id	sid	tid	token	lemma	pos
ajst-6463	1	1	academic	academic	ADJ
ajst-6463	1	2	journal	journal	NOUN
ajst-6463	1	3	of	of	ADP
ajst-6463	1	4	science	science	NOUN
ajst-6463	1	5	and	and	CCONJ
ajst-6463	1	6	technology	technology	NOUN
ajst-6463	1	7	issn	issn	NOUN
ajst-6463	1	8	:	:	PUNCT
ajst-6463	1	9	2771	2771	NUM
ajst-6463	1	10	-	-	SYM
ajst-6463	1	11	3032	3032	NUM
ajst-6463	1	12	|	|	NOUN
ajst-6463	1	13	vol	vol	NOUN
ajst-6463	1	14	.	.	PROPN
ajst-6463	2	1	5	5	NUM
ajst-6463	2	2	,	,	PUNCT
ajst-6463	2	3	no	no	INTJ
ajst-6463	2	4	.	.	NOUN
ajst-6463	2	5	2	2	NUM
ajst-6463	2	6	,	,	PUNCT
ajst-6463	2	7	2023	2023	NUM
ajst-6463	2	8	128	128	NUM
ajst-6463	2	9	design	design	NOUN
ajst-6463	2	10	of	of	ADP
ajst-6463	2	11	a	a	DET
ajst-6463	2	12	thermopressed	thermopresse	VERB
ajst-6463	2	13	bonding	bonding	NOUN
ajst-6463	2	14	vacuum	vacuum	NOUN
ajst-6463	2	15	box	box	PROPN
ajst-6463	2	16	for	for	ADP
ajst-6463	2	17	microfluidic	microfluidic	ADJ
ajst-6463	2	18	chips	chip	NOUN
ajst-6463	2	19	zhiyu	zhiyu	NOUN
ajst-6463	2	20	liu	liu	PROPN
ajst-6463	2	21	beijing	beijing	PROPN
ajst-6463	2	22	poly	poly	PROPN
ajst-6463	2	23	microchip	microchip	PROPN
ajst-6463	2	24	technology	technology	PROPN
ajst-6463	2	25	co.	co.	PROPN
ajst-6463	2	26	,	,	PUNCT
ajst-6463	2	27	ltd	ltd	PROPN
ajst-6463	2	28	,	,	PUNCT
ajst-6463	2	29	beijing	beijing	PROPN
ajst-6463	2	30	100000	100000	NUM
ajst-6463	2	31	,	,	PUNCT
ajst-6463	2	32	china	china	PROPN
ajst-6463	2	33	abstract	abstract	NOUN
ajst-6463	2	34	:	:	PUNCT
ajst-6463	2	35	in	in	ADP
ajst-6463	2	36	this	this	DET
ajst-6463	2	37	paper	paper	NOUN
ajst-6463	2	38	,	,	PUNCT
ajst-6463	2	39	a	a	DET
ajst-6463	2	40	vacuum	vacuum	NOUN
ajst-6463	2	41	chamber	chamber	NOUN
ajst-6463	2	42	is	be	AUX
ajst-6463	2	43	designed	design	VERB
ajst-6463	2	44	to	to	PART
ajst-6463	2	45	facilitate	facilitate	VERB
ajst-6463	2	46	the	the	DET
ajst-6463	2	47	hot	hot	ADJ
ajst-6463	2	48	pressing	press	VERB
ajst-6463	2	49	bonding	bonding	NOUN
ajst-6463	2	50	of	of	ADP
ajst-6463	2	51	microfluidic	microfluidic	ADJ
ajst-6463	2	52	chips	chip	NOUN
ajst-6463	2	53	,	,	PUNCT
ajst-6463	2	54	according	accord	VERB
ajst-6463	2	55	to	to	ADP
ajst-6463	2	56	the	the	DET
ajst-6463	2	57	current	current	ADJ
ajst-6463	2	58	microfluidic	microfluidic	ADJ
ajst-6463	2	59	chip	chip	NOUN
ajst-6463	2	60	hot	hot	ADJ
ajst-6463	2	61	pressing	press	VERB
ajst-6463	2	62	bonding	bonding	NOUN
ajst-6463	2	63	process	process	NOUN
ajst-6463	2	64	,	,	PUNCT
ajst-6463	2	65	chip	chip	NOUN
ajst-6463	2	66	deformation	deformation	NOUN
ajst-6463	2	67	,	,	PUNCT
ajst-6463	2	68	flow	flow	NOUN
ajst-6463	2	69	channel	channel	NOUN
ajst-6463	2	70	edge	edge	NOUN
ajst-6463	2	71	bubbles	bubble	NOUN
ajst-6463	2	72	and	and	CCONJ
ajst-6463	2	73	other	other	ADJ
ajst-6463	2	74	problems	problem	NOUN
ajst-6463	2	75	,	,	PUNCT
ajst-6463	2	76	hot	hot	ADJ
ajst-6463	2	77	-	-	PUNCT
ajst-6463	2	78	pressed	press	VERB
ajst-6463	2	79	bonding	bonding	NOUN
ajst-6463	2	80	in	in	ADP
ajst-6463	2	81	a	a	DET
ajst-6463	2	82	vacuum	vacuum	NOUN
ajst-6463	2	83	device	device	NOUN
ajst-6463	2	84	is	be	AUX
ajst-6463	2	85	proposed	propose	VERB
ajst-6463	2	86	to	to	ADP
ajst-6463	2	87	hot	hot	ADJ
ajst-6463	2	88	-	-	PUNCT
ajst-6463	2	89	press	press	VERB
ajst-6463	2	90	the	the	DET
ajst-6463	2	91	chip	chip	NOUN
ajst-6463	2	92	,	,	PUNCT
ajst-6463	2	93	combined	combine	VERB
ajst-6463	2	94	with	with	ADP
ajst-6463	2	95	the	the	DET
ajst-6463	2	96	structure	structure	NOUN
ajst-6463	2	97	of	of	ADP
ajst-6463	2	98	the	the	DET
ajst-6463	2	99	heat	heat	NOUN
ajst-6463	2	100	press	press	NOUN
ajst-6463	2	101	,	,	PUNCT
ajst-6463	2	102	the	the	DET
ajst-6463	2	103	structure	structure	NOUN
ajst-6463	2	104	of	of	ADP
ajst-6463	2	105	the	the	DET
ajst-6463	2	106	vacuum	vacuum	PROPN
ajst-6463	2	107	box	box	PROPN
ajst-6463	2	108	,	,	PUNCT
ajst-6463	2	109	the	the	DET
ajst-6463	2	110	connection	connection	NOUN
ajst-6463	2	111	line	line	NOUN
ajst-6463	2	112	,	,	PUNCT
ajst-6463	2	113	etc	etc	X
ajst-6463	2	114	.	.	X
ajst-6463	2	115	were	be	AUX
ajst-6463	2	116	designed	design	VERB
ajst-6463	2	117	,	,	PUNCT
ajst-6463	2	118	use	use	VERB
ajst-6463	2	119	solidworks3d	solidworks3d	ADJ
ajst-6463	2	120	modeling	modeling	NOUN
ajst-6463	2	121	,	,	PUNCT
ajst-6463	2	122	the	the	DET
ajst-6463	2	123	design	design	NOUN
ajst-6463	2	124	,	,	PUNCT
ajst-6463	2	125	production	production	NOUN
ajst-6463	2	126	,	,	PUNCT
ajst-6463	2	127	assembly	assembly	NOUN
ajst-6463	2	128	and	and	CCONJ
ajst-6463	2	129	experiment	experiment	NOUN
ajst-6463	2	130	of	of	ADP
ajst-6463	2	131	the	the	DET
ajst-6463	2	132	vacuum	vacuum	NOUN
ajst-6463	2	133	hot	hot	ADJ
ajst-6463	2	134	pressing	press	VERB
ajst-6463	2	135	device	device	NOUN
ajst-6463	2	136	were	be	AUX
ajst-6463	2	137	completed	complete	VERB
ajst-6463	2	138	.	.	PUNCT
ajst-6463	3	1	keywords	keyword	NOUN
ajst-6463	3	2	:	:	PUNCT
ajst-6463	3	3	microfluidic	microfluidic	ADJ
ajst-6463	3	4	chips	chip	NOUN
ajst-6463	3	5	,	,	PUNCT
ajst-6463	3	6	hot	hot	ADJ
ajst-6463	3	7	press	press	NOUN
ajst-6463	3	8	bonding	bonding	NOUN
ajst-6463	3	9	,	,	PUNCT
ajst-6463	3	10	vacuum	vacuum	NOUN
ajst-6463	3	11	structure	structure	NOUN
ajst-6463	3	12	.	.	PUNCT
ajst-6463	4	1	1	1	X
ajst-6463	4	2	.	.	X
ajst-6463	4	3	introduction	introduction	NOUN
ajst-6463	4	4	microfluidic	microfluidic	ADJ
ajst-6463	4	5	chips	chip	NOUN
ajst-6463	4	6	have	have	VERB
ajst-6463	4	7	the	the	DET
ajst-6463	4	8	advantages	advantage	NOUN
ajst-6463	4	9	of	of	ADP
ajst-6463	4	10	small	small	ADJ
ajst-6463	4	11	size	size	NOUN
ajst-6463	4	12	,	,	PUNCT
ajst-6463	4	13	low	low	ADJ
ajst-6463	4	14	cost	cost	NOUN
ajst-6463	4	15	,	,	PUNCT
ajst-6463	4	16	easy	easy	ADJ
ajst-6463	4	17	to	to	PART
ajst-6463	4	18	carry	carry	VERB
ajst-6463	4	19	,	,	PUNCT
ajst-6463	4	20	small	small	ADJ
ajst-6463	4	21	environmental	environmental	ADJ
ajst-6463	4	22	pollution	pollution	NOUN
ajst-6463	4	23	,	,	PUNCT
ajst-6463	4	24	automatic	automatic	ADJ
ajst-6463	4	25	analysis	analysis	NOUN
ajst-6463	4	26	process	process	NOUN
ajst-6463	4	27	,	,	PUNCT
ajst-6463	4	28	fast	fast	ADJ
ajst-6463	4	29	analysis	analysis	NOUN
ajst-6463	4	30	speed	speed	NOUN
ajst-6463	4	31	,	,	PUNCT
ajst-6463	4	32	and	and	CCONJ
ajst-6463	4	33	few	few	ADJ
ajst-6463	4	34	samples	sample	NOUN
ajst-6463	4	35	and	and	CCONJ
ajst-6463	4	36	reagents	reagent	NOUN
ajst-6463	4	37	required	require	VERB
ajst-6463	4	38	[	[	X
ajst-6463	4	39	1,2	1,2	NUM
ajst-6463	4	40	]	]	PUNCT
ajst-6463	4	41	.	.	PUNCT
ajst-6463	5	1	it	it	PRON
ajst-6463	5	2	has	have	VERB
ajst-6463	5	3	broad	broad	ADJ
ajst-6463	5	4	application	application	NOUN
ajst-6463	5	5	prospects	prospect	NOUN
ajst-6463	5	6	in	in	ADP
ajst-6463	5	7	the	the	DET
ajst-6463	5	8	fields	field	NOUN
ajst-6463	5	9	of	of	ADP
ajst-6463	5	10	genetic	genetic	ADJ
ajst-6463	5	11	detection	detection	NOUN
ajst-6463	5	12	,	,	PUNCT
ajst-6463	5	13	in	in	ADP
ajst-6463	5	14	vitro	vitro	X
ajst-6463	5	15	diagnosis	diagnosis	NOUN
ajst-6463	5	16	,	,	PUNCT
ajst-6463	5	17	cell	cell	NOUN
ajst-6463	5	18	sorting	sorting	NOUN
ajst-6463	5	19	,	,	PUNCT
ajst-6463	5	20	drug	drug	NOUN
ajst-6463	5	21	synthesis	synthesis	NOUN
ajst-6463	5	22	and	and	CCONJ
ajst-6463	5	23	screening	screening	NOUN
ajst-6463	5	24	.	.	PUNCT
ajst-6463	6	1	samples	sample	NOUN
ajst-6463	6	2	and	and	CCONJ
ajst-6463	6	3	reagents	reagent	NOUN
ajst-6463	6	4	are	be	AUX
ajst-6463	6	5	typically	typically	ADV
ajst-6463	6	6	reactive	reactive	ADJ
ajst-6463	6	7	in	in	ADP
ajst-6463	6	8	microliters	microliter	NOUN
ajst-6463	6	9	or	or	CCONJ
ajst-6463	6	10	even	even	ADV
ajst-6463	6	11	nanoliters	nanoliter	NOUN
ajst-6463	6	12	,	,	PUNCT
ajst-6463	6	13	in	in	ADP
ajst-6463	6	14	addition	addition	NOUN
ajst-6463	6	15	to	to	ADP
ajst-6463	6	16	ensuring	ensure	VERB
ajst-6463	6	17	high	high	ADJ
ajst-6463	6	18	accuracy	accuracy	NOUN
ajst-6463	6	19	and	and	CCONJ
ajst-6463	6	20	high	high	ADJ
ajst-6463	6	21	efficiency	efficiency	NOUN
ajst-6463	6	22	of	of	ADP
ajst-6463	6	23	detection	detection	NOUN
ajst-6463	6	24	,	,	PUNCT
ajst-6463	6	25	maximum	maximum	ADJ
ajst-6463	6	26	savings	saving	NOUN
ajst-6463	6	27	in	in	ADP
ajst-6463	6	28	sample	sample	NOUN
ajst-6463	6	29	and	and	CCONJ
ajst-6463	6	30	reagent	reagent	ADJ
ajst-6463	6	31	volume	volume	NOUN
ajst-6463	6	32	[	[	X
ajst-6463	6	33	3	3	NUM
ajst-6463	6	34	]	]	PUNCT
ajst-6463	6	35	.	.	PUNCT
ajst-6463	7	1	the	the	DET
ajst-6463	7	2	bond	bond	NOUN
ajst-6463	7	3	synthesis	synthesis	NOUN
ajst-6463	7	4	between	between	ADP
ajst-6463	7	5	the	the	DET
ajst-6463	7	6	microfluidic	microfluidic	ADJ
ajst-6463	7	7	chip	chip	NOUN
ajst-6463	7	8	structure	structure	NOUN
ajst-6463	7	9	sheet	sheet	NOUN
ajst-6463	7	10	and	and	CCONJ
ajst-6463	7	11	the	the	DET
ajst-6463	7	12	cover	cover	NOUN
ajst-6463	7	13	sheet	sheet	NOUN
ajst-6463	7	14	is	be	AUX
ajst-6463	7	15	an	an	DET
ajst-6463	7	16	important	important	ADJ
ajst-6463	7	17	key	key	ADJ
ajst-6463	7	18	process	process	NOUN
ajst-6463	7	19	in	in	ADP
ajst-6463	7	20	the	the	DET
ajst-6463	7	21	chip	chip	NOUN
ajst-6463	7	22	manufacturing	manufacturing	NOUN
ajst-6463	7	23	process	process	NOUN
ajst-6463	7	24	.	.	PUNCT
ajst-6463	8	1	due	due	ADP
ajst-6463	8	2	to	to	ADP
ajst-6463	8	3	the	the	DET
ajst-6463	8	4	use	use	NOUN
ajst-6463	8	5	of	of	ADP
ajst-6463	8	6	hot	hot	ADV
ajst-6463	8	7	-	-	PUNCT
ajst-6463	8	8	pressed	press	VERB
ajst-6463	8	9	pmma	pmma	NOUN
ajst-6463	8	10	chip	chip	NOUN
ajst-6463	8	11	substrate	substrate	NOUN
ajst-6463	8	12	,	,	PUNCT
ajst-6463	8	13	simple	simple	ADJ
ajst-6463	8	14	requirements	requirement	NOUN
ajst-6463	8	15	with	with	ADP
ajst-6463	8	16	equipment	equipment	NOUN
ajst-6463	8	17	,	,	PUNCT
ajst-6463	8	18	low	low	ADJ
ajst-6463	8	19	material	material	NOUN
ajst-6463	8	20	cost	cost	NOUN
ajst-6463	8	21	,	,	PUNCT
ajst-6463	8	22	short	short	ADJ
ajst-6463	8	23	process	process	NOUN
ajst-6463	8	24	cycle	cycle	NOUN
ajst-6463	8	25	,	,	PUNCT
ajst-6463	8	26	high	high	ADJ
ajst-6463	8	27	forming	form	VERB
ajst-6463	8	28	accuracy	accuracy	NOUN
ajst-6463	8	29	,	,	PUNCT
ajst-6463	8	30	it	it	PRON
ajst-6463	8	31	is	be	AUX
ajst-6463	8	32	suitable	suitable	ADJ
ajst-6463	8	33	for	for	ADP
ajst-6463	8	34	industrialization	industrialization	NOUN
ajst-6463	8	35	and	and	CCONJ
ajst-6463	8	36	other	other	ADJ
ajst-6463	8	37	advantages	advantage	NOUN
ajst-6463	8	38	,	,	PUNCT
ajst-6463	8	39	and	and	CCONJ
ajst-6463	8	40	hot	hot	ADJ
ajst-6463	8	41	pressing	press	VERB
ajst-6463	8	42	method	method	NOUN
ajst-6463	8	43	is	be	AUX
ajst-6463	8	44	a	a	DET
ajst-6463	8	45	technology	technology	NOUN
ajst-6463	8	46	that	that	PRON
ajst-6463	8	47	rapidly	rapidly	ADV
ajst-6463	8	48	replicates	replicate	VERB
ajst-6463	8	49	microfluidic	microfluidic	ADJ
ajst-6463	8	50	chips	chip	NOUN
ajst-6463	8	51	[	[	X
ajst-6463	8	52	4	4	NUM
ajst-6463	8	53	]	]	PUNCT
ajst-6463	8	54	.	.	PUNCT
ajst-6463	9	1	therefore	therefore	ADV
ajst-6463	9	2	,	,	PUNCT
ajst-6463	9	3	hot	hot	ADJ
ajst-6463	9	4	pressing	press	VERB
ajst-6463	9	5	bonds	bond	NOUN
ajst-6463	9	6	and	and	CCONJ
ajst-6463	9	7	bonding	bonding	NOUN
ajst-6463	9	8	methods	method	NOUN
ajst-6463	9	9	have	have	AUX
ajst-6463	9	10	always	always	ADV
ajst-6463	9	11	been	be	AUX
ajst-6463	9	12	a	a	DET
ajst-6463	9	13	popular	popular	ADJ
ajst-6463	9	14	bonding	bonding	NOUN
ajst-6463	9	15	method	method	NOUN
ajst-6463	9	16	among	among	ADP
ajst-6463	9	17	all	all	DET
ajst-6463	9	18	bonding	bonding	NOUN
ajst-6463	9	19	methods	method	NOUN
ajst-6463	9	20	.	.	PUNCT
ajst-6463	10	1	however	however	ADV
ajst-6463	10	2	,	,	PUNCT
ajst-6463	10	3	during	during	ADP
ajst-6463	10	4	the	the	DET
ajst-6463	10	5	hot	hot	ADJ
ajst-6463	10	6	press	press	NOUN
ajst-6463	10	7	bonding	bonding	NOUN
ajst-6463	10	8	process	process	NOUN
ajst-6463	10	9	,	,	PUNCT
ajst-6463	10	10	there	there	PRON
ajst-6463	10	11	are	be	VERB
ajst-6463	10	12	still	still	ADV
ajst-6463	10	13	some	some	DET
ajst-6463	10	14	problems	problem	NOUN
ajst-6463	10	15	.	.	PUNCT
ajst-6463	11	1	for	for	ADP
ajst-6463	11	2	example	example	NOUN
ajst-6463	11	3	,	,	PUNCT
ajst-6463	11	4	the	the	DET
ajst-6463	11	5	chip	chip	NOUN
ajst-6463	11	6	will	will	AUX
ajst-6463	11	7	be	be	AUX
ajst-6463	11	8	misaligned	misalign	VERB
ajst-6463	11	9	during	during	ADP
ajst-6463	11	10	the	the	DET
ajst-6463	11	11	hot	hot	ADJ
ajst-6463	11	12	pressing	press	VERB
ajst-6463	11	13	process	process	NOUN
ajst-6463	11	14	,	,	PUNCT
ajst-6463	11	15	and	and	CCONJ
ajst-6463	11	16	the	the	DET
ajst-6463	11	17	edge	edge	NOUN
ajst-6463	11	18	between	between	ADP
ajst-6463	11	19	the	the	DET
ajst-6463	11	20	hot	hot	ADJ
ajst-6463	11	21	pressing	press	VERB
ajst-6463	11	22	process	process	NOUN
ajst-6463	11	23	and	and	CCONJ
ajst-6463	11	24	the	the	DET
ajst-6463	11	25	chip	chip	NOUN
ajst-6463	11	26	will	will	AUX
ajst-6463	11	27	not	not	PART
ajst-6463	11	28	be	be	AUX
ajst-6463	11	29	pressed	press	VERB
ajst-6463	11	30	.	.	PUNCT
ajst-6463	12	1	the	the	DET
ajst-6463	12	2	quality	quality	NOUN
ajst-6463	12	3	after	after	ADP
ajst-6463	12	4	chip	chip	NOUN
ajst-6463	12	5	bonding	bonding	NOUN
ajst-6463	12	6	will	will	AUX
ajst-6463	12	7	directly	directly	ADV
ajst-6463	12	8	affect	affect	VERB
ajst-6463	12	9	the	the	DET
ajst-6463	12	10	detection	detection	NOUN
ajst-6463	12	11	effect	effect	NOUN
ajst-6463	12	12	.	.	PUNCT
ajst-6463	13	1	and	and	CCONJ
ajst-6463	13	2	reduce	reduce	VERB
ajst-6463	13	3	the	the	DET
ajst-6463	13	4	production	production	NOUN
ajst-6463	13	5	of	of	ADP
ajst-6463	13	6	genuine	genuine	ADJ
ajst-6463	13	7	rate	rate	NOUN
ajst-6463	13	8	and	and	CCONJ
ajst-6463	13	9	production	production	NOUN
ajst-6463	13	10	efficiency	efficiency	NOUN
ajst-6463	13	11	,	,	PUNCT
ajst-6463	13	12	increased	increase	VERB
ajst-6463	13	13	production	production	NOUN
ajst-6463	13	14	costs	cost	NOUN
ajst-6463	13	15	.	.	PUNCT
ajst-6463	14	1	to	to	PART
ajst-6463	14	2	address	address	VERB
ajst-6463	14	3	these	these	DET
ajst-6463	14	4	issues	issue	NOUN
ajst-6463	14	5	,	,	PUNCT
ajst-6463	14	6	in	in	ADP
ajst-6463	14	7	this	this	DET
ajst-6463	14	8	paper	paper	NOUN
ajst-6463	14	9	,	,	PUNCT
ajst-6463	14	10	a	a	DET
ajst-6463	14	11	vacuum	vacuum	NOUN
ajst-6463	14	12	hot	hot	ADJ
ajst-6463	14	13	pressing	press	VERB
ajst-6463	14	14	device	device	NOUN
ajst-6463	14	15	is	be	AUX
ajst-6463	14	16	designed	design	VERB
ajst-6463	14	17	that	that	PRON
ajst-6463	14	18	is	be	AUX
ajst-6463	14	19	conducive	conducive	ADJ
ajst-6463	14	20	to	to	PART
ajst-6463	14	21	chip	chip	VERB
ajst-6463	14	22	hot	hot	ADJ
ajst-6463	14	23	pressing	pressing	NOUN
ajst-6463	14	24	.	.	PUNCT
ajst-6463	15	1	2	2	X
ajst-6463	15	2	.	.	X
ajst-6463	15	3	microfluidic	microfluidic	ADJ
ajst-6463	15	4	chip	chip	NOUN
ajst-6463	15	5	hot	hot	ADJ
ajst-6463	15	6	pressing	press	VERB
ajst-6463	15	7	bonding	bond	VERB
ajst-6463	15	8	vacuum	vacuum	NOUN
ajst-6463	15	9	box	box	PROPN
ajst-6463	15	10	design	design	NOUN
ajst-6463	15	11	figure	figure	NOUN
ajst-6463	15	12	1	1	NUM
ajst-6463	15	13	vacuum	vacuum	NOUN
ajst-6463	15	14	heat	heat	NOUN
ajst-6463	15	15	press	press	NOUN
ajst-6463	15	16	machine	machine	NOUN
ajst-6463	15	17	is	be	AUX
ajst-6463	15	18	a	a	DET
ajst-6463	15	19	heat	heat	NOUN
ajst-6463	15	20	press	press	NOUN
ajst-6463	15	21	machine	machine	NOUN
ajst-6463	15	22	installed	instal	VERB
ajst-6463	15	23	with	with	ADP
ajst-6463	15	24	vacuum	vacuum	PROPN
ajst-6463	15	25	box	box	PROPN
ajst-6463	15	26	,	,	PUNCT
ajst-6463	15	27	figure	figure	NOUN
ajst-6463	15	28	2	2	NUM
ajst-6463	15	29	is	be	AUX
ajst-6463	15	30	the	the	DET
ajst-6463	15	31	structural	structural	ADJ
ajst-6463	15	32	diagram	diagram	NOUN
ajst-6463	15	33	of	of	ADP
ajst-6463	15	34	the	the	DET
ajst-6463	15	35	vacuum	vacuum	PROPN
ajst-6463	15	36	box	box	PROPN
ajst-6463	15	37	.	.	PUNCT
ajst-6463	16	1	the	the	DET
ajst-6463	16	2	vacuum	vacuum	PROPN
ajst-6463	16	3	box	box	PROPN
ajst-6463	16	4	is	be	AUX
ajst-6463	16	5	mainly	mainly	ADV
ajst-6463	16	6	composed	compose	VERB
ajst-6463	16	7	of	of	ADP
ajst-6463	16	8	upper	upper	ADJ
ajst-6463	16	9	cover	cover	NOUN
ajst-6463	16	10	,	,	PUNCT
ajst-6463	16	11	vacuum	vacuum	PROPN
ajst-6463	16	12	box	box	PROPN
ajst-6463	16	13	,	,	PUNCT
ajst-6463	16	14	vacuum	vacuum	NOUN
ajst-6463	16	15	door	door	NOUN
ajst-6463	16	16	,	,	PUNCT
ajst-6463	16	17	buckle	buckle	NOUN
ajst-6463	16	18	and	and	CCONJ
ajst-6463	16	19	other	other	ADJ
ajst-6463	16	20	structures	structure	NOUN
ajst-6463	16	21	.	.	PUNCT
ajst-6463	17	1	the	the	DET
ajst-6463	17	2	whole	whole	ADJ
ajst-6463	17	3	structure	structure	NOUN
ajst-6463	17	4	is	be	AUX
ajst-6463	17	5	made	make	VERB
ajst-6463	17	6	of	of	ADP
ajst-6463	17	7	stainless	stainless	ADJ
ajst-6463	17	8	steel	steel	NOUN
ajst-6463	17	9	,	,	PUNCT
ajst-6463	17	10	the	the	DET
ajst-6463	17	11	vacuum	vacuum	NOUN
ajst-6463	17	12	glass	glass	NOUN
ajst-6463	17	13	in	in	ADP
ajst-6463	17	14	the	the	DET
ajst-6463	17	15	central	central	ADJ
ajst-6463	17	16	observation	observation	NOUN
ajst-6463	17	17	area	area	NOUN
ajst-6463	17	18	is	be	AUX
ajst-6463	17	19	made	make	VERB
ajst-6463	17	20	of	of	ADP
ajst-6463	17	21	quartz	quartz	NOUN
ajst-6463	17	22	glass	glass	NOUN
ajst-6463	17	23	.	.	PUNCT
ajst-6463	18	1	there	there	PRON
ajst-6463	18	2	are	be	VERB
ajst-6463	18	3	three	three	NUM
ajst-6463	18	4	important	important	ADJ
ajst-6463	18	5	holes	hole	NOUN
ajst-6463	18	6	in	in	ADP
ajst-6463	18	7	the	the	DET
ajst-6463	18	8	vacuum	vacuum	PROPN
ajst-6463	18	9	box	box	PROPN
ajst-6463	18	10	,	,	PUNCT
ajst-6463	18	11	evacuation	evacuation	NOUN
ajst-6463	18	12	holes	hole	NOUN
ajst-6463	18	13	and	and	CCONJ
ajst-6463	18	14	two	two	NUM
ajst-6463	18	15	cooling	cool	VERB
ajst-6463	18	16	holes	hole	NOUN
ajst-6463	18	17	,	,	PUNCT
ajst-6463	18	18	the	the	DET
ajst-6463	18	19	vacuum	vacuum	NOUN
ajst-6463	18	20	hole	hole	NOUN
ajst-6463	18	21	is	be	AUX
ajst-6463	18	22	connected	connect	VERB
ajst-6463	18	23	to	to	ADP
ajst-6463	18	24	the	the	DET
ajst-6463	18	25	vacuum	vacuum	NOUN
ajst-6463	18	26	pump	pump	NOUN
ajst-6463	18	27	by	by	ADP
ajst-6463	18	28	the	the	DET
ajst-6463	18	29	air	air	NOUN
ajst-6463	18	30	pipe	pipe	NOUN
ajst-6463	18	31	,	,	PUNCT
ajst-6463	18	32	achieve	achieve	VERB
ajst-6463	18	33	a	a	DET
ajst-6463	18	34	vacuum	vacuum	NOUN
ajst-6463	18	35	environment	environment	NOUN
ajst-6463	18	36	,	,	PUNCT
ajst-6463	18	37	the	the	DET
ajst-6463	18	38	cooling	cool	VERB
ajst-6463	18	39	water	water	NOUN
ajst-6463	18	40	circulation	circulation	NOUN
ajst-6463	18	41	system	system	NOUN
ajst-6463	18	42	is	be	AUX
ajst-6463	18	43	connected	connect	VERB
ajst-6463	18	44	to	to	ADP
ajst-6463	18	45	the	the	DET
ajst-6463	18	46	hot	hot	ADJ
ajst-6463	18	47	stage	stage	NOUN
ajst-6463	18	48	through	through	ADP
ajst-6463	18	49	the	the	DET
ajst-6463	18	50	cooling	cool	VERB
ajst-6463	18	51	hole	hole	NOUN
ajst-6463	18	52	,	,	PUNCT
ajst-6463	18	53	enables	enable	VERB
ajst-6463	18	54	the	the	DET
ajst-6463	18	55	hot	hot	ADJ
ajst-6463	18	56	stage	stage	NOUN
ajst-6463	18	57	to	to	PART
ajst-6463	18	58	be	be	AUX
ajst-6463	18	59	cooled	cool	VERB
ajst-6463	18	60	quickly	quickly	ADV
ajst-6463	18	61	to	to	ADP
ajst-6463	18	62	the	the	DET
ajst-6463	18	63	required	require	VERB
ajst-6463	18	64	temperature	temperature	NOUN
ajst-6463	18	65	,	,	PUNCT
ajst-6463	18	66	one	one	NUM
ajst-6463	18	67	connection	connection	NOUN
ajst-6463	18	68	to	to	ADP
ajst-6463	18	69	the	the	DET
ajst-6463	18	70	hot	hot	ADJ
ajst-6463	18	71	stage	stage	NOUN
ajst-6463	18	72	,	,	PUNCT
ajst-6463	18	73	a	a	DET
ajst-6463	18	74	connected	connect	VERB
ajst-6463	18	75	lower	low	ADJ
ajst-6463	18	76	hot	hot	ADJ
ajst-6463	18	77	stage	stage	NOUN
ajst-6463	18	78	,	,	PUNCT
ajst-6463	18	79	the	the	DET
ajst-6463	18	80	evacuation	evacuation	NOUN
ajst-6463	18	81	hole	hole	NOUN
ajst-6463	18	82	is	be	AUX
ajst-6463	18	83	located	locate	VERB
ajst-6463	18	84	on	on	ADP
ajst-6463	18	85	the	the	DET
ajst-6463	18	86	back	back	ADJ
ajst-6463	18	87	wall	wall	NOUN
ajst-6463	18	88	of	of	ADP
ajst-6463	18	89	the	the	DET
ajst-6463	18	90	chamber	chamber	NOUN
ajst-6463	18	91	,	,	PUNCT
ajst-6463	18	92	the	the	DET
ajst-6463	18	93	cooling	cool	VERB
ajst-6463	18	94	holes	hole	NOUN
ajst-6463	18	95	are	be	AUX
ajst-6463	18	96	located	locate	VERB
ajst-6463	18	97	on	on	ADP
ajst-6463	18	98	both	both	DET
ajst-6463	18	99	sides	side	NOUN
ajst-6463	18	100	of	of	ADP
ajst-6463	18	101	the	the	DET
ajst-6463	18	102	vacuum	vacuum	PROPN
ajst-6463	18	103	chamber	chamber	PROPN
ajst-6463	18	104	,	,	PUNCT
ajst-6463	18	105	here	here	ADV
ajst-6463	18	106	,	,	PUNCT
ajst-6463	18	107	the	the	DET
ajst-6463	18	108	cavity	cavity	NOUN
ajst-6463	18	109	is	be	AUX
ajst-6463	18	110	sealed	seal	VERB
ajst-6463	18	111	by	by	ADP
ajst-6463	18	112	means	mean	NOUN
ajst-6463	18	113	of	of	ADP
ajst-6463	18	114	square	square	ADJ
ajst-6463	18	115	screws	screw	NOUN
ajst-6463	18	116	and	and	CCONJ
ajst-6463	18	117	sealing	seal	VERB
ajst-6463	18	118	rings	ring	NOUN
ajst-6463	18	119	.	.	PUNCT
ajst-6463	19	1	there	there	PRON
ajst-6463	19	2	are	be	VERB
ajst-6463	19	3	two	two	NUM
ajst-6463	19	4	through	through	ADP
ajst-6463	19	5	holes	hole	NOUN
ajst-6463	19	6	on	on	ADP
ajst-6463	19	7	the	the	DET
ajst-6463	19	8	back	back	NOUN
ajst-6463	19	9	of	of	ADP
ajst-6463	19	10	the	the	DET
ajst-6463	19	11	cavity	cavity	NOUN
ajst-6463	19	12	,	,	PUNCT
ajst-6463	19	13	the	the	DET
ajst-6463	19	14	outer	outer	ADJ
ajst-6463	19	15	wire	wire	NOUN
ajst-6463	19	16	is	be	AUX
ajst-6463	19	17	installed	instal	VERB
ajst-6463	19	18	on	on	ADP
ajst-6463	19	19	the	the	DET
ajst-6463	19	20	heating	heating	NOUN
ajst-6463	19	21	table	table	NOUN
ajst-6463	19	22	through	through	ADP
ajst-6463	19	23	the	the	PRON
ajst-6463	19	24	through	through	ADP
ajst-6463	19	25	the	the	DET
ajst-6463	19	26	wire	wire	NOUN
ajst-6463	19	27	hole	hole	NOUN
ajst-6463	19	28	to	to	PART
ajst-6463	19	29	realize	realize	VERB
ajst-6463	19	30	the	the	DET
ajst-6463	19	31	heating	heating	NOUN
ajst-6463	19	32	of	of	ADP
ajst-6463	19	33	the	the	DET
ajst-6463	19	34	hot	hot	ADJ
ajst-6463	19	35	stage	stage	NOUN
ajst-6463	19	36	.	.	PUNCT
ajst-6463	20	1	the	the	PRON
ajst-6463	20	2	through	through	ADP
ajst-6463	20	3	hole	hole	NOUN
ajst-6463	20	4	is	be	AUX
ajst-6463	20	5	plugged	plug	VERB
ajst-6463	20	6	with	with	ADP
ajst-6463	20	7	cylindrical	cylindrical	ADJ
ajst-6463	20	8	rubber	rubber	NOUN
ajst-6463	20	9	,	,	PUNCT
ajst-6463	20	10	the	the	DET
ajst-6463	20	11	wire	wire	NOUN
ajst-6463	20	12	is	be	AUX
ajst-6463	20	13	fixed	fix	VERB
ajst-6463	20	14	in	in	ADP
ajst-6463	20	15	the	the	DET
ajst-6463	20	16	center	center	NOUN
ajst-6463	20	17	of	of	ADP
ajst-6463	20	18	the	the	DET
ajst-6463	20	19	rubber	rubber	NOUN
ajst-6463	20	20	to	to	PART
ajst-6463	20	21	achieve	achieve	VERB
ajst-6463	20	22	the	the	DET
ajst-6463	20	23	sealing	sealing	NOUN
ajst-6463	20	24	here	here	ADV
ajst-6463	20	25	,	,	PUNCT
ajst-6463	20	26	the	the	DET
ajst-6463	20	27	upper	upper	ADJ
ajst-6463	20	28	wall	wall	NOUN
ajst-6463	20	29	of	of	ADP
ajst-6463	20	30	the	the	DET
ajst-6463	20	31	vacuum	vacuum	PROPN
ajst-6463	20	32	box	box	PROPN
ajst-6463	20	33	is	be	AUX
ajst-6463	20	34	installed	instal	VERB
ajst-6463	20	35	on	on	ADP
ajst-6463	20	36	the	the	DET
ajst-6463	20	37	hot	hot	ADJ
ajst-6463	20	38	stage	stage	NOUN
ajst-6463	20	39	,	,	PUNCT
ajst-6463	20	40	there	there	PRON
ajst-6463	20	41	is	be	VERB
ajst-6463	20	42	a	a	DET
ajst-6463	20	43	central	central	ADJ
ajst-6463	20	44	hole	hole	NOUN
ajst-6463	20	45	on	on	ADP
ajst-6463	20	46	the	the	DET
ajst-6463	20	47	underside	underside	NOUN
ajst-6463	20	48	of	of	ADP
ajst-6463	20	49	the	the	DET
ajst-6463	20	50	cavity	cavity	NOUN
ajst-6463	20	51	,	,	PUNCT
ajst-6463	20	52	the	the	DET
ajst-6463	20	53	cylinder	cylinder	NOUN
ajst-6463	20	54	shaft	shaft	NOUN
ajst-6463	20	55	is	be	AUX
ajst-6463	20	56	connected	connect	VERB
ajst-6463	20	57	to	to	ADP
ajst-6463	20	58	the	the	DET
ajst-6463	20	59	downstage	downstage	NOUN
ajst-6463	20	60	in	in	ADP
ajst-6463	20	61	the	the	DET
ajst-6463	20	62	chamber	chamber	NOUN
ajst-6463	20	63	through	through	ADP
ajst-6463	20	64	the	the	DET
ajst-6463	20	65	central	central	ADJ
ajst-6463	20	66	hole	hole	NOUN
ajst-6463	20	67	,	,	PUNCT
ajst-6463	20	68	on	on	ADP
ajst-6463	20	69	the	the	DET
ajst-6463	20	70	front	front	ADJ
ajst-6463	20	71	side	side	NOUN
ajst-6463	20	72	of	of	ADP
ajst-6463	20	73	the	the	DET
ajst-6463	20	74	cavity	cavity	NOUN
ajst-6463	20	75	is	be	AUX
ajst-6463	20	76	a	a	DET
ajst-6463	20	77	vacuum	vacuum	NOUN
ajst-6463	20	78	door	door	NOUN
ajst-6463	20	79	,	,	PUNCT
ajst-6463	20	80	there	there	PRON
ajst-6463	20	81	is	be	VERB
ajst-6463	20	82	a	a	DET
ajst-6463	20	83	sealing	sealing	NOUN
ajst-6463	20	84	ring	ring	NOUN
ajst-6463	20	85	in	in	ADP
ajst-6463	20	86	the	the	DET
ajst-6463	20	87	inner	inner	ADJ
ajst-6463	20	88	test	test	NOUN
ajst-6463	20	89	of	of	ADP
ajst-6463	20	90	the	the	DET
ajst-6463	20	91	door	door	NOUN
ajst-6463	20	92	,	,	PUNCT
ajst-6463	20	93	the	the	DET
ajst-6463	20	94	chamber	chamber	NOUN
ajst-6463	20	95	is	be	AUX
ajst-6463	20	96	sealed	seal	VERB
ajst-6463	20	97	when	when	SCONJ
ajst-6463	20	98	snapped	snap	VERB
ajst-6463	20	99	with	with	ADP
ajst-6463	20	100	a	a	DET
ajst-6463	20	101	snap	snap	NOUN
ajst-6463	20	102	.	.	PUNCT
ajst-6463	21	1	figure	figure	NOUN
ajst-6463	21	2	1	1	NUM
ajst-6463	21	3	.	.	PUNCT
ajst-6463	22	1	vacuum	vacuum	NOUN
ajst-6463	22	2	heat	heat	PROPN
ajst-6463	22	3	press	press	NOUN
ajst-6463	22	4	129	129	NUM
ajst-6463	22	5	1vacuum	1vacuum	NUM
ajst-6463	22	6	doors	door	NOUN
ajst-6463	22	7	;	;	PUNCT
ajst-6463	22	8	2top	2top	NUM
ajst-6463	22	9	cover	cover	NOUN
ajst-6463	22	10	;	;	PUNCT
ajst-6463	22	11	3snap	3snap	NUM
ajst-6463	22	12	;	;	PUNCT
ajst-6463	22	13	4autoclave	4autoclave	NUM
ajst-6463	22	14	;	;	PUNCT
ajst-6463	22	15	5	5	NUM
ajst-6463	22	16	seal	seal	NOUN
ajst-6463	22	17	ring	ring	NOUN
ajst-6463	22	18	groove	groove	NOUN
ajst-6463	22	19	;	;	PUNCT
ajst-6463	22	20	6	6	NUM
ajst-6463	22	21	vacuum	vacuum	NOUN
ajst-6463	22	22	holes	hole	NOUN
ajst-6463	22	23	;	;	PUNCT
ajst-6463	22	24	7cooling	7cooling	NUM
ajst-6463	22	25	holes	hole	NOUN
ajst-6463	22	26	;	;	PUNCT
ajst-6463	22	27	8	8	NUM
ajst-6463	22	28	quartz	quartz	NOUN
ajst-6463	22	29	glass	glass	NOUN
ajst-6463	22	30	figure	figure	NOUN
ajst-6463	22	31	2	2	NUM
ajst-6463	22	32	.	.	PUNCT
ajst-6463	22	33	vacuum	vacuum	PROPN
ajst-6463	22	34	box	box	PROPN
ajst-6463	22	35	structure	structure	NOUN
ajst-6463	22	36	diagram	diagram	PROPN
ajst-6463	22	37	3	3	NUM
ajst-6463	22	38	.	.	PUNCT
ajst-6463	23	1	how	how	SCONJ
ajst-6463	23	2	vacuum	vacuum	NOUN
ajst-6463	23	3	chambers	chamber	NOUN
ajst-6463	23	4	work	work	VERB
ajst-6463	23	5	according	accord	VERB
ajst-6463	23	6	to	to	ADP
ajst-6463	23	7	the	the	DET
ajst-6463	23	8	two	two	NUM
ajst-6463	23	9	-	-	PUNCT
ajst-6463	23	10	dimensional	dimensional	ADJ
ajst-6463	23	11	drawings	drawing	NOUN
ajst-6463	23	12	,	,	PUNCT
ajst-6463	23	13	some	some	DET
ajst-6463	23	14	nonstandard	nonstandard	ADJ
ajst-6463	23	15	parts	part	NOUN
ajst-6463	23	16	are	be	AUX
ajst-6463	23	17	processed	process	VERB
ajst-6463	23	18	through	through	ADP
ajst-6463	23	19	the	the	DET
ajst-6463	23	20	processing	processing	NOUN
ajst-6463	23	21	plant	plant	NOUN
ajst-6463	23	22	,	,	PUNCT
ajst-6463	23	23	acquisition	acquisition	NOUN
ajst-6463	23	24	of	of	ADP
ajst-6463	23	25	required	require	VERB
ajst-6463	23	26	standard	standard	ADJ
ajst-6463	23	27	parts	part	NOUN
ajst-6463	23	28	and	and	CCONJ
ajst-6463	23	29	preparation	preparation	NOUN
ajst-6463	23	30	of	of	ADP
ajst-6463	23	31	existing	exist	VERB
ajst-6463	23	32	parts	part	NOUN
ajst-6463	23	33	and	and	CCONJ
ajst-6463	23	34	machines	machine	NOUN
ajst-6463	23	35	,	,	PUNCT
ajst-6463	23	36	assemble	assemble	VERB
ajst-6463	23	37	these	these	DET
ajst-6463	23	38	parts	part	NOUN
ajst-6463	23	39	,	,	PUNCT
ajst-6463	23	40	assembly	assembly	NOUN
ajst-6463	23	41	completed	complete	VERB
ajst-6463	23	42	,	,	PUNCT
ajst-6463	23	43	turn	turn	VERB
ajst-6463	23	44	on	on	ADP
ajst-6463	23	45	the	the	DET
ajst-6463	23	46	air	air	NOUN
ajst-6463	23	47	pump	pump	NOUN
ajst-6463	23	48	,	,	PUNCT
ajst-6463	23	49	check	check	VERB
ajst-6463	23	50	the	the	DET
ajst-6463	23	51	cavity	cavity	NOUN
ajst-6463	23	52	for	for	ADP
ajst-6463	23	53	air	air	NOUN
ajst-6463	23	54	leakage	leakage	NOUN
ajst-6463	23	55	,	,	PUNCT
ajst-6463	23	56	after	after	ADP
ajst-6463	23	57	the	the	DET
ajst-6463	23	58	inspection	inspection	NOUN
ajst-6463	23	59	,	,	PUNCT
ajst-6463	23	60	complete	complete	VERB
ajst-6463	23	61	the	the	DET
ajst-6463	23	62	assembly	assembly	NOUN
ajst-6463	23	63	,	,	PUNCT
ajst-6463	23	64	figure	figure	NOUN
ajst-6463	23	65	3	3	NUM
ajst-6463	23	66	shows	show	VERB
ajst-6463	23	67	the	the	DET
ajst-6463	23	68	vacuum	vacuum	PROPN
ajst-6463	23	69	box	box	PROPN
ajst-6463	23	70	installed	instal	VERB
ajst-6463	23	71	in	in	ADP
ajst-6463	23	72	the	the	DET
ajst-6463	23	73	vacuum	vacuum	NOUN
ajst-6463	23	74	heat	heat	NOUN
ajst-6463	23	75	press	press	NOUN
ajst-6463	23	76	.	.	PUNCT
ajst-6463	24	1	figure	figure	NOUN
ajst-6463	24	2	3	3	NUM
ajst-6463	24	3	.	.	PUNCT
ajst-6463	25	1	vacuum	vacuum	PROPN
ajst-6463	25	2	heat	heat	PROPN
ajst-6463	25	3	press	press	NOUN
ajst-6463	25	4	machine	machine	NOUN
ajst-6463	25	5	vacuum	vacuum	PROPN
ajst-6463	25	6	box	box	PROPN
ajst-6463	25	7	turn	turn	VERB
ajst-6463	25	8	on	on	ADP
ajst-6463	25	9	the	the	DET
ajst-6463	25	10	heat	heat	NOUN
ajst-6463	25	11	press	press	NOUN
ajst-6463	25	12	machine	machine	NOUN
ajst-6463	25	13	first	first	ADV
ajst-6463	25	14	when	when	SCONJ
ajst-6463	25	15	using	use	VERB
ajst-6463	25	16	,	,	PUNCT
ajst-6463	25	17	adjust	adjust	VERB
ajst-6463	25	18	the	the	DET
ajst-6463	25	19	parameters	parameter	NOUN
ajst-6463	25	20	such	such	ADJ
ajst-6463	25	21	as	as	ADP
ajst-6463	25	22	pressure	pressure	NOUN
ajst-6463	25	23	,	,	PUNCT
ajst-6463	25	24	temperature	temperature	NOUN
ajst-6463	25	25	and	and	CCONJ
ajst-6463	25	26	initial	initial	ADJ
ajst-6463	25	27	position	position	NOUN
ajst-6463	25	28	required	require	VERB
ajst-6463	25	29	by	by	ADP
ajst-6463	25	30	the	the	DET
ajst-6463	25	31	heat	heat	NOUN
ajst-6463	25	32	press	press	NOUN
ajst-6463	25	33	,	,	PUNCT
ajst-6463	25	34	reset	reset	VERB
ajst-6463	25	35	the	the	DET
ajst-6463	25	36	hot	hot	ADJ
ajst-6463	25	37	pressure	pressure	NOUN
ajst-6463	25	38	table	table	NOUN
ajst-6463	25	39	,	,	PUNCT
ajst-6463	25	40	switch	switch	VERB
ajst-6463	25	41	the	the	DET
ajst-6463	25	42	hot	hot	ADJ
ajst-6463	25	43	pressing	press	VERB
ajst-6463	25	44	mode	mode	NOUN
ajst-6463	25	45	as	as	SCONJ
ajst-6463	25	46	needed	need	VERB
ajst-6463	25	47	,	,	PUNCT
ajst-6463	25	48	turn	turn	VERB
ajst-6463	25	49	on	on	ADP
ajst-6463	25	50	the	the	DET
ajst-6463	25	51	vacuum	vacuum	NOUN
ajst-6463	25	52	pump	pump	NOUN
ajst-6463	25	53	,	,	PUNCT
ajst-6463	25	54	turn	turn	VERB
ajst-6463	25	55	the	the	DET
ajst-6463	25	56	vacuum	vacuum	NOUN
ajst-6463	25	57	on	on	ADP
ajst-6463	25	58	or	or	CCONJ
ajst-6463	25	59	off	off	ADV
ajst-6463	25	60	on	on	ADP
ajst-6463	25	61	the	the	DET
ajst-6463	25	62	display	display	NOUN
ajst-6463	25	63	,	,	PUNCT
ajst-6463	25	64	the	the	DET
ajst-6463	25	65	autoclave	autoclave	NOUN
ajst-6463	25	66	reaches	reach	VERB
ajst-6463	25	67	the	the	DET
ajst-6463	25	68	temperature	temperature	NOUN
ajst-6463	25	69	,	,	PUNCT
ajst-6463	25	70	place	place	VERB
ajst-6463	25	71	the	the	DET
ajst-6463	25	72	microfluidic	microfluidic	ADJ
ajst-6463	25	73	chip	chip	NOUN
ajst-6463	25	74	structure	structure	NOUN
ajst-6463	25	75	sheet	sheet	NOUN
ajst-6463	25	76	and	and	CCONJ
ajst-6463	25	77	cover	cover	VERB
ajst-6463	25	78	sheet	sheet	NOUN
ajst-6463	25	79	on	on	ADP
ajst-6463	25	80	the	the	DET
ajst-6463	25	81	hot	hot	ADJ
ajst-6463	25	82	pressing	press	VERB
ajst-6463	25	83	table	table	NOUN
ajst-6463	25	84	,	,	PUNCT
ajst-6463	25	85	close	close	VERB
ajst-6463	25	86	the	the	DET
ajst-6463	25	87	vacuum	vacuum	PROPN
ajst-6463	25	88	chamber	chamber	PROPN
ajst-6463	25	89	door	door	NOUN
ajst-6463	25	90	,	,	PUNCT
ajst-6463	25	91	seal	seal	VERB
ajst-6463	25	92	the	the	DET
ajst-6463	25	93	vacuum	vacuum	NOUN
ajst-6463	25	94	door	door	NOUN
ajst-6463	25	95	with	with	ADP
ajst-6463	25	96	snap	snap	NOUN
ajst-6463	25	97	-	-	PUNCT
ajst-6463	25	98	in	in	ADV
ajst-6463	25	99	,	,	PUNCT
ajst-6463	25	100	turn	turn	VERB
ajst-6463	25	101	on	on	ADP
ajst-6463	25	102	the	the	DET
ajst-6463	25	103	vacuum	vacuum	NOUN
ajst-6463	25	104	,	,	PUNCT
ajst-6463	25	105	start	start	VERB
ajst-6463	25	106	hot	hot	ADJ
ajst-6463	25	107	pressing	pressing	NOUN
ajst-6463	25	108	.	.	PUNCT
ajst-6463	26	1	4	4	X
ajst-6463	26	2	.	.	X
ajst-6463	26	3	vacuum	vacuum	PROPN
ajst-6463	26	4	chamber	chamber	PROPN
ajst-6463	26	5	application	application	NOUN
ajst-6463	26	6	experiment	experiment	NOUN
ajst-6463	26	7	take	take	VERB
ajst-6463	26	8	two	two	NUM
ajst-6463	26	9	pmma	pmma	NOUN
ajst-6463	26	10	cover	cover	NOUN
ajst-6463	26	11	sheets	sheet	NOUN
ajst-6463	26	12	for	for	ADP
ajst-6463	26	13	verification	verification	NOUN
ajst-6463	26	14	,	,	PUNCT
ajst-6463	26	15	take	take	VERB
ajst-6463	26	16	the	the	DET
ajst-6463	26	17	before	before	NOUN
ajst-6463	26	18	and	and	CCONJ
ajst-6463	26	19	after	after	ADP
ajst-6463	26	20	comparison	comparison	NOUN
ajst-6463	26	21	of	of	ADP
ajst-6463	26	22	not	not	PART
ajst-6463	26	23	opening	open	VERB
ajst-6463	26	24	the	the	DET
ajst-6463	26	25	vacuum	vacuum	NOUN
ajst-6463	26	26	and	and	CCONJ
ajst-6463	26	27	opening	open	VERB
ajst-6463	26	28	the	the	DET
ajst-6463	26	29	vacuum	vacuum	NOUN
ajst-6463	26	30	,	,	PUNCT
ajst-6463	26	31	observe	observe	VERB
ajst-6463	26	32	whether	whether	SCONJ
ajst-6463	26	33	the	the	DET
ajst-6463	26	34	hot	hot	ADJ
ajst-6463	26	35	pressing	pressing	ADJ
ajst-6463	26	36	effect	effect	NOUN
ajst-6463	26	37	in	in	ADP
ajst-6463	26	38	the	the	DET
ajst-6463	26	39	vacuum	vacuum	NOUN
ajst-6463	26	40	environment	environment	NOUN
ajst-6463	26	41	is	be	AUX
ajst-6463	26	42	better	well	ADJ
ajst-6463	26	43	than	than	ADP
ajst-6463	26	44	the	the	DET
ajst-6463	26	45	hot	hot	ADJ
ajst-6463	26	46	pressing	pressing	ADJ
ajst-6463	26	47	effect	effect	NOUN
ajst-6463	26	48	without	without	ADP
ajst-6463	26	49	the	the	DET
ajst-6463	26	50	vacuum	vacuum	NOUN
ajst-6463	26	51	open	open	NOUN
ajst-6463	26	52	.	.	PUNCT
ajst-6463	27	1	take	take	VERB
ajst-6463	27	2	two	two	NUM
ajst-6463	27	3	pmma	pmma	NOUN
ajst-6463	27	4	cover	cover	NOUN
ajst-6463	27	5	sheets	sheet	NOUN
ajst-6463	27	6	from	from	ADP
ajst-6463	27	7	the	the	DET
ajst-6463	27	8	clean	clean	ADJ
ajst-6463	27	9	room	room	NOUN
ajst-6463	27	10	,	,	PUNCT
ajst-6463	27	11	do	do	VERB
ajst-6463	27	12	2	2	NUM
ajst-6463	27	13	sets	set	NOUN
ajst-6463	27	14	of	of	ADP
ajst-6463	27	15	experiments	experiment	NOUN
ajst-6463	27	16	,	,	PUNCT
ajst-6463	27	17	the	the	DET
ajst-6463	27	18	first	first	ADJ
ajst-6463	27	19	group	group	NOUN
ajst-6463	27	20	only	only	ADV
ajst-6463	27	21	turns	turn	VERB
ajst-6463	27	22	on	on	ADP
ajst-6463	27	23	the	the	DET
ajst-6463	27	24	heat	heat	NOUN
ajst-6463	27	25	press	press	NOUN
ajst-6463	27	26	,	,	PUNCT
ajst-6463	27	27	no	no	DET
ajst-6463	27	28	vacuum	vacuum	NOUN
ajst-6463	27	29	,	,	PUNCT
ajst-6463	27	30	hot	hot	ADJ
ajst-6463	27	31	pressing	pressing	NOUN
ajst-6463	27	32	according	accord	VERB
ajst-6463	27	33	to	to	ADP
ajst-6463	27	34	the	the	DET
ajst-6463	27	35	conditions	condition	NOUN
ajst-6463	27	36	of	of	ADP
ajst-6463	27	37	hot	hot	ADJ
ajst-6463	27	38	pressing	pressing	NOUN
ajst-6463	27	39	,	,	PUNCT
ajst-6463	27	40	the	the	DET
ajst-6463	27	41	results	result	NOUN
ajst-6463	27	42	are	be	AUX
ajst-6463	27	43	shown	show	VERB
ajst-6463	27	44	in	in	ADP
ajst-6463	27	45	figure	figure	NOUN
ajst-6463	27	46	3	3	NUM
ajst-6463	27	47	.	.	PUNCT
ajst-6463	28	1	the	the	DET
ajst-6463	28	2	second	second	ADJ
ajst-6463	28	3	group	group	NOUN
ajst-6463	28	4	of	of	ADP
ajst-6463	28	5	open	open	ADJ
ajst-6463	28	6	heat	heat	NOUN
ajst-6463	28	7	presses	press	NOUN
ajst-6463	28	8	,	,	PUNCT
ajst-6463	28	9	open	open	ADJ
ajst-6463	28	10	vacuum	vacuum	NOUN
ajst-6463	28	11	,	,	PUNCT
ajst-6463	28	12	hot	hot	ADJ
ajst-6463	28	13	pressing	pressing	NOUN
ajst-6463	28	14	according	accord	VERB
ajst-6463	28	15	to	to	ADP
ajst-6463	28	16	the	the	DET
ajst-6463	28	17	conditions	condition	NOUN
ajst-6463	28	18	of	of	ADP
ajst-6463	28	19	hot	hot	ADJ
ajst-6463	28	20	pressing	pressing	NOUN
ajst-6463	28	21	,	,	PUNCT
ajst-6463	28	22	the	the	DET
ajst-6463	28	23	results	result	NOUN
ajst-6463	28	24	are	be	AUX
ajst-6463	28	25	shown	show	VERB
ajst-6463	28	26	in	in	ADP
ajst-6463	28	27	figure	figure	NOUN
ajst-6463	28	28	4	4	NUM
ajst-6463	28	29	.	.	PUNCT
ajst-6463	28	30	figure	figure	VERB
ajst-6463	28	31	4	4	NUM
ajst-6463	28	32	.	.	PUNCT
ajst-6463	29	1	the	the	DET
ajst-6463	29	2	vacuum	vacuum	NOUN
ajst-6463	29	3	is	be	AUX
ajst-6463	29	4	not	not	PART
ajst-6463	29	5	turned	turn	VERB
ajst-6463	29	6	on	on	ADP
ajst-6463	29	7	figure	figure	NOUN
ajst-6463	29	8	5	5	NUM
ajst-6463	29	9	.	.	PUNCT
ajst-6463	29	10	turn	turn	VERB
ajst-6463	29	11	on	on	ADP
ajst-6463	29	12	the	the	DET
ajst-6463	29	13	vacuum	vacuum	NOUN
ajst-6463	29	14	based	base	VERB
ajst-6463	29	15	on	on	ADP
ajst-6463	29	16	the	the	DET
ajst-6463	29	17	results	result	NOUN
ajst-6463	29	18	of	of	ADP
ajst-6463	29	19	figures	figure	NOUN
ajst-6463	29	20	4	4	NUM
ajst-6463	29	21	and	and	CCONJ
ajst-6463	29	22	5	5	NUM
ajst-6463	29	23	,	,	PUNCT
ajst-6463	29	24	figure	figure	VERB
ajst-6463	29	25	4	4	NUM
ajst-6463	29	26	hot	hot	ADJ
ajst-6463	29	27	pressing	press	VERB
ajst-6463	29	28	without	without	ADP
ajst-6463	29	29	open	open	ADJ
ajst-6463	29	30	vacuum	vacuum	NOUN
ajst-6463	29	31	,	,	PUNCT
ajst-6463	29	32	there	there	PRON
ajst-6463	29	33	is	be	VERB
ajst-6463	29	34	a	a	DET
ajst-6463	29	35	clear	clear	ADJ
ajst-6463	29	36	unpressed	unpressed	ADJ
ajst-6463	29	37	phenomenon	phenomenon	NOUN
ajst-6463	29	38	between	between	ADP
ajst-6463	29	39	the	the	DET
ajst-6463	29	40	edges	edge	NOUN
ajst-6463	29	41	of	of	ADP
ajst-6463	29	42	the	the	DET
ajst-6463	29	43	two	two	NUM
ajst-6463	29	44	cover	cover	NOUN
ajst-6463	29	45	sheets	sheet	NOUN
ajst-6463	29	46	,	,	PUNCT
ajst-6463	29	47	produces	produce	VERB
ajst-6463	29	48	large	large	ADJ
ajst-6463	29	49	air	air	NOUN
ajst-6463	29	50	bubbles	bubble	NOUN
ajst-6463	29	51	.	.	PUNCT
ajst-6463	30	1	figure	figure	VERB
ajst-6463	30	2	5	5	NUM
ajst-6463	30	3	open	open	ADJ
ajst-6463	30	4	vacuum	vacuum	NOUN
ajst-6463	30	5	for	for	ADP
ajst-6463	30	6	hot	hot	ADJ
ajst-6463	30	7	pressing	pressing	NOUN
ajst-6463	30	8	,	,	PUNCT
ajst-6463	30	9	the	the	DET
ajst-6463	30	10	two	two	NUM
ajst-6463	30	11	cover	cover	NOUN
ajst-6463	30	12	sheets	sheet	NOUN
ajst-6463	30	13	do	do	AUX
ajst-6463	30	14	not	not	PART
ajst-6463	30	15	produce	produce	VERB
ajst-6463	30	16	air	air	NOUN
ajst-6463	30	17	bubbles	bubble	NOUN
ajst-6463	30	18	,	,	PUNCT
ajst-6463	30	19	and	and	CCONJ
ajst-6463	30	20	very	very	ADV
ajst-6463	30	21	homogeneous	homogeneous	ADJ
ajst-6463	30	22	,	,	PUNCT
ajst-6463	30	23	the	the	DET
ajst-6463	30	24	obvious	obvious	ADJ
ajst-6463	30	25	effect	effect	NOUN
ajst-6463	30	26	is	be	AUX
ajst-6463	30	27	better	well	ADJ
ajst-6463	30	28	than	than	ADP
ajst-6463	30	29	the	the	DET
ajst-6463	30	30	unopened	unopened	ADJ
ajst-6463	30	31	vacuum	vacuum	NOUN
ajst-6463	30	32	.	.	PUNCT
ajst-6463	31	1	before	before	ADP
ajst-6463	31	2	hot	hot	ADJ
ajst-6463	31	3	press	press	NOUN
ajst-6463	31	4	bonding	bonding	NOUN
ajst-6463	31	5	,	,	PUNCT
ajst-6463	31	6	turn	turn	VERB
ajst-6463	31	7	on	on	ADP
ajst-6463	31	8	the	the	DET
ajst-6463	31	9	vacuum	vacuum	NOUN
ajst-6463	31	10	,	,	PUNCT
ajst-6463	31	11	first	first	ADV
ajst-6463	31	12	,	,	PUNCT
ajst-6463	31	13	the	the	DET
ajst-6463	31	14	structural	structural	ADJ
ajst-6463	31	15	sheet	sheet	NOUN
ajst-6463	31	16	and	and	CCONJ
ajst-6463	31	17	the	the	DET
ajst-6463	31	18	cover	cover	NOUN
ajst-6463	31	19	sheet	sheet	NOUN
ajst-6463	31	20	are	be	AUX
ajst-6463	31	21	adsorbed	adsorb	VERB
ajst-6463	31	22	together	together	ADV
ajst-6463	31	23	,	,	PUNCT
ajst-6463	31	24	prevent	prevent	VERB
ajst-6463	31	25	during	during	ADP
ajst-6463	31	26	the	the	DET
ajst-6463	31	27	hot	hot	ADJ
ajst-6463	31	28	pressing	press	VERB
ajst-6463	31	29	process	process	NOUN
ajst-6463	31	30	,	,	PUNCT
ajst-6463	31	31	when	when	SCONJ
ajst-6463	31	32	the	the	DET
ajst-6463	31	33	structural	structural	ADJ
ajst-6463	31	34	sheet	sheet	NOUN
ajst-6463	31	35	and	and	CCONJ
ajst-6463	31	36	cover	cover	NOUN
ajst-6463	31	37	sheet	sheet	NOUN
ajst-6463	31	38	are	be	AUX
ajst-6463	31	39	misaligned	misalign	VERB
ajst-6463	31	40	,	,	PUNCT
ajst-6463	31	41	bubbles	bubble	NOUN
ajst-6463	31	42	are	be	AUX
ajst-6463	31	43	generated	generate	VERB
ajst-6463	31	44	,	,	PUNCT
ajst-6463	31	45	or	or	CCONJ
ajst-6463	31	46	are	be	AUX
ajst-6463	31	47	not	not	PART
ajst-6463	31	48	compacted	compact	VERB
ajst-6463	31	49	,	,	PUNCT
ajst-6463	31	50	etc	etc	X
ajst-6463	31	51	.	.	X
ajst-6463	32	1	hot	hot	ADJ
ajst-6463	32	2	pressing	press	VERB
ajst-6463	32	3	is	be	AUX
ajst-6463	32	4	performed	perform	VERB
ajst-6463	32	5	.	.	PUNCT
ajst-6463	33	1	this	this	DET
ajst-6463	33	2	design	design	NOUN
ajst-6463	33	3	can	can	AUX
ajst-6463	33	4	solve	solve	VERB
ajst-6463	33	5	these	these	DET
ajst-6463	33	6	problems	problem	NOUN
ajst-6463	33	7	,	,	PUNCT
ajst-6463	33	8	in	in	ADP
ajst-6463	33	9	the	the	DET
ajst-6463	33	10	process	process	NOUN
ajst-6463	33	11	of	of	ADP
ajst-6463	33	12	hot	hot	ADJ
ajst-6463	33	13	pressing	press	VERB
ajst-6463	33	14	bonding	bonding	NOUN
ajst-6463	33	15	of	of	ADP
ajst-6463	33	16	microfluidic	microfluidic	ADJ
ajst-6463	33	17	chips	chip	NOUN
ajst-6463	33	18	,	,	PUNCT
ajst-6463	33	19	greatly	greatly	ADV
ajst-6463	33	20	improve	improve	VERB
ajst-6463	33	21	production	production	NOUN
ajst-6463	33	22	efficiency	efficiency	NOUN
ajst-6463	33	23	and	and	CCONJ
ajst-6463	33	24	accuracy	accuracy	NOUN
ajst-6463	33	25	,	,	PUNCT
ajst-6463	33	26	reduce	reduce	VERB
ajst-6463	33	27	production	production	NOUN
ajst-6463	33	28	costs	cost	NOUN
ajst-6463	33	29	.	.	PUNCT
ajst-6463	34	1	130	130	NUM
ajst-6463	34	2	references	reference	NOUN
ajst-6463	34	3	[	[	X
ajst-6463	34	4	1	1	NUM
ajst-6463	34	5	]	]	X
ajst-6463	34	6	jacobson	jacobson	PROPN
ajst-6463	34	7	s	s	PART
ajst-6463	34	8	c	c	NOUN
ajst-6463	34	9	,	,	PUNCT
ajst-6463	34	10	hergenronder	hergenronder	NOUN
ajst-6463	34	11	r	r	NOUN
ajst-6463	34	12	,	,	PUNCT
ajst-6463	34	13	koutny	koutny	NOUN
ajst-6463	34	14	l	l	NOUN
ajst-6463	34	15	b	b	X
ajst-6463	34	16	,	,	PUNCT
ajst-6463	34	17	et	et	PROPN
ajst-6463	34	18	al.high	al.high	ADJ
ajst-6463	34	19	-	-	PUNCT
ajst-6463	34	20	speed	speed	NOUN
ajst-6463	34	21	separations	separation	NOUN
ajst-6463	34	22	on	on	ADP
ajst-6463	34	23	a	a	DET
ajst-6463	34	24	microchip	microchip	NOUN
ajst-6463	35	1	[	[	X
ajst-6463	35	2	j	j	X
ajst-6463	35	3	]	]	X
ajst-6463	35	4	.	.	PUNCT
ajst-6463	36	1	anal	anal	PROPN
ajst-6463	36	2	.	.	PUNCT
ajst-6463	36	3	chem	chem	PROPN
ajst-6463	36	4	.	.	PUNCT
ajst-6463	37	1	1994	1994	NUM
ajst-6463	37	2	,	,	PUNCT
ajst-6463	37	3	(	(	PUNCT
ajst-6463	37	4	66	66	NUM
ajst-6463	37	5	):	):	PUNCT
ajst-6463	37	6	11141118	11141118	NUM
ajst-6463	37	7	.	.	PUNCT
ajst-6463	38	1	[	[	X
ajst-6463	38	2	2	2	NUM
ajst-6463	38	3	]	]	X
ajst-6463	38	4	fang	fang	X
ajst-6463	38	5	zhaolun	zhaolun	PROPN
ajst-6463	38	6	.	.	PUNCT
ajst-6463	39	1	microfluidic	microfluidic	ADJ
ajst-6463	39	2	analysis	analysis	NOUN
ajst-6463	39	3	chip	chip	NOUN
ajst-6463	39	4	[	[	X
ajst-6463	39	5	m	m	X
ajst-6463	39	6	]	]	X
ajst-6463	39	7	.	.	PUNCT
ajst-6463	40	1	beijing	beijing	PROPN
ajst-6463	40	2	,	,	PUNCT
ajst-6463	40	3	science	science	NOUN
ajst-6463	40	4	press	press	NOUN
ajst-6463	40	5	.	.	PUNCT
ajst-6463	41	1	2002,(1	2002,(1	NUM
ajst-6463	41	2	)	)	PUNCT
ajst-6463	41	3	.	.	PUNCT
ajst-6463	42	1	[	[	X
ajst-6463	42	2	3	3	X
ajst-6463	42	3	]	]	X
ajst-6463	42	4	wu	wu	PROPN
ajst-6463	42	5	linghai	linghai	PROPN
ajst-6463	42	6	.	.	PUNCT
ajst-6463	43	1	research	research	NOUN
ajst-6463	43	2	on	on	ADP
ajst-6463	43	3	vacuum	vacuum	PROPN
ajst-6463	43	4	hot	hot	ADJ
ajst-6463	43	5	pressing	press	VERB
ajst-6463	43	6	bonding	bonding	NOUN
ajst-6463	43	7	system	system	NOUN
ajst-6463	43	8	of	of	ADP
ajst-6463	43	9	polymer	polymer	NOUN
ajst-6463	43	10	microfluidic	microfluidic	ADJ
ajst-6463	43	11	chip[d	chip[d	NOUN
ajst-6463	43	12	]	]	PUNCT
ajst-6463	43	13	.	.	PUNCT
ajst-6463	44	1	guangzhou	guangzhou	PROPN
ajst-6463	44	2	:	:	PUNCT
ajst-6463	44	3	guangdong	guangdong	PROPN
ajst-6463	44	4	university	university	PROPN
ajst-6463	44	5	of	of	ADP
ajst-6463	44	6	technology,2018	technology,2018	PROPN
ajst-6463	44	7	.	.	PUNCT
ajst-6463	45	1	[	[	X
ajst-6463	45	2	4	4	X
ajst-6463	45	3	]	]	X
ajst-6463	45	4	ye	ye	PRON
ajst-6463	45	5	jiaming	jiaming	NOUN
ajst-6463	45	6	,	,	PUNCT
ajst-6463	45	7	li	li	PROPN
ajst-6463	45	8	mingjia	mingjia	PROPN
ajst-6463	45	9	,	,	PUNCT
ajst-6463	45	10	zhou	zhou	PROPN
ajst-6463	45	11	yongliang	yongliang	PROPN
ajst-6463	45	12	.	.	PUNCT
ajst-6463	46	1	rapid	rapid	ADJ
ajst-6463	46	2	production	production	NOUN
ajst-6463	46	3	of	of	ADP
ajst-6463	46	4	microfluidic	microfluidic	ADJ
ajst-6463	46	5	chip	chip	NOUN
ajst-6463	46	6	mold	mold	NOUN
ajst-6463	46	7	by	by	ADP
ajst-6463	46	8	hot	hot	ADJ
ajst-6463	46	9	pressing	press	VERB
ajst-6463	46	10	method[j].china	method[j].china	NOUN
ajst-6463	46	11	mechanical	mechanical	ADJ
ajst-6463	46	12	engineering	engineering	NOUN
ajst-6463	46	13	,	,	PUNCT
ajst-6463	46	14	2007,(19):2379	2007,(19):2379	PROPN
ajst-6463	46	15	-	-	SYM
ajst-6463	46	16	2382	2382	NUM
ajst-6463	46	17	.	.	PUNCT
ajst-6463	46	18	)	)	PUNCT