id	sid	tid	token	lemma	pos
ajst-7799	1	1	academic	academic	ADJ
ajst-7799	1	2	journal	journal	NOUN
ajst-7799	1	3	of	of	ADP
ajst-7799	1	4	science	science	NOUN
ajst-7799	1	5	and	and	CCONJ
ajst-7799	1	6	technology	technology	NOUN
ajst-7799	1	7	issn	issn	NOUN
ajst-7799	1	8	:	:	PUNCT
ajst-7799	1	9	2771	2771	NUM
ajst-7799	1	10	-	-	SYM
ajst-7799	1	11	3032	3032	NUM
ajst-7799	1	12	|	|	NOUN
ajst-7799	1	13	vol	vol	NOUN
ajst-7799	1	14	.	.	PROPN
ajst-7799	2	1	5	5	NUM
ajst-7799	2	2	,	,	PUNCT
ajst-7799	2	3	no	no	INTJ
ajst-7799	2	4	.	.	NOUN
ajst-7799	2	5	3	3	NUM
ajst-7799	2	6	,	,	PUNCT
ajst-7799	2	7	2023	2023	NUM
ajst-7799	2	8	104	104	NUM
ajst-7799	2	9	optimization	optimization	NOUN
ajst-7799	2	10	of	of	ADP
ajst-7799	2	11	anchor	anchor	NOUN
ajst-7799	2	12	structure	structure	NOUN
ajst-7799	2	13	for	for	ADP
ajst-7799	2	14	mems	mem	NOUN
ajst-7799	2	15	comb	comb	NOUN
ajst-7799	2	16	driven	drive	VERB
ajst-7799	2	17	acoustic	acoustic	ADJ
ajst-7799	2	18	emission	emission	NOUN
ajst-7799	2	19	transducers	transducer	NOUN
ajst-7799	2	20	based	base	VERB
ajst-7799	2	21	on	on	ADP
ajst-7799	2	22	the	the	DET
ajst-7799	2	23	principles	principle	NOUN
ajst-7799	2	24	of	of	ADP
ajst-7799	2	25	area	area	NOUN
ajst-7799	2	26	and	and	CCONJ
ajst-7799	2	27	gap	gap	NOUN
ajst-7799	2	28	changes	change	NOUN
ajst-7799	2	29	ning	ne	VERB
ajst-7799	2	30	su	su	PROPN
ajst-7799	2	31	*	*	PROPN
ajst-7799	2	32	school	school	PROPN
ajst-7799	2	33	of	of	ADP
ajst-7799	2	34	physics	physics	NOUN
ajst-7799	2	35	and	and	CCONJ
ajst-7799	2	36	electronic	electronic	ADJ
ajst-7799	2	37	engineering	engineering	NOUN
ajst-7799	2	38	,	,	PUNCT
ajst-7799	2	39	jiangsu	jiangsu	PROPN
ajst-7799	2	40	university	university	PROPN
ajst-7799	2	41	,	,	PUNCT
ajst-7799	2	42	212013	212013	NUM
ajst-7799	2	43	,	,	PUNCT
ajst-7799	2	44	zhenjiang	zhenjiang	PROPN
ajst-7799	2	45	,	,	PUNCT
ajst-7799	2	46	china	china	PROPN
ajst-7799	2	47	*	*	PROPN
ajst-7799	2	48	email	email	NOUN
ajst-7799	2	49	:	:	PUNCT
ajst-7799	2	50	sn1150610019@gmail.com	sn1150610019@gmail.com	X
ajst-7799	2	51	abstract	abstract	NOUN
ajst-7799	2	52	:	:	PUNCT
ajst-7799	2	53	the	the	DET
ajst-7799	2	54	focus	focus	NOUN
ajst-7799	2	55	of	of	ADP
ajst-7799	2	56	this	this	DET
ajst-7799	2	57	article	article	NOUN
ajst-7799	2	58	is	be	AUX
ajst-7799	2	59	to	to	PART
ajst-7799	2	60	provide	provide	VERB
ajst-7799	2	61	an	an	DET
ajst-7799	2	62	optimized	optimize	VERB
ajst-7799	2	63	design	design	NOUN
ajst-7799	2	64	scheme	scheme	NOUN
ajst-7799	2	65	for	for	ADP
ajst-7799	2	66	the	the	DET
ajst-7799	2	67	anchor	anchor	NOUN
ajst-7799	2	68	structure	structure	NOUN
ajst-7799	2	69	of	of	ADP
ajst-7799	2	70	the	the	DET
ajst-7799	2	71	comb	comb	NOUN
ajst-7799	2	72	capacitive	capacitive	ADJ
ajst-7799	2	73	acoustic	acoustic	ADJ
ajst-7799	2	74	emission	emission	NOUN
ajst-7799	2	75	sensor	sensor	NOUN
ajst-7799	2	76	to	to	PART
ajst-7799	2	77	enhance	enhance	VERB
ajst-7799	2	78	its	its	PRON
ajst-7799	2	79	response	response	NOUN
ajst-7799	2	80	ability	ability	NOUN
ajst-7799	2	81	.	.	PUNCT
ajst-7799	3	1	firstly	firstly	ADV
ajst-7799	3	2	,	,	PUNCT
ajst-7799	3	3	variable	variable	ADJ
ajst-7799	3	4	area	area	NOUN
ajst-7799	3	5	and	and	CCONJ
ajst-7799	3	6	variable	variable	NOUN
ajst-7799	3	7	spacing	space	VERB
ajst-7799	3	8	sensing	sense	VERB
ajst-7799	3	9	microelements	microelement	NOUN
ajst-7799	3	10	were	be	AUX
ajst-7799	3	11	designed	design	VERB
ajst-7799	3	12	,	,	PUNCT
ajst-7799	3	13	and	and	CCONJ
ajst-7799	3	14	their	their	PRON
ajst-7799	3	15	basic	basic	ADJ
ajst-7799	3	16	performance	performance	NOUN
ajst-7799	3	17	parameters	parameter	NOUN
ajst-7799	3	18	were	be	AUX
ajst-7799	3	19	obtained	obtain	VERB
ajst-7799	3	20	through	through	ADP
ajst-7799	3	21	finite	finite	ADJ
ajst-7799	3	22	element	element	NOUN
ajst-7799	3	23	analysis	analysis	NOUN
ajst-7799	3	24	.	.	PUNCT
ajst-7799	4	1	using	use	VERB
ajst-7799	4	2	the	the	DET
ajst-7799	4	3	peak	peak	NOUN
ajst-7799	4	4	response	response	NOUN
ajst-7799	4	5	changes	change	NOUN
ajst-7799	4	6	corresponding	correspond	VERB
ajst-7799	4	7	to	to	ADP
ajst-7799	4	8	the	the	DET
ajst-7799	4	9	first	first	ADJ
ajst-7799	4	10	order	order	NOUN
ajst-7799	4	11	characteristic	characteristic	ADJ
ajst-7799	4	12	frequency	frequency	NOUN
ajst-7799	4	13	as	as	ADP
ajst-7799	4	14	a	a	DET
ajst-7799	4	15	reference	reference	NOUN
ajst-7799	4	16	standard	standard	NOUN
ajst-7799	4	17	,	,	PUNCT
ajst-7799	4	18	the	the	DET
ajst-7799	4	19	influence	influence	NOUN
ajst-7799	4	20	of	of	ADP
ajst-7799	4	21	the	the	DET
ajst-7799	4	22	geometric	geometric	ADJ
ajst-7799	4	23	structure	structure	NOUN
ajst-7799	4	24	of	of	ADP
ajst-7799	4	25	the	the	DET
ajst-7799	4	26	anchor	anchor	NOUN
ajst-7799	4	27	section	section	NOUN
ajst-7799	4	28	on	on	ADP
ajst-7799	4	29	the	the	DET
ajst-7799	4	30	response	response	NOUN
ajst-7799	4	31	was	be	AUX
ajst-7799	4	32	analyzed	analyze	VERB
ajst-7799	4	33	.	.	PUNCT
ajst-7799	5	1	keywords	keyword	NOUN
ajst-7799	5	2	:	:	PUNCT
ajst-7799	5	3	acoustic	acoustic	ADJ
ajst-7799	5	4	emission	emission	NOUN
ajst-7799	5	5	,	,	PUNCT
ajst-7799	5	6	comb	comb	NOUN
ajst-7799	5	7	structure	structure	NOUN
ajst-7799	5	8	,	,	PUNCT
ajst-7799	5	9	mems	mem	NOUN
ajst-7799	5	10	,	,	PUNCT
ajst-7799	5	11	anchor	anchor	NOUN
ajst-7799	5	12	loss	loss	NOUN
ajst-7799	5	13	.	.	PUNCT
ajst-7799	6	1	1	1	X
ajst-7799	6	2	.	.	X
ajst-7799	6	3	introduction	introduction	NOUN
ajst-7799	6	4	structures	structure	NOUN
ajst-7799	6	5	or	or	CCONJ
ajst-7799	6	6	materials	material	NOUN
ajst-7799	6	7	are	be	AUX
ajst-7799	6	8	prone	prone	ADJ
ajst-7799	6	9	to	to	ADP
ajst-7799	6	10	damage	damage	NOUN
ajst-7799	6	11	during	during	ADP
ajst-7799	6	12	manufacture	manufacture	NOUN
ajst-7799	6	13	and	and	CCONJ
ajst-7799	6	14	use	use	NOUN
ajst-7799	6	15	,	,	PUNCT
ajst-7799	6	16	and	and	CCONJ
ajst-7799	6	17	along	along	ADP
ajst-7799	6	18	with	with	ADP
ajst-7799	6	19	the	the	DET
ajst-7799	6	20	damage	damage	NOUN
ajst-7799	6	21	,	,	PUNCT
ajst-7799	6	22	molecular	molecular	ADJ
ajst-7799	6	23	bonds	bond	NOUN
ajst-7799	6	24	are	be	AUX
ajst-7799	6	25	broken	break	VERB
ajst-7799	6	26	and	and	CCONJ
ajst-7799	6	27	stress	stress	NOUN
ajst-7799	6	28	waves	wave	NOUN
ajst-7799	6	29	are	be	AUX
ajst-7799	6	30	generated	generate	VERB
ajst-7799	6	31	[	[	PUNCT
ajst-7799	6	32	1	1	NUM
ajst-7799	6	33	]	]	PUNCT
ajst-7799	6	34	,	,	PUNCT
ajst-7799	6	35	which	which	PRON
ajst-7799	6	36	can	can	AUX
ajst-7799	6	37	also	also	ADV
ajst-7799	6	38	be	be	AUX
ajst-7799	6	39	referred	refer	VERB
ajst-7799	6	40	to	to	ADP
ajst-7799	6	41	as	as	ADP
ajst-7799	6	42	acoustic	acoustic	ADJ
ajst-7799	6	43	emission	emission	NOUN
ajst-7799	6	44	signals	signal	NOUN
ajst-7799	6	45	in	in	ADP
ajst-7799	6	46	acoustic	acoustic	ADJ
ajst-7799	6	47	emission	emission	NOUN
ajst-7799	6	48	techniques	technique	NOUN
ajst-7799	6	49	.	.	PUNCT
ajst-7799	7	1	acoustic	acoustic	ADJ
ajst-7799	7	2	emission	emission	NOUN
ajst-7799	7	3	technology	technology	NOUN
ajst-7799	7	4	is	be	AUX
ajst-7799	7	5	an	an	DET
ajst-7799	7	6	important	important	ADJ
ajst-7799	7	7	detection	detection	NOUN
ajst-7799	7	8	method	method	NOUN
ajst-7799	7	9	in	in	ADP
ajst-7799	7	10	ndt	ndt	PROPN
ajst-7799	7	11	by	by	ADP
ajst-7799	7	12	receiving	receive	VERB
ajst-7799	7	13	and	and	CCONJ
ajst-7799	7	14	analyzing	analyze	VERB
ajst-7799	7	15	acoustic	acoustic	ADJ
ajst-7799	7	16	emission	emission	NOUN
ajst-7799	7	17	signals	signal	NOUN
ajst-7799	7	18	to	to	PART
ajst-7799	7	19	determine	determine	VERB
ajst-7799	7	20	the	the	DET
ajst-7799	7	21	onset	onset	NOUN
ajst-7799	7	22	of	of	ADP
ajst-7799	7	23	damage	damage	NOUN
ajst-7799	7	24	generation	generation	NOUN
ajst-7799	7	25	,	,	PUNCT
ajst-7799	7	26	locate	locate	VERB
ajst-7799	7	27	the	the	DET
ajst-7799	7	28	location	location	NOUN
ajst-7799	7	29	of	of	ADP
ajst-7799	7	30	damage	damage	NOUN
ajst-7799	7	31	,	,	PUNCT
ajst-7799	7	32	and	and	CCONJ
ajst-7799	7	33	assess	assess	VERB
ajst-7799	7	34	the	the	DET
ajst-7799	7	35	extent	extent	NOUN
ajst-7799	7	36	of	of	ADP
ajst-7799	7	37	damage	damage	NOUN
ajst-7799	7	38	[	[	X
ajst-7799	7	39	2,3	2,3	NUM
ajst-7799	7	40	]	]	PUNCT
ajst-7799	7	41	.	.	PUNCT
ajst-7799	8	1	acoustic	acoustic	ADJ
ajst-7799	8	2	emission	emission	NOUN
ajst-7799	8	3	sensors	sensor	NOUN
ajst-7799	8	4	are	be	AUX
ajst-7799	8	5	the	the	DET
ajst-7799	8	6	core	core	NOUN
ajst-7799	8	7	of	of	ADP
ajst-7799	8	8	acoustic	acoustic	ADJ
ajst-7799	8	9	emission	emission	NOUN
ajst-7799	8	10	technology	technology	NOUN
ajst-7799	8	11	and	and	CCONJ
ajst-7799	8	12	can	can	AUX
ajst-7799	8	13	be	be	AUX
ajst-7799	8	14	mainly	mainly	ADV
ajst-7799	8	15	classified	classify	VERB
ajst-7799	8	16	into	into	ADP
ajst-7799	8	17	resonant	resonant	ADJ
ajst-7799	8	18	(	(	PUNCT
ajst-7799	8	19	narrow	narrow	ADJ
ajst-7799	8	20	-	-	PUNCT
ajst-7799	8	21	band	band	NOUN
ajst-7799	8	22	type	type	NOUN
ajst-7799	8	23	)	)	PUNCT
ajst-7799	8	24	or	or	CCONJ
ajst-7799	8	25	wide	wide	ADJ
ajst-7799	8	26	-	-	PUNCT
ajst-7799	8	27	band	band	NOUN
ajst-7799	8	28	type	type	NOUN
ajst-7799	8	29	according	accord	VERB
ajst-7799	8	30	to	to	ADP
ajst-7799	8	31	the	the	DET
ajst-7799	8	32	response	response	NOUN
ajst-7799	8	33	frequency	frequency	NOUN
ajst-7799	8	34	domain	domain	NOUN
ajst-7799	8	35	,	,	PUNCT
ajst-7799	8	36	and	and	CCONJ
ajst-7799	8	37	into	into	ADP
ajst-7799	8	38	traditional	traditional	ADJ
ajst-7799	8	39	block	block	NOUN
ajst-7799	8	40	-	-	PUNCT
ajst-7799	8	41	type	type	NOUN
ajst-7799	8	42	acoustic	acoustic	ADJ
ajst-7799	8	43	emission	emission	NOUN
ajst-7799	8	44	sensors	sensor	NOUN
ajst-7799	8	45	and	and	CCONJ
ajst-7799	8	46	mems	mem	NOUN
ajst-7799	8	47	acoustic	acoustic	ADJ
ajst-7799	8	48	emission	emission	NOUN
ajst-7799	8	49	sensors	sensor	NOUN
ajst-7799	8	50	according	accord	VERB
ajst-7799	8	51	to	to	ADP
ajst-7799	8	52	the	the	DET
ajst-7799	8	53	volume	volume	NOUN
ajst-7799	8	54	.	.	PUNCT
ajst-7799	9	1	because	because	SCONJ
ajst-7799	9	2	of	of	ADP
ajst-7799	9	3	the	the	DET
ajst-7799	9	4	small	small	ADJ
ajst-7799	9	5	size	size	NOUN
ajst-7799	9	6	and	and	CCONJ
ajst-7799	9	7	low	low	ADJ
ajst-7799	9	8	sensitivity	sensitivity	NOUN
ajst-7799	9	9	of	of	ADP
ajst-7799	9	10	mems	mem	NOUN
ajst-7799	9	11	acoustic	acoustic	ADJ
ajst-7799	9	12	emission	emission	NOUN
ajst-7799	9	13	sensors	sensor	NOUN
ajst-7799	9	14	compared	compare	VERB
ajst-7799	9	15	with	with	ADP
ajst-7799	9	16	traditional	traditional	ADJ
ajst-7799	9	17	sensors	sensor	NOUN
ajst-7799	9	18	,	,	PUNCT
ajst-7799	9	19	mems	mem	NOUN
ajst-7799	9	20	acoustic	acoustic	ADJ
ajst-7799	9	21	emission	emission	NOUN
ajst-7799	9	22	sensors	sensor	NOUN
ajst-7799	9	23	are	be	AUX
ajst-7799	9	24	generally	generally	ADV
ajst-7799	9	25	designed	design	VERB
ajst-7799	9	26	as	as	ADP
ajst-7799	9	27	resonant	resonant	ADJ
ajst-7799	9	28	type	type	NOUN
ajst-7799	9	29	to	to	PART
ajst-7799	9	30	improve	improve	VERB
ajst-7799	9	31	their	their	PRON
ajst-7799	9	32	sensitivity	sensitivity	NOUN
ajst-7799	9	33	and	and	CCONJ
ajst-7799	9	34	signal	signal	NOUN
ajst-7799	9	35	-	-	PUNCT
ajst-7799	9	36	to	to	ADP
ajst-7799	9	37	-	-	PUNCT
ajst-7799	9	38	noise	noise	NOUN
ajst-7799	9	39	ratio	ratio	NOUN
ajst-7799	9	40	[	[	X
ajst-7799	9	41	4	4	NUM
ajst-7799	9	42	]	]	PUNCT
ajst-7799	9	43	.	.	PUNCT
ajst-7799	10	1	the	the	DET
ajst-7799	10	2	main	main	ADJ
ajst-7799	10	3	limitation	limitation	NOUN
ajst-7799	10	4	of	of	ADP
ajst-7799	10	5	resonant	resonant	ADJ
ajst-7799	10	6	mems	mem	NOUN
ajst-7799	10	7	acoustic	acoustic	ADJ
ajst-7799	10	8	emission	emission	NOUN
ajst-7799	10	9	sensors	sensor	NOUN
ajst-7799	10	10	is	be	AUX
ajst-7799	10	11	the	the	DET
ajst-7799	10	12	loss	loss	NOUN
ajst-7799	10	13	of	of	ADP
ajst-7799	10	14	mechanical	mechanical	ADJ
ajst-7799	10	15	energy	energy	NOUN
ajst-7799	10	16	,	,	PUNCT
ajst-7799	10	17	when	when	SCONJ
ajst-7799	10	18	the	the	DET
ajst-7799	10	19	acoustic	acoustic	ADJ
ajst-7799	10	20	emission	emission	NOUN
ajst-7799	10	21	signal	signal	NOUN
ajst-7799	10	22	propagates	propagate	VERB
ajst-7799	10	23	from	from	ADP
ajst-7799	10	24	the	the	DET
ajst-7799	10	25	sensor	sensor	NOUN
ajst-7799	10	26	base	base	NOUN
ajst-7799	10	27	to	to	ADP
ajst-7799	10	28	the	the	DET
ajst-7799	10	29	resonant	resonant	ADJ
ajst-7799	10	30	structure	structure	NOUN
ajst-7799	10	31	of	of	ADP
ajst-7799	10	32	the	the	DET
ajst-7799	10	33	sensor	sensor	NOUN
ajst-7799	10	34	there	there	PRON
ajst-7799	10	35	is	be	VERB
ajst-7799	10	36	a	a	DET
ajst-7799	10	37	dissipation	dissipation	NOUN
ajst-7799	10	38	of	of	ADP
ajst-7799	10	39	energy	energy	NOUN
ajst-7799	10	40	,	,	PUNCT
ajst-7799	10	41	the	the	DET
ajst-7799	10	42	degree	degree	NOUN
ajst-7799	10	43	of	of	ADP
ajst-7799	10	44	energy	energy	NOUN
ajst-7799	10	45	dissipation	dissipation	NOUN
ajst-7799	10	46	is	be	AUX
ajst-7799	10	47	measured	measure	VERB
ajst-7799	10	48	by	by	ADP
ajst-7799	10	49	the	the	DET
ajst-7799	10	50	quality	quality	NOUN
ajst-7799	10	51	factor	factor	NOUN
ajst-7799	10	52	q	q	NOUN
ajst-7799	11	1	[	[	X
ajst-7799	11	2	5	5	NUM
ajst-7799	11	3	]	]	PUNCT
ajst-7799	11	4	,	,	PUNCT
ajst-7799	11	5	the	the	DET
ajst-7799	11	6	quality	quality	NOUN
ajst-7799	11	7	factor	factor	NOUN
ajst-7799	11	8	is	be	AUX
ajst-7799	11	9	affected	affect	VERB
ajst-7799	11	10	by	by	ADP
ajst-7799	11	11	a	a	DET
ajst-7799	11	12	variety	variety	NOUN
ajst-7799	11	13	of	of	ADP
ajst-7799	11	14	circumstances	circumstance	NOUN
ajst-7799	11	15	,	,	PUNCT
ajst-7799	11	16	including	include	VERB
ajst-7799	11	17	air	air	NOUN
ajst-7799	11	18	damping	damping	NOUN
ajst-7799	11	19	,	,	PUNCT
ajst-7799	11	20	anchor	anchor	NOUN
ajst-7799	11	21	loss	loss	NOUN
ajst-7799	11	22	,	,	PUNCT
ajst-7799	11	23	etc	etc	X
ajst-7799	12	1	[	[	X
ajst-7799	12	2	6	6	NUM
ajst-7799	12	3	]	]	PUNCT
ajst-7799	12	4	.	.	PUNCT
ajst-7799	13	1	air	air	NOUN
ajst-7799	13	2	damping	damp	VERB
ajst-7799	13	3	can	can	AUX
ajst-7799	13	4	be	be	AUX
ajst-7799	13	5	solved	solve	VERB
ajst-7799	13	6	by	by	ADP
ajst-7799	13	7	designing	design	VERB
ajst-7799	13	8	structures	structure	NOUN
ajst-7799	13	9	to	to	PART
ajst-7799	13	10	reduce	reduce	VERB
ajst-7799	13	11	air	air	NOUN
ajst-7799	13	12	damping	damp	VERB
ajst-7799	13	13	[	[	X
ajst-7799	13	14	7,8	7,8	NUM
ajst-7799	13	15	]	]	PUNCT
ajst-7799	13	16	or	or	CCONJ
ajst-7799	13	17	by	by	ADP
ajst-7799	13	18	evacuating	evacuate	VERB
ajst-7799	13	19	[	[	PUNCT
ajst-7799	13	20	9	9	NUM
ajst-7799	13	21	]	]	PUNCT
ajst-7799	13	22	,	,	PUNCT
ajst-7799	13	23	while	while	SCONJ
ajst-7799	13	24	reducing	reduce	VERB
ajst-7799	13	25	anchor	anchor	NOUN
ajst-7799	13	26	losses	loss	NOUN
ajst-7799	13	27	is	be	AUX
ajst-7799	13	28	mainly	mainly	ADV
ajst-7799	13	29	achieved	achieve	VERB
ajst-7799	13	30	by	by	ADP
ajst-7799	13	31	designing	design	VERB
ajst-7799	13	32	new	new	ADJ
ajst-7799	13	33	anchor	anchor	NOUN
ajst-7799	13	34	structures	structure	NOUN
ajst-7799	13	35	.	.	PUNCT
ajst-7799	14	1	for	for	ADP
ajst-7799	14	2	example	example	NOUN
ajst-7799	14	3	,	,	PUNCT
ajst-7799	14	4	ardito	ardito	ADJ
ajst-7799	14	5	et	et	PROPN
ajst-7799	14	6	al	al	PROPN
ajst-7799	15	1	[	[	X
ajst-7799	15	2	10	10	NUM
ajst-7799	15	3	]	]	PUNCT
ajst-7799	15	4	formed	form	VERB
ajst-7799	15	5	a	a	DET
ajst-7799	15	6	phonon	phonon	NOUN
ajst-7799	15	7	crystal	crystal	NOUN
ajst-7799	15	8	structure	structure	NOUN
ajst-7799	15	9	by	by	ADP
ajst-7799	15	10	fabricating	fabricate	VERB
ajst-7799	15	11	a	a	DET
ajst-7799	15	12	series	series	NOUN
ajst-7799	15	13	of	of	ADP
ajst-7799	15	14	column	column	NOUN
ajst-7799	15	15	arrays	array	VERB
ajst-7799	15	16	on	on	ADP
ajst-7799	15	17	the	the	DET
ajst-7799	15	18	anchor	anchor	NOUN
ajst-7799	15	19	to	to	PART
ajst-7799	15	20	confine	confine	VERB
ajst-7799	15	21	the	the	DET
ajst-7799	15	22	wave	wave	NOUN
ajst-7799	15	23	signal	signal	NOUN
ajst-7799	15	24	in	in	ADP
ajst-7799	15	25	the	the	DET
ajst-7799	15	26	resonant	resonant	ADJ
ajst-7799	15	27	structure	structure	NOUN
ajst-7799	15	28	,	,	PUNCT
ajst-7799	15	29	which	which	PRON
ajst-7799	15	30	is	be	AUX
ajst-7799	15	31	a	a	DET
ajst-7799	15	32	practical	practical	ADJ
ajst-7799	15	33	novel	novel	NOUN
ajst-7799	15	34	design	design	NOUN
ajst-7799	15	35	for	for	ADP
ajst-7799	15	36	structures	structure	NOUN
ajst-7799	15	37	manufactured	manufacture	VERB
ajst-7799	15	38	by	by	ADP
ajst-7799	15	39	surface	surface	NOUN
ajst-7799	15	40	silicon	silicon	NOUN
ajst-7799	15	41	technology	technology	NOUN
ajst-7799	15	42	with	with	ADP
ajst-7799	15	43	low	low	ADJ
ajst-7799	15	44	thickness	thickness	NOUN
ajst-7799	15	45	requirements	requirement	NOUN
ajst-7799	15	46	.	.	PUNCT
ajst-7799	16	1	zou	zou	NOUN
ajst-7799	17	1	[	[	X
ajst-7799	17	2	11	11	NUM
ajst-7799	17	3	]	]	PUNCT
ajst-7799	17	4	et	et	PROPN
ajst-7799	17	5	al	al	PROPN
ajst-7799	17	6	designed	design	VERB
ajst-7799	17	7	a	a	DET
ajst-7799	17	8	butterfly	butterfly	NOUN
ajst-7799	17	9	-	-	PUNCT
ajst-7799	17	10	shaped	shape	VERB
ajst-7799	17	11	aluminum	aluminum	NOUN
ajst-7799	17	12	nitride	nitride	NOUN
ajst-7799	17	13	(	(	PUNCT
ajst-7799	17	14	aln	aln	PROPN
ajst-7799	17	15	)	)	PUNCT
ajst-7799	17	16	plate	plate	NOUN
ajst-7799	17	17	structure	structure	NOUN
ajst-7799	17	18	for	for	ADP
ajst-7799	17	19	lamb	lamb	PROPN
ajst-7799	17	20	wave	wave	NOUN
ajst-7799	17	21	resonators	resonator	NOUN
ajst-7799	17	22	,	,	PUNCT
ajst-7799	17	23	using	use	VERB
ajst-7799	17	24	a	a	DET
ajst-7799	17	25	butterfly	butterfly	NOUN
ajst-7799	17	26	-	-	PUNCT
ajst-7799	17	27	shaped	shape	VERB
ajst-7799	17	28	topology	topology	NOUN
ajst-7799	17	29	to	to	PART
ajst-7799	17	30	effectively	effectively	ADV
ajst-7799	17	31	change	change	VERB
ajst-7799	17	32	the	the	DET
ajst-7799	17	33	displacement	displacement	ADJ
ajst-7799	17	34	field	field	NOUN
ajst-7799	17	35	of	of	ADP
ajst-7799	17	36	the	the	DET
ajst-7799	17	37	aln	aln	PROPN
ajst-7799	17	38	plate	plate	NOUN
ajst-7799	17	39	,	,	PUNCT
ajst-7799	17	40	increasing	increase	VERB
ajst-7799	17	41	the	the	DET
ajst-7799	17	42	q	q	NOUN
ajst-7799	17	43	value	value	NOUN
ajst-7799	17	44	from	from	ADP
ajst-7799	17	45	3360	3360	NUM
ajst-7799	17	46	to	to	ADP
ajst-7799	17	47	4758.novel	4758.novel	NOUN
ajst-7799	17	48	designs	design	NOUN
ajst-7799	17	49	such	such	ADJ
ajst-7799	17	50	as	as	ADP
ajst-7799	17	51	these	these	PRON
ajst-7799	17	52	are	be	AUX
ajst-7799	17	53	based	base	VERB
ajst-7799	17	54	on	on	ADP
ajst-7799	17	55	surface	surface	NOUN
ajst-7799	17	56	silicon	silicon	NOUN
ajst-7799	17	57	technology	technology	NOUN
ajst-7799	17	58	for	for	ADP
ajst-7799	17	59	sensing	sense	VERB
ajst-7799	17	60	structures	structure	NOUN
ajst-7799	17	61	.	.	PUNCT
ajst-7799	18	1	capacitive	capacitive	ADJ
ajst-7799	18	2	acoustic	acoustic	ADJ
ajst-7799	18	3	emission	emission	NOUN
ajst-7799	18	4	sensors	sensor	NOUN
ajst-7799	18	5	,	,	PUNCT
ajst-7799	18	6	whose	whose	DET
ajst-7799	18	7	performance	performance	NOUN
ajst-7799	18	8	does	do	AUX
ajst-7799	18	9	not	not	PART
ajst-7799	18	10	depend	depend	VERB
ajst-7799	18	11	on	on	ADP
ajst-7799	18	12	the	the	DET
ajst-7799	18	13	properties	property	NOUN
ajst-7799	18	14	of	of	ADP
ajst-7799	18	15	the	the	DET
ajst-7799	18	16	manufacturing	manufacturing	NOUN
ajst-7799	18	17	material	material	NOUN
ajst-7799	18	18	,	,	PUNCT
ajst-7799	18	19	depend	depend	VERB
ajst-7799	18	20	mainly	mainly	ADV
ajst-7799	18	21	on	on	ADP
ajst-7799	18	22	the	the	DET
ajst-7799	18	23	design	design	NOUN
ajst-7799	18	24	of	of	ADP
ajst-7799	18	25	the	the	DET
ajst-7799	18	26	structure	structure	NOUN
ajst-7799	18	27	itself	itself	PRON
ajst-7799	18	28	.	.	PUNCT
ajst-7799	19	1	the	the	DET
ajst-7799	19	2	anchor	anchor	NOUN
ajst-7799	19	3	body	body	NOUN
ajst-7799	19	4	of	of	ADP
ajst-7799	19	5	the	the	DET
ajst-7799	19	6	resonant	resonant	ADJ
ajst-7799	19	7	structure	structure	NOUN
ajst-7799	19	8	becomes	become	VERB
ajst-7799	19	9	larger	large	ADJ
ajst-7799	19	10	.	.	PUNCT
ajst-7799	20	1	in	in	ADP
ajst-7799	20	2	conventional	conventional	ADJ
ajst-7799	20	3	designs	design	NOUN
ajst-7799	20	4	,	,	PUNCT
ajst-7799	20	5	the	the	DET
ajst-7799	20	6	anchor	anchor	NOUN
ajst-7799	20	7	body	body	NOUN
ajst-7799	20	8	is	be	AUX
ajst-7799	20	9	often	often	ADV
ajst-7799	20	10	designed	design	VERB
ajst-7799	20	11	as	as	ADP
ajst-7799	20	12	a	a	DET
ajst-7799	20	13	rectangular	rectangular	ADJ
ajst-7799	20	14	structure	structure	NOUN
ajst-7799	20	15	,	,	PUNCT
ajst-7799	20	16	but	but	CCONJ
ajst-7799	20	17	the	the	DET
ajst-7799	20	18	exact	exact	ADJ
ajst-7799	20	19	size	size	NOUN
ajst-7799	20	20	of	of	ADP
ajst-7799	20	21	the	the	DET
ajst-7799	20	22	rectangular	rectangular	ADJ
ajst-7799	20	23	structure	structure	NOUN
ajst-7799	20	24	has	have	AUX
ajst-7799	20	25	not	not	PART
ajst-7799	20	26	been	be	AUX
ajst-7799	20	27	fully	fully	ADV
ajst-7799	20	28	investigated	investigate	VERB
ajst-7799	20	29	.	.	PUNCT
ajst-7799	21	1	in	in	ADP
ajst-7799	21	2	this	this	DET
ajst-7799	21	3	paper	paper	NOUN
ajst-7799	21	4	,	,	PUNCT
ajst-7799	21	5	two	two	NUM
ajst-7799	21	6	comb	comb	NOUN
ajst-7799	21	7	-	-	PUNCT
ajst-7799	21	8	tooth	tooth	NOUN
ajst-7799	21	9	capacitive	capacitive	ADJ
ajst-7799	21	10	sensing	sense	VERB
ajst-7799	21	11	microelements	microelement	NOUN
ajst-7799	21	12	with	with	ADP
ajst-7799	21	13	different	different	ADJ
ajst-7799	21	14	capacitance	capacitance	NOUN
ajst-7799	21	15	change	change	NOUN
ajst-7799	21	16	mechanisms	mechanism	NOUN
ajst-7799	21	17	(	(	PUNCT
ajst-7799	21	18	gap	gap	NOUN
ajst-7799	21	19	-	-	PUNCT
ajst-7799	21	20	change	change	NOUN
ajst-7799	21	21	type	type	NOUN
ajst-7799	21	22	and	and	CCONJ
ajst-7799	21	23	areachange	areachange	NOUN
ajst-7799	21	24	-	-	PUNCT
ajst-7799	21	25	change	change	NOUN
ajst-7799	21	26	type	type	NOUN
ajst-7799	21	27	)	)	PUNCT
ajst-7799	21	28	and	and	CCONJ
ajst-7799	21	29	better	well	ADJ
ajst-7799	21	30	performance	performance	NOUN
ajst-7799	21	31	are	be	AUX
ajst-7799	21	32	designed	design	VERB
ajst-7799	21	33	using	use	VERB
ajst-7799	21	34	finite	finite	PROPN
ajst-7799	21	35	element	element	PROPN
ajst-7799	21	36	simulation	simulation	NOUN
ajst-7799	21	37	analysis	analysis	NOUN
ajst-7799	21	38	,	,	PUNCT
ajst-7799	21	39	and	and	CCONJ
ajst-7799	21	40	the	the	DET
ajst-7799	21	41	effect	effect	NOUN
ajst-7799	21	42	of	of	ADP
ajst-7799	21	43	the	the	DET
ajst-7799	21	44	anchor	anchor	NOUN
ajst-7799	21	45	body	body	NOUN
ajst-7799	21	46	cross	cross	NOUN
ajst-7799	21	47	-	-	ADJ
ajst-7799	21	48	section	section	ADJ
ajst-7799	21	49	parameters	parameter	NOUN
ajst-7799	21	50	on	on	ADP
ajst-7799	21	51	the	the	DET
ajst-7799	21	52	response	response	NOUN
ajst-7799	21	53	characteristics	characteristic	NOUN
ajst-7799	21	54	of	of	ADP
ajst-7799	21	55	the	the	DET
ajst-7799	21	56	sensing	sense	VERB
ajst-7799	21	57	microelements	microelement	NOUN
ajst-7799	21	58	is	be	AUX
ajst-7799	21	59	investigated	investigate	VERB
ajst-7799	21	60	as	as	SCONJ
ajst-7799	21	61	measured	measure	VERB
ajst-7799	21	62	by	by	ADP
ajst-7799	21	63	their	their	PRON
ajst-7799	21	64	displacement	displacement	ADJ
ajst-7799	21	65	response	response	NOUN
ajst-7799	21	66	cases	case	NOUN
ajst-7799	21	67	to	to	PART
ajst-7799	21	68	provide	provide	VERB
ajst-7799	21	69	an	an	DET
ajst-7799	21	70	optimized	optimize	VERB
ajst-7799	21	71	solution	solution	NOUN
ajst-7799	21	72	for	for	ADP
ajst-7799	21	73	the	the	DET
ajst-7799	21	74	structural	structural	ADJ
ajst-7799	21	75	design	design	NOUN
ajst-7799	21	76	of	of	ADP
ajst-7799	21	77	comb	comb	NOUN
ajst-7799	21	78	-	-	PUNCT
ajst-7799	21	79	tooth	tooth	NOUN
ajst-7799	21	80	capacitive	capacitive	ADJ
ajst-7799	21	81	acoustic	acoustic	ADJ
ajst-7799	21	82	emission	emission	NOUN
ajst-7799	21	83	sensing	sense	VERB
ajst-7799	21	84	microelements	microelement	NOUN
ajst-7799	21	85	manufactured	manufacture	VERB
ajst-7799	21	86	by	by	ADP
ajst-7799	21	87	the	the	DET
ajst-7799	21	88	body	body	NOUN
ajst-7799	21	89	-	-	PUNCT
ajst-7799	21	90	silicon	silicon	NOUN
ajst-7799	21	91	process	process	NOUN
ajst-7799	21	92	.	.	PUNCT
ajst-7799	22	1	this	this	DET
ajst-7799	22	2	study	study	NOUN
ajst-7799	22	3	is	be	AUX
ajst-7799	22	4	organized	organize	VERB
ajst-7799	22	5	as	as	SCONJ
ajst-7799	22	6	follows	follow	VERB
ajst-7799	22	7	:	:	PUNCT
ajst-7799	22	8	in	in	ADP
ajst-7799	22	9	section	section	NOUN
ajst-7799	22	10	i	i	PRON
ajst-7799	22	11	,	,	PUNCT
ajst-7799	22	12	the	the	DET
ajst-7799	22	13	acoustoelectric	acoustoelectric	ADJ
ajst-7799	22	14	conversion	conversion	NOUN
ajst-7799	22	15	mechanism	mechanism	NOUN
ajst-7799	22	16	of	of	ADP
ajst-7799	22	17	two	two	NUM
ajst-7799	22	18	types	type	NOUN
ajst-7799	22	19	of	of	ADP
ajst-7799	22	20	combtooth	combtooth	NOUN
ajst-7799	22	21	structures	structure	NOUN
ajst-7799	22	22	is	be	AUX
ajst-7799	22	23	given	give	VERB
ajst-7799	22	24	;	;	PUNCT
ajst-7799	22	25	in	in	ADP
ajst-7799	22	26	section	section	PROPN
ajst-7799	22	27	ii	ii	PROPN
ajst-7799	22	28	,	,	PUNCT
ajst-7799	22	29	the	the	DET
ajst-7799	22	30	design	design	NOUN
ajst-7799	22	31	parameters	parameter	NOUN
ajst-7799	22	32	of	of	ADP
ajst-7799	22	33	the	the	DET
ajst-7799	22	34	sensing	sense	VERB
ajst-7799	22	35	microelement	microelement	NOUN
ajst-7799	22	36	are	be	AUX
ajst-7799	22	37	given	give	VERB
ajst-7799	22	38	,	,	PUNCT
ajst-7799	22	39	and	and	CCONJ
ajst-7799	22	40	the	the	DET
ajst-7799	22	41	first	first	ADJ
ajst-7799	22	42	three	three	NUM
ajst-7799	22	43	orders	order	NOUN
ajst-7799	22	44	of	of	ADP
ajst-7799	22	45	eigenmodes	eigenmode	NOUN
ajst-7799	22	46	as	as	ADV
ajst-7799	22	47	well	well	ADV
ajst-7799	22	48	as	as	ADP
ajst-7799	22	49	the	the	DET
ajst-7799	22	50	frequency	frequency	NOUN
ajst-7799	22	51	domain	domain	NOUN
ajst-7799	22	52	displacement	displacement	NOUN
ajst-7799	22	53	response	response	NOUN
ajst-7799	22	54	are	be	AUX
ajst-7799	22	55	determined	determine	VERB
ajst-7799	22	56	by	by	ADP
ajst-7799	22	57	finite	finite	ADJ
ajst-7799	22	58	element	element	NOUN
ajst-7799	22	59	analysis	analysis	NOUN
ajst-7799	22	60	;	;	PUNCT
ajst-7799	22	61	in	in	ADP
ajst-7799	22	62	section	section	PROPN
ajst-7799	22	63	iii	iii	PROPN
ajst-7799	22	64	,	,	PUNCT
ajst-7799	22	65	the	the	DET
ajst-7799	22	66	effect	effect	NOUN
ajst-7799	22	67	of	of	ADP
ajst-7799	22	68	the	the	DET
ajst-7799	22	69	anchor	anchor	NOUN
ajst-7799	22	70	body	body	NOUN
ajst-7799	22	71	crosssection	crosssection	NOUN
ajst-7799	22	72	parameters	parameter	NOUN
ajst-7799	22	73	on	on	ADP
ajst-7799	22	74	the	the	DET
ajst-7799	22	75	peak	peak	ADJ
ajst-7799	22	76	displacement	displacement	ADJ
ajst-7799	22	77	response	response	NOUN
ajst-7799	22	78	of	of	ADP
ajst-7799	22	79	the	the	DET
ajst-7799	22	80	sensing	sense	VERB
ajst-7799	22	81	microelement	microelement	NOUN
ajst-7799	22	82	is	be	AUX
ajst-7799	22	83	revealed	reveal	VERB
ajst-7799	22	84	,	,	PUNCT
ajst-7799	22	85	and	and	CCONJ
ajst-7799	22	86	then	then	ADV
ajst-7799	22	87	an	an	DET
ajst-7799	22	88	optimization	optimization	NOUN
ajst-7799	22	89	method	method	NOUN
ajst-7799	22	90	to	to	PART
ajst-7799	22	91	reduce	reduce	VERB
ajst-7799	22	92	the	the	DET
ajst-7799	22	93	anchor	anchor	NOUN
ajst-7799	22	94	loss	loss	NOUN
ajst-7799	22	95	of	of	ADP
ajst-7799	22	96	the	the	DET
ajst-7799	22	97	sensing	sense	VERB
ajst-7799	22	98	microelement	microelement	NOUN
ajst-7799	22	99	with	with	ADP
ajst-7799	22	100	comb	comb	NOUN
ajst-7799	22	101	-	-	PUNCT
ajst-7799	22	102	tooth	tooth	NOUN
ajst-7799	22	103	structure	structure	NOUN
ajst-7799	22	104	is	be	AUX
ajst-7799	22	105	proposed	propose	VERB
ajst-7799	22	106	;	;	PUNCT
ajst-7799	22	107	in	in	ADP
ajst-7799	22	108	section	section	PROPN
ajst-7799	22	109	iii	iii	PROPN
ajst-7799	22	110	,	,	PUNCT
ajst-7799	22	111	the	the	DET
ajst-7799	22	112	effect	effect	NOUN
ajst-7799	22	113	of	of	ADP
ajst-7799	22	114	the	the	DET
ajst-7799	22	115	anchor	anchor	NOUN
ajst-7799	22	116	body	body	NOUN
ajst-7799	22	117	cross	cross	NOUN
ajst-7799	22	118	-	-	ADJ
ajst-7799	22	119	section	section	ADJ
ajst-7799	22	120	parameters	parameter	NOUN
ajst-7799	22	121	on	on	ADP
ajst-7799	22	122	the	the	DET
ajst-7799	22	123	peak	peak	ADJ
ajst-7799	22	124	displacement	displacement	ADJ
ajst-7799	22	125	response	response	NOUN
ajst-7799	22	126	of	of	ADP
ajst-7799	22	127	the	the	DET
ajst-7799	22	128	sensing	sense	VERB
ajst-7799	22	129	microelement	microelement	NOUN
ajst-7799	22	130	is	be	AUX
ajst-7799	22	131	revealed	reveal	VERB
ajst-7799	22	132	;	;	PUNCT
ajst-7799	22	133	section	section	NOUN
ajst-7799	22	134	iv	iv	NUM
ajst-7799	22	135	summarizes	summarize	NOUN
ajst-7799	22	136	this	this	DET
ajst-7799	22	137	work	work	NOUN
ajst-7799	22	138	and	and	CCONJ
ajst-7799	22	139	presents	present	VERB
ajst-7799	22	140	the	the	DET
ajst-7799	22	141	shortcomings	shortcoming	NOUN
ajst-7799	22	142	and	and	CCONJ
ajst-7799	22	143	outlook	outlook	NOUN
ajst-7799	22	144	.	.	PUNCT
ajst-7799	23	1	2	2	X
ajst-7799	23	2	.	.	X
ajst-7799	23	3	working	work	VERB
ajst-7799	23	4	principle	principle	NOUN
ajst-7799	23	5	of	of	ADP
ajst-7799	23	6	comb	comb	NOUN
ajst-7799	23	7	type	type	NOUN
ajst-7799	23	8	acoustic	acoustic	ADJ
ajst-7799	23	9	emission	emission	NOUN
ajst-7799	23	10	sensor	sensor	NOUN
ajst-7799	23	11	the	the	DET
ajst-7799	23	12	acoustic	acoustic	ADJ
ajst-7799	23	13	emission	emission	NOUN
ajst-7799	23	14	sensing	sense	VERB
ajst-7799	23	15	structure	structure	NOUN
ajst-7799	23	16	sensitive	sensitive	ADJ
ajst-7799	23	17	to	to	ADP
ajst-7799	23	18	inplane	inplane	NOUN
ajst-7799	23	19	signals	signal	NOUN
ajst-7799	23	20	mainly	mainly	ADV
ajst-7799	23	21	consists	consist	VERB
ajst-7799	23	22	of	of	ADP
ajst-7799	23	23	a	a	DET
ajst-7799	23	24	fixed	fix	VERB
ajst-7799	23	25	electrode	electrode	NOUN
ajst-7799	23	26	containing	contain	VERB
ajst-7799	23	27	a	a	DET
ajst-7799	23	28	comb	comb	NOUN
ajst-7799	23	29	,	,	PUNCT
ajst-7799	23	30	an	an	DET
ajst-7799	23	31	anchor	anchor	NOUN
ajst-7799	23	32	body	body	NOUN
ajst-7799	23	33	and	and	CCONJ
ajst-7799	23	34	a	a	DET
ajst-7799	23	35	resonant	resonant	ADJ
ajst-7799	23	36	structure	structure	NOUN
ajst-7799	23	37	consisting	consist	VERB
ajst-7799	23	38	of	of	ADP
ajst-7799	23	39	a	a	DET
ajst-7799	23	40	mass	mass	ADJ
ajst-7799	23	41	block	block	NOUN
ajst-7799	23	42	containing	contain	VERB
ajst-7799	23	43	a	a	DET
ajst-7799	23	44	comb	comb	NOUN
ajst-7799	23	45	and	and	CCONJ
ajst-7799	23	46	a	a	DET
ajst-7799	23	47	micro	micro	ADJ
ajst-7799	23	48	spring	spring	NOUN
ajst-7799	23	49	,	,	PUNCT
ajst-7799	23	50	as	as	SCONJ
ajst-7799	23	51	shown	show	VERB
ajst-7799	23	52	in	in	ADP
ajst-7799	23	53	figure	figure	NOUN
ajst-7799	23	54	1	1	NUM
ajst-7799	23	55	.	.	PUNCT
ajst-7799	24	1	the	the	DET
ajst-7799	24	2	anchor	anchor	NOUN
ajst-7799	24	3	body	body	NOUN
ajst-7799	24	4	,	,	PUNCT
ajst-7799	24	5	fixed	fix	VERB
ajst-7799	24	6	electrode	electrode	NOUN
ajst-7799	24	7	and	and	CCONJ
ajst-7799	24	8	its	its	PRON
ajst-7799	24	9	fixed	fix	VERB
ajst-7799	24	10	105	105	NUM
ajst-7799	24	11	comb	comb	NOUN
ajst-7799	24	12	teeth	tooth	NOUN
ajst-7799	24	13	are	be	AUX
ajst-7799	24	14	directly	directly	ADV
ajst-7799	24	15	attached	attach	VERB
ajst-7799	24	16	to	to	ADP
ajst-7799	24	17	the	the	DET
ajst-7799	24	18	surface	surface	NOUN
ajst-7799	24	19	of	of	ADP
ajst-7799	24	20	the	the	DET
ajst-7799	24	21	substrate	substrate	NOUN
ajst-7799	24	22	,	,	PUNCT
ajst-7799	24	23	and	and	CCONJ
ajst-7799	24	24	the	the	DET
ajst-7799	24	25	mass	mass	ADJ
ajst-7799	24	26	block	block	NOUN
ajst-7799	24	27	and	and	CCONJ
ajst-7799	24	28	micro	micro	ADJ
ajst-7799	24	29	spring	spring	NOUN
ajst-7799	24	30	are	be	AUX
ajst-7799	24	31	connected	connect	VERB
ajst-7799	24	32	to	to	ADP
ajst-7799	24	33	the	the	DET
ajst-7799	24	34	anchor	anchor	NOUN
ajst-7799	24	35	body	body	NOUN
ajst-7799	24	36	at	at	ADP
ajst-7799	24	37	both	both	DET
ajst-7799	24	38	ends	end	NOUN
ajst-7799	24	39	and	and	CCONJ
ajst-7799	24	40	left	leave	VERB
ajst-7799	24	41	with	with	ADP
ajst-7799	24	42	a	a	DET
ajst-7799	24	43	certain	certain	ADJ
ajst-7799	24	44	gap	gap	NOUN
ajst-7799	24	45	with	with	ADP
ajst-7799	24	46	the	the	DET
ajst-7799	24	47	substrate	substrate	NOUN
ajst-7799	24	48	.	.	PUNCT
ajst-7799	25	1	as	as	SCONJ
ajst-7799	25	2	shown	show	VERB
ajst-7799	25	3	in	in	ADP
ajst-7799	25	4	figure	figure	NOUN
ajst-7799	25	5	1(a	1(a	NUM
ajst-7799	25	6	)	)	PUNCT
ajst-7799	25	7	,	,	PUNCT
ajst-7799	25	8	the	the	DET
ajst-7799	25	9	direction	direction	NOUN
ajst-7799	25	10	of	of	ADP
ajst-7799	25	11	deformation	deformation	NOUN
ajst-7799	25	12	of	of	ADP
ajst-7799	25	13	the	the	DET
ajst-7799	25	14	microspring	microspring	NOUN
ajst-7799	25	15	susceptibility	susceptibility	NOUN
ajst-7799	25	16	of	of	ADP
ajst-7799	25	17	the	the	DET
ajst-7799	25	18	areachange	areachange	NOUN
ajst-7799	25	19	acoustic	acoustic	ADJ
ajst-7799	25	20	emission	emission	NOUN
ajst-7799	25	21	sensing	sense	VERB
ajst-7799	25	22	micro	micro	NOUN
ajst-7799	25	23	-	-	NOUN
ajst-7799	25	24	element	element	NOUN
ajst-7799	25	25	is	be	AUX
ajst-7799	25	26	the	the	DET
ajst-7799	25	27	same	same	ADJ
ajst-7799	25	28	as	as	ADP
ajst-7799	25	29	the	the	DET
ajst-7799	25	30	change	change	NOUN
ajst-7799	25	31	in	in	ADP
ajst-7799	25	32	the	the	DET
ajst-7799	25	33	squared	squared	ADJ
ajst-7799	25	34	area	area	NOUN
ajst-7799	25	35	of	of	ADP
ajst-7799	25	36	the	the	DET
ajst-7799	25	37	comb	comb	NOUN
ajst-7799	25	38	capacitance	capacitance	NOUN
ajst-7799	25	39	,	,	PUNCT
ajst-7799	25	40	and	and	CCONJ
ajst-7799	25	41	in	in	ADP
ajst-7799	25	42	figure	figure	NOUN
ajst-7799	25	43	1(b	1(b	NUM
ajst-7799	25	44	)	)	PUNCT
ajst-7799	25	45	,	,	PUNCT
ajst-7799	25	46	the	the	DET
ajst-7799	25	47	direction	direction	NOUN
ajst-7799	25	48	of	of	ADP
ajst-7799	25	49	deformation	deformation	NOUN
ajst-7799	25	50	of	of	ADP
ajst-7799	25	51	the	the	DET
ajst-7799	25	52	microspring	microspring	NOUN
ajst-7799	25	53	susceptibility	susceptibility	NOUN
ajst-7799	25	54	of	of	ADP
ajst-7799	25	55	the	the	DET
ajst-7799	25	56	gap	gap	NOUN
ajst-7799	25	57	-	-	PUNCT
ajst-7799	25	58	change	change	NOUN
ajst-7799	25	59	acoustic	acoustic	ADJ
ajst-7799	25	60	emission	emission	NOUN
ajst-7799	25	61	sensing	sense	VERB
ajst-7799	25	62	micro	micro	NOUN
ajst-7799	25	63	-	-	NOUN
ajst-7799	25	64	element	element	NOUN
ajst-7799	25	65	is	be	AUX
ajst-7799	25	66	the	the	DET
ajst-7799	25	67	same	same	ADJ
ajst-7799	25	68	as	as	ADP
ajst-7799	25	69	the	the	DET
ajst-7799	25	70	change	change	NOUN
ajst-7799	25	71	in	in	ADP
ajst-7799	25	72	the	the	DET
ajst-7799	25	73	pitch	pitch	NOUN
ajst-7799	25	74	of	of	ADP
ajst-7799	25	75	the	the	DET
ajst-7799	25	76	comb	comb	NOUN
ajst-7799	25	77	capacitance	capacitance	NOUN
ajst-7799	25	78	.	.	PUNCT
ajst-7799	26	1	figure	figure	NOUN
ajst-7799	26	2	1	1	NUM
ajst-7799	26	3	.	.	PUNCT
ajst-7799	26	4	basic	basic	ADJ
ajst-7799	26	5	structure	structure	NOUN
ajst-7799	26	6	of	of	ADP
ajst-7799	26	7	capacitive	capacitive	ADJ
ajst-7799	26	8	in	in	ADP
ajst-7799	26	9	-	-	PUNCT
ajst-7799	26	10	plane	plane	NOUN
ajst-7799	26	11	acoustic	acoustic	ADJ
ajst-7799	26	12	emission	emission	NOUN
ajst-7799	26	13	sensing	sense	VERB
ajst-7799	26	14	micro	micro	NOUN
ajst-7799	26	15	-	-	NOUN
ajst-7799	26	16	element	element	NOUN
ajst-7799	26	17	:	:	PUNCT
ajst-7799	26	18	(	(	PUNCT
ajst-7799	26	19	a	a	X
ajst-7799	26	20	)	)	PUNCT
ajst-7799	26	21	area	area	NOUN
ajst-7799	26	22	-	-	PUNCT
ajst-7799	26	23	change	change	NOUN
ajst-7799	26	24	acoustic	acoustic	ADJ
ajst-7799	26	25	emission	emission	NOUN
ajst-7799	26	26	sensing	sense	VERB
ajst-7799	26	27	micro	micro	NOUN
ajst-7799	26	28	element	element	NOUN
ajst-7799	26	29	;	;	PUNCT
ajst-7799	26	30	(	(	PUNCT
ajst-7799	26	31	b	b	X
ajst-7799	26	32	)	)	PUNCT
ajst-7799	26	33	gap	gap	NOUN
ajst-7799	26	34	-	-	PUNCT
ajst-7799	26	35	change	change	NOUN
ajst-7799	26	36	acoustic	acoustic	ADJ
ajst-7799	26	37	emission	emission	NOUN
ajst-7799	26	38	sensing	sense	VERB
ajst-7799	26	39	micro	micro	NOUN
ajst-7799	26	40	element	element	NOUN
ajst-7799	26	41	one	one	NUM
ajst-7799	26	42	of	of	ADP
ajst-7799	26	43	the	the	DET
ajst-7799	26	44	simplified	simplified	ADJ
ajst-7799	26	45	models	model	NOUN
ajst-7799	26	46	of	of	ADP
ajst-7799	26	47	the	the	DET
ajst-7799	26	48	area	area	NOUN
ajst-7799	26	49	-	-	PUNCT
ajst-7799	26	50	change	change	NOUN
ajst-7799	26	51	acoustic	acoustic	ADJ
ajst-7799	26	52	emission	emission	NOUN
ajst-7799	26	53	sensing	sense	VERB
ajst-7799	26	54	micro	micro	NOUN
ajst-7799	26	55	-	-	NOUN
ajst-7799	26	56	element	element	NOUN
ajst-7799	26	57	is	be	AUX
ajst-7799	26	58	shown	show	VERB
ajst-7799	26	59	in	in	ADP
ajst-7799	26	60	figure	figure	NOUN
ajst-7799	26	61	2	2	NUM
ajst-7799	26	62	.	.	PUNCT
ajst-7799	27	1	in	in	ADP
ajst-7799	27	2	its	its	PRON
ajst-7799	27	3	operating	operate	VERB
ajst-7799	27	4	state	state	NOUN
ajst-7799	27	5	,	,	PUNCT
ajst-7799	27	6	the	the	DET
ajst-7799	27	7	change	change	NOUN
ajst-7799	27	8	of	of	ADP
ajst-7799	27	9	comb	comb	NOUN
ajst-7799	27	10	capacitance	capacitance	NOUN
ajst-7799	27	11	on	on	ADP
ajst-7799	27	12	both	both	DET
ajst-7799	27	13	sides	side	NOUN
ajst-7799	27	14	of	of	ADP
ajst-7799	27	15	its	its	PRON
ajst-7799	27	16	mass	mass	ADJ
ajst-7799	27	17	block	block	NOUN
ajst-7799	27	18	is	be	AUX
ajst-7799	27	19	reversed	reverse	VERB
ajst-7799	27	20	,	,	PUNCT
ajst-7799	27	21	so	so	SCONJ
ajst-7799	27	22	both	both	DET
ajst-7799	27	23	sides	side	NOUN
ajst-7799	27	24	need	need	VERB
ajst-7799	27	25	to	to	PART
ajst-7799	27	26	be	be	AUX
ajst-7799	27	27	analyzed	analyze	VERB
ajst-7799	27	28	.	.	PUNCT
ajst-7799	28	1	figure	figure	NOUN
ajst-7799	28	2	2	2	NUM
ajst-7799	28	3	.	.	PUNCT
ajst-7799	28	4	electrical	electrical	ADJ
ajst-7799	28	5	analysis	analysis	NOUN
ajst-7799	28	6	model	model	NOUN
ajst-7799	28	7	of	of	ADP
ajst-7799	28	8	area	area	NOUN
ajst-7799	28	9	-	-	PUNCT
ajst-7799	28	10	change	change	NOUN
ajst-7799	28	11	acoustic	acoustic	ADJ
ajst-7799	28	12	emission	emission	NOUN
ajst-7799	28	13	sensing	sense	VERB
ajst-7799	28	14	micro	micro	NOUN
ajst-7799	28	15	-	-	NOUN
ajst-7799	28	16	element	element	ADJ
ajst-7799	28	17	when	when	SCONJ
ajst-7799	28	18	it	it	PRON
ajst-7799	28	19	is	be	AUX
ajst-7799	28	20	excited	excite	VERB
ajst-7799	28	21	by	by	ADP
ajst-7799	28	22	the	the	DET
ajst-7799	28	23	signal	signal	NOUN
ajst-7799	28	24	resulting	result	VERB
ajst-7799	28	25	in	in	ADP
ajst-7799	28	26	a	a	DET
ajst-7799	28	27	displacement	displacement	NOUN
ajst-7799	28	28	of	of	ADP
ajst-7799	28	29	x	x	PUNCT
ajst-7799	28	30	in	in	ADP
ajst-7799	28	31	the	the	DET
ajst-7799	28	32	direction	direction	NOUN
ajst-7799	28	33	of	of	ADP
ajst-7799	28	34	the	the	DET
ajst-7799	28	35	resonant	resonant	NOUN
ajst-7799	28	36	spacing	spacing	NOUN
ajst-7799	28	37	along	along	ADP
ajst-7799	28	38	the	the	DET
ajst-7799	28	39	area	area	NOUN
ajst-7799	28	40	change	change	NOUN
ajst-7799	28	41	at	at	ADP
ajst-7799	28	42	time	time	NOUN
ajst-7799	28	43	t	t	PROPN
ajst-7799	28	44	,	,	PUNCT
ajst-7799	28	45	its	its	PRON
ajst-7799	28	46	average	average	ADJ
ajst-7799	28	47	output	output	NOUN
ajst-7799	28	48	current	current	NOUN
ajst-7799	28	49	can	can	AUX
ajst-7799	28	50	be	be	AUX
ajst-7799	28	51	expressed	express	VERB
ajst-7799	28	52	by	by	ADP
ajst-7799	28	53	equation	equation	NOUN
ajst-7799	28	54	1	1	NUM
ajst-7799	28	55	as	as	ADP
ajst-7799	28	56	:	:	PUNCT
ajst-7799	28	57	i	i	PROPN
ajst-7799	28	58	𝑉	𝑉	PROPN
ajst-7799	28	59	𝑉	𝑉	PROPN
ajst-7799	28	60	𝑉	𝑉	PROPN
ajst-7799	28	61	𝑉	𝑉	PROPN
ajst-7799	28	62	𝑉	𝑉	PROPN
ajst-7799	28	63	𝑉	𝑉	PROPN
ajst-7799	28	64	𝑉	𝑉	PROPN
ajst-7799	28	65	𝑉	𝑉	PROPN
ajst-7799	28	66	(	(	PUNCT
ajst-7799	28	67	1	1	NUM
ajst-7799	28	68	)	)	PUNCT
ajst-7799	28	69	where	where	SCONJ
ajst-7799	28	70	h	h	NOUN
ajst-7799	28	71	is	be	AUX
ajst-7799	28	72	the	the	DET
ajst-7799	28	73	height	height	NOUN
ajst-7799	28	74	of	of	ADP
ajst-7799	28	75	the	the	DET
ajst-7799	28	76	resonant	resonant	ADJ
ajst-7799	28	77	comb	comb	NOUN
ajst-7799	28	78	and	and	CCONJ
ajst-7799	28	79	dx	dx	PROPN
ajst-7799	28	80	/	/	SYM
ajst-7799	28	81	dt	dt	PROPN
ajst-7799	28	82	is	be	AUX
ajst-7799	28	83	the	the	DET
ajst-7799	28	84	change	change	NOUN
ajst-7799	28	85	in	in	ADP
ajst-7799	28	86	displacement	displacement	NOUN
ajst-7799	28	87	of	of	ADP
ajst-7799	28	88	the	the	DET
ajst-7799	28	89	comb	comb	NOUN
ajst-7799	28	90	in	in	ADP
ajst-7799	28	91	the	the	DET
ajst-7799	28	92	direction	direction	NOUN
ajst-7799	28	93	of	of	ADP
ajst-7799	28	94	area	area	NOUN
ajst-7799	28	95	change	change	NOUN
ajst-7799	28	96	.	.	PUNCT
ajst-7799	29	1	according	accord	VERB
ajst-7799	29	2	to	to	ADP
ajst-7799	29	3	eq	eq	PROPN
ajst-7799	29	4	.	.	PROPN
ajst-7799	29	5	1	1	NUM
ajst-7799	29	6	,	,	PUNCT
ajst-7799	29	7	in	in	ADP
ajst-7799	29	8	the	the	DET
ajst-7799	29	9	design	design	NOUN
ajst-7799	29	10	of	of	ADP
ajst-7799	29	11	the	the	DET
ajst-7799	29	12	area	area	NOUN
ajst-7799	29	13	-	-	PUNCT
ajst-7799	29	14	change	change	NOUN
ajst-7799	29	15	acoustic	acoustic	ADJ
ajst-7799	29	16	emission	emission	NOUN
ajst-7799	29	17	sensing	sense	VERB
ajst-7799	29	18	micro	micro	NOUN
ajst-7799	29	19	-	-	NOUN
ajst-7799	29	20	element	element	NOUN
ajst-7799	29	21	,	,	PUNCT
ajst-7799	29	22	the	the	DET
ajst-7799	29	23	fixed	fix	VERB
ajst-7799	29	24	electrodes	electrode	NOUN
ajst-7799	29	25	on	on	ADP
ajst-7799	29	26	both	both	DET
ajst-7799	29	27	sides	side	NOUN
ajst-7799	29	28	need	need	VERB
ajst-7799	29	29	to	to	PART
ajst-7799	29	30	be	be	AUX
ajst-7799	29	31	connected	connect	VERB
ajst-7799	29	32	to	to	ADP
ajst-7799	29	33	different	different	ADJ
ajst-7799	29	34	potentials	potential	NOUN
ajst-7799	29	35	and	and	CCONJ
ajst-7799	29	36	the	the	DET
ajst-7799	29	37	resonant	resonant	ADJ
ajst-7799	29	38	structure	structure	NOUN
ajst-7799	29	39	needs	need	VERB
ajst-7799	29	40	to	to	PART
ajst-7799	29	41	be	be	AUX
ajst-7799	29	42	connected	connect	VERB
ajst-7799	29	43	to	to	ADP
ajst-7799	29	44	a	a	DET
ajst-7799	29	45	potential	potential	NOUN
ajst-7799	29	46	between	between	ADP
ajst-7799	29	47	the	the	DET
ajst-7799	29	48	two	two	NUM
ajst-7799	29	49	to	to	PART
ajst-7799	29	50	generate	generate	VERB
ajst-7799	29	51	a	a	DET
ajst-7799	29	52	larger	large	ADJ
ajst-7799	29	53	current	current	NOUN
ajst-7799	29	54	.	.	PUNCT
ajst-7799	30	1	for	for	ADP
ajst-7799	30	2	the	the	DET
ajst-7799	30	3	gap	gap	NOUN
ajst-7799	30	4	-	-	PUNCT
ajst-7799	30	5	change	change	NOUN
ajst-7799	30	6	sensing	sense	VERB
ajst-7799	30	7	micro	micro	NOUN
ajst-7799	30	8	-	-	NOUN
ajst-7799	30	9	element	element	ADJ
ajst-7799	30	10	,	,	PUNCT
ajst-7799	30	11	the	the	DET
ajst-7799	30	12	change	change	NOUN
ajst-7799	30	13	in	in	ADP
ajst-7799	30	14	capacitance	capacitance	NOUN
ajst-7799	30	15	of	of	ADP
ajst-7799	30	16	the	the	DET
ajst-7799	30	17	combs	comb	NOUN
ajst-7799	30	18	on	on	ADP
ajst-7799	30	19	both	both	DET
ajst-7799	30	20	sides	side	NOUN
ajst-7799	30	21	of	of	ADP
ajst-7799	30	22	its	its	PRON
ajst-7799	30	23	mass	mass	ADJ
ajst-7799	30	24	block	block	NOUN
ajst-7799	30	25	in	in	ADP
ajst-7799	30	26	the	the	DET
ajst-7799	30	27	operating	operating	NOUN
ajst-7799	30	28	condition	condition	NOUN
ajst-7799	30	29	is	be	AUX
ajst-7799	30	30	the	the	DET
ajst-7799	30	31	same	same	ADJ
ajst-7799	30	32	,	,	PUNCT
ajst-7799	30	33	so	so	ADV
ajst-7799	30	34	one	one	NUM
ajst-7799	30	35	side	side	NOUN
ajst-7799	30	36	can	can	AUX
ajst-7799	30	37	be	be	AUX
ajst-7799	30	38	analyzed	analyze	VERB
ajst-7799	30	39	separately	separately	ADV
ajst-7799	30	40	.	.	PUNCT
ajst-7799	31	1	for	for	ADP
ajst-7799	31	2	one	one	NUM
ajst-7799	31	3	resonant	resonant	ADJ
ajst-7799	31	4	comb	comb	NOUN
ajst-7799	31	5	,	,	PUNCT
ajst-7799	31	6	the	the	DET
ajst-7799	31	7	capacitance	capacitance	NOUN
ajst-7799	31	8	structure	structure	NOUN
ajst-7799	31	9	can	can	AUX
ajst-7799	31	10	be	be	AUX
ajst-7799	31	11	formed	form	VERB
ajst-7799	31	12	separately	separately	ADV
ajst-7799	31	13	from	from	ADP
ajst-7799	31	14	the	the	DET
ajst-7799	31	15	two	two	NUM
ajst-7799	31	16	adjacent	adjacent	ADJ
ajst-7799	31	17	fixed	fix	VERB
ajst-7799	31	18	combs	comb	NOUN
ajst-7799	31	19	,	,	PUNCT
ajst-7799	31	20	as	as	SCONJ
ajst-7799	31	21	shown	show	VERB
ajst-7799	31	22	in	in	ADP
ajst-7799	31	23	figure	figure	NOUN
ajst-7799	31	24	3	3	NUM
ajst-7799	31	25	.	.	NOUN
ajst-7799	31	26	106	106	NUM
ajst-7799	31	27	.	.	PUNCT
ajst-7799	32	1	figure	figure	NOUN
ajst-7799	32	2	3	3	NUM
ajst-7799	32	3	.	.	PUNCT
ajst-7799	32	4	electrical	electrical	ADJ
ajst-7799	32	5	analysis	analysis	NOUN
ajst-7799	32	6	model	model	NOUN
ajst-7799	32	7	of	of	ADP
ajst-7799	32	8	gap	gap	NOUN
ajst-7799	32	9	-	-	PUNCT
ajst-7799	32	10	change	change	NOUN
ajst-7799	32	11	acoustic	acoustic	ADJ
ajst-7799	32	12	emission	emission	NOUN
ajst-7799	32	13	sensing	sense	VERB
ajst-7799	32	14	micro	micro	NOUN
ajst-7799	32	15	-	-	NOUN
ajst-7799	32	16	element	element	ADJ
ajst-7799	32	17	when	when	SCONJ
ajst-7799	32	18	it	it	PRON
ajst-7799	32	19	is	be	AUX
ajst-7799	32	20	subjected	subject	VERB
ajst-7799	32	21	to	to	PART
ajst-7799	32	22	signal	signal	VERB
ajst-7799	32	23	excitation	excitation	NOUN
ajst-7799	32	24	resulting	result	VERB
ajst-7799	32	25	in	in	ADP
ajst-7799	32	26	a	a	DET
ajst-7799	32	27	change	change	NOUN
ajst-7799	32	28	in	in	ADP
ajst-7799	32	29	comb	comb	NOUN
ajst-7799	32	30	pitch	pitch	NOUN
ajst-7799	32	31	at	at	ADP
ajst-7799	32	32	time	time	NOUN
ajst-7799	32	33	t	t	PROPN
ajst-7799	32	34	,	,	PUNCT
ajst-7799	32	35	the	the	DET
ajst-7799	32	36	average	average	ADJ
ajst-7799	32	37	output	output	NOUN
ajst-7799	32	38	current	current	NOUN
ajst-7799	32	39	can	can	AUX
ajst-7799	32	40	be	be	AUX
ajst-7799	32	41	expressed	express	VERB
ajst-7799	32	42	by	by	ADP
ajst-7799	32	43	equation	equation	NOUN
ajst-7799	32	44	2	2	NUM
ajst-7799	32	45	as	as	ADP
ajst-7799	32	46	:	:	PUNCT
ajst-7799	32	47	i	i	PROPN
ajst-7799	32	48	𝑉	𝑉	PROPN
ajst-7799	32	49	𝑉	𝑉	PROPN
ajst-7799	32	50	(	(	PUNCT
ajst-7799	32	51	2	2	NUM
ajst-7799	32	52	)	)	PUNCT
ajst-7799	32	53	where	where	SCONJ
ajst-7799	32	54	vdc	vdc	PROPN
ajst-7799	32	55	is	be	AUX
ajst-7799	32	56	the	the	DET
ajst-7799	32	57	dc	dc	PROPN
ajst-7799	32	58	bias	bias	NOUN
ajst-7799	32	59	added	add	VERB
ajst-7799	32	60	between	between	ADP
ajst-7799	32	61	the	the	DET
ajst-7799	32	62	resonant	resonant	ADJ
ajst-7799	32	63	structure	structure	NOUN
ajst-7799	32	64	and	and	CCONJ
ajst-7799	32	65	the	the	DET
ajst-7799	32	66	fixed	fix	VERB
ajst-7799	32	67	comb	comb	NOUN
ajst-7799	32	68	,	,	PUNCT
ajst-7799	32	69	and	and	CCONJ
ajst-7799	32	70	s	s	VERB
ajst-7799	32	71	is	be	AUX
ajst-7799	32	72	the	the	DET
ajst-7799	32	73	square	square	ADJ
ajst-7799	32	74	area	area	NOUN
ajst-7799	32	75	between	between	ADP
ajst-7799	32	76	the	the	DET
ajst-7799	32	77	combs	comb	NOUN
ajst-7799	32	78	.	.	PUNCT
ajst-7799	33	1	according	accord	VERB
ajst-7799	33	2	to	to	ADP
ajst-7799	33	3	eq	eq	NOUN
ajst-7799	33	4	.	.	PROPN
ajst-7799	33	5	2	2	NUM
ajst-7799	33	6	,	,	PUNCT
ajst-7799	33	7	it	it	PRON
ajst-7799	33	8	can	can	AUX
ajst-7799	33	9	be	be	AUX
ajst-7799	33	10	seen	see	VERB
ajst-7799	33	11	that	that	SCONJ
ajst-7799	33	12	the	the	DET
ajst-7799	33	13	fixed	fix	VERB
ajst-7799	33	14	electrodes	electrode	NOUN
ajst-7799	33	15	on	on	ADP
ajst-7799	33	16	both	both	DET
ajst-7799	33	17	sides	side	NOUN
ajst-7799	33	18	can	can	AUX
ajst-7799	33	19	be	be	AUX
ajst-7799	33	20	kept	keep	VERB
ajst-7799	33	21	at	at	ADP
ajst-7799	33	22	the	the	DET
ajst-7799	33	23	same	same	ADJ
ajst-7799	33	24	potential	potential	NOUN
ajst-7799	33	25	during	during	ADP
ajst-7799	33	26	the	the	DET
ajst-7799	33	27	design	design	NOUN
ajst-7799	33	28	of	of	ADP
ajst-7799	33	29	the	the	DET
ajst-7799	33	30	gap	gap	NOUN
ajst-7799	33	31	-	-	PUNCT
ajst-7799	33	32	change	change	NOUN
ajst-7799	33	33	acoustic	acoustic	ADJ
ajst-7799	33	34	emission	emission	NOUN
ajst-7799	33	35	sensing	sense	VERB
ajst-7799	33	36	micro	micro	NOUN
ajst-7799	33	37	-	-	NOUN
ajst-7799	33	38	element	element	ADJ
ajst-7799	33	39	,	,	PUNCT
ajst-7799	33	40	and	and	CCONJ
ajst-7799	33	41	d0	d0	NOUN
ajst-7799	33	42	and	and	CCONJ
ajst-7799	33	43	d1	d1	PROPN
ajst-7799	33	44	need	need	VERB
ajst-7799	33	45	to	to	PART
ajst-7799	33	46	be	be	AUX
ajst-7799	33	47	deliberately	deliberately	ADV
ajst-7799	33	48	designed	design	VERB
ajst-7799	33	49	to	to	PART
ajst-7799	33	50	have	have	VERB
ajst-7799	33	51	a	a	DET
ajst-7799	33	52	certain	certain	ADJ
ajst-7799	33	53	gap	gap	NOUN
ajst-7799	33	54	value	value	NOUN
ajst-7799	33	55	to	to	PART
ajst-7799	33	56	avoid	avoid	VERB
ajst-7799	33	57	serious	serious	ADJ
ajst-7799	33	58	current	current	ADJ
ajst-7799	33	59	cancellation	cancellation	NOUN
ajst-7799	33	60	.	.	PUNCT
ajst-7799	34	1	3	3	X
ajst-7799	34	2	.	.	X
ajst-7799	34	3	structural	structural	ADJ
ajst-7799	34	4	design	design	NOUN
ajst-7799	34	5	and	and	CCONJ
ajst-7799	34	6	finite	finite	ADJ
ajst-7799	34	7	element	element	NOUN
ajst-7799	34	8	analysis	analysis	NOUN
ajst-7799	34	9	3.1	3.1	NUM
ajst-7799	34	10	.	.	PUNCT
ajst-7799	35	1	structural	structural	ADJ
ajst-7799	35	2	design	design	NOUN
ajst-7799	35	3	the	the	DET
ajst-7799	35	4	structural	structural	ADJ
ajst-7799	35	5	and	and	CCONJ
ajst-7799	35	6	material	material	NOUN
ajst-7799	35	7	parameters	parameter	NOUN
ajst-7799	35	8	of	of	ADP
ajst-7799	35	9	the	the	DET
ajst-7799	35	10	sensing	sense	VERB
ajst-7799	35	11	microelements	microelement	NOUN
ajst-7799	35	12	are	be	AUX
ajst-7799	35	13	shown	show	VERB
ajst-7799	35	14	in	in	ADP
ajst-7799	35	15	table	table	NOUN
ajst-7799	35	16	4	4	NUM
ajst-7799	35	17	.	.	PUNCT
ajst-7799	35	18	table	table	NOUN
ajst-7799	35	19	4	4	NUM
ajst-7799	35	20	.	.	PUNCT
ajst-7799	35	21	combination	combination	NOUN
ajst-7799	35	22	parameters	parameter	NOUN
ajst-7799	35	23	and	and	CCONJ
ajst-7799	35	24	material	material	NOUN
ajst-7799	35	25	parameters	parameter	NOUN
ajst-7799	35	26	of	of	ADP
ajst-7799	35	27	area	area	NOUN
ajst-7799	35	28	-	-	PUNCT
ajst-7799	35	29	change	change	NOUN
ajst-7799	35	30	and	and	CCONJ
ajst-7799	35	31	gap	gap	NOUN
ajst-7799	35	32	-	-	PUNCT
ajst-7799	35	33	change	change	NOUN
ajst-7799	35	34	acoustic	acoustic	ADJ
ajst-7799	35	35	emission	emission	NOUN
ajst-7799	35	36	sensing	sense	VERB
ajst-7799	35	37	microelements	microelement	NOUN
ajst-7799	35	38	geometries	geometry	NOUN
ajst-7799	35	39	(	(	PUNCT
ajst-7799	35	40	length×width×height	length×width×height	NOUN
ajst-7799	35	41	)	)	PUNCT
ajst-7799	35	42	dimensions	dimension	NOUN
ajst-7799	35	43	in	in	ADP
ajst-7799	35	44	(	(	PUNCT
ajst-7799	35	45	µm	µm	NOUN
ajst-7799	35	46	)	)	PUNCT
ajst-7799	35	47	gaps(µm	gaps(µm	ADJ
ajst-7799	35	48	)	)	PUNCT
ajst-7799	35	49	type	type	NOUN
ajst-7799	35	50	mass	mass	ADJ
ajst-7799	35	51	finger	finger	NOUN
ajst-7799	35	52	spring①	spring①	NOUN
ajst-7799	35	53	spring②	spring②	PROPN
ajst-7799	35	54	spring③	spring③	PROPN
ajst-7799	35	55	anchor	anchor	NOUN
ajst-7799	35	56	gap①	gap①	VERB
ajst-7799	35	57	gap②	gap②	ADJ
ajst-7799	35	58	gap③	gap③	NOUN
ajst-7799	35	59	area	area	NOUN
ajst-7799	35	60	-	-	PUNCT
ajst-7799	35	61	change	change	NOUN
ajst-7799	35	62	280	280	NUM
ajst-7799	35	63	*	*	NOUN
ajst-7799	35	64	50	50	NUM
ajst-7799	35	65	*	*	NUM
ajst-7799	35	66	90	90	NUM
ajst-7799	35	67	30	30	NUM
ajst-7799	35	68	*	*	SYM
ajst-7799	35	69	4	4	NUM
ajst-7799	35	70	*	*	SYM
ajst-7799	35	71	90	90	NUM
ajst-7799	35	72	5	5	NUM
ajst-7799	35	73	*	*	NUM
ajst-7799	35	74	114	114	NUM
ajst-7799	35	75	*	*	SYM
ajst-7799	35	76	90	90	NUM
ajst-7799	35	77	5	5	NUM
ajst-7799	35	78	*	*	SYM
ajst-7799	35	79	70	70	NUM
ajst-7799	35	80	*	*	SYM
ajst-7799	35	81	90	90	NUM
ajst-7799	35	82	20	20	NUM
ajst-7799	35	83	*	*	SYM
ajst-7799	35	84	5	5	NUM
ajst-7799	35	85	*	*	SYM
ajst-7799	35	86	90	90	NUM
ajst-7799	35	87	30	30	NUM
ajst-7799	35	88	*	*	SYM
ajst-7799	35	89	20	20	NUM
ajst-7799	35	90	*	*	SYM
ajst-7799	35	91	100	100	NUM
ajst-7799	35	92	2	2	NUM
ajst-7799	35	93	2	2	NUM
ajst-7799	35	94	5	5	NUM
ajst-7799	35	95	gap	gap	NOUN
ajst-7799	35	96	-	-	PUNCT
ajst-7799	35	97	change	change	NOUN
ajst-7799	35	98	284	284	NUM
ajst-7799	35	99	*	*	SYM
ajst-7799	35	100	50	50	NUM
ajst-7799	35	101	*	*	NUM
ajst-7799	35	102	90	90	NUM
ajst-7799	35	103	86	86	NUM
ajst-7799	35	104	*	*	SYM
ajst-7799	35	105	4	4	NUM
ajst-7799	35	106	*	*	SYM
ajst-7799	35	107	90	90	NUM
ajst-7799	35	108	270	270	NUM
ajst-7799	35	109	*	*	NUM
ajst-7799	35	110	6.6	6.6	NUM
ajst-7799	35	111	*	*	SYM
ajst-7799	35	112	90	90	NUM
ajst-7799	35	113	270	270	NUM
ajst-7799	35	114	*	*	NUM
ajst-7799	35	115	6.6	6.6	NUM
ajst-7799	35	116	*	*	SYM
ajst-7799	35	117	90	90	NUM
ajst-7799	35	118	4	4	NUM
ajst-7799	35	119	*	*	NUM
ajst-7799	35	120	6.8	6.8	NUM
ajst-7799	35	121	*	*	SYM
ajst-7799	35	122	90	90	NUM
ajst-7799	35	123	20	20	NUM
ajst-7799	35	124	*	*	SYM
ajst-7799	35	125	50	50	NUM
ajst-7799	35	126	*	*	SYM
ajst-7799	35	127	100	100	NUM
ajst-7799	35	128	2	2	NUM
ajst-7799	35	129	4	4	NUM
ajst-7799	35	130	4	4	NUM
ajst-7799	35	131	young	young	ADJ
ajst-7799	35	132	's	's	PART
ajst-7799	35	133	modulus	modulus	ADJ
ajst-7799	35	134	relative	relative	ADJ
ajst-7799	35	135	dielectric	dielectric	ADJ
ajst-7799	35	136	constant	constant	ADJ
ajst-7799	35	137	density	density	NOUN
ajst-7799	35	138	poisson	poisson	NOUN
ajst-7799	35	139	's	's	PART
ajst-7799	35	140	ratio	ratio	NOUN
ajst-7799	35	141	158gpa	158gpa	NUM
ajst-7799	35	142	45	45	NUM
ajst-7799	35	143	2320kg	2320kg	PROPN
ajst-7799	35	144	/	/	SYM
ajst-7799	35	145	m3	m3	PROPN
ajst-7799	35	146	0.22	0.22	NUM
ajst-7799	35	147	3.2	3.2	NUM
ajst-7799	35	148	.	.	PUNCT
ajst-7799	36	1	finite	finite	PROPN
ajst-7799	36	2	element	element	NOUN
ajst-7799	36	3	analysis	analysis	NOUN
ajst-7799	36	4	3.2.1	3.2.1	NUM
ajst-7799	36	5	.	.	PUNCT
ajst-7799	36	6	characteristic	characteristic	ADJ
ajst-7799	36	7	frequency	frequency	NOUN
ajst-7799	36	8	analysis	analysis	NOUN
ajst-7799	36	9	the	the	DET
ajst-7799	36	10	first	first	ADJ
ajst-7799	36	11	three	three	NUM
ajst-7799	36	12	orders	order	NOUN
ajst-7799	36	13	of	of	ADP
ajst-7799	36	14	eigenmodes	eigenmode	NOUN
ajst-7799	36	15	and	and	CCONJ
ajst-7799	36	16	frequencies	frequency	NOUN
ajst-7799	36	17	of	of	ADP
ajst-7799	36	18	the	the	DET
ajst-7799	36	19	area	area	NOUN
ajst-7799	36	20	-	-	PUNCT
ajst-7799	36	21	change	change	NOUN
ajst-7799	36	22	and	and	CCONJ
ajst-7799	36	23	gap	gap	NOUN
ajst-7799	36	24	-	-	PUNCT
ajst-7799	36	25	change	change	NOUN
ajst-7799	36	26	acoustic	acoustic	ADJ
ajst-7799	36	27	emission	emission	NOUN
ajst-7799	36	28	sensing	sense	VERB
ajst-7799	36	29	microelements	microelement	NOUN
ajst-7799	36	30	are	be	AUX
ajst-7799	36	31	shown	show	VERB
ajst-7799	36	32	in	in	ADP
ajst-7799	36	33	fig	fig	NOUN
ajst-7799	36	34	.	.	PUNCT
ajst-7799	37	1	5	5	X
ajst-7799	37	2	.	.	X
ajst-7799	37	3	figure	figure	NOUN
ajst-7799	37	4	5	5	NUM
ajst-7799	37	5	.	.	PUNCT
ajst-7799	38	1	the	the	DET
ajst-7799	38	2	first	first	ADJ
ajst-7799	38	3	three	three	NUM
ajst-7799	38	4	orders	order	NOUN
ajst-7799	38	5	of	of	ADP
ajst-7799	38	6	eigenfrequencies	eigenfrequencie	NOUN
ajst-7799	38	7	and	and	CCONJ
ajst-7799	38	8	modes	mode	NOUN
ajst-7799	38	9	of	of	ADP
ajst-7799	38	10	each	each	DET
ajst-7799	38	11	sensing	sense	VERB
ajst-7799	38	12	micro	micro	NOUN
ajst-7799	38	13	-	-	NOUN
ajst-7799	38	14	element	element	NOUN
ajst-7799	38	15	.	.	PUNCT
ajst-7799	39	1	a	a	DET
ajst-7799	39	2	)	)	PUNCT
ajst-7799	39	3	area	area	NOUN
ajst-7799	39	4	-	-	PUNCT
ajst-7799	39	5	change	change	NOUN
ajst-7799	39	6	;	;	PUNCT
ajst-7799	39	7	b	b	X
ajst-7799	39	8	)	)	PUNCT
ajst-7799	39	9	gapchange	gapchange	NOUN
ajst-7799	39	10	107	107	NUM
ajst-7799	39	11	according	accord	VERB
ajst-7799	39	12	to	to	ADP
ajst-7799	39	13	the	the	DET
ajst-7799	39	14	eigenfrequency	eigenfrequency	NOUN
ajst-7799	39	15	analysis	analysis	NOUN
ajst-7799	40	1	,	,	PUNCT
ajst-7799	40	2	it	it	PRON
ajst-7799	40	3	can	can	AUX
ajst-7799	40	4	be	be	AUX
ajst-7799	40	5	seen	see	VERB
ajst-7799	40	6	that	that	SCONJ
ajst-7799	40	7	the	the	DET
ajst-7799	40	8	frequencies	frequency	NOUN
ajst-7799	40	9	corresponding	correspond	VERB
ajst-7799	40	10	to	to	ADP
ajst-7799	40	11	the	the	DET
ajst-7799	40	12	higher	high	ADJ
ajst-7799	40	13	-	-	PUNCT
ajst-7799	40	14	order	order	NOUN
ajst-7799	40	15	modes	mode	NOUN
ajst-7799	40	16	of	of	ADP
ajst-7799	40	17	the	the	DET
ajst-7799	40	18	microelements	microelement	NOUN
ajst-7799	40	19	designed	design	VERB
ajst-7799	40	20	in	in	ADP
ajst-7799	40	21	this	this	DET
ajst-7799	40	22	paper	paper	NOUN
ajst-7799	40	23	are	be	AUX
ajst-7799	40	24	much	much	ADV
ajst-7799	40	25	larger	large	ADJ
ajst-7799	40	26	than	than	ADP
ajst-7799	40	27	the	the	DET
ajst-7799	40	28	fundamental	fundamental	ADJ
ajst-7799	40	29	frequencies	frequency	NOUN
ajst-7799	40	30	,	,	PUNCT
ajst-7799	40	31	implying	imply	VERB
ajst-7799	40	32	that	that	SCONJ
ajst-7799	40	33	the	the	DET
ajst-7799	40	34	sensing	sense	VERB
ajst-7799	40	35	microelements	microelement	NOUN
ajst-7799	40	36	can	can	AUX
ajst-7799	40	37	effectively	effectively	ADV
ajst-7799	40	38	distinguish	distinguish	VERB
ajst-7799	40	39	the	the	DET
ajst-7799	40	40	modes	mode	NOUN
ajst-7799	40	41	.	.	PUNCT
ajst-7799	41	1	3.2.2	3.2.2	NUM
ajst-7799	41	2	.	.	PUNCT
ajst-7799	41	3	frequency	frequency	NOUN
ajst-7799	41	4	domain	domain	NOUN
ajst-7799	41	5	displacement	displacement	ADJ
ajst-7799	41	6	response	response	NOUN
ajst-7799	41	7	in	in	ADP
ajst-7799	41	8	the	the	DET
ajst-7799	41	9	simulation	simulation	NOUN
ajst-7799	41	10	model	model	NOUN
ajst-7799	41	11	shown	show	VERB
ajst-7799	41	12	in	in	ADP
ajst-7799	41	13	figure	figure	NOUN
ajst-7799	41	14	6	6	NUM
ajst-7799	41	15	,	,	PUNCT
ajst-7799	41	16	the	the	DET
ajst-7799	41	17	resonant	resonant	ADJ
ajst-7799	41	18	structure	structure	NOUN
ajst-7799	41	19	of	of	ADP
ajst-7799	41	20	the	the	DET
ajst-7799	41	21	sensing	sense	VERB
ajst-7799	41	22	micro	micro	NOUN
ajst-7799	41	23	-	-	NOUN
ajst-7799	41	24	element	element	NOUN
ajst-7799	41	25	is	be	AUX
ajst-7799	41	26	placed	place	VERB
ajst-7799	41	27	on	on	ADP
ajst-7799	41	28	a	a	DET
ajst-7799	41	29	solid	solid	ADJ
ajst-7799	41	30	plate	plate	NOUN
ajst-7799	41	31	with	with	ADP
ajst-7799	41	32	similar	similar	ADJ
ajst-7799	41	33	dimensions	dimension	NOUN
ajst-7799	41	34	to	to	ADP
ajst-7799	41	35	the	the	DET
ajst-7799	41	36	inter	inter	ADJ
ajst-7799	41	37	-	-	ADJ
ajst-7799	41	38	micro	micro	NOUN
ajst-7799	41	39	-	-	NOUN
ajst-7799	41	40	element	element	NOUN
ajst-7799	41	41	,	,	PUNCT
ajst-7799	41	42	and	and	CCONJ
ajst-7799	41	43	a	a	DET
ajst-7799	41	44	displacement	displacement	NOUN
ajst-7799	41	45	in	in	ADP
ajst-7799	41	46	the	the	DET
ajst-7799	41	47	specified	specified	ADJ
ajst-7799	41	48	direction	direction	NOUN
ajst-7799	41	49	is	be	AUX
ajst-7799	41	50	applied	apply	VERB
ajst-7799	41	51	to	to	ADP
ajst-7799	41	52	the	the	DET
ajst-7799	41	53	plate	plate	NOUN
ajst-7799	41	54	to	to	PART
ajst-7799	41	55	simulate	simulate	VERB
ajst-7799	41	56	the	the	DET
ajst-7799	41	57	displacement	displacement	NOUN
ajst-7799	41	58	of	of	ADP
ajst-7799	41	59	the	the	DET
ajst-7799	41	60	acoustic	acoustic	ADJ
ajst-7799	41	61	emission	emission	NOUN
ajst-7799	41	62	signal	signal	NOUN
ajst-7799	41	63	propagating	propagate	VERB
ajst-7799	41	64	to	to	ADP
ajst-7799	41	65	the	the	DET
ajst-7799	41	66	substrate	substrate	NOUN
ajst-7799	41	67	near	near	ADP
ajst-7799	41	68	the	the	DET
ajst-7799	41	69	micro	micro	NOUN
ajst-7799	41	70	-	-	NOUN
ajst-7799	41	71	element	element	NOUN
ajst-7799	41	72	.	.	PUNCT
ajst-7799	42	1	figure	figure	NOUN
ajst-7799	42	2	6	6	NUM
ajst-7799	42	3	.	.	PUNCT
ajst-7799	43	1	simulation	simulation	NOUN
ajst-7799	43	2	model	model	NOUN
ajst-7799	43	3	structure	structure	NOUN
ajst-7799	43	4	.	.	PUNCT
ajst-7799	44	1	a	a	DET
ajst-7799	44	2	)	)	PUNCT
ajst-7799	44	3	area	area	NOUN
ajst-7799	44	4	-	-	PUNCT
ajst-7799	44	5	change	change	NOUN
ajst-7799	44	6	;	;	PUNCT
ajst-7799	44	7	b	b	X
ajst-7799	44	8	)	)	PUNCT
ajst-7799	44	9	gap	gap	NOUN
ajst-7799	44	10	-	-	PUNCT
ajst-7799	44	11	change	change	NOUN
ajst-7799	44	12	type	type	NOUN
ajst-7799	44	13	simulated	simulate	VERB
ajst-7799	44	14	acoustic	acoustic	ADJ
ajst-7799	44	15	emission	emission	NOUN
ajst-7799	44	16	signals	signal	NOUN
ajst-7799	44	17	in	in	ADP
ajst-7799	44	18	the	the	DET
ajst-7799	44	19	direction	direction	NOUN
ajst-7799	44	20	of	of	ADP
ajst-7799	44	21	area	area	NOUN
ajst-7799	44	22	change	change	NOUN
ajst-7799	44	23	/	/	SYM
ajst-7799	44	24	spacing	space	VERB
ajst-7799	44	25	change	change	NOUN
ajst-7799	44	26	are	be	AUX
ajst-7799	44	27	applied	apply	VERB
ajst-7799	44	28	to	to	ADP
ajst-7799	44	29	the	the	DET
ajst-7799	44	30	two	two	NUM
ajst-7799	44	31	plates	plate	NOUN
ajst-7799	44	32	separately	separately	ADV
ajst-7799	44	33	with	with	ADP
ajst-7799	44	34	an	an	DET
ajst-7799	44	35	amplitude	amplitude	NOUN
ajst-7799	44	36	of	of	ADP
ajst-7799	44	37	0.01	0.01	NUM
ajst-7799	44	38	μm	μm	NOUN
ajst-7799	44	39	and	and	CCONJ
ajst-7799	44	40	a	a	DET
ajst-7799	44	41	frequency	frequency	NOUN
ajst-7799	44	42	range	range	NOUN
ajst-7799	44	43	of	of	ADP
ajst-7799	44	44	50	50	NUM
ajst-7799	44	45	-	-	SYM
ajst-7799	44	46	500	500	NUM
ajst-7799	44	47	khz	khz	NOUN
ajst-7799	44	48	,	,	PUNCT
ajst-7799	44	49	and	and	CCONJ
ajst-7799	44	50	the	the	DET
ajst-7799	44	51	corresponding	corresponding	ADJ
ajst-7799	44	52	displacement	displacement	ADJ
ajst-7799	44	53	response	response	NOUN
ajst-7799	44	54	is	be	AUX
ajst-7799	44	55	shown	show	VERB
ajst-7799	44	56	in	in	ADP
ajst-7799	44	57	figure	figure	NOUN
ajst-7799	44	58	7	7	NUM
ajst-7799	44	59	.	.	PUNCT
ajst-7799	44	60	figure	figure	VERB
ajst-7799	44	61	7	7	NUM
ajst-7799	44	62	.	.	PUNCT
ajst-7799	44	63	displacement	displacement	ADJ
ajst-7799	44	64	response	response	NOUN
ajst-7799	44	65	.	.	PUNCT
ajst-7799	45	1	a	a	DET
ajst-7799	45	2	)	)	PUNCT
ajst-7799	45	3	area	area	NOUN
ajst-7799	45	4	-	-	PUNCT
ajst-7799	45	5	change	change	NOUN
ajst-7799	45	6	;	;	PUNCT
ajst-7799	45	7	b	b	X
ajst-7799	45	8	)	)	PUNCT
ajst-7799	45	9	gap	gap	NOUN
ajst-7799	45	10	-	-	PUNCT
ajst-7799	45	11	change	change	NOUN
ajst-7799	45	12	type	type	NOUN
ajst-7799	45	13	from	from	ADP
ajst-7799	45	14	the	the	DET
ajst-7799	45	15	displacement	displacement	ADJ
ajst-7799	45	16	response	response	NOUN
ajst-7799	45	17	,	,	PUNCT
ajst-7799	45	18	it	it	PRON
ajst-7799	45	19	can	can	AUX
ajst-7799	45	20	be	be	AUX
ajst-7799	45	21	seen	see	VERB
ajst-7799	45	22	that	that	SCONJ
ajst-7799	45	23	the	the	DET
ajst-7799	45	24	sensing	sense	VERB
ajst-7799	45	25	micro	micro	NOUN
ajst-7799	45	26	-	-	NOUN
ajst-7799	45	27	element	element	NOUN
ajst-7799	45	28	designed	design	VERB
ajst-7799	45	29	in	in	ADP
ajst-7799	45	30	this	this	DET
ajst-7799	45	31	paper	paper	NOUN
ajst-7799	45	32	has	have	VERB
ajst-7799	45	33	a	a	DET
ajst-7799	45	34	single	single	ADJ
ajst-7799	45	35	fundamental	fundamental	ADJ
ajst-7799	45	36	frequency	frequency	NOUN
ajst-7799	45	37	mode	mode	NOUN
ajst-7799	45	38	vibration	vibration	NOUN
ajst-7799	45	39	behavior	behavior	NOUN
ajst-7799	45	40	and	and	CCONJ
ajst-7799	45	41	can	can	AUX
ajst-7799	45	42	respond	respond	VERB
ajst-7799	45	43	to	to	ADP
ajst-7799	45	44	the	the	DET
ajst-7799	45	45	acoustic	acoustic	ADJ
ajst-7799	45	46	emission	emission	NOUN
ajst-7799	45	47	signal	signal	NOUN
ajst-7799	45	48	more	more	ADV
ajst-7799	45	49	accurately	accurately	ADV
ajst-7799	45	50	.	.	PUNCT
ajst-7799	46	1	4	4	X
ajst-7799	46	2	.	.	X
ajst-7799	46	3	anchor	anchor	PROPN
ajst-7799	46	4	optimization	optimization	NOUN
ajst-7799	46	5	analysis	analysis	NOUN
ajst-7799	46	6	since	since	SCONJ
ajst-7799	46	7	the	the	DET
ajst-7799	46	8	sensing	sense	VERB
ajst-7799	46	9	structure	structure	NOUN
ajst-7799	46	10	is	be	AUX
ajst-7799	46	11	designed	design	VERB
ajst-7799	46	12	as	as	ADP
ajst-7799	46	13	a	a	DET
ajst-7799	46	14	structure	structure	NOUN
ajst-7799	46	15	with	with	ADP
ajst-7799	46	16	a	a	DET
ajst-7799	46	17	certain	certain	ADJ
ajst-7799	46	18	height	height	NOUN
ajst-7799	46	19	,	,	PUNCT
ajst-7799	46	20	it	it	PRON
ajst-7799	46	21	is	be	AUX
ajst-7799	46	22	not	not	PART
ajst-7799	46	23	suitable	suitable	ADJ
ajst-7799	46	24	to	to	PART
ajst-7799	46	25	optimize	optimize	VERB
ajst-7799	46	26	the	the	DET
ajst-7799	46	27	height	height	NOUN
ajst-7799	46	28	of	of	ADP
ajst-7799	46	29	the	the	DET
ajst-7799	46	30	anchor	anchor	NOUN
ajst-7799	46	31	,	,	PUNCT
ajst-7799	46	32	so	so	ADV
ajst-7799	46	33	only	only	ADV
ajst-7799	46	34	the	the	DET
ajst-7799	46	35	cross	cross	ADJ
ajst-7799	46	36	-	-	ADJ
ajst-7799	46	37	sectional	sectional	ADJ
ajst-7799	46	38	parameters	parameter	NOUN
ajst-7799	46	39	of	of	ADP
ajst-7799	46	40	the	the	DET
ajst-7799	46	41	anchor	anchor	NOUN
ajst-7799	46	42	will	will	AUX
ajst-7799	46	43	be	be	AUX
ajst-7799	46	44	optimized	optimize	VERB
ajst-7799	46	45	.	.	PUNCT
ajst-7799	47	1	4.1	4.1	NUM
ajst-7799	47	2	.	.	PUNCT
ajst-7799	47	3	gap	gap	NOUN
ajst-7799	47	4	-	-	PUNCT
ajst-7799	47	5	change	change	NOUN
ajst-7799	47	6	anchor	anchor	NOUN
ajst-7799	47	7	analysis	analysis	NOUN
ajst-7799	47	8	for	for	ADP
ajst-7799	47	9	gap	gap	NOUN
ajst-7799	47	10	change	change	NOUN
ajst-7799	47	11	sensing	sense	VERB
ajst-7799	47	12	micro	micro	ADJ
ajst-7799	47	13	elements	element	NOUN
ajst-7799	47	14	,	,	PUNCT
ajst-7799	47	15	once	once	SCONJ
ajst-7799	47	16	the	the	DET
ajst-7799	47	17	parameters	parameter	NOUN
ajst-7799	47	18	of	of	ADP
ajst-7799	47	19	their	their	PRON
ajst-7799	47	20	resonant	resonant	ADJ
ajst-7799	47	21	structure	structure	NOUN
ajst-7799	47	22	are	be	AUX
ajst-7799	47	23	determined	determine	VERB
ajst-7799	47	24	,	,	PUNCT
ajst-7799	47	25	the	the	DET
ajst-7799	47	26	width	width	NOUN
ajst-7799	47	27	of	of	ADP
ajst-7799	47	28	the	the	DET
ajst-7799	47	29	anchor	anchor	NOUN
ajst-7799	47	30	tightly	tightly	ADV
ajst-7799	47	31	connected	connect	VERB
ajst-7799	47	32	to	to	ADP
ajst-7799	47	33	the	the	DET
ajst-7799	47	34	micro	micro	ADJ
ajst-7799	47	35	spring	spring	NOUN
ajst-7799	47	36	can	can	AUX
ajst-7799	47	37	not	not	PART
ajst-7799	47	38	be	be	AUX
ajst-7799	47	39	changed	change	VERB
ajst-7799	47	40	.	.	PUNCT
ajst-7799	48	1	therefore	therefore	ADV
ajst-7799	48	2	,	,	PUNCT
ajst-7799	48	3	for	for	ADP
ajst-7799	48	4	gap	gap	NOUN
ajst-7799	48	5	change	change	NOUN
ajst-7799	48	6	sensing	sense	VERB
ajst-7799	48	7	micro	micro	ADJ
ajst-7799	48	8	elements	element	NOUN
ajst-7799	48	9	,	,	PUNCT
ajst-7799	48	10	only	only	ADV
ajst-7799	48	11	the	the	DET
ajst-7799	48	12	influence	influence	NOUN
ajst-7799	48	13	of	of	ADP
ajst-7799	48	14	anchor	anchor	NOUN
ajst-7799	48	15	length	length	NOUN
ajst-7799	48	16	on	on	ADP
ajst-7799	48	17	gap	gap	NOUN
ajst-7799	48	18	change	change	NOUN
ajst-7799	48	19	is	be	AUX
ajst-7799	48	20	discussed	discuss	VERB
ajst-7799	48	21	.	.	PUNCT
ajst-7799	49	1	analyze	analyze	VERB
ajst-7799	49	2	its	its	PRON
ajst-7799	49	3	peak	peak	ADJ
ajst-7799	49	4	displacement	displacement	ADJ
ajst-7799	49	5	response	response	NOUN
ajst-7799	49	6	.	.	PUNCT
ajst-7799	50	1	as	as	SCONJ
ajst-7799	50	2	shown	show	VERB
ajst-7799	50	3	in	in	ADP
ajst-7799	50	4	figure	figure	NOUN
ajst-7799	50	5	8	8	NUM
ajst-7799	50	6	.	.	SYM
ajst-7799	50	7	108	108	NUM
ajst-7799	50	8	figure	figure	NOUN
ajst-7799	50	9	8	8	NUM
ajst-7799	50	10	.	.	PUNCT
ajst-7799	51	1	the	the	DET
ajst-7799	51	2	influence	influence	NOUN
ajst-7799	51	3	of	of	ADP
ajst-7799	51	4	gap	gap	NOUN
ajst-7799	51	5	-	-	PUNCT
ajst-7799	51	6	change	change	NOUN
ajst-7799	51	7	anchor	anchor	NOUN
ajst-7799	51	8	length	length	NOUN
ajst-7799	51	9	on	on	ADP
ajst-7799	51	10	the	the	DET
ajst-7799	51	11	peak	peak	ADJ
ajst-7799	51	12	displacement	displacement	ADJ
ajst-7799	51	13	response	response	NOUN
ajst-7799	51	14	from	from	ADP
ajst-7799	51	15	figure	figure	NOUN
ajst-7799	51	16	8	8	NUM
ajst-7799	51	17	,	,	PUNCT
ajst-7799	51	18	it	it	PRON
ajst-7799	51	19	can	can	AUX
ajst-7799	51	20	be	be	AUX
ajst-7799	51	21	seen	see	VERB
ajst-7799	51	22	that	that	SCONJ
ajst-7799	51	23	increasing	increase	VERB
ajst-7799	51	24	the	the	DET
ajst-7799	51	25	anchor	anchor	NOUN
ajst-7799	51	26	length	length	NOUN
ajst-7799	51	27	can	can	AUX
ajst-7799	51	28	enhance	enhance	VERB
ajst-7799	51	29	the	the	DET
ajst-7799	51	30	displacement	displacement	ADJ
ajst-7799	51	31	response	response	NOUN
ajst-7799	51	32	of	of	ADP
ajst-7799	51	33	the	the	DET
ajst-7799	51	34	resonant	resonant	ADJ
ajst-7799	51	35	structure	structure	NOUN
ajst-7799	51	36	to	to	ADP
ajst-7799	51	37	a	a	DET
ajst-7799	51	38	certain	certain	ADJ
ajst-7799	51	39	extent	extent	NOUN
ajst-7799	51	40	,	,	PUNCT
ajst-7799	51	41	but	but	CCONJ
ajst-7799	51	42	the	the	DET
ajst-7799	51	43	optimization	optimization	NOUN
ajst-7799	51	44	effect	effect	NOUN
ajst-7799	51	45	tends	tend	VERB
ajst-7799	51	46	to	to	PART
ajst-7799	51	47	be	be	AUX
ajst-7799	51	48	smooth	smooth	ADJ
ajst-7799	51	49	when	when	SCONJ
ajst-7799	51	50	the	the	DET
ajst-7799	51	51	length	length	NOUN
ajst-7799	51	52	reaches	reach	VERB
ajst-7799	51	53	a	a	DET
ajst-7799	51	54	certain	certain	ADJ
ajst-7799	51	55	value	value	NOUN
ajst-7799	51	56	.	.	PUNCT
ajst-7799	52	1	4.2	4.2	NUM
ajst-7799	52	2	.	.	PUNCT
ajst-7799	52	3	gap	gap	NOUN
ajst-7799	52	4	-	-	PUNCT
ajst-7799	52	5	change	change	NOUN
ajst-7799	52	6	anchor	anchor	NOUN
ajst-7799	52	7	analysis	analysis	NOUN
ajst-7799	52	8	for	for	ADP
ajst-7799	52	9	the	the	DET
ajst-7799	52	10	area	area	NOUN
ajst-7799	52	11	-	-	PUNCT
ajst-7799	52	12	change	change	NOUN
ajst-7799	52	13	structure	structure	NOUN
ajst-7799	52	14	,	,	PUNCT
ajst-7799	52	15	anchor	anchor	NOUN
ajst-7799	52	16	section	section	NOUN
ajst-7799	52	17	has	have	VERB
ajst-7799	52	18	greater	great	ADJ
ajst-7799	52	19	optimization	optimization	NOUN
ajst-7799	52	20	space	space	NOUN
ajst-7799	52	21	,	,	PUNCT
ajst-7799	52	22	so	so	CCONJ
ajst-7799	52	23	the	the	DET
ajst-7799	52	24	peak	peak	ADJ
ajst-7799	52	25	displacement	displacement	ADJ
ajst-7799	52	26	response	response	NOUN
ajst-7799	52	27	for	for	ADP
ajst-7799	52	28	different	different	ADJ
ajst-7799	52	29	aspect	aspect	NOUN
ajst-7799	52	30	ratio	ratio	NOUN
ajst-7799	52	31	sections	section	NOUN
ajst-7799	52	32	is	be	AUX
ajst-7799	52	33	shown	show	VERB
ajst-7799	52	34	in	in	ADP
ajst-7799	52	35	figure	figure	NOUN
ajst-7799	52	36	9	9	NUM
ajst-7799	52	37	.	.	PUNCT
ajst-7799	52	38	figure	figure	NOUN
ajst-7799	52	39	9	9	NUM
ajst-7799	52	40	.	.	PUNCT
ajst-7799	53	1	the	the	DET
ajst-7799	53	2	influence	influence	NOUN
ajst-7799	53	3	of	of	ADP
ajst-7799	53	4	gap	gap	NOUN
ajst-7799	53	5	-	-	PUNCT
ajst-7799	53	6	change	change	NOUN
ajst-7799	53	7	anchor	anchor	NOUN
ajst-7799	53	8	length	length	NOUN
ajst-7799	53	9	and	and	CCONJ
ajst-7799	53	10	width	width	VERB
ajst-7799	53	11	on	on	ADP
ajst-7799	53	12	the	the	DET
ajst-7799	53	13	peak	peak	ADJ
ajst-7799	53	14	displacement	displacement	ADJ
ajst-7799	53	15	response	response	NOUN
ajst-7799	53	16	it	it	PRON
ajst-7799	53	17	can	can	AUX
ajst-7799	53	18	be	be	AUX
ajst-7799	53	19	seen	see	VERB
ajst-7799	53	20	from	from	ADP
ajst-7799	53	21	figure	figure	NOUN
ajst-7799	53	22	9	9	NUM
ajst-7799	53	23	that	that	SCONJ
ajst-7799	53	24	,	,	PUNCT
ajst-7799	53	25	firstly	firstly	ADV
ajst-7799	53	26	,	,	PUNCT
ajst-7799	53	27	unilaterally	unilaterally	ADV
ajst-7799	53	28	increasing	increase	VERB
ajst-7799	53	29	the	the	DET
ajst-7799	53	30	length	length	NOUN
ajst-7799	53	31	or	or	CCONJ
ajst-7799	53	32	width	width	NOUN
ajst-7799	53	33	is	be	AUX
ajst-7799	53	34	beneficial	beneficial	ADJ
ajst-7799	53	35	to	to	ADP
ajst-7799	53	36	the	the	DET
ajst-7799	53	37	enhancement	enhancement	NOUN
ajst-7799	53	38	of	of	ADP
ajst-7799	53	39	the	the	DET
ajst-7799	53	40	resonant	resonant	ADJ
ajst-7799	53	41	displacement	displacement	ADJ
ajst-7799	53	42	response	response	NOUN
ajst-7799	53	43	,	,	PUNCT
ajst-7799	53	44	and	and	CCONJ
ajst-7799	53	45	secondly	secondly	ADV
ajst-7799	53	46	,	,	PUNCT
ajst-7799	53	47	according	accord	VERB
ajst-7799	53	48	to	to	ADP
ajst-7799	53	49	the	the	DET
ajst-7799	53	50	trend	trend	NOUN
ajst-7799	53	51	of	of	ADP
ajst-7799	53	52	the	the	DET
ajst-7799	53	53	three	three	NUM
ajst-7799	53	54	-	-	PUNCT
ajst-7799	53	55	dimensional	dimensional	ADJ
ajst-7799	53	56	graph	graph	NOUN
ajst-7799	53	57	,	,	PUNCT
ajst-7799	53	58	it	it	PRON
ajst-7799	53	59	can	can	AUX
ajst-7799	53	60	be	be	AUX
ajst-7799	53	61	seen	see	VERB
ajst-7799	53	62	that	that	SCONJ
ajst-7799	53	63	increasing	increase	VERB
ajst-7799	53	64	the	the	DET
ajst-7799	53	65	anchor	anchor	NOUN
ajst-7799	53	66	width	width	NOUN
ajst-7799	53	67	is	be	AUX
ajst-7799	53	68	more	more	ADV
ajst-7799	53	69	beneficial	beneficial	ADJ
ajst-7799	53	70	to	to	ADP
ajst-7799	53	71	the	the	DET
ajst-7799	53	72	enhancement	enhancement	NOUN
ajst-7799	53	73	of	of	ADP
ajst-7799	53	74	the	the	DET
ajst-7799	53	75	resonant	resonant	ADJ
ajst-7799	53	76	displacement	displacement	ADJ
ajst-7799	53	77	response	response	NOUN
ajst-7799	53	78	.	.	PUNCT
ajst-7799	54	1	in	in	ADP
ajst-7799	54	2	summary	summary	NOUN
ajst-7799	54	3	,	,	PUNCT
ajst-7799	54	4	making	make	VERB
ajst-7799	54	5	the	the	DET
ajst-7799	54	6	anchor	anchor	NOUN
ajst-7799	54	7	somewhat	somewhat	ADV
ajst-7799	54	8	longer	long	ADV
ajst-7799	54	9	in	in	ADP
ajst-7799	54	10	the	the	DET
ajst-7799	54	11	plane	plane	NOUN
ajst-7799	54	12	orthogonal	orthogonal	NOUN
ajst-7799	54	13	to	to	ADP
ajst-7799	54	14	the	the	DET
ajst-7799	54	15	sensitive	sensitive	ADJ
ajst-7799	54	16	direction	direction	NOUN
ajst-7799	54	17	of	of	ADP
ajst-7799	54	18	the	the	DET
ajst-7799	54	19	sensing	sense	VERB
ajst-7799	54	20	micro	micro	NOUN
ajst-7799	54	21	-	-	NOUN
ajst-7799	54	22	element	element	NOUN
ajst-7799	54	23	is	be	AUX
ajst-7799	54	24	conducive	conducive	ADJ
ajst-7799	54	25	to	to	ADP
ajst-7799	54	26	improving	improve	VERB
ajst-7799	54	27	the	the	DET
ajst-7799	54	28	response	response	NOUN
ajst-7799	54	29	of	of	ADP
ajst-7799	54	30	the	the	DET
ajst-7799	54	31	sensing	sense	VERB
ajst-7799	54	32	micro	micro	NOUN
ajst-7799	54	33	-	-	NOUN
ajst-7799	54	34	element	element	NOUN
ajst-7799	54	35	.	.	PUNCT
ajst-7799	55	1	5	5	X
ajst-7799	55	2	.	.	X
ajst-7799	55	3	conslusion	conslusion	NOUN
ajst-7799	55	4	in	in	ADP
ajst-7799	55	5	this	this	DET
ajst-7799	55	6	study	study	NOUN
ajst-7799	55	7	,	,	PUNCT
ajst-7799	55	8	area	area	NOUN
ajst-7799	55	9	-	-	PUNCT
ajst-7799	55	10	change	change	NOUN
ajst-7799	55	11	and	and	CCONJ
ajst-7799	55	12	gap	gap	NOUN
ajst-7799	55	13	-	-	PUNCT
ajst-7799	55	14	change	change	NOUN
ajst-7799	55	15	acoustic	acoustic	ADJ
ajst-7799	55	16	emission	emission	NOUN
ajst-7799	55	17	sensing	sense	VERB
ajst-7799	55	18	microelements	microelement	NOUN
ajst-7799	55	19	are	be	AUX
ajst-7799	55	20	designed	design	VERB
ajst-7799	55	21	and	and	CCONJ
ajst-7799	55	22	the	the	DET
ajst-7799	55	23	better	well	ADJ
ajst-7799	55	24	performance	performance	NOUN
ajst-7799	55	25	of	of	ADP
ajst-7799	55	26	the	the	DET
ajst-7799	55	27	design	design	NOUN
ajst-7799	55	28	is	be	AUX
ajst-7799	55	29	determined	determine	VERB
ajst-7799	55	30	by	by	ADP
ajst-7799	55	31	finite	finite	PROPN
ajst-7799	55	32	element	element	PROPN
ajst-7799	55	33	simulation	simulation	NOUN
ajst-7799	55	34	.	.	PUNCT
ajst-7799	56	1	the	the	DET
ajst-7799	56	2	analysis	analysis	NOUN
ajst-7799	56	3	focuses	focus	VERB
ajst-7799	56	4	on	on	ADP
ajst-7799	56	5	the	the	DET
ajst-7799	56	6	displacement	displacement	ADJ
ajst-7799	56	7	response	response	NOUN
ajst-7799	56	8	of	of	ADP
ajst-7799	56	9	the	the	DET
ajst-7799	56	10	resonant	resonant	ADJ
ajst-7799	56	11	structure	structure	NOUN
ajst-7799	56	12	with	with	ADP
ajst-7799	56	13	respect	respect	NOUN
ajst-7799	56	14	to	to	ADP
ajst-7799	56	15	the	the	DET
ajst-7799	56	16	anchor	anchor	NOUN
ajst-7799	56	17	cross	cross	ADJ
ajst-7799	56	18	-	-	ADJ
ajst-7799	56	19	section	section	ADJ
ajst-7799	56	20	parameters	parameter	NOUN
ajst-7799	56	21	in	in	ADP
ajst-7799	56	22	the	the	DET
ajst-7799	56	23	above	above	ADJ
ajst-7799	56	24	model	model	NOUN
ajst-7799	56	25	.	.	PUNCT
ajst-7799	57	1	the	the	DET
ajst-7799	57	2	results	result	NOUN
ajst-7799	57	3	show	show	VERB
ajst-7799	57	4	that	that	SCONJ
ajst-7799	57	5	for	for	ADP
ajst-7799	57	6	the	the	DET
ajst-7799	57	7	gap	gap	NOUN
ajst-7799	57	8	-	-	PUNCT
ajst-7799	57	9	change	change	NOUN
ajst-7799	57	10	acoustic	acoustic	ADJ
ajst-7799	57	11	emission	emission	NOUN
ajst-7799	57	12	sensing	sense	VERB
ajst-7799	57	13	micro	micro	NOUN
ajst-7799	57	14	-	-	NOUN
ajst-7799	57	15	element	element	NOUN
ajst-7799	57	16	,	,	PUNCT
ajst-7799	57	17	the	the	DET
ajst-7799	57	18	response	response	NOUN
ajst-7799	57	19	displacement	displacement	NOUN
ajst-7799	57	20	of	of	ADP
ajst-7799	57	21	the	the	DET
ajst-7799	57	22	resonant	resonant	ADJ
ajst-7799	57	23	structure	structure	NOUN
ajst-7799	57	24	increases	increase	VERB
ajst-7799	57	25	with	with	ADP
ajst-7799	57	26	the	the	DET
ajst-7799	57	27	increase	increase	NOUN
ajst-7799	57	28	of	of	ADP
ajst-7799	57	29	the	the	DET
ajst-7799	57	30	anchor	anchor	NOUN
ajst-7799	57	31	section	section	NOUN
ajst-7799	57	32	length	length	NOUN
ajst-7799	57	33	and	and	CCONJ
ajst-7799	57	34	then	then	ADV
ajst-7799	57	35	stabilizes	stabilize	VERB
ajst-7799	57	36	;	;	PUNCT
ajst-7799	57	37	for	for	ADP
ajst-7799	57	38	the	the	DET
ajst-7799	57	39	area	area	NOUN
ajst-7799	57	40	-	-	PUNCT
ajst-7799	57	41	change	change	NOUN
ajst-7799	57	42	sensing	sense	VERB
ajst-7799	57	43	microelement	microelement	NOUN
ajst-7799	57	44	,	,	PUNCT
ajst-7799	57	45	increasing	increase	VERB
ajst-7799	57	46	the	the	DET
ajst-7799	57	47	length	length	NOUN
ajst-7799	57	48	and	and	CCONJ
ajst-7799	57	49	width	width	NOUN
ajst-7799	57	50	of	of	ADP
ajst-7799	57	51	the	the	DET
ajst-7799	57	52	anchor	anchor	NOUN
ajst-7799	57	53	section	section	NOUN
ajst-7799	57	54	can	can	AUX
ajst-7799	57	55	improve	improve	VERB
ajst-7799	57	56	the	the	DET
ajst-7799	57	57	response	response	NOUN
ajst-7799	57	58	displacement	displacement	NOUN
ajst-7799	57	59	to	to	ADP
ajst-7799	57	60	a	a	DET
ajst-7799	57	61	certain	certain	ADJ
ajst-7799	57	62	extent	extent	NOUN
ajst-7799	57	63	,	,	PUNCT
ajst-7799	57	64	but	but	CCONJ
ajst-7799	57	65	increasing	increase	VERB
ajst-7799	57	66	the	the	DET
ajst-7799	57	67	anchor	anchor	NOUN
ajst-7799	57	68	section	section	NOUN
ajst-7799	57	69	width	width	NOUN
ajst-7799	57	70	is	be	AUX
ajst-7799	57	71	a	a	DET
ajst-7799	57	72	more	more	ADV
ajst-7799	57	73	effective	effective	ADJ
ajst-7799	57	74	way	way	NOUN
ajst-7799	57	75	to	to	PART
ajst-7799	57	76	optimize	optimize	VERB
ajst-7799	57	77	the	the	DET
ajst-7799	57	78	response	response	NOUN
ajst-7799	57	79	displacement	displacement	NOUN
ajst-7799	57	80	.	.	PUNCT
ajst-7799	58	1	references	reference	NOUN
ajst-7799	58	2	[	[	X
ajst-7799	58	3	1	1	NUM
ajst-7799	58	4	]	]	X
ajst-7799	58	5	kral	kral	PROPN
ajst-7799	58	6	z	z	PROPN
ajst-7799	58	7	,	,	PUNCT
ajst-7799	58	8	horn	horn	PROPN
ajst-7799	58	9	w	w	PROPN
ajst-7799	58	10	,	,	PUNCT
ajst-7799	58	11	steck	steck	PROPN
ajst-7799	58	12	j.	j.	PROPN
ajst-7799	58	13	crack	crack	PROPN
ajst-7799	58	14	propagation	propagation	NOUN
ajst-7799	58	15	analysis	analysis	NOUN
ajst-7799	58	16	using	use	VERB
ajst-7799	58	17	acoustic	acoustic	ADJ
ajst-7799	58	18	emission	emission	NOUN
ajst-7799	58	19	sensors	sensor	NOUN
ajst-7799	58	20	for	for	ADP
ajst-7799	58	21	structural	structural	ADJ
ajst-7799	58	22	health	health	NOUN
ajst-7799	58	23	monitoring	monitoring	NOUN
ajst-7799	58	24	systems	system	NOUN
ajst-7799	58	25	.	.	PUNCT
ajst-7799	59	1	scientificworldjournal	scientificworldjournal	ADJ
ajst-7799	59	2	.	.	PUNCT
ajst-7799	60	1	2013	2013	NUM
ajst-7799	60	2	aug	aug	PROPN
ajst-7799	60	3	20;2013:823603	20;2013:823603	PROPN
ajst-7799	60	4	.	.	PUNCT
ajst-7799	61	1	109	109	NUM
ajst-7799	61	2	doi	doi	NOUN
ajst-7799	61	3	:	:	PUNCT
ajst-7799	61	4	10.1155/2013/823603	10.1155/2013/823603	NUM
ajst-7799	61	5	.	.	PUNCT
ajst-7799	62	1	pmid	pmid	NOUN
ajst-7799	62	2	:	:	PUNCT
ajst-7799	62	3	24023536	24023536	NUM
ajst-7799	62	4	;	;	PUNCT
ajst-7799	62	5	pmcid	pmcid	ADJ
ajst-7799	62	6	:	:	PUNCT
ajst-7799	62	7	pmc3760098	pmc3760098	NOUN
ajst-7799	62	8	.	.	PUNCT
ajst-7799	63	1	[	[	X
ajst-7799	63	2	2	2	NUM
ajst-7799	63	3	]	]	X
ajst-7799	63	4	schumacher	schumacher	PROPN
ajst-7799	63	5	,	,	PUNCT
ajst-7799	63	6	thomas;higgins	thomas;higgins	PROPN
ajst-7799	63	7	,	,	PUNCT
ajst-7799	63	8	christopher	christopher	PROPN
ajst-7799	63	9	c.;lovejoy	c.;lovejoy	PROPN
ajst-7799	63	10	,	,	PUNCT
ajst-7799	63	11	steven	steven	PROPN
ajst-7799	63	12	c	c	PROPN
ajst-7799	63	13	..	..	PUNCT
ajst-7799	63	14	acoustic	acoustic	ADJ
ajst-7799	63	15	emission	emission	NOUN
ajst-7799	63	16	monitoring	monitoring	NOUN
ajst-7799	63	17	of	of	ADP
ajst-7799	63	18	conventionally	conventionally	ADV
ajst-7799	63	19	reinforced	reinforce	VERB
ajst-7799	63	20	concrete	concrete	ADJ
ajst-7799	63	21	highway	highway	NOUN
ajst-7799	63	22	bridges	bridge	NOUN
ajst-7799	63	23	under	under	ADP
ajst-7799	63	24	service	service	NOUN
ajst-7799	63	25	conditions[j].rilem	conditions[j].rilem	NOUN
ajst-7799	63	26	bookseries,2012,vol.6	bookseries,2012,vol.6	PROPN
ajst-7799	63	27	:	:	PUNCT
ajst-7799	63	28	847	847	NUM
ajst-7799	63	29	-	-	SYM
ajst-7799	63	30	852	852	NUM
ajst-7799	63	31	.	.	PUNCT
ajst-7799	64	1	[	[	X
ajst-7799	64	2	3	3	X
ajst-7799	64	3	]	]	PUNCT
ajst-7799	64	4	leone	leone	PROPN
ajst-7799	64	5	jr	jr	PROPN
ajst-7799	64	6	.	.	PROPN
ajst-7799	64	7	,	,	PUNCT
ajst-7799	64	8	f.a.;ozevin	f.a.;ozevin	PROPN
ajst-7799	64	9	,	,	PUNCT
ajst-7799	64	10	d.;awerbuch	d.;awerbuch	ADJ
ajst-7799	64	11	,	,	PUNCT
ajst-7799	64	12	j.;tan	j.;tan	PROPN
ajst-7799	64	13	,	,	PUNCT
ajst-7799	64	14	t.-m	t.-m	NOUN
ajst-7799	64	15	..	..	PUNCT
ajst-7799	64	16	detecting	detect	VERB
ajst-7799	64	17	and	and	CCONJ
ajst-7799	64	18	locating	locate	VERB
ajst-7799	64	19	damage	damage	NOUN
ajst-7799	64	20	initiation	initiation	NOUN
ajst-7799	64	21	and	and	CCONJ
ajst-7799	64	22	progression	progression	NOUN
ajst-7799	64	23	in	in	ADP
ajst-7799	64	24	full	full	ADJ
ajst-7799	64	25	-	-	PUNCT
ajst-7799	64	26	scale	scale	NOUN
ajst-7799	64	27	sandwich	sandwich	NOUN
ajst-7799	64	28	composite	composite	ADJ
ajst-7799	64	29	fuselage	fuselage	NOUN
ajst-7799	64	30	panels	panel	NOUN
ajst-7799	64	31	using	use	VERB
ajst-7799	64	32	acoustic	acoustic	ADJ
ajst-7799	64	33	emission	emission	NOUN
ajst-7799	64	34	(	(	PUNCT
ajst-7799	64	35	article	article	NOUN
ajst-7799	64	36	)	)	PUNCT
ajst-7799	65	1	[	[	X
ajst-7799	65	2	j	j	X
ajst-7799	65	3	]	]	X
ajst-7799	65	4	.	.	PUNCT
ajst-7799	66	1	journal	journal	PROPN
ajst-7799	66	2	of	of	ADP
ajst-7799	66	3	composite	composite	ADJ
ajst-7799	66	4	materials	material	NOUN
ajst-7799	66	5	,	,	PUNCT
ajst-7799	66	6	2013,vol.47(13	2013,vol.47(13	NUM
ajst-7799	66	7	):	):	PUNCT
ajst-7799	66	8	1643	1643	NUM
ajst-7799	66	9	-	-	SYM
ajst-7799	66	10	1664	1664	NUM
ajst-7799	66	11	.	.	PUNCT
ajst-7799	67	1	[	[	X
ajst-7799	67	2	4	4	NUM
ajst-7799	67	3	]	]	X
ajst-7799	67	4	ozevin	ozevin	PROPN
ajst-7799	67	5	d	d	PROPN
ajst-7799	67	6	.	.	PUNCT
ajst-7799	68	1	mems	mems	PROPN
ajst-7799	68	2	acoustic	acoustic	ADJ
ajst-7799	68	3	emission	emission	NOUN
ajst-7799	68	4	sensors[j	sensors[j	PROPN
ajst-7799	68	5	]	]	PUNCT
ajst-7799	68	6	.	.	PUNCT
ajst-7799	69	1	applied	apply	VERB
ajst-7799	69	2	sciences	science	NOUN
ajst-7799	69	3	,	,	PUNCT
ajst-7799	69	4	2020	2020	NUM
ajst-7799	69	5	,	,	PUNCT
ajst-7799	69	6	10(24):8966	10(24):8966	NUM
ajst-7799	69	7	.	.	PUNCT
ajst-7799	70	1	[	[	X
ajst-7799	70	2	5	5	X
ajst-7799	70	3	]	]	X
ajst-7799	70	4	aimi	aimi	PROPN
ajst-7799	70	5	a	a	X
ajst-7799	70	6	,	,	PUNCT
ajst-7799	70	7	desiderio	desiderio	PROPN
ajst-7799	70	8	l	l	NOUN
ajst-7799	70	9	,	,	PUNCT
ajst-7799	70	10	fedeli	fedeli	NOUN
ajst-7799	70	11	p	p	NOUN
ajst-7799	70	12	,	,	PUNCT
ajst-7799	70	13	et	et	PROPN
ajst-7799	70	14	al	al	PROPN
ajst-7799	70	15	.	.	PUNCT
ajst-7799	71	1	a	a	DET
ajst-7799	71	2	fast	fast	ADJ
ajst-7799	71	3	boundary	boundary	ADJ
ajst-7799	71	4	-	-	PUNCT
ajst-7799	71	5	finite	finite	NOUN
ajst-7799	71	6	element	element	NOUN
ajst-7799	71	7	approach	approach	NOUN
ajst-7799	71	8	for	for	ADP
ajst-7799	71	9	estimating	estimate	VERB
ajst-7799	71	10	anchor	anchor	NOUN
ajst-7799	71	11	losses	loss	NOUN
ajst-7799	71	12	in	in	ADP
ajst-7799	71	13	microelectro	microelectro	ADJ
ajst-7799	71	14	-	-	ADJ
ajst-7799	71	15	mechanical	mechanical	ADJ
ajst-7799	71	16	system	system	NOUN
ajst-7799	71	17	resonators	resonator	VERB
ajst-7799	71	18	[	[	X
ajst-7799	71	19	j	j	X
ajst-7799	71	20	]	]	X
ajst-7799	71	21	.	.	PUNCT
ajst-7799	72	1	applied	apply	VERB
ajst-7799	72	2	mathematical	mathematical	ADJ
ajst-7799	72	3	modelling	modelling	NOUN
ajst-7799	72	4	,	,	PUNCT
ajst-7799	72	5	2021	2021	NUM
ajst-7799	72	6	,	,	PUNCT
ajst-7799	72	7	97:-	97:-	NOUN
ajst-7799	72	8	.	.	PUNCT
ajst-7799	73	1	[	[	X
ajst-7799	73	2	6	6	NUM
ajst-7799	73	3	]	]	PUNCT
ajst-7799	73	4	luiz	luiz	NOUN
ajst-7799	73	5	,	,	PUNCT
ajst-7799	73	6	g.o	g.o	PROPN
ajst-7799	73	7	.	.	PROPN
ajst-7799	73	8	;	;	PUNCT
ajst-7799	73	9	benevides	benevides	PROPN
ajst-7799	73	10	,	,	PUNCT
ajst-7799	73	11	r.s	r.s	PROPN
ajst-7799	73	12	.	.	PROPN
ajst-7799	73	13	;	;	PUNCT
ajst-7799	73	14	santos	santos	PROPN
ajst-7799	73	15	,	,	PUNCT
ajst-7799	73	16	f.g.s	f.g.	NOUN
ajst-7799	73	17	.	.	PUNCT
ajst-7799	73	18	;	;	PUNCT
ajst-7799	73	19	espinel	espinel	PROPN
ajst-7799	73	20	,	,	PUNCT
ajst-7799	73	21	y.a.v.;mayer	y.a.v.;mayer	PROPN
ajst-7799	73	22	alegre	alegre	PROPN
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ajst-7799	75	20	-	-	PUNCT
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ajst-7799	79	13	emission	emission	NOUN
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ajst-7799	79	15	]	]	PUNCT
ajst-7799	79	16	.	.	PUNCT
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ajst-7799	80	7	,	,	PUNCT
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ajst-7799	80	11	-	-	SYM
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ajst-7799	81	3	]	]	PUNCT
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ajst-7799	81	13	p.	p.	PROPN
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ajst-7799	81	29	"	"	PUNCT
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ajst-7799	81	37	,	,	PUNCT
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ajst-7799	81	41	,	,	PUNCT
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ajst-7799	81	43	,	,	PUNCT
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ajst-7799	82	2	-	-	SYM
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