id	sid	eid	entity	type
ap-1662	1	1	acta polytechnica vol	PERSON
ap-1662	2	1	52	CARDINAL
ap-1662	3	1	nadine winkin	PERSON
ap-1662	3	2	wilfried mokwa institute	PERSON
ap-1662	3	3	1	CARDINAL
ap-1662	4	1	24, 52074	DATE
ap-1662	4	2	germany	GPE
ap-1662	9	1	first	ORDINAL
ap-1662	11	1	1	CARDINAL
ap-1662	13	1	more than 3 million	CARDINAL
ap-1662	15	1	the years	DATE
ap-1662	17	1	many years	DATE
ap-1662	17	2	about 30%	PERCENT
ap-1662	18	1	1	CARDINAL
ap-1662	18	2	2	DATE
ap-1662	18	3	3	CARDINAL
ap-1662	18	4	9	CARDINAL
ap-1662	20	1	one	CARDINAL
ap-1662	20	2	the german ministry of education	ORG
ap-1662	22	1	1	CARDINAL
ap-1662	25	1	25	CARDINAL
ap-1662	26	1	1	CARDINAL
ap-1662	27	1	3	CARDINAL
ap-1662	28	1	six	CARDINAL
ap-1662	29	1	four weeks	DATE
ap-1662	30	1	essen	GPE
ap-1662	30	2	germany	GPE
ap-1662	31	1	3	CARDINAL
ap-1662	31	2	2	CARDINAL
ap-1662	32	1	second	ORDINAL
ap-1662	32	2	2	CARDINAL
ap-1662	33	1	1000	CARDINAL
ap-1662	33	2	125	CARDINAL
ap-1662	34	1	52	CARDINAL
ap-1662	35	1	5/2012	CARDINAL
ap-1662	35	2	2	CARDINAL
ap-1662	36	1	3	CARDINAL
ap-1662	38	1	25	CARDINAL
ap-1662	42	1	2	CARDINAL
ap-1662	43	1	2	CARDINAL
ap-1662	43	2	2.1	CARDINAL
ap-1662	43	3	20µm	DATE
ap-1662	44	1	25	CARDINAL
ap-1662	45	1	fig	ORG
ap-1662	46	1	3	CARDINAL
ap-1662	50	1	4	CARDINAL
ap-1662	51	1	5	CARDINAL
ap-1662	51	2	25	CARDINAL
ap-1662	52	1	4	CARDINAL
ap-1662	53	1	5	CARDINAL
ap-1662	53	2	2.2	CARDINAL
ap-1662	54	1	first	ORDINAL
ap-1662	55	1	2611	CARDINAL
ap-1662	56	1	50	CARDINAL
ap-1662	56	2	1	CARDINAL
ap-1662	56	3	150	CARDINAL
ap-1662	57	1	first	ORDINAL
ap-1662	59	1	second	ORDINAL
ap-1662	60	1	2611	CARDINAL
ap-1662	61	1	between 1µm and 11	CARDINAL
ap-1662	62	1	5µm	DATE
ap-1662	63	1	7000×7000×5	ORDINAL
ap-1662	64	1	5	CARDINAL
ap-1662	65	1	1	CARDINAL
ap-1662	66	1	around 350°	QUANTITY
ap-1662	66	2	400°	QUANTITY
ap-1662	68	1	between 1µm and 11	CARDINAL
ap-1662	70	1	25µm	ORDINAL
ap-1662	71	1	20	CARDINAL
ap-1662	72	1	about 2790×2170	CARDINAL
ap-1662	72	2	126	CARDINAL
ap-1662	73	1	52	CARDINAL
ap-1662	74	1	5/2012	CARDINAL
ap-1662	74	2	6	CARDINAL
ap-1662	75	1	7	CARDINAL
ap-1662	76	1	8	CARDINAL
ap-1662	78	1	6	CARDINAL
ap-1662	82	1	fig.	DATE
ap-1662	83	1	8	CARDINAL
ap-1662	85	1	7	CARDINAL
ap-1662	85	2	fig.	DATE
ap-1662	86	1	9	CARDINAL
ap-1662	87	1	30	CARDINAL
ap-1662	87	2	100	CARDINAL
ap-1662	88	1	8	CARDINAL
ap-1662	88	2	9	CARDINAL
ap-1662	89	1	10	CARDINAL
ap-1662	93	1	10	CARDINAL
ap-1662	94	1	irox	GPE
ap-1662	94	2	4	CARDINAL
ap-1662	95	1	up to	CARDINAL
ap-1662	95	2	95	CARDINAL
ap-1662	95	3	5	CARDINAL
ap-1662	96	1	iridium	ORG
ap-1662	98	1	150	CARDINAL
ap-1662	98	2	500	CARDINAL
ap-1662	100	1	n-methyl-2-	NORP
ap-1662	102	1	11	CARDINAL
ap-1662	103	1	100	CARDINAL
ap-1662	104	1	12	CARDINAL
ap-1662	105	1	127	CARDINAL
ap-1662	106	1	52	CARDINAL
ap-1662	107	1	5/2012	CARDINAL
ap-1662	107	2	11	CARDINAL
ap-1662	108	1	12	CARDINAL
ap-1662	109	1	3.5µm	CARDINAL
ap-1662	110	1	parylene	PERSON
ap-1662	110	2	6	CARDINAL
ap-1662	112	1	first	ORDINAL
ap-1662	112	2	150	CARDINAL
ap-1662	116	1	fig.	DATE
ap-1662	117	1	13	CARDINAL
ap-1662	117	2	3	CARDINAL
ap-1662	118	1	first	ORDINAL
ap-1662	118	2	5mm	QUANTITY
ap-1662	119	1	14	CARDINAL
ap-1662	120	1	15	CARDINAL
ap-1662	121	1	1.5mm	QUANTITY
ap-1662	122	1	14	CARDINAL
ap-1662	124	1	15	CARDINAL
ap-1662	125	1	13	CARDINAL
ap-1662	125	2	14	CARDINAL
ap-1662	125	3	5mm	QUANTITY
ap-1662	125	4	1.5mm	QUANTITY
ap-1662	126	1	15	CARDINAL
ap-1662	127	1	16	CARDINAL
ap-1662	127	2	128	CARDINAL
ap-1662	127	3	acta polytechnica vol.	PERSON
ap-1662	128	1	52	CARDINAL
ap-1662	130	1	5	CARDINAL
ap-1662	130	2	5	CARDINAL
ap-1662	130	3	5	CARDINAL
ap-1662	131	1	16	CARDINAL
ap-1662	132	1	ten	CARDINAL
ap-1662	132	2	5	CARDINAL
ap-1662	134	1	4	CARDINAL
ap-1662	138	1	w. mokwa	PERSON
ap-1662	138	2	rwth aachen university	ORG
ap-1662	138	3	the german federal ministry of education	ORG
ap-1662	140	1	1	CARDINAL
ap-1662	140	2	e. margalit	PERSON
ap-1662	140	3	m. maia	PERSON
ap-1662	140	4	j. d. weiland et	PERSON
ap-1662	143	1	47(4):335–356, 2002	DATE
ap-1662	144	1	2	CARDINAL
ap-1662	144	2	w. mokwa	PERSON
ap-1662	146	1	16th	ORDINAL
ap-1662	146	2	2011	DATE
ap-1662	146	3	2011	DATE
ap-1662	146	4	2825	CARDINAL
ap-1662	146	5	2830	CARDINAL
ap-1662	147	1	3	CARDINAL
ap-1662	147	2	w. mokwa	PERSON
ap-1662	147	3	m. goertz	PERSON
ap-1662	147	4	c. koch et al	PERSON
ap-1662	149	1	30th	ORDINAL
ap-1662	149	2	annual	DATE
ap-1662	149	3	2008	DATE
ap-1662	149	4	vancouver	GPE
ap-1662	149	5	2008	DATE
ap-1662	151	1	4	CARDINAL
ap-1662	151	2	l. s. robblee	PERSON
ap-1662	151	3	j. l. lefko	PERSON
ap-1662	151	4	s. b. brummer	PERSON
ap-1662	154	1	5	CARDINAL
ap-1662	154	2	r.	NORP
ap-1662	154	3	vitushinsky	PERSON
ap-1662	154	4	w. mokwa et al	PERSON
ap-1662	155	1	151(7):e226	CARDINAL
ap-1662	155	2	2004	DATE
ap-1662	156	1	6	CARDINAL
ap-1662	157	1	scs medical	ORG
ap-1662	159	1	pdf	ORG
ap-1662	159	2	2011	CARDINAL
ap-1662	159	3	2010	DATE
ap-1662	160	1	7	CARDINAL
ap-1662	160	2	t. stieglitz	PERSON
ap-1662	160	3	h. beutel	PERSON
ap-1662	160	4	m. schuettler et al	PERSON
ap-1662	161	1	2(4):283–294	DATE
ap-1662	161	2	2000	DATE
ap-1662	162	1	8	CARDINAL
ap-1662	162	2	n. winkin	PERSON
ap-1662	164	1	16th	ORDINAL
ap-1662	164	2	2012	DATE
ap-1662	164	3	prague	GPE
ap-1662	164	4	2012	DATE
ap-1662	165	1	9	CARDINAL
ap-1662	165	2	j. l. wyatt	PERSON
ap-1662	165	3	j. f. rizzo	PERSON
ap-1662	165	4	a. grumet et al	PERSON
ap-1662	166	1	35(4):1380, 1994	DATE
ap-1662	167	1	129	CARDINAL