id	sid	eid	entity	type
ap-5680	1	1	acta polytechnica doi:10.14311	PERSON
ap-5680	1	2	60(5):435–439	DATE
ap-5680	1	3	2020	DATE
ap-5680	1	4	czech technical university	ORG
ap-5680	1	5	prague	GPE
ap-5680	1	6	2020	DATE
ap-5680	1	7	mihail stoyanov mihaleva,∗	PERSON
ap-5680	1	8	christo georgiev christovb	PERSON
ap-5680	1	9	harald leistec	ORG
ap-5680	1	10	university of sofia	ORG
ap-5680	1	11	8 kl	QUANTITY
ap-5680	1	12	ohridski blvd	GPE
ap-5680	1	13	1000	CARDINAL
ap-5680	1	14	bulgaria b technical university of sofia	ORG
ap-5680	1	15	8 kl	QUANTITY
ap-5680	1	16	ohridski blvd	GPE
ap-5680	1	17	1000	CARDINAL
ap-5680	1	18	bulgaria	GPE
ap-5680	1	19	karlsruhe institute of technology	ORG
ap-5680	1	20	hermann-von-helmholtz-platz 1,	PERSON
ap-5680	1	21	76344	CARDINAL
ap-5680	1	22	germany	GPE
ap-5680	1	23	karlsruhe institute of technology	ORG
ap-5680	1	24	hermann-von-helmholtz-platz	PERSON
ap-5680	1	25	1	CARDINAL
ap-5680	1	26	76344	CARDINAL
ap-5680	1	27	germany	GPE
ap-5680	3	1	one	CARDINAL
ap-5680	7	1	1	CARDINAL
ap-5680	9	1	1952	DATE
ap-5680	9	2	2d	DATE
ap-5680	11	1	iso/ies 15415	ORG
ap-5680	12	1	1	CARDINAL
ap-5680	13	1	nasa	ORG
ap-5680	13	2	2	CARDINAL
ap-5680	14	1	usa	GPE
ap-5680	14	2	eu	GPE
ap-5680	17	1	one	CARDINAL
ap-5680	19	1	only one	CARDINAL
ap-5680	19	2	3	CARDINAL
ap-5680	19	3	4	CARDINAL
ap-5680	22	1	435 https://doi.org/10.14311/ap.2020.60.0435	QUANTITY
ap-5680	22	2	m. s. mihalev	PERSON
ap-5680	22	3	c. m. hardalov	PERSON
ap-5680	22	4	c. g. christov	PERSON
ap-5680	22	5	1	CARDINAL
ap-5680	24	1	2	CARDINAL
ap-5680	24	2	2.1	CARDINAL
ap-5680	24	3	304	CARDINAL
ap-5680	25	1	3	CARDINAL
ap-5680	25	2	4	CARDINAL
ap-5680	26	1	5	CARDINAL
ap-5680	27	1	80w	CARDINAL
ap-5680	29	1	2.2	CARDINAL
ap-5680	30	1	1	CARDINAL
ap-5680	30	2	alm	PERSON
ap-5680	30	3	9788420 532318	DATE
ap-5680	31	1	sony	ORG
ap-5680	32	1	bm13	ORG
ap-5680	33	1	2.3	CARDINAL
ap-5680	35	1	2	CARDINAL
ap-5680	36	1	3	CARDINAL
ap-5680	36	2	4	CARDINAL
ap-5680	37	1	50µm	DATE
ap-5680	38	1	2	CARDINAL
ap-5680	40	1	2	CARDINAL
ap-5680	42	1	3	CARDINAL
ap-5680	42	2	3.1	CARDINAL
ap-5680	43	1	3.1.1	CARDINAL
ap-5680	44	1	kit karlsruhe	PERSON
ap-5680	46	1	3	CARDINAL
ap-5680	49	1	fig	ORG
ap-5680	50	1	3	CARDINAL
ap-5680	50	2	2d	DATE
ap-5680	50	3	6	CARDINAL
ap-5680	52	1	600	CARDINAL
ap-5680	52	2	700	CARDINAL
ap-5680	52	3	68%	PERCENT
ap-5680	52	4	gs1	ORG
ap-5680	52	5	at least 15%	PERCENT
ap-5680	54	1	3.2	CARDINAL
ap-5680	55	1	3.2.1	CARDINAL
ap-5680	59	1	4	CARDINAL
ap-5680	60	1	4	CARDINAL
ap-5680	60	2	6	CARDINAL
ap-5680	61	1	436	CARDINAL
ap-5680	62	1	60	CARDINAL
ap-5680	63	1	3	CARDINAL
ap-5680	64	1	4	CARDINAL
ap-5680	65	1	437	CARDINAL
ap-5680	65	2	m. s. mihalev	PERSON
ap-5680	65	3	c. m. hardalov	PERSON
ap-5680	65	4	c. g. christov	PERSON
ap-5680	65	5	75%	PERCENT
ap-5680	65	6	12%	PERCENT
ap-5680	65	7	44%	PERCENT
ap-5680	65	8	1	CARDINAL
ap-5680	66	1	3.2.2	CARDINAL
ap-5680	67	1	6	CARDINAL
ap-5680	68	1	4	CARDINAL
ap-5680	68	2	1	CARDINAL
ap-5680	69	1	3.2.3	CARDINAL
ap-5680	71	1	sc	GPE
ap-5680	72	1	650	CARDINAL
ap-5680	73	1	3	CARDINAL
ap-5680	73	2	77 %	PERCENT
ap-5680	73	3	12 %	PERCENT
ap-5680	74	1	77 %	PERCENT
ap-5680	74	2	12 %	PERCENT
ap-5680	74	3	65 %	PERCENT
ap-5680	76	1	ec	ORG
ap-5680	76	2	two	CARDINAL
ap-5680	77	1	sc	GPE
ap-5680	78	1	4	CARDINAL
ap-5680	78	2	2	CARDINAL
ap-5680	78	3	ec	ORG
ap-5680	78	4	32.7 %	PERCENT
ap-5680	79	1	3.2.5	CARDINAL
ap-5680	79	2	ecmin/sc modulation	ORG
ap-5680	80	1	32.7 %	PERCENT
ap-5680	80	2	65 %	PERCENT
ap-5680	80	3	0.5	CARDINAL
ap-5680	83	1	2	CARDINAL
ap-5680	85	1	as more than one	CARDINAL
ap-5680	87	1	4	CARDINAL
ap-5680	87	2	11	CARDINAL
ap-5680	87	3	21.9 %	PERCENT
ap-5680	87	4	13.8 %	PERCENT
ap-5680	87	5	8.1 %	PERCENT
ap-5680	88	1	8.1 %	PERCENT
ap-5680	88	2	65 %	PERCENT
ap-5680	88	3	0.13 3.2.7	CARDINAL
ap-5680	89	1	5	CARDINAL
ap-5680	89	2	between 264 and 660	CARDINAL
ap-5680	91	1	1	CARDINAL
ap-5680	91	2	fig.	DATE
ap-5680	92	1	4	CARDINAL
ap-5680	93	1	approximately 270 µm	CARDINAL
ap-5680	93	2	50mm	QUANTITY
ap-5680	94	1	3	CARDINAL
ap-5680	95	1	4	CARDINAL
ap-5680	97	1	3	CARDINAL
ap-5680	98	1	4	CARDINAL
ap-5680	98	2	44%	PERCENT
ap-5680	98	3	1	CARDINAL
ap-5680	99	1	5	CARDINAL
ap-5680	99	2	6	CARDINAL
ap-5680	100	1	266	CARDINAL
ap-5680	101	1	3	CARDINAL
ap-5680	102	1	6	CARDINAL
ap-5680	103	1	3	CARDINAL
ap-5680	103	2	4	CARDINAL
ap-5680	103	3	i. e.	PERSON
ap-5680	106	1	438	CARDINAL
ap-5680	107	1	60	CARDINAL
ap-5680	108	1	14	CARDINAL
ap-5680	108	2	ec	ORG
ap-5680	108	3	32.7	CARDINAL
ap-5680	109	1	47.5	CARDINAL
ap-5680	109	2	54.5 58.0	CARDINAL
ap-5680	109	3	59.8	CARDINAL
ap-5680	109	4	2	CARDINAL
ap-5680	110	1	4	CARDINAL
ap-5680	110	2	70 %	PERCENT
ap-5680	110	3	15 %	PERCENT
ap-5680	110	4	0.7 ≤ 0.15 3	MONEY
ap-5680	110	5	55 %	PERCENT
ap-5680	110	6	0.6 ≤ 0.20 2	MONEY
ap-5680	110	7	40 %	PERCENT
ap-5680	110	8	0.5 ≤	MONEY
ap-5680	110	9	20 %	PERCENT
ap-5680	110	10	0.4 ≤	MONEY
ap-5680	110	11	20 < 15 %	PERCENT
ap-5680	110	12	0.4	CARDINAL
ap-5680	110	13	0.30	CARDINAL
ap-5680	110	14	63%	PERCENT
ap-5680	110	15	32.7%	PERCENT
ap-5680	110	16	0.5 0.13	CARDINAL
ap-5680	110	17	3	CARDINAL
ap-5680	111	1	5	CARDINAL
ap-5680	111	2	•	CARDINAL
ap-5680	111	3	only one	CARDINAL
ap-5680	113	1	•	CARDINAL
ap-5680	114	1	karlsruhe institute of technology	ORG
ap-5680	114	2	karlsruhe	GPE
ap-5680	114	3	germany	GPE
ap-5680	114	4	german	NORP
ap-5680	114	5	daad	GPE
ap-5680	115	1	1	CARDINAL
ap-5680	115	2	iso/iec 15415	ORG
ap-5680	115	3	two	CARDINAL
ap-5680	116	1	standard, international organization for standardization	ORG
ap-5680	116	2	geneva	GPE
ap-5680	116	3	2011	DATE
ap-5680	117	1	2	CARDINAL
ap-5680	118	1	washington	GPE
ap-5680	118	2	2002	DATE
ap-5680	119	1	3	CARDINAL
ap-5680	119	2	m. s. mihalev	PERSON
ap-5680	119	3	c. m. hardalov	PERSON
ap-5680	119	4	c. g. christov	PERSON
ap-5680	120	1	57(4):252	CARDINAL
ap-5680	120	2	262	CARDINAL
ap-5680	120	3	2017	DATE
ap-5680	122	1	4	CARDINAL
ap-5680	122	2	m. mihalev	PERSON
ap-5680	122	3	c. hardalov	PERSON
ap-5680	122	4	c. christov	PERSON
ap-5680	123	1	514, 2014	DATE
ap-5680	124	1	doi:10.1088/1742-6596/514/1/012022	PERSON
ap-5680	125	1	5	CARDINAL
ap-5680	125	2	borisova	PERSON
ap-5680	125	3	e. p. surovoy	PERSON
ap-5680	126	1	zakonomernosty izmeneniya opticheskih svoistv nanorazmernyh sloev oxida	ORG
ap-5680	127	1	izvestiya tomskogo polytechnicheskogo	ORG
ap-5680	127	2	310(3):68	CARDINAL
ap-5680	127	3	72, 2007	DATE
ap-5680	129	1	6	CARDINAL
ap-5680	129	2	182	CARDINAL
ap-5680	130	1	american national standards institute	ORG
ap-5680	130	2	washington	GPE
ap-5680	130	3	1990	DATE
ap-5680	131	1	7	CARDINAL
ap-5680	132	1	4.3	CARDINAL
ap-5680	132	2	gs1	GPE
ap-5680	132	3	washington	GPE
ap-5680	132	4	2009	DATE
ap-5680	133	1	439	CARDINAL
ap-5680	134	1	60(5):435–439	DATE
ap-5680	134	2	1	CARDINAL
ap-5680	134	3	2	CARDINAL
ap-5680	134	4	2.1	CARDINAL
ap-5680	134	5	2.2	CARDINAL
ap-5680	134	6	2.3	CARDINAL
ap-5680	134	7	3	CARDINAL
ap-5680	134	8	3.1	CARDINAL
ap-5680	134	9	3.1.1	CARDINAL
ap-5680	134	10	3.2	CARDINAL
ap-5680	134	11	3.2.1	CARDINAL
ap-5680	134	12	3.2.2	CARDINAL
ap-5680	134	13	3.2.3	CARDINAL
ap-5680	134	14	3.2.4	CARDINAL
ap-5680	134	15	ec	ORG
ap-5680	134	16	3.2.5	CARDINAL
ap-5680	134	17	3.2.7	CARDINAL
ap-5680	134	18	4	CARDINAL
ap-5680	134	19	5	CARDINAL