id	sid	eid	entity	type
ap-1316	2	1	51	CARDINAL
ap-1316	3	1	2/2011	CARDINAL
ap-1316	3	2	czech	NORP
ap-1316	3	3	marš́ıková	PERSON
ap-1316	3	4	a. inneman	PERSON
ap-1316	3	5	m. skulinová	PERSON
ap-1316	3	6	m. mı́ka	PERSON
ap-1316	3	7	czech	NORP
ap-1316	4	1	kirkpatrick-baez systems	ORG
ap-1316	6	1	1	CARDINAL
ap-1316	6	2	the czech republic	GPE
ap-1316	6	3	hudec et al.	PERSON
ap-1316	6	4	1991	DATE
ap-1316	6	5	1999	DATE
ap-1316	6	6	2000	DATE
ap-1316	6	7	2001	DATE
ap-1316	6	8	1999	DATE
ap-1316	6	9	2000	DATE
ap-1316	8	1	nasa	ORG
ap-1316	10	1	czech	NORP
ap-1316	10	2	ixo	PERSON
ap-1316	11	1	a few 0.1	CARDINAL
ap-1316	11	2	2.5	CARDINAL
ap-1316	11	3	2.3	CARDINAL
ap-1316	13	1	1997	DATE
ap-1316	15	1	nasa	ORG
ap-1316	15	2	the european space agency	ORG
ap-1316	15	3	the japan aerospace exploration agency	ORG
ap-1316	16	1	nasa	ORG
ap-1316	17	1	mid-2008	GPE
ap-1316	17	2	nasa	ORG
ap-1316	18	1	2009	DATE
ap-1316	19	1	20	CARDINAL
ap-1316	19	2	five	CARDINAL
ap-1316	21	1	u.s.	GPE
ap-1316	22	1	european	NORP
ap-1316	23	1	athena	ORG
ap-1316	23	2	athena	ORG
ap-1316	23	3	2	CARDINAL
ap-1316	23	4	czech	NORP
ap-1316	23	5	czech	NORP
ap-1316	23	6	1	CARDINAL
ap-1316	23	7	2	CARDINAL
ap-1316	24	1	first	ORDINAL
ap-1316	26	1	3	CARDINAL
ap-1316	26	2	the czech republic	GPE
ap-1316	27	1	technol46 acta polytechnica vol	PERSON
ap-1316	28	1	51	CARDINAL
ap-1316	29	1	2/2011	CARDINAL
ap-1316	29	2	nearly four	CARDINAL
ap-1316	33	1	first	ORDINAL
ap-1316	33	2	less than 100×100 mm	QUANTITY
ap-1316	35	1	up to 300	CARDINAL
ap-1316	37	1	1	CARDINAL
ap-1316	38	1	zhang et al.	PERSON
ap-1316	38	2	2010	DATE
ap-1316	38	3	ghigo et al.	PERSON
ap-1316	38	4	2010	DATE
ap-1316	39	1	prague	GPE
ap-1316	39	2	the institute of chemical technology	ORG
ap-1316	39	3	prague	GPE
ap-1316	40	1	300×300 mm	QUANTITY
ap-1316	44	1	2	CARDINAL
ap-1316	45	1	less than 1 μm	MONEY
ap-1316	48	1	1	CARDINAL
ap-1316	48	2	three	CARDINAL
ap-1316	49	1	2	CARDINAL
ap-1316	49	2	47	CARDINAL
ap-1316	50	1	51	CARDINAL
ap-1316	51	1	2/2011	CARDINAL
ap-1316	51	2	better than 1	CARDINAL
ap-1316	53	1	less than 0.1 μm	CARDINAL
ap-1316	55	1	4	CARDINAL
ap-1316	55	2	one	CARDINAL
ap-1316	55	3	a few 0.1	CARDINAL
ap-1316	55	4	1 μm	CARDINAL
ap-1316	57	1	more than 4	CARDINAL
ap-1316	57	2	less than 1 μm over 100 mm	QUANTITY
ap-1316	57	3	one	CARDINAL
ap-1316	57	4	a few 0.1	CARDINAL
ap-1316	57	5	3	CARDINAL
ap-1316	59	1	2010	DATE
ap-1316	63	1	10	CARDINAL
ap-1316	66	1	two	CARDINAL
ap-1316	66	2	4	CARDINAL
ap-1316	68	1	mfo	ORG
ap-1316	68	2	5	CARDINAL
ap-1316	69	1	mfo	ORG
ap-1316	69	2	hudec et al	PERSON
ap-1316	70	1	2005	DATE
ap-1316	71	1	fig	PERSON
ap-1316	72	1	3	CARDINAL
ap-1316	72	2	afm mesurement	PERSON
ap-1316	73	1	4	CARDINAL
ap-1316	73	2	taylor-hobson	PERSON
ap-1316	73	3	si wafer fig	PERSON
ap-1316	74	1	5	CARDINAL
ap-1316	74	2	mfo	ORG
ap-1316	74	3	kirkpatrick-baez	ORG
ap-1316	74	4	48	CARDINAL
ap-1316	74	5	acta polytechnica vol	PERSON
ap-1316	75	1	51	CARDINAL
ap-1316	76	1	2/2011	CARDINAL
ap-1316	76	2	one	CARDINAL
ap-1316	83	1	0.1 mm	QUANTITY
ap-1316	86	1	jaxa ixo	PERSON
ap-1316	87	1	the development department	ORG
ap-1316	91	1	czech republic	GPE
ap-1316	91	2	0.1	CARDINAL
ap-1316	96	1	a few tens of microns	QUANTITY
ap-1316	101	1	1	CARDINAL
ap-1316	105	1	three	CARDINAL
ap-1316	106	1	100 to 150 mm	QUANTITY
ap-1316	106	2	0.6 to 1.3 mm	QUANTITY
ap-1316	109	1	taylor-hobson	PERSON
ap-1316	109	2	afm	PERSON
ap-1316	109	3	3	CARDINAL
ap-1316	110	1	three	CARDINAL
ap-1316	111	1	two	CARDINAL
ap-1316	111	2	less than 1 to	CARDINAL
ap-1316	111	3	150 mm	QUANTITY
ap-1316	111	4	first	ORDINAL
ap-1316	111	5	10 μm	CARDINAL
ap-1316	112	1	first	ORDINAL
ap-1316	112	2	1 μm	CARDINAL
ap-1316	113	1	two	CARDINAL
ap-1316	114	1	49	CARDINAL
ap-1316	114	2	acta polytechnica vol	PERSON
ap-1316	115	1	51	CARDINAL
ap-1316	116	1	2/2011	CARDINAL
ap-1316	117	1	hans wolter	PERSON
ap-1316	117	2	first	ORDINAL
ap-1316	118	1	first	ORDINAL
ap-1316	118	2	kirkpatrick	ORG
ap-1316	118	3	1948	DATE
ap-1316	119	1	two	CARDINAL
ap-1316	120	1	first	ORDINAL
ap-1316	120	2	second	ORDINAL
ap-1316	128	1	the kirkpatrick-baez	ORG
ap-1316	128	2	kb	ORG
ap-1316	130	1	kb	ORG
ap-1316	131	1	kb	ORG
ap-1316	133	1	0.25	CARDINAL
ap-1316	133	2	kb	ORG
ap-1316	134	1	kb	ORG
ap-1316	134	2	5	CARDINAL
ap-1316	135	1	kb	ORG
ap-1316	135	2	mfo	ORG
ap-1316	136	1	mfo	ORG
ap-1316	136	2	mfo	ORG
ap-1316	136	3	less than 0.1 mm	QUANTITY
ap-1316	137	1	mfo kb	ORG
ap-1316	137	2	europe	LOC
ap-1316	137	3	prague	GPE
ap-1316	137	4	2	CARDINAL
ap-1316	137	5	the university of boulder	ORG
ap-1316	137	6	26	CARDINAL
ap-1316	137	7	24	CARDINAL
ap-1316	137	8	5	CARDINAL
ap-1316	137	9	kev	PERSON
ap-1316	137	10	6	CARDINAL
ap-1316	138	1	fig	PERSON
ap-1316	139	1	6	CARDINAL
ap-1316	139	2	prague	GPE
ap-1316	139	3	boulder university	ORG
ap-1316	140	1	7	CARDINAL
ap-1316	140	2	24	CARDINAL
ap-1316	140	3	5	CARDINAL
ap-1316	140	4	university of colorado at boulder	ORG
ap-1316	141	1	26 arcsec	MONEY
ap-1316	141	2	acta polytechnica vol.	PERSON
ap-1316	142	1	51	CARDINAL
ap-1316	143	1	2/2011 6	CARDINAL
ap-1316	144	1	two	CARDINAL
ap-1316	145	1	1 μm	CARDINAL
ap-1316	146	1	the czech republic	GPE
ap-1316	146	2	10	CARDINAL
ap-1316	147	1	three	CARDINAL
ap-1316	148	1	150 mm si wafer	QUANTITY
ap-1316	150	1	the academy of sciences	ORG
ap-1316	150	2	the czech republic	GPE
ap-1316	150	3	01220701	DATE
ap-1316	150	4	the ministry of education	ORG
ap-1316	150	5	the czech republic	GPE
ap-1316	150	6	me918	PRODUCT
ap-1316	152	1	m.s.	PERSON
ap-1316	152	2	the czech republic	GPE
ap-1316	152	3	202/07	CARDINAL
ap-1316	154	1	j. sik	PERSON
ap-1316	154	2	m. lorenc	PERSON
ap-1316	154	3	semiconductor czech	GPE
ap-1316	155	1	webster	PERSON
ap-1316	155	2	university of colorado	ORG
ap-1316	155	3	kb	ORG
ap-1316	156	1	1	CARDINAL
ap-1316	156	2	r.	NORP
ap-1316	156	3	b.	PERSON
ap-1316	156	4	j.	PERSON
ap-1316	157	1	spie, 1991	ORG
ap-1316	157	2	1 343	CARDINAL
ap-1316	157	3	162	CARDINAL
ap-1316	158	1	2	CARDINAL
ap-1316	158	2	r.	NORP
ap-1316	158	3	pína	GPE
ap-1316	158	4	l.	GPE
ap-1316	158	5	a.: spie	PERSON
ap-1316	158	6	1999	DATE
ap-1316	158	7	3 766	CARDINAL
ap-1316	158	8	62	DATE
ap-1316	159	1	3	CARDINAL
ap-1316	159	2	r.	NORP
ap-1316	159	3	pína	GPE
ap-1316	159	4	l.	GPE
ap-1316	159	5	a.: spie	PERSON
ap-1316	159	6	2000	DATE
ap-1316	159	7	4 012	CARDINAL
ap-1316	159	8	422	CARDINAL
ap-1316	160	1	4	CARDINAL
ap-1316	160	2	r.	NORP
ap-1316	160	3	inneman	GPE
ap-1316	160	4	a.	GPE
ap-1316	160	5	pína	GPE
ap-1316	160	6	l.	PERSON
ap-1316	160	7	the 21st century	DATE
ap-1316	160	8	asp conf	ORG
ap-1316	161	1	2001	DATE
ap-1316	161	2	251	CARDINAL
ap-1316	161	3	542	CARDINAL
ap-1316	162	1	5	CARDINAL
ap-1316	162	2	r.	NORP
ap-1316	162	3	pína	GPE
ap-1316	162	4	l.	GPE
ap-1316	162	5	a.	PERSON
ap-1316	163	1	spie	PERSON
ap-1316	163	2	2005	DATE
ap-1316	163	3	5	CARDINAL
ap-1316	163	4	276	CARDINAL
ap-1316	164	1	6	CARDINAL
ap-1316	164	2	a.	PERSON
ap-1316	164	3	hudec	GPE
ap-1316	164	4	r.	NORP
ap-1316	164	5	pína	GPE
ap-1316	164	6	spie	ORG
ap-1316	164	7	1999	DATE
ap-1316	164	8	3 766	CARDINAL
ap-1316	164	9	72	DATE
ap-1316	165	1	7	CARDINAL
ap-1316	165	2	a.	PERSON
ap-1316	165	3	hudec	GPE
ap-1316	165	4	r.	NORP
ap-1316	165	5	pína	GPE
ap-1316	165	6	l.: spie	PERSON
ap-1316	165	7	2000	DATE
ap-1316	165	8	4 138	DATE
ap-1316	165	9	94	DATE
ap-1316	166	1	8	CARDINAL
ap-1316	166	2	kirkpatrick	ORG
ap-1316	166	3	baez, a. v.:	ORG
ap-1316	166	4	j.	PERSON
ap-1316	169	1	38	DATE
ap-1316	169	2	766	CARDINAL
ap-1316	169	3	1948	DATE
ap-1316	170	1	9	CARDINAL
ap-1316	170	2	university of alicante, 1997	ORG
ap-1316	171	1	10	CARDINAL
ap-1316	171	2	n. e.	PERSON
ap-1316	171	3	a. e.: bulletin	PERSON
ap-1316	171	4	american	NORP
ap-1316	171	5	2009	DATE
ap-1316	171	6	41	CARDINAL
ap-1316	171	7	388	CARDINAL
ap-1316	172	1	11	CARDINAL
ap-1316	172	2	n. e.	PERSON
ap-1316	172	3	parmar, a.	PERSON
ap-1316	172	4	kunieda	ORG
ap-1316	172	5	2009	DATE
ap-1316	172	6	american	NORP
ap-1316	172	7	41	CARDINAL
ap-1316	172	8	357	CARDINAL
ap-1316	173	1	12	CARDINAL
ap-1316	173	2	13	CARDINAL
ap-1316	173	3	m.	PERSON
ap-1316	174	1	spie	ORG
ap-1316	174	2	2010	DATE
ap-1316	174	3	7 732	CARDINAL
ap-1316	176	1	14	CARDINAL
ap-1316	176	2	w. w.	PERSON
ap-1316	176	3	spie	ORG
ap-1316	176	4	2010	DATE
ap-1316	176	5	7 732	CARDINAL
ap-1316	178	1	15	CARDINAL
ap-1316	178	2	m.	PERSON
ap-1316	178	3	spie	ORG
ap-1316	178	4	2010	DATE
ap-1316	178	5	7 732	CARDINAL
ap-1316	180	1	institute academy of sciences	ORG
ap-1316	180	2	czech	NORP
ap-1316	180	3	cz-25165	PRODUCT
ap-1316	180	4	czech	NORP
ap-1316	180	5	czech technical university	ORG
ap-1316	180	6	2	CARDINAL
ap-1316	180	7	27	CARDINAL
ap-1316	180	8	prague	GPE
ap-1316	180	9	czech	NORP
ap-1316	180	10	czech technical university	ORG
ap-1316	180	11	prague	GPE
ap-1316	181	1	78/7	CARDINAL
ap-1316	181	2	00	CARDINAL
ap-1316	181	3	prague	GPE
ap-1316	181	4	czech	NORP
ap-1316	181	5	europe	LOC
ap-1316	181	6	s. r. o. novodvorská 994	PERSON
ap-1316	181	7	21	CARDINAL
ap-1316	181	8	4	CARDINAL
ap-1316	182	1	czech	NORP
ap-1316	182	2	michaela skulinová	PERSON
ap-1316	182	3	institute academy of sciences	ORG
ap-1316	182	4	the czech republic	GPE
ap-1316	182	5	65	CARDINAL
ap-1316	182	6	czech	NORP
ap-1316	182	7	martin mı́ka institute of chemical	ORG
ap-1316	182	8	5	CARDINAL
ap-1316	182	9	28	CARDINAL
ap-1316	182	10	prague	GPE
ap-1316	182	11	czech	NORP
ap-1316	182	12	51	CARDINAL