id	sid	eid	entity	type
ap-1743	1	1	acta polytechnica acta polytechnica	ORG
ap-1743	1	2	53(2):155–159	CARDINAL
ap-1743	1	3	2013	DATE
ap-1743	1	4	czech technical university	ORG
ap-1743	1	5	prague	GPE
ap-1743	1	6	2013	DATE
ap-1743	1	7	dmitriy a. golosov∗	PERSON
ap-1743	1	8	sergey m. zavatskiy	PERSON
ap-1743	1	9	sergey n. melnikov	PERSON
ap-1743	1	10	belarusian state university of informatics	ORG
ap-1743	1	11	minsk	GPE
ap-1743	2	1	belarus ∗ corresponding	ORG
ap-1743	3	1	7 mol.% yttria-stabilized	QUANTITY
ap-1743	3	2	zirconia	DATE
ap-1743	4	1	700	CARDINAL
ap-1743	4	2	820	CARDINAL
ap-1743	4	3	ni	PERSON
ap-1743	4	4	20	CARDINAL
ap-1743	4	5	0.05	CARDINAL
ap-1743	7	1	1 khz	QUANTITY
ap-1743	7	2	800	CARDINAL
ap-1743	7	3	1.96	CARDINAL
ap-1743	7	4	yttria-stabilized	PERSON
ap-1743	8	1	1	CARDINAL
ap-1743	8	2	yttria-stabilized	PERSON
ap-1743	8	3	zirconia	DATE
ap-1743	9	1	2	CARDINAL
ap-1743	10	1	today	DATE
ap-1743	11	1	15	CARDINAL
ap-1743	11	2	7	CARDINAL
ap-1743	11	3	5	CARDINAL
ap-1743	12	1	msofc	PERSON
ap-1743	13	1	3	CARDINAL
ap-1743	13	2	13	DATE
ap-1743	13	3	10	CARDINAL
ap-1743	13	4	gs	ORG
ap-1743	13	5	4	CARDINAL
ap-1743	13	6	14	CARDINAL
ap-1743	14	1	1	CARDINAL
ap-1743	14	2	500 ÷ 600	CARDINAL
ap-1743	15	1	6	CARDINAL
ap-1743	16	1	gasproof	PERSON
ap-1743	17	1	1	CARDINAL
ap-1743	18	1	9	CARDINAL
ap-1743	21	1	2	CARDINAL
ap-1743	21	2	1	CARDINAL
ap-1743	25	1	39mm	QUANTITY
ap-1743	25	2	+ 7 mol.% y2o3 target	QUANTITY
ap-1743	27	1	1 300w	CARDINAL
ap-1743	28	1	100	CARDINAL
ap-1743	28	2	si3n4	ORG
ap-1743	28	3	1	CARDINAL
ap-1743	28	4	150	CARDINAL
ap-1743	28	5	155	CARDINAL
ap-1743	28	6	http://ctn.cvut.cz/ap/ dmitriy a. golosov	ORG
ap-1743	28	7	sergey m. zavatskiy	PERSON
ap-1743	28	8	sergey n. melnikov	PERSON
ap-1743	28	9	acta polytechnica	PERSON
ap-1743	28	10	s s n s s n n	ORG
ap-1743	28	11	o2 mfc	ORG
ap-1743	28	12	13.56	CARDINAL
ap-1743	28	13	5.0 kv 300	QUANTITY
ap-1743	28	14	1	CARDINAL
ap-1743	29	1	mfc	PERSON
ap-1743	30	1	100	CARDINAL
ap-1743	32	1	8	CARDINAL
ap-1743	34	1	10 sccm	QUANTITY
ap-1743	35	1	3min	CARDINAL
ap-1743	35	2	700	CARDINAL
ap-1743	35	3	40ma	ORDINAL
ap-1743	37	1	50 sccm	QUANTITY
ap-1743	37	2	10 sccm	QUANTITY
ap-1743	38	1	70	CARDINAL
ap-1743	38	2	5	CARDINAL
ap-1743	38	3	20min	CARDINAL
ap-1743	40	1	60 sccm	QUANTITY
ap-1743	41	1	0 to 30 %	PERCENT
ap-1743	41	2	0.2	CARDINAL
ap-1743	42	1	125w	GPE
ap-1743	42	2	80w	GPE
ap-1743	42	3	10 %	PERCENT
ap-1743	43	1	180min	DATE
ap-1743	44	1	82mm	QUANTITY
ap-1743	45	1	200÷400	CARDINAL
ap-1743	47	1	700	CARDINAL
ap-1743	47	2	15min	CARDINAL
ap-1743	49	1	100	CARDINAL
ap-1743	49	2	2	CARDINAL
ap-1743	49	3	2	CARDINAL
ap-1743	49	4	2	CARDINAL
ap-1743	50	1	60	CARDINAL
ap-1743	50	2	2θ	CARDINAL
ap-1743	51	1	20 ÷ 80	CARDINAL
ap-1743	53	1	2	CARDINAL
ap-1743	54	1	200 ÷ 400	QUANTITY
ap-1743	54	2	100	CARDINAL
ap-1743	56	1	0.8	CARDINAL
ap-1743	57	1	25hz	NORP
ap-1743	57	2	1.0mhz	CARDINAL
ap-1743	58	1	8.85	CARDINAL
ap-1743	58	2	6.4	CARDINAL
ap-1743	59	1	1 khz	QUANTITY
ap-1743	59	2	up to	CARDINAL
ap-1743	60	1	+ 7 %	PERCENT
ap-1743	61	1	ar/o2 producer	ORG
ap-1743	62	1	3	CARDINAL
ap-1743	64	1	5	CARDINAL
ap-1743	64	2	7 %	PERCENT
ap-1743	64	3	20 ÷ 25 %	PERCENT
ap-1743	65	1	+ 7 %	PERCENT
ap-1743	65	2	0.17	CARDINAL
ap-1743	66	1	100	CARDINAL
ap-1743	68	1	yttria-stabilized	PERSON
ap-1743	68	2	more than 500	CARDINAL
ap-1743	68	3	125w	ORG
ap-1743	68	4	10w	DATE
ap-1743	68	5	qar	GPE
ap-1743	68	6	35 sccm	QUANTITY
ap-1743	69	1	25 sccm	QUANTITY
ap-1743	70	1	15min	CARDINAL
ap-1743	71	1	xrd	ORG
ap-1743	71	2	156	CARDINAL
ap-1743	72	1	53	CARDINAL
ap-1743	73	1	2/2013	CARDINAL
ap-1743	76	1	0.01 0.02 0.03 0.04 0.05	QUANTITY
ap-1743	77	1	2	CARDINAL
ap-1743	77	2	3	CARDINAL
ap-1743	77	3	125w	CARDINAL
ap-1743	79	1	4	CARDINAL
ap-1743	80	1	4a	CARDINAL
ap-1743	82	1	up to	CARDINAL
ap-1743	82	2	022	CARDINAL
ap-1743	83	1	4b	CARDINAL
ap-1743	84	1	820	CARDINAL
ap-1743	85	1	111	CARDINAL
ap-1743	85	2	200	CARDINAL
ap-1743	85	3	220	CARDINAL
ap-1743	85	4	311	CARDINAL
ap-1743	85	5	400	CARDINAL
ap-1743	85	6	200	CARDINAL
ap-1743	85	7	4d	CARDINAL
ap-1743	87	1	5	CARDINAL
ap-1743	87	2	6	CARDINAL
ap-1743	88	1	ni	GPE
ap-1743	88	2	ni	PERSON
ap-1743	89	1	125w	ORG
ap-1743	89	2	11w	DATE
ap-1743	89	3	qar	GPE
ap-1743	89	4	50 sccm	QUANTITY
ap-1743	90	1	10 sccm	QUANTITY
ap-1743	91	1	6.0	CARDINAL
ap-1743	92	1	0.11	CARDINAL
ap-1743	92	2	ni	GPE
ap-1743	92	3	13.2	CARDINAL
ap-1743	92	4	0.4	CARDINAL
ap-1743	92	5	1 khz	QUANTITY
ap-1743	93	1	ni	PERSON
ap-1743	93	2	6.0	CARDINAL
ap-1743	93	3	0.06	CARDINAL
ap-1743	93	4	6.8	CARDINAL
ap-1743	93	5	0.34	CARDINAL
ap-1743	93	6	1 khz	QUANTITY
ap-1743	95	1	820	CARDINAL
ap-1743	96	1	7	CARDINAL
ap-1743	96	2	8	CARDINAL
ap-1743	96	3	ni	PERSON
ap-1743	96	4	850	CARDINAL
ap-1743	96	5	15min	CARDINAL
ap-1743	97	1	20	CARDINAL
ap-1743	97	2	0.05	CARDINAL
ap-1743	97	3	25	CARDINAL
ap-1743	97	4	4	CARDINAL
ap-1743	97	5	700	CARDINAL
ap-1743	97	6	800	CARDINAL
ap-1743	97	7	15min	CARDINAL
ap-1743	99	1	10 10 10101010 5 0.2	TIME
ap-1743	101	1	5	CARDINAL
ap-1743	101	2	ni	GPE
ap-1743	102	1	10 2 5	CARDINAL
ap-1743	104	1	ε l	ORG
ap-1743	105	1	10 10 101010 0.2	TIME
ap-1743	105	2	0.4	CARDINAL
ap-1743	105	3	6	CARDINAL
ap-1743	105	4	ni	GPE
ap-1743	107	1	13	CARDINAL
ap-1743	108	1	0.04 ÷ 0.1	MONEY
ap-1743	109	1	ni	PERSON
ap-1743	109	2	850	CARDINAL
ap-1743	109	3	dc	GPE
ap-1743	110	1	9	CARDINAL
ap-1743	113	1	9b	CARDINAL
ap-1743	114	1	dc	GPE
ap-1743	114	2	semicon157 dmitriy a. golosov	ORG
ap-1743	114	3	sergey m. zavatskiy	PERSON
ap-1743	114	4	sergey n. melnikov	PERSON
ap-1743	114	5	10	CARDINAL
ap-1743	114	6	14 0.02	CARDINAL
ap-1743	114	7	4 5 6	TIME
ap-1743	117	1	2 l	DATE
ap-1743	118	1	7	CARDINAL
ap-1743	118	2	850	CARDINAL
ap-1743	118	3	15min	CARDINAL
ap-1743	119	1	10 10 10101010	TIME
ap-1743	119	2	14 0.02 12	CARDINAL
ap-1743	119	3	4 5 6	TIME
ap-1743	121	1	2 l	DATE
ap-1743	122	1	8	CARDINAL
ap-1743	123	1	ni	PERSON
ap-1743	123	2	850	CARDINAL
ap-1743	123	3	15min	CARDINAL
ap-1743	126	1	520 530 540	QUANTITY
ap-1743	128	1	9	CARDINAL
ap-1743	129	1	850	CARDINAL
ap-1743	129	2	15min	CARDINAL
ap-1743	136	1	-6	DATE
ap-1743	136	2	10	CARDINAL
ap-1743	137	1	ni	GPE
ap-1743	137	2	850	CARDINAL
ap-1743	137	3	15min	CARDINAL
ap-1743	137	4	1.0	CARDINAL
ap-1743	138	1	zirconia	DATE
ap-1743	138	2	850	CARDINAL
ap-1743	138	3	1 khz	QUANTITY
ap-1743	138	4	up to	CARDINAL
ap-1743	139	1	800	CARDINAL
ap-1743	139	2	0.0196 s/cm	MONEY
ap-1743	140	1	10	CARDINAL
ap-1743	141	1	800	CARDINAL
ap-1743	141	2	12	CARDINAL
ap-1743	142	1	4	CARDINAL
ap-1743	143	1	820	CARDINAL
ap-1743	143	2	700	CARDINAL
ap-1743	144	1	20	CARDINAL
ap-1743	144	2	0.05	CARDINAL
ap-1743	146	1	0.0196 s/cm	MONEY
ap-1743	146	2	800	CARDINAL
ap-1743	147	1	1	CARDINAL
ap-1743	147	2	j. w. bae	PERSON
ap-1743	148	1	2000	DATE
ap-1743	149	1	2	CARDINAL
ap-1743	149	2	a. barda	PERSON
ap-1743	150	1	75(6):2902–2910, 1994	DATE
ap-1743	151	1	3	CARDINAL
ap-1743	151	2	d. beckel	PERSON
ap-1743	153	1	173:325–345, 2007	DATE
ap-1743	154	1	158	CARDINAL
ap-1743	155	1	53	CARDINAL
ap-1743	156	1	2/2013	CARDINAL
ap-1743	156	2	4	CARDINAL
ap-1743	156	3	a. dubbe	PERSON
ap-1743	157	1	ionic micro	ORG
ap-1743	158	1	88:138–148	CARDINAL
ap-1743	158	2	2003	DATE
ap-1743	159	1	5	CARDINAL
ap-1743	159	2	m. hartmanova	PERSON
ap-1743	159	3	zirconia	DATE
ap-1743	160	1	345:330–337, 1999	DATE
ap-1743	161	1	6	CARDINAL
ap-1743	161	2	j. van herle	PERSON
ap-1743	162	1	132:333–342, 2000	DATE
ap-1743	163	1	7	CARDINAL
ap-1743	163	2	t. koch	PERSON
ap-1743	163	3	p. ziemann	PERSON
ap-1743	165	1	303:122–127, 1997	DATE
ap-1743	166	1	8	CARDINAL
ap-1743	166	2	l. mechin	PERSON
ap-1743	166	3	yba2cu3o7−δ	ORG
ap-1743	167	1	269(1–2):124–130, 1996	DATE
ap-1743	168	1	9	CARDINAL
ap-1743	168	2	l. r. pederson	PERSON
ap-1743	168	3	singh	GPE
ap-1743	168	4	zhou x.-d.	PERSON
ap-1743	170	1	80:1066–1083, 2006	DATE
ap-1743	171	1	10	CARDINAL
ap-1743	171	2	l. r. pederson	PERSON
ap-1743	171	3	singh	GPE
ap-1743	172	1	zhou	PERSON
ap-1743	175	1	80:1066–1083, 2006	DATE
ap-1743	176	1	11	CARDINAL
ap-1743	176	2	k. sasaki	PERSON
ap-1743	177	1	66:403–408, 2002	DATE
ap-1743	178	1	12	CARDINAL
ap-1743	178	2	s.c. singhal	ORG
ap-1743	180	1	oxford	NORP
ap-1743	180	2	2003	DATE
ap-1743	181	1	13	CARDINAL
ap-1743	181	2	second	ORDINAL
ap-1743	182	1	131:79–96, 2000	DATE
ap-1743	183	1	14	CARDINAL
ap-1743	183	2	s. yu	PERSON
ap-1743	183	3	yttria-stabilized-zirconia	PERSON
ap-1743	184	1	85:212–218, 2002	DATE
ap-1743	185	1	15	CARDINAL
ap-1743	185	2	j. zhu	PERSON
ap-1743	185	3	z.g. liu	PERSON
ap-1743	187	1	57(26–27):4297–4301	CARDINAL
ap-1743	187	2	2003	DATE
ap-1743	188	1	159	CARDINAL
ap-1743	188	2	53(2):155–159	CARDINAL
ap-1743	188	3	2013 1	DATE
ap-1743	188	4	2	CARDINAL
ap-1743	188	5	3	CARDINAL
ap-1743	188	6	4	CARDINAL