id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
ap-943	Prajzler, V.; Burian, Z.; Jeřábek, V.; Hüttel, I.; Špirková, J.; Gurovič, J.; Oswald, J.; Zavadil, J.; Peřina, V.	Properties of Erbium Doped Hydrogenated Amorphous Carbon Layers Fabricated by Sputtering and Plasma Assisted Chemical Vapor Deposition	2008	7	.pdf	application/pdf	3521	162	56	4 Conclusion We report on carbon layers doped with erbium ions de- posited by sputtering, by PACVD and by magnetron sputter- ing onto a silicon or glass substrate. 5: The schema of magnetron sputtering set-up The absorbance spectrum of erbium doped carbon layers fabricated by magnetron sputtering is given in Fig.	cache/ap-943.pdf	txt/ap-943.txt