id	sid	eid	entity	type
ap-1470	1	1	acta polytechnica vol	PERSON
ap-1470	2	1	51	CARDINAL
ap-1470	3	1	6/2011	CARDINAL
ap-1470	3	2	czech	NORP
ap-1470	3	3	r. hudec	PERSON
ap-1470	3	4	marš́ıková	PERSON
ap-1470	3	5	a. inneman	PERSON
ap-1470	3	6	m. skulinová	PERSON
ap-1470	3	7	m. mı́ka	PERSON
ap-1470	3	8	czech	NORP
ap-1470	4	1	kirkpatrick-baez systems	ORG
ap-1470	5	1	1	CARDINAL
ap-1470	5	2	the czech republic	GPE
ap-1470	5	3	hudec et al.	PERSON
ap-1470	5	4	1991	DATE
ap-1470	5	5	1999	DATE
ap-1470	5	6	2000	DATE
ap-1470	5	7	2001	DATE
ap-1470	5	8	1999	DATE
ap-1470	5	9	2000	DATE
ap-1470	7	1	16	CARDINAL
ap-1470	9	1	czech	NORP
ap-1470	10	1	a few 0.1	CARDINAL
ap-1470	10	2	2.5	CARDINAL
ap-1470	10	3	2.3	CARDINAL
ap-1470	12	1	1997	DATE
ap-1470	14	1	the european space agency	ORG
ap-1470	15	1	nasa	ORG
ap-1470	15	2	2009	DATE
ap-1470	16	1	the athena study	ORG
ap-1470	16	2	two	CARDINAL
ap-1470	17	1	11.5	CARDINAL
ap-1470	18	1	1st	ORDINAL
ap-1470	18	2	garching	GPE
ap-1470	18	3	germany	GPE
ap-1470	18	4	june 2011	DATE
ap-1470	19	1	16	CARDINAL
ap-1470	19	2	2	CARDINAL
ap-1470	19	3	czech	NORP
ap-1470	19	4	czech	NORP
ap-1470	19	5	1	CARDINAL
ap-1470	19	6	2	CARDINAL
ap-1470	20	1	first	ORDINAL
ap-1470	22	1	jaxa ixo	PERSON
ap-1470	23	1	3	CARDINAL
ap-1470	23	2	the czech republic	GPE
ap-1470	24	1	more than 3	CARDINAL
ap-1470	29	1	first	ORDINAL
ap-1470	29	2	less than 100	CARDINAL
ap-1470	30	1	28	CARDINAL
ap-1470	31	1	51	CARDINAL
ap-1470	32	1	6/2011	CARDINAL
ap-1470	33	1	up to 300	CARDINAL
ap-1470	36	1	zhang et al.	PERSON
ap-1470	36	2	2010	DATE
ap-1470	36	3	ghigo et al.	PERSON
ap-1470	36	4	2010	DATE
ap-1470	37	1	prague	GPE
ap-1470	37	2	the institute of chemical technology	ORG
ap-1470	37	3	prague	GPE
ap-1470	38	1	300×300 mm	QUANTITY
ap-1470	43	1	less than 1 μm	MONEY
ap-1470	45	1	better than 1	CARDINAL
ap-1470	47	1	less than 0.1 μm	CARDINAL
ap-1470	49	1	4	CARDINAL
ap-1470	49	2	one	CARDINAL
ap-1470	49	3	a few 0.1	CARDINAL
ap-1470	49	4	1 μm	CARDINAL
ap-1470	51	1	more than 3	CARDINAL
ap-1470	51	2	less than 1 μm over 100 mm	QUANTITY
ap-1470	51	3	one	CARDINAL
ap-1470	51	4	a few 0.1	CARDINAL
ap-1470	53	1	xeus	PERSON
ap-1470	53	2	ixo	PERSON
ap-1470	53	3	2010	DATE
ap-1470	57	1	10×	CARDINAL
ap-1470	57	2	10 cm	QUANTITY
ap-1470	60	1	two	CARDINAL
ap-1470	60	2	4	CARDINAL
ap-1470	62	1	mfo	ORG
ap-1470	63	1	mfo	ORG
ap-1470	63	2	hudec et al	PERSON
ap-1470	64	1	2005	DATE
ap-1470	65	1	one	CARDINAL
ap-1470	68	1	29	CARDINAL
ap-1470	69	1	51	CARDINAL
ap-1470	70	1	6/2011	CARDINAL
ap-1470	74	1	0.1 mm	QUANTITY
ap-1470	78	1	the development department	ORG
ap-1470	82	1	czech republic	GPE
ap-1470	82	2	0.1	CARDINAL
ap-1470	87	1	a few tens of microns	QUANTITY
ap-1470	92	1	1	CARDINAL
ap-1470	96	1	three	CARDINAL
ap-1470	96	2	1	CARDINAL
ap-1470	97	1	100 to 150 mm	QUANTITY
ap-1470	97	2	0.6 to 1.3 mm	QUANTITY
ap-1470	99	1	1	CARDINAL
ap-1470	100	1	1 436	CARDINAL
ap-1470	100	2	615	CARDINAL
ap-1470	100	3	507 μm	QUANTITY
ap-1470	100	4	110 mm	QUANTITY
ap-1470	100	5	25.6 m	QUANTITY
ap-1470	102	1	30	CARDINAL
ap-1470	103	1	51	CARDINAL
ap-1470	104	1	6/2011	CARDINAL
ap-1470	106	1	taylor-hobson	PERSON
ap-1470	106	2	afm	PERSON
ap-1470	107	1	three	CARDINAL
ap-1470	108	1	two	CARDINAL
ap-1470	108	2	less than 1 to	CARDINAL
ap-1470	108	3	150 mm	QUANTITY
ap-1470	108	4	first	ORDINAL
ap-1470	108	5	10 μm	CARDINAL
ap-1470	109	1	first	ORDINAL
ap-1470	109	2	1 μm	CARDINAL
ap-1470	110	1	two	CARDINAL
ap-1470	111	1	5	CARDINAL
ap-1470	111	2	kirkpatrick-baez	ORG
ap-1470	111	3	hans wolter	PERSON
ap-1470	111	4	first	ORDINAL
ap-1470	112	1	first	ORDINAL
ap-1470	112	2	kirkpatrick	ORG
ap-1470	112	3	1948	DATE
ap-1470	113	1	two	CARDINAL
ap-1470	113	2	2	CARDINAL
ap-1470	114	1	first	ORDINAL
ap-1470	114	2	second	ORDINAL
ap-1470	120	1	1978	DATE
ap-1470	121	1	kirkpatrick-baez	ORG
ap-1470	121	2	kb	ORG
ap-1470	121	3	kb	ORG
ap-1470	121	4	1988	DATE
ap-1470	122	1	fig	ORG
ap-1470	123	1	2	CARDINAL
ap-1470	123	2	mfo	ORG
ap-1470	123	3	kirkpatrick-baez	ORG
ap-1470	123	4	kb	ORG
ap-1470	125	1	the kirkpatrick-baez	ORG
ap-1470	125	2	kb	ORG
ap-1470	127	1	kb	ORG
ap-1470	128	1	kb	ORG
ap-1470	130	1	0.25	CARDINAL
ap-1470	130	2	kb	ORG
ap-1470	131	1	kb	ORG
ap-1470	131	2	5	CARDINAL
ap-1470	132	1	kb	ORG
ap-1470	132	2	mfo	ORG
ap-1470	133	1	mfo	ORG
ap-1470	133	2	mfo	ORG
ap-1470	133	3	less than 0.1 mm	QUANTITY
ap-1470	134	1	mfo kb	ORG
ap-1470	134	2	europe	LOC
ap-1470	134	3	prague	GPE
ap-1470	134	4	2	CARDINAL
ap-1470	134	5	the university of boulder	ORG
ap-1470	134	6	26	CARDINAL
ap-1470	134	7	24	CARDINAL
ap-1470	134	8	5	CARDINAL
ap-1470	134	9	kev	PERSON
ap-1470	134	10	1d	CARDINAL
ap-1470	134	11	3	CARDINAL
ap-1470	134	12	4	CARDINAL
ap-1470	135	1	31	CARDINAL
ap-1470	135	2	acta polytechnica vol	PERSON
ap-1470	136	1	51	CARDINAL
ap-1470	137	1	6/2011	CARDINAL
ap-1470	138	1	3	CARDINAL
ap-1470	139	1	prague	GPE
ap-1470	139	2	the university of colorado	ORG
ap-1470	139	3	boulder fig	GPE
ap-1470	140	1	4	CARDINAL
ap-1470	140	2	1d	CARDINAL
ap-1470	140	3	5	CARDINAL
ap-1470	140	4	the university of colorado at boulder	ORG
ap-1470	141	1	1d	CARDINAL
ap-1470	141	2	4 arcsec	MONEY
ap-1470	141	3	athena	ORG
ap-1470	142	1	6	CARDINAL
ap-1470	143	1	two	CARDINAL
ap-1470	143	2	athena	ORG
ap-1470	144	1	1 μm	CARDINAL
ap-1470	145	1	the czech republic	GPE
ap-1470	145	2	10	CARDINAL
ap-1470	146	1	three	CARDINAL
ap-1470	147	1	150 mm si wafer	QUANTITY
ap-1470	149	1	kb	ORG
ap-1470	150	1	kb	ORG
ap-1470	152	1	32	CARDINAL
ap-1470	152	2	acta polytechnica vol.	PERSON
ap-1470	153	1	51	CARDINAL
ap-1470	154	1	6/2011	CARDINAL
ap-1470	154	2	the academy of sciences	ORG
ap-1470	154	3	the czech republic	GPE
ap-1470	154	4	01220701	DATE
ap-1470	154	5	the ministry of education	ORG
ap-1470	154	6	the czech republic	GPE
ap-1470	154	7	me918	PRODUCT
ap-1470	157	1	j. sik	PERSON
ap-1470	157	2	m. lorenc	PERSON
ap-1470	157	3	semiconductor czech	GPE
ap-1470	158	1	webster	PERSON
ap-1470	158	2	the university of colorado at	ORG
ap-1470	158	3	kb	ORG
ap-1470	159	1	1	CARDINAL
ap-1470	159	2	r.	NORP
ap-1470	159	3	b.	PERSON
ap-1470	159	4	j.	PERSON
ap-1470	160	1	spie	PERSON
ap-1470	160	2	1 343	CARDINAL
ap-1470	160	3	162, 1991	DATE
ap-1470	161	1	2	CARDINAL
ap-1470	161	2	r.	NORP
ap-1470	161	3	l.	GPE
ap-1470	161	4	a.: spie	PERSON
ap-1470	161	5	3 766	CARDINAL
ap-1470	161	6	62, 1999	DATE
ap-1470	162	1	3	CARDINAL
ap-1470	162	2	r.	NORP
ap-1470	162	3	l.	GPE
ap-1470	162	4	a.: spie	PERSON
ap-1470	162	5	4 012	CARDINAL
ap-1470	162	6	422	CARDINAL
ap-1470	162	7	2000	DATE
ap-1470	163	1	4	CARDINAL
ap-1470	163	2	r.	NORP
ap-1470	163	3	a.	PERSON
ap-1470	163	4	the 21st century	DATE
ap-1470	163	5	asp conf	ORG
ap-1470	164	1	251	CARDINAL
ap-1470	164	2	542, 2001	DATE
ap-1470	165	1	5	CARDINAL
ap-1470	165	2	r.	NORP
ap-1470	165	3	l.	GPE
ap-1470	165	4	a. et al	PERSON
ap-1470	166	1	spie	PERSON
ap-1470	166	2	5	CARDINAL
ap-1470	166	3	276	CARDINAL
ap-1470	166	4	2005	DATE
ap-1470	167	1	6	CARDINAL
ap-1470	167	2	a.	PERSON
ap-1470	167	3	hudec	GPE
ap-1470	167	4	r.	NORP
ap-1470	167	5	spie	PERSON
ap-1470	167	6	3 766	CARDINAL
ap-1470	167	7	72, 1999	DATE
ap-1470	168	1	7	CARDINAL
ap-1470	168	2	a.	PERSON
ap-1470	168	3	hudec	GPE
ap-1470	168	4	r.	NORP
ap-1470	168	5	spie	PERSON
ap-1470	168	6	4 138	DATE
ap-1470	168	7	94, 2000	DATE
ap-1470	169	1	8	CARDINAL
ap-1470	169	2	kirkpatrick	ORG
ap-1470	169	3	baez, a. v.:	ORG
ap-1470	169	4	j.	PERSON
ap-1470	172	1	38	DATE
ap-1470	172	2	766	CARDINAL
ap-1470	172	3	1948	DATE
ap-1470	173	1	9	CARDINAL
ap-1470	173	2	university of alicante, 1997	ORG
ap-1470	174	1	10	CARDINAL
ap-1470	174	2	n. e.	PERSON
ap-1470	174	3	a. e.: bulletin	PERSON
ap-1470	174	4	american	NORP
ap-1470	174	5	41, 2009	DATE
ap-1470	174	6	388	CARDINAL
ap-1470	175	1	11	CARDINAL
ap-1470	175	2	n. e.	PERSON
ap-1470	175	3	parmar, a.	PERSON
ap-1470	175	4	kunieda	ORG
ap-1470	175	5	2009	DATE
ap-1470	175	6	american	NORP
ap-1470	175	7	41	CARDINAL
ap-1470	175	8	357	CARDINAL
ap-1470	176	1	12	CARDINAL
ap-1470	176	2	13	CARDINAL
ap-1470	176	3	m.	PERSON
ap-1470	177	1	7 732	CARDINAL
ap-1470	177	2	2010	DATE
ap-1470	177	3	77321e–77321e-9	CARDINAL
ap-1470	178	1	14	CARDINAL
ap-1470	178	2	w. w.	PERSON
ap-1470	178	3	7 732	CARDINAL
ap-1470	178	4	2010	DATE
ap-1470	178	5	77321g–77321g-8	CARDINAL
ap-1470	179	1	15	CARDINAL
ap-1470	179	2	m.	PERSON
ap-1470	179	3	7 732	CARDINAL
ap-1470	179	4	2010	DATE
ap-1470	180	1	16	CARDINAL
ap-1470	181	1	17	CARDINAL
ap-1470	182	1	astrophys	PERSON
ap-1470	183	1	j. 224	PERSON
ap-1470	183	2	718	CARDINAL
ap-1470	183	3	1978	DATE
ap-1470	184	1	18	CARDINAL
ap-1470	184	2	d. g.	PERSON
ap-1470	184	3	27	CARDINAL
ap-1470	184	4	8	CARDINAL
ap-1470	184	5	1 456	CARDINAL
ap-1470	184	6	1988	DATE
ap-1470	184	7	institute academy of sciences	ORG
ap-1470	184	8	the czech republic	GPE
ap-1470	184	9	251 65	DATE
ap-1470	184	10	czech	NORP
ap-1470	184	11	czech technical university	ORG
ap-1470	184	12	prague	GPE
ap-1470	184	13	2	CARDINAL
ap-1470	184	14	166 27	CARDINAL
ap-1470	184	15	prague	GPE
ap-1470	184	16	czech	NORP
ap-1470	184	17	czech technical university	ORG
ap-1470	184	18	prague	GPE
ap-1470	184	19	78/7	CARDINAL
ap-1470	184	20	110 00	CARDINAL
ap-1470	184	21	prague	GPE
ap-1470	184	22	czech	NORP
ap-1470	184	23	europe	LOC
ap-1470	184	24	s. r. o. novodvorská	PERSON
ap-1470	185	1	142 21	DATE
ap-1470	185	2	4	CARDINAL
ap-1470	185	3	czech	NORP
ap-1470	185	4	michaela skulinová	PERSON
ap-1470	185	5	institute academy of sciences	ORG
ap-1470	185	6	the czech republic	GPE
ap-1470	185	7	251 65	DATE
ap-1470	185	8	czech	NORP
ap-1470	185	9	martin mı́ka institute of chemical	ORG
ap-1470	185	10	5	CARDINAL
ap-1470	185	11	166 28	CARDINAL
ap-1470	185	12	prague	GPE
ap-1470	185	13	czech	NORP
ap-1470	185	14	33	CARDINAL