id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
ap-3766	Borduleva, Alena Olegovna; Bleykher, Galina Alekseevna; Sidelev, Dmitrii Vladimirovich; Krivobokov, Valeriy Pavlovich	MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION	2016	7	.pdf	application/pdf	4945	267	58	Creating evaporation on the surface of a high-power pulsed magnetron target by insulating it thermally could be a way to increase the coating deposition rate, due to the fact that it occurs continuously, and the particles removed from the surface between pulses will not be involved in the ionization processes near the target. Sputtering yield increase with target temperature for Ar.	cache/ap-3766.pdf	txt/ap-3766.txt