id	sid	eid	entity	type
ap-5383	1	1	acta polytechnica doi:10.14311	PERSON
ap-5383	1	2	59(6):587–592	CARDINAL
ap-5383	1	3	2019	DATE
ap-5383	1	4	czech technical university	ORG
ap-5383	1	5	prague	GPE
ap-5383	1	6	2019	DATE
ap-5383	1	7	sxr	PRODUCT
ap-5383	1	8	milan	GPE
ap-5383	1	9	czech	NORP
ap-5383	1	10	prague	GPE
ap-5383	1	11	sitná 3105	ORG
ap-5383	1	12	kladno	GPE
ap-5383	1	13	czech	NORP
ap-5383	1	14	university of technology	ORG
ap-5383	1	15	institute of optoelectronics	ORG
ap-5383	1	16	sylwestra kaliskiego	PERSON
ap-5383	1	17	2	CARDINAL
ap-5383	1	18	00	CARDINAL
ap-5383	1	19	49	CARDINAL
ap-5383	1	20	poland ∗	ORG
ap-5383	1	21	sarka.salacova@fjfi.cvut.cz	PERSON
ap-5383	2	1	13	CARDINAL
ap-5383	3	1	krypton	ORG
ap-5383	5	1	krypton	ORG
ap-5383	6	1	1.	CARDINAL
ap-5383	6	2	sxr	ORG
ap-5383	6	3	about 250	CARDINAL
ap-5383	7	1	1	CARDINAL
ap-5383	8	1	1-100	CARDINAL
ap-5383	12	1	sxr	PRODUCT
ap-5383	12	2	2–4	CARDINAL
ap-5383	12	3	2.3	CARDINAL
ap-5383	12	4	4.4	CARDINAL
ap-5383	14	1	2.88	CARDINAL
ap-5383	14	2	8	CARDINAL
ap-5383	19	1	sxr	PRODUCT
ap-5383	21	1	13.4	CARDINAL
ap-5383	22	1	institute of optoelectronics	ORG
ap-5383	22	2	warsaw	GPE
ap-5383	22	3	10	CARDINAL
ap-5383	23	1	2	CARDINAL
ap-5383	24	1	11	CARDINAL
ap-5383	24	2	12	CARDINAL
ap-5383	27	1	1	CARDINAL
ap-5383	31	1	∆z	PERSON
ap-5383	32	1	3.	CARDINAL
ap-5383	33	1	z.	PERSON
ap-5383	33	2	587	CARDINAL
ap-5383	33	3	https://ojs.cvut.cz/ojs/index.php/ap	ORG
ap-5383	34	1	salačová	GPE
ap-5383	34	2	p. wachulak	PERSON
ap-5383	34	3	m. tatíček	PERSON
ap-5383	34	4	m. vrbová acta polytechnica	PERSON
ap-5383	34	5	1	CARDINAL
ap-5383	36	1	∫ ρ(x	PERSON
ap-5383	36	2	y,z)dy	ORG
ap-5383	36	3	1	CARDINAL
ap-5383	36	4	ρ(x	PERSON
ap-5383	37	1	∆z	PERSON
ap-5383	37	2	x,∆z	ORG
ap-5383	37	3	∫ ρ(x	PERSON
ap-5383	37	4	y,∆z)dy	GPE
ap-5383	38	1	2	CARDINAL
ap-5383	39	1	r2 σ2	ORG
ap-5383	39	2	σ	ORG
ap-5383	41	1	3	CARDINAL
ap-5383	41	2	tg(x,∆z	ORG
ap-5383	43	1	4	CARDINAL
ap-5383	43	2	0	CARDINAL
ap-5383	44	1	√ π lntg(0,∆z	PERSON
ap-5383	44	2	5	CARDINAL
ap-5383	45	1	e−1	ORG
ap-5383	46	1	6	CARDINAL
ap-5383	46	2	4	CARDINAL
ap-5383	47	1	2	CARDINAL
ap-5383	47	2	640mm	QUANTITY
ap-5383	47	3	155mm	QUANTITY
ap-5383	47	4	ccd	PRODUCT
ap-5383	48	1	1064	CARDINAL
ap-5383	48	2	2	CARDINAL
ap-5383	49	1	20mm	QUANTITY
ap-5383	49	2	10mm	QUANTITY
ap-5383	49	3	13	CARDINAL
ap-5383	50	1	13	CARDINAL
ap-5383	51	1	ccd	ORG
ap-5383	51	2	512×512 square pixels	QUANTITY
ap-5383	51	3	24µm	DATE
ap-5383	52	1	13	CARDINAL
ap-5383	53	1	5	CARDINAL
ap-5383	53	2	5.1	CARDINAL
ap-5383	55	1	3	CARDINAL
ap-5383	58	1	∆z	PRODUCT
ap-5383	58	2	0.5mm	QUANTITY
ap-5383	59	1	3b	CARDINAL
ap-5383	60	1	5	CARDINAL
ap-5383	60	2	5	CARDINAL
ap-5383	61	1	436	CARDINAL
ap-5383	62	1	5.3176	CARDINAL
ap-5383	62	2	104 cm2	QUANTITY
ap-5383	62	3	13.4	CARDINAL
ap-5383	62	4	14	CARDINAL
ap-5383	62	5	4.49	CARDINAL
ap-5383	62	6	10−4	CARDINAL
ap-5383	63	1	5.2	CARDINAL
ap-5383	64	1	krypton	ORG
ap-5383	65	1	4	CARDINAL
ap-5383	65	2	1	CARDINAL
ap-5383	65	3	588	CARDINAL
ap-5383	66	1	59	CARDINAL
ap-5383	67	1	6/2019	CARDINAL
ap-5383	67	2	sxr	PRODUCT
ap-5383	69	1	3	CARDINAL
ap-5383	70	1	10	CARDINAL
ap-5383	71	1	∆z	PRODUCT
ap-5383	71	2	0.5mm	QUANTITY
ap-5383	74	1	4	CARDINAL
ap-5383	75	1	krypton	PERSON
ap-5383	75	2	∆z	PRODUCT
ap-5383	75	3	0.5mm	QUANTITY
ap-5383	75	4	10	CARDINAL
ap-5383	78	1	7 5.3176×104	PERCENT
ap-5383	78	2	436	CARDINAL
ap-5383	78	3	18	CARDINAL
ap-5383	78	4	398	CARDINAL
ap-5383	78	5	36	CARDINAL
ap-5383	79	1	427	CARDINAL
ap-5383	79	2	1	CARDINAL
ap-5383	80	1	589	CARDINAL
ap-5383	81	1	salačová	GPE
ap-5383	81	2	p. wachulak	PERSON
ap-5383	81	3	m. tatíček	PERSON
ap-5383	81	4	m. vrbová acta polytechnica	PERSON
ap-5383	83	1	5	CARDINAL
ap-5383	84	1	10bar	CARDINAL
ap-5383	84	2	∆z	PRODUCT
ap-5383	84	3	0.5mm	QUANTITY
ap-5383	85	1	5.3	CARDINAL
ap-5383	85	2	sxr	PRODUCT
ap-5383	89	1	5a	CARDINAL
ap-5383	89	2	sxr	PRODUCT
ap-5383	89	3	several thousand	CARDINAL
ap-5383	91	1	5b	CARDINAL
ap-5383	91	2	∆z	PRODUCT
ap-5383	91	3	0.5mm	QUANTITY
ap-5383	93	1	5	CARDINAL
ap-5383	94	1	5.4	CARDINAL
ap-5383	97	1	6	CARDINAL
ap-5383	100	1	6	CARDINAL
ap-5383	100	2	sxr	PRODUCT
ap-5383	101	1	three	CARDINAL
ap-5383	102	1	krypton	ORG
ap-5383	104	1	10bar	CARDINAL
ap-5383	104	2	1	CARDINAL
ap-5383	106	1	0.54mm	QUANTITY
ap-5383	107	1	∆z	PRODUCT
ap-5383	107	2	0.5mm	QUANTITY
ap-5383	107	3	around 0.4mm	QUANTITY
ap-5383	108	1	sxr	ORG
ap-5383	109	1	institute of optoelectronics	ORG
ap-5383	109	2	warsaw	GPE
ap-5383	109	3	15	CARDINAL
ap-5383	110	1	chapter 5.3	LAW
ap-5383	112	1	∆z	PERSON
ap-5383	113	1	6	CARDINAL
ap-5383	116	1	6	CARDINAL
ap-5383	116	2	10bar	CARDINAL
ap-5383	119	1	59	CARDINAL
ap-5383	120	1	6/2019	CARDINAL
ap-5383	120	2	sxr	PRODUCT
ap-5383	120	3	6	CARDINAL
ap-5383	121	1	0.5mm	QUANTITY
ap-5383	121	2	1	CARDINAL
ap-5383	121	3	2	CARDINAL
ap-5383	122	1	ρ0is	CARDINAL
ap-5383	123	1	first	ORDINAL
ap-5383	123	2	1000	CARDINAL
ap-5383	126	1	1	CARDINAL
ap-5383	126	2	d. attwood	PERSON
ap-5383	126	3	soft x	PERSON
ap-5383	127	1	cambridge university press	ORG
ap-5383	127	2	cambridge	GPE
ap-5383	127	3	1999	DATE
ap-5383	129	1	2	CARDINAL
ap-5383	129	2	a. bayer	PERSON
ap-5383	129	3	f. barkusky	PERSON
ap-5383	129	4	s. döring	PERSON
ap-5383	130	1	2010	DATE
ap-5383	130	2	2009	DATE
ap-5383	132	1	3	CARDINAL
ap-5383	132	2	w. wachulak	PERSON
ap-5383	132	3	a. bartnik	PERSON
ap-5383	132	4	m. skorupka	PERSON
ap-5383	132	5	sxr	ORG
ap-5383	133	1	111(2):239–247, 2013	DATE
ap-5383	135	1	4	CARDINAL
ap-5383	135	2	h. m. hertz	PERSON
ap-5383	135	3	m. berglund	PERSON
ap-5383	135	4	g. a. johansson	PERSON
ap-5383	137	1	aip	ORG
ap-5383	137	2	507(1):721–725	CARDINAL
ap-5383	137	3	2000	DATE
ap-5383	138	1	doi:10.1063/1.1291239	PERSON
ap-5383	139	1	5	CARDINAL
ap-5383	139	2	a. torrisi	PERSON
ap-5383	139	3	p. wachulak	PERSON
ap-5383	139	4	m. nawaz	PERSON
ap-5383	139	5	sxr	ORG
ap-5383	140	1	acta physica polonica	PERSON
ap-5383	140	2	2016	DATE
ap-5383	142	1	6	CARDINAL
ap-5383	142	2	j. kirz	PERSON
ap-5383	142	3	c. jacobsen	PERSON
ap-5383	142	4	m. howells	PERSON
ap-5383	142	5	soft x-ray	PERSON
ap-5383	143	1	quarterly	DATE
ap-5383	143	2	biophysics 28(1):33–130, 1995	ORG
ap-5383	145	1	7	CARDINAL
ap-5383	145	2	a. bartnik	PERSON
ap-5383	145	3	h. fiedorowicz	PERSON
ap-5383	147	1	b. lai	PERSON
ap-5383	147	2	a. somogyi	PERSON
ap-5383	147	3	11112	DATE
ap-5383	148	1	117	CARDINAL
ap-5383	148	2	123	CARDINAL
ap-5383	149	1	spie	ORG
ap-5383	149	2	2019	DATE
ap-5383	151	1	8	CARDINAL
ap-5383	151	2	m. vrbová	PERSON
ap-5383	153	1	364	CARDINAL
ap-5383	153	2	2012	DATE
ap-5383	154	1	doi:10.1088/1742-6596/370/1/012049	PERSON
ap-5383	155	1	9	CARDINAL
ap-5383	155	2	m. vrbova	PERSON
ap-5383	155	3	s. v. zakharov	PERSON
ap-5383	155	4	v. s. zakharov.	PERSON
ap-5383	157	1	21(7):073301, 2014	DATE
ap-5383	158	1	doi:10.1063/1.4887295	NORP
ap-5383	159	1	10	CARDINAL
ap-5383	160	1	www.ioe.wat.edu.pl/	GPE
ap-5383	160	2	2013	DATE
ap-5383	160	3	27	CARDINAL
ap-5383	160	4	october 2019	DATE
ap-5383	161	1	11	CARDINAL
ap-5383	161	2	s. kranzusch	PERSON
ap-5383	161	3	k. mann	PERSON
ap-5383	162	1	200(1):223	CARDINAL
ap-5383	162	2	230, 2001	DATE
ap-5383	163	1	doi:10.1016	PERSON
ap-5383	164	1	12	CARDINAL
ap-5383	164	2	s. vondrova	PERSON
ap-5383	164	3	m. vrbova	PERSON
ap-5383	166	1	2012	DATE
ap-5383	166	2	11	CARDINAL
ap-5383	167	1	euv litho inc	ORG
ap-5383	167	2	austin	GPE
ap-5383	167	3	2012	DATE
ap-5383	168	1	13	CARDINAL
ap-5383	168	2	r. rakowski	PERSON
ap-5383	168	3	a. bartnik	PERSON
ap-5383	168	4	h. fiedorowicz	PERSON
ap-5383	168	5	ccd	PRODUCT
ap-5383	169	1	144, 2005	DATE
ap-5383	170	1	doi:10.1016/j.nima.2005.07.047	ORG
ap-5383	171	1	591	CARDINAL
ap-5383	171	2	http://dx.doi.org/10.1117/12.2529468 http://dx.doi.org/10.1088/1742-6596/370/1/012049 http://dx.doi.org/10.1063/1.4887295	PERSON
ap-5383	172	1	salačová	GPE
ap-5383	172	2	p. wachulak	PERSON
ap-5383	172	3	m. tatíček	PERSON
ap-5383	172	4	m. vrbová acta polytechnica	PERSON
ap-5383	173	1	14	CARDINAL
ap-5383	175	1	1997	DATE
ap-5383	175	2	14 june 2019	DATE
ap-5383	176	1	15	CARDINAL
ap-5383	176	2	w. wachulak	PERSON
ap-5383	176	3	a. torrisi	PERSON
ap-5383	176	4	a. bartnik	PERSON
ap-5383	177	1	118(4):573–578	CARDINAL
ap-5383	177	2	2015	DATE
ap-5383	178	1	59(6):587–592	CARDINAL
ap-5383	178	2	2019 1	DATE
ap-5383	178	3	2	CARDINAL
ap-5383	178	4	3	CARDINAL
ap-5383	178	5	4	CARDINAL
ap-5383	178	6	5	CARDINAL
ap-5383	178	7	5.1	CARDINAL
ap-5383	178	8	5.2	CARDINAL
ap-5383	178	9	5.3	CARDINAL
ap-5383	178	10	5.4	CARDINAL
ap-5383	178	11	6	CARDINAL