id	sid	eid	entity	type
ajset-14	1	1	22 000 à 30000	QUANTITY
ajset-14	1	2	1	CARDINAL
ajset-14	4	1	yaxin wang	PERSON
ajset-14	4	2	xiang li	PERSON
ajset-14	4	3	yunlei song	PERSON
ajset-14	4	4	lifei liu	PERSON
ajset-14	4	5	liwei sun & shizong	ORG
ajset-14	4	6	harbin university of science	ORG
ajset-14	4	7	harbin	GPE
ajset-14	4	8	150080	DATE
ajset-14	4	9	china	GPE
ajset-14	13	1	1	CARDINAL
ajset-14	18	1	yaxin wang	PERSON
ajset-14	18	2	xiang li	PERSON
ajset-14	18	3	yunlei song	PERSON
ajset-14	18	4	lifei liu	PERSON
ajset-14	18	5	liwei sun & shizong zhang	ORG
ajset-14	18	6	25|	CARDINAL
ajset-14	24	1	3	CARDINAL
ajset-14	25	1	j. tamaki	PERSON
ajset-14	25	2	k. kondoh[5	PERSON
ajset-14	26	1	xie jinet al.[6	ORG
ajset-14	29	1	brian k. rhoney et al.[7	PERSON
ajset-14	30	1	hu dejin	PERSON
ajset-14	30	2	wang yan et al.[8	PERSON
ajset-14	34	1	suzhou electric	ORG
ajset-14	34	2	100mm	QUANTITY
ajset-14	34	3	100~400mm	QUANTITY
ajset-14	38	1	1	CARDINAL
ajset-14	46	1	yaxin wang	PERSON
ajset-14	46	2	xiang li	PERSON
ajset-14	46	3	yunlei song	PERSON
ajset-14	46	4	lifei liu	PERSON
ajset-14	46	5	liwei sun & shizong zhang	ORG
ajset-14	46	6	26|	CARDINAL
ajset-14	50	1	2	CARDINAL
ajset-14	52	1	fig.3	GPE
ajset-14	53	1	8 mm	QUANTITY
ajset-14	57	1	3	CARDINAL
ajset-14	61	1	4	CARDINAL
ajset-14	61	2	yaxin wang	PERSON
ajset-14	61	3	xiang li	PERSON
ajset-14	61	4	yunlei song	PERSON
ajset-14	61	5	lifei liu	PERSON
ajset-14	61	6	liwei sun & shizong zhang	ORG
ajset-14	61	7	27|	CARDINAL
ajset-14	64	1	2	CARDINAL
ajset-14	64	2	2.1	CARDINAL
ajset-14	66	1	4	CARDINAL
ajset-14	71	1	2.2	CARDINAL
ajset-14	72	1	two	CARDINAL
ajset-14	73	1	4	CARDINAL
ajset-14	73	2	1	CARDINAL
ajset-14	73	3	1 90 50%	PERCENT
ajset-14	73	4	60 3	DATE
ajset-14	73	5	2 60 50%	PERCENT
ajset-14	73	6	40 3	DATE
ajset-14	76	1	2.3	CARDINAL
ajset-14	76	2	1	CARDINAL
ajset-14	80	1	6 μm	QUANTITY
ajset-14	81	1	yaxin wang	PERSON
ajset-14	81	2	xiang li	PERSON
ajset-14	81	3	yunlei song	PERSON
ajset-14	81	4	lifei liu	PERSON
ajset-14	81	5	liwei sun & shizong zhang	ORG
ajset-14	81	6	28|	CARDINAL
ajset-14	91	1	5	CARDINAL
ajset-14	91	2	no.1	ORG
ajset-14	91	3	2	CARDINAL
ajset-14	94	1	up to	CARDINAL
ajset-14	94	2	2 μm	CARDINAL
ajset-14	95	1	6	CARDINAL
ajset-14	95	2	two	CARDINAL
ajset-14	97	1	first	ORDINAL
ajset-14	99	1	yaxin wang	PERSON
ajset-14	99	2	xiang li	PERSON
ajset-14	99	3	yunlei song	PERSON
ajset-14	99	4	lifei liu	PERSON
ajset-14	99	5	liwei sun & shizong zhang	ORG
ajset-14	99	6	29|	CARDINAL
ajset-14	103	1	3	CARDINAL
ajset-14	105	1	1	CARDINAL
ajset-14	105	2	2	CARDINAL
ajset-14	106	1	1	CARDINAL
ajset-14	107	1	2002	DATE
ajset-14	109	1	no.5	ORG
ajset-14	109	2	50	CARDINAL
ajset-14	110	1	2	CARDINAL
ajset-14	111	1	g.q. cai	PERSON
ajset-14	111	2	b.f. feng	PERSON
ajset-14	112	1	2003	DATE
ajset-14	114	1	aeronautical manufacturing technology	ORG
ajset-14	114	2	no.4	GPE
ajset-14	115	1	3	CARDINAL
ajset-14	116	1	kim j d	PERSON
ajset-14	116	2	lee y j.	PERSON
ajset-14	116	3	1994	DATE
ajset-14	118	1	no.1	ORG
ajset-14	119	1	4	CARDINAL
ajset-14	120	1	lee e s	PERSON
ajset-14	121	1	mn	ORG
ajset-14	123	1	5	CARDINAL
ajset-14	124	1	tamaki j	PERSON
ajset-14	126	1	japan	GPE
ajset-14	127	1	6	CARDINAL
ajset-14	128	1	xie j	PERSON
ajset-14	128	2	2006	DATE
ajset-14	130	1	no.1	ORG
ajset-14	131	1	7	CARDINAL
ajset-14	134	1	2002	DATE
ajset-14	136	1	42	DATE
ajset-14	137	1	8	CARDINAL
ajset-14	138	1	y. wang	PERSON
ajset-14	138	2	x.j. zhou	PERSON
ajset-14	138	3	d.j.	PERSON
ajset-14	140	1	no.7	GPE
ajset-14	141	1	9	CARDINAL
ajset-14	142	1	l.r	PERSON
ajset-14	142	2	y. jia	PERSON
ajset-14	142	3	2009	DATE
ajset-14	144	1	202	CARDINAL
ajset-14	144	2	no.2	ORG
ajset-14	144	3	784	CARDINAL
ajset-14	145	1	10	CARDINAL
ajset-14	146	1	m.x. ma.(1999	PERSON
ajset-14	148	1	no.3	LANGUAGE