id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
ap-2227	Tsyrenov, Dmitriy; Semenov, Aleksandr; Smirnyagina, Natalia	MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION	2015	4	.pdf	application/pdf	1664	109	57	A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. Conclusion Preliminary results have been obtained for a hybrid technology for forming composite TiN-Cu layers with a simultaneous combination of a vacuum arc evaporator and a planar magnetron.	cache/ap-2227.pdf	txt/ap-2227.txt