id	sid	eid	entity	type
ap-3766	1	1	acta polytechnica doi:10.14311	PERSON
ap-3766	1	2	56(6):425–431	CARDINAL
ap-3766	1	3	2016	DATE
ap-3766	1	4	czech technical university	ORG
ap-3766	1	5	prague	GPE
ap-3766	1	6	2016	CARDINAL
ap-3766	1	7	http://ojs.cvut.cz/ojs/index.php/ap	PRODUCT
ap-3766	1	8	galina a. bleykher	PERSON
ap-3766	1	9	dmitrii v. sidelev	PERSON
ap-3766	1	10	p. krivobokov institute of physics and technology	ORG
ap-3766	1	11	tomsk polytechnic university	ORG
ap-3766	1	12	lenin avenue 2a	PERSON
ap-3766	1	13	russia	GPE
ap-3766	9	1	5	CARDINAL
ap-3766	14	1	1	CARDINAL
ap-3766	14	2	recent decades	DATE
ap-3766	17	1	100 to 1000	CARDINAL
ap-3766	24	1	1	CARDINAL
ap-3766	27	1	2	CARDINAL
ap-3766	30	1	3-5	CARDINAL
ap-3766	37	1	425	CARDINAL
ap-3766	37	2	http://ojs.cvut.cz/ojs/index.php/ap a. o. borduleva	PERSON
ap-3766	37	3	g. a. bleykher	PERSON
ap-3766	37	4	d. v. sidelev	PERSON
ap-3766	37	5	krivobokov acta polytechnica	PERSON
ap-3766	37	6	1	CARDINAL
ap-3766	38	1	1	CARDINAL
ap-3766	39	1	6-8	CARDINAL
ap-3766	40	1	8	CARDINAL
ap-3766	46	1	2	CARDINAL
ap-3766	49	1	peter sigmund’s	PERSON
ap-3766	49	2	1	CARDINAL
ap-3766	50	1	1	CARDINAL
ap-3766	51	1	m2)2n0us	PERSON
ap-3766	51	2	1	CARDINAL
ap-3766	51	3	n0	GPE
ap-3766	52	1	9–12	CARDINAL
ap-3766	57	1	13	CARDINAL
ap-3766	57	2	1	CARDINAL
ap-3766	57	3	2	CARDINAL
ap-3766	57	4	wherem	PERSON
ap-3766	57	5	k	PERSON
ap-3766	58	1	∗	CARDINAL
ap-3766	62	1	56	CARDINAL
ap-3766	63	1	6/2016	CARDINAL
ap-3766	64	1	∂2	ORG
ap-3766	65	1	+ 1	DATE
ap-3766	67	1	∂r2	ORG
ap-3766	67	2	3	CARDINAL
ap-3766	72	1	4	CARDINAL
ap-3766	74	1	5	CARDINAL
ap-3766	74	2	1	CARDINAL
ap-3766	76	1	4	CARDINAL
ap-3766	76	2	q(r	EVENT
ap-3766	77	1	14	CARDINAL
ap-3766	80	1	br(r	PERSON
ap-3766	82	1	2π	CARDINAL
ap-3766	83	1	0	CARDINAL
ap-3766	83	2	6	CARDINAL
ap-3766	88	1	4	DATE
ap-3766	88	2	qrad	ORG
ap-3766	91	1	two	CARDINAL
ap-3766	95	1	3	CARDINAL
ap-3766	95	2	1 khz	QUANTITY
ap-3766	96	1	102	CARDINAL
ap-3766	96	2	10	CARDINAL
ap-3766	101	1	two	CARDINAL
ap-3766	102	1	ν	NORP
ap-3766	105	1	first	ORDINAL
ap-3766	110	1	dc	GPE
ap-3766	111	1	two	CARDINAL
ap-3766	111	2	2	CARDINAL
ap-3766	113	1	427	CARDINAL
ap-3766	113	2	g. a. bleykher	PERSON
ap-3766	113	3	d. v. sidelev	PERSON
ap-3766	114	1	3	CARDINAL
ap-3766	114	2	1900w	DATE
ap-3766	115	1	5 cm	QUANTITY
ap-3766	115	2	0.6 cm	QUANTITY
ap-3766	116	1	2	CARDINAL
ap-3766	116	2	one	CARDINAL
ap-3766	116	3	1 khz	QUANTITY
ap-3766	116	4	20 %	PERCENT
ap-3766	117	1	5 cm	QUANTITY
ap-3766	117	2	0.6 cm	QUANTITY
ap-3766	119	1	2	CARDINAL
ap-3766	119	2	1 khz	QUANTITY
ap-3766	119	3	20 %	PERCENT
ap-3766	120	1	24.2w	CARDINAL
ap-3766	131	1	3	CARDINAL
ap-3766	131	2	r.	NORP
ap-3766	132	1	3b	CARDINAL
ap-3766	136	1	3	CARDINAL
ap-3766	138	1	3b	CARDINAL
ap-3766	139	1	4	CARDINAL
ap-3766	142	1	428	CARDINAL
ap-3766	143	1	56	CARDINAL
ap-3766	144	1	6/2016	CARDINAL
ap-3766	144	2	4	CARDINAL
ap-3766	145	1	twc	GPE
ap-3766	145	2	8 cm	QUANTITY
ap-3766	145	3	vdep	ORG
ap-3766	145	4	wc dep	GPE
ap-3766	145	5	dep	GPE
ap-3766	146	1	5 cm	QUANTITY
ap-3766	146	2	0.6 cm	QUANTITY
ap-3766	147	1	1c	CARDINAL
ap-3766	147	2	0.5 cm	QUANTITY
ap-3766	147	3	0.2 cm	QUANTITY
ap-3766	148	1	14	CARDINAL
ap-3766	148	2	15	CARDINAL
ap-3766	149	1	5	CARDINAL
ap-3766	150	1	wc	ORG
ap-3766	151	1	1b	CARDINAL
ap-3766	151	2	0.5 cm	QUANTITY
ap-3766	151	3	0.2 cm	QUANTITY
ap-3766	154	1	15	CARDINAL
ap-3766	156	1	1 khz and	QUANTITY
ap-3766	156	2	10 khz	QUANTITY
ap-3766	156	3	20%	PERCENT
ap-3766	157	1	4	CARDINAL
ap-3766	159	1	4	CARDINAL
ap-3766	160	1	5	CARDINAL
ap-3766	161	1	one	CARDINAL
ap-3766	161	2	ea	CARDINAL
ap-3766	161	3	wc	ORG
ap-3766	163	1	≈ 24.2	CARDINAL
ap-3766	165	1	about five	CARDINAL
ap-3766	167	1	ea	CARDINAL
ap-3766	168	1	ea	CARDINAL
ap-3766	168	2	7	CARDINAL
ap-3766	168	3	5	CARDINAL
ap-3766	169	1	ea	CARDINAL
ap-3766	169	2	224	CARDINAL
ap-3766	170	1	42.2 ev	MONEY
ap-3766	171	1	6	CARDINAL
ap-3766	176	1	about 0.9%	PERCENT
ap-3766	177	1	429	CARDINAL
ap-3766	177	2	a. o. borduleva	PERSON
ap-3766	177	3	g. a. bleykher	PERSON
ap-3766	177	4	d. v. sidelev	PERSON
ap-3766	178	1	max	PERSON
ap-3766	178	2	12.7	CARDINAL
ap-3766	178	3	1.66	CARDINAL
ap-3766	178	4	58.6 1.2 360	CARDINAL
ap-3766	178	5	980	CARDINAL
ap-3766	178	6	1	CARDINAL
ap-3766	179	1	max	PERSON
ap-3766	180	1	1a	CARDINAL
ap-3766	181	1	1 khz	QUANTITY
ap-3766	181	2	20 %	PERCENT
ap-3766	182	1	6	CARDINAL
ap-3766	183	1	wc	ORG
ap-3766	183	2	1c	CARDINAL
ap-3766	184	1	qrad	ORG
ap-3766	185	1	0.6 cm	QUANTITY
ap-3766	186	1	a few percent	PERCENT
ap-3766	187	1	5	CARDINAL
ap-3766	189	1	1	CARDINAL
ap-3766	194	1	4.	CARDINAL
ap-3766	199	1	about five	CARDINAL
ap-3766	202	1	one	CARDINAL
ap-3766	203	1	about 5	CARDINAL
ap-3766	206	1	the russian foundation	ORG
ap-3766	206	2	15-08-01632	CARDINAL
ap-3766	207	1	1	CARDINAL
ap-3766	207	2	i. springer berlin heidelberg	PERSON
ap-3766	208	1	r.	NORP
ap-3766	208	2	1981	DATE
ap-3766	209	1	540-10521	CARDINAL
ap-3766	209	2	2	CARDINAL
ap-3766	210	1	j. vac	PERSON
ap-3766	211	1	sci	ORG
ap-3766	211	2	technol	PERSON
ap-3766	212	1	28	CARDINAL
ap-3766	212	2	783	CARDINAL
ap-3766	212	3	2010	DATE
ap-3766	213	1	doi:10.1116/1.3299267 430	PERSON
ap-3766	214	1	56	CARDINAL
ap-3766	215	1	6/2016	CARDINAL
ap-3766	215	2	3	CARDINAL
ap-3766	215	3	g.a. et al	PERSON
ap-3766	216	1	russ phys j 58	PERSON
ap-3766	216	2	431	CARDINAL
ap-3766	216	3	2015	DATE
ap-3766	218	1	4	CARDINAL
ap-3766	218	2	g.a. et al	PERSON
ap-3766	222	1	60	CARDINAL
ap-3766	222	2	1790, 2015	DATE
ap-3766	223	1	doi:10.1134	PERSON
ap-3766	224	1	5	CARDINAL
ap-3766	224	2	g.a. et al	PERSON
ap-3766	226	1	124	CARDINAL
ap-3766	226	2	11	CARDINAL
ap-3766	226	3	2016	DATE
ap-3766	227	1	doi:10.1016	GPE
ap-3766	228	1	6	CARDINAL
ap-3766	228	2	j. et al	PERSON
ap-3766	230	1	santa clara	GPE
ap-3766	230	2	219	CARDINAL
ap-3766	230	3	2009	DATE
ap-3766	231	1	2-s2.0-77749242269&origin	QUANTITY
ap-3766	232	1	7	CARDINAL
ap-3766	232	2	d. et al	PERSON
ap-3766	236	1	technol	PERSON
ap-3766	237	1	201	CARDINAL
ap-3766	237	2	2276-2281	CARDINAL
ap-3766	237	3	2006	DATE
ap-3766	238	1	10.1016	CARDINAL
ap-3766	239	1	8] čyvienė	DATE
ap-3766	239	2	j. et al	PERSON
ap-3766	240	1	j. phys	PERSON
ap-3766	241	1	44	CARDINAL
ap-3766	241	2	353–358	CARDINAL
ap-3766	241	3	2004	DATE
ap-3766	243	1	9	CARDINAL
ap-3766	243	2	behrish	NORP
ap-3766	243	3	r. et al	PERSON
ap-3766	243	4	nucl	PERSON
ap-3766	244	1	instr	PERSON
ap-3766	248	1	82	CARDINAL
ap-3766	248	2	255	CARDINAL
ap-3766	248	3	1993	DATE
ap-3766	249	1	10	CARDINAL
ap-3766	249	2	m.d. et al	PERSON
ap-3766	250	1	sn	ORG
ap-3766	250	2	he+	ORG
ap-3766	250	3	335	CARDINAL
ap-3766	250	4	115–120	CARDINAL
ap-3766	251	1	doi:10.1016/j.jnucmat.2004.06.009	PERSON
ap-3766	252	1	11	CARDINAL
ap-3766	252	2	a. et al	PERSON
ap-3766	254	1	290	CARDINAL
ap-3766	254	2	2001	DATE
ap-3766	255	1	doi:10.1016	GPE
ap-3766	255	2	3115(00)00616	CARDINAL
ap-3766	255	3	12	CARDINAL
ap-3766	255	4	bleykher g.a	PERSON
ap-3766	256	1	17	CARDINAL
ap-3766	256	2	1	CARDINAL
ap-3766	257	1	24-29, 2008	DATE
ap-3766	257	2	008-1003	CARDINAL
ap-3766	257	3	13	CARDINAL
ap-3766	257	4	1	CARDINAL
ap-3766	257	5	l. i. maissel	PERSON
ap-3766	257	6	r. glang	PERSON
ap-3766	258	1	mcgraw-hill book company	ORG
ap-3766	258	2	1970	DATE
ap-3766	259	1	14	CARDINAL
ap-3766	259	2	bleykher g.a	PERSON
ap-3766	261	1	132	CARDINAL
ap-3766	261	2	62-69	CARDINAL
ap-3766	261	3	2016	DATE
ap-3766	262	1	doi:10.1016	GPE
ap-3766	263	1	15	CARDINAL
ap-3766	263	2	j. et al	PERSON
ap-3766	264	1	surface & coatings technology	ORG
ap-3766	264	2	206	CARDINAL
ap-3766	264	3	1155–1159, 2011	DATE
ap-3766	265	1	doi:10.1016	GPE
ap-3766	265	2	431	CARDINAL
ap-3766	265	3	http://dx.doi.org/10.1007/s11182-015-0517-6	ORG
ap-3766	265	4	http://dx.doi.org/10.1134/s1063784215120026 http://dx.doi.org/10.1016/j.vacuum.2015.11.009	WORK_OF_ART
ap-3766	265	5	https://www.scopus.com/record/display.uri?eid=2-s2.0-77749242269&origin=inward&txgid=0	PERSON
ap-3766	266	1	56(6):425–431	CARDINAL
ap-3766	266	2	2016 1	DATE
ap-3766	266	3	2	CARDINAL
ap-3766	266	4	3	CARDINAL
ap-3766	266	5	4	CARDINAL