sortino	PROPN
ajst-5047	86	5	m	m	PROPN
ajst-5047	86	6	,	,	PUNCT
ajst-5047	86	7	belfio	belfio	PROPN
ajst-5047	86	8	s	s	PROPN
ajst-5047	86	9	,	,	PUNCT
ajst-5047	86	10	totis	totis	PROPN
ajst-5047	86	11	g	g	PROPN
ajst-5047	86	12	,	,	PUNCT
ajst-5047	86	13	et	et	PROPN
ajst-5047	86	14	al	al	PROPN
ajst-5047	86	15	.	.	PROPN
ajst-5047	86	16	innovative	innovative	ADJ
ajst-5047	86	17	tool	tool	NOUN
ajst-5047	86	18	coatings	coating	NOUN
ajst-5047	86	19	for	for	ADP
ajst-5047	86	20	increasing	increase	VERB
ajst-5047	86	21	tool	tool	NOUN
ajst-5047	86	22	life	life	NOUN
ajst-5047	86	23	in	in	ADP
ajst-5047	86	24	milling	mill	VERB
ajst-5047	86	25	nickelcoated	nickelcoate	VERB
ajst-5047	86	26	nickelsilver	nickelsilver	ADJ
ajst-5047	86	27	alloy[j	alloy[j	NOUN
ajst-5047	86	28	]	]	PUNCT
ajst-5047	86	29	.	.	PUNCT
ajst-5047	87	1	procedia	procedia	PROPN
ajst-5047	87	2	engineering	engineering	PROPN
ajst-5047	87	3	,	,	PUNCT
ajst-5047	87	4	2015	2015	NUM
ajst-5047	87	5	,	,	PUNCT
ajst-5047	87	6	100	100	NUM
ajst-5047	87	7	:	:	SYM
ajst-5047	87	8	946	946	NUM
ajst-5047	87	9	-	-	SYM
ajst-5047	87	10	952	952	NUM
ajst-5047	87	11	.	.	PUNCT
ajst-5047	88	1	[	[	X
ajst-5047	88	2	4	4	NUM
ajst-5047	88	3	]	]	X
ajst-5047	88	4	zhao	zhao	PROPN
ajst-5047	88	5	j	j	PROPN
ajst-5047	88	6	,	,	PUNCT
ajst-5047	88	7	liu	liu	PROPN
ajst-5047	88	8	z	z	PROPN
ajst-5047	88	9	,	,	PUNCT
ajst-5047	88	10	wang	wang	PROPN
ajst-5047	88	11	b	b	PROPN
ajst-5047	88	12	,	,	PUNCT
ajst-5047	88	13	et	et	PROPN
ajst-5047	88	14	al	al	PROPN
ajst-5047	88	15	.	.	PUNCT
ajst-5047	88	16	tool	tool	NOUN
ajst-5047	88	17	coating	coating	NOUN
ajst-5047	88	18	effects	effect	NOUN
ajst-5047	88	19	on	on	ADP
ajst-5047	88	20	cutting	cut	VERB
ajst-5047	88	21	temperature	temperature	NOUN
ajst-5047	88	22	during	during	ADP
ajst-5047	88	23	metal	metal	NOUN
ajst-5047	88	24	cutting	cutting	NOUN
ajst-5047	88	25	processes	process	NOUN
ajst-5047	88	26	:	:	PUNCT
ajst-5047	88	27	comprehensive	comprehensive	ADJ
ajst-5047	88	28	review	review	NOUN
ajst-5047	88	29	and	and	CCONJ
ajst-5047	88	30	future	future	ADJ
ajst-5047	88	31	research	research	NOUN
ajst-5047	88	32	directions[j	directions[j	PROPN
ajst-5047	88	33	]	]	PUNCT
ajst-5047	88	34	.	.	PUNCT
ajst-5047	89	1	mechanical	mechanical	ADJ
ajst-5047	89	2	systems	system	NOUN
ajst-5047	89	3	and	and	CCONJ
ajst-5047	89	4	signal	signal	NOUN
ajst-5047	89	5	processing	processing	NOUN
ajst-5047	89	6	,	,	PUNCT
ajst-5047	89	7	2021	2021	NUM
ajst-5047	89	8	,	,	PUNCT
ajst-5047	89	9	150	150	NUM
ajst-5047	89	10	:	:	SYM
ajst-5047	89	11	107302	107302	NUM
ajst-5047	89	12	.	.	PUNCT
ajst-5047	90	1	[	[	X
ajst-5047	90	2	5	5	NUM
ajst-5047	90	3	]	]	PUNCT
ajst-5047	90	4	sousa	sousa	NOUN
ajst-5047	90	5	v	v	X
ajst-5047	90	6	f	f	PROPN
ajst-5047	90	7	c	c	PROPN
ajst-5047	90	8	,	,	PUNCT
ajst-5047	90	9	silva	silva	PROPN
ajst-5047	90	10	f	f	PROPN
ajst-5047	90	11	j	j	PROPN
ajst-5047	90	12	g.	g.	PROPN
ajst-5047	90	13	recent	recent	ADJ
ajst-5047	90	14	advances	advance	NOUN
ajst-5047	90	15	on	on	ADP
ajst-5047	90	16	coated	coat	VERB
ajst-5047	90	17	milling	milling	NOUN
ajst-5047	90	18	tool	tool	NOUN
ajst-5047	90	19	technology	technology	NOUN
ajst-5047	90	20	—	—	PUNCT
ajst-5047	90	21	a	a	DET
ajst-5047	90	22	comprehensive	comprehensive	ADJ
ajst-5047	90	23	review[j	review[j	NOUN
ajst-5047	90	24	]	]	PUNCT
ajst-5047	90	25	.	.	PUNCT
ajst-5047	91	1	coatings	coating	NOUN
ajst-5047	91	2	,	,	PUNCT
ajst-5047	91	3	2020	2020	NUM
ajst-5047	91	4	,	,	PUNCT
ajst-5047	91	5	10(3	10(3	NUM
ajst-5047	91	6	):	):	PUNCT
ajst-5047	91	7	235	235	NUM
ajst-5047	91	8	.	.	PUNCT
ajst-5047	92	1	[	[	X
ajst-5047	92	2	6	6	NUM
ajst-5047	92	3	]	]	PUNCT
ajst-5047	92	4	chen	chen	PROPN
ajst-5047	92	5	h	h	PROPN
ajst-5047	92	6	w	w	PROPN
ajst-5047	92	7	,	,	PUNCT
ajst-5047	92	8	chan	chan	PROPN
ajst-5047	92	9	y	y	PROPN
ajst-5047	92	10	c	c	PROPN
ajst-5047	92	11	,	,	PUNCT
ajst-5047	92	12	lee	lee	PROPN
ajst-5047	92	13	j	j	PROPN
ajst-5047	92	14	w	w	PROPN
ajst-5047	92	15	,	,	PUNCT
ajst-5047	92	16	et	et	PROPN
ajst-5047	92	17	al	al	PROPN
ajst-5047	92	18	.	.	PROPN
ajst-5047	92	19	oxidation	oxidation	NOUN
ajst-5047	92	20	resistance	resistance	NOUN
ajst-5047	92	21	of	of	ADP
ajst-5047	92	22	nanocomposite	nanocomposite	PROPN
ajst-5047	92	23	cralsin	cralsin	VERB
ajst-5047	92	24	under	under	ADP
ajst-5047	92	25	long	long	ADJ
ajst-5047	92	26	-	-	PUNCT
ajst-5047	92	27	time	time	NOUN
ajst-5047	92	28	heat	heat	NOUN
ajst-5047	92	29	treatment[j	treatment[j	PROPN
ajst-5047	92	30	]	]	PUNCT
ajst-5047	92	31	.	.	PUNCT
ajst-5047	93	1	surface	surface	NOUN
ajst-5047	93	2	and	and	CCONJ
ajst-5047	93	3	coatings	coating	NOUN
ajst-5047	93	4	technology	technology	NOUN
ajst-5047	93	5	,	,	PUNCT
ajst-5047	93	6	2011	2011	NUM
ajst-5047	93	7	,	,	PUNCT
ajst-5047	93	8	206(7	206(7	NUM
ajst-5047	93	9	):	):	PUNCT
ajst-5047	93	10	1571	1571	NUM
ajst-5047	93	11	-	-	SYM
ajst-5047	93	12	1576	1576	NUM
ajst-5047	93	13	.	.	PUNCT
ajst-5047	94	1	[	[	X
ajst-5047	94	2	7	7	NUM
ajst-5047	94	3	]	]	X
ajst-5047	94	4	fotovvati	fotovvati	NOUN
ajst-5047	94	5	b	b	PROPN
ajst-5047	94	6	,	,	PUNCT
ajst-5047	94	7	namdari	namdari	PROPN
ajst-5047	94	8	n	n	CCONJ
ajst-5047	94	9	,	,	PUNCT
ajst-5047	94	10	dehghanghadikolaei	dehghanghadikolaei	NOUN
ajst-5047	94	11	a.	a.	NOUN
ajst-5047	94	12	on	on	ADP
ajst-5047	94	13	coating	coat	VERB
ajst-5047	94	14	techniques	technique	NOUN
ajst-5047	94	15	for	for	ADP
ajst-5047	94	16	surface	surface	NOUN
ajst-5047	94	17	protection	protection	NOUN
ajst-5047	94	18	:	:	PUNCT
ajst-5047	94	19	a	a	DET
ajst-5047	94	20	review[j	review[j	PROPN
ajst-5047	94	21	]	]	PUNCT
ajst-5047	94	22	.	.	PUNCT
ajst-5047	95	1	journal	journal	PROPN
ajst-5047	95	2	of	of	ADP
ajst-5047	95	3	manufacturing	manufacturing	NOUN
ajst-5047	95	4	and	and	CCONJ
ajst-5047	95	5	materials	material	NOUN
ajst-5047	95	6	processing	processing	NOUN
ajst-5047	95	7	,	,	PUNCT
ajst-5047	95	8	2019	2019	NUM
ajst-5047	95	9	,	,	PUNCT
ajst-5047	95	10	3(1	3(1	NUM
ajst-5047	95	11	):	):	PUNCT
ajst-5047	95	12	28	28	NUM
ajst-5047	95	13	.	.	PUNCT
ajst-5047	96	1	[	[	X
ajst-5047	96	2	8	8	NUM
ajst-5047	96	3	]	]	X
ajst-5047	96	4	jin	jin	NOUN
ajst-5047	96	5	n	n	PROPN
ajst-5047	96	6	,	,	PUNCT
ajst-5047	96	7	yang	yang	PROPN
ajst-5047	96	8	y	y	PROPN
ajst-5047	96	9	,	,	PUNCT
ajst-5047	96	10	luo	luo	PROPN
ajst-5047	96	11	x	x	PROPN
ajst-5047	96	12	,	,	PUNCT
ajst-5047	96	13	et	et	PROPN
ajst-5047	96	14	al	al	PROPN
ajst-5047	96	15	.	.	PUNCT
ajst-5047	97	1	development	development	PROPN
ajst-5047	97	2	of	of	ADP
ajst-5047	97	3	cvd	cvd	PROPN
ajst-5047	97	4	ticontaining	ticontaine	VERB
ajst-5047	97	5	films[j	films[j	PROPN
ajst-5047	97	6	]	]	PUNCT
ajst-5047	97	7	.	.	PUNCT
ajst-5047	98	1	progress	progress	NOUN
ajst-5047	98	2	in	in	ADP
ajst-5047	98	3	materials	material	NOUN
ajst-5047	98	4	science	science	NOUN
ajst-5047	98	5	,	,	PUNCT
ajst-5047	98	6	2013	2013	NUM
ajst-5047	98	7	,	,	PUNCT
ajst-5047	98	8	58(8	58(8	NUM
ajst-5047	98	9	):	):	PUNCT
ajst-5047	98	10	1490	1490	NUM
ajst-5047	98	11	-	-	SYM
ajst-5047	98	12	1533	1533	NUM
ajst-5047	98	13	.	.	PUNCT
ajst-5047	99	1	[	[	X
ajst-5047	99	2	9	9	NUM
ajst-5047	99	3	]	]	SYM
ajst-5047	99	4	choy	choy	NOUN
ajst-5047	99	5	k	k	PROPN
ajst-5047	99	6	l.	l.	PROPN
ajst-5047	99	7	chemical	chemical	PROPN
ajst-5047	99	8	vapour	vapour	PROPN
ajst-5047	99	9	deposition	deposition	NOUN
ajst-5047	99	10	of	of	ADP
ajst-5047	99	11	coatings[j	coatings[j	NOUN
ajst-5047	99	12	]	]	PUNCT
ajst-5047	99	13	.	.	PUNCT
ajst-5047	100	1	progress	progress	NOUN
ajst-5047	100	2	in	in	ADP
ajst-5047	100	3	materials	material	NOUN
ajst-5047	100	4	science	science	NOUN
ajst-5047	100	5	,	,	PUNCT
ajst-5047	100	6	2003	2003	NUM
ajst-5047	100	7	,	,	PUNCT
ajst-5047	100	8	48(2	48(2	NUM
ajst-5047	100	9	):	):	PUNCT
ajst-5047	100	10	57	57	NUM
ajst-5047	100	11	-	-	SYM
ajst-5047	100	12	170	170	NUM
ajst-5047	100	13	.	.	PUNCT
ajst-5047	101	1	[	[	X
ajst-5047	101	2	10	10	NUM
ajst-5047	101	3	]	]	PUNCT
ajst-5047	101	4	gong	gong	NOUN
ajst-5047	101	5	y	y	PROPN
ajst-5047	101	6	,	,	PUNCT
ajst-5047	101	7	tu	tu	PROPN
ajst-5047	101	8	r	r	PROPN
ajst-5047	101	9	,	,	PUNCT
ajst-5047	101	10	goto	goto	ADJ
ajst-5047	101	11	t.	t.	NOUN
ajst-5047	101	12	effect	effect	NOUN
ajst-5047	101	13	of	of	ADP
ajst-5047	101	14	nh3	nh3	NOUN
ajst-5047	101	15	on	on	ADP
ajst-5047	101	16	the	the	DET
ajst-5047	101	17	preparation	preparation	NOUN
ajst-5047	101	18	of	of	ADP
ajst-5047	101	19	tinx	tinx	NOUN
ajst-5047	101	20	films	film	NOUN
ajst-5047	101	21	by	by	ADP
ajst-5047	101	22	laser	laser	NOUN
ajst-5047	101	23	cvd	cvd	PROPN
ajst-5047	101	24	using	use	VERB
ajst-5047	101	25	tetrakis	tetraki	NOUN
ajst-5047	101	26	-	-	PUNCT
ajst-5047	101	27	diethylamidotitanium[j	diethylamidotitanium[j	NOUN
ajst-5047	101	28	]	]	PUNCT
ajst-5047	101	29	.	.	PUNCT
ajst-5047	102	1	journal	journal	PROPN
ajst-5047	102	2	of	of	ADP
ajst-5047	102	3	alloys	alloy	NOUN
ajst-5047	102	4	and	and	CCONJ
ajst-5047	102	5	compounds	compound	NOUN
ajst-5047	102	6	,	,	PUNCT
ajst-5047	102	7	2009	2009	NUM
ajst-5047	102	8	,	,	PUNCT
ajst-5047	102	9	485(1	485(1	PROPN
ajst-5047	102	10	-	-	SYM
ajst-5047	102	11	2	2	NUM
ajst-5047	102	12	):	):	PUNCT
ajst-5047	102	13	451	451	NUM
ajst-5047	102	14	-	-	SYM
ajst-5047	102	15	455	455	NUM
ajst-5047	102	16	.	.	PUNCT
ajst-5047	103	1	[	[	X
ajst-5047	103	2	11	11	NUM
ajst-5047	103	3	]	]	PUNCT
ajst-5047	103	4	panek	panek	NOUN
ajst-5047	103	5	p	p	X
ajst-5047	103	6	,	,	PUNCT
ajst-5047	103	7	drabczyk	drabczyk	PROPN
ajst-5047	103	8	k	k	NOUN
ajst-5047	103	9	,	,	PUNCT
ajst-5047	103	10	focsa	focsa	VERB
ajst-5047	103	11	a	a	PRON
ajst-5047	103	12	,	,	PUNCT
ajst-5047	103	13	et	et	PROPN
ajst-5047	103	14	al	al	PROPN
ajst-5047	103	15	.	.	PUNCT
ajst-5047	104	1	a	a	DET
ajst-5047	104	2	comparative	comparative	ADJ
ajst-5047	104	3	study	study	NOUN
ajst-5047	104	4	of	of	ADP
ajst-5047	104	5	sio2	sio2	PROPN
ajst-5047	104	6	deposited	deposit	VERB
ajst-5047	104	7	by	by	ADP
ajst-5047	104	8	pecvd	pecvd	NOUN
ajst-5047	104	9	and	and	CCONJ
ajst-5047	104	10	thermal	thermal	ADJ
ajst-5047	104	11	method	method	NOUN
ajst-5047	104	12	as	as	ADP
ajst-5047	104	13	passivation	passivation	NOUN
ajst-5047	104	14	for	for	ADP
ajst-5047	104	15	multicrystalline	multicrystalline	NOUN
ajst-5047	104	16	silicon	silicon	PROPN
ajst-5047	104	17	solar	solar	PROPN
ajst-5047	104	18	cells[j	cells[j	PROPN
ajst-5047	104	19	]	]	PUNCT
ajst-5047	104	20	.	.	PUNCT
ajst-5047	105	1	materials	material	NOUN
ajst-5047	105	2	science	science	NOUN
ajst-5047	105	3	and	and	CCONJ
ajst-5047	105	4	engineering	engineering	NOUN
ajst-5047	105	5	:	:	PUNCT
ajst-5047	105	6	b	b	NUM
ajst-5047	105	7	,	,	PUNCT
ajst-5047	105	8	2009	2009	NUM
ajst-5047	105	9	,	,	PUNCT
ajst-5047	105	10	165(1	165(1	NUM
ajst-5047	105	11	-	-	SYM
ajst-5047	105	12	2	2	NUM
ajst-5047	105	13	):	):	PUNCT
ajst-5047	105	14	64	64	NUM
ajst-5047	105	15	-	-	SYM
ajst-5047	105	16	66	66	NUM
ajst-5047	105	17	.	.	PUNCT
ajst-5047	106	1	[	[	X
ajst-5047	106	2	12	12	NUM
ajst-5047	106	3	]	]	PUNCT
ajst-5047	106	4	multone	multone	NOUN
ajst-5047	106	5	x	x	NOUN
ajst-5047	106	6	,	,	PUNCT
ajst-5047	106	7	luo	luo	PROPN
ajst-5047	106	8	y	y	PROPN
ajst-5047	106	9	,	,	PUNCT
ajst-5047	106	10	hoffmann	hoffmann	PROPN
ajst-5047	106	11	p.	p.	PROPN
ajst-5047	106	12	er	er	INTJ
ajst-5047	106	13	-	-	PUNCT
ajst-5047	106	14	doped	dope	VERB
ajst-5047	106	15	al2o3	al2o3	PROPN
ajst-5047	106	16	thin	thin	ADJ
ajst-5047	106	17	films	film	NOUN
ajst-5047	106	18	deposited	deposit	VERB
ajst-5047	106	19	by	by	ADP
ajst-5047	106	20	high	high	ADJ
ajst-5047	106	21	-	-	PUNCT
ajst-5047	106	22	vacuum	vacuum	NOUN
ajst-5047	106	23	chemical	chemical	NOUN
ajst-5047	106	24	vapor	vapor	NOUN
ajst-5047	106	25	deposition	deposition	NOUN
ajst-5047	106	26	(	(	PUNCT
ajst-5047	106	27	hvcvd)[j	hvcvd)[j	NOUN
ajst-5047	106	28	]	]	PUNCT
ajst-5047	106	29	.	.	PUNCT
ajst-5047	107	1	materials	material	NOUN
ajst-5047	107	2	science	science	NOUN
ajst-5047	107	3	and	and	CCONJ
ajst-5047	107	4	engineering	engineering	NOUN
ajst-5047	107	5	:	:	PUNCT
ajst-5047	107	6	b	b	NUM
ajst-5047	107	7	,	,	PUNCT
ajst-5047	107	8	2008	2008	NUM
ajst-5047	107	9	,	,	PUNCT
ajst-5047	107	10	146(13	146(13	NUM
ajst-5047	107	11	):	):	PUNCT
ajst-5047	107	12	35	35	NUM
ajst-5047	107	13	-	-	SYM
ajst-5047	107	14	40	40	NUM
ajst-5047	107	15	.	.	PUNCT
ajst-5047	108	1	[	[	X
ajst-5047	108	2	13	13	NUM
ajst-5047	108	3	]	]	X
ajst-5047	108	4	garnier	garnier	PROPN
ajst-5047	108	5	j	j	PROPN
ajst-5047	108	6	,	,	PUNCT
ajst-5047	108	7	bouteville	bouteville	VERB
ajst-5047	108	8	a	a	PRON
ajst-5047	108	9	,	,	PUNCT
ajst-5047	108	10	hamilton	hamilton	PROPN
ajst-5047	108	11	j	j	PROPN
ajst-5047	108	12	,	,	PUNCT
ajst-5047	108	13	et	et	PROPN
ajst-5047	108	14	al	al	PROPN
ajst-5047	108	15	.	.	PUNCT
ajst-5047	109	1	a	a	DET
ajst-5047	109	2	comparison	comparison	NOUN
ajst-5047	109	3	of	of	ADP
ajst-5047	109	4	different	different	ADJ
ajst-5047	109	5	spray	spray	NOUN
ajst-5047	109	6	chemical	chemical	NOUN
ajst-5047	109	7	vapour	vapour	NOUN
ajst-5047	109	8	deposition	deposition	NOUN
ajst-5047	109	9	methods	method	NOUN
ajst-5047	109	10	for	for	ADP
ajst-5047	109	11	the	the	DET
ajst-5047	109	12	production	production	NOUN
ajst-5047	109	13	of	of	ADP
ajst-5047	109	14	undoped	undoped	ADJ
ajst-5047	109	15	zno	zno	PROPN
ajst-5047	109	16	thin	thin	PROPN
ajst-5047	109	17	films[j	films[j	PROPN
ajst-5047	109	18	]	]	PUNCT
ajst-5047	109	19	.	.	PUNCT
ajst-5047	110	1	thin	thin	ADJ
ajst-5047	110	2	solid	solid	ADJ
ajst-5047	110	3	films	film	NOUN
ajst-5047	110	4	,	,	PUNCT
ajst-5047	110	5	2009	2009	NUM
ajst-5047	110	6	,	,	PUNCT
ajst-5047	110	7	518(4	518(4	NUM
ajst-5047	110	8	):	):	PUNCT
ajst-5047	110	9	1129	1129	NUM
ajst-5047	110	10	-	-	SYM
ajst-5047	110	11	1135	1135	NUM
ajst-5047	110	12	.	.	PUNCT
ajst-5047	111	1	[	[	X
ajst-5047	111	2	14	14	NUM
ajst-5047	111	3	]	]	PUNCT
ajst-5047	111	4	kondo	kondo	PROPN
ajst-5047	111	5	t	t	PROPN
ajst-5047	111	6	,	,	PUNCT
ajst-5047	111	7	funakubo	funakubo	NOUN
ajst-5047	111	8	h	h	PROPN
ajst-5047	111	9	,	,	PUNCT
ajst-5047	111	10	akiyama	akiyama	PROPN
ajst-5047	111	11	k	k	PROPN
ajst-5047	111	12	,	,	PUNCT
ajst-5047	111	13	et	et	PROPN
ajst-5047	111	14	al	al	PROPN
ajst-5047	111	15	.	.	PUNCT
ajst-5047	111	16	deposition	deposition	NOUN
ajst-5047	111	17	of	of	ADP
ajst-5047	111	18	undoped	undoped	ADJ
ajst-5047	111	19	indium	indium	NOUN
ajst-5047	111	20	oxide	oxide	NOUN
ajst-5047	111	21	thin	thin	ADJ
ajst-5047	111	22	films	film	NOUN
ajst-5047	111	23	on	on	ADP
ajst-5047	111	24	stripe	stripe	NOUN
ajst-5047	111	25	-	-	PUNCT
ajst-5047	111	26	patterned	pattern	VERB
ajst-5047	111	27	substrates	substrate	NOUN
ajst-5047	111	28	by	by	ADP
ajst-5047	111	29	spray	spray	NOUN
ajst-5047	111	30	cvd[j	cvd[j	PROPN
ajst-5047	111	31	]	]	PUNCT
ajst-5047	111	32	.	.	PUNCT
ajst-5047	112	1	journal	journal	PROPN
ajst-5047	112	2	of	of	ADP
ajst-5047	112	3	crystal	crystal	PROPN
ajst-5047	112	4	growth	growth	NOUN
ajst-5047	112	5	,	,	PUNCT
ajst-5047	112	6	2009	2009	NUM
ajst-5047	112	7	,	,	PUNCT
ajst-5047	112	8	311(3	311(3	NUM
ajst-5047	112	9	):	):	PUNCT
ajst-5047	112	10	642646	642646	NUM
ajst-5047	112	11	.	.	PUNCT
ajst-5047	113	1	[	[	X
ajst-5047	113	2	15	15	NUM
ajst-5047	113	3	]	]	PUNCT
ajst-5047	113	4	aydin	aydin	NOUN
ajst-5047	113	5	o	o	X
ajst-5047	114	1	i	i	PRON
ajst-5047	114	2	,	,	PUNCT
ajst-5047	114	3	hallam	hallam	PROPN
ajst-5047	114	4	t	t	PROPN
ajst-5047	114	5	,	,	PUNCT
ajst-5047	114	6	thomassin	thomassin	PROPN
ajst-5047	114	7	j	j	PROPN
ajst-5047	114	8	l	l	PROPN
ajst-5047	114	9	,	,	PUNCT
ajst-5047	114	10	et	et	PROPN
ajst-5047	114	11	al	al	PROPN
ajst-5047	114	12	.	.	PROPN
ajst-5047	114	13	interface	interface	NOUN
ajst-5047	114	14	and	and	CCONJ
ajst-5047	114	15	strain	strain	VERB
ajst-5047	114	16	effects	effect	NOUN
ajst-5047	114	17	on	on	ADP
ajst-5047	114	18	the	the	DET
ajst-5047	114	19	fabrication	fabrication	NOUN
ajst-5047	114	20	of	of	ADP
ajst-5047	114	21	suspended	suspend	VERB
ajst-5047	114	22	cvd	cvd	PROPN
ajst-5047	114	23	graphene	graphene	VERB
ajst-5047	114	24	devices[j	devices[j	PROPN
ajst-5047	114	25	]	]	PUNCT
ajst-5047	114	26	.	.	PUNCT
ajst-5047	115	1	solid	solid	ADJ
ajst-5047	115	2	state	state	NOUN
ajst-5047	115	3	electronics	electronic	NOUN
ajst-5047	115	4	,	,	PUNCT
ajst-5047	115	5	2015	2015	NUM
ajst-5047	115	6	,	,	PUNCT
ajst-5047	115	7	108	108	NUM
ajst-5047	115	8	:	:	SYM
ajst-5047	115	9	75	75	NUM
ajst-5047	115	10	-	-	SYM
ajst-5047	115	11	83	83	NUM
ajst-5047	115	12	.	.	PUNCT
ajst-5047	116	1	[	[	X
ajst-5047	116	2	16	16	NUM
ajst-5047	116	3	]	]	X
ajst-5047	116	4	wei	wei	PROPN
ajst-5047	116	5	q	q	PROPN
ajst-5047	117	1	p	p	PROPN
ajst-5047	117	2	,	,	PUNCT
ajst-5047	117	3	yu	yu	PROPN
ajst-5047	117	4	z	z	PROPN
ajst-5047	117	5	m	m	PROPN
ajst-5047	117	6	,	,	PUNCT
ajst-5047	117	7	ashfold	ashfold	ADJ
ajst-5047	117	8	m	m	PROPN
ajst-5047	117	9	n	n	PRON
ajst-5047	117	10	r	r	NOUN
ajst-5047	117	11	,	,	PUNCT
ajst-5047	117	12	et	et	PROPN
ajst-5047	117	13	al	al	PROPN
ajst-5047	117	14	.	.	PUNCT
ajst-5047	117	15	effects	effect	NOUN
ajst-5047	117	16	of	of	ADP
ajst-5047	117	17	thickness	thickness	NOUN
ajst-5047	117	18	and	and	CCONJ
ajst-5047	117	19	cycle	cycle	NOUN
ajst-5047	117	20	parameters	parameter	NOUN
ajst-5047	117	21	on	on	ADP
ajst-5047	117	22	fretting	fret	VERB
ajst-5047	117	23	wear	wear	NOUN
ajst-5047	117	24	behavior	behavior	NOUN
ajst-5047	117	25	of	of	ADP
ajst-5047	117	26	cvd	cvd	PROPN
ajst-5047	117	27	diamond	diamond	NOUN
ajst-5047	117	28	coatings	coating	NOUN
ajst-5047	117	29	on	on	ADP
ajst-5047	117	30	steel	steel	NOUN
ajst-5047	117	31	substrates[j	substrates[j	PROPN
ajst-5047	117	32	]	]	PUNCT
ajst-5047	117	33	.	.	PUNCT
ajst-5047	118	1	surface	surface	NOUN
ajst-5047	118	2	&	&	CCONJ
ajst-5047	118	3	coatings	coating	NOUN
ajst-5047	118	4	technology	technology	NOUN
ajst-5047	118	5	,	,	PUNCT
ajst-5047	118	6	2010	2010	NUM
ajst-5047	118	7	,	,	PUNCT
ajst-5047	118	8	205(1	205(1	NUM
ajst-5047	118	9	):	):	PUNCT
ajst-5047	118	10	158	158	NUM
ajst-5047	118	11	-	-	SYM
ajst-5047	118	12	167	167	NUM
ajst-5047	118	13	.	.	PUNCT
ajst-5047	119	1	[	[	X
ajst-5047	119	2	17	17	NUM
ajst-5047	119	3	]	]	X
ajst-5047	119	4	mattox	mattox	PROPN
ajst-5047	119	5	d	d	PROPN
ajst-5047	119	6	m.	m.	NOUN
ajst-5047	119	7	handbook	handbook	NOUN
ajst-5047	119	8	of	of	ADP
ajst-5047	119	9	physical	physical	ADJ
ajst-5047	119	10	vapor	vapor	NOUN
ajst-5047	119	11	deposition	deposition	NOUN
ajst-5047	119	12	(	(	PUNCT
ajst-5047	119	13	pvd	pvd	NOUN
ajst-5047	119	14	)	)	PUNCT
ajst-5047	119	15	processing[m	processing[m	NOUN
ajst-5047	119	16	]	]	PUNCT
ajst-5047	119	17	.	.	PUNCT
ajst-5047	120	1	william	william	PROPN
ajst-5047	120	2	andrew	andrew	PROPN
ajst-5047	120	3	,	,	PUNCT
ajst-5047	120	4	2010	2010	NUM
ajst-5047	120	5	.	.	PUNCT
ajst-5047	121	1	[	[	X
ajst-5047	121	2	18	18	NUM
ajst-5047	121	3	]	]	X
ajst-5047	121	4	baptista	baptista	PROPN
ajst-5047	121	5	a	a	PROPN
ajst-5047	121	6	,	,	PUNCT
ajst-5047	121	7	silva	silva	PROPN
ajst-5047	121	8	f	f	PROPN
ajst-5047	121	9	,	,	PUNCT
ajst-5047	121	10	porteiro	porteiro	PROPN
ajst-5047	121	11	j	j	PROPN
ajst-5047	121	12	,	,	PUNCT
ajst-5047	121	13	et	et	PROPN
ajst-5047	121	14	al	al	PROPN
ajst-5047	121	15	.	.	PROPN
ajst-5047	121	16	sputtering	sputter	VERB
ajst-5047	121	17	physical	physical	ADJ
ajst-5047	121	18	vapour	vapour	NOUN
ajst-5047	121	19	deposition	deposition	NOUN
ajst-5047	121	20	(	(	PUNCT
ajst-5047	121	21	pvd	pvd	PROPN
ajst-5047	121	22	)	)	PUNCT
ajst-5047	121	23	coatings	coating	NOUN
ajst-5047	121	24	:	:	PUNCT
ajst-5047	121	25	a	a	DET
ajst-5047	121	26	critical	critical	ADJ
ajst-5047	121	27	review	review	NOUN
ajst-5047	121	28	on	on	ADP
ajst-5047	121	29	process	process	NOUN
ajst-5047	121	30	improvement	improvement	NOUN
ajst-5047	121	31	and	and	CCONJ
ajst-5047	121	32	market	market	NOUN
ajst-5047	121	33	trend	trend	NOUN
ajst-5047	121	34	demands[j	demands[j	NOUN
ajst-5047	121	35	]	]	PUNCT
ajst-5047	121	36	.	.	PUNCT
ajst-5047	122	1	coatings	coating	NOUN
ajst-5047	122	2	,	,	PUNCT
ajst-5047	122	3	2018	2018	NUM
ajst-5047	122	4	,	,	PUNCT
ajst-5047	122	5	8(11	8(11	NUM
ajst-5047	122	6	):	):	PUNCT
ajst-5047	122	7	402	402	NUM
ajst-5047	122	8	.	.	PUNCT
ajst-5047	123	1	[	[	X
ajst-5047	123	2	19	19	NUM
ajst-5047	123	3	]	]	X
ajst-5047	123	4	baptista	baptista	PROPN
ajst-5047	123	5	a	a	PROPN
ajst-5047	123	6	,	,	PUNCT
ajst-5047	123	7	silva	silva	PROPN
ajst-5047	123	8	f	f	PROPN
ajst-5047	123	9	,	,	PUNCT
ajst-5047	123	10	porteiro	porteiro	PROPN
ajst-5047	123	11	j	j	PROPN
ajst-5047	123	12	,	,	PUNCT
ajst-5047	123	13	et	et	PROPN
ajst-5047	123	14	al	al	PROPN
ajst-5047	123	15	.	.	PROPN
ajst-5047	123	16	sputtering	sputter	VERB
ajst-5047	123	17	physical	physical	ADJ
ajst-5047	123	18	vapour	vapour	NOUN
ajst-5047	123	19	deposition	deposition	NOUN
ajst-5047	123	20	(	(	PUNCT
ajst-5047	123	21	pvd	pvd	PROPN
ajst-5047	123	22	)	)	PUNCT
ajst-5047	123	23	coatings	coating	NOUN
ajst-5047	123	24	:	:	PUNCT
ajst-5047	123	25	a	a	DET
ajst-5047	123	26	critical	critical	ADJ
ajst-5047	123	27	review	review	NOUN
ajst-5047	123	28	on	on	ADP
ajst-5047	123	29	process	process	NOUN
ajst-5047	123	30	improvement	improvement	NOUN
ajst-5047	123	31	and	and	CCONJ
ajst-5047	123	32	market	market	NOUN
ajst-5047	123	33	trend	trend	NOUN
ajst-5047	123	34	demands[j	demands[j	NOUN
ajst-5047	123	35	]	]	PUNCT
ajst-5047	123	36	.	.	PUNCT
ajst-5047	124	1	coatings	coating	NOUN
ajst-5047	124	2	,	,	PUNCT
ajst-5047	124	3	2018	2018	NUM
ajst-5047	124	4	,	,	PUNCT
ajst-5047	124	5	8(11	8(11	NUM
ajst-5047	124	6	):	):	PUNCT
ajst-5047	124	7	402	402	NUM
ajst-5047	124	8	.	.	PUNCT
ajst-5047	125	1	[	[	X
ajst-5047	125	2	20	20	NUM
ajst-5047	125	3	]	]	X
ajst-5047	125	4	kelly	kelly	PROPN
ajst-5047	125	5	p	p	PROPN
ajst-5047	125	6	j	j	PROPN
ajst-5047	125	7	,	,	PUNCT
ajst-5047	125	8	arnell	arnell	NOUN
ajst-5047	125	9	r	r	PROPN
ajst-5047	125	10	d.	d.	PROPN
ajst-5047	125	11	magnetron	magnetron	PROPN
ajst-5047	125	12	sputtering	sputtering	NOUN
ajst-5047	125	13	:	:	PUNCT
ajst-5047	125	14	a	a	DET
ajst-5047	125	15	review	review	NOUN
ajst-5047	125	16	of	of	ADP
ajst-5047	125	17	recent	recent	ADJ
ajst-5047	125	18	developments	development	NOUN
ajst-5047	125	19	and	and	CCONJ
ajst-5047	125	20	applications[j	applications[j	NOUN
ajst-5047	125	21	]	]	PUNCT
ajst-5047	125	22	.	.	PUNCT
ajst-5047	126	1	vacuum	vacuum	PROPN
ajst-5047	126	2	,	,	PUNCT
ajst-5047	126	3	2000	2000	NUM
ajst-5047	126	4	,	,	PUNCT
ajst-5047	126	5	56(3	56(3	NUM
ajst-5047	126	6	):	):	PUNCT
ajst-5047	126	7	159172	159172	NUM
ajst-5047	126	8	.	.	PUNCT
ajst-5047	127	1	[	[	X
ajst-5047	127	2	21	21	NUM
ajst-5047	127	3	]	]	X
ajst-5047	127	4	samuelsson	samuelsson	PROPN
ajst-5047	127	5	m	m	PROPN
ajst-5047	127	6	,	,	PUNCT
ajst-5047	127	7	lundin	lundin	PROPN
ajst-5047	127	8	d	d	PROPN
ajst-5047	127	9	,	,	PUNCT
ajst-5047	127	10	jensen	jensen	PROPN
ajst-5047	127	11	j	j	PROPN
ajst-5047	127	12	,	,	PUNCT
ajst-5047	127	13	et	et	PROPN
ajst-5047	127	14	al	al	PROPN
ajst-5047	127	15	.	.	PROPN
ajst-5047	127	16	on	on	ADP
ajst-5047	127	17	the	the	DET
ajst-5047	127	18	film	film	NOUN
ajst-5047	127	19	density	density	NOUN
ajst-5047	127	20	using	use	VERB
ajst-5047	127	21	high	high	ADJ
ajst-5047	127	22	power	power	NOUN
ajst-5047	127	23	impulse	impulse	ADJ
ajst-5047	127	24	magnetron	magnetron	NOUN
ajst-5047	127	25	sputtering[j	sputtering[j	NOUN
ajst-5047	127	26	]	]	PUNCT
ajst-5047	127	27	.	.	PUNCT
ajst-5047	128	1	surface	surface	NOUN
ajst-5047	128	2	and	and	CCONJ
ajst-5047	128	3	coatings	coating	NOUN
ajst-5047	128	4	technology	technology	NOUN
ajst-5047	128	5	,	,	PUNCT
ajst-5047	128	6	2010	2010	NUM
ajst-5047	128	7	,	,	PUNCT
ajst-5047	128	8	205(2	205(2	NUM
ajst-5047	128	9	):	):	PUNCT
ajst-5047	128	10	591	591	NUM
ajst-5047	128	11	-	-	SYM
ajst-5047	128	12	596	596	NUM
ajst-5047	128	13	.	.	PUNCT
ajst-5047	129	1	[	[	X
ajst-5047	129	2	22	22	NUM
ajst-5047	129	3	]	]	X
ajst-5047	129	4	samuelsson	samuelsson	PROPN
ajst-5047	129	5	m	m	PROPN
ajst-5047	129	6	,	,	PUNCT
ajst-5047	129	7	sarakinos	sarakinos	ADV
ajst-5047	129	8	k	k	PROPN
ajst-5047	129	9	,	,	PUNCT
ajst-5047	129	10	högberg	högberg	PROPN
ajst-5047	129	11	h	h	PROPN
ajst-5047	129	12	,	,	PUNCT
ajst-5047	129	13	et	et	PROPN
ajst-5047	129	14	al	al	PROPN
ajst-5047	129	15	.	.	PUNCT
ajst-5047	129	16	growth	growth	NOUN
ajst-5047	129	17	of	of	ADP
ajst-5047	129	18	tic	tic	ADJ
ajst-5047	129	19	nanocomposite	nanocomposite	NOUN
ajst-5047	129	20	films	film	NOUN
ajst-5047	129	21	by	by	ADP
ajst-5047	129	22	reactive	reactive	ADJ
ajst-5047	129	23	high	high	ADJ
ajst-5047	129	24	power	power	NOUN
ajst-5047	129	25	impulse	impulse	ADJ
ajst-5047	129	26	magnetron	magnetron	NOUN
ajst-5047	129	27	sputtering	sputter	VERB
ajst-5047	129	28	under	under	ADP
ajst-5047	129	29	industrial	industrial	ADJ
ajst-5047	129	30	conditions[j	conditions[j	PROPN
ajst-5047	129	31	]	]	PUNCT
ajst-5047	129	32	.	.	PUNCT
ajst-5047	130	1	surface	surface	NOUN
ajst-5047	130	2	and	and	CCONJ
ajst-5047	130	3	coatings	coating	NOUN
ajst-5047	130	4	technology	technology	NOUN
ajst-5047	130	5	,	,	PUNCT
ajst-5047	130	6	2012	2012	NUM
ajst-5047	130	7	,	,	PUNCT
ajst-5047	130	8	206(8	206(8	NUM
ajst-5047	130	9	-	-	SYM
ajst-5047	130	10	9	9	NUM
ajst-5047	130	11	):	):	PUNCT
ajst-5047	130	12	2396	2396	NUM
ajst-5047	130	13	-	-	SYM
ajst-5047	130	14	2402	2402	NUM
ajst-5047	130	15	.	.	PUNCT
ajst-5047	131	1	[	[	X
ajst-5047	131	2	23	23	NUM
ajst-5047	131	3	]	]	PUNCT
ajst-5047	131	4	reed	reed	NOUN
ajst-5047	131	5	a	a	DET
ajst-5047	131	6	n	n	CCONJ
ajst-5047	131	7	,	,	PUNCT
ajst-5047	131	8	lange	lange	PROPN
ajst-5047	131	9	m	m	NOUN
ajst-5047	131	10	a	a	NOUN
ajst-5047	131	11	,	,	PUNCT
ajst-5047	131	12	muratore	muratore	ADJ
ajst-5047	131	13	c	c	NOUN
ajst-5047	131	14	,	,	PUNCT
ajst-5047	131	15	et	et	PROPN
ajst-5047	131	16	al	al	PROPN
ajst-5047	131	17	.	.	PUNCT
ajst-5047	131	18	pressure	pressure	NOUN
ajst-5047	131	19	effects	effect	NOUN
ajst-5047	131	20	on	on	ADP
ajst-5047	131	21	hipims	hipim	NOUN
ajst-5047	131	22	deposition	deposition	NOUN
ajst-5047	131	23	of	of	ADP
ajst-5047	131	24	hafnium	hafnium	ADJ
ajst-5047	131	25	films[j	films[j	NOUN
ajst-5047	131	26	]	]	PUNCT
ajst-5047	131	27	.	.	PUNCT
ajst-5047	132	1	surface	surface	NOUN
ajst-5047	132	2	and	and	CCONJ
ajst-5047	132	3	coatings	coating	NOUN
ajst-5047	132	4	technology	technology	NOUN
ajst-5047	132	5	,	,	PUNCT
ajst-5047	132	6	2012	2012	NUM
ajst-5047	132	7	,	,	PUNCT
ajst-5047	132	8	206(18	206(18	NUM
ajst-5047	132	9	):	):	PUNCT
ajst-5047	132	10	3795	3795	NUM
ajst-5047	132	11	-	-	SYM
ajst-5047	132	12	3802	3802	NUM
ajst-5047	132	13	.	.	PUNCT
ajst-5047	133	1	[	[	X
ajst-5047	133	2	24	24	NUM
ajst-5047	133	3	]	]	X
ajst-5047	133	4	christie	christie	PROPN
ajst-5047	133	5	d	d	PROPN
ajst-5047	133	6	j.	j.	PROPN
ajst-5047	133	7	target	target	PROPN
ajst-5047	133	8	material	material	NOUN
ajst-5047	133	9	pathways	pathway	NOUN
ajst-5047	133	10	model	model	NOUN
ajst-5047	133	11	for	for	ADP
ajst-5047	133	12	high	high	ADJ
ajst-5047	133	13	power	power	NOUN
ajst-5047	133	14	pulsed	pulse	VERB
ajst-5047	133	15	magnetron	magnetron	NOUN
ajst-5047	133	16	sputtering[j	sputtering[j	NOUN
ajst-5047	133	17	]	]	PUNCT
ajst-5047	133	18	.	.	PUNCT
ajst-5047	134	1	journal	journal	PROPN
ajst-5047	134	2	of	of	ADP
ajst-5047	134	3	vacuum	vacuum	PROPN
ajst-5047	134	4	science	science	PROPN
ajst-5047	134	5	&	&	CCONJ
ajst-5047	134	6	technology	technology	PROPN
ajst-5047	134	7	a	a	DET
ajst-5047	134	8	:	:	PUNCT
ajst-5047	134	9	vacuum	vacuum	NOUN
ajst-5047	134	10	,	,	PUNCT
ajst-5047	134	11	surfaces	surface	NOUN
ajst-5047	134	12	,	,	PUNCT
ajst-5047	134	13	and	and	CCONJ
ajst-5047	134	14	films	film	NOUN
ajst-5047	134	15	,	,	PUNCT
ajst-5047	134	16	2005	2005	NUM
ajst-5047	134	17	,	,	PUNCT
ajst-5047	134	18	23(2	23(2	NUM
ajst-5047	134	19	):	):	PUNCT
ajst-5047	134	20	330	330	NUM
ajst-5047	134	21	-	-	SYM
ajst-5047	134	22	335	335	NUM
ajst-5047	134	23	.	.	PUNCT
ajst-5047	135	1	[	[	X
ajst-5047	135	2	25	25	NUM
ajst-5047	135	3	]	]	X
ajst-5047	135	4	luo	luo	PROPN
ajst-5047	135	5	,	,	PUNCT
ajst-5047	135	6	q.	q.	PROPN
ajst-5047	135	7	,	,	PUNCT
ajst-5047	135	8	yang	yang	PROPN
ajst-5047	135	9	,	,	PUNCT
ajst-5047	135	10	s.	s.	PROPN
ajst-5047	135	11	,	,	PUNCT
ajst-5047	135	12	&	&	CCONJ
ajst-5047	135	13	cooke	cooke	PROPN
ajst-5047	135	14	,	,	PUNCT
ajst-5047	135	15	k.	k.	PROPN
ajst-5047	135	16	e.	e.	PROPN
ajst-5047	135	17	hybrid	hybrid	PROPN
ajst-5047	135	18	hipims	hipim	NOUN
ajst-5047	135	19	and	and	CCONJ
ajst-5047	135	20	dc	dc	PROPN
ajst-5047	135	21	magnetron	magnetron	NOUN
ajst-5047	135	22	sputtering	sputtering	ADJ
ajst-5047	135	23	deposition	deposition	NOUN
ajst-5047	135	24	of	of	ADP
ajst-5047	135	25	tin	tin	NOUN
ajst-5047	135	26	coatings	coating	NOUN
ajst-5047	135	27	:	:	PUNCT
ajst-5047	135	28	deposition	deposition	NOUN
ajst-5047	135	29	rate	rate	NOUN
ajst-5047	135	30	,	,	PUNCT
ajst-5047	135	31	structure	structure	NOUN
ajst-5047	135	32	and	and	CCONJ
ajst-5047	135	33	tribological	tribological	ADJ
ajst-5047	135	34	properties	property	NOUN
ajst-5047	135	35	.	.	PUNCT
ajst-5047	136	1	surface	surface	NOUN
ajst-5047	136	2	and	and	CCONJ
ajst-5047	136	3	coatings	coating	NOUN
ajst-5047	136	4	technology	technology	NOUN
ajst-5047	136	5	,	,	PUNCT
ajst-5047	136	6	2013	2013	NUM
ajst-5047	136	7	,	,	PUNCT
ajst-5047	136	8	236	236	NUM
ajst-5047	136	9	:	:	SYM
ajst-5047	136	10	13	13	NUM
ajst-5047	136	11	-	-	SYM
ajst-5047	136	12	21	21	NUM
ajst-5047	136	13	.	.	PUNCT
ajst-5047	137	1	[	[	X
ajst-5047	137	2	26	26	NUM
ajst-5047	137	3	]	]	PUNCT
ajst-5047	137	4	poolcharuansin	poolcharuansin	NOUN
ajst-5047	137	5	p	p	NOUN
ajst-5047	137	6	,	,	PUNCT
ajst-5047	137	7	bradley	bradley	PROPN
ajst-5047	137	8	j	j	PROPN
ajst-5047	137	9	w.	w.	PROPN
ajst-5047	137	10	short	short	PROPN
ajst-5047	137	11	-	-	PUNCT
ajst-5047	137	12	and	and	CCONJ
ajst-5047	137	13	long	long	ADJ
ajst-5047	137	14	-	-	PUNCT
ajst-5047	137	15	term	term	NOUN
ajst-5047	137	16	plasma	plasma	NOUN
ajst-5047	137	17	phenomena	phenomenon	NOUN
ajst-5047	137	18	in	in	ADP
ajst-5047	137	19	a	a	DET
ajst-5047	137	20	hipims	hipim	NOUN
ajst-5047	137	21	discharge[j	discharge[j	NOUN
ajst-5047	137	22	]	]	PUNCT
ajst-5047	137	23	.	.	PUNCT
ajst-5047	138	1	plasma	plasma	NOUN
ajst-5047	138	2	sources	source	NOUN
ajst-5047	138	3	science	science	NOUN
ajst-5047	138	4	and	and	CCONJ
ajst-5047	138	5	technology	technology	NOUN
ajst-5047	138	6	,	,	PUNCT
ajst-5047	138	7	2010	2010	NUM
ajst-5047	138	8	,	,	PUNCT
ajst-5047	138	9	19(2	19(2	NUM
ajst-5047	138	10	):	):	PUNCT
ajst-5047	138	11	025010	025010	NUM
ajst-5047	138	12	.	.	PUNCT