id	sid	eid	entity	type
ap-398	1	1	acta polytechnica vol	PERSON
ap-398	2	1	43	CARDINAL
ap-398	3	1	m. zoriy	PERSON
ap-398	3	2	j. gurovid	PERSON
ap-398	3	3	s. konvidkov6,i	PERSON
ap-398	4	1	htittel dlc (	PERSON
ap-398	8	1	one	CARDINAL
ap-398	9	1	microhardne ss	ORG
ap-398	10	1	2	CARDINAL
ap-398	12	1	plasma cvd	PERSON
ap-398	14	1	4	CARDINAL
ap-398	15	1	one	CARDINAL
ap-398	16	1	2	CARDINAL
ap-398	16	2	lll	PERSON
ap-398	16	3	0.9 7o	CARDINAL
ap-398	16	4	4'14	CARDINAL
ap-398	16	5	6'l	CARDINAL
ap-398	16	6	w	ORG
ap-398	16	7	5	CARDINAL
ap-398	16	8	2.02	CARDINAL
ap-398	16	9	voy.these	NORP
ap-398	16	10	two	CARDINAL
ap-398	18	1	1	CARDINAL
ap-398	18	2	o.r biu	PERSON
ap-398	19	1	' 2'	DATE
ap-398	22	1	7.1.10-l	CARDINAL
ap-398	22	2	27	CARDINAL
ap-398	23	1	43	CARDINAL
ap-398	24	1	6	CARDINAL
ap-398	26	1	14 13 12	DATE
ap-398	28	1	9 oa	QUANTITY
ap-398	30	1	400	CARDINAL
ap-398	30	2	700	CARDINAL
ap-398	31	1	700	CARDINAL
ap-398	32	1	2	CARDINAL
ap-398	33	1	3	CARDINAL
ap-398	33	2	50	CARDINAL
ap-398	33	3	mn	GPE
ap-398	33	4	8	CARDINAL
ap-398	34	1	the czech republic	GPE
ap-398	34	2	106/02/1 194	DATE
ap-398	34	3	t 12	DATE
ap-398	35	1	ill robertson	PERSON
ap-398	35	2	j.: adv.	PERSON
ap-398	35	3	35, 1986	DATE
ap-398	35	4	317	CARDINAL
ap-398	36	1	a. h.	PERSON
ap-398	36	2	diamond relat	PERSON
ap-398	38	1	l. 1992	PERSON
ap-398	40	1	j.	PERSON
ap-398	40	2	babu	GPE
ap-398	40	3	s. v.	PERSON
ap-398	40	4	1995	DATE
ap-398	40	5	92	CARDINAL
ap-398	41	1	l4l nagai	PERSON
ap-398	41	2	ishitani	PERSON
ap-398	41	3	a.	GPE
ap-398	41	4	kuroda	GPE
ap-398	41	5	h.: journal	ORG
ap-398	42	1	1990	DATE
ap-398	43	1	t5l harry	PERSON
ap-398	43	2	zukotynski	PERSON
ap-398	44	1	sci	ORG
ap-398	44	2	technol	PERSON
ap-398	44	3	a9	ORG
ap-398	44	4	1991	DATE
ap-398	45	1	giles	PERSON
ap-398	45	2	s.	PERSON
ap-398	45	3	rao	PERSON
ap-398	45	4	r.	NORP
ap-398	47	1	lett.	PERSON
ap-398	47	2	1993	DATE
ap-398	48	1	mckenzie	GPE
ap-398	48	2	d. r.	PERSON
ap-398	48	3	d.	NORP
ap-398	48	4	pailthorpe	GPE
ap-398	48	5	b.a.	PERSON
ap-398	50	1	lett.	PERSON
ap-398	50	2	67, 1991	DATE
ap-398	51	1	konvickova	PERSON
ap-398	51	2	s.	PERSON
ap-398	51	3	d.	NORP
ap-398	51	4	acta mechanica slovaca	PERSON
ap-398	51	5	1989	DATE
ap-398	51	6	p.39	ORG
ap-398	51	7	28	CARDINAL
ap-398	52	1	dmytro palamarchuk e	PERSON
ap-398	55	1	miroslav zoriy	PERSON
ap-398	56	1	jdn gurovii	PERSON
ap-398	56	2	+420 224	CARDINAL
ap-398	56	3	355	CARDINAL
ap-398	56	4	600	CARDINAL
ap-398	56	5	gurovic@fsid.cvut.cz doc	PERSON
ap-398	58	1	franti5ek cerny	ORG
ap-398	58	2	csc	ORG
ap-398	58	3	+420 224	CARDINAL
ap-398	58	4	437	CARDINAL
ap-398	60	1	s. konviikovd	PERSON
ap-398	60	2	csc	ORG
ap-398	60	3	5ll	ORDINAL
ap-398	60	4	konvicko@fsid.cvut.cz	NORP
ap-398	60	5	czech	NORP
ap-398	60	6	prague	GPE
ap-398	60	7	6	CARDINAL
ap-398	60	8	czech	NORP
ap-398	60	9	doc	ORG
ap-398	62	1	ivan htttel	PERSON
ap-398	62	2	csc	ORG
ap-398	62	3	+420224353205 e-mail	PERSON
ap-398	62	4	huttel@vscht.cz	NORP
ap-398	62	5	3 166 28	CARDINAL
ap-398	62	6	6	CARDINAL
ap-398	62	7	czech	NORP
ap-398	62	8	0aaa	CARDINAL
ap-398	62	9	27	CARDINAL
ap-398	62	10	28	CARDINAL